JPH06287784A - Method for cleaning or reforming surface - Google Patents
Method for cleaning or reforming surfaceInfo
- Publication number
- JPH06287784A JPH06287784A JP9509293A JP9509293A JPH06287784A JP H06287784 A JPH06287784 A JP H06287784A JP 9509293 A JP9509293 A JP 9509293A JP 9509293 A JP9509293 A JP 9509293A JP H06287784 A JPH06287784 A JP H06287784A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen peroxide
- ozone
- vapor
- peroxide solution
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Coating Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、プラスチックス、ガラ
ス、セラミックスなどの表面から有機不要物を除く表面
洗浄方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a surface of plastics, glass, ceramics, etc., which removes organic unnecessary substances.
【０００２】[0002]
【従来の技術】広範な産業界で使用されているプラスチ
ックス、ガラス、セラミックスなどは一般に、オイルポ
ンプのオイルや機械油などの炭化水素系の物質で、その
表面が汚れている。通常これらの有機不要物はフレオン
系の溶剤で溶解除去していた。その理由は、フレオンが
広い対象の物質に対して大きな溶解性があること、除去
速度が早いこと、除去後の被処理物体表面の乾燥速度が
高く、すぐに次の工程に移れることなどの多数の長所を
有していることによる。しかし、フレオンおよびその代
替品は上層大気圏のオゾン層の破壊を引き起こすため、
産業上の使用が好ましくないとされている。2. Description of the Related Art Plastics, glass, ceramics and the like used in a wide range of industries generally have hydrocarbon-based substances such as oils for oil pumps and machine oils, and their surfaces are contaminated. Usually, these organic unnecessary substances were dissolved and removed with a Freon solvent. The reason is that freon has a large solubility in target substances, its removal rate is fast, the drying speed of the object surface after removal is high, and it can be immediately transferred to the next step. Because it has the advantages of However, because Freon and its substitutes cause depletion of the upper atmosphere ozone layer,
It is considered to be unfavorable for industrial use.
【０００３】他方、プラスチックスへの印刷インキの
「乗り」を良くするための洗浄とか、液晶表示板用のガ
ラスの精密洗浄などでは、それらの被処理物の表面をオ
ゾン含有雰囲気のもとで紫外線照射し、表面の有機不要
物を除去することが提案されている。しかしながら、汚
染物の除去速度はあまり高くない。これに関連する技術
は、例えば、特開昭６０−５７９３７，特開昭６０−５
８２３８など多数発表されている。On the other hand, in cleaning for improving the "riding" of printing ink on plastics, precision cleaning of glass for liquid crystal display panels, etc., the surface of the object to be processed is exposed to an ozone-containing atmosphere. It has been proposed to irradiate with ultraviolet rays to remove organic unwanted substances on the surface. However, the removal rate of contaminants is not very high. A technique related to this is disclosed in, for example, JP-A-60-57937 and JP-A-60-5.
Many such as 8238 have been announced.
【０００４】[0004]
【発明が解決しようとする課題】本発明は上記事情に鑑
み、なされたものであってその目的とするところは、有
機物の除去速度が大きく、かつ精密洗浄に適した表面洗
浄方法を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a surface cleaning method which has a high removal rate of organic substances and is suitable for precision cleaning. It is in.
【０００５】[0005]
【課題を解決するための手段】この目的を達成するため
に、本発明は、過酸化水素の蒸気もしくは過酸化水素水
と紫外光とを組み合わせて被処理物の表面を洗浄するこ
とを特徴とする。更に、過酸化水素の蒸気にオゾンを混
合しておくかもしくは過酸化水素水にオゾンを溶解して
おいて、そのうえで紫外光と組み合わせて被処理物の表
面を洗浄することを特徴とする。In order to achieve this object, the present invention is characterized in that the surface of an object to be treated is cleaned by combining vapor of hydrogen peroxide or hydrogen peroxide solution and ultraviolet light. To do. Further, it is characterized in that ozone is mixed with vapor of hydrogen peroxide or ozone is dissolved in hydrogen peroxide solution, and then the surface of the object to be treated is washed by combining with ozone and then with ultraviolet light.
【０００６】[0006]
【作用】過酸化水素の蒸気に紫外線を照射すると、非常
に活性の強いＯＨラジカルが生成される。このＯＨラジ
カルが、炭化水素系の有機物（Ｃl Ｈm Ｏn ）と反応
し、有機物を炭酸ガスと水とに分解する。オゾンが共存
すると、原子状のＯも生成する。式で示すと次のとうり
である。 Ｈ2 Ｏ2 ＋（Ｏ3 ）＋紫外光→２（ＯＨ）＋（Ｏ）＋
（Ｏ2 ）＋（Ｈ2 Ｏ） ＯＨ＋Ｃl Ｈm Ｏn →ＣＯ2 ＋Ｈ2 Ｏ 過酸化水素水もしくはオゾンを溶解した過酸化水素水の
場合も、上記の化学反応式は同じである。When the vapor of hydrogen peroxide is irradiated with ultraviolet rays, very active OH radicals are generated. The OH radicals react with hydrocarbon organic (C l H m O n) , decomposing organic matter and water carbon dioxide. When ozone coexists, atomic O is also generated. The formula is as follows. H 2 O 2 + (O 3 ) + ultraviolet light → 2 (OH) + (O) +
(O 2) + (H 2 O) OH + C l in the case of H m O n → CO 2 + H 2 O aqueous hydrogen peroxide or hydrogen peroxide water containing dissolved ozone, above chemical reaction formula are the same.
【０００７】ところで、過酸化水素は、紫外光の吸収帯
として波長３００ｎｍ以下にその存在が知られ、それら
は、ｎｍで示すと、３６５，３０８，２６５，２５４，
２４８，２２９，２２２，２１４，１８５，１７２，１
４６，１２６である。しかもこれらの波長の紫外光を良
好に放射するランプも知られ、例えば高圧水銀ランプ、
低圧水銀ランプ、その他特開平１−１４４５６０「高出
力放射器」に開示されたエキシマランプがある。したが
って、これら紫外光を良好に放射するランプと過酸化水
素とを組み合わせると被処理物の表面洗浄は効率良く達
成される。By the way, it is known that hydrogen peroxide exists as an absorption band of ultraviolet light at a wavelength of 300 nm or less, and they are 365, 308, 265, 254, when expressed in nm.
248,229,222,214,185,172,1
46 and 126. Moreover, lamps that radiate ultraviolet light of these wavelengths well are also known, for example, high pressure mercury lamps,
There is a low-pressure mercury lamp and other excimer lamps disclosed in JP-A-1-144560 "High-power radiator". Therefore, the surface cleaning of the object to be treated can be efficiently achieved by combining the lamp which radiates the ultraviolet light well and the hydrogen peroxide.
【０００８】更に上記化学反応で生成されるＯＨ基はプ
ラスチックスの表面改質にも役立つ。一般にプラスチッ
クスは炭素結合を骨格としているので、活性の高いＯＨ
基と接触すると炭素結合の一部が切れ、被処理物の表面
にはＯＨが付加した状態になる。式で示すと次のとうり
である。 ＝Ｃ＝ → ≡Ｃ−ＯＨ もしくは ＝Ｃ＝ → −Ｃ（＝Ｏ）−Ｈ である。すなわち、表面が化学構造的に変化するので、
この化学反応を利用するとプラスチックスの表面が改質
できる。Further, the OH groups produced by the above chemical reaction are also useful for surface modification of plastics. Generally, plastics have a carbon bond as a skeleton, so highly active OH
Upon contact with the group, a part of the carbon bond is broken and OH is added to the surface of the object to be treated. The formula is as follows. = C = → ≡C-OH or = C = → -C (= O) -H. That is, since the surface changes in chemical structure,
By utilizing this chemical reaction, the surface of plastics can be modified.
【０００９】これらの洗浄作用、改質作用は、過酸化水
素の蒸気や過酸化水素水などの流体を加熱して昇温して
おいたり、被処理物を超音波場に配置しておいたりする
と、更に洗浄、改質の速度は大きくなる。また、オゾン
の共存も洗浄や改質の速度の増大に役立ち、いずれも、
非金属の酸化に対して比較的強く作用することができ
る。The cleaning action and the reforming action are performed by heating a fluid such as hydrogen peroxide vapor or hydrogen peroxide solution to raise the temperature, or by placing an object to be treated in an ultrasonic field. Then, the speed of cleaning and reforming is further increased. The coexistence of ozone also helps increase the rate of cleaning and reforming, and
It can act relatively strongly against the oxidation of non-metals.
【００１０】[0010]
【実施例】図１は、本発明の第１の実施例の説明図であ
って、パラフィンの除去方法の説明図である。図におい
て、１はガラス製の容器、２は過酸化水素の１モル％の
水溶液である。３は石英ガラス製のジャケットであっ
て、その中に高圧水銀ランプ４を配置する。５は被処理
物であって、実施例では、ポリエチレンテレフタレート
（以下ＰＥＴという。）の表面に厚さ０．１μｍの流動
パラフィンが塗布されている。ランプ４は、電源６によ
って、アーク長１ｃｍ当たり１６０Ｗで点灯され、ＰＥ
Ｔの表面で１００ｍＷ／ｃｍ2 の照射強度になるように
する。ランプ４からは、２４０ｎｍから２７０ｎｍにま
たがる波長域の紫外光が強く放射され、被処理物近傍で
過酸化水素からＯＨ基が生成されるため、流動パラフィ
ンは１０分の照射時間で除去することができた。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view of a first embodiment of the present invention and is an explanatory view of a paraffin removing method. In the figure, 1 is a glass container and 2 is a 1 mol% aqueous solution of hydrogen peroxide. A quartz glass jacket 3 has a high-pressure mercury lamp 4 disposed therein. Reference numeral 5 denotes an object to be treated, and in the embodiment, liquid paraffin having a thickness of 0.1 μm is applied to the surface of polyethylene terephthalate (hereinafter referred to as PET). The lamp 4 is lit by the power source 6 at 160 W per 1 cm of arc length, and PE
The surface of T is set to have an irradiation intensity of 100 mW / cm 2 . The lamp 4 strongly radiates ultraviolet light in a wavelength range of 240 nm to 270 nm, and OH groups are generated from hydrogen peroxide in the vicinity of the object to be processed. Therefore, liquid paraffin can be removed within 10 minutes of irradiation time. did it.
【００１１】上記実施例では、過酸化水素とＰＥＴ表面
上の汚染物とが紫外光を同時に受けるものであるが、あ
らかじめ過酸化水素水に紫外光を照射して活性化してお
いた状態で、前記被処理物を過酸化水素水に浸すという
方法を採用しても同様の効果が得られる。そして前記し
たとうり、この過酸化水素水の温度を加熱しておいた
り、或いは容器１の下側に超音波発生器を配置したりす
ると更に除去時間が短縮されることは言うまでもない。In the above-mentioned embodiment, the hydrogen peroxide and the contaminants on the PET surface are simultaneously exposed to the ultraviolet light. However, in a state where the hydrogen peroxide solution is previously irradiated with the ultraviolet light to be activated, The same effect can be obtained by adopting the method of immersing the object to be treated in hydrogen peroxide solution. And, as described above, it goes without saying that the removal time can be further shortened by heating the temperature of the hydrogen peroxide solution or arranging the ultrasonic generator below the container 1.
【００１２】第２の実施例は、ＰＥＴの表面改質を説明
する。第１の実施例における被処理物に代えて、きれい
に洗浄されたＰＥＴを過酸化水素水に浸す。この場合
は、容器１の下側に超音波発生器を配置してＰＥＴに紫
外線を照射すると、ＰＥＴは親水性を示すように変化す
る。その表面をＥＳＣＡ（Electron Spectroscopy for
Chemical Analysis の略）で調べると、ＯＨ基が多数認
められ、ＰＥＴの表面はより高い親水性を帯びさせるこ
とができることが理解できる。照射時間は３分間であ
る。The second example illustrates the surface modification of PET. Instead of the object to be treated in the first embodiment, cleanly washed PET is immersed in hydrogen peroxide solution. In this case, when an ultrasonic wave generator is arranged below the container 1 and the PET is irradiated with ultraviolet rays, the PET changes so that it exhibits hydrophilicity. ESCA (Electron Spectroscopy for
A large number of OH groups are recognized by a chemical analysis (abbreviation of Chemical Analysis), and it can be understood that the surface of PET can be made more hydrophilic. The irradiation time is 3 minutes.
【００１３】図２は第３の実施例の説明図であって、Ｐ
ＥＴの製造工程中に付着した油脂系の有機物を除去する
方法の説明図である。図において、容器１には、過酸化
水素の３モル％水溶液２を４５℃に加熱して入れてあ
る。この容器１は、その下方でオゾン発生器７からのオ
ゾンを含んだ空気もしくは酸素が送り込まれるようにな
っている。尚、１０は泡発生器である。オゾン濃度がモ
ル比で１０ｐｐｍ程度で、高圧水銀ランプ４を点灯して
活性化しておき、前記のＰＥＴを５０秒間漬ける。ラン
プからは２５０ｎｍから２７０ｎｍの波長域の紫外光が
放射され、ＰＥＴ表面における照射強度が５００ｍＷ／
ｃｍ2 になるようにする。この５０秒間の処理の後ＰＥ
Ｔを５０℃の温風で乾燥したものは、印刷インキの「乗
り」が非常に良い。プラスチックスの表面洗浄方法とし
てすぐれていることが理解できる。FIG. 2 is an explanatory view of the third embodiment, in which P
It is explanatory drawing of the method of removing the fat-and-oil-type organic substance adhered during the manufacturing process of ET. In the figure, a container 1 contains a 3 mol% aqueous solution 2 of hydrogen peroxide heated to 45 ° C. Air or oxygen containing ozone from an ozone generator 7 is fed into the container 1 below. In addition, 10 is a bubble generator. When the ozone concentration is about 10 ppm in molar ratio, the high-pressure mercury lamp 4 is turned on and activated, and the PET is immersed for 50 seconds. The lamp emits ultraviolet light in the wavelength range of 250 nm to 270 nm, and the irradiation intensity on the PET surface is 500 mW /
Try to be cm 2 . PE after this 50 seconds treatment
When T is dried with warm air of 50 ° C, the "riding" of the printing ink is very good. It can be understood that this is an excellent method for cleaning the surface of plastics.
【００１４】上記した実施例はすべて液相であったが、
過酸化水素と紫外光とを組み合わせた表面洗浄もしくは
表面改質は気相でも全く同様に実施可能である。図３は
第４の実施例の説明図であって、ポリプロピレン（以下
ＰＰという。）の表面を気相処理する表面改質方法の説
明図である。容器１内には被処理物５とランプ８を配置
し、供給する過酸化水素の蒸気圧は７×１０3 Ｐａであ
る。オゾン発生器７からオゾンを混入する場合は例えば
１×１０3 Ｐａである。この場合、被処理物はＰＰであ
り、ランプは高圧水銀ランプである。ランプ８を電源６
で点灯すると、波長域が２４０ｎｍ乃至２７０ｎｍにま
たがる紫外光が得られる。被処理物表面上における照射
強度は４００ｍＷ／ｃｍ2 である。この状態でＰＰを１
０分間処理すると水滴接触角法で接触角１５度の低下を
きたす。これより本発明の方法で確かに親水性が増した
ことが実証された。Although all of the above examples were in liquid phase,
Surface cleaning or surface modification using a combination of hydrogen peroxide and ultraviolet light can be carried out in the gas phase in the same manner. FIG. 3 is an explanatory diagram of the fourth embodiment, and is an explanatory diagram of a surface modification method for subjecting the surface of polypropylene (hereinafter referred to as PP) to a vapor phase treatment. An object to be treated 5 and a lamp 8 are arranged in the container 1, and the vapor pressure of hydrogen peroxide supplied is 7 × 10 3 Pa. When ozone is mixed from the ozone generator 7, the pressure is, for example, 1 × 10 3 Pa. In this case, the object to be treated is PP and the lamp is a high pressure mercury lamp. Lamp 6 power 6
When turned on, ultraviolet light having a wavelength range of 240 nm to 270 nm is obtained. The irradiation intensity on the surface of the object to be treated is 400 mW / cm 2 . In this state PP 1
When the treatment is performed for 0 minutes, the contact angle is decreased by 15 degrees by the water drop contact angle method. From this, it was proved that the method of the present invention surely increased the hydrophilicity.
【００１５】ところで、気相による乾式洗浄もしくは乾
式改質では、過酸化水素の蒸気圧は１０2 Ｐａから１０
5 Ｐａの範囲であれば、過酸化水素の反応容器外への漏
洩もなく、かつ容器内の蒸気は充分に活性化される。ま
た、オゾンを混入する場合は、その分圧を１０Ｐａから
１０3 Ｐａの範囲を選べば、材料の劣化変質が事実上な
くて反応性ガスを充分に活性化できる利点がある。他
方、液相による湿式洗浄もしくは湿式改質では、過酸化
水素水の濃度は、１０-2モル％から８モル％の範囲であ
れば、反応容器内でほぼ均一に反応流体を活性化させる
ことが可能である。また、オゾンを溶解した場合は、モ
ル比で１ｐｐｍから１００ｐｐｍの範囲とすれば、材料
の劣化反応を事実上生じさせることなく反応流体を充分
に活性化できる。By the way, in dry cleaning or dry reforming in the gas phase, the vapor pressure of hydrogen peroxide is from 10 2 Pa to 10 Pa.
Within the range of 5 Pa, hydrogen peroxide does not leak outside the reaction vessel, and the vapor in the vessel is sufficiently activated. Further, when ozone is mixed in, if the partial pressure thereof is selected from the range of 10 Pa to 10 3 Pa, there is an advantage that the reactive gas can be sufficiently activated without the deterioration and deterioration of the material. On the other hand, in wet cleaning or wet reforming with a liquid phase, if the concentration of the hydrogen peroxide solution is in the range of 10 -2 mol% to 8 mol%, the reaction fluid should be activated almost uniformly in the reaction vessel. Is possible. When ozone is dissolved, the reaction fluid can be sufficiently activated without causing a deterioration reaction of the material by setting the molar ratio in the range of 1 ppm to 100 ppm.
【００１６】[0016]
【発明の効果】以上説明したように、本発明は、過酸化
水素と紫外光との組み合わせに着目することによってす
ぐれた表面洗浄効果もしくはプラスチッックスの表面改
質効果を得たものであり、産業上著しく有益な方法であ
る。特に、過酸化水素と紫外光との組み合わせによる洗
浄は、非金属の酸化に比較的強い作用をするので、プラ
スチックス、ガラス、セラミックスの表面洗浄に適す
る。INDUSTRIAL APPLICABILITY As described above, the present invention provides an excellent surface cleaning effect or plastics surface modification effect by focusing on the combination of hydrogen peroxide and ultraviolet light. This is a very useful method. In particular, cleaning with a combination of hydrogen peroxide and ultraviolet light has a relatively strong effect on the oxidation of non-metals, and is therefore suitable for cleaning the surface of plastics, glass and ceramics.
【図１】パラフィンの除去の方法の説明図である。FIG. 1 is an explanatory diagram of a method for removing paraffin.
【図２】油脂系の有機物の除去の方法の説明図である。FIG. 2 is an explanatory diagram of a method for removing oil-based organic substances.
【図３】ポリプロピレンの表面の改質方法の説明図であ
る。FIG. 3 is an explanatory view of a method for modifying the surface of polypropylene.
１ 容器 ２ 過酸化水素水 ３ ジャケット ４ 高圧水銀ランプ ５ 被処理物 ６ 電源 ７ オゾン発生器 1 Container 2 Hydrogen Peroxide Water 3 Jacket 4 High Pressure Mercury Lamp 5 Workpiece 6 Power Supply 7 Ozone Generator
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｃ０１Ｂ 15/00 Ｃ０８Ｊ 7/00 ３０４ 7310−4Ｆ (72)発明者 松島 竹夫 兵庫県姫路市別所町佐土1194番地 ウシオ 電機株式会社内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification number Internal reference number FI Technical display location C01B 15/00 C08J 7/00 304 7310-4F (72) Inventor Takeo Matsushima Besshocho, Himeji City, Hyogo Prefecture 1194 Sado Ushio Electric Co., Ltd.
Claims (18)
もしくは過酸化水素の蒸気とオゾンの混合ガス、もしく
は過酸化水素水、もしくはオゾンを溶解した過酸化水素
水に接触させておいたうえで紫外線を照射しこれらを活
性化して、該表面の不要有機物を除去することを特徴と
する表面洗浄方法。1. The surface of the object to be treated is vaporized of hydrogen peroxide,
Alternatively, it is contacted with a mixed gas of hydrogen peroxide vapor and ozone, or hydrogen peroxide solution, or hydrogen peroxide solution in which ozone is dissolved, and then irradiated with ultraviolet rays to activate these, and unnecessary organic substances on the surface. A method for cleaning a surface, which comprises:
の蒸気とオゾンの混合ガス、もしくは過酸化水素水、も
しくはオゾンを溶解した過酸化水素水に紫外線を照射し
て活性化せしめ、しかる後、被処理物の表面を活性化さ
れたそれらに接触せしめて、該表面の不要有機物質を除
去することを特徴とする表面洗浄方法。2. The ultraviolet rays are activated by irradiating the vapor of hydrogen peroxide, the mixed gas of the vapor of hydrogen peroxide and ozone, the hydrogen peroxide solution, or the hydrogen peroxide solution in which the ozone is dissolved, with ultraviolet rays. A method for cleaning a surface, which comprises contacting a surface of an object to be treated with those activated to remove unnecessary organic substances on the surface.
求項１もしくは２記載の表面洗浄方法。3. The surface cleaning method according to claim 1, wherein the object to be treated is placed in an ultrasonic field.
の蒸気とオゾンの混合ガス、もしくは過酸化水素水、も
しくはオゾンを溶解した過酸化水素水を、室温よりも高
い温度に加熱せしめておくことを特徴とする請求項１も
しくは２記載の表面洗浄方法。4. A vapor of hydrogen peroxide, a mixed gas of vapor of hydrogen peroxide and ozone, hydrogen peroxide solution, or hydrogen peroxide solution in which ozone is dissolved is heated to a temperature higher than room temperature. The surface cleaning method according to claim 1 or 2, characterized in that.
３０８，２６５，２５４，２４８，２２９，２２２，２
１４，１８５，１７２，１４６，１２６である紫外線の
少なくとも一つを含むことを特徴とする請求項１もしく
は２記載の表面洗浄方法。5. Ultraviolet rays have a wavelength in nm of 365,
308, 265, 254, 248, 229, 222, 2
3. The surface cleaning method according to claim 1, further comprising at least one of ultraviolet rays of 14,185,172,146,126.
１０2 Ｐａ乃至１０5 Ｐａに規定してなる請求項１もし
くは２記載の表面洗浄方法。6. The surface cleaning method according to claim 1, wherein the pressure of the vapor of hydrogen peroxide is regulated to 10 2 Pa to 10 5 Pa.
おいて、過酸化水素の蒸気の分圧が１０2 Ｐａ乃至１０
5 Ｐａに、オゾンの分圧が１０Ｐａ乃至１０4 Ｐａにそ
れぞれ規定されてなる請求項１もしくは２記載の表面洗
浄方法。7. A mixed gas of hydrogen peroxide vapor and ozone, wherein the partial pressure of the hydrogen peroxide vapor is 10 2 Pa to 10 Pa.
The surface cleaning method according to claim 1 or 2, wherein the partial pressure of ozone is regulated to 5 Pa and the partial pressure of ozone is regulated to 10 Pa to 10 4 Pa, respectively.
度が１０-2モル％乃至８モル％に規定してなる請求項１
もしくは２記載の表面洗浄方法。8. A hydrogen peroxide solution, wherein the concentration of hydrogen peroxide is specified to be 10 −2 mol% to 8 mol%.
Alternatively, the surface cleaning method described in 2.
て、過酸化水素の濃度が１０-2モル％乃至８モル％に、
オゾンの濃度がモル比で１ｐｐｍ乃至１００ｐｐｍに規
定してなる請求項１もしくは２記載の表面洗浄方法。9. In a hydrogen peroxide solution in which ozone is dissolved, the concentration of hydrogen peroxide is 10 −2 mol% to 8 mol%.
The surface cleaning method according to claim 1 or 2, wherein the concentration of ozone is regulated to a molar ratio of 1 ppm to 100 ppm.
気、もしくは過酸化水素の蒸気とオゾンの混合ガス、も
しくは過酸化水素水、もしくはオゾンを溶解した過酸化
水素水に接触させておいたうえで紫外線を照射しこれら
を活性化して、該表面の特性を化学的に改質させること
を特徴とする表面改質方法。10. The surface of the object to be treated is contacted with hydrogen peroxide vapor, a mixed gas of hydrogen peroxide vapor and ozone, hydrogen peroxide water, or hydrogen peroxide water in which ozone is dissolved. A surface reforming method characterized by chemically activating the characteristics of the surface by irradiating them with ultraviolet rays and activating them.
素の蒸気とオゾンの混合ガス、もしくは過酸化水素水、
もしくはオゾンを溶解した過酸化水素水に紫外線を照射
して活性化せしめ、しかる後、被処理物の表面を活性化
されたそれらに接触せしめて、該表面の特性を化学的に
改質させることを特徴とする表面改質方法。11. A vapor of hydrogen peroxide, a mixed gas of vapor of hydrogen peroxide and ozone, or hydrogen peroxide solution,
Alternatively, it is activated by irradiating the hydrogen peroxide solution in which ozone is dissolved with ultraviolet rays to activate it, and then contacting the surface of the object to be treated with those activated to chemically modify the characteristics of the surface. And a surface modification method.
請求項１０もしくは１１記載の表面改質方法。12. The surface modification method according to claim 10, wherein the object to be treated is arranged in an ultrasonic field.
素の蒸気とオゾンの混合ガス、もしくは過酸化水素水、
もしくはオゾンを溶解した過酸化水素水を、室温よりも
高い温度に加熱せしめておくことを特徴とする請求項１
０もしくは１１記載の表面改質方法。13. A vapor of hydrogen peroxide, or a mixed gas of vapor of hydrogen peroxide and ozone, or hydrogen peroxide solution,
Alternatively, hydrogen peroxide solution in which ozone is dissolved is heated to a temperature higher than room temperature.
The surface modification method according to 0 or 11.
５，３０８，２６５，２５４，２４８，２２９，２２
２，２１４，１８５，１７２，１４６，１２６である紫
外線の少なくとも一つを含むことを特徴とする請求項１
０もしくは１１記載の表面改質方法。14. The ultraviolet ray has a wavelength of 36 nm.
5,308,265,254,248,229,22
2. At least one of the ultraviolet rays of 2,214,185,172,146,126 is included.
The surface modification method according to 0 or 11.
が１０2 Ｐａ乃至１０5 Ｐａに規定してなる請求項１０
もしくは１１記載の表面改質方法。15. The pressure of the vapor of hydrogen peroxide is defined as 10 2 Pa to 10 5 Pa.
Alternatively, the surface modification method according to item 11.
において、過酸化水素の蒸気の分圧が１０2 Ｐａ乃至１
０5 Ｐａに、オゾンの分圧が１０Ｐａ乃至１０4 Ｐａに
それぞれ規定されてなる請求項１０もしくは１１記載の
表面改質方法。16. The vapor and gas mixture of ozone of hydrogen peroxide, the partial pressure of hydrogen peroxide vapor is 10 2 Pa to 1
The surface modification method according to claim 10 or 11, wherein the partial pressure of ozone is regulated to 0 5 Pa and the partial pressure of ozone is regulated to 10 Pa to 10 4 Pa, respectively.
濃度が１０-2モル％乃至８モル％に規定してなる請求項
１０もしくは１１記載の表面改質方法。17. The surface modification method according to claim 10, wherein the concentration of hydrogen peroxide in the hydrogen peroxide solution is regulated to 10 −2 mol% to 8 mol%.
て、過酸化水素の濃度が１０-2モル％乃至８モル％に、
オゾンの濃度がモル比で１ｐｐｍ乃至１００ｐｐｍに規
定してなる請求項１０もしくは１１記載の表面改質方
法。18. A hydrogen peroxide solution in which ozone is dissolved, wherein the concentration of hydrogen peroxide is 10 -2 mol% to 8 mol%,
The surface modification method according to claim 10 or 11, wherein the concentration of ozone is specified to be 1 ppm to 100 ppm in terms of molar ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5095092A JP3034720B2 (en) | 1993-03-31 | 1993-03-31 | Surface cleaning method or surface modification method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5095092A JP3034720B2 (en) | 1993-03-31 | 1993-03-31 | Surface cleaning method or surface modification method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06287784A true JPH06287784A (en) | 1994-10-11 |
| JP3034720B2 JP3034720B2 (en) | 2000-04-17 |
Family
ID=14128271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5095092A Expired - Fee Related JP3034720B2 (en) | 1993-03-31 | 1993-03-31 | Surface cleaning method or surface modification method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3034720B2 (en) |
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