JPH0628434U - Rectangular reverse pressure gate valve - Google Patents
Rectangular reverse pressure gate valveInfo
- Publication number
- JPH0628434U JPH0628434U JP7145492U JP7145492U JPH0628434U JP H0628434 U JPH0628434 U JP H0628434U JP 7145492 U JP7145492 U JP 7145492U JP 7145492 U JP7145492 U JP 7145492U JP H0628434 U JPH0628434 U JP H0628434U
- Authority
- JP
- Japan
- Prior art keywords
- rectangular
- valve
- valve body
- reverse pressure
- valve seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sliding Valves (AREA)
Abstract
(57)【要約】 (修正有)
【目的】弁体に逆圧が作用しても、弁体のシール性が悪
くならず、仕切弁の専有空間を小さくすることの可能な
矩形逆耐圧仕切弁を提供する。
【構成】真空槽1の隔離壁1aに設けられた矩形の開口
部2近傍の弁座に矩形の弁体7を着座させる矩形逆耐圧
仕切弁において、上記矩形の弁体を上記隔離壁に沿って
上記矩形の開口部付近にまで移動可能な移動手段と、上
記矩形の開口部近傍の弁座に上記矩形の弁体を着座させ
たうえ、上記矩形の弁体を上記弁座側に押圧する押圧手
段とを備えたことを特徴とする。
(57) [Summary] (Revised) [Purpose] Even if a back pressure is applied to the valve body, the sealability of the valve body does not deteriorate, and the rectangular reverse pressure resistant partition that can reduce the exclusive space of the gate valve Provide a valve. In a rectangular reverse pressure gate valve in which a rectangular valve body 7 is seated on a valve seat near a rectangular opening 2 provided in a partition wall 1a of a vacuum chamber 1, the rectangular valve body is provided along the partition wall. And moving the moving means to the vicinity of the rectangular opening, and seating the rectangular valve body on the valve seat near the rectangular opening, and pressing the rectangular valve body to the valve seat side. And a pressing means.
Description
【0001】[0001]
この考案は真空槽の隔離壁の開口部に着座する矩形逆耐圧仕切弁に関するもの である。 The present invention relates to a rectangular reverse pressure sluice valve that is seated in the opening of the isolation wall of a vacuum chamber.
【0002】[0002]
従来の矩形逆耐圧仕切弁は図6および図7に示されており、これらの図におい て、真空槽1の隔離壁1aには長方形の開口部2が縦長に設けられ、その開口部 2近傍の左下方の隔離壁1aの位置には軸受3が固定され、また、真空槽1の天 板1bにも軸受4が固定され、軸受3と軸受4とで弁棒5が支承されている。弁 棒5には2つのアーム6が上下に取り付けられ、更に、その2つのアーム6の先 端には弁体7が取り付けられ、その弁体7が開口部2近傍の隔離壁1aの弁座に 着座できるようになっている。矢印は弁体7が弁座に着座しているとき、弁体7 に逆圧が作用する方向を示している。 A conventional rectangular reverse pressure sluice valve is shown in FIGS. 6 and 7, and in these drawings, a rectangular opening 2 is provided vertically in a partition wall 1a of a vacuum chamber 1, and the vicinity of the opening 2 is provided. A bearing 3 is fixed to the position of the isolation wall 1a at the lower left of the above, and a bearing 4 is also fixed to the ceiling plate 1b of the vacuum chamber 1, and a valve rod 5 is supported by the bearing 3 and the bearing 4. Two arms 6 are vertically attached to the valve rod 5, and a valve element 7 is attached to the front ends of the two arms 6, and the valve element 7 is attached to the valve seat of the isolation wall 1 a near the opening 2. It is possible to sit on. The arrow indicates the direction in which the counter pressure acts on the valve body 7 when the valve body 7 is seated on the valve seat.
【0003】 なお、図中、8は弁棒5を回転させる回転駆動機構である。In the figure, 8 is a rotary drive mechanism for rotating the valve rod 5.
【0004】 このような矩形逆耐圧仕切弁において、回転駆動機構8により弁棒5を回転さ せ、弁体7を弁座に着座させる。弁体7が弁座に着座しているとき、弁体7には 矢印に示される方向より逆圧が作用するようになる。In such a rectangular reverse pressure gate valve, the rotary drive mechanism 8 rotates the valve rod 5 to seat the valve body 7 on the valve seat. When the valve body 7 is seated on the valve seat, the counter pressure acts on the valve body 7 in the direction indicated by the arrow.
【0005】[0005]
従来の矩形逆耐圧仕切弁は、弁棒5を回転させて、弁体7を弁座に着座させる ようにしているが、弁体7が弁座に着座しているとき、弁体7には逆圧が作用す るので、弁座における弁体7のシール性が悪くなる問題があった。また、弁棒5 の回転により、アーム6と弁体7とが回転して、弁体7が弁座に着座するように なっているので、弁体7が大きい場合にはた回転半径が大きくなり、仕切弁の専 有空間が大きくなる等の問題があった。 In the conventional rectangular reverse pressure gate valve, the valve rod 5 is rotated so that the valve body 7 is seated on the valve seat. However, when the valve body 7 is seated on the valve seat, Since the counter pressure acts, there is a problem that the sealing performance of the valve body 7 at the valve seat deteriorates. Further, the rotation of the valve rod 5 causes the arm 6 and the valve body 7 to rotate, so that the valve body 7 is seated on the valve seat. Therefore, when the valve body 7 is large, the turning radius is large. Therefore, there was a problem that the exclusive space of the gate valve became large.
【0006】 この考案の目的は、従来の上記問題を解決して、弁体に逆圧が作用しても、弁 体のシール性が悪くならず、仕切弁の専有空間を小さくすることの可能な矩形逆 耐圧仕切弁を提供することである。The object of the present invention is to solve the above-mentioned problems of the prior art, and even if a back pressure acts on the valve element, the sealing performance of the valve element does not deteriorate, and the space occupied by the gate valve can be reduced. It is to provide a rectangular reverse pressure proof gate valve.
【0007】[0007]
上記目的を達成するために、この考案は、真空槽の隔離壁に設けられた矩形の 開口部近傍の弁座に矩形の弁体を着座させる矩形逆耐圧仕切弁において、上記矩 形の弁体を上記隔離壁に沿って上記矩形の開口部付近にまで移動可能な移動手段 と、上記矩形の開口部近傍の弁座に上記矩形の弁体を着座させたうえ、上記矩形 の弁体を上記弁座側に押圧する押圧手段とを備えたことを特徴とするものである 。 In order to achieve the above object, the present invention relates to a rectangular reverse pressure sluice valve in which a rectangular valve body is seated on a valve seat near a rectangular opening provided in an isolation wall of a vacuum chamber. A moving means that is movable along the isolation wall to near the rectangular opening, and the rectangular valve element is seated on the valve seat near the rectangular opening, and the rectangular valve element is It is characterized by comprising a pressing means for pressing the valve seat side.
【0008】[0008]
この考案においては、矩形の弁体を隔離壁に沿って矩形の開口部付近にまで移 動可能な移動手段を備えているので、仕切弁の専有空間を小さくすることが可能 になる。また、矩形の開口部近傍の弁座に矩形の弁体を着座させたうえ、矩形の 弁体を弁座側に押圧する押圧手段を備えているので、弁体に逆圧が作用しても、 仕切弁のシール性が悪くならない。 In this invention, since the rectangular valve element is provided with the moving means that can move along the isolation wall to the vicinity of the rectangular opening, the space occupied by the sluice valve can be reduced. Further, since the rectangular valve element is seated on the valve seat near the rectangular opening and the pressing means for pressing the rectangular valve element to the valve seat side is provided, even if a back pressure acts on the valve element. The sealing property of the gate valve does not deteriorate.
【0009】[0009]
以下、この考案の実施例について図面を参照しながら説明する。 この考案の実施例は図1〜図5に示されており、まず、図1および図2におい て、真空槽1の隔離壁1aには長方形の開口部2が縦長に設けられ、その開口部 2近傍の隔離壁1aの弁座には長方形の弁体7が着座している。長方形の弁体7 の各長辺部付近には2つの回転軸10がそれぞれの長辺部に沿って配置されてい る。2つの回転軸10の各々には4個の偏心カム11が等間隔に固定され、2つ の回転軸10が回転することによって、各偏心カム11が回転し、長方形の弁体 7が各偏心カム11によって隔離壁1aの弁座側に押圧される。次に、図3〜図 5において、開口部2の上方の真空槽1の隔離壁1aにはガイド12が開口部2 の短辺部と平行に固定され、そのガイド12によって水平方向に案内されるアー ム13の下端部には長方形の弁体7が取り付けられている。アーム13の上端部 にはラック14が取り付けられ、そのラック14はピニオン15と歯合している 。ピニオン15はピニオン用回転駆動機16と連結されている。また、2つの回 転軸10の上端部にはロータリーアクチュエーター17が取り付けられ、ロータ リーアクチュエーター17によって、2つの回転軸10がそれぞれ回転するよう になっている。なお、矢印は弁体7が弁座に着座しているとき、弁体7に逆圧が 作用する方向を示している。 An embodiment of the present invention will be described below with reference to the drawings. An embodiment of the present invention is shown in FIGS. 1 to 5. First, in FIGS. 1 and 2, a rectangular opening 2 is provided in a vertical direction in a partition wall 1a of a vacuum chamber 1, and the opening 2 A rectangular valve body 7 is seated on the valve seat of the isolation wall 1a in the vicinity of 2. In the vicinity of each long side of the rectangular valve body 7, two rotary shafts 10 are arranged along each long side. Four eccentric cams 11 are fixed to each of the two rotary shafts 10 at equal intervals, and by rotating the two rotary shafts 10, each eccentric cam 11 is rotated, and the rectangular valve body 7 is rotated by each eccentric shaft. The cam 11 presses the isolation wall 1a toward the valve seat side. 3 to 5, a guide 12 is fixed to the isolation wall 1a of the vacuum chamber 1 above the opening 2 in parallel with the short side of the opening 2 and guided horizontally by the guide 12. A rectangular valve body 7 is attached to the lower end of the arm 13. A rack 14 is attached to the upper end of the arm 13, and the rack 14 meshes with the pinion 15. The pinion 15 is connected to the pinion rotary drive 16. Further, a rotary actuator 17 is attached to the upper ends of the two rotary shafts 10, and the rotary actuators 17 rotate the two rotary shafts 10, respectively. The arrow indicates the direction in which the counter pressure acts on the valve body 7 when the valve body 7 is seated on the valve seat.
【0010】 このような実施例において、ピニオン用回転駆動機16でピニオン15を回転 させると、これと歯合するラック14が直線運動し、その直線運動に伴ってアー ム13がガイド12によって水平方向に案内され、長方形の弁体7が開口部2の 近傍に移動させられる。その後、ロータリーアクチュエーター17により、2つ の回転軸10がそれぞれ回転し、その回転に伴って偏心カム11も回転し、偏心 カム11が長方形の弁体7を隔離壁1aの弁座側に押圧して、仕切弁のシール性 がよくなる。なお、弁体7を隔離壁1aの弁座より離す場合には、上記手順と逆 にすればよい。In such an embodiment, when the pinion rotary drive 16 rotates the pinion 15, the rack 14 meshing with the pinion 15 linearly moves, and the arm 13 is horizontally moved by the guide 12 along with the linear motion. Guided in the direction, the rectangular valve element 7 is moved to the vicinity of the opening 2. After that, the two rotary shafts 10 are respectively rotated by the rotary actuator 17, and the eccentric cam 11 also rotates in accordance with the rotation, and the eccentric cam 11 presses the rectangular valve body 7 toward the valve seat side of the isolation wall 1a. As a result, the sealing property of the gate valve is improved. When the valve body 7 is separated from the valve seat of the isolation wall 1a, the above procedure may be reversed.
【0011】[0011]
この考案においては、矩形の弁体を隔離壁に沿って矩形の開口部付近にまで移 動可能な移動手段を備えているので、仕切弁の専有空間を小さくすることが可能 になる効果を奏する。また、矩形の開口部近傍の弁座に矩形の弁体を着座させた うえ、矩形の弁体を弁座側に押圧する押圧手段を備えているので、弁体に逆圧が 作用しても、仕切弁のシール性が悪くならない効果を奏する。 In this invention, since the rectangular valve body is provided with the moving means that can move along the isolation wall to the vicinity of the rectangular opening, it is possible to reduce the space occupied by the gate valve. . Further, since the rectangular valve body is seated on the valve seat near the rectangular opening and the pressing means for pressing the rectangular valve body to the valve seat side is provided, even if a reverse pressure acts on the valve body. , The effect that the sealing property of the sluice valve is not deteriorated.
【図1】この考案の実施例の立面説明図FIG. 1 is an elevational view of an embodiment of the present invention.
【図2】この考案の実施例の平面説明図FIG. 2 is an explanatory plan view of an embodiment of the present invention.
【図3】この考案の実施例の立面図FIG. 3 is an elevation view of an embodiment of the present invention.
【図4】図3のA−A線よりみた断面図FIG. 4 is a sectional view taken along the line AA of FIG.
【図5】この考案の実施例の平面図FIG. 5 is a plan view of an embodiment of this invention.
【図6】従来の矩形逆耐圧仕切弁の立面図FIG. 6 is an elevation view of a conventional rectangular reverse pressure proof gate valve.
【図7】従来の矩形逆耐圧仕切弁の平面図FIG. 7 is a plan view of a conventional rectangular reverse pressure gate valve.
1・・・・・・・真空槽 1a・・・・・・真空槽の隔離壁 2・・・・・・・開口部 7・・・・・・・弁体 10・・・・・・回転軸 11・・・・・・偏心カム 12・・・・・・ガイド 13・・・・・・アーム 14・・・・・・ラック 15・・・・・・ピニオン 16・・・・・・ピニオン用回転駆動機 17・・・・・・ロータリーアクチュエーター 1 --- Vacuum tank 1a --- isolation wall of the vacuum tank 2 --- Opening 7 --- Valve element 10 --- rotation Shaft 11-Eccentric cam 12-Guide 13-Arm 14-Rack 15-Pinion 16-Pinion Rotary drive 17 ··· Rotary actuator
───────────────────────────────────────────────────── フロントページの続き (72)考案者 森 勝彦 神奈川県茅ヶ崎市萩園2500番地日本真空技 術株式会社内 (72)考案者 須藤 哲 神奈川県茅ヶ崎市萩園2500番地日本真空技 術株式会社内 (72)考案者 清水 康男 神奈川県茅ヶ崎市萩園2500番地日本真空技 術株式会社内 (72)考案者 一山 政博 神奈川県茅ヶ崎市萩園2500番地日本真空技 術株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Creator Katsuhiko Mori 2500 Hagizono, Chigasaki City, Kanagawa Japan Vacuum Technology Co., Ltd. 72) Inventor Yasuo Shimizu 2500, Hagien, Chigasaki, Kanagawa Japan Vacuum Technology Co., Ltd. (72) Inventor, Masahiro Ichiyama 2500, Hagien, Chigasaki City, Kanagawa Japan Vacuum Technology Co., Ltd.
Claims (1)
近傍の弁座に矩形の弁体を着座させる矩形逆耐圧仕切弁
において、上記矩形の弁体を上記隔離壁に沿って上記矩
形の開口部付近にまで移動可能な移動手段と、上記矩形
の開口部近傍の弁座に上記矩形の弁体を着座させたう
え、上記矩形の弁体を上記弁座側に押圧する押圧手段と
を備えたことを特徴とする矩形逆耐圧仕切弁。1. A rectangular reverse pressure sluice valve in which a rectangular valve body is seated on a valve seat near a rectangular opening provided in a partition wall of a vacuum chamber, wherein the rectangular valve body is provided along the partition wall. A moving means that is movable to the vicinity of the rectangular opening, and a pressing means that presses the rectangular valve body toward the valve seat side after the rectangular valve body is seated on the valve seat near the rectangular opening. Rectangular reverse pressure sluice valve characterized by having and.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7145492U JPH0628434U (en) | 1992-09-19 | 1992-09-19 | Rectangular reverse pressure gate valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7145492U JPH0628434U (en) | 1992-09-19 | 1992-09-19 | Rectangular reverse pressure gate valve |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0628434U true JPH0628434U (en) | 1994-04-15 |
Family
ID=13461038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7145492U Pending JPH0628434U (en) | 1992-09-19 | 1992-09-19 | Rectangular reverse pressure gate valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0628434U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011019000A1 (en) * | 2009-08-10 | 2011-02-17 | 株式会社水道技術開発機構 | Sluice valve for operations |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63246578A (en) * | 1987-03-31 | 1988-10-13 | Ulvac Corp | Pressure-proof gate valve |
-
1992
- 1992-09-19 JP JP7145492U patent/JPH0628434U/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63246578A (en) * | 1987-03-31 | 1988-10-13 | Ulvac Corp | Pressure-proof gate valve |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011019000A1 (en) * | 2009-08-10 | 2011-02-17 | 株式会社水道技術開発機構 | Sluice valve for operations |
JP2011038584A (en) * | 2009-08-10 | 2011-02-24 | Waterworks Technology Development Organization Co Ltd | Work gate valve |
US9004090B2 (en) | 2009-08-10 | 2015-04-14 | Waterworks Technology Development Organization Co., Ltd. | Sluice valve for operations |
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