JPH06290861A - Sheet form heat emitting body - Google Patents
Sheet form heat emitting bodyInfo
- Publication number
- JPH06290861A JPH06290861A JP9393093A JP9393093A JPH06290861A JP H06290861 A JPH06290861 A JP H06290861A JP 9393093 A JP9393093 A JP 9393093A JP 9393093 A JP9393093 A JP 9393093A JP H06290861 A JPH06290861 A JP H06290861A
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- emitting body
- ceramic substrate
- heat emitting
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は面状発熱体、特に１００
０℃以上の高温用加熱炉等に用いる面状発熱体に関する
ものである。BACKGROUND OF THE INVENTION The present invention relates to a sheet heating element, particularly 100
The present invention relates to a sheet heating element used in a heating furnace for high temperatures of 0 ° C. or higher.
【０００２】[0002]
【従来の技術】従来においては、図３〜図５に示すよう
に波状の発熱線１を石英等を含むセラミックス基板２の
表面に載置し、その複数個所を無機接着剤３によってセ
ラミックス基板２に固定し、板状のセラミックスを用い
た放熱板４を上記セラミックス基板２に重ねて両者間で
上記発熱線１を挾持せしめ、締付機構５によって締め付
けている。2. Description of the Related Art Conventionally, as shown in FIGS. 3 to 5, a wavy heating wire 1 is placed on a surface of a ceramic substrate 2 containing quartz and the like, and a plurality of places thereof are bonded by an inorganic adhesive 3 to the ceramic substrate 2. The heat radiation plate 4 made of a plate-shaped ceramic is fixed on the ceramic substrate 2 and the heating wire 1 is sandwiched between the two, and is tightened by the tightening mechanism 5.
【０００３】[0003]
【発明が解決しようとする課題】しかし、このような面
状発熱体の場合、高温になると発熱線１の膨張により無
機接着剤３が剥離して発熱線１が移動し、短絡するよう
になるおそれがあり、また、上記発熱線１を挾持するセ
ラミックス基板２と放熱板４間に発熱線１の厚みに相当
する隙間を生じ、セラミックス基板２と放熱板４に対す
る発熱線１の接触面がその分減少し、発熱線１からの伝
熱が悪くなるという欠点があった。However, in the case of such a sheet heating element, when the temperature rises, the expansion of the heating wire 1 causes the inorganic adhesive 3 to separate and the heating wire 1 to move, resulting in a short circuit. In addition, a gap corresponding to the thickness of the heat generating wire 1 is formed between the ceramic substrate 2 that holds the heat generating wire 1 and the heat radiating plate 4, and the contact surface of the heat generating wire 1 with respect to the ceramic substrate 2 and the heat radiating plate 4 is However, there is a drawback that the heat transfer from the heating wire 1 becomes worse.
【０００４】このため、図６に示すようにセラミックス
基板２の表面に機械加工により溝６を形成し、この溝６
内に板状発熱体１を埋め込むようにしたものもあるが、
このような機械加工によるものでは溝６の形状、寸法を
正確に定めることができず、従って溝６内で発熱体１が
移動し、騒音を発するようになる等のおそれがあるため
放熱板４の下面に突起７を設け、これによって発熱体１
を押圧する必要があり、構造が複雑となる欠点があっ
た。Therefore, as shown in FIG. 6, a groove 6 is formed on the surface of the ceramic substrate 2 by machining, and the groove 6 is formed.
There is also one in which the plate-shaped heating element 1 is embedded,
With such machining, the shape and dimensions of the groove 6 cannot be accurately determined, and therefore the heating element 1 may move in the groove 6 and generate noise, so that the heat radiating plate 4 may be generated. Protrusions 7 are provided on the lower surface of the
It is necessary to press, and there is a drawback that the structure becomes complicated.
【０００５】本発明は上記の欠点を除くようにしたもの
である。The present invention is intended to eliminate the above drawbacks.
【０００６】[0006]
【課題を解決するための手段】本発明の面状発熱体は、
セラミックス基板と、ジグザグ状または波状に湾曲した
板状発熱体と、上記セラミックス基板の表面にマスク及
びサンドブラストまたはエッチング技術により形成した
上記発熱体を埋めるための、上記発熱体と同一形状の溝
と、上記セラミックス基板上に載置した放熱板とより成
り、上記発熱体の表面が上記セラミックス基板の表面と
一致することを特徴とする。The sheet heating element of the present invention comprises:
A ceramic substrate, a plate-shaped heating element curved in a zigzag shape or a wavy shape, and a groove having the same shape as the heating element for filling the heating element formed by a mask and sandblasting or etching technique on the surface of the ceramic substrate, It is characterized in that it comprises a heat dissipation plate mounted on the ceramics substrate, and the surface of the heating element coincides with the surface of the ceramics substrate.
【０００７】[0007]
【実施例】以下図面によって本発明の実施例を説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【０００８】本発明においては図１，図２に示すよう
に、セラミックス基板２の表面にマスクとサンドブラス
ト、またはエッチング技術によりジグザグ状または波状
に湾曲した板状発熱体１に対応する形状及び寸法の溝６
を形成し、この溝６内にジグザグ状または波状に湾曲し
た板状発熱体１を埋設し、上記板状発熱体１の表面と上
記セラミックス基板２の表面が一致されるようにすると
共に、上記発熱体１を挾持するよう上記セラミックス基
板２上にセラミックスの放熱板４を重ね、これらを締付
機構５によって締め付ける。In the present invention, as shown in FIGS. 1 and 2, a shape and a dimension corresponding to the plate-shaped heating element 1 curved in a zigzag shape or a wavy shape on the surface of the ceramic substrate 2 by a mask and sandblasting or an etching technique. Groove 6
A zigzag or wavy curved plate-shaped heating element 1 is embedded in the groove 6 so that the surface of the plate-shaped heating element 1 and the surface of the ceramic substrate 2 are aligned with each other. A ceramic heat radiating plate 4 is placed on the ceramic substrate 2 so as to hold the heating element 1, and these are tightened by a tightening mechanism 5.
【０００９】上記セラミックス基板２の表面にマスクと
サンドブラスト、またはエッチングにより溝６を形成す
るには、例えばセラミックス基板２が石英板の場合、発
熱体１と等しい形状の孔を有するフォトマスクをポジ及
びネガ写真の組合せを用いて作り、このマスクを石英板
上に載置した後このマスクを介して石英板をサンドブラ
ストするか、または弗酸にて洗うことによって行なう。
溝６の深さは、加工時間及び温度を調節することによっ
て制御し、発熱体１の厚さと等しくする。In order to form the groove 6 on the surface of the ceramic substrate 2 by a mask and sandblasting or etching, for example, when the ceramic substrate 2 is a quartz plate, a photomask having a hole having the same shape as the heating element 1 is positive and It is made by using a combination of negative photographs, and this mask is placed on a quartz plate and then the quartz plate is sandblasted through the mask or washed with hydrofluoric acid.
The depth of the groove 6 is controlled by adjusting the processing time and temperature, and is made equal to the thickness of the heating element 1.
【００１０】[0010]
【発明の効果】本発明の面状発熱体は上記のような構成
であるから、溝６の形状、寸法を極めて精度良く形成で
き、従って発熱体１の表面がセラミックス基板２の表面
と等しくなるよう埋設でき、また発熱体１はセラミック
ス基板２と一体形成された状態となるため両者間の熱伝
導度も大きくなり、発熱体１が部分的に短絡する等の事
故も生じないようになる。Since the sheet heating element of the present invention has the above-mentioned structure, the shape and size of the groove 6 can be formed with extremely high precision, and therefore the surface of the heating element 1 becomes equal to the surface of the ceramic substrate 2. Since the heating element 1 is integrally formed with the ceramic substrate 2, the thermal conductivity between the two is increased, and an accident such as a partial short circuit of the heating element 1 does not occur.
【００１１】また、セラミックス基板２の表面と発熱体
１の表面を容易に一致せしめることができるため放熱板
４の下面に押え用の突起７を設けたり、接着剤を用いる
ことなく放熱板４によってセラミックス基板２に固定で
きる大きな利益がある。Further, since the surface of the ceramic substrate 2 and the surface of the heating element 1 can be easily made to coincide with each other, the pressing plate 7 is provided on the lower surface of the heat radiating plate 4, and the heat radiating plate 4 is used without using an adhesive. There is a great advantage that it can be fixed to the ceramic substrate 2.
【図１】放熱板を除去して示した本発明の面状発熱体の
平面図である。FIG. 1 is a plan view of a planar heating element of the present invention with a heat dissipation plate removed.
【図２】本発明の面状発熱体の縦断面図である。FIG. 2 is a vertical cross-sectional view of the sheet heating element of the present invention.
【図３】放熱板を除去して示した従来の面状発熱体の平
面図である。FIG. 3 is a plan view of a conventional sheet heating element with a heat dissipation plate removed.
【図４】従来の面状発熱体の縦断面図である。FIG. 4 is a vertical cross-sectional view of a conventional sheet heating element.
【図５】図４の一部の拡大図である。FIG. 5 is an enlarged view of a part of FIG.
【図６】従来の他の面状発熱体の縦断面図である。FIG. 6 is a vertical cross-sectional view of another conventional sheet heating element.
１ 発熱体 ２ セラミックス基板 ３ 無機接着剤 ４ 放熱板 ５ 締付機構 ６ 溝 ７ 突起 DESCRIPTION OF SYMBOLS 1 Heating element 2 Ceramics substrate 3 Inorganic adhesive 4 Heat sink 5 Tightening mechanism 6 Groove 7 Protrusion
Claims (1)
波状に湾曲した板状発熱体と、上記セラミックス基板の
表面にマスク及びサンドブラストまたはエッチング技術
により形成した上記発熱体を埋めるための、上記発熱体
と同一形状の溝と、上記セラミックス基板上に載置した
放熱板とより成り、上記発熱体の表面が上記セラミック
ス基板の表面と一致することを特徴とする面状発熱体。1. A ceramic substrate, a plate-shaped heating element curved in a zigzag shape or a wavy shape, and the same heating element for filling the heating element formed on the surface of the ceramic substrate by a mask and sandblast or etching technique. A planar heating element comprising a groove having a shape and a heat radiating plate mounted on the ceramics substrate, wherein the surface of the heating element is aligned with the surface of the ceramics substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9393093A JPH06290861A (en) | 1993-03-30 | 1993-03-30 | Sheet form heat emitting body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9393093A JPH06290861A (en) | 1993-03-30 | 1993-03-30 | Sheet form heat emitting body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06290861A true JPH06290861A (en) | 1994-10-18 |
Family
ID=14096157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9393093A Pending JPH06290861A (en) | 1993-03-30 | 1993-03-30 | Sheet form heat emitting body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06290861A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200471723Y1 (en) * | 2012-04-18 | 2014-03-11 | 허혁재 | Heater for furnace and muffle type furnace using the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5383061A (en) * | 1976-12-28 | 1978-07-22 | Fujitsu Ltd | Fuse resistor |
| JPH01227386A (en) * | 1988-03-07 | 1989-09-11 | Tamura R & D:Kk | Electric heater provided with coil-type electric heating wire |
-
1993
- 1993-03-30 JP JP9393093A patent/JPH06290861A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5383061A (en) * | 1976-12-28 | 1978-07-22 | Fujitsu Ltd | Fuse resistor |
| JPH01227386A (en) * | 1988-03-07 | 1989-09-11 | Tamura R & D:Kk | Electric heater provided with coil-type electric heating wire |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200471723Y1 (en) * | 2012-04-18 | 2014-03-11 | 허혁재 | Heater for furnace and muffle type furnace using the same |
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