JPH063988B2 - Actuator dust-proof structure - Google Patents
Actuator dust-proof structureInfo
- Publication number
- JPH063988B2 JPH063988B2 JP26581985A JP26581985A JPH063988B2 JP H063988 B2 JPH063988 B2 JP H063988B2 JP 26581985 A JP26581985 A JP 26581985A JP 26581985 A JP26581985 A JP 26581985A JP H063988 B2 JPH063988 B2 JP H063988B2
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- hollow cylindrical
- cylindrical body
- axially
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 この発明は、中空円筒体の内部に回転および軸方向移動
自在に配設した駆動軸を、この中空円筒体の外周に回転
方向および軸方向の移動可能に配置した磁石との磁気的
結合を利用して非接触で駆動し得るよう構成した真空装
置用のアクチュエータにおいて、強磁性体の微粉塵が経
時的に外部より侵入して前記磁石に吸着され、当該磁石
の中空円筒体に対する円滑な動きが阻害されるのを有効
に防止し得るよう構成したアクチュエータの防塵構造に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drive shaft arranged inside a hollow cylinder so as to be rotatable and axially movable, and to move around the outer circumference of the hollow cylinder in the rotational and axial directions. In a vacuum device actuator configured to be driven in a non-contact manner by using magnetic coupling with a magnet that is arranged as possible, fine dust of a ferromagnetic substance intrudes from the outside over time and is attracted to the magnet. The present invention relates to a dustproof structure of an actuator configured to effectively prevent smooth movement of the magnet with respect to the hollow cylindrical body.
従来技術 周知の如く集積回路やトランジスタ等の半導体関連産業
では、その製造工程の多くに真空応用機器が使用されて
いる。また高度の真空状態を必要とする真空チャンバー
は、磁気記録素子や表示素子等の製造分野にも利用さ
れ、その他真空炉やスパッタ室での蒸着作業にも高真空
技術は不可欠となっている。BACKGROUND ART As is well known, in semiconductor-related industries such as integrated circuits and transistors, vacuum application equipment is used in many of the manufacturing processes. Further, the vacuum chamber requiring a high degree of vacuum state is also used in the field of manufacturing magnetic recording elements, display elements and the like, and high vacuum technology is also indispensable for vapor deposition work in a vacuum furnace and a sputtering chamber.
これら各種の技術分野で使用される真空応用装置や、真
空利用技術の開発や研究のために使用される試験装置等
は、一般に外気と完全に遮断された真空容器内で、高真
空度を損うことのない条件下で円滑に作動するものであ
ることが要請される。しかるに前記真空容器中に収納し
た各種のワークや試料は、該容器中で直線移動および/
または回転移動させてその姿勢を変換する必要が往々に
してあり、このために外部から非接触で真空容器内のワ
ーク等を駆動する装置が必要とされる。また前記真空応
用機器以外にも、放射性液体や有毒液体の如く外部への
漏洩を厳重に防止する必要のある物質の収納容器や、そ
の流体管路系に使用するバルブ等の駆動機構にも、外部
から非接触で操作可能なアクチュエータが要請されてい
る。Vacuum application equipment used in these various technical fields and test equipment used for the development and research of vacuum utilization technology generally impair the high degree of vacuum in a vacuum container completely shielded from the outside air. It is required to operate smoothly under conditions that do not warp. Therefore, various works and samples stored in the vacuum container are linearly moved and / or moved in the container.
Alternatively, it is often necessary to rotate and move it to change its posture, and for this reason, an apparatus for driving a work or the like in a vacuum container from the outside without contact is required. Further, in addition to the vacuum applied equipment, a storage container for a substance such as a radioactive liquid or a toxic liquid that needs to be strictly prevented from leaking to the outside, or a drive mechanism such as a valve used for the fluid pipeline system, There is a demand for an actuator that can be operated without contact from the outside.
こうした産業界の需要に応えるものとして、本件出願人
は、中空筒体の内部に配設した強磁性体芯と、該筒体の
外周に対応的に配置した磁石との磁気的結合を利用して
前記強磁性体芯の非接触駆動を行ない、この強磁性体芯
に挿通固定した駆動軸を軸方向移動および回転移動させ
得るアクチュエータを新規に開発した。In order to meet the demands of the industrial world, the applicant of the present invention utilizes magnetic coupling between a ferromagnetic core arranged inside a hollow cylinder and a magnet arranged corresponding to the outer circumference of the cylinder. In this way, an actuator has been newly developed which can drive the ferromagnetic core in a non-contact manner and axially and rotationally move the drive shaft inserted and fixed in the ferromagnetic core.
例えば第1図に示すアクチュエータにおいて、中空円筒
体18は18−8SUS(ステンレス)の如き非磁性材
料を材質とし、その一方の開放端部は真空装置(図示せ
ず)中に連通され、他方の閉塞端部は装置外方に水平に
突出延在している。この中空円筒体18中には、駆動軸
16が同軸的に支持されて、回転および軸線方向に移動
し得るようになっている。前記駆動軸16には、13C
r系電磁ステンレスの如き耐食性の強磁性材料を材質と
する軸方向の長いコアからなる強磁性体芯20が、軸方
向の挿通固定されている。この強磁性体芯20の横断面
は、第2図に示すように、例えば6極のモータ回転子の
形状を呈しており、前記駆動軸16の軸方向に、非磁性
体のスペーサ24を介して所要間隔で複数個配設され
る。For example, in the actuator shown in FIG. 1, the hollow cylindrical body 18 is made of a non-magnetic material such as 18-8SUS (stainless steel), one open end of which is communicated with a vacuum device (not shown), and the other is open. The closed end extends horizontally outside the device. The drive shaft 16 is coaxially supported in the hollow cylindrical body 18 so that the drive shaft 16 can rotate and move in the axial direction. The drive shaft 16 has 13C
A ferromagnetic core 20 made of a long axial core made of a corrosion-resistant ferromagnetic material such as r-type electromagnetic stainless steel is inserted and fixed in the axial direction. As shown in FIG. 2, the cross section of the ferromagnetic core 20 is in the shape of, for example, a 6-pole motor rotor, and a nonmagnetic spacer 24 is interposed in the axial direction of the drive shaft 16. And a plurality of them are arranged at required intervals.
また中空円筒体18の外周には、回転方向および軸方向
への移動を許容するスライドメタル等のスライダ機構2
6,26を介して、円筒状操作体27が前記円筒体18
と同軸的に配設され、前記スライダ機構26,26と共
に回転移動および軸方向移動し得るようになっている。
この円筒状操作体27の内周面軸方向には、強磁性体の
環状ヨーク28が、スペーサ32を介して所要間隔で複
数個配設され、各環状ヨーク28の内周面には、第2図
に示すように、半径方向に所定の中心角で複数個(n個)
の希土類磁石30a〜30nが隣接配置されている。Further, on the outer periphery of the hollow cylindrical body 18, a slider mechanism 2 such as a slide metal that allows movement in the rotational direction and the axial direction is provided.
6 and 26, the cylindrical operating body 27 is
Is arranged coaxially with the slider mechanism 26, so that it can move rotationally and axially together with the slider mechanisms 26, 26.
In the axial direction of the inner peripheral surface of the cylindrical operating body 27, a plurality of annular yokes 28 made of a ferromagnetic material are arranged at required intervals via spacers 32. As shown in Fig. 2, a plurality (n pieces) with a predetermined center angle in the radial direction
The rare earth magnets 30a to 30n are arranged adjacent to each other.
この場合において、前記環状ヨーク28に配置した夫々
の希土類磁石30は、前記円筒状操作体27の軸方向に
隣接する環状ヨーク28に対応的に配置し希土類磁石3
0に対して、好ましくは相互に異極となるよう配列して
ある。すなわち第1図に示す如く、左端の希土類磁石3
0がN極であるならば、隣接する対応の希土類磁石30
の極性は、順次右方に向けてS極,N極・・・となるよ
う配列することが推奨される。In this case, the rare earth magnets 30 arranged on the annular yoke 28 are arranged so as to correspond to the annular yokes 28 adjacent in the axial direction of the cylindrical operating body 27.
It is arranged such that the polarities of 0 are different from each other. That is, as shown in FIG. 1, the rare earth magnet 3 at the left end is
If 0 is the N pole, then the corresponding corresponding rare earth magnet 30
It is recommended that the polarities of are arranged so that the polarities are sequentially S pole, N pole, ... To the right.
なお前記複数個の強磁性体芯20は、各環状ヨーク28
の内周面に所要の間隔で配設される前記複数個の磁石3
0と、中空円筒体18を介して磁気結合するような対応
位置関係に設定されている。The plurality of ferromagnetic cores 20 are connected to each annular yoke 28.
The plurality of magnets 3 arranged at required intervals on the inner peripheral surface of the
0 and a corresponding positional relationship such that magnetic coupling is performed via the hollow cylindrical body 18.
このように構成したことにより、第1図に示す如く、強
磁性体芯20の軸方向に形成された複数個の突条部20
aと、同じく軸方向の複数個配設された希土類磁石30
とが中空円筒体18を隔てて近接的に対応しているた
め、高い密度の磁束を軸方向および円周方向に関して平
均に集束することができる。従って円筒状操作体27
を、中空円筒体18に沿って回転移動または軸方向移動
させることにより、その希土類磁石30と磁気結合して
いる強磁性体芯20および駆動軸16を良好に回転移動
または軸方向移動させることができる。With this configuration, as shown in FIG. 1, a plurality of ridges 20 formed in the axial direction of the ferromagnetic core 20.
a, and a plurality of rare earth magnets 30 similarly arranged in the axial direction
Since and correspond closely to each other across the hollow cylindrical body 18, high-density magnetic flux can be uniformly focused in the axial direction and the circumferential direction. Therefore, the cylindrical operating body 27
Is rotationally or axially moved along the hollow cylindrical body 18, so that the ferromagnetic core 20 and the drive shaft 16 magnetically coupled to the rare earth magnet 30 can be favorably rotationally or axially moved. it can.
発明が解決しようとする問題点 このアクチュエータは、大気圧下にある外界から真空室
中の各種ワークの非接触で良好に駆動し得る点で高く評
価されるが、前述の如く強力な希土類磁石30を、軸1
6を移動させるための駆動源として使用しているので、
この希土類磁石30に強磁性体の微粉塵が経時的に吸引
付着されて、中空円筒体18に対する円筒状操作体27
の円滑な摺動が妨げられる欠点がある。すなわち機器の
使用環境によっては、鉄粉のような強磁性体の微粉塵が
空中に多く浮遊し、これらの外部の微粉塵が、前記スラ
イダ機構26と中空円筒体18との間の僅かな空隙を介
して、該中空円筒体18と希土類磁石30との間に画成
される空間内に侵入し、前記希土類磁石30に強力に吸
着されるものである。この微粉塵がスライダ機構26と
中空円筒体18との間を通過する際に、その一部が当該
スライダ機構26の摺動面に付着する。そして経時的に
該微粉塵が堆積成長し、前記スライダ機構26に噛込む
結果として、該機構を早期に摩耗させる原因になってい
る。更にスライダ機構26の摩耗によって、円筒状操作
体27は中空円筒体18に対して円滑に摺動し得なくな
る。Problems to be Solved by the Invention This actuator is highly evaluated in that it can be favorably driven from the outside world under atmospheric pressure without contact of various works in the vacuum chamber, but as described above, the strong rare earth magnet 30 is used. Axis 1
Since it is used as a drive source for moving 6,
The fine dust of ferromagnetic material is attracted and adhered to the rare earth magnet 30 over time, and the cylindrical operating body 27 with respect to the hollow cylindrical body 18 is
There is a drawback that the smooth sliding of That is, depending on the environment in which the device is used, a large amount of ferromagnetic fine dust such as iron powder floats in the air, and these external fine dust may cause a slight gap between the slider mechanism 26 and the hollow cylindrical body 18. Through the hollow cylindrical body 18 and the rare earth magnet 30 and is strongly attracted to the rare earth magnet 30. When this fine dust passes between the slider mechanism 26 and the hollow cylindrical body 18, a part thereof adheres to the sliding surface of the slider mechanism 26. The fine dust accumulates and grows over time, and as a result of being caught in the slider mechanism 26, it causes the mechanism to wear early. Further, due to the wear of the slider mechanism 26, the cylindrical operating body 27 cannot slide smoothly on the hollow cylindrical body 18.
この場合は、希土類磁石30を固定した円筒状操作体2
7を中空円筒体18から取り外して、磁石面から微粉塵
を拭き取ることになるが、前記微粉塵は強力に磁気吸着
されているために、この拭き取りは一般に困難である。In this case, the cylindrical operating body 2 having the rare earth magnet 30 fixed thereto
7 is removed from the hollow cylindrical body 18 and fine dust is wiped off from the magnet surface, but this fine dust is strongly magnetically adsorbed, and this wiping is generally difficult.
発明の目的 本発明は、従来技術に係るアクチュエータに内在してい
る前述した欠点に鑑み、これを良好に解決すべく提案さ
れたものであって、外部から到来して磁石面に吸着する
微粉塵の量を有効に減少させると共に、該磁石面に微粉
塵が吸着しても容易に除去可能にして、中空円筒体に対
する磁石の円滑な動きを常に確保することを目的とす
る。OBJECT OF THE INVENTION The present invention has been proposed in order to solve the above-mentioned drawbacks inherent in the actuator according to the prior art, and is a fine dust that comes from the outside and is attracted to the magnet surface. It is an object of the present invention to effectively reduce the amount of the magnet and to easily remove even if fine dust is adsorbed on the magnet surface, so that the smooth movement of the magnet with respect to the hollow cylindrical body is always ensured.
問題点を解決するための手段 前記目的を達成するため本発明は、非磁性材料からなる
中空円筒体の内部に回転および軸方向移動自在に挿通配
置した駆動軸に、複数個の耐食性強磁性体芯を軸方向に
所要の間隔を保持して挿通固定すると共に、前記中空円
筒体の外周に回転および軸方向移動自在に複数個の磁石
を配置し、前記磁石を回転および軸方向移動させること
によって、前記耐食性強磁性体芯との磁気的結合作用下
に前記駆動軸を回転駆動および軸方向駆動し得るように
構成した真空装置用のアクチュエータにおいて、前記磁
石の中空円筒体外周面に指向する側に、非磁性体からな
る円筒状のカバーを配設したことを特徴とする。Means for Solving the Problems In order to achieve the above-mentioned object, the present invention provides a plurality of corrosion-resistant ferromagnetic materials on a drive shaft rotatably and axially movably inserted in a hollow cylindrical body made of a non-magnetic material. By inserting and fixing the core at a required interval in the axial direction and arranging a plurality of magnets on the outer periphery of the hollow cylindrical body so as to be rotatable and axially movable, and rotating and axially moving the magnets. An actuator for a vacuum device configured to be capable of rotationally driving and axially driving the drive shaft under a magnetic coupling action with the corrosion-resistant ferromagnetic core, the side of the magnet facing the outer peripheral surface of the hollow cylinder. In addition, a cylindrical cover made of a non-magnetic material is provided.
実施例 次に本発明に係るアクチュエータにつき、好適な実施例
を挙げて説明する。本発明の防塵構造が応用されるアク
チュエータの基本構造は、第1図に関連して説明したア
クチュエータと全く同一であるので、この第1図および
第2図を参照して説明するものとする。Examples Next, the actuator according to the present invention will be described with reference to preferred examples. Since the basic structure of the actuator to which the dustproof structure of the present invention is applied is exactly the same as the actuator described with reference to FIG. 1, it will be described with reference to FIGS. 1 and 2.
図示のアクチュエータにおいて、円筒状操作体27に環
状ヨーク28を介して配設した希土類磁石30には、当
該磁石30が中空円筒体18の外周面に指向する側の円
筒状のカバー34を配設してある。この円筒状カバー3
4は、非磁性材料の薄板、例えば硬質合成樹脂で構成さ
れ、円筒状操作体27を中空円筒体18に摺動自在に支
持する前記スライダ機構26,26の間に亘って、全面
的に介在している。この場合に円筒状カバー34の厚み
は、該カバー34と中空円筒体18の外周円との間に環
状の間隔が形成されるよう、予め厚み寸法の設定をして
おく。In the illustrated actuator, the rare earth magnet 30 provided on the cylindrical operating body 27 via the annular yoke 28 is provided with a cylindrical cover 34 on the side where the magnet 30 is directed to the outer peripheral surface of the hollow cylindrical body 18. I am doing it. This cylindrical cover 3
Reference numeral 4 is a thin plate made of a non-magnetic material, for example, a hard synthetic resin, and is entirely interposed between the slider mechanisms 26, 26 slidably supporting the cylindrical operating body 27 on the hollow cylindrical body 18. is doing. In this case, the thickness of the cylindrical cover 34 is set in advance so that an annular gap is formed between the cover 34 and the outer circumferential circle of the hollow cylindrical body 18.
第3図は本発明の別の実施例を示すものであって、この
アクチュエータは、駆動軸を軸線方向に進退駆動する推
力部Pと、軸線を中心に回転駆動する回転部Rとを備え
ている。すなわち推力部Pの第1強磁性体芯20は円筒
状コアであって、中空円筒体18内において、駆動軸1
6に挿通固定されている。この第1の強磁性体芯20
は、その外周方向に所定間隔で環状溝部25を穿設する
ことにより、2個以上の円板形状部29が画成されてい
る。また第1の強磁性体芯20に対応して、中空円筒体
18の外周に第1の外部磁気構体22が軸線方向および
円周方向への移動可能に挿通配置されている。この第1
の外部磁気構体22は、第1のリング状ヨーク28およ
びリング状の第1の希土類磁石30を軸方向に交互に隣
接配置してなり、殊に磁極となる第1のリング状ヨーク
28と、第1の強磁性体芯20の円板形状部29とが中
空円筒体18を隔てて相互に対応する位置関係に設定さ
れている。FIG. 3 shows another embodiment of the present invention. This actuator is provided with a thrust portion P that drives the drive shaft forward and backward in the axial direction, and a rotating portion R that rotates the drive shaft about the axis. There is. That is, the first ferromagnetic core 20 of the thrust portion P is a cylindrical core, and in the hollow cylindrical body 18, the drive shaft 1
It is inserted and fixed in 6. This first ferromagnetic core 20
Two or more disc-shaped portions 29 are defined by forming annular groove portions 25 at predetermined intervals in the outer peripheral direction thereof. Further, a first external magnetic body structure 22 is disposed on the outer periphery of the hollow cylindrical body 18 so as to be movable in the axial direction and the circumferential direction so as to correspond to the first ferromagnetic core 20. This first
In the outer magnetic structure 22, the first ring-shaped yoke 28 and the ring-shaped first rare earth magnets 30 are alternately arranged adjacent to each other in the axial direction, and in particular, the first ring-shaped yoke 28 serving as a magnetic pole, The disk-shaped portion 29 of the first ferromagnetic core 20 is set in a mutually corresponding positional relationship with the hollow cylindrical body 18 interposed therebetween.
回転部Rの第2の強磁性体芯21は、駆動軸16に挿通
固定した軸方向に長いコアとして構成され、その横断面
は第5図に示すように、6極のモータ回転子の形状を呈
している。また第2強磁性体芯21に対応して、中空円
筒体18の外周に第2の外部磁気構体23が軸線方向お
よび円周方向への移動可能に挿通配置されている。この
第2の外部磁気構体23は、第2のリング状ヨーク36
と、この第2のヨーク36に第5図に示す如き配列で、
半径方向に所定の中心角をなすよう隣接配置した複数個
(n個)の第2の希土類磁石38a〜38nとから構成さ
れる。The second ferromagnetic core 21 of the rotating portion R is configured as an axially long core that is inserted through and fixed to the drive shaft 16, and its transverse cross section has a 6-pole motor rotor shape as shown in FIG. Is presenting. Further, a second external magnetic structure 23 is disposed on the outer periphery of the hollow cylindrical body 18 so as to be movable in the axial direction and the circumferential direction so as to correspond to the second ferromagnetic core 21. The second external magnetic structure 23 includes a second ring-shaped yoke 36.
And in the second yoke 36 with the arrangement as shown in FIG.
Plural pieces arranged adjacent to each other with a predetermined center angle in the radial direction
(n pieces) of second rare earth magnets 38a to 38n.
なお推力部Pにおける第1磁気構体22および回転部R
における第2の磁気構体23は、円筒状操作体27によ
り連結され、この円筒状操作体27はスライダ機構2
6,26を介して中空円筒体18の外周を軸方向および
円周方向に移動し得るようになっている。The first magnetic structure 22 and the rotating portion R in the thrust portion P
The second magnetic structure 23 in is connected by a cylindrical operating body 27, and the cylindrical operating body 27 is connected to the slider mechanism 2
The outer circumference of the hollow cylindrical body 18 can be moved in the axial direction and the circumferential direction via 6, 26.
この第3図に示すアクチュエータにおいても、円筒状操
作体27の内周に固定したリング状の第1の希土類磁石
30および第2の希土類磁石38a〜38nには、当該
磁石が中空円筒体18の外周面に指向する側に円筒状の
カバー34を配設してある。この円筒状カバー34も非
磁性材料の薄板で構成され、前記スライダ機構26,2
6の間に亘って、全面的に介在している。この場合の円
筒状カバー34の厚みは、該カバー34と中空円筒体1
8の外周面との間に、環状の間隙が形成されるよう予め
厚み寸法の設定をしておくことは同様である。Also in the actuator shown in FIG. 3, in the ring-shaped first rare earth magnet 30 and the second rare earth magnets 38a to 38n fixed to the inner circumference of the cylindrical operating body 27, the magnet is the hollow cylindrical body 18. A cylindrical cover 34 is provided on the side facing the outer peripheral surface. The cylindrical cover 34 is also made of a thin plate of a non-magnetic material, and has the slider mechanisms 26, 2
6 is entirely intervened. The thickness of the cylindrical cover 34 in this case is the same as that of the cover 34 and the hollow cylindrical body 1.
Similarly, the thickness dimension is set in advance so that an annular gap is formed between the outer peripheral surface and the outer peripheral surface.
発明の効果 このように構成した本発明に係るアクチュエータの防塵
構造によれば、円筒状操作体の内部に配設した希土類磁
石と中空円筒体との間には、非磁性体からなる円筒状カ
バーが全面的に介在しているので、該カバーによって強
磁性体の微粉塵を磁気吸着する力が弱められ、可及的に
スライダ機構を介して内部に侵入する微粉塵の量を減少
させることができる。従ってスライダ機構の中空円筒体
に対する摺動面が、前記微粉塵の存在により摩耗する欠
点が除去され、円筒状操作体の中空円筒体に対する円滑
な摺動が確保される。EFFECTS OF THE INVENTION According to the dust-proof structure for an actuator according to the present invention configured as described above, the cylindrical cover made of a non-magnetic material is provided between the rare earth magnet and the hollow cylindrical body disposed inside the cylindrical operating body. , The force of magnetically adsorbing the fine dust of the ferromagnetic material is weakened by the cover, and the amount of the fine dust entering the interior through the slider mechanism can be reduced as much as possible. it can. Therefore, a defect that the sliding surface of the slider mechanism with respect to the hollow cylinder is worn due to the presence of the fine dust is eliminated, and smooth sliding of the cylindrical operating body with respect to the hollow cylinder is ensured.
なおこのような防塵対策を施しても、一部の微粉塵は、
不可避的にスライダ機構を介して内部に侵入して磁石面
に吸着される。しかしこのときは、前記非磁性体の円筒
状カバーを介して吸着されるものであるので、中空円筒
体から円筒状操作体を磁石およびカバーごと取外し、該
カバー面に吸着されている微粉塵を、布等により簡単に
拭い取ることができる。Even if such dust prevention measures are taken, some fine dust will
It inevitably enters the inside through the slider mechanism and is attracted to the magnet surface. However, at this time, since it is adsorbed through the non-magnetic cylindrical cover, the cylindrical operating body is removed together with the magnet and the cover from the hollow cylindrical body, and the fine dust adsorbed on the cover surface is removed. It can be easily wiped off with a cloth or the like.
第1図は本発明に係る真空装置用アクチュエータの防塵
構造の一例を示す縦断面図、第2図は第2図のa−a線
横断面図、第3図は本発明に係るアクチュエータの防塵
構造の別の実施例を示す縦断面図、第4図は第3図のa
−a線横断面図、第5図は第3図のb−b線横断面図で
ある。 16‥‥駆動軸、18‥‥中空円筒体 20‥‥強磁性体芯、24‥‥スペーサ 26…スライダ、27…円筒状操作体 28‥‥円筒状ヨーク、30‥‥希土類磁石 34‥‥円筒状カバー1 is a longitudinal sectional view showing an example of a dustproof structure of an actuator for a vacuum device according to the present invention, FIG. 2 is a transverse sectional view taken along the line aa of FIG. 2, and FIG. 3 is a dustproof of the actuator according to the present invention. FIG. 4 is a longitudinal sectional view showing another embodiment of the structure, and FIG. 4 is a in FIG.
-A line cross-sectional view, FIG. 5 is a bb line cross-sectional view of FIG. 16 ... Drive shaft, 18 ... Hollow cylindrical body 20 ... Ferromagnetic core, 24 ... Spacer 26 ... Slider, 27 ... Cylindrical operating body 28 ... Cylindrical yoke, 30 ... Rare earth magnet 34 ... Cylindrical Shaped cover
Claims (2)
転および軸方向移動自在に挿通配置した駆動軸に、複数
個の耐食性強磁性体芯を軸方向に所要の間隔を保持して
挿通固定すると共に、前記中空円筒体の外周に回転およ
び軸方向移動自在に複数個の磁石を配置し、前記磁石を
回転および軸方向移動させることによって、前記耐食性
強磁性体芯との磁気的結合作用下に前記駆動軸を回転駆
動および軸方向駆動し得るように構成したアクチュエー
タにおいて、前記磁石の中空円筒体外周面に指向する側
に、非磁性体からなる円筒状のカバーを配設したことを
特徴とする真空装置用アクチュエータの防塵構造。1. A plurality of corrosion-resistant ferromagnetic cores are inserted into a hollow cylindrical body made of a non-magnetic material so as to be rotatable and axially movable so as to be axially spaced at a required interval. While fixed, a plurality of magnets are arranged on the outer periphery of the hollow cylindrical body so as to be rotatable and axially movable, and the magnets are rotationally and axially moved to magnetically couple with the corrosion-resistant ferromagnetic core. In the actuator configured to be capable of rotationally driving and axially driving the drive shaft below, a cylindrical cover made of a non-magnetic material is provided on the side of the magnet that faces the outer peripheral surface of the hollow cylinder. Dustproof structure of the characteristic actuator for vacuum equipment.
操作体に保持され、この円筒状操作体はその両端部にお
いて、夫々スライダ機構により前記中空円筒体の外周に
回転および軸方向移動自在に支持され、前記円筒状カバ
ーは両スライダ機構の間に介在するよう配設してなる特
許請求の範囲第1項記載の真空装置用アクチュエータの
防塵構造。2. The plurality of magnets are held by a cylindrical operating body via a yoke, and the cylindrical operating body is rotated and axially moved to the outer periphery of the hollow cylindrical body by slider mechanisms at both ends thereof. The dustproof structure for an actuator for a vacuum device according to claim 1, wherein the cylindrical cover is freely supported and is arranged so as to be interposed between both slider mechanisms.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26581985A JPH063988B2 (en) | 1985-11-26 | 1985-11-26 | Actuator dust-proof structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26581985A JPH063988B2 (en) | 1985-11-26 | 1985-11-26 | Actuator dust-proof structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62126860A JPS62126860A (en) | 1987-06-09 |
JPH063988B2 true JPH063988B2 (en) | 1994-01-12 |
Family
ID=17422495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26581985A Expired - Lifetime JPH063988B2 (en) | 1985-11-26 | 1985-11-26 | Actuator dust-proof structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH063988B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4921264B2 (en) * | 2007-07-11 | 2012-04-25 | Nttエレクトロニクス株式会社 | Flexible wiring board |
-
1985
- 1985-11-26 JP JP26581985A patent/JPH063988B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS62126860A (en) | 1987-06-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5376862A (en) | Dual coaxial magnetic couplers for vacuum chamber robot assembly | |
US5313159A (en) | Magnetic encoder with composite magnet | |
JPH02134473A (en) | Magnetic fluid seal assembly | |
CA1135744A (en) | Self-activating ferrofluid seals | |
US4660010A (en) | Rotary latching solenoid | |
US4772032A (en) | Compact magnetic fluid low pressure seal | |
JPH08320083A (en) | Magnetic seal device | |
JPH063988B2 (en) | Actuator dust-proof structure | |
US5057952A (en) | Magnetic fluid sealing apparatus for a magnetic disk drive | |
JPS59231271A (en) | Magnetic fluid sealing device | |
JPS6178200A (en) | Magnetic shielding structure of magnetic drive | |
JPS6176061A (en) | Magnetic shielding structure of magnetic drive device | |
US7679246B2 (en) | Actuator | |
US4648004A (en) | Methods for detecting a magnetic preorientation in mechanical parts and for magnetizing the parts utilizing such detection method, and an associated device for magnetizing the parts in accordance with these methods | |
JPH0624422B2 (en) | Actuator | |
JPH07108088B2 (en) | Actuator | |
JP4942114B2 (en) | Magnetic device | |
JPS60170476A (en) | Magnetic drive device | |
US7312940B2 (en) | Magnetic transfer apparatus | |
JPS61121762A (en) | Actuator | |
JP2597618Y2 (en) | Magnetic fluid sealing device | |
JPH0615365B2 (en) | Transfer device | |
JPS60155066A (en) | Seal structure using magnetic fluid | |
JPS63214578A (en) | Magnetic fluid seal unit | |
JPS62266227A (en) | Enclosed type roller bearing |