JPH06305710A - Ozone generator - Google Patents
Ozone generatorInfo
- Publication number
- JPH06305710A JPH06305710A JP5097316A JP9731693A JPH06305710A JP H06305710 A JPH06305710 A JP H06305710A JP 5097316 A JP5097316 A JP 5097316A JP 9731693 A JP9731693 A JP 9731693A JP H06305710 A JPH06305710 A JP H06305710A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- ozone
- voltage
- electric power
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/34—Composition of the dielectrics
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、水処理や屎尿処理等に
利用される無声放電式のオゾン発生装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silent discharge type ozone generator used for water treatment, human waste treatment and the like.
【０００２】[0002]
【従来の技術】オゾンは極めて強い酸化力を有し、水の
殺菌、脱臭、脱色等の上下水処理や屎尿処理及び食品関
連における殺菌などの多くの用途に使われている。オゾ
ンの生成法には、紫外線照射法、放射線照射法、プラズ
マ放電法、無声放電法及び水の電気分解法等があるが、
工業的には無声放電法が主体である。図３に無声放電法
によるオゾン発生装置の原理を示す。図３において高電
圧電極１と接地電極２は、両者間に空隙部３が形成され
るように誘電体４を介在させて並設されている。両電極
１，２間に例えばＡＣ電圧を印加して空隙部３で無声放
電を発生させ、原料となるガス（乾燥空気もしくは酸
素）をこの空隙部３に通すことによりオゾンを発生させ
ている。2. Description of the Related Art Ozone has an extremely strong oxidizing power and is used for many purposes such as water and sewage treatment such as water sterilization, deodorization and decolorization, human waste treatment and food related sterilization. The ozone generation method includes an ultraviolet irradiation method, a radiation irradiation method, a plasma discharge method, a silent discharge method, and a water electrolysis method.
The silent discharge method is mainly used industrially. FIG. 3 shows the principle of the ozone generator by the silent discharge method. In FIG. 3, the high voltage electrode 1 and the ground electrode 2 are arranged side by side with a dielectric 4 interposed so that a void 3 is formed therebetween. For example, an AC voltage is applied between the electrodes 1 and 2 to generate a silent discharge in the void portion 3, and a gas (dry air or oxygen) as a raw material is passed through the void portion 3 to generate ozone.
【０００３】オゾンＯ3の理論収率は、 Ｏ2→Ｏ＋Ｏ−１１８Ｋｃａｌ（吸熱反応） Ｏ＋Ｏ2→Ｏ3＋２５Ｋｃａｌ（発熱反応） より、 ３Ｏ2→２Ｏ3−６８Ｋｃａｌ となり、Ｏ3を１ｍｏｌ生成するために３４Ｋｃａｌ必
要となる。従って理論上の収率は１．２ｋｇＯ3／ＫＷ
ｈとなる。しかし、消費電力に対するオゾンの生成効率
は理論収率に比べて極めて低く数％に過ぎず、残りの９
０数％の電力は熱となってオゾン生成に寄与していない
というのがオゾン発生装置の現状である。The theoretical yield of ozone O 3 is O 2 → O + O-118 Kcal (endothermic reaction) O + O 2 → O 3 +25 Kcal (exothermic reaction), resulting in 3O 2 → 2O 3 -68 Kcal, and 1 mol of O 3 is produced. 34 Kcal is required. Therefore, the theoretical yield is 1.2 kgO 3 / KW
h. However, the ozone generation efficiency with respect to the power consumption is extremely low compared to the theoretical yield and is only a few percent, and the remaining 9
The current state of the ozone generator is that 0% or less of electric power does not contribute to ozone generation as heat.
【０００４】[0004]
【発明が解決しようとする課題】オゾンの生成量に影響
を及ぼす主な因子としては、電極の形状、電極間ギャッ
プの大きさ、誘電体の形状及び材質、電極の冷却方法、
原料ガスの除湿や冷却方法、印加電圧の波形等が上げら
れる。The main factors affecting the amount of ozone produced are the shape of the electrodes, the size of the gap between the electrodes, the shape and material of the dielectric, the cooling method of the electrodes,
The dehumidification and cooling method of the source gas, the waveform of the applied voltage, etc. can be increased.
【０００５】現在の大型オゾン発生装置は、冷却の容易
性、組み立ての容易性、メインテナンスの容易性等の点
から同軸円筒管の多管方式が多く用いられている。その
中で高圧電極部は一般には誘電体管としてガラスに金属
コーティングを施したものが用いられている。この金属
コーティングには一般にＡｌ溶射膜が用いられているが
厚みが薄いため、沿面方向の体積抵抗が大きくこれを低
減するために高圧線にブラシ状の接触部を設け接触面積
を増やしている。更に、腐食の問題も深刻である。ま
た、放電時の誘電体自身の温度上昇によるオゾン発生濃
度の低下が問題となっている。しかも構造上、水冷によ
る冷却は困難である。A large-scale ozone generator at present uses a multi-tube system of coaxial cylindrical tubes in many cases from the viewpoint of ease of cooling, ease of assembly, ease of maintenance, and the like. Among them, the high-voltage electrode part is generally made of a dielectric tube having glass coated with a metal. An Al sprayed film is generally used for this metal coating, but since the thickness is thin, the volume resistance in the creeping direction is large, and in order to reduce this, a brush-shaped contact portion is provided on the high voltage wire to increase the contact area. Furthermore, the problem of corrosion is also serious. Further, there is a problem that the concentration of ozone generated decreases due to the temperature rise of the dielectric itself during discharge. Moreover, it is difficult to cool with water because of its structure.
【０００６】ガラス管自体においてはオゾンの高効率の
発生に対しては高誘電率の材料が望ましいとされてい
る。また、セラミクス管は高い誘電率が期待できるが加
工性が悪く薄く均一な円筒管を得ることができない等の
問題点があった。In the glass tube itself, a material having a high dielectric constant is considered desirable for highly efficient generation of ozone. Further, although a ceramics tube can be expected to have a high dielectric constant, it has a problem in that it has poor workability and a thin and uniform cylindrical tube cannot be obtained.
【０００７】本発明は上記の点に鑑みてなされたもので
その目的は、優れたオゾン発生特性が得られるオゾン発
生装置を提供することにある。The present invention has been made in view of the above points, and an object thereof is to provide an ozone generator capable of obtaining excellent ozone generating characteristics.
【０００８】[0008]
【課題を解決するための手段】本発明は、一方の面に高
圧電電極が設けられた誘電体と、該誘電体の他方の面に
空隙部を介して並設された接地電極とを備え、前記高電
圧電極と接地電極間に電圧を印加して前記空隙部内に流
通させた原料ガス中にオゾンを発生させる無声放電式の
オゾン発生装置において、（１）前記誘電体を、誘電体
ガラスとしたことを特徴とし、（２）前記誘電体を、比
誘電率が４．５以上に、体積抵抗率が１０11Ω・ｃｍ以
上に、表面抵抗が１０9〜１０13Ωの範囲に各々設定さ
れたガラス誘電体で構成したことを特徴とし、（３）前
記誘電体を、ＰｂＯ又はＰｂＯ＋ＢａＯの含有量が２５
重量％以上で、且つＮａ2Ｏの含有量が１．５重量％以
下の組成成分から成る鉛ガラス系の誘電体で構成したこ
とを特徴としている。The present invention comprises a dielectric having a high-voltage electrode provided on one surface thereof, and a ground electrode provided on the other surface of the dielectric material side by side with a gap therebetween. A silent discharge ozone generator that applies a voltage between the high-voltage electrode and a ground electrode to generate ozone in the raw material gas that has been circulated in the void, wherein (1) the dielectric is a dielectric glass (2) The dielectric material has a relative dielectric constant of 4.5 or more, a volume resistivity of 10 11 Ω · cm or more, and a surface resistance of 10 9 to 10 13 Ω. (3) The content of PbO or PbO + BaO is 25.
It is characterized in that it is composed of a lead glass-based dielectric composed of composition components having a Na 2 O content of 1.5 wt% or less and a wt% or more.
【０００９】[0009]
（１）請求項１、２の発明において、高電圧電極と接地
電極の間に電圧を印加すると空隙部において放電現象が
起こり、該放電電力によりオゾンが発生する。このとき
誘電体の誘電率が高いため、実効電界が上昇するととも
に放電開始電圧は下がる。(1) In the inventions of claims 1 and 2, when a voltage is applied between the high voltage electrode and the ground electrode, a discharge phenomenon occurs in the void portion, and ozone is generated by the discharge power. At this time, since the dielectric constant of the dielectric is high, the effective electric field rises and the discharge start voltage falls.
【００１０】また、もし仮に表面抵抗の高い物質で誘電
体が構成されていると、放電柱の発生位置はほぼ固定化
されるので、パルス発生速度に比べて非常に移動の遅い
酸素分子に、電子が衝突する確率は低い。しかし本発明
のように誘電体の表面抵抗を従来のものより少し下げて
（１０9〜１０13Ω）設定した場合は、誘電体表面に蓄
積された電荷の沿面方向への移動が起こり放電柱の発生
箇所が移動する。これによって電子と酸素分子の衝突確
率が上昇し、オゾンの発生量が増加する。また、誘電体
の表面抵抗を下げ過ぎる（１０9Ω未満）と、次第に電
荷が集中し、最後にはアーク放電に至る。Further, if the dielectric is made of a substance having a high surface resistance, the generation position of the discharge column is almost fixed, so that oxygen molecules, which move much slower than the pulse generation speed, are generated. The probability of electron collision is low. However, when the surface resistance of the dielectric is set to be slightly lower than that of the conventional one (10 9 to 10 13 Ω) as in the present invention, the charge accumulated on the surface of the dielectric is moved in the creeping direction and the discharge column The occurrence location of is moved. As a result, the collision probability of electrons and oxygen molecules increases, and the amount of ozone generated increases. Further, when the surface resistance of the dielectric material is lowered too much (less than 10 9 Ω), the electric charges are gradually concentrated and finally arc discharge is reached.
【００１１】上記のように本発明の装置は、誘電体の比
誘電率を４．５以上に、体積抵抗率を１０11Ω・ｃｍ以
上に、表面抵抗を１０9〜１０13Ωの範囲に各々設定し
ているので、それ以外の電気特性の誘電体（従来のも
の）を用いた装置に比べて、単位面積当たりの投入電力
が大きく、また同一電力の投入に対するオゾン発生量も
大きい。このため単位面積当たりのオゾン発生量も放電
電力効率も従来のものより優れている。As described above, the device of the present invention has a dielectric constant of 4.5 or more, a volume resistivity of 10 11 Ω · cm or more, and a surface resistance of 10 9 to 10 13 Ω. Since each of them is set, the input electric power per unit area is large and the ozone generation amount is large when the same electric power is input, as compared with a device using a dielectric (conventional one) having other electrical characteristics. Therefore, both the amount of ozone generated per unit area and the discharge power efficiency are superior to the conventional ones.
【００１２】（２）請求項３の発明において、高電圧電
極と接地電極の間に電圧を印加すると空隙部において放
電現象が起こり、該放電電力によりオゾンが発生する。
このとき誘電体は鉛含有成分が高いので、高誘電率が得
られる。このため実効電界が上昇するとともに放電開始
電圧は下がる。(2) In the invention of claim 3, when a voltage is applied between the high voltage electrode and the ground electrode, a discharge phenomenon occurs in the void portion, and ozone is generated by the discharge power.
At this time, since the dielectric material has a high content of lead, a high dielectric constant can be obtained. For this reason, the effective electric field rises and the discharge starting voltage falls.
【００１３】また誘電体はＮａ2Ｏの含有量を小さくし
ているので、体積抵抗が高くなって誘電体表面に電荷が
蓄積され易くなり、表面抵抗が低くなる。これによって
空隙部における放電柱の発生エリアが拡大されて酸素分
子と電子の衝突確率が大きくなる。したがって単位面積
あたりの投入電力が大きく、また同一電力の投入に対す
るオゾン発生量も大きい。このため単位面積あたりのオ
ゾン発生量も放電電力効率も従来のものより優れてい
る。Further, since the dielectric has a small content of Na 2 O, the volume resistance becomes high, and the electric charges are easily accumulated on the surface of the dielectric, so that the surface resistance becomes low. As a result, the discharge column generation area in the void portion is expanded, and the probability of collision between oxygen molecules and electrons increases. Therefore, the input electric power per unit area is large, and the ozone generation amount is large when the same electric power is input. Therefore, the ozone generation amount per unit area and the discharge power efficiency are superior to those of the conventional one.
【００１４】[0014]
【実施例】以下、図面を参照しながら請求項１、２に記
載の発明の一実施例を説明する。本発明では様々な電気
的特性を有する誘電体管のオゾン発生特性を従来例と比
較し、オゾンの発生において特に優れた発生特性を持つ
誘電体管に必要な条件の設定に成功したので以下に説明
する。特に注目した電気的特性は誘電率と体積抵抗およ
び表面抵抗である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the invention described in claims 1 and 2 will be described below with reference to the drawings. In the present invention, the ozone generation characteristics of the dielectric tube having various electric characteristics are compared with the conventional example, and the conditions necessary for the dielectric tube having particularly excellent generation characteristics in the generation of ozone have been successfully set. explain. The electrical characteristics of particular interest are the dielectric constant, volume resistance and surface resistance.
【００１５】表１に従来例及び実施例に用いた誘電体管
の電気的特性の一覧表を示す。Table 1 shows a list of electrical characteristics of the dielectric tubes used in the conventional example and the example.
【００１６】[0016]
【表１】 [Table 1]
【００１７】誘電率においては３〜１０、体積抵抗（ｌ
ｏｇＲ）については室温において１５〜２０．５、１５
０°Ｃにおいて１０〜１３．５の範囲で検討を行った。
オゾン発生用の電極構造は誘電体厚２ｍｍ、空隙長を
１．５ｍｍに設定した。The dielectric constant is 3 to 10, and the volume resistance (l
ogR) at room temperature is 15 to 20.5, 15
The examination was conducted in the range of 10 to 13.5 at 0 ° C.
The electrode structure for ozone generation had a dielectric thickness of 2 mm and a void length of 1.5 mm.
【００１８】図１には実施例における単位面積当たりの
投入電力の比較を、図２には単位面積当たりの放電電力
に対するオゾンの発生量の比較を示す。図１、図２から
明らかなように特に実施例２、３に示す誘電体管を使用
したものが単位面積当たりの投入電力も大きく又同じ電
力の投入に対してのオゾン発生量も大きい。結果として
単位面積当たりのオゾンの発生量も、オゾン発生量の放
電電力効率も実施例２、３の誘電体管が優れていること
が判った。放電の状況を観察すると上記実施例２、３の
誘電体管の方が電圧印加時の放電パルスの電荷量が大き
く原料ガスに供給する電力が大きいことが判った。すな
わち実施例において優れたオゾン発生特性を示したのは
誘電体管の中でも誘電率が高く、尚且つ体積抵抗が高く
表面抵抗の低い物であった。FIG. 1 shows a comparison of input power per unit area in the embodiment, and FIG. 2 shows a comparison of ozone generation amount with respect to discharge power per unit area. As is clear from FIG. 1 and FIG. 2, particularly when the dielectric tubes shown in Examples 2 and 3 are used, the input electric power per unit area is large and the ozone generation amount is large when the same electric power is input. As a result, it was found that the dielectric tubes of Examples 2 and 3 were excellent in the amount of ozone generated per unit area and the discharge power efficiency of the amount of ozone generated. Observation of the state of discharge revealed that the dielectric tubes of Examples 2 and 3 had a larger amount of charge in the discharge pulse when a voltage was applied and a larger amount of power to be supplied to the raw material gas. That is, it was the dielectric tube having a high dielectric constant, a high volume resistance, and a low surface resistance that showed excellent ozone generation characteristics in the examples.
【００１９】これらオゾン発生効率の上昇が得られる原
因としては、まず誘電率が高いため実効電界が上昇し、
放電開始電圧が下がることが挙げられる。さらに、放電
現象における放電柱の発生の微妙な違いである可能性が
考えられる。すなわち表面抵抗の高い物質表面上では、
放電柱の発生する位置はほぼ固定化されており、パルス
の発生速度に比較すると非常に移動の遅い酸素分子に電
子が衝突する確率は限られたものになる。それに対し表
面抵抗が少し下がると誘電体表面に蓄積された電荷の沿
面方向への移動が起こり、放電柱の発生箇所が移動する
ようになる。この状態で電子と酸素分子との衝突確率が
上がりオゾンの発生量が増えると考えられる。更に表面
抵抗が下がると次第に電荷が集中し最後にアーク放電に
至るため、効率の良いオゾン発生の領域は限られると思
われる。The reason why the ozone generation efficiency is increased is that the effective electric field is increased due to the high dielectric constant.
It can be mentioned that the discharge start voltage is lowered. Furthermore, it is possible that there is a subtle difference in the generation of discharge columns in the discharge phenomenon. That is, on a material surface with high surface resistance,
The position where the discharge column is generated is almost fixed, and the probability that electrons collide with oxygen molecules, which move very slowly compared to the pulse generation speed, is limited. On the other hand, when the surface resistance is slightly lowered, the charges accumulated on the surface of the dielectric material move in the creeping direction, and the locations where the discharge columns are generated move. In this state, the probability of collision between electrons and oxygen molecules increases and the amount of ozone generated is considered to increase. Further, as the surface resistance decreases, the electric charge gradually concentrates and finally reaches the arc discharge, so that the area of efficient ozone generation seems to be limited.
【００２０】以上の結果により上記の条件を満足する誘
電体管としては体積抵抗率が１５０°Ｃ以下で１０
11（Ω・ｃｍ）以上である事、比誘電率が４．５以上で
ある事、表面抵抗は１０9〜１０13Ωの範囲である事の
３点の電気的特性を満たす必要がある。From the above results, a dielectric tube satisfying the above conditions has a volume resistivity of 150 ° C. or less and 10
It is necessary to satisfy the three electrical characteristics of 11 (Ω · cm) or more, relative permittivity of 4.5 or more, and surface resistance of 10 9 to 10 13 Ω.
【００２１】尚本実施例においては円筒型のオゾナイザ
を使用したがこれに限らず、無声放電型のオゾナイザを
使用する限り平行平板型においても同様の効果が期待さ
れる。In this embodiment, a cylindrical ozonizer is used, but the present invention is not limited to this, and the same effect can be expected in a parallel plate type as long as a silent discharge type ozonizer is used.
【００２２】次に請求項３に記載の発明の一実施例を説
明する。本発明では様々な電気的特性を有する誘電体ガ
ラス管のオゾン発生特性を従来例と比較しオゾンの発生
において特に発生特性の良いガラス成分の選択に成功し
たので、以下に説明する。先ず請求項１の発明で得たオ
ゾン発生特性の優れた誘電体の電気的特性（表１、図
１、図２の実施例２、３のもの）を実現することができ
るガラス成分を表２のように求めた。Next, an embodiment of the invention described in claim 3 will be described. In the present invention, the ozone generation characteristics of the dielectric glass tube having various electrical characteristics are compared with those of the conventional example, and a glass component having particularly good generation characteristics in ozone generation has been successfully selected, which will be described below. First, Table 2 shows the glass components that can realize the electrical characteristics of the dielectrics excellent in ozone generation characteristics obtained in the invention of claim 1 (Table 1, Table 1 and Examples 2 and 3 in FIG. 2). Asked like.
【００２３】[0023]
【表２】 [Table 2]
【００２４】放電の状況を観察した結果、鉛ガラス系の
方が電圧印加時の放電パルスの電荷量が大きく原料ガス
に供給する電力が大きい事が判った。即ち本実施例にお
いて優れたオゾン発生特性を示したのは鉛ガラスの中で
も誘電率が高く、尚且つ体積抵抗が高く表面抵抗の低い
物であった。これらオゾン発生効率の上昇が得られる原
因としては、請求項１、２の発明の詳細な説明で述べた
ように、２つの事が考えられる。すなわち高誘電率の誘
電体管を用いる事によって、実効電界の上昇を図るとと
もに放電開始電圧を下げる事と、表面抵抗を下げる事に
よって放電柱の発生するエリアの拡大を図り、酸素分子
と電子の衝突確率を上げる事である。As a result of observing the state of discharge, it was found that the lead glass system had a larger amount of charge in the discharge pulse when a voltage was applied and the power supplied to the raw material gas was larger. That is, it was the lead glass having a high dielectric constant, a high volume resistance, and a low surface resistance that exhibited excellent ozone generation characteristics in this example. As described above in the detailed description of the invention of claims 1 and 2, there are two possible causes for the increase in ozone generation efficiency. That is, by using a high-dielectric-constant dielectric tube, the effective electric field is increased, the discharge start voltage is lowered, and the surface resistance is lowered to expand the area where the discharge column is generated. To increase the collision probability.
【００２５】以上の結果より上記の２点の条件を満足す
る誘電体管として以下の組成のガラスが特に適当である
という結論がでた。鉛ガラスにおいてＰｂＯ（あるいは
ＰｂＯ＋ＢａＯ）の含有量が２５重量％以上で、且つＮ
ａ2Ｏの含有量が１．５重量％以下の組成の物（実施例
２、３の物）である。From the above results, it was concluded that the glass having the following composition is particularly suitable as the dielectric tube satisfying the above two conditions. In the lead glass, the content of PbO (or PbO + BaO) is 25% by weight or more, and N
It is a composition having a content of a 2 O of 1.5% by weight or less (Examples 2 and 3).
【００２６】即ち高誘電率を得る為には鉛ガラス系の鉛
含有成分が高い方が良い。一方表面の電気抵抗を下げる
には様々な要因が考えられるが、表面吸着の水分が無視
できる程原料ガスが充分に乾燥しており、表面がスムー
ズな物であれば高誘電率で体積抵抗の高い物ほど表面に
電荷が蓄積され易く表面抵抗が低くなる傾向にある。し
たがって体積抵抗を高く保つためにＮａ2Ｏの含有量は
１．５重量％以下が望ましい。That is, in order to obtain a high dielectric constant, it is preferable that the lead-containing component of the lead glass type is high. On the other hand, various factors can be considered to reduce the electric resistance of the surface, but if the raw material gas is sufficiently dry so that the moisture adsorbed on the surface can be ignored, and the surface is smooth, it has a high dielectric constant and volume resistance. The higher the height, the more easily charges are accumulated on the surface, and the lower the surface resistance tends to be. Therefore, in order to keep the volume resistance high, the content of Na 2 O is preferably 1.5% by weight or less.
【００２７】尚本実施例においては円筒管型のオゾナイ
ザを使用したが、これに限らず無声放電型のオゾナイザ
を使用する限り、平行平板型においても同様の効果が期
待される。Although the cylindrical tube type ozonizer is used in this embodiment, the same effect can be expected in the parallel plate type as long as a silent discharge type ozonizer is used.
【００２８】[0028]
【発明の効果】以上のように請求項１、２の発明によれ
ば、誘電体を、比誘電率が４．５以上に、体積抵抗率が
１０11Ω以上に、表面抵抗が１０9〜１０13Ωの範囲に
各々設定されたガラス誘電体で構成したので、次のよう
な優れた効果が得られる。As described above, according to the first and second aspects of the invention, the dielectric has a relative permittivity of 4.5 or more, a volume resistivity of 10 11 Ω or more, and a surface resistance of 10 9 to 10. Since the glass dielectrics are set in the range of 10 13 Ω, the following excellent effects can be obtained.
【００２９】即ち、誘電体の誘電率が高いため、実効電
界が上昇するとともに放電開始電圧は下がる。また誘電
体の表面抵抗を従来のものより少し下げて（１０9〜１
０13Ω）設定しているので、誘電体表面に蓄積された電
荷の沿面方向への移動が起こり放電柱の発生箇所が移動
し、これによって電子と酸素分子の衝突確率が上昇し、
オゾンの発生量が増加する。従って従来の装置に比べ
て、単位面積当たりの投入電力が大きく、また同一電力
の投入に対するオゾン発生量も大きい。このため単位面
積当たりのオゾン発生量も放電電力効率も従来のものよ
り優れている。That is, since the dielectric constant of the dielectric is high, the effective electric field rises and the discharge starting voltage falls. In addition, the surface resistance of the dielectric should be slightly lower than that of the conventional one (10 9 -1
0 13 Ω), the charge accumulated on the surface of the dielectric moves in the creeping direction, and the location where the discharge column occurs moves, which increases the probability of collision between electrons and oxygen molecules.
The amount of ozone generated increases. Therefore, compared with the conventional device, the input electric power per unit area is large, and the ozone generation amount is large when the same electric power is input. Therefore, both the amount of ozone generated per unit area and the discharge power efficiency are superior to the conventional ones.
【００３０】また、請求項３の発明によれば、誘電体
を、ＰｂＯ又はＰｂＯ＋ＢａＯの含有量が２５重量％以
上で、且つＮａ2Ｏの含有量が１．５重量％以下の組成
成分から成る鉛ガラス系の誘電体で構成したので、次の
ような優れた効果が得られる。According to the third aspect of the present invention, the dielectric is composed of composition components having a PbO or PbO + BaO content of 25 wt% or more and a Na 2 O content of 1.5 wt% or less. Since it is composed of a lead glass-based dielectric, the following excellent effects can be obtained.
【００３１】即ち、誘電体のＮａ2Ｏの含有量を小さく
しているので、体積抵抗が高くなって誘電体表面に電荷
が蓄積され易くなり、表面抵抗が低くなる。これによっ
て空隙部における放電柱の発生エリアが拡大されて酸素
分子と電子の衝突確率が大きくなる。したがって単位面
積あたりの投入電力が大きく、また同一電力の投入に対
するオゾン発生量も大きい。このため単位面積あたりの
オゾン発生量も放電電力効率も従来のものより優れてい
る。That is, since the content of Na 2 O in the dielectric is small, the volume resistance becomes high, the electric charges are easily accumulated on the surface of the dielectric, and the surface resistance becomes low. As a result, the discharge column generation area in the void portion is expanded, and the probability of collision between oxygen molecules and electrons increases. Therefore, the input electric power per unit area is large, and the ozone generation amount is large when the same electric power is input. Therefore, the ozone generation amount per unit area and the discharge power efficiency are superior to those of the conventional one.
【図１】本発明の一実施例を示し、印加電圧と放電電力
の関係を表す特性図。FIG. 1 is a characteristic diagram showing the relationship between an applied voltage and discharge power according to an embodiment of the present invention.
【図２】本発明の一実施例を示し、単位面積当たりの放
電電力とオゾン発生量の関係を表す特性図。FIG. 2 is a characteristic diagram showing a relationship between discharge power per unit area and ozone generation amount, showing an embodiment of the present invention.
【図３】無声放電法によるオゾン生成の原理を示す説明
図。FIG. 3 is an explanatory diagram showing the principle of ozone generation by the silent discharge method.
１…高電圧電極 ２…接地電極 ３…空隙部 ４…誘電体 1 ... High-voltage electrode 2 ... Ground electrode 3 ... Void part 4 ... Dielectric
Claims (3)
体と、該誘電体の他方の面に空隙部を介して並設された
接地電極とを備え、前記高電圧電極と接地電極間に電圧
を印加して前記空隙部内に流通させた原料ガス中にオゾ
ンを発生させる無声放電式のオゾン発生装置において、 前記誘電体を、誘電体ガラスとしたことを特徴とするオ
ゾン発生装置。1. A high-voltage electrode and a ground electrode, comprising: a dielectric having a high-voltage electrode provided on one surface thereof; and a ground electrode provided on the other surface of the dielectric side by side with a gap therebetween. A silent discharge type ozone generator for generating ozone in a raw material gas which is circulated in the gap by applying a voltage therebetween, wherein the dielectric is a dielectric glass.
体と、該誘電体の他方の面に空隙部を介して並設された
接地電極とを備え、前記高電圧電極と接地電極間に電圧
を印加して前記空隙部内に流通させた原料ガス中にオゾ
ンを発生させる無声放電式のオゾン発生装置において、 前記誘電体を、比誘電率が４．５以上に、体積抵抗率が
１０11Ω・ｃｍ以上に、表面抵抗が１０9〜１０13Ωの
範囲に各々設定されたガラス誘電体で構成したことを特
徴とするオゾン発生装置。2. A high-voltage electrode and a ground electrode, comprising: a dielectric having a high-voltage electrode provided on one surface thereof; and a ground electrode provided on the other surface of the dielectric side by side with a gap therebetween. In a silent discharge type ozone generator that generates ozone in a raw material gas that is circulated in the gap by applying a voltage therebetween, the dielectric has a relative dielectric constant of 4.5 or more and a volume resistivity of An ozone generator comprising a glass dielectric material having a surface resistance of 10 11 Ω · cm or more and a surface resistance of 10 9 to 10 13 Ω.
体と、該誘電体の他方の面に空隙部を介して並設された
接地電極とを備え、前記高電圧電極と接地電極間に電圧
を印加して前記空隙部内に流通させた原料ガス中にオゾ
ンを発生させる無声放電式のオゾン発生装置において、 前記誘電体を、ＰｂＯ又はＰｂＯ＋ＢａＯの含有量が２
５重量％以上で、且つＮａ2Ｏの含有量が１．５重量％
以下の組成成分から成る鉛ガラス系の誘電体で構成した
ことを特徴とするオゾン発生装置。3. A high-voltage electrode and a ground electrode, comprising: a dielectric having a high-voltage electrode provided on one surface thereof; and a ground electrode provided on the other surface of the dielectric in parallel with a gap therebetween. In a silent discharge type ozone generator for generating ozone in a raw material gas which has been applied with a voltage between them and which has been circulated in the gap, the dielectric contains PbO or PbO + BaO in an amount of 2 or less.
5% by weight or more and the content of Na 2 O is 1.5% by weight
An ozone generator comprising a lead glass-based dielectric made of the following composition components.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09731693A JP3416982B2 (en) | 1993-04-23 | 1993-04-23 | Ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09731693A JP3416982B2 (en) | 1993-04-23 | 1993-04-23 | Ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06305710A true JPH06305710A (en) | 1994-11-01 |
| JP3416982B2 JP3416982B2 (en) | 2003-06-16 |
Family
ID=14189085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09731693A Expired - Fee Related JP3416982B2 (en) | 1993-04-23 | 1993-04-23 | Ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3416982B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010150098A (en) * | 2008-12-26 | 2010-07-08 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JP2010265121A (en) * | 2009-05-12 | 2010-11-25 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozonizer |
| US8328998B2 (en) | 2004-04-08 | 2012-12-11 | Mitsubishi Denki Kabushiki Kaisha | Ozone generating apparatus |
-
1993
- 1993-04-23 JP JP09731693A patent/JP3416982B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8328998B2 (en) | 2004-04-08 | 2012-12-11 | Mitsubishi Denki Kabushiki Kaisha | Ozone generating apparatus |
| CN102815672A (en) * | 2004-04-08 | 2012-12-12 | 三菱电机株式会社 | Ozone generating apparatus |
| JP2010150098A (en) * | 2008-12-26 | 2010-07-08 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JP2010265121A (en) * | 2009-05-12 | 2010-11-25 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozonizer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3416982B2 (en) | 2003-06-16 |
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