JPH0632989U - Vacuum dryer - Google Patents
Vacuum dryerInfo
- Publication number
- JPH0632989U JPH0632989U JP6686992U JP6686992U JPH0632989U JP H0632989 U JPH0632989 U JP H0632989U JP 6686992 U JP6686992 U JP 6686992U JP 6686992 U JP6686992 U JP 6686992U JP H0632989 U JPH0632989 U JP H0632989U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum dryer
- far
- vacuum pump
- dryer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
(57)【要約】
【目的】地球環境保護を目的に、洗浄用フロンの使用が
規制され、代替技術として、水系超音波洗浄が採用され
ている。この洗浄後の乾燥法として、残渣がなく迅速な
真空乾燥機を提供する。
【構成】密閉した真空槽内の乾燥物を複数の遠赤外線プ
レートヒーターにより加熱するとともに、真空ポンプに
より真空槽内を排気する真空乾燥機において、電気絶縁
性のある樹脂に電気抵抗体を埋没させた遠赤外線プレー
トヒーターと、蒸発物質の3重点より高い圧力に制御で
きる真空ポンプを使用した真空乾燥機である。
【効果】電気絶縁性のある樹脂に電気抵抗体を埋没させ
たことで、漏電のない真空乾燥機である。また、遠赤外
線を高効率で放射し、気化熱を供給することと、凍結す
る圧力に到達しない真空ポンプを使用することで、乾燥
時間が短い真空乾燥機である。
(57) [Summary] [Purpose] For the purpose of protecting the global environment, the use of CFCs for cleaning is regulated, and water-based ultrasonic cleaning is adopted as an alternative technology. As a drying method after this washing, a rapid vacuum dryer with no residue is provided. [Construction] In a vacuum dryer in which the dried product in a closed vacuum tank is heated by a plurality of far-infrared plate heaters and the vacuum tank is evacuated by a vacuum pump, an electric resistor is buried in an electrically insulating resin. It is a vacuum dryer that uses a far-infrared plate heater and a vacuum pump that can control the pressure higher than the triple point of evaporation material. [Effect] This is a vacuum dryer in which electric resistance is buried in an electrically insulating resin to prevent electric leakage. In addition, it is a vacuum dryer that emits far infrared rays with high efficiency, supplies heat of vaporization, and uses a vacuum pump that does not reach the pressure for freezing, so that the drying time is short.
Description
【0001】[0001]
地球環境保護を目的に、オゾン層の破壊物質のひとつである洗浄用フロンの使 用が規制されつつある。フロン洗浄に代わる方法として、水系洗浄剤あるいは純 水を使用した水系超音波洗浄が採用されている。水系超音波洗浄では、乾燥工程 を必要とし、温風乾燥ではウォーターマークが残り、乾燥時間が長い知見を得た 。本考案は、水系超音波洗浄後の乾燥工程に使用する真空乾燥機に関するもので ある。 The use of CFCs for cleaning, which is one of the ozone depleting substances, is being regulated for the purpose of protecting the global environment. As an alternative to CFC cleaning, water-based ultrasonic cleaning using a water-based cleaning agent or pure water is adopted. We found that water-based ultrasonic cleaning requires a drying step, and that hot air drying leaves a watermark, which results in a long drying time. The present invention relates to a vacuum dryer used in a drying process after water-based ultrasonic cleaning.
【0002】[0002]
本考案者は、乾燥中に凍結しない真空乾燥機として、遠赤外線プレートヒータ ーとウォータージェットポンプを備えた赤外線加熱式真空乾燥機を出願した(実 願平1−28419)。 この赤外線加熱式真空乾燥機は、平板状の赤外線プレートヒーターを真空槽内 に2以上棚状に配置し、真空槽内を排気するウォータージェットポンプから構成 されている。 The present inventor has applied for an infrared heating type vacuum dryer equipped with a far infrared plate heater and a water jet pump as a vacuum dryer that does not freeze during drying (Japanese Patent Application No. 1-28419). This infrared heating type vacuum dryer is composed of a water jet pump in which two or more flat infrared plate heaters are arranged in a shelf in a vacuum chamber and the inside of the vacuum chamber is exhausted.
【0003】 平板状の赤外線プレートヒーターは、真空槽内の被乾燥物が凍結して乾燥速度 を低下させないために、乾燥により失う蒸発潜熱をまんべんなく補給するように 配置した。平板状の赤外線プレートヒーターの断面は、図2に示すように、箔状 の発熱抵抗体1を2枚の電気絶縁材2のマイカで挾み、さらに2枚の赤外線放射 物質3で挾んだ構造になっていた。 ウォータージェットポンプは、被乾燥物を凍結させることなく大量の水分を排 気できるポンプであり、水蒸気を凝縮する機能も具備していた。The flat plate-shaped infrared plate heater is arranged so as to completely replenish the latent heat of vaporization lost by the drying in order to prevent the material to be dried in the vacuum chamber from freezing and lowering the drying speed. As shown in FIG. 2, the flat plate-shaped infrared plate heater has a foil-shaped heating resistor 1 sandwiched by two sheets of electrical insulating material 2 mica, and further sandwiched by two sheets of infrared radiation substance 3. It was structured. The water jet pump was a pump capable of discharging a large amount of water without freezing the material to be dried, and also had a function of condensing water vapor.
【0004】[0004]
しかし、表面に銀鍍金をした電極を純水超音波洗浄後、上記赤外線加熱式真空 乾燥機を使用して乾燥したところ、遠赤外線プレートヒーターの絶縁マイカが吸 湿し、電気絶縁性能を低下させ、漏電した。 また、ウォータージェットポンプは、水の3重点以下に圧力を低下させないも のの、所定圧力に到達する時間がかかるために、乾燥時間全体が延長し、さらに 、水蒸気の冷却熱量とエジェクター部での摩擦熱の合計を冷却しなければならな いという欠点があった。 However, when the electrode with the silver plating on the surface was ultrasonically cleaned with pure water and then dried using the infrared heating vacuum dryer, the insulating mica of the far infrared plate heater absorbed moisture, resulting in deterioration of the electrical insulation performance. , There was a short circuit. Although the water jet pump does not reduce the pressure below the triple point of water, it takes time to reach a predetermined pressure, so the entire drying time is extended, and the cooling heat of steam and the ejector section There was a drawback that the total frictional heat had to be cooled.
【0005】[0005]
上記課題を解決するために、本考案は、密閉した真空槽内の被乾燥物を複数の 遠赤外線プレートヒーターにより加熱するとともに、真空ポンプにより真空槽内 を排気する真空乾燥機において、電気絶縁性能のある樹脂のみに電気抵抗体を埋 没させた遠赤外線プレートヒーターと、蒸発物質の3重点より高い圧力に制御で きる真空ポンプを使用したことを特徴とする真空乾燥機を提供するものである。 In order to solve the above problems, the present invention provides an electrically insulating performance in a vacuum dryer in which an object to be dried in a closed vacuum tank is heated by a plurality of far-infrared plate heaters and the inside of the vacuum tank is exhausted by a vacuum pump. The present invention provides a vacuum dryer characterized by using a far-infrared plate heater in which an electric resistor is embedded only in a resin containing a resin and a vacuum pump capable of controlling a pressure higher than the triple point of evaporation material. .
【0006】[0006]
本考案者は、吸湿による漏電を防止する方法として、電気絶縁性に優れた樹脂 のみに電気抵抗体1を埋没させることが、電気絶縁し、蒸発熱を有効に供給でき る手段であることを把握した。 The present inventor has found that as a method of preventing electric leakage due to moisture absorption, burying the electric resistor 1 only in a resin having excellent electric insulation is a means for electrically insulating and effectively supplying heat of vaporization. I figured it out.
【0007】 電気絶縁は、真空放電と漏電を防止しなければならない。真空放電は、図1の ように電気抵抗体1を埋没することで防止できる。漏電は、絶縁性及び耐熱性に 優れたフッ素樹脂4、シリコン樹脂5、ポリイミド6などを使用することで防止 できる。なお、同等の性能を持つ他の樹脂でも支障がない。絶縁性能及び耐熱性 能を表1に示す。 真空中において、蒸発熱は、遠赤外線プレートヒーターから輻射熱として供給 されるので、図3に示すように、80%以上の遠赤外線放射率が必要である。Electrical insulation must prevent vacuum discharge and leakage. Vacuum discharge can be prevented by burying the electric resistor 1 as shown in FIG. Leakage can be prevented by using fluororesin 4, silicon resin 5, polyimide 6 and the like, which have excellent insulation and heat resistance. It should be noted that other resins having equivalent performance will not cause any problems. Table 1 shows the insulation and heat resistance. In a vacuum, the heat of vaporization is supplied from the far infrared plate heater as radiant heat, so that a far infrared emissivity of 80% or more is required as shown in FIG.
【0008】[0008]
【表1】 [Table 1]
【0009】 次に、真空ポンプは、立ち上げ時間を短縮するために、排気速度が大きく、か つ、乾燥物質を凍結させないために、蒸発物質の3重点より高い圧力に制御でき る真空ポンプに限定される。従って、水を乾燥する場合は、到達圧力が4.6 To rrより高く、かつ、水蒸気により性能が低下しない、回転部にシール液体を使用 しないドライ式真空ポンプが適している。なお、同等の性能を持つ真空ポンプで も支障がない。Next, the vacuum pump has a high evacuation speed in order to shorten the start-up time, and is a vacuum pump that can control the pressure higher than the triple point of the evaporation material in order not to freeze the dry material. Limited. Therefore, in the case of drying water, a dry vacuum pump, which has an ultimate pressure higher than 4.6 Torr and whose performance is not deteriorated by water vapor, and which does not use a seal liquid in the rotating part, is suitable. It should be noted that a vacuum pump with equivalent performance will not cause any problems.
【0010】 また、有機溶剤等を乾燥する場合は、油回転真空ポンプが適用できる。真空ポ ンプを補助するために、体積が膨張した気体を液体に凝縮する凝縮器を設置して もかまわない。凝縮器は、回収物質を容易に処理するために、液体凝縮器が望ま しい。When drying the organic solvent or the like, an oil rotary vacuum pump can be applied. A condenser that condenses the expanded gas into a liquid may be installed to assist the vacuum pump. The condenser is preferably a liquid condenser for easy handling of the recovered material.
【0011】[0011]
以下、本考案を図4から図6の実施例に基づいて説明する。図4は、真空乾燥 機の構造概念図である。この真空乾燥機の仕様は、次の通りであった。 真空ポンプ7は、モーター出力が1.5kW、排気速度が670リットル/min (20Torr時)、到達圧力が10Torrのドライ式である。 真空槽8の容量は、150リットルで、遠赤外線プレートヒーター9を5枚8 0mm間隔で配置した。遠赤外線プレートヒーター9の間に乾燥物10を置いた トレー11を配置した。トレー11の寸法は、440mm巾×710mm長で、 底面は、ラス状であった。 Hereinafter, the present invention will be described with reference to the embodiments of FIGS. FIG. 4 is a structural conceptual diagram of the vacuum dryer. The specifications of this vacuum dryer were as follows. The vacuum pump 7 is a dry type with a motor output of 1.5 kW, an exhaust speed of 670 liters / min (at 20 Torr), and an ultimate pressure of 10 Torr. The vacuum chamber 8 had a capacity of 150 liters, and five far infrared plate heaters 9 were arranged at 80 mm intervals. A tray 11 on which the dried product 10 was placed was placed between the far infrared plate heaters 9. The size of the tray 11 was 440 mm width × 710 mm length, and the bottom surface was lath-shaped.
【0012】 遠赤外線プレートヒーター9は、100Ωに成るように線状に加工した50μ mのステンレス箔の発熱抵抗体1を、厚み2mmのフッ素樹脂4に埋没した構造 であった。サイズは、470mm幅×720mm長×2mm厚であり、構造を図 1に示す。フッ素樹脂4の放射率曲線は、図3の通りであった。遠赤外線プレー トヒーターの表面温度は、130℃に自動制御した。The far-infrared plate heater 9 had a structure in which the heating resistor 1 made of a stainless steel foil of 50 μm, which was linearly processed to have a resistance of 100 Ω, was embedded in a fluororesin 4 having a thickness of 2 mm. The size is 470 mm width × 720 mm length × 2 mm thickness, and the structure is shown in FIG. The emissivity curve of the fluororesin 4 was as shown in FIG. The surface temperature of the far infrared plate heater was automatically controlled to 130 ° C.
【0013】 凝縮器12は、冷却機出力が0.75kW、冷却能力が1000kcal/h(液 温5℃時)の冷却機により、5℃に冷却された冷水を50リットル/minで循環 した。The condenser 12 was a cooler having a cooler output of 0.75 kW and a cooling capacity of 1000 kcal / h (at a liquid temperature of 5 ° C.), and chilled water cooled to 5 ° C. was circulated at 50 liters / min.
【0014】 本考案者は、この真空乾燥機を用いて、超音波洗浄した凸型の銀鍍金電極を乾 燥した。乾燥試料の電極をトレー毎に4kg広げ、各段に配置した。電極の寸法 は、7mm幅×10mm高×0.1mm厚であった。電極に付着した水分量は、 100g/トレーであった。乾燥時間13分で、完全に水分は乾燥した。経過時 間毎の圧力13と電極の温度14とヒーター温度15及び冷却水温度16を図5 に示す。この乾燥を1日に8時間、90日連続で繰り返しても、遠赤外線プレー トヒーターの絶縁性は劣化しなかった。直流500Vの1分間印加時の絶縁抵抗 値を表2に示す。The inventor of the present invention dried the ultrasonically-cleaned convex silver-plated electrode using this vacuum dryer. The electrode of the dried sample was spread by 4 kg for each tray and arranged in each stage. The dimensions of the electrodes were 7 mm width x 10 mm height x 0.1 mm thickness. The amount of water attached to the electrode was 100 g / tray. After a drying time of 13 minutes, the water was completely dried. FIG. 5 shows the pressure 13, the electrode temperature 14, the heater temperature 15 and the cooling water temperature 16 for each elapsed time. Even if this drying was repeated for 8 hours a day and 90 days continuously, the insulation of the far infrared plate heater did not deteriorate. Table 2 shows the insulation resistance value when a direct current of 500 V was applied for 1 minute.
【0015】 従来の赤外線加熱式真空乾燥機による、同一試料の乾燥時間は、20分であっ た。図6は、経過時間毎の圧力17と電極の温度18とヒーター温度19及び冷 却水温度20を示す。仕様は、ウォータージェットポンプ出力が1.5kW、冷 却機出力が1.5kW、冷却能力が2000kcal/h(液温5℃時)であった。 90日間連続使用後のヒーターの絶縁抵抗値は、表2に示すように著しく低下し ていた。The drying time of the same sample by the conventional infrared heating type vacuum dryer was 20 minutes. FIG. 6 shows the pressure 17, the electrode temperature 18, the heater temperature 19 and the cooling water temperature 20 for each elapsed time. The specifications were a water jet pump output of 1.5 kW, a refrigerator output of 1.5 kW, and a cooling capacity of 2000 kcal / h (at a liquid temperature of 5 ° C). The insulation resistance value of the heater after continuous use for 90 days was remarkably lowered as shown in Table 2.
【0016】[0016]
【表2】 [Table 2]
【0017】[0017]
上記のように、本考案は、電気絶縁性能のある樹脂のみに電気抵抗体を埋没さ せた遠赤外線プレートヒーターと、蒸発物質の3重点より高い圧力に制御できる 真空ポンプを使用することにより、漏電がなく、乾燥時間が速い真空乾燥機を提 供するものである。 As described above, according to the present invention, by using the far infrared plate heater in which the electric resistor is embedded only in the resin having the electric insulation performance, and the vacuum pump capable of controlling the pressure higher than the triple point of the evaporation material, It provides a vacuum dryer that does not leak and has a fast drying time.
図1は本考案の遠赤外線プレートヒーターの断面図、図
2は従来の遠赤外線プレートヒーターの断面図、図3は
遠赤外線放射率曲線図、図4は本考案の構造概念図、図
5は本考案の経過時間毎の各温度・圧力線図、図6は従
来の赤外線加熱式真空乾燥機の経過時間毎の各温度・圧
力線図、である。1 is a sectional view of a far infrared plate heater of the present invention, FIG. 2 is a sectional view of a conventional far infrared plate heater, FIG. 3 is a far infrared emissivity curve diagram, FIG. 4 is a conceptual diagram of the structure of the present invention, and FIG. FIG. 6 is a temperature / pressure diagram for each elapsed time of the present invention, and FIG. 6 is a temperature / pressure diagram for each elapsed time of the conventional infrared heating vacuum dryer.
1:発熱抵抗体、 2:マイカの電気絶縁材、 3:遠
赤外線放射物質、 4:フッ素樹脂、 5:シリコン樹
脂、 6:ポリイミド、 7:ドライ式真空ポンプ、
8:真空槽、 9:遠赤外線プレートヒーター、 1
0:乾燥物、11:トレー、 12:凝縮器、 13:
圧力(本考案の乾燥例)、 14:試料電極の温度(本
考案の乾燥例)、 15:ヒーター温度(本考案の乾燥
例)、16:冷却水温度(本考案の乾燥例)、 17:
圧力(従来の乾燥例)、18:試料電極の温度(従来の
乾燥例)、 19:ヒーター温度(従来の乾燥例)、
20:冷却水温度(従来の乾燥例)。1: Heating resistor, 2: Mica electrical insulating material, 3: Far infrared radiation material, 4: Fluorine resin, 5: Silicon resin, 6: Polyimide, 7: Dry type vacuum pump,
8: Vacuum tank, 9: Far infrared plate heater, 1
0: dried product, 11: tray, 12: condenser, 13:
Pressure (drying example of the present invention), 14: temperature of sample electrode (drying example of the present invention), 15: heater temperature (drying example of the present invention), 16: cooling water temperature (drying example of the present invention), 17:
Pressure (conventional drying example), 18: sample electrode temperature (conventional drying example), 19: heater temperature (conventional drying example),
20: Cooling water temperature (conventional drying example).
Claims (1)
外線プレートヒーターにより加熱するとともに、真空ポ
ンプにより真空槽内を排気する真空乾燥機において、電
気絶縁性能のある樹脂に電気抵抗体を埋没させた遠赤外
線プレートヒーターと、蒸発物質の3重点より高い圧力
に制御できる真空ポンプを使用したことを特徴とする真
空乾燥機。1. A vacuum dryer in which an object to be dried in a closed vacuum tank is heated by a plurality of far-infrared plate heaters, and the inside of the vacuum tank is evacuated by a vacuum pump. A vacuum dryer characterized by using a far-infrared plate heater in which is embedded and a vacuum pump capable of controlling the pressure higher than the triple point of evaporation material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6686992U JPH0632989U (en) | 1992-09-25 | 1992-09-25 | Vacuum dryer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6686992U JPH0632989U (en) | 1992-09-25 | 1992-09-25 | Vacuum dryer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0632989U true JPH0632989U (en) | 1994-04-28 |
Family
ID=13328308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6686992U Withdrawn JPH0632989U (en) | 1992-09-25 | 1992-09-25 | Vacuum dryer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0632989U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009053036A (en) * | 2007-08-27 | 2009-03-12 | Rigaku Industrial Co | Sample drier |
JP2013070097A (en) * | 2007-08-13 | 2013-04-18 | Alcatel-Lucent | Method of processing transportation support for transporting and storing semiconductor substrate in atmosphere, and processing station for carrying out such method |
JP2018190521A (en) * | 2017-04-28 | 2018-11-29 | 日産自動車株式会社 | Negative electrode for lithium ion secondary battery, lithium ion secondary battery using the same, and method for manufacturing negative electrode for lithium ion secondary battery |
-
1992
- 1992-09-25 JP JP6686992U patent/JPH0632989U/en not_active Withdrawn
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013070097A (en) * | 2007-08-13 | 2013-04-18 | Alcatel-Lucent | Method of processing transportation support for transporting and storing semiconductor substrate in atmosphere, and processing station for carrying out such method |
JP2009053036A (en) * | 2007-08-27 | 2009-03-12 | Rigaku Industrial Co | Sample drier |
JP2018190521A (en) * | 2017-04-28 | 2018-11-29 | 日産自動車株式会社 | Negative electrode for lithium ion secondary battery, lithium ion secondary battery using the same, and method for manufacturing negative electrode for lithium ion secondary battery |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19970306 |