JPH0639145Y2 - Gas bearing - Google Patents
Gas bearingInfo
- Publication number
- JPH0639145Y2 JPH0639145Y2 JP1988013519U JP1351988U JPH0639145Y2 JP H0639145 Y2 JPH0639145 Y2 JP H0639145Y2 JP 1988013519 U JP1988013519 U JP 1988013519U JP 1351988 U JP1351988 U JP 1351988U JP H0639145 Y2 JPH0639145 Y2 JP H0639145Y2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- bearing sleeve
- air supply
- main shaft
- sleeve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は高速回転するターボコンプレツサ、タービン、
ターボ分子ポンプ等の主軸を支える気体軸受に関する。[Detailed Description of the Invention] [Industrial field of application] The present invention relates to a turbo compressor, a turbine, which rotates at a high speed,
The present invention relates to a gas bearing that supports a main shaft such as a turbo molecular pump.
第３図は従来の気体軸受の一例であり、歯科用ドリルの
駆動装置に用いられているものの断面図である。１は主
軸、２は軸受スリーブ、２′は軸受リテーナである。３
は軸受ハウジング、４は軸受リテーナを弾性支持してい
るＯリング、５は給気入口、６は軸受スリーブに設けら
れた給気孔、７は主軸を駆動するタービンロータであ
る。FIG. 3 is a cross-sectional view of an example of a conventional gas bearing, which is used in a driving device for a dental drill. Reference numeral 1 is a main shaft, 2 is a bearing sleeve, and 2'is a bearing retainer. Three
Is a bearing housing, 4 is an O-ring that elastically supports the bearing retainer, 5 is an air supply inlet, 6 is an air supply hole provided in the bearing sleeve, and 7 is a turbine rotor that drives the main shaft.
給気入口５に高圧の気体を供給すると、気体は軸受スリ
ーブ２の円周に多数設けられた給気孔６に導かれ、軸受
スリーブ２と主軸１との間にあるすきまに流れる。この
すきまを気体が流れるときの圧力によって主軸１が軸受
スリーブ２より浮上し静圧軸受となる。静圧軸受によっ
て高速回転軸を支持する場合に、気体軸受そのものの性
質上、軸受部２および２′がハウジング３の中で振れ回
りを生ずることがある。この現象の防止対策のひとつと
して軸受部を弾性支持することが行われている。すなわ
ち第３図で、軸受リテーナ２′がＯリング４を介して軸
受ハウジング３に嵌装されている部分が弾性支持部であ
る。軸受リテーナ２′と軸受ハウジング３の間のすきま
を大きく、すなわち軸受スリーブ２と主軸１とのすきま
と同等もしくはそれ以上にしておくことによって、軸受
リテーナ２′は直接軸受ハウジング３に接触せず、軸受
リテーナ２′の力は、Ｏリング４を経て軸受ハウジング
３に伝達される。これはＯリングの調心作用であり、軸
受部2,2′の中心をハウジング３の中心部に保とうとす
るものである。この結果ある程度の高速回転までは振れ
回りを生じることなく回転させることができるようにな
っている。When high-pressure gas is supplied to the air supply inlet 5, the gas is guided to a large number of air supply holes 6 provided on the circumference of the bearing sleeve 2 and flows into a clearance between the bearing sleeve 2 and the main shaft 1. The main shaft 1 floats above the bearing sleeve 2 due to the pressure when the gas flows through this clearance, and becomes a static pressure bearing. When the high-speed rotating shaft is supported by the hydrostatic bearing, the bearing portions 2 and 2'may whirl in the housing 3 due to the nature of the gas bearing itself. As one of the measures to prevent this phenomenon, elastic support of the bearing is performed. That is, in FIG. 3, the portion where the bearing retainer 2 ′ is fitted into the bearing housing 3 via the O-ring 4 is the elastic support portion. By making the clearance between the bearing retainer 2'and the bearing housing 3 large, that is, equal to or more than the clearance between the bearing sleeve 2 and the main shaft 1, the bearing retainer 2'does not directly contact the bearing housing 3 and The force of the bearing retainer 2 ′ is transmitted to the bearing housing 3 via the O ring 4. This is the centering action of the O-ring, and tries to keep the centers of the bearings 2, 2'in the center of the housing 3. As a result, it can be rotated up to a certain high speed without whirling.
気体軸受を弾性支持することによって高速で安定な回転
ができるようになり、また機械装置の小型化が進み、主
軸の直径は小さくなる傾向が生じた。これに伴って次の
ような問題点が生じてきた。By elastically supporting the gas bearing, high-speed and stable rotation became possible, and further downsizing of the mechanical device led to a tendency that the diameter of the main shaft became smaller. As a result, the following problems have arisen.
第４図に示すように、細くて長い軸（フレキシブルシヤ
フト）では高速回転時のたわみのため、軸受部では、主
軸１が傾斜する。軸受スリーブ部分では軸受すきま（主
軸１と軸受スリーブ２のすきま）が小さいため、このと
き片当りし、焼付いたりすることがあり問題となって来
た。As shown in FIG. 4, a thin and long shaft (flexible shaft) is bent at high speed, so that the main shaft 1 is inclined in the bearing portion. Since the bearing clearance (the clearance between the main shaft 1 and the bearing sleeve 2) is small in the bearing sleeve portion, at this time, there is a problem in that one-sided contact and seizure may occur.
また弾性支持気体軸受において、第３図の軸受スリーブ
２、および軸受リテーナ２′は弾性支持Ｏリング４の内
側で可動部をなしている。この可動部の質量は、小さい
方が弾性支持を行っている時の振れ回りの発生を防止す
る効果が大きい。従来の技術においては構造上この可動
部（２および２′）の質量を小さくすることができなか
ったので、回転の一層の高速化傾向に伴って、振れ回り
の防止が再び問題となってきた。In the elastic support gas bearing, the bearing sleeve 2 and the bearing retainer 2 ′ shown in FIG. 3 form a movable portion inside the elastic support O-ring 4. The smaller the mass of the movable portion, the greater the effect of preventing whirling when elastically supporting. In the prior art, it was not possible to reduce the mass of the movable parts (2 and 2 ') due to the structure, so that whirling was becoming faster, prevention of whirling became a problem again. .
本考案はシヤフトのたわみに追随しかつ軸受内での振れ
回りの発生のない気体軸受を提供しようとするものであ
る。The present invention seeks to provide a gas bearing that follows flexure of a shaft and does not generate whirling in the bearing.
本考案は前記の課題を解決したものであって、軸受ハウ
ジングの給気入口から送られた高圧気体を同軸受ハウジ
ングに嵌装された軸受スリーブの給気孔を経由して軸受
スリーブと同軸受スリーブに貫通している主軸との間の
すきまに供給することによって前記主軸を浮上させる気
体軸受において、前記軸受スリーブを薄肉円筒状とし、
同軸受スリーブを弾性支持すると共に給気をシールする
よう軸受ハウジング内に嵌装された一対のＯリングを同
軸受スリーブ中央部の複数個の給気孔に近接して設け、
同軸受スリーブ外周部の給気圧力作用範囲を軸受スリー
ブの軸方向長さの1/2以下としたことを特徴とする気体
軸受に関するものである。The present invention has been made to solve the above-mentioned problems, and the high pressure gas sent from the air supply inlet of the bearing housing is passed through the air supply hole of the bearing sleeve fitted in the bearing housing and the bearing sleeve and the bearing sleeve. In a gas bearing that levitates the main shaft by supplying a clearance between the main shaft and the main shaft, the bearing sleeve has a thin cylindrical shape,
A pair of O-rings fitted in the bearing housing so as to elastically support the bearing sleeve and seal the air supply, are provided in proximity to the plurality of air supply holes in the central portion of the bearing sleeve,
The present invention relates to a gas bearing, characterized in that the operating range of the supply pressure of the outer peripheral portion of the bearing sleeve is set to 1/2 or less of the axial length of the bearing sleeve.
一対のＯリングは軸受スリーブ中央部の給気孔に隣接し
て設けてあるので取付幅が狭くなっており、軸受スリー
ブのほぼ中央部で軸受スリーブを支えている。Ｏリング
の取付幅が狭いことによって軸受スリーブに加わる給気
圧力の作用範囲が小さくなり、当然流体力が小さくな
り、この結果軸受スリーブを薄く軽量化しても、軸受ス
リーブの変形を生ずることがなく、ふれ回りの生じない
気体軸受とすることができる。Since the pair of O-rings are provided adjacent to the air supply hole in the central portion of the bearing sleeve, the mounting width is narrow, and the bearing sleeve is supported almost at the central portion of the bearing sleeve. The narrow mounting width of the O-ring reduces the operating range of the supply pressure applied to the bearing sleeve, which naturally reduces the fluid force. As a result, even if the bearing sleeve is made thin and lightweight, it does not deform. It is possible to use a gas bearing in which no whirling occurs.
また、軸受スリーブの外周部の端部に軸受ハウジングと
のすきまに余裕を持たせることによって、軸受スリーブ
はシャフトの傾斜に対しよく追随するようになる。Further, by providing a clearance in the outer peripheral portion of the bearing sleeve for the clearance with the bearing housing, the bearing sleeve can follow the inclination of the shaft well.
第１図は本考案の一実施例の断面図である。図におい
て、１は主軸、２は軸受スリーブ、３は軸受ハウジン
グ、４は一対のＯリングである。５は給気入口で、図示
されていない外部の高圧気体源に接続される。６は軸受
スリーブに設けられた給気孔で、円周に沿って複数個、
例えば24個程度、設けられている。８は軸受スリーブの
回り止めピン、９は軸受スリーブの抜け止めのスナツプ
リング、10はピン７の頭部からの気体漏洩を防止するガ
スケツトである。FIG. 1 is a sectional view of an embodiment of the present invention. In the figure, 1 is a main shaft, 2 is a bearing sleeve, 3 is a bearing housing, and 4 is a pair of O-rings. Reference numeral 5 denotes an air supply inlet, which is connected to an external high pressure gas source (not shown). Reference numeral 6 is an air supply hole provided in the bearing sleeve.
For example, about 24 are provided. Reference numeral 8 is a detent pin for the bearing sleeve, 9 is a snap ring for preventing the bearing sleeve from coming off, and 10 is a gasket for preventing gas leakage from the head of the pin 7.
本実施例が従来技術と異る点は、軸受リテーナを廃止
し、軸受スリーブ２に直接一対のＯリング４を取付け、
それを軸受ハウジング３に嵌装してあることである。即
ち可動部は軸受スリーブ２のみとしてある。またＯリン
グ14は給気孔に隣接して取付けてあるので、取付幅すな
わち給気圧力の作用範囲は狭いが、もし大きくしなけれ
ばならない場合でも例えば軸受スリーブ２の長さＬの1/
2以下となるようにすることが望ましい。軸受スリーブ
２に作用する流体圧力は上記のように外周部では給気圧
力の作用範囲Ｓの狭い幅だけであるから軸受スリーブ２
の肉厚を薄くしても変形の可能性は小さいので、薄くし
て軽量化をはかっている。また軸受スリーブ２と軸受ハ
ウジング３との間のすきまｄは、主軸のたわみに伴って
軸受スリーブが傾斜しても、軸受スリーブが軸受ハウジ
ングに接触しないだけの十分な余裕あるすきまとしてあ
る。例えば軸受スリーブ２と主軸１とのすきまｅの２〜
５倍程度の大きいすきまとしたものである。なお上記の
すきまは軸受ハウジング、軸受スリーブ、および主軸が
同心状態にある時のすきまを意味している。This embodiment differs from the prior art in that the bearing retainer is eliminated and the bearing sleeve 2 is directly attached with the pair of O-rings 4.
That is, it is fitted in the bearing housing 3. That is, the movable part is only the bearing sleeve 2. Further, since the O-ring 14 is mounted adjacent to the air supply hole, the mounting width, that is, the working range of the air supply pressure is narrow, but even if it needs to be increased, for example, 1 / L of the length L of the bearing sleeve 2.
It is desirable to set it to 2 or less. Since the fluid pressure acting on the bearing sleeve 2 is only the narrow width of the working range S of the supply air pressure in the outer peripheral portion as described above, the bearing sleeve 2
Even if the wall thickness is thin, the possibility of deformation is small, so we are trying to make it thinner and lighter. Further, the clearance d between the bearing sleeve 2 and the bearing housing 3 is a clearance with a sufficient margin so that the bearing sleeve does not come into contact with the bearing housing even if the bearing sleeve inclines due to the deflection of the main shaft. For example, if the clearance e between the bearing sleeve 2 and the main shaft 1 is 2 to
The gap is about 5 times larger. The above clearance means the clearance when the bearing housing, the bearing sleeve, and the main shaft are concentric.
上述の気体軸受において、給気入口５から高圧気体が供
給されると、軸受スリーブ２、軸受ハウジング３および
Ｏリング４に囲まれた気体通路を通って高圧気体が給気
孔６に供給され、主軸１と軸受スリーブ２の間のすきま
に放出され、その圧力によって主軸１が軸受スリーブ２
の中心線上に同心的に浮上する。軸受スリーブ２はＯリ
ングの調心作用によって軸受ハウジング３との同心的位
置関係を保持する。In the gas bearing described above, when high pressure gas is supplied from the air supply inlet 5, the high pressure gas is supplied to the air supply hole 6 through the gas passage surrounded by the bearing sleeve 2, the bearing housing 3 and the O-ring 4, and the main shaft is rotated. 1 is released into the clearance between the bearing sleeve 2 and the pressure causes the main shaft 1 to move to the bearing sleeve 2
Rise concentrically on the center line of. The bearing sleeve 2 maintains a concentric positional relationship with the bearing housing 3 by the centering action of the O-ring.
第２図は上記実施例において主軸１が傾いたときの状態
を示したものである。一対のＯリング４は幅Ｓを小さ
く、また軸受スリーブの中央部に取付けてあるため、そ
の調心作用によって、軸受スリーブの中央部は軸受ハウ
ジング３と同心的位置関係を保つので、主軸１が傾斜し
た場合でも軸受スリーブ２はこれに十分追随して傾斜す
る。従来技術における軸受スリーブの場合は、その端部
にＯリングが取付けてあったので、Ｏリングが圧縮変形
しないかぎり傾斜に追随することはできなかった。FIG. 2 shows a state in which the spindle 1 is tilted in the above embodiment. Since the pair of O-rings 4 has a small width S and is attached to the central portion of the bearing sleeve, the central portion of the bearing sleeve maintains a concentric positional relationship with the bearing housing 3 due to its centering action. Even if the bearing is tilted, the bearing sleeve 2 sufficiently follows this and tilts. In the case of the bearing sleeve according to the conventional technique, the O-ring was attached to the end portion of the bearing sleeve, so that the inclination could not be followed unless the O-ring was compressed and deformed.
また前述のように軸受スリーブ２の外周部に作用する高
圧流体の圧力は、一対のＯリング４の幅、すなわち給気
圧力の作用範囲Ｓのせまい範囲だけであり、従来のよう
に軸受スリーブのほぼ全長にわたって圧力が加わるわけ
ではないので、軸受スリーブの肉厚を薄くして軽量化を
はかることができる。これによって高速回転時の振れ回
りの発生を防止することができる。Further, as described above, the pressure of the high-pressure fluid acting on the outer peripheral portion of the bearing sleeve 2 is only the width of the pair of O-rings 4, that is, the narrow range of the operating range S of the supply air pressure. Since the pressure is not applied over almost the entire length, it is possible to reduce the thickness of the bearing sleeve and reduce the weight. This can prevent whirling from occurring during high-speed rotation.
本考案の気体軸受においては、軸受スリーブの軸方向中
央部に近接して設けたＯリングの間隔すなわち給気圧力
の作用範囲を狭くするので、軸受スリーブに加わる高圧
気体の受圧面積は小さくなり、加わる力が小さく、この
ため軸受スリーブを薄肉化し、軽量化できるので、ふれ
回りの発生しない軸受とすることができる。また、Ｏリ
ングの取付間隔を小さくしたことによる弾性支持部の調
心作用、および軸受スリーブとハウジングの間の十分大
きいすきまの作用によって軸が傾斜しても片当りやそれ
に伴う焼付きに至ることがなくなる。In the gas bearing of the present invention, the space between the O-rings provided close to the axial center of the bearing sleeve, that is, the working range of the supply pressure is narrowed, so that the pressure receiving area of the high pressure gas applied to the bearing sleeve becomes small. The applied force is small, and therefore the bearing sleeve can be made thinner and lighter in weight, so that a bearing free from whirling can be obtained. Further, even if the shaft is tilted, one-sided contact or seizure may occur even if the shaft is tilted due to the centering action of the elastic support portion due to the small O-ring mounting interval and the action of the sufficiently large clearance between the bearing sleeve and the housing. Disappears.
第１図は本考案の一実施例の断面図、第２図は上記実施
例における作用説明図、第３図は従来技術の一例の断面
図、第４図は主軸のたわみの説明図である。 １…主軸、２…軸受スリーブ ２′…軸受リテーナ、３…軸受ハウジング ４…Ｏリング、５…給気入口 ６…給気孔、７…タービンロータ ８…回り止めピン、９…スナツプリング 10…ガスケツトFIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is an operation explanatory view in the above-mentioned embodiment, FIG. 3 is a sectional view of an example of a prior art, and FIG. 4 is an explanatory view of deflection of a main shaft. . DESCRIPTION OF SYMBOLS 1 ... Main shaft, 2 ... Bearing sleeve 2 '... Bearing retainer, 3 ... Bearing housing 4 ... O ring, 5 ... Air supply inlet 6 ... Air supply hole, 7 ... Turbine rotor 8 ... Rotation stop pin, 9 ... Snap ring 10 ... Gasket
Claims (1)
圧気体を同軸受ハウジングに嵌装された軸受スリーブの
給気孔を経由して軸受スリーブと同軸受スリーブに貫通
している主軸との間のすきまに供給することによって前
記主軸を浮上させる気体軸受において、前記軸受スリー
ブを薄肉円筒状とし、同軸受スリーブを弾性支持すると
共に給気をシールするよう軸受ハウジング内に嵌装され
た一対のＯリングを同軸受スリーブ中央部の複数個の給
気孔に近接して設け、同軸受スリーブ外周部の給気圧力
作用範囲を軸受スリーブの軸方向長さの1/2以下とした
ことを特徴とする気体軸受。1. A high pressure gas sent from an air supply inlet of a bearing housing is passed through an air supply hole of a bearing sleeve fitted in the bearing housing and between the bearing sleeve and a main shaft penetrating the bearing sleeve. In a gas bearing in which the main shaft is levitated by supplying it to the clearance, the bearing sleeve has a thin cylindrical shape, and a pair of O's are fitted in the bearing housing so as to elastically support the bearing sleeve and seal the supply air. The ring is provided close to a plurality of air supply holes at the center of the bearing sleeve, and the operating range of the air supply pressure at the outer peripheral portion of the bearing sleeve is set to 1/2 or less of the axial length of the bearing sleeve. Gas bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988013519U JPH0639145Y2 (en) | 1988-02-05 | 1988-02-05 | Gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988013519U JPH0639145Y2 (en) | 1988-02-05 | 1988-02-05 | Gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01118226U JPH01118226U (en) | 1989-08-10 |
| JPH0639145Y2 true JPH0639145Y2 (en) | 1994-10-12 |
Family
ID=31223892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988013519U Expired - Lifetime JPH0639145Y2 (en) | 1988-02-05 | 1988-02-05 | Gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639145Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101876482B1 (en) * | 2011-11-29 | 2018-07-10 | 노반타 테크놀로지스 유케이 리미티드 | Gas bearing spindles and gas bearing assemblies for gas bearing spindles |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5308280B2 (en) * | 2009-08-30 | 2013-10-09 | 株式会社タンケンシールセーコウ | Static pressure gas bearing |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4007973A (en) * | 1973-03-20 | 1977-02-15 | Roger Bernard Collins | Fluid bearings |
| JPS5644903U (en) * | 1979-09-17 | 1981-04-22 |
-
1988
- 1988-02-05 JP JP1988013519U patent/JPH0639145Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101876482B1 (en) * | 2011-11-29 | 2018-07-10 | 노반타 테크놀로지스 유케이 리미티드 | Gas bearing spindles and gas bearing assemblies for gas bearing spindles |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01118226U (en) | 1989-08-10 |
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