JPH06304859A - Carrier and manufacture thereof for surface polishing machine - Google Patents

Carrier and manufacture thereof for surface polishing machine

Info

Publication number
JPH06304859A
JPH06304859A JP11911693A JP11911693A JPH06304859A JP H06304859 A JPH06304859 A JP H06304859A JP 11911693 A JP11911693 A JP 11911693A JP 11911693 A JP11911693 A JP 11911693A JP H06304859 A JPH06304859 A JP H06304859A
Authority
JP
Japan
Prior art keywords
carrier
fiber
work
reinforcing
polishing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11911693A
Other languages
Japanese (ja)
Inventor
Koji Takeuchi
内 浩 司 竹
Seiichiro Futami
見 成一郎 二
Akira Yoshida
田 明 吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Priority to JP11911693A priority Critical patent/JPH06304859A/en
Publication of JPH06304859A publication Critical patent/JPH06304859A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To surely hold a workpiece without giving a scratch to an external peripheral surface by forming a carrier by fiber reinforced plastic, and arranging a fiber having flexibility of polyester fiber or the like in at least an intermediate layer part. CONSTITUTION:In external layer parts 13, 13 of a carrier, since a chance of coming into contact with the periphery of a chamfered workpiece 12 is rarely provided, an arbitrary material provided with a reinforcing function is used as a reinforcing fiber, and, for instance, a material, hard and easily broken like a glass fiber may be used. In an intermediate layer part 14 relating to the above, because of contact with the periphery of the workpiece 12, a reinforcing fiber having flexibility for preventing a scratch from easily given to the workpiece 12 is used, and a polyester fiber is listed, as the fiber thus formed, and used to be suited for holding an aluminum-made disk.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、アルミニウム、ガラ
ス、セラミック等からなるディスク状ワークを平面研磨
装置で研磨加工する際に該ワークの保持に用いられるキ
ャリヤとその製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier used for holding a disk-shaped work made of aluminum, glass, ceramics or the like when it is ground by a flat grinding machine and a manufacturing method thereof.

【0002】[0002]

【従来の技術】例えば、ラップ盤等の平面研磨装置を使
用してアルミニウムやガラス、セラミック等からなるデ
ィスク状ワークを研磨加工する際には、該ワークの保持
に図5及び図6に示すようなキャリヤが使用されてい
る。このキャリヤ1は、ワーク2を保持するための複数
のワーク保持穴3を有すると共に、平面研磨装置の太陽
歯車及び内歯歯車と噛合するギア4を外周に備えたもの
で、一般に、ガラス繊維をエポキシ樹脂で固めた繊維強
化プラスチックにより形成され、各保持穴3内にキャリ
ヤの肉厚よりもやや厚めのワーク2を保持するようにな
っている。
2. Description of the Related Art For example, when a disk-shaped work made of aluminum, glass, ceramics or the like is polished by using a flat polishing machine such as a lapping machine, the work is held as shown in FIGS. Different carriers are used. This carrier 1 has a plurality of work holding holes 3 for holding a work 2 and is equipped with a gear 4 that meshes with a sun gear and an internal gear of a plane polishing device on the outer periphery. It is made of fiber reinforced plastics hardened with epoxy resin, and holds the work 2 in each holding hole 3 which is slightly thicker than the thickness of the carrier.

【0003】しかしながら従来のキャリヤ1は、強化用
繊維として硬くて折れ易いガラス繊維を使用していたた
め、該ガラス繊維が毛羽立った状態で保持穴3の側壁か
ら穴内に突出し、ワーク2の外周面2aに掻き傷を付け
易いという欠点があった。
However, since the conventional carrier 1 uses the glass fiber which is hard and easily broken as the reinforcing fiber, the glass fiber protrudes into the hole from the side wall of the holding hole 3 in a fluffy state, and the outer peripheral surface 2a of the work 2 is formed. It had the drawback of being easily scratched.

【0004】[0004]

【発明が解決しようとする課題】本発明の課題は、強化
用繊維でワーク外周面に掻き傷を付けることのない繊維
強化プラスチック製の平面研磨装置用キャリヤを提供す
ることにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a carrier for a flat polishing apparatus made of fiber reinforced plastic which does not scratch the outer peripheral surface of a work with reinforcing fibers.

【0005】[0005]

【課題を解決するための手段及び作用】上記課題を解決
するため、本発明のキャリヤは、強化用繊維をプラスチ
ックで固めた繊維強化プラスチックにより形成され、少
なくとも中層部に、強化用繊維としてポリエステル繊維
等の柔軟性ある繊維が配設されている。
In order to solve the above problems, the carrier of the present invention is formed of a fiber reinforced plastic obtained by hardening reinforcing fibers with a plastic, and at least in the middle layer, polyester fibers are used as reinforcing fibers. Flexible fibers such as are arranged.

【0006】上記キャリヤにワークを保持させた場合、
上下両面のエッジが面取りされた該ワークの外周は保持
穴内において主としてキャリヤの中層部に当接するが、
該中層部には柔軟な補強用繊維が配設されているため、
該繊維によってワークが傷付けられることがない。
When the work is held by the carrier,
The outer circumference of the work whose edges are chamfered contacts the middle layer of the carrier mainly in the holding hole.
Since a flexible reinforcing fiber is arranged in the middle layer portion,
The work is not damaged by the fibers.

【0007】また、本発明の他の例によれば、強化用繊
維をプラスチックで固めた繊維強化プラスチックからな
る外層部と、該繊維強化プラスチックより軟質の素材か
らなる中層部とで構成されたキャリヤが提供される。
According to another embodiment of the present invention, a carrier composed of an outer layer portion made of a fiber reinforced plastic obtained by hardening reinforcing fibers with a plastic and an intermediate layer portion made of a material softer than the fiber reinforced plastic. Will be provided.

【0008】このように中層部を軟質の素材で形成する
場合、ワーク保持穴内において該中層部を外層部より内
側に突出させることもできる。
When the middle layer portion is made of a soft material as described above, the middle layer portion can be made to project inward from the outer layer portion in the work holding hole.

【0009】また、本発明のキャリヤの製造方法は、強
化用繊維に熱硬化性樹脂を含浸させてなる複数の含浸シ
ートを、強化用繊維としてポリエステル繊維等の柔軟性
ある繊維を用いたものを中間に配した状態で互いに重合
し、これらの含浸シートを熱プレスにより一体成形した
あと、所要の形状に仕上げることを特徴とするものであ
る。
In the method for producing a carrier according to the present invention, a plurality of impregnated sheets obtained by impregnating reinforcing fibers with a thermosetting resin are used, and flexible fibers such as polyester fibers are used as reinforcing fibers. It is characterized in that they are polymerized with each other in the state of being arranged in the middle, these impregnated sheets are integrally molded by hot pressing, and then finished into a desired shape.

【0010】この方法によれば、中層部に柔軟性ある強
化用繊維を含んだ繊維強化プラスチック製キャリヤを簡
単に得ることができる。
According to this method, it is possible to easily obtain a carrier made of a fiber reinforced plastic containing a flexible reinforcing fiber in the middle layer.

【0011】更に、本発明の別の製造方法は、強化用繊
維に熱硬化性樹脂を含浸させてなる複数の含浸シートの
間に、ポリウレタン樹脂等の軟質材からなるシートを両
面接着テープを介して重合し、これらのシートを熱プレ
スにより一体成形したあと、所要の形状に仕上げること
を特徴とするものである。
Further, according to another method of the present invention, a sheet made of a soft material such as a polyurethane resin is interposed between a plurality of impregnated sheets obtained by impregnating a reinforcing fiber with a thermosetting resin via a double-sided adhesive tape. It is characterized in that the sheets are polymerized, and these sheets are integrally molded by hot pressing and then finished into a desired shape.

【0012】[0012]

【実施例】以下、本発明の実施例を図面を参照しながら
詳細に説明するに、図1及び図2は、キャリヤ10と、
該キャリヤ10のワーク保持穴11内に嵌合、保持され
たワーク12とを示しており、該キャリヤ10は、図5
に示す公知のキャリヤ1と同様に、複数のワーク保持穴
11と、平面研磨装置の太陽歯車及び内歯歯車と噛合す
る外周ギア(図示せず)とを備えたもので、図面は一つ
の保持穴11の位置で該キャリヤ10を断面にして示し
ている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described in detail below with reference to the drawings.
The work 12 fitted and held in the work holding hole 11 of the carrier 10 is shown in FIG.
Like the well-known carrier 1 shown in FIG. 1, it is provided with a plurality of work holding holes 11 and an outer peripheral gear (not shown) that meshes with the sun gear and the internal gear of the plane polishing device, and one drawing is provided. The carrier 10 is shown in cross section at the location of the hole 11.

【0013】上記キャリヤ10は、強化用の繊維をプラ
スチックで固めた繊維強化プラスチックにより形成され
たもので、種類の異なる強化用繊維を用いた外層部1
3,13及び中層部14からなっており、主として中層
部14においてワーク12の外周を保持するものであ
る。
The carrier 10 is made of a fiber-reinforced plastic obtained by hardening reinforcing fibers with a plastic. The outer layer portion 1 uses different kinds of reinforcing fibers.
3, 13 and the middle layer portion 14, and mainly holds the outer periphery of the work 12 in the middle layer portion 14.

【0014】上記外層部13,13は、面取りされたワ
ーク12の外周に当接する機会が少ないため、強化用繊
維として強化機能を備えた任意の素材のものを使用する
ことができ、例えばガラス繊維のように硬くて折れ易い
ものであっても良い。これに対して中層部14は、ワー
ク12の外周に当接するため、該ワーク12に掻き傷が
付きにくい柔軟性のある強化用繊維を使用する必要があ
り、このような繊維としてはポリエステル繊維があげら
れ、アルミニウム製のディスクの保持に好適に使用され
る。
Since the outer layer portions 13 and 13 rarely come into contact with the outer periphery of the chamfered work 12, any material having a reinforcing function can be used as the reinforcing fiber, for example, glass fiber. It may be hard and easily broken. On the other hand, since the middle layer portion 14 abuts on the outer circumference of the work 12, it is necessary to use a flexible reinforcing fiber that is unlikely to scratch the work 12, and as such a fiber, a polyester fiber may be used. It is suitable for holding aluminum discs.

【0015】上記キャリヤ10におけるワーク保持穴1
1内にワーク12を嵌合、保持させた場合、上下両面の
エッジが面取りされた該ワーク12の外周12aは、保
持穴11内において主としてキャリヤ10の中層部14
に当接するが、該中層部14には柔軟な強化用繊維が配
設されているため、該繊維によりワーク12に掻き傷が
付けられることはない。
Work holding hole 1 in the carrier 10
When the work 12 is fitted and held in the work 1, the outer periphery 12a of the work 12 whose upper and lower edges are chamfered mainly has the middle layer 14 of the carrier 10 in the holding hole 11.
However, since the soft reinforcing fiber is disposed in the intermediate layer portion 14, the fiber does not scratch the work 12.

【0016】上記キャリヤ10は次のような方法により
製造することができる。即ち、図2に示すように、中層
部14に使用するのに適した強化用繊維(例えばポリエ
ステル繊維)からなるシートに液状エポキシ樹脂等の熱
硬化性樹脂を含浸させた複数の中層用含浸シート14a
の上下両面に、外層部13に使用するのに適した強化用
繊維(例えばガラス繊維)からなるシートに同様に熱硬
化性樹脂を含浸させてなる複数の外層用含浸シート13
aを重合し、これらの重合体を、剥離フィルム16、変
形防止用の金属板17、緩衝用のクッション18を介し
て両側から熱板19,19による熱プレスを施すことに
より一体成形したあと、所要の形状に裁断してキャリヤ
10に仕上げるものである。
The carrier 10 can be manufactured by the following method. That is, as shown in FIG. 2, a plurality of middle-layer-impregnated sheets obtained by impregnating a sheet made of reinforcing fibers (for example, polyester fibers) suitable for use in the middle-layer portion 14 with a thermosetting resin such as a liquid epoxy resin. 14a
A plurality of outer layer impregnated sheets 13 obtained by similarly impregnating a thermosetting resin on a sheet made of reinforcing fibers (for example, glass fibers) suitable for use in the outer layer portion 13 on both upper and lower sides of the sheet.
a is polymerized, and these polymers are integrally molded by heat-pressing with hot plates 19 and 19 from both sides through a peeling film 16, a metal plate 17 for preventing deformation, and a cushion 18 for cushioning. The carrier 10 is cut into a desired shape and finished.

【0017】出来上がったキャリヤ10の厚さや外層部
13及び中層部14の厚さは、各強化用繊維シートの厚
さやその重合枚数等を変えることによって調節すること
ができ、また、中層用含浸シート14aの両側における
外層用含浸シート13aの重合枚数を互いに違えること
によって、両外層部13,13を異なる厚さに形成する
こともできる。なお、上記強化用繊維シートは、織布で
あっても不織布であっても良い。
The thickness of the finished carrier 10 and the thicknesses of the outer layer portion 13 and the middle layer portion 14 can be adjusted by changing the thickness of each reinforcing fiber sheet and the number of superposed sheets, and the impregnated sheet for the middle layer. It is also possible to form the outer layer portions 13 and 13 with different thicknesses by making the number of sheets of the outer layer impregnated sheet 13a on both sides of 14a different from each other. The reinforcing fiber sheet may be woven or non-woven.

【0018】上記第1実施例のキャリヤ10は、中層部
14に柔軟性のある強化用繊維を使用し、外層部13,
13に強度の大きい剛性繊維を使用しているが、このよ
うに種類の異なる強化用繊維を使用することなく、全体
をポリエステル繊維等の柔軟性のある繊維のみによって
形成することもできる。
The carrier 10 of the first embodiment uses a flexible reinforcing fiber for the middle layer 14, and the outer layer 13,
Although a rigid fiber having high strength is used for 13, the entire fiber can be formed of only a flexible fiber such as polyester fiber without using different types of reinforcing fibers.

【0019】図3は本発明に係るキャリヤの第2実施例
を示すもので、該キャリヤ20は、繊維強化プラスチッ
クからなる外層部23,23と、該繊維強化プラスチッ
クより軟質の素材からなる中層部24とで構成されてい
る。
FIG. 3 shows a second embodiment of the carrier according to the present invention. The carrier 20 comprises outer layer portions 23, 23 made of fiber reinforced plastic and an intermediate layer portion made of a material softer than the fiber reinforced plastic. 24 and 24.

【0020】上記外層部23,23は、上記第1実施例
のキャリヤ10の外層部13,13と同様に、キャリヤ
として必要な強度を保ち得るだけの強化機能を備えた任
意の強化用繊維、例えばガラス繊維を使用して形成され
ており、これに対して中層部24は、ポリウレタン樹脂
のような軟質材により形成されるが、好ましくは、ポリ
ウレタン樹脂にセリウムを含有させたセリウムパッドが
使用され、ガラスディスクの保持に好適に用いられる。
この場合、図示したように、ワーク保持穴21内におい
て中層部24を外層部23,23より内側に若干突出さ
せておくことが望ましく、これにより、中層部24が圧
縮された場合の外層部23へのワーク22の当接を有効
に防ぐことができる。
Similar to the outer layer portions 13 and 13 of the carrier 10 of the first embodiment, the outer layer portions 23 and 23 are optional reinforcing fibers having a reinforcing function capable of maintaining the strength required as a carrier, For example, it is formed by using glass fiber, while the middle layer portion 24 is formed by a soft material such as polyurethane resin, and preferably a cerium pad in which cerium is contained in polyurethane resin is used. It is preferably used for holding glass disks.
In this case, as shown in the figure, it is desirable that the middle layer portion 24 is slightly protruded inward from the outer layer portions 23, 23 in the work holding hole 21, so that the outer layer portion 23 when the middle layer portion 24 is compressed. It is possible to effectively prevent the workpiece 22 from coming into contact with the workpiece.

【0021】上記第2実施例のキャリヤ20は、次のよ
うな方法により製造することができる。即ち、図4に示
すように、中層部24を形成するセリウムパッド等の軟
質材シート24aの上下両面に、ガラス繊維等の強化用
繊維からなるシートに液状エポキシ樹脂等の熱硬化性樹
脂を含浸させた複数の外層用含浸シート23aを、両面
接着テープ25を介して重合し、これらの重合体を、剥
離フィルム26、変形防止用の金属板27、緩衝用のク
ッション28を介して両側から熱板29,29による熱
プレスを施すことにより一体成形したあと、所要の形状
に裁断してキャリヤ10に仕上げるものである。
The carrier 20 of the second embodiment can be manufactured by the following method. That is, as shown in FIG. 4, a sheet made of reinforcing fibers such as glass fibers is impregnated with a thermosetting resin such as a liquid epoxy resin on both upper and lower surfaces of a soft material sheet 24a such as a cerium pad forming the middle layer portion 24. The plurality of outer layer impregnated sheets 23a thus prepared are polymerized via a double-sided adhesive tape 25, and these polymers are heated from both sides via a release film 26, a metal plate 27 for preventing deformation, and a cushion 28 for cushioning. The carrier 10 is integrally molded by heat-pressing the plates 29, 29, and then cut into a desired shape to finish the carrier 10.

【0022】[0022]

【発明の効果】このように本発明によれば、中層部が柔
軟構造となった繊維強化プラスチック製のキャリヤを簡
単に得ることができると共に、該キャリヤの使用により
ワークを外周面に掻き傷を付けることなく確実に保持す
ることができる。
As described above, according to the present invention, it is possible to easily obtain a carrier made of fiber reinforced plastic having a flexible middle layer portion, and by using the carrier, the work is scratched on the outer peripheral surface. It can be securely held without attaching.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るキャリヤの一実施例を示す要部断
面図である。
FIG. 1 is a sectional view of an essential part showing an embodiment of a carrier according to the present invention.

【図2】図1のキャリヤの製造方法を示す分解図であ
る。
FIG. 2 is an exploded view showing a method of manufacturing the carrier of FIG.

【図3】本発明に係るキャリヤの別実施例を示す要部断
面図である。
FIG. 3 is a sectional view of an essential part showing another embodiment of the carrier according to the present invention.

【図4】図3のキャリヤの製造方法を示す分解図であ
る。
FIG. 4 is an exploded view showing a method of manufacturing the carrier of FIG.

【図5】従来のキャリヤの平面図である。FIG. 5 is a plan view of a conventional carrier.

【図6】図5におけるA−A線での断面図である。6 is a cross-sectional view taken along the line AA in FIG.

【符号の説明】[Explanation of symbols]

10,20 キャリヤ 11,21 保持穴 12,22 ワーク 12a 外周 13,23 外層部 13a,23a 外
層用含浸シート 14,24 中層部 14a,24a 中
層用含浸シート 25 両面接着テープ
10, 20 Carrier 11, 21 Holding hole 12, 22 Work 12a Outer periphery 13, 23 Outer layer 13a, 23a Outer layer impregnated sheet 14, 24 Middle layer 14a, 24a Middle layer impregnated sheet 25 Double-sided adhesive tape

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 B29L 31:00 4F ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Internal reference number FI technical display area B29L 31:00 4F

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 ワークを研磨加工する平面研磨装置にお
いてワークの保持に使用されるキャリヤであって、強化
用繊維をプラスチックで固めた繊維強化プラスチックに
より形成され、少なくとも中層部に、強化用繊維として
ポリエステル繊維等の柔軟性ある繊維が配設されている
ことを特徴とする平面研磨装置用キャリヤ。
1. A carrier used for holding a work in a flat polishing apparatus for polishing a work, the carrier being formed of a fiber reinforced plastic obtained by hardening a reinforcing fiber with a plastic, as a reinforcing fiber in at least an intermediate layer portion. A carrier for a flat polishing apparatus, wherein flexible fibers such as polyester fibers are arranged.
【請求項2】 ワークを研磨加工する平面研磨装置にお
いてワークの保持に使用されるキャリヤであって、強化
用繊維をプラスチックで固めた繊維強化プラスチックか
らなる外層部と、該繊維強化プラスチックより軟質の素
材からなる中層部とで構成されていることを特徴とする
平面研磨装置用キャリヤ。
2. A carrier used for holding a work in a flat polishing apparatus for polishing a work, the outer layer comprising a fiber reinforced plastic in which reinforcing fibers are hardened with plastic, and a carrier softer than the fiber reinforced plastic. A carrier for a flat polishing apparatus, comprising a middle layer made of a raw material.
【請求項3】 ワーク保持穴内において中層部が外層部
より内側に突出していることを特徴とする請求項2に記
載の平面研磨装置用キャリヤ。
3. The carrier for a flat polishing apparatus according to claim 2, wherein the middle layer portion projects inward from the outer layer portion in the work holding hole.
【請求項4】 強化用繊維に熱硬化性樹脂を含浸させて
なる複数の含浸シートを、強化用繊維としてポリエステ
ル繊維等の柔軟性ある繊維を用いたものを中間に配した
状態で互いに重合し、これらの含浸シートを熱プレスに
より一体成形したあと、所要の形状に仕上げることを特
徴とする平面研磨装置用キャリヤの製造方法。
4. A plurality of impregnated sheets obtained by impregnating a reinforcing fiber with a thermosetting resin are polymerized with each other while a flexible fiber such as a polyester fiber is used as the reinforcing fiber in the middle. A method for manufacturing a carrier for a flat polishing apparatus, which comprises integrally molding these impregnated sheets by hot pressing and then finishing the shape into a desired shape.
【請求項5】 強化用繊維に熱硬化性樹脂を含浸させて
なる複数の含浸シートの間に、ポリウレタン樹脂等の軟
質材からなるシートを両面接着テープを介して重合し、
これらのシートを熱プレスにより一体成形したあと、所
要の形状に仕上げることを特徴とする平面研磨装置用キ
ャリヤの製造方法。
5. A sheet made of a soft material such as polyurethane resin is polymerized through a double-sided adhesive tape between a plurality of impregnated sheets obtained by impregnating reinforcing fibers with a thermosetting resin,
A method for manufacturing a carrier for a flat polishing apparatus, which comprises integrally molding these sheets by hot pressing and then finishing them into a desired shape.
JP11911693A 1993-04-22 1993-04-22 Carrier and manufacture thereof for surface polishing machine Pending JPH06304859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11911693A JPH06304859A (en) 1993-04-22 1993-04-22 Carrier and manufacture thereof for surface polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11911693A JPH06304859A (en) 1993-04-22 1993-04-22 Carrier and manufacture thereof for surface polishing machine

Publications (1)

Publication Number Publication Date
JPH06304859A true JPH06304859A (en) 1994-11-01

Family

ID=14753332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11911693A Pending JPH06304859A (en) 1993-04-22 1993-04-22 Carrier and manufacture thereof for surface polishing machine

Country Status (1)

Country Link
JP (1) JPH06304859A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10249719A (en) * 1997-03-05 1998-09-22 Mitsubishi Rayon Co Ltd Fiber reinforced plastic carrier plate
WO1999004931A1 (en) * 1997-07-23 1999-02-04 Speedfam-Ipec Corporation Apparatus for holding workpieces during lapping, honing, and polishing
US6291373B1 (en) 1997-10-20 2001-09-18 Shin-Kobe Electric Machinery Co., Ltd. Polished-piece holder
KR100396435B1 (en) * 2001-03-06 2003-09-03 주식회사 유아이디 Glass holder of polishing machine for LCD glass
JP2014069570A (en) * 2012-09-28 2014-04-21 Samsung Electronics Co Ltd Housing for an electronic device and method for processing the same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10249719A (en) * 1997-03-05 1998-09-22 Mitsubishi Rayon Co Ltd Fiber reinforced plastic carrier plate
WO1999004931A1 (en) * 1997-07-23 1999-02-04 Speedfam-Ipec Corporation Apparatus for holding workpieces during lapping, honing, and polishing
US6030280A (en) * 1997-07-23 2000-02-29 Speedfam Corporation Apparatus for holding workpieces during lapping, honing, and polishing
US6291373B1 (en) 1997-10-20 2001-09-18 Shin-Kobe Electric Machinery Co., Ltd. Polished-piece holder
US6566286B1 (en) 1997-10-20 2003-05-20 Shin-Kobe Electric Machinery Co., Ltd. Polished-piece holder
KR100396435B1 (en) * 2001-03-06 2003-09-03 주식회사 유아이디 Glass holder of polishing machine for LCD glass
JP2014069570A (en) * 2012-09-28 2014-04-21 Samsung Electronics Co Ltd Housing for an electronic device and method for processing the same
US9820396B2 (en) 2012-09-28 2017-11-14 Samsung Electronics Co., Ltd. Housing for electronic device and manufacturing method thereof

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