JPH06310106A - Dielectric barrier discharge lamp - Google Patents
Dielectric barrier discharge lampInfo
- Publication number
- JPH06310106A JPH06310106A JP5123162A JP12316293A JPH06310106A JP H06310106 A JPH06310106 A JP H06310106A JP 5123162 A JP5123162 A JP 5123162A JP 12316293 A JP12316293 A JP 12316293A JP H06310106 A JPH06310106 A JP H06310106A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric barrier
- barrier discharge
- discharge lamp
- dielectric
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、光化学反応用
の紫外線光源として使用される誘電体バリヤ放電によっ
てエキシマ分子を形成し、該エキシマ分子から放射され
る光を利用するいわゆる誘電体バリヤ放電ランプの改良
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called dielectric barrier discharge in which excimer molecules are formed by a dielectric barrier discharge used as an ultraviolet light source for photochemical reaction and light emitted from the excimer molecules is used. Regarding the improvement of the lamp.
【０００２】[0002]
【従来の技術】本発明に関連した技術としては、例え
ば、日本国公開特許公報平２−７３５３号があり、そこ
には放電容器にエキシマ分子を形成する放電用ガスを充
填し、誘電体バリヤ放電（別名オゾナイザ放電あるいは
無声放電。電気学会発行改訂新版「放電ハンドブック」
平成１年６月再版７刷発行第２６３ページ参照）によっ
てエキシマ分子を形成せしめ、該エキシマ分子から放射
される光を取り出す放射器、すなわち誘電体バリヤ放電
ランプについて記載されている。また、日本国公開特許
公報平２−７３５３号には、誘電体バリヤ放電ランプの
放電容器に紫外線を別の波長の光に変換するルミネッセ
ンス（例えば蛍光体）を設けた放射器（例えば蛍光ラン
プ）について記載されている。上記のような誘電体バリ
ヤ放電ランプは、従来の低圧水銀放電ランプや高圧アー
ク放電ランプにはない種々の特徴を有しているため有用
である。しかし、上記のような誘電体バリヤ放電ランプ
は、点灯時間の経過に従って光出力が低下してゆくとい
う問題があった。2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 2-7353, in which a discharge barrier is filled with a discharge gas for forming excimer molecules, and a dielectric barrier. Discharge (also known as ozonizer discharge or silent discharge. Revised new edition "Discharge Handbook" published by the Institute of Electrical Engineers of Japan
This paper describes a radiator, that is, a dielectric barrier discharge lamp, which forms excimer molecules by taking out June 1993, Reprint 7th Edition, page 263) and takes out light emitted from the excimer molecules. Further, Japanese Laid-Open Patent Publication No. 2-7353 discloses a radiator (for example, a fluorescent lamp) provided with luminescence (for example, a fluorescent material) for converting ultraviolet rays into light of another wavelength in a discharge container of a dielectric barrier discharge lamp. Is described. The dielectric barrier discharge lamp as described above is useful because it has various features that are not present in conventional low pressure mercury discharge lamps and high pressure arc discharge lamps. However, the dielectric barrier discharge lamp as described above has a problem that the light output decreases as the lighting time elapses.
【０００３】[0003]
【本発明が解決しようとする課題】本発明の課題は、点
灯時間の経過にしたがって光出力が低下しない寿命特性
が十分である誘電体バリヤ放電ランプを提供することで
ある。SUMMARY OF THE INVENTION An object of the present invention is to provide a dielectric barrier discharge lamp having a sufficient life characteristic that the light output does not decrease with the passage of lighting time.
【０００４】[0004]
【課題を解決するための手段】上記本発明の目的は、封
止部材によって封止されている放電容器内に誘電体バリ
ヤ放電によってエキシマ分子を形成する希ガスとハロゲ
ンを含む放電用ガスを充満し、該エキシマから放射され
る光を取り出す窓部材を有する誘電体バリヤ放電ランプ
において、誘電体、窓部材はケイ素を除く金属の酸化物
もしくはフッ化物からなる材料を用い、該ランプの封止
部材は炭素結合を骨格とする有機材料とすることで解決
できる。The above-mentioned object of the present invention is to fill a discharge gas containing a rare gas and a halogen, which forms excimer molecules by dielectric barrier discharge, in a discharge vessel sealed by a sealing member. In the dielectric barrier discharge lamp having a window member for extracting the light emitted from the excimer, the dielectric and the window member are made of a metal oxide or fluoride material other than silicon, and the lamp sealing member is used. Can be solved by using an organic material having a carbon bond as a skeleton.
【０００５】具体的には、該ランプの封止部材を、フッ
素樹脂系のＯリングとするか、もしくはエポキシ樹脂系
の接着剤とすることで解決できる。Specifically, the problem can be solved by using a fluorine resin O-ring or an epoxy resin adhesive as the lamp sealing member.
【０００６】[0006]
【作用】我々は、誘電体バリヤ放電ランプの光出力低下
の主原因が窓部材である石英ガラスの紫外線劣化である
ことを発見した。誘電体バリヤ放電ランプは、従来の低
圧水銀ランプや高圧アーク放電ランプでは得られない波
長の紫外線を高効率で発生できる。例えばクリプトンと
フッ素の混合放電ガスで２４０ｎｍ−２５５ｎｍ、クリ
プトンと塩素で２００−２４０ｎｍ、キセノンと塩素で
３００−３２０ｎｍの波長域の紫外線が得られる。前記
特徴ある紫外線の発生は、以下の機構によっている。す
なわち、まず、誘電体バリヤ放電によって従来のグロー
もしくはアーク放電ランプには無い高エネルギープラズ
マが発生する。このプラズマが種々の衝突過程を経てエ
キシマ分子を生成し、このエキシマ分子が特徴のある紫
外線を高効率で放射する。しかし従来の誘電体バリヤ放
電ランプを長時間点灯すると、ハロゲンが石英ガラスに
取り込まれ、光出力が減少する。メカニズムは明確では
ないが以下のように考えられる。窓部材、誘電体はこれ
ら多量の紫外線の照射を受け、表面の（＝Ｓｉ−Ｏ−Ｓ
ｉ＝）の結合の一部が切断され、＝Ｓｉ・（・は不対電
子、＝は酸素との結合を表す）などの欠陥が生成し、そ
れとハロゲンガスが反応し、石英ガラス中に取り込ま
れ、放電空間のハロゲン量が減少し、エキシマ生成量が
小さくなり光出力が減少する。We have found that the main cause of the decrease in the light output of the dielectric barrier discharge lamp is the ultraviolet deterioration of the quartz glass, which is the window member. The dielectric barrier discharge lamp is capable of highly efficiently generating ultraviolet light having a wavelength which cannot be obtained by the conventional low pressure mercury lamp or high pressure arc discharge lamp. For example, ultraviolet rays in the wavelength range of 240 nm to 255 nm with krypton and fluorine, 200 to 240 nm with krypton and chlorine, and 300 to 320 nm with xenon and chlorine can be obtained. Generation of the characteristic ultraviolet ray is based on the following mechanism. That is, first, the dielectric barrier discharge generates high-energy plasma not found in conventional glow or arc discharge lamps. This plasma produces excimer molecules through various collision processes, and the excimer molecules radiate characteristic ultraviolet rays with high efficiency. However, when the conventional dielectric barrier discharge lamp is lit for a long time, the halogen is taken into the quartz glass and the light output is reduced. The mechanism is not clear, but it is considered as follows. The window member and the dielectric are irradiated with a large amount of these ultraviolet rays, and (= Si-O-S
A part of the bond of i =) is broken, and defects such as = Si · (• represents an unpaired electron, = represents a bond with oxygen) are generated, which reacts with the halogen gas and is taken into the quartz glass. As a result, the amount of halogen in the discharge space is reduced, the amount of excimer produced is reduced, and the light output is reduced.
【０００７】我々は種々検討し、誘電体、窓部材をケイ
素以外の金属の酸化物、フッ化物にすることで誘電体、
窓部材の劣化を防ぐことができた。例えば、フッ化マグ
ネシウム、イットリヤ、サファイヤ（Ａｌ2 Ｏ3 ）など
が使用可能であった。しかし、封止部材とハロゲンが反
応して、出力が短時間に減少する現象があらわれた。例
えば、サファイヤの場合は、モリブデン−マンガン封止
法、フッ化マグネシウムはインジウムシールを試みた
が、いずれも、ハロゲンと金属が反応して、光出力が急
激に減少した。そこで我々は封止部材に炭素結合を骨格
とする有機材料を使用することによって光出力の減少を
抑える事が出来ることを発見した。We have studied variously, and by changing the dielectric material and the window member to oxides and fluorides of metals other than silicon,
It was possible to prevent the deterioration of the window member. For example, magnesium fluoride, yttria, sapphire (Al 2 O 3 ) or the like could be used. However, the phenomenon that the sealing member reacts with the halogen and the output decreases in a short time appears. For example, in the case of sapphire, the molybdenum-manganese sealing method and the indium sealing with magnesium fluoride were tried, but in both cases, the halogen and the metal reacted and the light output sharply decreased. Therefore, we have found that it is possible to suppress the decrease in light output by using an organic material having a carbon bond as a skeleton for the sealing member.
【０００８】誘電体バリヤ放電ランプにおいて、Ｏリン
グを使用した封止例はＡｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ
Ｂ、ｖｏｌ．４６（１９９８）ｐ２９９−３０３で報
告されているが材質は明らかではない。しかし放電用ガ
スは希ガスを使用しており、反応性が低いので、どんな
材質でも使用可能である。本発明のハロゲンと希ガスの
放電を利用したランプとはまったく異なる上記報告で
は、窓部材以外をステンレスで作り、反応性については
まったく考慮していない。我々は、放電用ガスにハロゲ
ンが含まれる場合は、Ｏリング材料はフッ素系樹脂がよ
く、特に反応性の高いフッ素ガスが含まれる場合はパー
フロロエラストマーが最も劣化が少なく、光減少が少な
いことを発見した。窓部材以外の構造材は金属ではチタ
ンが良く、酸化物では、珪素を除く金属の酸化物を使用
した。このように誘電体、窓部材をケイ素を除く金属の
酸化物、フッ化物にし、封止部材を炭素結合を骨格とす
る有機材料とすることで、従来より、光劣化を防ぐこと
が出来た。さらに誘電体を円筒にする事によって、光出
力面積に対し、封止面積が平板型より小さく出来、封止
部からのガス放出量を減少させることにより平板よりさ
らに光出力減少が抑えられる。An example of encapsulation using an O-ring in a dielectric barrier discharge lamp is Applied Physics.
B, vol. 46 (1998) p299-303, but the material is not clear. However, since a rare gas is used as the discharge gas and the reactivity is low, any material can be used. In the above report, which is completely different from the lamp using the discharge of halogen and rare gas of the present invention, the parts other than the window member are made of stainless steel, and reactivity is not considered at all. We have found that when the discharge gas contains halogen, the O-ring material is preferably a fluororesin, and especially when highly reactive fluorine gas is contained, perfluoroelastomer shows the least deterioration and light reduction. I have found The structural material other than the window member is preferably titanium as a metal, and the oxide used is an oxide of a metal other than silicon. As described above, photo-deterioration can be prevented by using the dielectric and the window member made of a metal oxide or fluoride other than silicon and the sealing member made of an organic material having a carbon bond as a skeleton. Further, by making the dielectric a cylinder, the sealing area can be made smaller than the flat plate type with respect to the light output area, and by reducing the amount of gas released from the sealing portion, the light output reduction can be suppressed more than the flat plate type.
【０００９】[0009]
【実施例】本発明の実施例である平板型誘電体バリヤ放
電ランプの概略図を図１に示す。誘電体バリヤ放電の誘
電体と兼用の光取り出し窓部材１は直径１００ｍｍのサ
ファイヤ円板からなる。取り出し窓部材の外面に光を透
過する金属網からなる電極２が設けられている。もう一
方の電極３はチタン製であって、放電容器１３の一部を
兼ねている。封止部材としてフッ素樹脂系のＯリング５
が使用され、押さえを金具６とボルト７で行っている。
放電空間４には、放電用ガスとしてキセノンガスと塩素
が充填されている。尚、８は排気管である。このように
構成し、電源１２で点灯すると、塩素に侵される部材が
なく、寿命特性の優れた誘電体バリヤ放電ランプが得ら
れた。1 is a schematic view of a flat plate type dielectric barrier discharge lamp according to an embodiment of the present invention. The light extraction window member 1, which also serves as a dielectric for the dielectric barrier discharge, is made of a sapphire disc having a diameter of 100 mm. An electrode 2 made of a metal net that transmits light is provided on the outer surface of the extraction window member. The other electrode 3 is made of titanium and also serves as a part of the discharge vessel 13. Fluororesin-based O-ring 5 as a sealing member
Is used, and the holding is performed with the metal fitting 6 and the bolt 7.
The discharge space 4 is filled with xenon gas and chlorine as a discharge gas. In addition, 8 is an exhaust pipe. When configured in this manner and turned on by the power supply 12, there was obtained a dielectric barrier discharge lamp with excellent life characteristics, without any member being corroded by chlorine.
【００１０】本発明の第２の実施例を図２に示す。放電
用ガスとしてさらに反応性の高いクリプトンとフッ素ガ
スが放電空間４に充填されている。誘電体バリヤ放電の
誘電体と兼用の光取り出し窓部材１は直径８０ｍｍのＭ
ｇＦ2 円板からなる。放電空間スペーサ９は高純度アル
ミナ製である。封止部材５のＯリングはパーフロロエラ
ストマーである。放電空間４に金属が露出していないた
め、放電用ガスが反応性の高いクリプトンとフッ素ガス
でも寿命特性の優れた誘電体バリヤ放電ランプが得られ
た。A second embodiment of the present invention is shown in FIG. The discharge space 4 is filled with krypton and fluorine gas, which are more reactive, as the discharge gas. The light extraction window member 1, which also serves as a dielectric for the dielectric barrier discharge, has an M of 80 mm in diameter.
It consists of a gF 2 disc. The discharge space spacer 9 is made of high-purity alumina. The O-ring of the sealing member 5 is perfluoroelastomer. Since the metal was not exposed in the discharge space 4, a dielectric barrier discharge lamp having excellent life characteristics was obtained even when krypton and fluorine gas, which are highly reactive for discharge, were used.
【００１１】本発明の第３の実施例である円筒形誘電体
バリヤ放電ランプの概略図を図３に示す。放電容器１１
は外径１５ｍｍ、長さ２００ｍｍのサファイヤパイプで
あって、チタン製キャップ１０をフッ素樹脂系のＯリン
グ５で封止している。キャップ１０は高純度アルミナで
も製作可能である。電極２はパイプ外壁の対象位置に離
間して金属網を設けて構成する。放電空間４には、放電
用ガスとしてキセノンガスと塩素が充填されている。誘
電体を円筒にする事によって、光出力面積に対し、封止
面積が平板式より小さく出来、封止部からのガス放出量
を減少させることにより平板型よりさらに寿命特性の優
れた誘電体バリヤ放電ランプが得られた。FIG. 3 shows a schematic view of a cylindrical dielectric barrier discharge lamp according to the third embodiment of the present invention. Discharge vessel 11
Is a sapphire pipe having an outer diameter of 15 mm and a length of 200 mm, and a titanium cap 10 is sealed with a fluororesin O-ring 5. The cap 10 can also be made of high-purity alumina. The electrode 2 is formed by providing a metal net at a target position on the outer wall of the pipe while being separated from the target position. The discharge space 4 is filled with xenon gas and chlorine as a discharge gas. By making the dielectric a cylinder, the sealing area can be made smaller than the flat type with respect to the light output area, and by reducing the amount of gas released from the sealing part, a dielectric barrier with better life characteristics than the flat type. A discharge lamp was obtained.
【００１２】上記の実施例においては、封止部材として
いずれもフッ素樹脂系のＯリングを使用したが、そのＯ
リングに替えて、エポキシ樹脂の接着剤を利用しても良
い。In the above-mentioned embodiments, fluororesin-based O-rings are used as the sealing members.
Instead of the ring, an epoxy resin adhesive may be used.
【００１３】[0013]
【発明の効果】以上説明したように本発明によれば、点
灯時間の経過に従い、光出力の低下が少ない誘電体バリ
ヤ放電ランプを提供できる。As described above, according to the present invention, it is possible to provide a dielectric barrier discharge lamp whose light output is less likely to decrease as the lighting time elapses.
【図１】本発明の実施例のランプの説明図である。FIG. 1 is an explanatory diagram of a lamp according to an embodiment of the present invention.
【図２】本発明の他の実施例のランプの説明図である。FIG. 2 is an explanatory diagram of a lamp according to another embodiment of the present invention.
【図３】本発明の他の実施例のランプの説明図である。FIG. 3 is an explanatory view of a lamp according to another embodiment of the present invention.
１ 誘電体と兼用の光取り出し窓部材 ２，３ 電極 ４ 放電空間 ５ Ｏリング ６ 金具 ７ ボルト ８ 排気管 ９ 放電空間スペーサ １０ キャップ 1 Light-outcoupling window member that also serves as a dielectric 2, 3 Electrode 4 Discharge space 5 O-ring 6 Metal fitting 7 Bolt 8 Exhaust pipe 9 Discharge space spacer 10 Cap
Claims (4)
器内に誘電体バリヤ放電によってエキシマ分子を形成す
る希ガスとハロゲンを含む放電用ガスを充満し、該エキ
シマから放射される光を取り出す窓部材を有する誘電体
バリヤ放電ランプにおいて、誘電体、窓部材はケイ素を
除く金属の酸化物もしくはフッ化物からなる材料であ
り、該ランプの封止部材は炭素結合を骨格とする有機材
料からなることを特徴とする誘電体バリヤ放電ランプ。1. A discharge gas sealed by a sealing member is filled with a discharge gas containing halogen and a rare gas that forms excimer molecules by dielectric barrier discharge, and the light emitted from the excimer is extracted. In a dielectric barrier discharge lamp having a window member, the dielectric member and the window member are made of a metal oxide or fluoride material other than silicon, and the sealing member of the lamp is made of an organic material having a carbon bond as a skeleton. A dielectric barrier discharge lamp characterized by the following.
ることを特徴とする請求項１記載の誘電体バリヤ放電ラ
ンプ。2. The dielectric barrier discharge lamp according to claim 1, wherein the organic material is a fluororesin-based O-ring.
ることを特徴とする請求項１記載の誘電体バリヤ放電ラ
ンプ。3. The dielectric barrier discharge lamp according to claim 1, wherein the organic material is an epoxy resin adhesive.
特徴とする請求項１から３記載の誘電体バリヤ放電ラン
プ。4. The dielectric barrier discharge lamp according to claim 1, wherein the shape of the discharge vessel is a hollow column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12316293A JP3178162B2 (en) | 1993-04-28 | 1993-04-28 | Dielectric barrier discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12316293A JP3178162B2 (en) | 1993-04-28 | 1993-04-28 | Dielectric barrier discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06310106A true JPH06310106A (en) | 1994-11-04 |
| JP3178162B2 JP3178162B2 (en) | 2001-06-18 |
Family
ID=14853722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12316293A Expired - Fee Related JP3178162B2 (en) | 1993-04-28 | 1993-04-28 | Dielectric barrier discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3178162B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009176459A (en) * | 2008-01-22 | 2009-08-06 | Ushio Inc | Excimer discharge lamp |
| JP2009187873A (en) * | 2008-02-08 | 2009-08-20 | Ushio Inc | Excimer lamp lighting-up device |
| JP2009266704A (en) * | 2008-04-28 | 2009-11-12 | Ushio Inc | Arf excimer lamp |
| JP2009301863A (en) * | 2008-06-13 | 2009-12-24 | Ushio Inc | Excimer discharge lamp |
| JP2010027255A (en) * | 2008-07-16 | 2010-02-04 | Ushio Inc | Excimer lamp |
| JP2010198936A (en) * | 2009-02-26 | 2010-09-09 | Ushio Inc | Excimer discharge lamp |
| US7800308B2 (en) | 2007-08-31 | 2010-09-21 | Ushio Denki Kabushiki Kaisha | Excimer lamp |
| US8164263B2 (en) | 2009-04-10 | 2012-04-24 | Ushio Denki Kabushiki Kaisha | Excimer discharge lamp |
| US8283865B2 (en) | 2008-11-18 | 2012-10-09 | Ushio Denki Kabushiki Kaisha | Excimer discharge lamp and method of making the same |
-
1993
- 1993-04-28 JP JP12316293A patent/JP3178162B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7800308B2 (en) | 2007-08-31 | 2010-09-21 | Ushio Denki Kabushiki Kaisha | Excimer lamp |
| JP2009176459A (en) * | 2008-01-22 | 2009-08-06 | Ushio Inc | Excimer discharge lamp |
| KR101031381B1 (en) * | 2008-01-22 | 2011-04-26 | 우시오덴키 가부시키가이샤 | Excimer discharge lamp |
| JP2009187873A (en) * | 2008-02-08 | 2009-08-20 | Ushio Inc | Excimer lamp lighting-up device |
| JP2009266704A (en) * | 2008-04-28 | 2009-11-12 | Ushio Inc | Arf excimer lamp |
| JP2009301863A (en) * | 2008-06-13 | 2009-12-24 | Ushio Inc | Excimer discharge lamp |
| JP2010027255A (en) * | 2008-07-16 | 2010-02-04 | Ushio Inc | Excimer lamp |
| US8283865B2 (en) | 2008-11-18 | 2012-10-09 | Ushio Denki Kabushiki Kaisha | Excimer discharge lamp and method of making the same |
| JP2010198936A (en) * | 2009-02-26 | 2010-09-09 | Ushio Inc | Excimer discharge lamp |
| US8164263B2 (en) | 2009-04-10 | 2012-04-24 | Ushio Denki Kabushiki Kaisha | Excimer discharge lamp |
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|---|---|
| JP3178162B2 (en) | 2001-06-18 |
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