JPH06290917A - Manufacture of flame-sprayed heater - Google Patents
Manufacture of flame-sprayed heaterInfo
- Publication number
- JPH06290917A JPH06290917A JP5077092A JP7709293A JPH06290917A JP H06290917 A JPH06290917 A JP H06290917A JP 5077092 A JP5077092 A JP 5077092A JP 7709293 A JP7709293 A JP 7709293A JP H06290917 A JPH06290917 A JP H06290917A
- Authority
- JP
- Japan
- Prior art keywords
- film
- groove
- heating element
- heater
- sprayed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Adjustable Resistors (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、通電することに発熱さ
せる溶射発熱体の製造法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a thermal spray heating element that produces heat when energized.
【０００２】[0002]
【従来の技術】電気抵抗発熱体の抵抗値は設計上、最も
重要な要素であり、この抵抗値は、抵抗体の断面積に反
比例するため、溶射により発熱体を製造する場合にも、
設計値どおりの膜厚と幅とを溶射することが非常に重要
になる。2. Description of the Related Art The resistance value of an electric resistance heating element is the most important factor in design, and since this resistance value is inversely proportional to the cross-sectional area of the resistance element, even when manufacturing the heating element by thermal spraying,
It is very important to spray the film thickness and width as designed.
【０００３】[0003]
【発明が解決しようとする課題】従来から任意の幅に溶
射するために、マスキングが用いられている（例えば、
実開昭５８−１２０５９７号公報による電気調理器具や
特公平２−５６４２５号公報による天然砂鉄を用いた面
発熱皮膜の形成方法など）。しかし、マスキングにより
任意の幅に溶射された皮膜では、マスク自体の厚さによ
り、被溶射材の表面に生じるガスの乱流、被溶射物体の
形状に起因する局所的な溶射条件の変化などが原因とな
って溶射粒子の堆積が不均一となり、皮膜の幅と特に膜
厚の管理に限界が生じる。特に皮膜の幅が狭くなるほ
ど、膜厚の管理が困難になる。Conventionally, masking has been used for thermal spraying to an arbitrary width (for example,
For example, a method for forming a surface heating film using an electric cooking appliance according to Japanese Utility Model Publication No. 58-120597 and natural sand iron according to Japanese Patent Publication No. 2-56425). However, with a coating sprayed to an arbitrary width by masking, the thickness of the mask itself may cause turbulent gas flow on the surface of the material to be sprayed, and local changes in spraying conditions due to the shape of the sprayed object. As a result, the deposition of thermal spray particles becomes non-uniform, which limits the control of the width of the film and especially the film thickness. In particular, the narrower the width of the film, the more difficult it becomes to control the film thickness.
【０００４】したがって、従来のマスキングを利用する
と、皮膜の抵抗値を一定にすることが困難になる。ま
た、マスクの材質も、耐熱性で剛性をもつ材料に限定さ
れるので、使い捨てにすると材料コストがかかり、再利
用すると付着した皮膜を剥離するための加工コストがか
かり、溶射加工全体がコストアップする原因となる。Therefore, if the conventional masking is used, it becomes difficult to make the resistance value of the film constant. In addition, the mask material is limited to heat-resistant and rigid materials, so there is a material cost when it is thrown away, and a processing cost for peeling off the adhered film when it is reused, which increases the cost of the entire thermal spraying process. Cause
【０００５】本発明は、従来技術では困難である数μｍ
オーダでの発熱体皮膜の膜厚管理による抵抗値の管理を
容易にし、溶射加工全体に要するコストを低減した溶射
発熱体の製造法を提供することを目的としている。The present invention is several μm, which is difficult in the prior art.
It is an object of the present invention to provide a method for manufacturing a thermal spray heating element that facilitates the management of the resistance value by controlling the thickness of the heating element coating on the order and reduces the cost required for the overall thermal spray processing.
【０００６】[0006]
【課題を解決するための手段】本発明による製造法は、
導電性基材の表面にあらかじめ任意の深さと任意の幅の
溝を刻設しておき、この溝に対し導電性材料を溶射した
のち、その溶射した導電性材料の皮膜表面を研磨加工
し、溝の内部にだけ前記皮膜を残し膜厚を任意に決定し
た導電性皮膜で前記基材に抵抗体を形成することを特徴
としている。The manufacturing method according to the present invention comprises:
A groove having an arbitrary depth and an arbitrary width is previously engraved on the surface of the conductive base material, and the conductive material is sprayed on the groove, and then the coating surface of the sprayed conductive material is polished. It is characterized in that the film is left only inside the groove and the resistor is formed on the base material by a conductive film whose film thickness is arbitrarily determined.
【０００７】なお、基材及び溶射発熱体の各層の熱膨張
率の差は層間に傾斜組成を行うことにより剥離防止とな
る。The difference in the coefficient of thermal expansion between the base material and each layer of the thermal spray heating element can be prevented from peeling by forming a graded composition between the layers.
【０００８】[0008]
【作用】本発明の溶射発熱体の製造法において、基材が
導電性である場合には、発熱体の幅で深さが発熱体の厚
さより数割大きい（この深さは製品の使用により決定す
る）溝を切削、エッチング、レーザ、放電等により刻設
し、この溝に、下地皮膜（必要な場合）、絶縁体皮膜、
発熱体皮膜の順に、発熱体皮膜が設計の膜厚以上になる
まで溶射したのちに、不必要な皮膜を研磨加工で除去す
ることにより、発熱体皮膜を数μｍ単位で管理し、抵抗
値を再現性良く高精度で管理する。又、発熱の時その層
が基材内部であるため放熱が小さくなる。なお、必要に
応じ、発熱体皮膜の上に絶縁皮膜を溶射又はテフロン等
で加工する。In the method for producing a thermal spray heating element of the present invention, when the base material is conductive, the width of the heating element is several tens of percent larger than the thickness of the heating element (this depth depends on the use of the product). (Decision) Engrave a groove by cutting, etching, laser, electric discharge, etc., and in this groove, a base film (if necessary), an insulator film,
The heating element coating is sprayed in this order until the heating element coating reaches the designed thickness or more, and then unnecessary coating is removed by polishing to control the heating element coating in units of several μm and to reduce the resistance value. Manage with high reproducibility and high accuracy. Further, when the heat is generated, the heat dissipation is small because the layer is inside the substrate. If necessary, an insulating film is sprayed on the heating element film or is processed by Teflon or the like.
【０００９】また、基材の表面が絶縁体である場合に
は、刻設した溝に、導電性材料を満たされるまで溶射し
たのち、溝の中以外の不必要な被膜を研磨加工で除去す
る。When the surface of the base material is an insulator, the engraved groove is sprayed with a conductive material until it is filled with the conductive material, and then the unnecessary film other than the groove is removed by polishing. .
【００１０】これらの加工により、抵抗値の管理が容易
になり、精度も向上する。また、マスクによらないの
で、コストダウンとなる。By these processes, it becomes easy to control the resistance value and the accuracy is improved. Moreover, since it does not depend on the mask, the cost is reduced.
【００１１】[0011]
【実施例】以下図面を参照して本発明の実施例を説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【００１２】図１及び図２に示すように、基材であるア
ルミニューム板１に、発熱体皮膜のパターンＰを残し
て、図示しない有機系の塗料を塗る。次いで、この塗料
を塗ったアルミニューム板１を塩酸中で均一に腐食さ
せ、パターンＰに対応した溝２を例えば約２００μｍの
深さにエッチングする。As shown in FIGS. 1 and 2, an aluminum-based plate 1, which is a base material, is coated with an organic paint (not shown) while leaving the pattern P of the heating element film. Next, the aluminum plate 1 coated with this paint is uniformly corroded in hydrochloric acid, and the groove 2 corresponding to the pattern P is etched to a depth of about 200 μm, for example.
【００１３】次いで、基材１の表面にアルミナグリッド
によりブラストし、例えは厚さ５０μｍのＮｉ＋Ｃｒ合
金の下地皮膜１０、例えば厚さ３００μｍのＡｌ2 Ｏ3
の絶縁体皮膜１１及び例えば厚さ２００μｍのＮｉ＋Ｃ
ｒの発熱体皮膜１２を順にプラズマ溶射する。Next, the surface of the base material 1 is blasted with an alumina grid, for example, an undercoat 10 of Ni + Cr alloy having a thickness of 50 μm, for example, Al 2 O 3 having a thickness of 300 μm.
Insulator film 11 and Ni + C having a thickness of 200 μm, for example
The heating element coating 12 of r is sequentially plasma sprayed.
【００１４】最後に表面を研磨加工し、発熱体皮膜１２
のパターンＰが完全に現れるまで、すなわち、図２にお
いて厚さｔを研磨して完了する。この状態で、発熱体皮
膜１２のパターンＰは、絶縁体皮膜１１の中に保持され
ている。Finally, the surface is polished to form the heating element film 12
The pattern P is completely revealed, that is, the thickness t is polished in FIG. In this state, the pattern P of the heating element film 12 is held in the insulator film 11.
【００１５】この発熱体皮膜１２の両端に端子１３、１
４を取付け、抵抗器１５により、両端子１３、１４間の
抵抗値を測定したところ、１０枚の基板１の抵抗値の変
動は、プラス・マイナス５％の高精度の結果が得られ
た。Terminals 13 and 1 are provided on both ends of the heating element film 12.
4 was attached, and the resistance value between both terminals 13 and 14 was measured by the resistor 15. As a result, fluctuations in the resistance value of the ten substrates 1 were obtained with high accuracy of plus or minus 5%.
【００１６】図３ないし図５には本発明により得られた
溶射発熱体の別の実施例が示されている。この発熱体
は、例えば外径Ｄが３４ｍｍ、長さＬが１ｍのステレン
ス管３に、例えば深さ０．３ｍｍ、幅１０ｍｍの溝４
を、両端部に、間隔Ｄ（例えば５ｃｍ）で３条、中央部
に、間隔Ｄ１（例えば１０ｃｍ）で３条を刻設する。次
いで前記と同様にして図４に示すように、例えば厚さ５
０μｍのＮｉ＋Ｃｒ合金の下地皮膜１０、例えば厚さ３
００μｍのＡｌ2 Ｏ3 の絶縁体皮膜１１及び例えば厚さ
１２０μｍのＮｉ＋Ｃｒの発熱体皮膜１２を順次溶射す
る。最後に図５に示すように、発熱体皮膜１２の膜厚が
例えば１００μｍになるように、厚さｔ１を研磨した例
である。FIGS. 3 to 5 show another embodiment of the thermal spray heating element obtained according to the present invention. This heating element has, for example, a groove 4 having a depth of 0.3 mm and a width of 10 mm in a stainless steel tube 3 having an outer diameter D of 34 mm and a length L of 1 m.
Are engraved on both ends at intervals D (for example, 5 cm), and at the center with three intervals at intervals D1 (for example, 10 cm). Then, in the same manner as described above, as shown in FIG.
Undercoat 10 of Ni + Cr alloy of 0 μm, for example, thickness 3
An Al 2 O 3 insulator film 11 having a thickness of 00 μm and a heating element film 12 of Ni + Cr having a thickness of 120 μm, for example, are sequentially sprayed. Finally, as shown in FIG. 5, this is an example in which the thickness t1 is polished so that the film thickness of the heating element film 12 is, for example, 100 μm.
【００１７】この発熱体に電力１ＫＷを印加し、熱電対
でステンレス管３の表面温度の測定結果を図６に示す。
図から、溝４を等間隔で設けた場合の温度特性Ｂに対
し、温度特性Ａのように温度均一帯が拡大していること
が判る。An electric power of 1 kW is applied to this heating element, and the result of measuring the surface temperature of the stainless steel tube 3 with a thermocouple is shown in FIG.
From the figure, it can be seen that the temperature uniform band expands as in the temperature characteristic A as compared with the temperature characteristic B when the grooves 4 are provided at equal intervals.
【００１８】[0018]
【発明の効果】以上説明したように本発明によれば、基
材に溝を設けたことにより、抵抗値の管理及び精度を向
上することができる。As described above, according to the present invention, by providing the groove in the base material, it is possible to improve the control and accuracy of the resistance value.
【００１９】また、マスキングによらないで、一品製
品、大量製品向けにも容易に対応し、かつコストダウン
を図ることかできる。Further, without using masking, it is possible to easily deal with one product or a large number of products and to reduce the cost.
【図１】本発明を実施した溶射発熱体の一例を示す斜視
図。FIG. 1 is a perspective view showing an example of a thermal spray heating element embodying the present invention.
【図２】図１のＡ−Ａ´線矢視断面図。FIG. 2 is a sectional view taken along the line AA ′ of FIG.
【図３】本発明を実施した溶射発熱体の他の例を示す斜
視図。FIG. 3 is a perspective view showing another example of the thermal spray heating element embodying the present invention.
【図４】溝の研磨前の状態を示す断面図。FIG. 4 is a cross-sectional view showing a state before polishing the groove.
【図５】溝の研磨後の状態を示す断面図。FIG. 5 is a cross-sectional view showing a state after polishing the groove.
【図６】溝間隔の温度依存性を説明する測定結果図。FIG. 6 is a measurement result diagram illustrating the temperature dependence of the groove spacing.
Ｄ・・・溝の間隔 Ｐ・・・発熱体のパターン ｔ、ｔ１・・・研磨厚さ １・・・アルミニューム板 ２、４・・・溝 ３・・・ステンレス管 １０・・・下地皮膜 １１・・・絶縁体皮膜 １２・・・発熱体皮膜 １３、１４・・・端子 １５・・・抵抗器 D ... Groove spacing P ... Heating element pattern t, t1 ... Polishing thickness 1 ... Aluminum plate 2, 4 ... Groove 3 ... Stainless tube 10 ... Undercoat 11 ... Insulator film 12 ... Heater film 13, 14 ... Terminal 15 ... Resistor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小屋 敏行 東京都大田区羽田旭町11番１号 株式会社 荏原製作所内 (72)発明者 小林 和也 千葉県船橋市行田１丁目１番１号 トーカ ロ株式会社内 (72)発明者 竹内 純一 千葉県船橋市行田１丁目１番１号 トーカ ロ株式会社内 (72)発明者 熊川 雅也 千葉県船橋市行田１丁目１番１号 トーカ ロ株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshiyuki Koya 11-1 Haneda-Asahicho, Ota-ku, Tokyo Ebara Corporation (72) Inventor Kazuya Kobayashi 1-1-1 Gyoda, Funabashi, Chiba Toka Incorporated (72) Inventor Junichi Takeuchi 1-1-1, Gyoda, Funabashi, Chiba Prefecture Tokaro Co., Ltd. (72) Inventor Masaya Kumakawa 1-1-1, Gyoda, Funabashi, Chiba Tokaro Co., Ltd.
Claims (3)
意の深さと任意の幅の溝を刻設しておき、この溝に対し
導電性材料を溶射したのち、その溶射した導電性材料の
皮膜表面を研磨加工し、溝の内部にだけ前記皮膜を残し
膜厚を任意に決定した導電性皮膜で前記基材に抵抗体を
形成することを特徴とする溶射発熱体の製造法。1. A groove having an arbitrary depth and an arbitrary width is preliminarily formed on a surface of a base material of an insulating material, and a conductive material is sprayed on the groove, and then the sprayed conductive material is formed. A method for producing a thermal spray heating element, characterized in that the surface of the coating film is polished to leave the coating film only inside the groove and a resistor is formed on the base material with a conductive coating film having a film thickness arbitrarily determined.
意の深さと任意の幅の溝を刻設しておき、この溝に対し
順次絶縁性材料、導電性材料を溶射したのち、その溶射
した導電性材料の皮膜表面を研磨加工し、溝の内部にだ
け前記皮膜を残し膜厚を任意に決定した導電性皮膜で前
記基材に抵抗体を形成することを特徴とする溶射発熱体
の製造法。2. A groove having an arbitrary depth and an arbitrary width is preliminarily formed on the surface of a base material of a conductive material, and an insulating material and a conductive material are sequentially sprayed to the groove, and then the thermal spraying is performed. Of the sprayed heating element, characterized in that the resistive material is formed on the base material by a conductive coating having a film thickness arbitrarily determined by leaving the coating film only inside the groove by polishing the surface of the conductive material. Manufacturing method.
とする請求項１記載の溶射発熱体の製造法。3. The method for manufacturing a thermal spray heating element according to claim 1, wherein the intervals between the grooves are arbitrary.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5077092A JPH06290917A (en) | 1993-04-02 | 1993-04-02 | Manufacture of flame-sprayed heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5077092A JPH06290917A (en) | 1993-04-02 | 1993-04-02 | Manufacture of flame-sprayed heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06290917A true JPH06290917A (en) | 1994-10-18 |
Family
ID=13624144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5077092A Pending JPH06290917A (en) | 1993-04-02 | 1993-04-02 | Manufacture of flame-sprayed heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06290917A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009218242A (en) * | 2008-03-07 | 2009-09-24 | Hitachi High-Technologies Corp | Production method of plasma processing apparatus |
| US8092637B2 (en) | 2008-02-28 | 2012-01-10 | Hitachi High-Technologies Corporation | Manufacturing method in plasma processing apparatus |
| DE10162276C5 (en) * | 2001-12-19 | 2019-03-14 | Watlow Electric Manufacturing Co. | Tubular water heater and heating plate and method for their preparation |
-
1993
- 1993-04-02 JP JP5077092A patent/JPH06290917A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10162276C5 (en) * | 2001-12-19 | 2019-03-14 | Watlow Electric Manufacturing Co. | Tubular water heater and heating plate and method for their preparation |
| US8092637B2 (en) | 2008-02-28 | 2012-01-10 | Hitachi High-Technologies Corporation | Manufacturing method in plasma processing apparatus |
| JP2009218242A (en) * | 2008-03-07 | 2009-09-24 | Hitachi High-Technologies Corp | Production method of plasma processing apparatus |
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