JPH0641614A - Vibrator for ultrasonic motor - Google Patents
Vibrator for ultrasonic motorInfo
- Publication number
- JPH0641614A JPH0641614A JP4080138A JP8013892A JPH0641614A JP H0641614 A JPH0641614 A JP H0641614A JP 4080138 A JP4080138 A JP 4080138A JP 8013892 A JP8013892 A JP 8013892A JP H0641614 A JPH0641614 A JP H0641614A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- vibrator
- ultrasonic motor
- sintered
- sizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Powder Metallurgy (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波モーター用振動
体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator for an ultrasonic motor.
【０００２】[0002]
【従来技術とその問題点】超音波モーターは、多数個の
スリットを備えた振動体に圧電素子を接着し、該圧電素
子に周波電圧を印加して、その振動体に進行性振動波を
発生させることにより、該振動体に接触している移動体
を駆動するというものである。2. Description of the Related Art In ultrasonic motors, a piezoelectric element is bonded to a vibrating body having a large number of slits, a frequency voltage is applied to the piezoelectric element, and a progressive vibration wave is generated in the vibrating body. By doing so, the moving body in contact with the vibrating body is driven.
【０００３】従来より、超音波モーターの振動体の材料
としては、溶製材によるリン青銅、ステンレス鋼等が知
られている。しかし、これらの材料を用いると、スリッ
トを設けるための機械加工が困難であるため、多大な労
力と時間を要し、経済的な不利を伴う。Conventionally, as a material for a vibrating body of an ultrasonic motor, there have been known phosphor bronze made of ingot material, stainless steel and the like. However, when these materials are used, it is difficult to perform machining for forming the slits, which requires a great deal of labor and time and is economically disadvantageous.
【０００４】そこで、上記問題の解消を図るべく、その
振動体として鉄系、銅系等の焼結体を用いる試みがなさ
れている。これによれば、スリットの作成が成形段階で
行なえるので、上記の溶製材の場合のような機械加工が
不要となり、振動体を比較的容易に且つ経済的に作成す
ることができるという利点を有する。Therefore, in order to solve the above problems, attempts have been made to use an iron-based or copper-based sintered body as the vibrating body. According to this, since the slits can be formed at the molding stage, there is no need for machining as in the case of the above ingot material, and there is an advantage that the vibration body can be relatively easily and economically formed. Have.
【０００５】しかしながら、上記焼結体からなる振動体
は、溶製材よりも密度が低いということに起因して、そ
の性能面においては溶製材からなる振動体より劣るとこ
ろもみられ、これをさらに改善する余地があった。However, the vibrating body made of the above sintered body is inferior to the vibrating body made of the ingot in terms of performance due to its lower density than that of the ingot, which is further improved. There was room to do it.
【０００６】[0006]
【問題点を解決するための手段】本発明は、安価で且つ
溶製材による振動体よりも優れた性能を発揮できる超音
波モーター用振動体を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a vibration body for an ultrasonic motor, which is inexpensive and can exhibit superior performance to a vibration body made of ingot material.
【０００７】本発明者は、焼結体からなる振動体におけ
る問題点について鋭意検討した結果、サイジング又はコ
イニング処理を施した焼結体を、超音波モーター用の振
動体として用いる場合には、予想外にも優れた性能を発
揮することを見出した。さらに、焼結体として気孔中に
銅を溶浸させたものを用いる場合には、より優れた効果
が達成できることを見出し、本発明を完成した。As a result of earnest studies on the problems in the vibrating body made of a sintered body, the present inventor expected that a sintered body subjected to sizing or coining treatment would be used as a vibrating body for an ultrasonic motor. It was found that it also exhibits excellent performance outside. Furthermore, they have found that a more excellent effect can be achieved when a sintered body in which pores are infiltrated with copper is used, and completed the present invention.
【０００８】即ち、本発明は、 １．振動体が備えられている圧電素子に周波電圧を印加
することにより、該振動体に進行性振動波を発生せし
め、該進行性振動波によって該振動体に接触している移
動体を駆動する超音波モーターにおいて、該振動体がサ
イジング又はコイニング処理されている焼結体であるこ
とを特徴とする超音波モーター用振動体、及び ２．振動体が備えられている圧電素子に周波電圧を印加
することにより、該振動体に進行性振動波を発生せし
め、該進行性振動波によって該振動体に接触している移
動体を駆動する超音波モーターにおいて、該振動体が気
孔中に銅又は銅合金が溶浸されている焼結体であって、
且つ該焼結体がサイジング又はコイニング処理されてい
ることを特徴とする超音波モーター用振動体、に係るも
のである。That is, the present invention is as follows: By applying a frequency voltage to a piezoelectric element provided with a vibrating body, a progressive vibration wave is generated in the vibrating body, and the moving body in contact with the vibrating body is driven by the progressive vibration wave. 1. In an ultrasonic wave motor, the vibrating body is a sintered body that has been subjected to sizing or coining treatment, and 1. By applying a frequency voltage to a piezoelectric element provided with a vibrating body, a progressive vibration wave is generated in the vibrating body, and the moving body in contact with the vibrating body is driven by the progressive vibration wave. In the sonic motor, the vibrating body is a sintered body in which copper or copper alloy is infiltrated into pores,
The present invention also relates to an ultrasonic motor vibrating body, wherein the sintered body is subjected to sizing or coining treatment.
【０００９】以下、本発明について詳細に説明する。The present invention will be described in detail below.
【００１０】本発明で使用する焼結体としては、基本的
なモーター特性、例えば３０〜６０ＫＨｚ程度のところ
で共振周波数を有するものであれば良い。具体的には、
鉄系であればＦｅ（−Ｃ）系、Ｆｅ−Ｃｕ（−Ｃ）系、
Ｆｅ−Ｎｉ（−Ｃ）系等、ステンレス鋼系であればフェ
ライト系ステンレス鋼、マルテンサイト系ステンレス鋼
等が挙げられる。また、上記の原料の粉体粒度は、通常
１５０μｍ以下のものを使用するのが好ましい。The sintered body used in the present invention may have any basic motor characteristics, for example, a resonance frequency at about 30 to 60 KHz. In particular,
If iron-based, Fe (-C) -based, Fe-Cu (-C) -based,
If stainless steel such as Fe-Ni (-C) is used, ferritic stainless steel, martensite stainless steel, etc. may be mentioned. The powder particle size of the above raw material is preferably 150 μm or less.
【００１１】次に、成形時においては、粉末冶金法で一
般的に行なわれている成形方法を用いればよく、得られ
る成形体の密度が６．０〜７．４g/cm3 程度となるよう
に成形圧を調節する。また、同時に必要に応じて潤滑剤
（ステアリン酸亜鉛）などの添加剤を加えてもよい。Next, at the time of molding, a molding method generally used in powder metallurgy may be used so that the density of the obtained molded body is about 6.0 to 7.4 g / cm 3. Adjust the molding pressure. At the same time, if necessary, additives such as a lubricant (zinc stearate) may be added.
【００１２】続いて、成形体の焼結を常法に従って行な
う。通常その焼結温度は１０００〜１２５０℃程度、焼
結時間は１０〜１２０分程度で、水素ガス或いは窒素ガ
ス等の非酸化性保護雰囲気中で焼結させる。Subsequently, the compact is sintered according to a conventional method. Usually, the sintering temperature is about 1000 to 1250 ° C., the sintering time is about 10 to 120 minutes, and the sintering is performed in a non-oxidizing protective atmosphere such as hydrogen gas or nitrogen gas.
【００１３】焼結後、上記焼結体を金型内に挿入し、寸
法精度を維持すると同時に密度を向上させるために２〜
１０ton/cm2 程度、好ましくは４〜８ton/cm2 の圧力を
加えつつ、サイジング又はコイニング処理を行なう。After sintering, the sintered body is inserted into a mold to maintain the dimensional accuracy and at the same time improve the density.
10ton / cm 2, preferably about while applying a pressure of 4~8ton / cm 2, sizing or coining process.
【００１４】なお、本発明では、銅又は銅合金を溶浸し
た焼結体にサイジング又はコイニング処理を行えば、振
動体としてより優れた性能を発揮することができる。こ
の溶浸方法としては、焼結体の上に塊状の銅を置いて、
水素ガスあるいは窒素ガスなどの非酸化性保護雰囲気中
１０８０〜１１５０℃程度で１０〜１２０分程度で再び
焼成を行なえばよい。尚、前記焼結工程と溶浸工程を同
時に行なってもよい。銅以外で溶浸させることのできる
銅合金としては、例えばＣｕ−Ｃｏ合金、Ｃｕ−Ｆｅ−
Ｍｎ−Ｚｎ合金などを挙げることができる。また銅の溶
浸量としては、焼結体の内部に存在する気孔のうち、溶
浸可能な気孔の４０％以上に溶浸させることが好まし
い。In the present invention, if a sintered body infiltrated with copper or a copper alloy is subjected to sizing or coining treatment, a more excellent performance as a vibrating body can be exhibited. As this infiltration method, put massive copper on the sintered body,
The firing may be performed again in a non-oxidizing protective atmosphere such as hydrogen gas or nitrogen gas at about 1080 to 1150 ° C. for about 10 to 120 minutes. The sintering process and the infiltration process may be performed at the same time. Examples of copper alloys that can be infiltrated with other than copper include Cu—Co alloys and Cu—Fe—
Examples thereof include Mn-Zn alloy. As for the amount of copper infiltrated, it is preferable to infiltrate 40% or more of the pores that can be infiltrated among the pores existing inside the sintered body.
【００１５】[0015]
【発明の効果】本発明によれば、以下のような優れた効
果が得られる。According to the present invention, the following excellent effects can be obtained.
【００１６】（１）本発明の振動体は、成形時に予めス
リットを設けることができるので、従来の溶製材の振動
体の場合のようなスリット作成のための機械加工を不要
にできる。(1) Since the vibrating body of the present invention can be preliminarily provided with slits at the time of molding, it is possible to eliminate the need for machining for forming slits as in the case of the vibrating body of the conventional ingot material.
【００１７】（２）本発明振動体では、サイジング又は
コイニング処理を施して振動体自身の密度を高めること
により、そのＱ値の大幅な向上を図ることが可能とな
る。(2) In the vibrating body of the present invention, the Q value can be greatly improved by subjecting the vibrating body to sizing or coining to increase the density of the vibrating body itself.
【００１８】（３）本発明の振動体では、サイジング又
はコイニング処理を施して高い寸法精度を実現すること
により、共振周波数のバラツキを抑制し、より実用性の
高い超音波モーターを提供することができる。(3) The vibrating body of the present invention is subjected to sizing or coining treatment to realize high dimensional accuracy, thereby suppressing variations in resonance frequency and providing an ultrasonic motor of higher practicality. it can.
【００１９】（４）銅を溶浸させた本発明の振動体は、
進行性振動波のエネルギーを移動体に高エネルギー効率
で伝えることができると同時に、従来の溶製材のものに
比して優れた放熱性を実現できるので、超音波モーター
には最適な振動体と言える。(4) The vibrator of the present invention infiltrated with copper is
The energy of the progressive vibration wave can be transmitted to the moving body with high energy efficiency, and at the same time, the excellent heat dissipation can be realized compared with the conventional ingot material. I can say.
【００２０】[0020]
【実施例】以下、実施例及び比較例を示し、本発明の特
徴をより明らかにする。EXAMPLES Hereinafter, the characteristics of the present invention will be made clearer by showing Examples and Comparative Examples.
【００２１】実施例１ 表１に示すような組成の原料粉末にステアリン酸１％を
添加して混合した。得られた混合粉末を６ton/cm2 の成
形圧力にて成形した後、非酸化雰囲気中にて焼結温度１
１００℃で焼結を行なった。その後、金型の表面に、溶
剤（アセトン）に潤滑剤としてステアリン酸亜鉛を溶解
させた液を塗布し、この焼結体をこの金型内に挿入し、
パンチを通して６ton/cm2 の圧力でサイジングして振動
体を得た。Example 1 1% of stearic acid was added to and mixed with a raw material powder having the composition shown in Table 1. After molding the obtained mixed powder under a molding pressure of 6 ton / cm 2 , the sintering temperature is 1 in a non-oxidizing atmosphere.
Sintering was performed at 100 ° C. After that, the surface of the mold is coated with a solution of zinc stearate dissolved in a solvent (acetone) as a lubricant, and the sintered body is inserted into the mold,
A vibrator was obtained by sizing with a pressure of 6 ton / cm 2 through the punch.
【００２２】以上のようにして得られた振動体の密度、
平面度及びＱ値を測定した。その結果を表２に示す。ま
た、上記と同様にして共振周波数測定用の振動体を５０
個作成し、共振周波数を測定してそのバラツキを調べ
た。その結果を表２に示す。The density of the vibrating body obtained as described above,
The flatness and Q value were measured. The results are shown in Table 2. In addition, in the same manner as above, the vibration body for measuring the resonance frequency is set to 50
Individual pieces were prepared, and the resonance frequency was measured to examine the variation. The results are shown in Table 2.
【００２３】実施例２ 焼結体に、溶浸材として銅（２０％）を溶浸させた以外
は、実施例１と同様にして振動体を作成した。この振動
体の密度、平面度及びＱ値を測定した結果を表２に示
す。また、同様にして共振周波数測定用の振動体を５０
個作成し、共振周波数を測定してそのバラツキを調べ
た。その結果も表２に示す。Example 2 A vibrator was prepared in the same manner as in Example 1 except that the sintered body was infiltrated with copper (20%) as an infiltrant. Table 2 shows the results of measuring the density, flatness and Q value of this vibrator. In addition, similarly, a vibration body for measuring the resonance frequency is set to 50
Individual pieces were prepared, and the resonance frequency was measured to examine the variation. The results are also shown in Table 2.
【００２４】実施例３ 原料粉末としてＳＵＳ４１０Ｌに相当する組成の粉末を
用いた以外は、実施例１と同様にして振動体を作成し
た。この振動体の密度、平面度及びＱ値を測定した結果
を表２に示す。同様にして共振周波数測定用の振動体を
５０個作成し、共振周波数を測定してそのバラツキを調
べた。その結果も表２に示す。Example 3 A vibrating body was prepared in the same manner as in Example 1 except that a powder having a composition corresponding to SUS410L was used as the raw material powder. Table 2 shows the results of measuring the density, flatness and Q value of this vibrator. Similarly, 50 vibrating bodies for measuring the resonance frequency were prepared, the resonance frequency was measured, and the variation was examined. The results are also shown in Table 2.
【００２５】比較例１ 実施例１においてサイジンク処理が施されていない振動
体を作成し、実施例１と同様の測定を行なった。この結
果を表２に示す。Comparative Example 1 A vibrating body which was not subjected to the Saizink treatment in Example 1 was prepared, and the same measurement as in Example 1 was performed. The results are shown in Table 2.
【００２６】比較例２ 実施例２においてサイジンク処理が施されていない振動
体を作成し、実施例２と同様の測定を行なった。この結
果を表２に示す。Comparative Example 2 A vibrating body which was not treated with Saizink in Example 2 was prepared, and the same measurement as in Example 2 was performed. The results are shown in Table 2.
【００２７】比較例３ 実施例３においてサイジンク処理が施されていない振動
体を作成し、実施例３と同様の測定を行なった。この結
果を表２に示す。Comparative Example 3 A vibrating body which was not treated with Saizink in Example 3 was prepared, and the same measurement as in Example 3 was performed. The results are shown in Table 2.
【００２８】[0028]
【表１】 [Table 1]
【００２９】[0029]
【表２】 [Table 2]
【００３０】以上の結果より、本発明の超音波モーター
用の振動体は、寸法精度が良好で優れた性能を発揮する
ことができ、超音波モーター用の振動体として最適であ
ることがわかる。From the above results, it is understood that the vibrating body for the ultrasonic motor of the present invention has good dimensional accuracy and can exhibit excellent performance, and is optimal as the vibrating body for the ultrasonic motor.
Claims (2)
圧を印加することにより、該振動体に進行性振動波を発
生せしめ、該進行性振動波によって該振動体に接触して
いる移動体を駆動する超音波モーターにおいて、該振動
体がサイジング又はコイニング処理されている焼結体で
あることを特徴とする超音波モーター用振動体。1. A progressive vibration wave is generated in a vibrating body by applying a frequency voltage to a piezoelectric element provided with the vibrating body, and the moving vibration is in contact with the vibrating body. An ultrasonic motor for driving a body, wherein the vibrating body is a sintered body that has been subjected to sizing or coining treatment.
圧を印加することにより、該振動体に進行性振動波を発
生せしめ、該進行性振動波によって該振動体に接触して
いる移動体を駆動する超音波モーターにおいて、該振動
体が気孔中に銅又は銅合金が溶浸されている焼結体であ
って、且つ該焼結体がサイジング又はコイニング処理さ
れていることを特徴とする超音波モーター用振動体。2. A progressive vibration wave is generated in the vibrating body by applying a frequency voltage to a piezoelectric element provided with the vibrating body, and the moving vibration is brought into contact with the vibrating body. In an ultrasonic motor for driving a body, the vibrating body is a sintered body in which pores are infiltrated with copper or a copper alloy, and the sintered body is sized or coined. Vibration body for ultrasonic motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4080138A JPH0641614A (en) | 1992-04-02 | 1992-04-02 | Vibrator for ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4080138A JPH0641614A (en) | 1992-04-02 | 1992-04-02 | Vibrator for ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0641614A true JPH0641614A (en) | 1994-02-15 |
Family
ID=13709899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4080138A Pending JPH0641614A (en) | 1992-04-02 | 1992-04-02 | Vibrator for ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641614A (en) |
-
1992
- 1992-04-02 JP JP4080138A patent/JPH0641614A/en active Pending
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