JPH0634470A - Diaphragm pressure sensor - Google Patents
Diaphragm pressure sensorInfo
- Publication number
- JPH0634470A JPH0634470A JP18846792A JP18846792A JPH0634470A JP H0634470 A JPH0634470 A JP H0634470A JP 18846792 A JP18846792 A JP 18846792A JP 18846792 A JP18846792 A JP 18846792A JP H0634470 A JPH0634470 A JP H0634470A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- metal case
- pressure sensor
- hollow ring
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ダイアフラム型圧力セ
ンサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diaphragm type pressure sensor.
【０００２】[0002]
【従来の技術】頭記したダイアフラム型圧力センサとし
て、カップ状金属ケースの開口面に歪ゲージを貼付けた
金属箔のダイアフラムを被せ、金属ケースとダイアフラ
ムの周縁との間をシール接合して構成したものが公知で
ある。図３はかかるダイアフラム型圧力センサの従来構
造を示すものであり、図において、１はカップ状金属ケ
ース、２は金属ケース１の開口端面に被着した金属箔で
作られた平板状のダイアフラム、３は金属ケース１の端
面（上面）とここに重ね合わせたダイアフラム２の周縁
の間をシール接合した半田層、４はダイアフラム２の裏
側の面（金属ケースの内側）に貼付けた歪ゲージ、４ａ
は歪ゲージ４に接続した信号取出し用のリード線、５は
金属ケース１の側壁に穿孔した前記リード線４ａの引出
し穴を閉塞するエポキシ樹脂などの封止樹脂である。2. Description of the Related Art As the above-mentioned diaphragm type pressure sensor, the opening surface of a cup-shaped metal case is covered with a diaphragm made of a metal foil having a strain gauge attached thereto, and the metal case and the periphery of the diaphragm are sealed and joined. Things are known. FIG. 3 shows a conventional structure of such a diaphragm type pressure sensor. In the figure, 1 is a cup-shaped metal case, 2 is a flat plate-shaped diaphragm made of a metal foil adhered to the opening end surface of the metal case 1, Reference numeral 3 denotes a solder layer in which an end surface (upper surface) of the metal case 1 and a peripheral edge of the diaphragm 2 superposed on the same are sealed and joined, and 4 is a strain gauge attached to a back surface (inside the metal case) of the diaphragm 2
Is a lead wire for taking out a signal connected to the strain gauge 4, and 5 is a sealing resin such as an epoxy resin that closes the lead hole of the lead wire 4a formed in the side wall of the metal case 1.
【０００３】かかる構成で、金属ケース１とダイアフラ
ム２とで囲まれた密封空間には例えば１気圧の気相が封
じ込められている。そして、ダイアフラム２を受圧面と
して外部より測定圧を加えると、内外圧力差によってダ
イアフラム２が変形し、その変形量は歪ゲージ４により
電気信号に変換して取出され、外部の測定回路でゲージ
圧に換算して計測される。With such a structure, a gas phase of 1 atm, for example, is enclosed in a sealed space surrounded by the metal case 1 and the diaphragm 2. When a measurement pressure is applied from the outside with the diaphragm 2 as the pressure receiving surface, the diaphragm 2 is deformed due to the pressure difference between the inside and the outside, and the deformation amount is converted into an electric signal by the strain gauge 4 and taken out, and the gauge pressure is measured by an external measurement circuit. It is converted to and measured.
【０００４】[0004]
【発明が解決しようとする課題】ところで、前記したダ
イアフラム型圧力センサの従来構造では、構造，耐環境
性の面で次記のような難点がある。すなわち、 （１）金属ケース１とダイアフラム２の周縁を半田３に
よりシール接合しているため、例えば周囲温度１００℃
以上の高温環境で使用すると、金属ケース１の内部空間
に封入されている気相が体積膨張してダイアフラム２が
図３の鎖線で表すように外方に向けて湾曲するようにな
り、その周縁の半田接合部に対し接合面を剥離する方向
に応力を加える。一方、半田層３は高温に晒されると接
合力が低下するので、結果として半田接合面が簡単に剥
離して金属ケース１とダイアフラム２との間のシール機
能が喪失し、圧力測定が不能となるといったトラブルが
生じる。However, the conventional structure of the diaphragm type pressure sensor described above has the following problems in terms of structure and environmental resistance. That is, (1) Since the peripheral edges of the metal case 1 and the diaphragm 2 are seal-joined with the solder 3, for example, the ambient temperature is 100 ° C.
When used in the above high temperature environment, the gas phase enclosed in the inner space of the metal case 1 expands in volume and the diaphragm 2 bends outward as shown by the chain line in FIG. A stress is applied to the solder joint in the direction of peeling the joint surface. On the other hand, when the solder layer 3 is exposed to a high temperature, the bonding force decreases, and as a result, the solder bonding surface is easily peeled off and the sealing function between the metal case 1 and the diaphragm 2 is lost, making pressure measurement impossible. Trouble occurs.
【０００５】（２）歪ゲージを保護するために歪ゲージ
４をダイアフラム２の裏側の面に貼付けているが、この
構造では歪ゲージのリード線４ａを外部に引き出すのに
金属ケース１の側面にリード線の引出し穴を穿孔し、さ
らにリード線４ａを引出した後に該引出し穴を封止樹脂
５で塞ぐ必要があるなど製作に手間が掛かる。本発明は
上記の点にかんがみなされたものであり、その目的は前
記課題を解決し、高温環境での測定を可能にして信頼性
を高め、さらに歪ゲージを保護しつつそのリード線を簡
単に外部へ引き出せるようにしたダイアフラム型圧力セ
ンサ、特にその組立構造を提供することにある。(2) The strain gauge 4 is attached to the back surface of the diaphragm 2 in order to protect the strain gauge. In this structure, the lead wire 4a of the strain gauge is attached to the side surface of the metal case 1 to be pulled out. Since it is necessary to form a lead-out hole for the lead wire and further to lead out the lead wire 4a, the lead-out hole needs to be closed with the sealing resin 5, which is troublesome to manufacture. The present invention has been made in view of the above points, and an object thereof is to solve the problems described above, to improve reliability by enabling measurement in a high temperature environment, and to further simplify the lead wire while protecting the strain gauge. It is an object of the present invention to provide a diaphragm type pressure sensor that can be pulled out to the outside, and particularly to provide an assembly structure thereof.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明の圧力センサにおいては、カップ状金属ケー
スとダイアフラムとの間を抵抗溶接により接合するとと
もに、ダイアフラムの周縁をサンドイッチ状に挟んで金
属ケースと反対側に中空リングを重ね合わせ、かつ該中
空リングを含めてセンサ組立体の外周面を接合封止材で
一体に封止して構成するものとする。In order to achieve the above object, in the pressure sensor of the present invention, the cup-shaped metal case and the diaphragm are joined by resistance welding, and the periphery of the diaphragm is sandwiched. Then, a hollow ring is superposed on the side opposite to the metal case, and the outer peripheral surface of the sensor assembly including the hollow ring is integrally sealed with a joint sealing material.
【０００７】また、前記構成における接合封止材には半
田を用い、金属ケース，ダイアフラム，中空リングから
なるセンサ組立体の外周面全域に半田層を被着して各部
品の相互間を封止するのがよい。さらに、歪ゲージのリ
ード線引出し構造を簡略化するために、歪ゲージをダイ
アフラムの表側の面に貼付け、該歪ゲージのリード線を
中空リングの開口面より外部に引出す構成がある。In addition, solder is used as the joint sealing material in the above construction, and a solder layer is applied to the entire outer peripheral surface of the sensor assembly consisting of the metal case, the diaphragm and the hollow ring to seal the parts from each other. Good to do. Further, in order to simplify the lead wire drawing structure of the strain gauge, there is a structure in which the strain gauge is attached to the front surface of the diaphragm and the lead wire of the strain gauge is drawn to the outside from the opening surface of the hollow ring.
【０００８】[0008]
【作用】前記の構成において、まず、金属ケースとダイ
アフラムの周縁との間を抵抗溶接することで両者間の接
合強度が半田接合に比べて格段に高まるとともに、この
溶接接合部をサンドイッチ状に挟んで金属ケースと反対
側に中空リングを重ね合わせて固定することにより、高
温環境での金属ケース内の気相膨張が基で生じるダイア
フラムの湾曲は中空リングより内周側の面域に規制され
るので、前記の抵抗溶接部には接合面を剥離するような
不当な応力の加わることがなくなる。In the above structure, first, resistance welding is performed between the metal case and the peripheral edge of the diaphragm, so that the joint strength between the two is significantly increased as compared with the solder joint, and the welded joint is sandwiched between them. By fixing the hollow ring by overlapping it on the side opposite to the metal case, the curvature of the diaphragm caused by the vapor phase expansion in the metal case in the high temperature environment is restricted to the inner surface area of the hollow ring. Therefore, undue stress such as peeling off the joint surface is not applied to the resistance welding portion.
【０００９】一方、金属ケース，ダイアフラム，中空リ
ングからなるセンサ組立体の外周を一体に覆った接合封
止材（半田層）は、金属ケースと中空リングとの間の接
合，並びに金属ケースとダイアフラムとの間の接合面を
気密封止する役目を果たす。しかも、前記のように中空
リングの追加設置により、ダイアフラム自身が湾曲して
も外周面に被覆した封止層には何等応力の加わるおそれ
はなく、これにより高いシール性の維持が確保される。On the other hand, the joint sealing material (solder layer) integrally covering the outer periphery of the sensor assembly consisting of the metal case, the diaphragm and the hollow ring is used for the joint between the metal case and the hollow ring, and the metal case and the diaphragm. Plays a role of hermetically sealing the joint surface between and. Moreover, by additionally installing the hollow ring as described above, even if the diaphragm itself is curved, there is no risk of any stress being applied to the sealing layer covering the outer peripheral surface, and this ensures the high sealing performance.
【００１０】また、中空リングはダイアフラムの表側の
面上に貼付けた歪ゲージに対する防護用の周壁としての
役目も果たす。しかも、歪ゲージをダイアフラムの表側
の面上に貼付けることで、リード線は金属ケースを貫通
するような厄介な手段を採らずに、中空リングの開口面
を通じて外方へ直接引き出すことができるる。Further, the hollow ring also serves as a peripheral wall for protection against a strain gauge attached to the front surface of the diaphragm. Moreover, by attaching the strain gauge to the front surface of the diaphragm, the lead wire can be directly pulled out through the opening surface of the hollow ring without taking the troublesome means of penetrating the metal case. .
【００１１】[0011]
【実施例】以下本発明の実施例を図１，図２に基づいて
説明する。なお、図中で図３に対応する同一部材には同
じ符号が付してある。図示実施例において、まず歪ゲー
ジ４を表側の面（受圧面側）貼付けたダイアフラム２の
周縁が抵抗溶接法により金属ケース１の端面にシーム溶
接ないしはスポット溶接して固定されている。なお、６
は抵抗溶接部を示す。また、ダイアフラム２の周縁部を
サンドイッチ状に挟んで金属ケース１と反対側には中空
リング７が重ね合わせてあり、かつ該中空リング７を含
めてセンサ組立体の外周面には接合封止材として半田層
８をデッピング法により被着し、この半田層８で金属ケ
ース１と中空リング７との一体接合，および金属ケース
１とダイアフラム２との間のシールを行っている。さら
に歪ゲージ４のリード線４ａは中空リング７の開口面を
通じて外部に引出してある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS. In the figure, the same members corresponding to those in FIG. 3 are designated by the same reference numerals. In the illustrated embodiment, first, the peripheral edge of the diaphragm 2 to which the strain gauge 4 is attached on the front surface (pressure receiving surface side) is fixed to the end surface of the metal case 1 by seam welding or spot welding by resistance welding. 6
Indicates a resistance weld. Further, a hollow ring 7 is superposed on the side opposite to the metal case 1 with the peripheral edge of the diaphragm 2 sandwiched between them, and a bonding sealing material is provided on the outer peripheral surface of the sensor assembly including the hollow ring 7. As a result, a solder layer 8 is deposited by a depping method, and the solder layer 8 integrally joins the metal case 1 and the hollow ring 7 and seals the metal case 1 and the diaphragm 2. Further, the lead wire 4a of the strain gauge 4 is drawn out through the opening surface of the hollow ring 7.
【００１２】上記の構成で、測定圧が中空リング７の開
口面を通じてダイアフラム２に加わり、金属ケース１内
に封入された気相圧との差圧に基づくダイアフラム２の
歪量が歪ゲージ４で検出される。また、周囲温が高温
（１００℃〜）になると、金属ケース１内の気相の膨張
に伴ってダイアフラム２が凸状に湾曲変形するが、ダイ
アフラムの周縁は金属ケース１と中空リング７との間に
サンドイッチ状に挟持して拘束されているので、抵抗溶
接部６，および外周面の半田層８に接合面を剥離するよ
うな応力の加わることがなく、これにより金属ケース１
とダイアフラム２との間のシール機能が確実に保持され
る。また、中空リング７は歪ゲージ４に対する防護隔壁
としての役目も果し、圧力センサの使用，取扱時に歪ゲ
ージ４に物に触れて破損するのを防ぐ。With the above structure, the measured pressure is applied to the diaphragm 2 through the opening surface of the hollow ring 7, and the strain gauge 4 measures the strain amount of the diaphragm 2 based on the differential pressure from the gas phase pressure enclosed in the metal case 1. To be detected. Further, when the ambient temperature becomes high (100 ° C. or higher), the diaphragm 2 is convexly curved and deformed due to the expansion of the gas phase in the metal case 1, but the peripheral edge of the diaphragm is between the metal case 1 and the hollow ring 7. Since they are sandwiched and constrained in a sandwiched manner, no stress is applied to the resistance welding portion 6 and the solder layer 8 on the outer peripheral surface so as to separate the joint surface.
The sealing function between the diaphragm 2 and the diaphragm 2 is reliably retained. Further, the hollow ring 7 also serves as a protective partition for the strain gauge 4, and prevents the strain gauge 4 from being touched and damaged when the pressure sensor is used or handled.
【００１３】かかる点について発明者等の行った実機テ
ストによれは、図３の従来構造では周囲温度が８０℃以
上になるとダイアフラム２のシール機能が喪失して圧力
測定が不能となるのに対し、図１の構造によれば周囲温
度が２倍の１６０℃でも安全に測定できることが確認さ
れている。なお、実際の圧力測定時には、周囲温度の変
化に伴うダイアフラム２の変形量εa を指示値εm より
差引きすることにより、高温下での圧力に応じて生じた
ダイアフラムの変形量εp ＝εm −εa を求め、さらに
変形量εp を事前に定めた較正式Ｐ＝ａεp ＋ｂ（但
し：ａ，ｂは係数）に導入して圧力Ｐに換算する。Regarding the above point, according to an actual machine test conducted by the inventors, in the conventional structure of FIG. 3, when the ambient temperature exceeds 80 ° C., the sealing function of the diaphragm 2 is lost and the pressure measurement becomes impossible. According to the structure of FIG. 1, it has been confirmed that the ambient temperature can be safely measured even at 160 ° C., which is twice the ambient temperature. At the time of actual pressure measurement, by subtracting the deformation amount ε a of the diaphragm 2 due to the change of the ambient temperature from the indicated value ε m , the deformation amount ε p of the diaphragm generated according to the pressure at high temperature ε p = [epsilon] m- [ epsilon] a is obtained, and the amount of deformation [epsilon] p is introduced into a predetermined calibration formula P = a [epsilon] p + b (where a and b are coefficients) to be converted into pressure P.
【００１４】[0014]
【発明の効果】以上述べたように、本発明の構成によれ
ば、従来の組立構造と比べて高温環境での測定を可能に
し、さらに歪ゲージを保護しつつそのリード線を簡単に
引き出せるなどの信頼性，組立性に優れたダイアフラム
型圧力センサを提供できる。As described above, according to the structure of the present invention, the measurement can be performed in a high temperature environment as compared with the conventional assembly structure, and the lead wire can be easily pulled out while protecting the strain gauge. It is possible to provide a diaphragm-type pressure sensor that is highly reliable and easy to assemble.
【図１】本発明実施例の構成断面図FIG. 1 is a sectional view showing the configuration of an embodiment of the present invention.
【図２】図１の分解斜視図FIG. 2 is an exploded perspective view of FIG.
【図３】従来におけるダイアフラム型圧力センサの構成
断面図FIG. 3 is a sectional view showing the configuration of a conventional diaphragm type pressure sensor.
１ 金属ケース ２ ダイアフラム ４ 歪ゲージ ４ａ リード線 ６ 抵抗溶接部 ７ 中空リング ８ 半田層（接合封止材） 1 Metal Case 2 Diaphragm 4 Strain Gauge 4a Lead Wire 6 Resistance Welding Part 7 Hollow Ring 8 Solder Layer (Joint Sealing Material)
Claims (3)
貼付けた金属箔のダイアフラムを被せ、金属ケースとダ
イアフラムの周縁との間をシール接合して構成したダイ
アフラム型圧力センサにおいて、前記金属ケースとダイ
アフラムとの間を抵抗溶接により接合するとともに、ダ
イアフラムの周縁をサンドイッチ状に挟んで金属ケース
と反対側に中空リングを重ね合わせ、かつ該中空リング
を含めてセンサ組立体の外周面を接合封止材で一体に封
止したことを特徴とするダイアフラム型圧力センサ。1. A diaphragm-type pressure sensor comprising a cup-shaped metal case, an opening surface of which is covered with a diaphragm made of a metal foil having a strain gauge attached thereto, and a metal case and a peripheral edge of the diaphragm being sealed and joined together. And the diaphragm are joined by resistance welding, and the outer periphery of the sensor assembly including the hollow ring is joined and sealed by stacking a hollow ring on the side opposite to the metal case while sandwiching the periphery of the diaphragm in a sandwich shape. A diaphragm type pressure sensor, which is integrally sealed with a stopper.
封止材に半田を用い、金属ケース，ダイアフラム，中空
リングからなるセンサ組立体の外周面全域に半田層を被
着して各部品の相互間を封止したことを特徴とするダイ
アフラム型圧力センサ。2. The pressure sensor according to claim 1, wherein solder is used as a joint sealing material, and a solder layer is applied to the entire outer peripheral surface of a sensor assembly including a metal case, a diaphragm, and a hollow ring. A diaphragm-type pressure sensor characterized by sealing between each other.
ージをダイアフラムの表側の面に貼付け、該歪ゲージの
リード線を中空リングの開口面より外部に引出したこと
を特徴とするダイアフラム型圧力センサ。3. The pressure sensor according to claim 1, wherein a strain gauge is attached to the front surface of the diaphragm, and the lead wire of the strain gauge is drawn out from the opening surface of the hollow ring to the outside. Sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18846792A JPH0634470A (en) | 1992-07-16 | 1992-07-16 | Diaphragm pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18846792A JPH0634470A (en) | 1992-07-16 | 1992-07-16 | Diaphragm pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0634470A true JPH0634470A (en) | 1994-02-08 |
Family
ID=16224234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18846792A Pending JPH0634470A (en) | 1992-07-16 | 1992-07-16 | Diaphragm pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634470A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008082893A (en) * | 2006-09-27 | 2008-04-10 | Honda Motor Co Ltd | Strain detection device for unsprung member of vehicle |
-
1992
- 1992-07-16 JP JP18846792A patent/JPH0634470A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008082893A (en) * | 2006-09-27 | 2008-04-10 | Honda Motor Co Ltd | Strain detection device for unsprung member of vehicle |
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