JPH06265345A - Scanning probe microscope - Google Patents
Scanning probe microscopeInfo
- Publication number
- JPH06265345A JPH06265345A JP5078781A JP7878193A JPH06265345A JP H06265345 A JPH06265345 A JP H06265345A JP 5078781 A JP5078781 A JP 5078781A JP 7878193 A JP7878193 A JP 7878193A JP H06265345 A JPH06265345 A JP H06265345A
- Authority
- JP
- Japan
- Prior art keywords
- image
- sample
- probe
- microscope
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は走査型プロ−ブ顕微鏡
に関し、特に試料表面のマクロ像を作成する低分解能測
定手段とミクロ像を作成する高分解能測定手段とを備え
た走査型プロ−ブ顕微鏡に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning probe microscope, and more particularly to a scanning probe having a low resolution measuring means for forming a macro image of a sample surface and a high resolution measuring means for forming a micro image. Regarding the microscope.
【０００２】[0002]
【従来の技術】従来の走査型プロ−ブ顕微鏡として、試
料表面の光学像を観察するための光学顕微鏡と、この光
学顕微鏡により得た画像を電気信号に変換するＣＣＤカ
メラと、光学像を表示するテレビモニタと、探針を試料
表面に対して相対走査し、試料表面のミクロ像を得る高
分解能測定手段（例えば走査型トンネル顕微鏡）とを備
えたものがある。2. Description of the Related Art As a conventional scanning probe microscope, an optical microscope for observing an optical image of a sample surface, a CCD camera for converting an image obtained by this optical microscope into an electric signal, and an optical image display. There is a monitor equipped with a television monitor and a high-resolution measuring unit (for example, a scanning tunneling microscope) that relatively scans the probe with respect to the sample surface to obtain a micro image of the sample surface.
【０００３】この走査型プロ−ブ顕微鏡では、試料のミ
クロ像を得るにあたり、光学顕微鏡による試料表面のマ
クロ像をテレビモニタ上に表示し、高分解能測定手段に
よる測定領域を定め、その領域が探針に対向するように
試料を移動させる。In this scanning probe microscope, in obtaining a micro image of a sample, a macro image of the sample surface by an optical microscope is displayed on a television monitor, a measurement region by high-resolution measuring means is determined, and the region is searched. Move the sample to face the needle.
【０００４】[0004]
【発明が解決しようとする課題】ところが、光学顕微鏡
の解像力が低いので、試料表面の微小な凹凸等の試料観
察が困難であり、また測定領域を容易に指定することが
できないという問題があった。それ故に従来は光学顕微
鏡で試料表面の形状を認識できない場合、測定者の勘に
よって特定した測定領域を一旦測定してミクロ像を得、
その測定結果を参考にして再度測定領域を変えて測定す
るということを行っており、測定作業が煩雑で、測定時
間も長くなってしまう。However, since the resolution of the optical microscope is low, there is a problem that it is difficult to observe the sample such as minute irregularities on the sample surface, and the measurement area cannot be easily specified. . Therefore, conventionally, when the shape of the sample surface cannot be recognized with an optical microscope, the measurement area specified by the operator's intuition is once measured to obtain a micro image,
Since the measurement area is measured again with reference to the measurement result, the measurement work is complicated and the measurement time becomes long.
【０００５】この発明はこのような事情に鑑みてなされ
たもので、その課題は試料表面の微小な凹凸等の試料観
察が可能であるとともに、測定領域を容易に指定するこ
とができる走査型プロ−ブ顕微鏡を提供することであ
る。The present invention has been made in view of the above circumstances, and its problem is that the scanning type professional can observe a sample such as minute irregularities on the sample surface and can easily specify a measurement region. -To provide a microscope.
【０００６】[0006]
【課題を解決するための手段】前述の課題を解決するた
めこの発明の走査型プロ−ブ顕微鏡は、試料の表面の画
像を作成する低分解能測定手段と、探針を前記試料表面
に対して相対走査し、前記試料表面のミクロ的な画像を
得る高分解能測定手段とを備えた走査型プロ−ブ顕微鏡
において、前記試料が前記低分解能測定手段の解像力を
越えたとき、前記低分解能測定手段からの信号を画像処
理して前記試料の表面の形状を可視化する画像処理手段
と、この画像処理手段により作成された画像を表示する
表示手段と、この表示手段に表示された前記画像にて前
記高分解能測定手段による測定箇所を指定する入力手段
と、指定された前記測定箇所に前記探針を相対移動さ
せ、前記測定箇所で前記高分解能測定手段の測定を行わ
せるプロ−ブ制御手段とを備えている。In order to solve the above-mentioned problems, the scanning probe microscope of the present invention comprises a low-resolution measuring means for creating an image of the surface of a sample and a probe for the surface of the sample. In a scanning probe microscope equipped with high-resolution measuring means for performing relative scanning to obtain a microscopic image of the sample surface, the low-resolution measuring means when the sample exceeds the resolution of the low-resolution measuring means. Image processing means for visualizing the shape of the surface of the sample by image-processing the signal from the display means, display means for displaying the image created by the image processing means, and the image displayed on the display means. An input means for designating a measurement point by the high resolution measurement means and a probe control hand for moving the probe to the designated measurement point relative to the measurement point of the high resolution measurement means. It is equipped with a door.
【０００７】[0007]
【作用】試料が低分解能測定手段の解像力を越えたと
き、画像処理手段は低分解能測定手段からの信号を画像
処理して試料の表面の形状を可視化し、表示手段に可視
像を表示する。入力手段により表示手段に表示された画
像にて高分解能測定手段による測定箇所を指定すると、
プロ−ブ制御手段は指定された測定箇所に探針を相対移
動させ、測定箇所で高分解能測定手段の測定を行わせ
る。When the sample exceeds the resolving power of the low resolution measuring means, the image processing means image-processes the signal from the low resolution measuring means to visualize the surface shape of the sample and displays the visible image on the display means. . When the measurement point by the high resolution measuring means is specified in the image displayed on the display means by the input means,
The probe control means moves the probe relative to the designated measurement location and causes the high-resolution measurement means to perform the measurement at the measurement location.
【０００８】[0008]
【実施例】以下この発明の実施例を図面に基づいて説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】図１はこの発明の一実施例に係る走査型プ
ロ−ブ顕微鏡のブロック図である。FIG. 1 is a block diagram of a scanning probe microscope according to an embodiment of the present invention.
【００１０】試料１は上下方向に移動可能なＺステージ
２上に載置され、Ｚステージ２はＸＹ方向に移動可能な
ＸＹステージ３上に載置され、ＸＹステージ３は防振台
４上に載置されている。試料１の上方には、試料１との
間にトンネル電流を流す探針５と、探針５を微動させる
微動機構６とが配設されている。更に試料１の上方には
試料観察用の光学顕微鏡装置７が配置され、光学顕微鏡
装置７にはＣＣＤカメラ８が接続されている。ＣＣＤカ
メラ８はビデオ信号処理装置９に接続され、ビデオ信号
処理装置９はＣＣＤカメラ８からのビデオ信号を処理す
る。ビデオ信号処理装置９は表示装置１０に接続され、
表示装置１０はビデオ信号処理装置９からの信号を読み
取って表示する。The sample 1 is placed on a Z stage 2 movable in the vertical direction, the Z stage 2 is placed on an XY stage 3 movable in the XY directions, and the XY stage 3 is placed on a vibration isolation table 4. It has been placed. Above the sample 1, a probe 5 for passing a tunnel current between the sample 1 and a fine movement mechanism 6 for finely moving the probe 5 are arranged. Further, an optical microscope device 7 for observing the sample is arranged above the sample 1, and a CCD camera 8 is connected to the optical microscope device 7. The CCD camera 8 is connected to the video signal processing device 9, and the video signal processing device 9 processes the video signal from the CCD camera 8. The video signal processing device 9 is connected to the display device 10,
The display device 10 reads and displays the signal from the video signal processing device 9.
【００１１】ビデオ信号処理装置９はパーソナルコンピ
ュータ装置等の演算制御装置１１に接続され、演算制御
装置１１は演算部１１ａと、キーボードやマウス等の入
力装置１１ｂと、試料１に対して探針５を走査して得た
ミクロ像（必ずしもミクロンオーダの像を指すものでは
ない）の解析用の表示装置１１ｃとで構成されている。
演算部１１ａは、光学顕微鏡装置７で得た光学像を記憶
する画像メモリ１２と、入力装置１１ｂにより指定した
測定箇所について測定を行わせるプローブ制御手段１３
と、試料１が光学顕微鏡装置７の解像力を越えたとき、
画像メモリ１２に記憶された画像を可視化する画像処理
手段１４と、表示装置１１ｃを制御する表示制御手段１
５とで構成されている。The video signal processing device 9 is connected to an arithmetic and control unit 11 such as a personal computer, and the arithmetic and control unit 11 has an arithmetic unit 11a, an input unit 11b such as a keyboard and a mouse, and a probe 5 for the sample 1. And a display device 11c for analyzing a micro image (which does not necessarily indicate a micron-order image) obtained by scanning.
The calculation unit 11a includes an image memory 12 that stores an optical image obtained by the optical microscope device 7, and a probe control unit 13 that causes a measurement location designated by the input device 11b to be measured.
When the sample 1 exceeds the resolution of the optical microscope device 7,
The image processing means 14 for visualizing the image stored in the image memory 12 and the display control means 1 for controlling the display device 11c.
It is composed of 5 and 5.
【００１２】前記微動機構６及びＸＹステージ３はコン
トロールユニット１６に接続され、コントロールユニッ
ト１６は、プローブを制御するプローブ制御部１６ａ
と、ＸＹステージ３を制御するステージ制御部１６ｃ
と、微動機構６からのトンネル電流を検出し、検出信号
を演算部１１ａに送出すＳＰＭ信号処理部１６ｂとで構
成されている。The fine movement mechanism 6 and the XY stage 3 are connected to a control unit 16, and the control unit 16 controls the probe by a probe control section 16a.
And a stage controller 16c for controlling the XY stage 3
And a SPM signal processing unit 16b that detects a tunnel current from the fine movement mechanism 6 and sends a detection signal to the calculation unit 11a.
【００１３】次に、この走査型プロ−ブ顕微鏡の動作を
説明する。Next, the operation of this scanning probe microscope will be described.
【００１４】光学顕微鏡装置７により得られた光学像は
ＣＣＤカメラ８でビデオ信号に変換され、ＣＣＤカメラ
８からのビデオ信号はビデオ信号処理装置９で処理さ
れ、表示装置１０はビデオ信号処理装置９からの信号を
読み取って表示する。The optical image obtained by the optical microscope device 7 is converted into a video signal by the CCD camera 8, the video signal from the CCD camera 8 is processed by the video signal processing device 9, and the display device 10 is processed by the video signal processing device 9. Read and display the signal from.
【００１５】測定者は表示装置１０に表示された試料１
の表面の画像を見ながら入力装置１１ｂを用いて測定箇
所を探す。測定箇所が見付かると、その画像を演算部１
１ａの画像メモリ１２に取り込み、画像中の探針５の位
置にマーク1 を付ける。そのマーク1 を探針５の垂直下
にある試料表面上の座標Ｑとする。The measurer is the sample 1 displayed on the display device 10.
While looking at the image of the surface of, the measurement location is searched using the input device 11b. When the measurement point is found, the image is calculated and the calculation unit 1
1a is taken into the image memory 12, and the mark 1 is attached to the position of the probe 5 in the image. The mark 1 is set as a coordinate Q on the sample surface vertically below the probe 5.
【００１６】次に、画像メモリ１２を介して画像中のミ
クロ像を作成しようとする箇所、すなわち測定箇所Ｐ1
〜Ｐn にマーク2 〜n を付ける。Next, the location where a micro image in the image is to be created, that is, the measurement location P 1 via the image memory 12.
Marks 2 to n are attached to Pn .
【００１７】座標Ｑが求まった後、入力装置１１ｂに移
動指令を入力すると、プローブ制御手段１３から制御信
号がコントロールユニット１６のステージ制御部１６ｃ
へ送出され、ＸＹステージ３が動いてＰ1 の座標を座標
Ｑの位置（探針５の垂直下）に移動する。その後探針５
を試料１の表面に対して走査させて測定箇所Ｐ1 のミク
ロ像を得る。When the movement command is input to the input device 11b after the coordinate Q is obtained, the control signal from the probe control means 13 causes the stage control section 16c of the control unit 16.
And the XY stage 3 moves to move the coordinates of P 1 to the position of coordinates Q (vertically below the probe 5). Then probe 5
Is scanned on the surface of the sample 1 to obtain a micro image of the measurement point P 1 .
【００１８】ミクロ像は表示装置１１ｃにも表示され、
そのミクロ像を用いて解析作業が行われる。The micro image is also displayed on the display device 11c,
Analysis work is performed using the micro image.
【００１９】各測定箇所Ｐ1 〜Ｐn に対して同様の操作
を繰り返すことにより多点測定ができる。Multiple points can be measured by repeating the same operation for each of the measurement points P 1 to P n .
【００２０】これに対し、試料１が光学顕微鏡装置７の
解像力を越えた場合、入力装置１１ｂを用いて光学像を
可視化すべき指令を演算部１１ａに送出すると、画像処
理手段１４は画像メモリ１２に記憶された画像を可視化
し、可視化された画像は画像メモリ１２に記憶され、入
力装置１１ｂからの表示指令によって表示装置１５に表
示される。On the other hand, when the sample 1 exceeds the resolving power of the optical microscope device 7, when a command for visualizing an optical image is sent to the arithmetic unit 11a using the input device 11b, the image processing means 14 causes the image processing means 14 to operate. The image stored in is visualized, and the visualized image is stored in the image memory 12 and displayed on the display device 15 in response to a display command from the input device 11b.
【００２１】表示後の操作は前述の場合と同じである。The operation after the display is the same as that described above.
【００２２】この実施例の走査型プロ−ブ顕微鏡によれ
ば、前述のように試料１が光学顕微鏡装置７の解像力を
越えた場合、画像処理手段１４によって可視化された画
像を表示装置１５に表示させることができるので、試料
表面の微小な凹凸等の試料観察が可能になるとともに、
測定領域を容易に指定することができ、１回の測定操作
で所望のミクロ像を得ることができ、測定時間が短縮さ
れる。According to the scanning probe microscope of this embodiment, when the sample 1 exceeds the resolution of the optical microscope device 7 as described above, the image visualized by the image processing means 14 is displayed on the display device 15. It is possible to observe the sample such as minute irregularities on the sample surface,
The measurement region can be easily specified, a desired micro image can be obtained by one measurement operation, and the measurement time can be shortened.
【００２３】前述の実施例では高分解能測定手段として
走査型トンネル電流顕微鏡を用いた場合について述べた
が、これに代え、原子間力顕微鏡等の各種の高分解能測
定手段を用いるようにしてもよい。In the above-described embodiment, the case where the scanning tunnel current microscope is used as the high resolution measuring means has been described, but instead of this, various high resolution measuring means such as an atomic force microscope may be used. .
【００２４】[0024]
【発明の効果】以上説明したようにこの発明の走査型プ
ロ−ブ顕微鏡によれば、試料表面の微小な凹凸等の試料
観察が可能になるとともに、測定領域を容易に指定する
ことができるので、１回の測定操作で所望のミクロ像を
得ることができ、測定時間が短縮される。As described above, according to the scanning probe microscope of the present invention, it becomes possible to observe the sample such as minute irregularities on the sample surface, and it is possible to easily specify the measurement region. A desired micro image can be obtained by one measurement operation, and the measurement time can be shortened.
【図１】図１はこの発明の一実施例に係る走査型プロ−
ブ顕微鏡のブロック図である。FIG. 1 is a scanning type projector according to an embodiment of the present invention.
It is a block diagram of a microscope.
１ 試料 ３ ＸＹステージ ５ 探針 ６ 微動機構 ７ 光学顕微鏡装置 ８ ＣＣＤカメラ ９ ビデオ信号処理装置 １０ 表示装置 １１ａ 入力装置 １２ 画像メモリ １３ プローブ制御手段 １４ 画像処理手段 １６ コントロールユニット 1 sample 3 XY stage 5 probe 6 fine movement mechanism 7 optical microscope device 8 CCD camera 9 video signal processing device 10 display device 11a input device 12 image memory 13 probe control means 14 image processing means 16 control unit
Claims (1)
定手段と、 探針を前記試料表面に対して相対走査し、前記試料表面
のミクロ的な画像を得る高分解能測定手段とを備えた走
査型プロ−ブ顕微鏡において、 前記試料が前記低分解能測定手段の解像力を越えたと
き、前記低分解能測定手段からの信号を画像処理して前
記試料の表面の形状を可視化する画像処理手段と、 この画像処理手段により作成された画像を表示する表示
手段と、 この表示手段に表示された前記画像にて前記高分解能測
定手段による測定箇所を指定する入力手段と、 指定された前記測定箇所に前記探針を相対移動させ、前
記測定箇所で前記高分解能測定手段の測定を行わせるプ
ロ−ブ制御手段とを備えていることを特徴とする走査型
プロ−ブ顕微鏡。1. A low-resolution measuring means for forming an image of the surface of a sample, and a high-resolution measuring means for relatively scanning a probe with respect to the surface of the sample to obtain a microscopic image of the surface of the sample. In the scanning probe microscope, when the sample exceeds the resolving power of the low-resolution measuring means, image processing means for image-processing the signal from the low-resolution measuring means to visualize the shape of the surface of the sample, Display means for displaying an image created by the image processing means, input means for designating a measurement location by the high resolution measurement means on the image displayed on the display means, and the above-mentioned measurement location at the designated measurement location. A scanning probe microscope, further comprising: a probe control means for moving the probe relative to the probe to measure the high-resolution measuring means at the measurement location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5078781A JPH06265345A (en) | 1993-03-12 | 1993-03-12 | Scanning probe microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5078781A JPH06265345A (en) | 1993-03-12 | 1993-03-12 | Scanning probe microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06265345A true JPH06265345A (en) | 1994-09-20 |
Family
ID=13671436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5078781A Withdrawn JPH06265345A (en) | 1993-03-12 | 1993-03-12 | Scanning probe microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06265345A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680743A (en) * | 2012-05-08 | 2012-09-19 | 上海交通大学 | Template fast approximation and in-situ detection device and method in micro-nano instruments and equipment |
| CN106053886A (en) * | 2016-07-28 | 2016-10-26 | 中国计量大学 | Large-scale atomic force microscope scanning and positioning system |
-
1993
- 1993-03-12 JP JP5078781A patent/JPH06265345A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680743A (en) * | 2012-05-08 | 2012-09-19 | 上海交通大学 | Template fast approximation and in-situ detection device and method in micro-nano instruments and equipment |
| CN106053886A (en) * | 2016-07-28 | 2016-10-26 | 中国计量大学 | Large-scale atomic force microscope scanning and positioning system |
| CN106053886B (en) * | 2016-07-28 | 2019-02-15 | 中国计量大学 | A kind of a wide range of afm scan positioning system |
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| Date | Code | Title | Description |
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| A300 | Withdrawal of application because of no request for examination |
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