JPH06281026A - Block valve - Google Patents
Block valveInfo
- Publication number
- JPH06281026A JPH06281026A JP6081293A JP6081293A JPH06281026A JP H06281026 A JPH06281026 A JP H06281026A JP 6081293 A JP6081293 A JP 6081293A JP 6081293 A JP6081293 A JP 6081293A JP H06281026 A JPH06281026 A JP H06281026A
- Authority
- JP
- Japan
- Prior art keywords
- passage
- valve
- fluid
- fluid supply
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、主に半導体製造プラン
ト等に於いて使用される高純度ガスを取り扱う配管路に
組み込んで使用するものであり、高いガス置換性とクリ
ーン性を有すると共に、設置スペースが少なくて済むブ
ロック弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used by incorporating it in a pipeline for handling high-purity gas, which is mainly used in semiconductor manufacturing plants and the like, and has high gas substitution and cleanliness. A block valve that requires less installation space.
【０００２】[0002]
【従来の技術】一般に、半導体製造プラント等に於いて
使用される高純度ガス用の制御弁には、所謂パーティク
ルフリーやデッドスペースフリーと云う特性が厳しく要
求される。その為、半導体製造の分野では、前記パーテ
ィクルフリーやデッドスペースフリーの要求を構造的に
充足し易いダイヤフラム型の制御弁（特にダイレクトダ
イヤフラム弁）が多く使用されている。一方、半導体製
造プラント等に於いて、高純度ガスが流れる主管からガ
スの一部を取り出して使用する場合、図４に示すように
前記ダイヤフラム型の制御弁を組み込んだ配管路が利用
されている。即ち、前記配管路は、主管３６にユニオン
型継手３７、ダイヤフラム型制御弁３８、短管３９、Ｔ
字管４０及びユニオン型継手４１等を順次接続して主管
３６に連通する分岐路を形成し、又、Ｔ字管４０に短管
４２、ダイヤフラム型制御弁４３及びユニオン型継手４
４等を順次接続して分岐路に連通するパージ流体供給路
を形成したものであり、分岐路側のユニオン型継手４１
には半導体製造装置等へ高純度ガスを導く分岐管（図示
省略）が、又、パージ流体供給路のユニオン型継手４４
にはパージ流体供給源からのパージ流体を供給路に導く
供給管（図示省略）が夫々接続されている。而して、前
記配管路に於いて、供給路側の制御弁４３を閉弁状態に
して分岐路側の制御弁３８を開弁状態にすると、主管３
６内の高純度ガスは、その一部が分岐路内へ流れ込み、
制御弁３８、短管３９、Ｔ字管４０及び分岐管等を経て
半導体製造装置等へ流れて行き、又、分岐路側の制御弁
３８を閉弁状態にして供給路側の制御弁４３を開弁状態
にし、供給路へパージ流体を供給すると、パージ流体
が、制御弁４３、短管４２、Ｔ字管４０及び分岐管等を
経て半導体製造装置等へ流れて行き、管路内をパージす
るようになっている。2. Description of the Related Art Generally, control valves for high-purity gases used in semiconductor manufacturing plants are required to have so-called particle-free and dead-space-free characteristics. Therefore, in the field of semiconductor manufacturing, a diaphragm type control valve (particularly a direct diaphragm valve) which is structurally easy to meet the requirements of particle-free and dead space-free is often used. On the other hand, in a semiconductor manufacturing plant or the like, when a part of gas is taken out from a main pipe through which a high-purity gas flows, a pipe line incorporating the diaphragm type control valve is used as shown in FIG. . That is, the pipe line includes a main pipe 36, a union type joint 37, a diaphragm type control valve 38, a short pipe 39, and a T pipe.
The character tube 40 and the union type joint 41 are sequentially connected to form a branch passage communicating with the main tube 36, and the T-shaped tube 40 is provided with a short tube 42, a diaphragm type control valve 43 and a union type joint 4.
4 and the like are sequentially connected to form a purge fluid supply passage communicating with the branch passage, and the union type joint 41 on the branch passage side is formed.
A branch pipe (not shown) that guides high-purity gas to a semiconductor manufacturing apparatus or the like, and a union-type joint 44 of the purge fluid supply passage.
A supply pipe (not shown) for guiding the purge fluid from the purge fluid supply source to the supply path is connected to each of these. When the control valve 43 on the supply path side is closed and the control valve 38 on the branch path side is opened in the pipeline, the main pipe 3
A part of the high-purity gas in 6 flows into the branch passage,
It flows through the control valve 38, the short pipe 39, the T-shaped pipe 40, the branch pipe, etc. to the semiconductor manufacturing apparatus, etc., and the control valve 38 on the branch passage side is closed and the control valve 43 on the supply passage side is opened. When the state is set and the purge fluid is supplied to the supply passage, the purge fluid flows to the semiconductor manufacturing apparatus or the like through the control valve 43, the short pipe 42, the T-shaped pipe 40, the branch pipe, etc. to purge the inside of the pipe. It has become.
【０００３】[0003]
【発明が解決しようとする課題】然し乍ら、前記配管路
にあっては、二つの単体の制御弁３８，４３、短管３
９，４２、Ｔ字管４０及び継手３７，４１，４４等を組
み合わせている為、管路内の容積が必然的に大きくな
る。その結果、パージ用流体を流してもガスが直ぐに排
出され難く（特に、図４のＡ部分のガスが排出され難
い）、ガスの置換性が悪いと云う問題がある。然も、管
路内の容積が大きいと、パーティクルが発生し易くなる
と云う問題もある。又、二つの制御弁３８，４３、短管
３９，４２、Ｔ字管４０及び継手３７，４１，４４等を
組み合わせた配管路にあっては、通常各部材を溶接によ
り接続するようにしている為、溶接個所が必然的に多く
なる。その結果、各部材の接続時に溶接部から多量の発
塵があって管路内を汚損すると云う問題がある。更に、
二つの制御弁３８，４３、短管３９，４２、Ｔ字管４０
及び継手３７，４１，４４等を組み合わせた配管路では
それ自体が大型化し、広い設置スペースを必要とすると
云う問題もある。However, in the above-mentioned pipe line, two single control valves 38 and 43 and the short pipe 3 are provided.
Since 9, 42, the T-shaped tube 40, and the joints 37, 41, 44, etc. are combined, the volume in the pipeline is inevitably large. As a result, even if the purging fluid is flown, it is difficult to immediately discharge the gas (particularly, it is difficult to discharge the gas in the portion A of FIG. 4), and there is a problem that the gas replaceability is poor. However, there is also a problem that particles are likely to be generated when the volume in the conduit is large. In addition, in a pipe line in which two control valves 38 and 43, short pipes 39 and 42, T-shaped pipe 40 and joints 37, 41 and 44 are combined, each member is usually connected by welding. Therefore, the number of welding points will inevitably increase. As a result, there is a problem that a large amount of dust is generated from the welded portion when the respective members are connected and the inside of the pipeline is contaminated. Furthermore,
Two control valves 38, 43, short pipes 39, 42, T-shaped pipe 40
In addition, there is a problem that the pipe line in which the joints 37, 41, 44 and the like are combined is itself large and requires a large installation space.
【０００４】本発明は、上記の問題点を解消する為に創
案されたものであり、その目的は高いガス置換性とクリ
ーン性を有すると共に、設置スペースも少なくて済むブ
ロック弁を提供するにある。The present invention was devised in order to solve the above problems, and an object thereof is to provide a block valve which has a high gas displacing property and cleanliness and requires a small installation space. .
【０００５】[0005]
【課題を解決するための手段】上記目的を達成する為
に、本発明のブロック弁は、入口及び出口を有する主流
体通路と、主流体通路に連通して出口を有する副流体通
路と、副流体通路の途中に形成されて第１弁座を有する
第１弁室と、第１弁室に連通して入口を有するパージ流
体供給通路と、パージ流体供給通路の途中に形成されて
第２弁座を有する第２弁室とから成るボディと；第１弁
室内にこれの気密を保持すべく配設され、第１弁座に当
離座する第１ダイヤフラムと；第２弁室内にこれの気密
を保持すべく配設され、第２弁座に当離座する第２ダイ
ヤフラムと；ボディに取り付けた第１ボンネットに進退
移動自在に支持され、第１ダイヤフラムを第１弁座に当
座させる第１ステムと；ボディに取り付けた第２ボンネ
ットに進退移動自在に支持され、第２ダイヤフラムを第
２弁座に当座させる第２ステムと；副流体通路の出口に
接続された第１継手と；パージ流体供給通路の入口に接
続された第２継手とから構成したものである。To achieve the above object, a block valve according to the present invention comprises a main fluid passage having an inlet and an outlet, a sub fluid passage having an outlet communicating with the main fluid passage, and a sub fluid passage. A first valve chamber formed in the middle of the fluid passage and having a first valve seat, a purge fluid supply passage communicating with the first valve chamber and having an inlet, and a second valve formed in the middle of the purge fluid supply passage. A body including a second valve chamber having a seat; a first diaphragm disposed in the first valve chamber to maintain its airtightness, and seated on and off the first valve seat; A second diaphragm which is arranged to maintain airtightness and which separates from and comes into contact with the second valve seat; and a second diaphragm which is supported by the first bonnet attached to the body so as to be able to move back and forth 1 stem and; can move back and forth to the 2nd bonnet attached to the body A second stem that is supported and causes the second diaphragm to abut against the second valve seat; a first joint connected to the outlet of the auxiliary fluid passage; and a second joint connected to the inlet of the purge fluid supply passage It is a thing.
【０００６】[0006]
【作用】第１ダイヤフラムを第１弁座から離座させ、第
２ダイヤフラムを第２ステムで押圧して第２弁座に当座
させると、主流体通路を流れる高純度ガスの一部は、副
流体通路の一次側通路、第１弁室、副流体通路の二次側
通路を順次経て出口側へ排出されて行く。又、第２ダイ
ヤフラムを第２弁座から離座させると共に、第１ダイヤ
フラムを第１ステムで押圧して第１弁座に当座させ、パ
ージ流体供給通路の入口側からパージ流体を供給する
と、パージ流体は、パージ流体供給通路の一次側通路、
第２弁室、パージ流体供給通路の二次側通路、第１弁室
及び副流体通路の二次側通路を順次経て出口側へ排出さ
れて行く。このブロック弁は、二つのダイヤフラム弁を
一体化した構造即ち一つのボディに主流体通路、副流体
通路及びパージ流体供給通路を夫々形成し、副流体通路
の途中に第１弁室を、またパージ流体供給通路の途中に
第２弁室を形成し、第１弁室及び第２弁室内に夫々配設
したダイヤフラムによって副流体通路及びパージ流体供
給通路を夫々開閉する構成としている為、二つの単体の
制御弁と継手等を組み合わせた従来の配管路に比較して
内容積が極めて小さくなる。然も、パージ流体は、パー
ジ流体供給通路の一次側通路、第２弁室、パージ流体供
給通路の二次側通路、第１弁室及び副流体通路の二次側
通路を経て排出される為、ブロック弁内のガスが迅速に
排出されることになる。その結果、ガスの置換性が大幅
に向上すると共に、パーティクルの発生も少なくなり、
クリーン性に優れたものとなる。又、二つのダイヤフラ
ム弁を一体化している為、配管路に組み込んでも設置ス
ペースを広く必要とせず、設置スペースが少なくて済
む。然も、配管時には接続個所も少なくて済み、接続を
簡単且つ容易に行える。When the first diaphragm is moved away from the first valve seat and the second diaphragm is pressed against the second valve seat by the second stem, a part of the high-purity gas flowing through the main fluid passage will be The primary passage of the fluid passage, the first valve chamber, and the secondary passage of the auxiliary fluid passage are sequentially discharged to the outlet side. Further, when the second diaphragm is separated from the second valve seat, and the first diaphragm is pressed against the first valve seat by the first stem, the purge fluid is supplied from the inlet side of the purge fluid supply passage. The fluid is the primary side passage of the purge fluid supply passage,
The second valve chamber, the secondary passage of the purge fluid supply passage, the first valve chamber, and the secondary passage of the auxiliary fluid passage are sequentially discharged to the outlet side. This block valve has a structure in which two diaphragm valves are integrated, that is, a main fluid passage, a sub fluid passage, and a purge fluid supply passage are formed in one body, and a first valve chamber and a purge are provided in the middle of the sub fluid passage. The second valve chamber is formed in the middle of the fluid supply passage, and the sub-fluid passage and the purge fluid supply passage are opened and closed by the diaphragms provided in the first valve chamber and the second valve chamber, respectively. The internal volume is extremely smaller than that of the conventional pipe line in which the control valve and the joint are combined. However, the purge fluid is discharged through the primary passage of the purge fluid supply passage, the second valve chamber, the secondary passage of the purge fluid supply passage, the first valve chamber, and the secondary passage of the auxiliary fluid passage. Therefore, the gas in the block valve will be discharged quickly. As a result, the gas replaceability is greatly improved, and the generation of particles is reduced,
It has excellent cleanliness. Also, since the two diaphragm valves are integrated, there is no need for a large installation space even if they are installed in a pipe line, and the installation space is small. Needless to say, there are few connecting points during piping, and connection can be performed easily and easily.
【０００７】[0007]
【実施例】以下、本発明の実施例を図面に基づいて詳細
に説明する。図１乃至図３は本発明の実施例に係るブロ
ック弁であって、当該ブロック弁は、ダイヤフラムを直
接弁座に当離座させて開閉を行うようにしたものであ
り、ボディ１、第１ダイヤフラム２、第２ダイヤフラム
３、第１ボンネット４、第２ボンネット５、第１ボンネ
ットナット６、第２ボンネットナット７、第１ステム
８、第２ステム９、第１継手１０及び第２継手１１等か
ら構成されている。Embodiments of the present invention will now be described in detail with reference to the drawings. 1 to 3 show a block valve according to an embodiment of the present invention, which is configured such that a diaphragm is directly seated on and off a valve seat to open and close. Diaphragm 2, second diaphragm 3, first bonnet 4, second bonnet 5, first bonnet nut 6, second bonnet nut 7, first stem 8, second stem 9, first joint 10, second joint 11, etc. It consists of
【０００８】前記ボディ１１は、ステンレス等の金属材
により直方体状に形成されて居り、前後方向には入口１
２及び出口１３を有する主流体通路１４が形成されてい
る。又、ボディ１には主流体通路１４に連通して出口１
５を有する副流体通路１６が形成されて居り、該副流体
通路１６の途中で且つボディ１の上面部には上方が開放
された凹状の第１弁室１７が形成されている。更に、ボ
ディ１には第１弁室１７に連通して入口１８を有するパ
ージ流体供給通路１９が形成されて居り、該パージ流体
供給通路１９の途中で且つボディ１の左側面部には側方
が開放された凹状の第２弁室２０が形成されている。そ
して、第１弁室１７及び第２弁室２０の底面には合成樹
脂製の環状の第１弁座２１及び第２弁座２２が略埋設状
態で夫々設けられていると共に、各弁室１７，２０の内
周面下側には段部が形成されている。尚、２３は主流体
通路１４の入口１２及び出口１３に溶着されたステンレ
ス製のチューブである。The body 11 is made of a metallic material such as stainless steel and has a rectangular parallelepiped shape.
A main fluid passage 14 is formed having 2 and an outlet 13. Further, the body 1 communicates with the main fluid passage 14 and the outlet 1
A sub-fluid passage 16 having a number 5 is formed, and a concave first valve chamber 17 whose upper side is open is formed in the middle of the sub-fluid passage 16 and on the upper surface of the body 1. Further, the body 1 is formed with a purge fluid supply passage 19 communicating with the first valve chamber 17 and having an inlet 18. The purge fluid supply passage 19 has a lateral portion on the left side portion of the body 1 in the middle thereof. An open concave second valve chamber 20 is formed. Then, on the bottom surfaces of the first valve chamber 17 and the second valve chamber 20, annular first valve seats 21 and second valve seats 22 made of synthetic resin are provided in a substantially embedded state, and each valve chamber 17 A step portion is formed on the lower side of the inner peripheral surface of each of 20, 20. Reference numeral 23 is a stainless tube welded to the inlet 12 and the outlet 13 of the main fluid passage 14.
【０００９】前記第１及び第２ダイヤフラム２，３は、
第１弁座２１及び第２弁座２２の上方に夫々配設されて
居り、各弁室１７，２０の気密を保持すると共に、その
中央部が上下動して各弁座２１，２２に当離座するよう
になっている。本実施例では、各ダイヤフラム２，３
は、ステンレス鋼、インコネル（商標名）等の金属製薄
板により中央部を上方へ膨出せしめた皿状に形成されて
居り、その周縁部が弁室１７，２０内周面の段部に載置
され、ボディ１に螺着した第１及び第２ボンネットナッ
ト６，７を締め込むことによって、各弁室１７，２０内
へ夫々挿入した環状の第１及び第２押えアダプター２
４，２５と第１及び第２ボンネット４，５の下端部とに
より、段部側へ押圧され、気密状態で挾持固定されてい
る。The first and second diaphragms 2 and 3 are
They are provided above the first valve seat 21 and the second valve seat 22, respectively, and maintain the airtightness of the valve chambers 17 and 20, and the central portions thereof move up and down to contact the valve seats 21 and 22. It is designed to be separated. In this embodiment, each diaphragm 2, 3
Is formed in the shape of a plate with its central portion bulging upward with a thin metal plate made of stainless steel, Inconel (trademark) or the like, and its peripheral portion is mounted on the stepped portion of the inner peripheral surface of the valve chambers 17, 20. The ring-shaped first and second presser adapters 2 respectively inserted into the valve chambers 17 and 20 by tightening the first and second bonnet nuts 6 and 7 that are placed and screwed to the body 1.
4, 25 and the lower end portions of the first and second bonnets 4, 5 are pressed toward the step portion side, and are sandwiched and fixed in an airtight state.
【００１０】前記第１及び第２ボンネット４，５は、ス
テンレス等の金属材により筒状に形成されて居り、ボデ
ィ１の各弁室１７，２０内に夫々挿入され、第１及び第
２ボンネットナット６，７を締め込むことにより、ボデ
ィ１側へ押圧固定されている。The first and second bonnets 4 and 5 are formed of a metal material such as stainless steel in a cylindrical shape, and are inserted into the valve chambers 17 and 20 of the body 1, respectively. By tightening the nuts 6 and 7, it is pressed and fixed to the body 1 side.
【００１１】前記第１及び第２ステム８，９は、ステン
レス等の金属材により形成されて居り、上部が各ボンネ
ット４，５から夫々突出すべくボンネット４，５内に昇
降自在に螺挿されている。又、各ステム８，９の下端部
にはダイヤフラム２，３の中央部に当接する第１及び第
２ダイヤフラム押え２６，２７が夫々設けられていると
共に、上端部にはステム操作用の第１ハンドル２８及び
第２ハンドル２９が夫々固定されている。The first and second stems 8 and 9 are made of a metal material such as stainless steel, and are screwed up and down in the bonnets 4 and 5 so that their upper portions project from the bonnets 4 and 5, respectively. ing. Further, the lower ends of the stems 8 and 9 are provided with first and second diaphragm retainers 26 and 27, respectively, which come into contact with the central portions of the diaphragms 2 and 3, and the upper ends thereof are provided with a first stem operating member. The handle 28 and the second handle 29 are fixed respectively.
【００１２】前記第１及び第２継手１０，１１は、副流
体通路１６の出口１５及びパージ流体供給通路１９の入
口１８に夫々接続されて居り、ステンレス等の金属材に
より形成されて出口１５及び入口１８に夫々溶着された
第１及び第２スリーブ３０，３１と、各スリーブ３０，
３１に夫々外嵌されたステンレス製の第１及び第２ユニ
オンナット３２，３３と、スリーブ３０，３１とユニオ
ンナット３２，３３との間に介設された第１及び第２ピ
ュアリング３４，３５とから成る。The first and second joints 10 and 11 are connected to the outlet 15 of the auxiliary fluid passage 16 and the inlet 18 of the purge fluid supply passage 19, respectively, and are formed of a metal material such as stainless steel to form the outlet 15 and The first and second sleeves 30 and 31 welded to the inlet 18 and the respective sleeves 30 and 31,
Stainless steel first and second union nuts 32 and 33 respectively fitted onto 31 and first and second pure rings 34 and 35 interposed between the sleeves 30 and 31 and the union nuts 32 and 33. It consists of and.
【００１３】次に、前記ブロック弁の作動について説明
する。ブロック弁は、半導体製造プラント等に於いて使
用する高純度ガスが流れている主管（図示省略）から高
純度ガスの一部を取り出す場合に使用されて居り、主流
体通路１４の出入口１２，１３に設けたチューブ２３が
前記主管に溶接により接続されている。又、副流体通路
１６の出口１５に設けた第１継手１０には分岐管（図示
省略）が接続されて居り、該分岐管は半導体製造装置
（図示省略）等に接続されている。更に、パージ流体供
給通路１９の入口１８に設けた第２継手１１にはパージ
流体供給用の供給管（図示省略）が接続されて居り、該
供給管はパージ流体供給源（図示省略）に接続されてい
る。尚、ブロック弁は、非使用時には図１に示すように
各ダイヤフラム２，３が各弁座２１，２２に当座して閉
弁状態になっている。而して、主管から高純度ガスの一
部を取り出す場合には、図１の状態から第１ハンドル２
８を回して第１ステム８を上昇させる。そうすると、第
１ダイヤフラム２はその弾性力や流体圧によりその中央
部が上方へ変位し、第１弁座２１から離座する。その結
果、副流体通路１６の一次側通路が開放され、主流体通
路１４を流れる高純度ガスは、その一部が副流体通路１
６の一次側通路、第１弁室１７及び副流体通路１６の二
次側通路を経て出口１５から排出されて行き、分岐管側
へ流れて行く。又、分岐管側をパージする場合には、第
１ハンドル２８を回して第１ステム８を下降させると共
に、第２ハンドル２９を回して第２ステム９を上昇させ
る。そうすると、第１ダイヤフラム２の中央部が第１ス
テム８により下方へ押圧されて第１弁座２１に当座する
と共に、第２ダイヤフラム３がその弾性力や流体圧によ
り上方へ変位し、第２弁座２２から離座する。その結
果、副流体通路１６の一次側通路が閉塞されると共に、
パージ流体供給通路１９が開放され、パージ流体供給通
路１９の入口１８から供給されたパージ流体（例えばＮ
2 ガス，Ｈｅガス等）は、パージ流体供給通路１９の一
次側通路、第２弁室２０、パージ流体供給通路１９の二
次側通路、第１弁室１７及び副流体通路１６の二次側通
路を順次経て出口１５側へ排出され、分岐管側へ流れて
行く。これによって、分岐管がパージされることにな
る。このブロック弁は、二つのダイヤフラム弁を一体化
した構造即ち一つのボディ１に主流体通路１４、副流体
通路１６及びパージ流体供給通路１９を夫々形成し、副
流体通路１６の途中に第１弁室１７を、またパージ流体
供給通路１９の途中に第２弁室２０を形成し、第１弁室
１７及び第２弁室２０内に夫々配設したダイヤフラム
２，３によって各通路１６，１９を開閉する構成として
いる為、二つの単体の制御弁、短管及び継手等を組み合
わせた配管路に比較して内容積が極めて小さくなる。そ
の結果、ガスの置換性が向上すると共に、パーティクル
の発生も少なくなり、クリーン性に優れたものとなる。
特に、パージ流体は、パージ流体供給通路１９の一次側
通路、第２弁室２０、パージ流体供給通路１９の二次側
通路、第１弁室１７及び副流体通路１６の二次側通路を
経て排出される為、ブロック弁内のガスは迅速に排出さ
れることになり、ガスの置換性がより一層向上すること
になる。又、二つのダイヤフラム弁を一体化している
為、配管路に介設しても設置スペースを広く必要とせ
ず、設置スペースが少なくて済む。然も、配管時には接
続個所も少なくて済み、接続を簡単且つ容易に行える。Next, the operation of the block valve will be described. The block valve is used when a part of the high purity gas is taken out from a main pipe (not shown) through which the high purity gas used in a semiconductor manufacturing plant or the like flows, and the inlet / outlet ports 12, 13 of the main fluid passage 14 are used. The tube 23 provided in the main pipe is connected to the main pipe by welding. A branch pipe (not shown) is connected to the first joint 10 provided at the outlet 15 of the auxiliary fluid passage 16, and the branch pipe is connected to a semiconductor manufacturing apparatus (not shown) or the like. Further, a supply pipe (not shown) for supplying purge fluid is connected to the second joint 11 provided at the inlet 18 of the purge fluid supply passage 19, and the supply pipe is connected to a purge fluid supply source (not shown). Has been done. When the block valve is not used, the diaphragms 2 and 3 are in contact with the valve seats 21 and 22 to close the valve, as shown in FIG. Thus, when a part of the high-purity gas is taken out from the main pipe, the first handle 2 is moved from the state shown in FIG.
Rotate 8 to raise the first stem 8. Then, the central portion of the first diaphragm 2 is displaced upward due to its elastic force and fluid pressure, and is separated from the first valve seat 21. As a result, the primary passage of the sub-fluid passage 16 is opened, and a part of the high-purity gas flowing in the main fluid passage 14 is in the sub-fluid passage 1.
6 through the primary side passage, the first valve chamber 17, and the secondary side passage of the sub-fluid passage 16 to be discharged from the outlet 15 and flow toward the branch pipe side. When purging the branch pipe side, the first handle 28 is rotated to lower the first stem 8, and the second handle 29 is rotated to raise the second stem 9. Then, the central portion of the first diaphragm 2 is pressed downward by the first stem 8 to abut against the first valve seat 21, and the second diaphragm 3 is displaced upward due to its elastic force and fluid pressure, so that the second valve Move away from the seat 22. As a result, the primary passage of the auxiliary fluid passage 16 is closed, and
The purge fluid supply passage 19 is opened, and the purge fluid supplied from the inlet 18 of the purge fluid supply passage 19 (for example, N
2 gas, He gas, etc.) is the primary side passage of the purge fluid supply passage 19, the second valve chamber 20, the secondary passage of the purge fluid supply passage 19, the secondary side of the first valve chamber 17 and the auxiliary fluid passage 16. After passing through the passage, it is discharged to the outlet 15 side and flows to the branch pipe side. As a result, the branch pipe will be purged. This block valve has a structure in which two diaphragm valves are integrated, that is, a main fluid passage 14, a sub fluid passage 16 and a purge fluid supply passage 19 are formed in one body 1, respectively, and the first valve is provided in the middle of the sub fluid passage 16. The chamber 17 and the second valve chamber 20 are formed in the middle of the purge fluid supply passage 19, and the respective passages 16 and 19 are formed by the diaphragms 2 and 3 arranged in the first valve chamber 17 and the second valve chamber 20, respectively. Since it is configured to open and close, the internal volume becomes extremely small compared to a pipe line in which two single control valves, a short pipe, a joint, etc. are combined. As a result, the gas replaceability is improved, the generation of particles is reduced, and the cleanliness is excellent.
In particular, the purge fluid passes through the primary passage of the purge fluid supply passage 19, the second valve chamber 20, the secondary passage of the purge fluid supply passage 19, the first valve chamber 17 and the secondary passage of the auxiliary fluid passage 16. Since the gas is discharged, the gas in the block valve is quickly discharged, and the gas replacement property is further improved. Further, since the two diaphragm valves are integrated, the installation space does not need to be wide even if they are installed in the pipe line, and the installation space can be reduced. Needless to say, there are few connecting points during piping, and connection can be performed easily and easily.
【００１４】図５及び図６は従来の単体の制御弁、継手
及び短管等を組み合わせた配管系と、本発明のブロック
弁との置換特性試験の結果をグラフ化したものである。
即ち、図５及び図６のａのグラフは、制御弁及び継手等
を組み合わせた配管系の置換特性を示すものであり、図
４に於いて、制御弁４３を開弁状態に、制御弁３８を半
閉状態にし、継手４４部分からＨｅガスを十分に流した
後、制御弁３８を閉弁状態にしてＨｅガスをＮ2 ガスに
切替え、継手４１の下流側に設けたサンプリング管から
四重極ガス分析計にガスの一部を導入し、その変化を連
続的に捕らえたものである。又、図５及び図６のｂのグ
ラフは、本発明のブロック弁の置換特性を示すものであ
り、第２ダイヤフラム３を第２弁座２２から離座させて
パージ流体供給通路を開放状態にすると共に、第１ダイ
ヤフラム２を第１弁座２１から若干離座させて副流体通
路１６を半閉状態にし、パージ流体供給通路１９の入口
１８からＨｅガスを十分に流した後、第１ダイヤフラム
２を第１弁座２１に当座させてＨｅガスをＮ2 ガスに切
替え、副流体通路１６の出口１５の下流側に設けたサン
プリング管から四重極ガス分析計にガスの一部を導入
し、その変化を連続的に捕らえたものである。図５のグ
ラフはガスの流量が６０ｃｃ／ｍｉｎの場合でＨｅガス
を流した後、Ｎ2 ガスに切替えた場合を示し、又、図６
のグラフはガスの流量が５００ｃｃ／ｍｉｎの場合でＨ
ｅガスを流した後、Ｎ2 ガスに切替えた場合を示すもの
である。各グラフからも明らかなようにブロック弁の方
がガスの置換性が良いことが判る。尚、グラフ化してい
ないが、Ｎ2 ガスを流した後、Ｈｅガスに切替えた場合
も前記と同様にガスの置換性が良いことが試験により確
認されている。FIG. 5 and FIG. 6 are graphs showing the results of the replacement characteristic test of the conventional single control valve, a piping system in which a joint and a short pipe are combined, and the block valve of the present invention.
That is, the graphs a in FIGS. 5 and 6 show the substitution characteristics of the piping system in which the control valve, the joint, and the like are combined. In FIG. 4, the control valve 43 is opened and the control valve 38 is opened. In a semi-closed state, and after allowing He gas to sufficiently flow from the joint 44 portion, the control valve 38 is closed to switch He gas to N 2 gas, and a quadruple sampling pipe is provided downstream of the joint 41. A part of the gas was introduced into the polar gas analyzer and the changes were continuously captured. The graphs of FIGS. 5 and 6 show the replacement characteristics of the block valve of the present invention, in which the second diaphragm 3 is separated from the second valve seat 22 to open the purge fluid supply passage. At the same time, the first diaphragm 2 is slightly separated from the first valve seat 21 to bring the sub-fluid passage 16 into a semi-closed state, and the He gas is sufficiently flown from the inlet 18 of the purge fluid supply passage 19, and then the first diaphragm is closed. 2 is seated on the first valve seat 21, He gas is switched to N 2 gas, and a part of the gas is introduced into the quadrupole gas analyzer from the sampling pipe provided on the downstream side of the outlet 15 of the auxiliary fluid passage 16. , That change is captured continuously. The graph of FIG. 5 shows the case where the He gas is flown and the N 2 gas is switched to when the gas flow rate is 60 cc / min, and FIG.
The graph of is H when the gas flow rate is 500 cc / min.
It shows a case where the e gas is flown and then switched to N 2 gas. As is clear from each graph, it can be seen that the block valve has a better gas replacement property. Although not shown in the graph, it has been confirmed by a test that the gas replacement property is good as in the above case even when the He gas is switched to after the N 2 gas is flown.
【００１５】上記実施例に於いては、第１及び第２弁座
２１，２２をボディ１と別体に形成し、これらを各弁室
１７，２０の底面に取り付けるようにしたが、各弁座２
１，２２をボディ１と一体的に形成するようにしても良
い。In the above embodiment, the first and second valve seats 21 and 22 are formed separately from the body 1 and are attached to the bottom surfaces of the valve chambers 17 and 20, respectively. Zodiac 2
Alternatively, the units 1 and 22 may be formed integrally with the body 1.
【００１６】上記実施例に於いては、第１及び第２ステ
ム８，９を手動式のハンドル２８，２９によって昇降動
させるようにしたが、各ステム８，９の上端部に流体圧
アクチュエータ等の駆動装置（図示省略）を連結してス
テム８，９を自動的に昇降させるようにしても良い。In the above embodiment, the first and second stems 8 and 9 are moved up and down by the manual handles 28 and 29. However, a fluid pressure actuator or the like is provided at the upper end of each stem 8 or 9. The drive device (not shown) may be connected to automatically raise and lower the stems 8 and 9.
【００１７】[0017]
【発明の効果】上述の通り、本発明のブロック弁は、二
つのダイヤフラム弁を一体化した構造即ち一つのボディ
に主流体通路、副流体通路及びパージ流体供給通路を夫
々形成し、副流体通路の途中に第１弁室を、またパージ
流体供給通路の途中に第２弁室を形成し、第１弁室及び
第２弁室内に夫々配設したダイヤフラムによって副流体
通路及びパージ流体供給通路を開閉する構成としている
為、二つの単体の制御弁と継手等を組み合わせた従来の
配管路に比較して内容積が極めて小さくなる。その結
果、ガスの置換性が向上すると共に、パーティクルの発
生も少なくなり、クリーン性に優れたものとなる。特
に、パージ流体は、パージ流体供給通路の一次側通路、
第２弁室、パージ流体供給通路の二次側通路、第１弁室
及び副流体通路の二次側通路を経て排出される為、ブロ
ック弁内のガスが迅速に排出されることになり、ガスの
置換性がより一層向上することになる。延いては、半導
体等の品質の向上を図り得る。又、本発明のブロック弁
は、二つのダイヤフラム弁を一体化した構造を呈してい
る為、従来のように二つの単体の制御弁と継手等を組み
合わせたものに比較して大幅な小型化を図れ、配管路に
介設しても設置スペースを広く必要とせず、設置スペー
スが少なくて済む。然も、配管時には接続個所も少なく
て済み、接続を簡単且つ容易に行える。As described above, the block valve of the present invention has a structure in which two diaphragm valves are integrated, that is, a main fluid passage, a sub fluid passage and a purge fluid supply passage are formed in one body, and the sub fluid passage is formed. A first valve chamber and a second valve chamber in the middle of the purge fluid supply passage, and the sub-fluid passage and the purge fluid supply passage are formed by diaphragms arranged in the first valve chamber and the second valve chamber, respectively. Since it is configured to open and close, the internal volume becomes extremely small compared to the conventional pipe line in which two single control valves and joints are combined. As a result, the gas replaceability is improved, the generation of particles is reduced, and the cleanliness is excellent. In particular, the purge fluid is the primary passage of the purge fluid supply passage,
Since the gas is discharged through the second valve chamber, the secondary side passage of the purge fluid supply passage, the first valve chamber and the secondary side passage of the sub-fluid passage, the gas in the block valve is quickly discharged. The gas replaceability is further improved. Furthermore, the quality of semiconductors and the like can be improved. Further, since the block valve of the present invention has a structure in which two diaphragm valves are integrated, the block valve can be made much smaller than the conventional one in which two single control valves and joints are combined. Even if it is installed in the pipeline, it does not require a large installation space, and the installation space is small. Needless to say, there are few connecting points during piping, and connection can be performed easily and easily.
【図１】本発明の実施例に係るブロック弁の一部破断正
面図である。FIG. 1 is a partially cutaway front view of a block valve according to an embodiment of the present invention.
【図２】同じくブロック弁の一部破断右側面図である。FIG. 2 is a right side view of the block valve, partly broken away.
【図３】同じくブロック弁の一部破断底面図である。FIG. 3 is a partially cutaway bottom view of the block valve.
【図４】従来のダイヤフラム型制御弁と継手等を組み合
わせた配管図である。FIG. 4 is a piping diagram in which a conventional diaphragm type control valve is combined with a joint and the like.
【図５】本発明のブロック弁と従来の配管路の置換特性
試験の結果をグラフ化したものである。FIG. 5 is a graph showing the results of the substitution characteristic test of the block valve of the present invention and the conventional piping.
【図６】同じく本発明のブロック弁と従来の配管路の置
換特性試験の結果をグラフ化したものである。FIG. 6 is a graph showing the results of the substitution characteristic test of the block valve of the present invention and the conventional piping.
１はボディ１、２は第１ダイヤフラム、３は第２ダイヤ
フラム、４は第１ボンネット、５は第２ボンネット、８
は第１ステム、９は第２ステム、１０は第１継手、１１
は第２継手、１２は主流体通路の入口、１３は主流体通
路の出口、１４は主流体通路、１５は副流体通路の出
口、１６は副流体通路、１７は第１弁室、１８はパージ
流体供給通路の入口、１９はパージ流体供給通路、２０
は第２弁室、２１は第１弁座、２２は第１弁座。1 is a body 1, 2 is a first diaphragm, 3 is a second diaphragm, 4 is a first bonnet, 5 is a second bonnet, 8
Is a first stem, 9 is a second stem, 10 is a first joint, 11
Is the second joint, 12 is the inlet of the main fluid passage, 13 is the outlet of the main fluid passage, 14 is the main fluid passage, 15 is the outlet of the auxiliary fluid passage, 16 is the auxiliary fluid passage, 17 is the first valve chamber, and 18 is Inlet of purge fluid supply passage, 19 is purge fluid supply passage, 20
Is a second valve chamber, 21 is a first valve seat, and 22 is a first valve seat.
Claims (1)
流体通路に連通して出口を有する副流体通路と、副流体
通路の途中に形成されて第１弁座を有する第１弁室と、
第１弁室に連通して入口を有するパージ流体供給通路
と、パージ流体供給通路の途中に形成されて第２弁座を
有する第２弁室とから成るボディと；第１弁室内にこれ
の気密を保持すべく配設され、第１弁座に当離座する第
１ダイヤフラムと；第２弁室内にこれの気密を保持すべ
く配設され、第２弁座に当離座する第２ダイヤフラム
と；ボディに取り付けた第１ボンネットに進退移動自在
に支持され、第１ダイヤフラムを第１弁座に当座させる
第１ステムと；ボディに取り付けた第２ボンネットに進
退移動自在に支持され、第２ダイヤフラムを第２弁座に
当座させる第２ステムと；副流体通路の出口に接続され
た第１継手と；パージ流体供給通路の入口に接続された
第２継手とから構成したことを特徴とするブロック弁。1. A main fluid passage having an inlet and an outlet, a sub-fluid passage communicating with the main fluid passage and having an outlet, and a first valve chamber having a first valve seat formed in the middle of the sub-fluid passage. ,
A body comprising a purge fluid supply passage communicating with the first valve chamber and having an inlet, and a second valve chamber having a second valve seat formed in the middle of the purge fluid supply passage; A first diaphragm which is arranged to maintain airtightness and is separated from the first valve seat; and a second diaphragm which is arranged to maintain airtightness thereof in the second valve chamber and is separated from the second valve seat A diaphragm; a first stem that is movably supported by a first bonnet attached to the body, and a first stem that causes the first diaphragm to rest on a first valve seat, and a first stem that is movably supported by a second bonnet attached to the body, (2) A second stem for causing the diaphragm to abut against the second valve seat; a first joint connected to the outlet of the auxiliary fluid passage; and a second joint connected to the inlet of the purge fluid supply passage. Block valve to do.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6081293A JPH06281026A (en) | 1993-03-22 | 1993-03-22 | Block valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6081293A JPH06281026A (en) | 1993-03-22 | 1993-03-22 | Block valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06281026A true JPH06281026A (en) | 1994-10-07 |
Family
ID=13153139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6081293A Pending JPH06281026A (en) | 1993-03-22 | 1993-03-22 | Block valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06281026A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000006929A1 (en) | 1998-07-29 | 2000-02-10 | Nippon Sanso Corporation | Valve for lp gas cylinder |
| SG79211A1 (en) * | 1996-01-05 | 2001-03-20 | Ckd Corp | Gas supply unit |
| WO2003001093A1 (en) * | 2001-06-21 | 2003-01-03 | Asahi Organic Chemicals Industry Co., Ltd. | Manifold valve |
| JP2003004151A (en) * | 2001-06-21 | 2003-01-08 | Asahi Organic Chem Ind Co Ltd | Manifold valve |
| JP2003021248A (en) * | 2001-07-10 | 2003-01-24 | Asahi Organic Chem Ind Co Ltd | Manifold valve |
| WO2003048617A1 (en) * | 2001-12-06 | 2003-06-12 | Asahi Organic Chemicals Industry Co., Ltd. | Manifold valve |
| KR20170102457A (en) * | 2015-01-16 | 2017-09-11 | 가부시키가이샤 깃츠 에스시티 | Block valve and block valve for raw material container |
-
1993
- 1993-03-22 JP JP6081293A patent/JPH06281026A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG79211A1 (en) * | 1996-01-05 | 2001-03-20 | Ckd Corp | Gas supply unit |
| WO2000006929A1 (en) | 1998-07-29 | 2000-02-10 | Nippon Sanso Corporation | Valve for lp gas cylinder |
| US6206026B1 (en) | 1998-07-29 | 2001-03-27 | Nippon Sanso Corporation | Valve for LP gas cylinder |
| WO2003001093A1 (en) * | 2001-06-21 | 2003-01-03 | Asahi Organic Chemicals Industry Co., Ltd. | Manifold valve |
| JP2003004151A (en) * | 2001-06-21 | 2003-01-08 | Asahi Organic Chem Ind Co Ltd | Manifold valve |
| US6889709B2 (en) | 2001-06-21 | 2005-05-10 | Asahi Organic Chemicals Industry Co., Ltd. | Manifold valve |
| KR100905518B1 (en) * | 2001-06-21 | 2009-07-01 | 아사히 유키자이 고교 가부시키가이샤 | Manifold valve |
| JP2003021248A (en) * | 2001-07-10 | 2003-01-24 | Asahi Organic Chem Ind Co Ltd | Manifold valve |
| WO2003048617A1 (en) * | 2001-12-06 | 2003-06-12 | Asahi Organic Chemicals Industry Co., Ltd. | Manifold valve |
| CN100351565C (en) * | 2001-12-06 | 2007-11-28 | 旭有机材工业株式会社 | Manifold valve |
| KR20170102457A (en) * | 2015-01-16 | 2017-09-11 | 가부시키가이샤 깃츠 에스시티 | Block valve and block valve for raw material container |
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