JPH06229911A - Method and apparatus for measuring double refraction - Google Patents
Method and apparatus for measuring double refractionInfo
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- JPH06229911A JPH06229911A JP1296193A JP1296193A JPH06229911A JP H06229911 A JPH06229911 A JP H06229911A JP 1296193 A JP1296193 A JP 1296193A JP 1296193 A JP1296193 A JP 1296193A JP H06229911 A JPH06229911 A JP H06229911A
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- sample
- light
- birefringence
- measurement
- measuring
- Prior art date
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、複屈折測定装置、特に
複合フィルム等のレターデーション測定に適した複屈折
測定装置に関するものであり、液晶用位相差フィルム
や、金属の表面に貼り合わせされた高分子フィルム等の
複合材料よりなるフィルムあるいはシート等のレターデ
ーション及び主屈折率方向の測定等に特に有効である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a birefringence measuring device, and more particularly to a birefringence measuring device suitable for retardation measurement of a composite film or the like, which is applied to a retardation film for liquid crystal or a metal surface. It is particularly effective for the retardation of a film or sheet made of a composite material such as a polymer film and the measurement of the main refractive index direction.
【０００２】[0002]
【従来の技術】従来の複屈折測定装置では、測光部が試
料面の両側に投光部と受光部に分かれており、受光部側
に検光子、投光部側に偏光子のセットで配置されてお
り、偏光子、検光子の偏光方向を同一方向に（平行ニコ
ル配置に）調整するために多大な労力と時間を要してい
た。垂直ニコル配置その他、偏光子と検光子とを所定の
偏光方向の関係に調整する場合も同じである。2. Description of the Related Art In a conventional birefringence measuring device, a photometry section is divided into a light projecting section and a light receiving section on both sides of a sample surface, and an analyzer is arranged on the light receiving section side and a polarizer is arranged on the light projecting section side. However, it takes a lot of labor and time to adjust the polarization directions of the polarizer and the analyzer to the same direction (parallel Nicol arrangement). The same applies to the case where the polarizer and the analyzer are adjusted to have a predetermined polarization direction relationship in addition to the vertical Nicol arrangement.
【０００３】また透過型のため製造ラインに設置する
際、装置を設置するスペースを大きく確保する必要があ
った。特に、平行ニコル配置の偏光子と検光子の組を偏
光方向を互いにずらせて数組設置してこれらの透過光強
度からレターデーションを算出する方式のオンライン複
屈折測定装置では、偏光子・検光子の組が複数であるた
め、偏光方向の調整にさらに時間と労力を要していた。Further, since it is a transmission type, it is necessary to secure a large space for installing the apparatus when the apparatus is installed on the production line. In particular, in the online birefringence measurement device of the method of calculating the retardation from the transmitted light intensity by installing several pairs of polarizers and analyzers with parallel Nicols arrangement with their polarization directions shifted from each other, the polarizer / analyzer Since there are a plurality of sets, it takes more time and labor to adjust the polarization direction.
【０００４】また特に、試料の２次元方向におけるレタ
ーデーション等の分布を求めるため、測定ヘッドの走査
を要する場合には、試料の表裏に分かれた投光側ユニッ
トと受光側ユニットとを同期して駆動する必要があり、
このため同期駆動機構が複雑化しかつ大型化せざるを得
なかった。さらに、従来のオンライン複屈折測定装置
は、透過光量を検出するため、光透過性の被測定物しか
測定できないという欠点があった。Further, in particular, in order to obtain the distribution of retardation and the like in the two-dimensional direction of the sample, when scanning of the measuring head is required, the light emitting side unit and the light receiving side unit which are divided into the front and back sides of the sample are synchronized. Need to drive,
For this reason, the synchronous drive mechanism is inevitably complicated and large. Further, the conventional on-line birefringence measuring device has a drawback that it can measure only a light-transmitting measured object because it detects the amount of transmitted light.
【０００５】以上のように、従来装置では、装置の調整
法、構成の複雑化、設置スペースの問題、測定試料の制
限等を抱えていた。As described above, in the conventional apparatus, there are problems such as the method of adjusting the apparatus, the complicated structure, the problem of installation space, and the limitation of the measurement sample.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、上述の問題
を解消し、装置構成に優れかつ測定対象範囲の広い、複
屈折測定装置を提供しようとするものである。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and to provide a birefringence measuring device which has an excellent device configuration and a wide range of measurement targets.
【０００７】[0007]
【課題を解決するための手段】本発明は、試料に照射さ
れた測定光束が試料に入射し試料の裏面または境界面で
反射して、試料を往復通過して入射側面より出射する光
を検出して複屈折特性（レターデーション、主屈折率方
向等）を求めることを特徴とする複屈折測定方法であ
り、特に、試料が金属等の反射性面の上に高分子フイル
ムを被覆した複合材料であることを特徴とする。According to the present invention, a measuring light beam irradiated on a sample is incident on the sample, reflected on the back surface or boundary surface of the sample, and passes through the sample back and forth to detect light emitted from an incident side surface. Is a method for measuring birefringence (retardation, main refractive index direction, etc.), and in particular, a composite material in which a sample is coated with a polymer film on a reflective surface such as a metal. Is characterized in that.
【０００８】本発明は、また、透過性の試料に対して
は、試料の測定光束入射面と反対側の面に近接して反射
性面を持つシートを配置して測定を行うことを特徴とす
るものである。本発明はまた、試料への測定光束の投光
部と受光部とが試料面の同じ側に設けられていることを
特徴とする複屈折測定装置であり、さらに、偏光素子を
通過した光が試料に投射され、試料から投光部側に出て
くる光を前記偏光素子を再通過して受光検出するように
構成され、また投光部と受光部とが１個のユットに形成
されていること、投光部から試料に入る光束と試料から
受光部に入る光束とを分離する光路分割部が設けられて
いること、試料の測定光束投光部と反対側面に試料と近
接して光反射性面が設けられていること等の特徴的構成
を有し、（イ）偏光・検光素子が試料に対して相対的に
回転され、透過光強度の角度分布を求める方式、（ロ）
偏光方向の異なる３種類以上の偏光に対する透過率をそ
れぞれ測定する複数の測光手段が設けられ、演算により
レターデーション、主屈折率方向を導出する方式いずれ
にも適用可能である。The present invention is also characterized in that, for a transparent sample, a sheet having a reflective surface is arranged close to the surface of the sample on the side opposite to the surface on which the measurement light beam is incident, and the measurement is performed. To do. The present invention is also a birefringence measuring device, characterized in that the projecting portion and the light receiving portion of the measurement light beam to the sample are provided on the same side of the sample surface, and further, the light passing through the polarizing element is The light projected onto the sample and emerging from the sample to the light projecting side is re-passed through the polarizing element to detect light, and the light projecting part and the light receiving part are formed in one unit. That there is an optical path splitting unit that separates the light beam entering the sample from the light projecting unit and the light beam entering the light receiving unit from the sample. It has a characteristic structure such as the provision of a reflective surface, and (b) a method in which the polarization / analyzing element is rotated relative to the sample to obtain the angular distribution of transmitted light intensity, (b)
A plurality of photometric means for respectively measuring the transmittances of three or more types of polarized light having different polarization directions are provided, and the present invention can be applied to any method in which the retardation and the main refractive index direction are derived by calculation.
【０００９】本発明はまた、偏光方向の異なる３種以上
の偏光に対する透過光強度をそれぞれ検出する手段と、
これらの検出手段の検出出力を所定のプログラムに従っ
て、サンプリングする手段と、サンプリングしたデータ
を記憶する手段と、サンプリングデータからレターデー
ション値及び主屈折率方向を算出する手段と、反射光強
度の角度分布をオンライン表示する手段をも有してい
る。The present invention also includes means for detecting the transmitted light intensity for three or more types of polarized light having different polarization directions, respectively.
A means for sampling the detection output of these detecting means according to a predetermined program, a means for storing the sampled data, a means for calculating the retardation value and the main refractive index direction from the sampling data, and an angular distribution of the reflected light intensity. It also has a means for displaying online.
【００１０】[0010]
【作用】本発明の複屈折測定装置によれば、試料の測定
光入射側面に試料から出射する光を検出して複屈折の測
定を行うので、１枚の偏光板を偏光子と検光子とに共通
に用いることができ、両者が試料の表面と裏面に別個に
配置された場合のように偏光子と検光子との偏光方向を
調整する必要がなく、このための時間と手数とを要しな
い。According to the birefringence measuring apparatus of the present invention, the birefringence is measured by detecting the light emitted from the sample on the measurement light incident side surface of the sample. Therefore, one polarizing plate is used as a polarizer and an analyzer. It is not necessary to adjust the polarization directions of the polarizer and the analyzer as in the case where the both are separately arranged on the front surface and the back surface of the sample, and it takes time and labor for this. do not do.
【００１１】しかも偏光子として機能するときと検光子
として機能するときとは偏光方向が完全に同一であるの
で、測定精度をも向上させる。また本発明では、試料の
一方側の面に投光部、受光部をまとめることができるの
で、測光部ヘッドをコンパクト化でき、また試料面上を
ヘッドで走査する場合にも両者の同期機構を要せず、き
わめて好都合である。Moreover, since the polarization directions when functioning as a polarizer and when functioning as an analyzer are completely the same, the measurement accuracy is also improved. Further, in the present invention, since the light projecting unit and the light receiving unit can be integrated on the surface on one side of the sample, the photometric unit head can be made compact, and even when the head is scanned over the sample surface, a synchronization mechanism for both can be provided. No need, very convenient.
【００１２】さらに試料が金属板上に高分子フィルム等
を被覆した複合材料である場合にも、複屈折の測定が可
能である。また試料の裏面側に測定光の反射板を設けて
おくことにより、通常の単一の透明フィルムの場合も測
定でき、かつ上記の複合材料の測定には何ら支障を来た
さない。さらに測定光束は、試料フイルムを往復通過
（ダブルパス）するので、検出値が演算されるレターデ
ーション値は、従来の１回通過の場合の２倍の値が得ら
れる。Further, the birefringence can be measured even when the sample is a composite material in which a polymer film is coated on a metal plate. Further, by providing a reflection plate for the measurement light on the back surface side of the sample, it is possible to perform the measurement even in the case of an ordinary single transparent film, and there is no hindrance to the measurement of the above composite material. Furthermore, since the measurement light flux passes through the sample film in a reciprocating manner (double pass), the retardation value for which the detection value is calculated is twice as large as that in the case of the conventional single pass.
【００１３】[0013]
【実施例】図１は、本発明のレターデーション測定装置
の１実施例の概略構成図であり、（１）は被測定試料が
配置される試料部であり、試料は、小片が静止配置され
る場合、長尺で間欠駆動される場合、連続シートが走行
状態で配置される場合等がある。試料部（１）として
は、試料の裏面に光反射板を設けておくことにより、通
常の透過性試料、金属板上に透明試料が被覆された試料
のいずれの測定にも対応できる。即ち、 Ａ）通常の透過性試料の測定の場合には、静止試料を試
料台上で静止して１点の測定を行うか、試料台か測定ヘ
ッドかの一方または両者を移動して２次元分布の測定を
行う場合には、例えば図２（ａ）のように、保持台（１
ａ）の表面に鏡面層（１ｂ）を設けることにより（保持
台の表面に、直接鏡面を形成するか、銀蒸着等の表面処
理により鏡面とするか、反射鏡を張りつけるか等）、測
定試料の対象範囲を拡大できる。即ち、通常の透過性試
料（Ｓ１）の場合には、試料（Ｓ１）を透過した光が鏡
面で反射された後再度試料を透過して入射光束と平行に
投光部側に出射する。EXAMPLE FIG. 1 is a schematic configuration diagram of one example of a retardation measuring apparatus of the present invention. (1) is a sample portion on which a sample to be measured is arranged, and the sample is a small piece stationary arranged. In some cases, the sheet may be intermittently driven in a long length, or continuous sheets may be arranged in a running state. As the sample part (1), by providing a light reflecting plate on the back surface of the sample, it is possible to cope with both a normal transparent sample and a sample in which a transparent sample is coated on a metal plate. That is, A) In the case of a normal measurement of a permeable sample, a stationary sample is kept stationary on the sample stage to perform one-point measurement, or one or both of the sample stage and the measuring head are moved to perform two-dimensional measurement. When measuring the distribution, for example, as shown in FIG.
By providing a mirror surface layer (1b) on the surface of a) (whether a mirror surface is directly formed on the surface of the holding table, a mirror surface is formed by surface treatment such as silver vapor deposition, or a reflection mirror is attached), a measurement sample The target range of can be expanded. That is, in the case of a normal transmissive sample (S1), the light transmitted through the sample (S1) is reflected by the mirror surface and then passes through the sample again and is emitted to the light projecting portion side in parallel with the incident light beam.
【００１４】また幅広の走行シートの試料（Ｓ２）の測
定の場合には、試料全幅にわたる細長の反射鏡板（１
ｃ）を試料の裏面に試料幅方向に長く設けておくことに
より、２次元分布の測定が容易となる。試料走行方向を
Ｘとすると、これと直角なＹ方向に測定ヘッドを往復走
査すれば２次元分布を測定できるので、結局走行する広
幅試料の全幅、全長の２次元分布の測定を図の反射板
（１３）でカバーできる。Further, in the case of measuring a sample (S2) of a wide running sheet, an elongated reflector plate (1
By providing c) on the back surface of the sample long in the sample width direction, the measurement of the two-dimensional distribution becomes easy. When the sample running direction is X, the two-dimensional distribution can be measured by reciprocally scanning the measuring head in the Y direction perpendicular to the X direction, so that the two-dimensional distribution of the running wide sample and the total length of the running wide sample can be measured. It can be covered by (13).
【００１５】Ｂ）金属等反射性材（Ｍ）の面上に透明フ
ィルム（Ｆ）が被覆された複合材料の試料（Ｓ３）のの
場合には、図３のように、試料への入射光束は反射材の
表面で反射され再度透明フィルムを透過して出射するの
で、試料の裏面に反射板（１２、１３等）が存在して
も、測定の障害とはならない。（２）は光源部であり、
光源及び集光・コリメータ用のレンズ（またはミラー）
等の光学系を含み、測定に必要な個数の複数の平行光
束、またはこれらの光束を包含できる充分大きい断面の
平行光束を供給できる構成を有する。B) In the case of the composite material sample (S3) in which the transparent film (F) is coated on the surface of the reflective material (M) such as metal, as shown in FIG. Is reflected by the surface of the reflecting material and again passes through the transparent film to be emitted, so that even if there is a reflecting plate (12, 13, etc.) on the back surface of the sample, it does not hinder the measurement. (2) is a light source unit,
Lens (or mirror) for light source and condenser / collimator
And the like, and is capable of supplying a plurality of parallel light fluxes necessary for measurement, or a parallel light flux having a sufficiently large cross section that can include these light fluxes.
【００１６】（３）はフィルタ部であり、必要な特定波
長の光を選択して通過させることができ、選択波長の切
替え機構を有する。なおフィルタ部（３）の設置位置
は、光源（２）から試料部（Ｓ）への光路上、試料から
検出部への光路上の他の位置であっても良く、例えば検
出部（６）の直前位置でもよい。（４）は試料への投光
光束と試料からの受光光束とを分離するための光分割部
であり、例えば図のように測定光に対する吸収や異方性
の無い材質のハーフミラーを用いて、固定的に反射光と
透過光とに分割するように構成しても良い。Reference numeral (3) is a filter section, which can select and pass light of a required specific wavelength and has a switching mechanism of the selected wavelength. The installation position of the filter part (3) may be another position on the optical path from the light source (2) to the sample part (S) or on the optical path from the sample to the detection part, for example, the detection part (6). It may be the position just before. (4) is a light splitting unit for separating the light beam projected onto the sample and the light beam received from the sample. For example, as shown in the figure, a half mirror made of a material that does not absorb measurement light or has anisotropy is used. Alternatively, it may be fixedly divided into reflected light and transmitted light.
【００１７】（５）は偏光・検光部であり、図のよう
に、保持板（５０）の各光軸に対応する位置にそれぞれ
偏光子兼検光子となる複数の偏光板（５１），（５
２）、（５３）・・・（５６）が集合配置され、これら
の偏光板の偏光方向は適当な角度、例えば３０度ずつず
れている。偏光板（５１）の偏光方向を０度とすると、
例えば反時計方向に、偏光板（５２）は＋３０度、偏光
板（５３）は＋６０度ずらして配置されている。集合配
置としては、Ｘ方向またはＹ方向一列配置、ＸＹ２次元
配置、円周上、同心複数円周上、各円周上及び中心上配
置、ランダム配置その他種々の配置が可能であり、また
試料の特性や測定の目的に応じて、集合配置した複数の
測定チャンネルのうちの特定のもの、例えばＸ方向また
はＹ方向の１列あるいは、円の中心及び一番内部の円周
上のもの等を特に選択してこれらのデータから複屈折特
性を求めることもできる。Reference numeral (5) is a polarization / analysis unit, and as shown in the figure, a plurality of polarizing plates (51) serving as a polarizer and an analyzer are provided at positions corresponding to respective optical axes of the holding plate (50). (5
2), (53), ... (56) are collectively arranged, and the polarization directions of these polarizing plates are deviated by an appropriate angle, for example, 30 degrees. When the polarization direction of the polarizing plate (51) is 0 degree,
For example, the polarizing plate (52) and the polarizing plate (53) are arranged counterclockwise by +30 degrees and +60 degrees, respectively. As the collective arrangement, various arrangements such as a single row arrangement in the X or Y direction, an XY two-dimensional arrangement, a circumference, a plurality of concentric circumferences, a circumference and a center, a random arrangement, and the like are possible. Depending on the characteristics and the purpose of measurement, a particular one of a plurality of measurement channels arranged collectively, such as one row in the X direction or the Y direction, or one on the center of the circle and on the innermost circumference, is particularly used. It is also possible to select and obtain the birefringence characteristic from these data.
【００１８】偏光、検光部（５）は１個の偏光板によ
り、偏光子と検光子とを兼ねており、試料への投射光に
対しては偏光子として作用し、試料から出射する光の受
光部に対しては検光子として作用するが、あたかも２枚
の偏光板を平行ニコル状態に設置されたのと同等の作用
が得られる。（６）は、検光板を透過した光の強度を光
・電気変換する光検出部である。検出部（６）には、検
出素子（６１），（６２），（６３）・・・が保持板
（６０）上に、各光軸位置に対応して配置されている。
検出素子としては、光電変換素子、例えば太陽電池、
フォトダイオード、ＣＣＤ素子等が用いられるが、各光
軸位置ことに独立の検出素子としてもよいが、充分大き
なＣＣＤ２次元センサを用い、各光軸に対応する範囲ご
とにプログラムにより順次読み出すように構成してもよ
い。The polarizing / analyzing unit (5) functions as a polarizer and an analyzer by means of a single polarizing plate, and acts as a polarizer for the light projected on the sample and the light emitted from the sample. Although it acts as an analyzer for the light receiving part of, the same effect as if the two polarizing plates are placed in the parallel Nicol state can be obtained. (6) is a photodetector that converts the intensity of light transmitted through the analyzer plate into an electric signal. In the detection section (6), detection elements (61), (62), (63), ... Are arranged on the holding plate (60) corresponding to each optical axis position.
As the detection element, a photoelectric conversion element, for example, a solar cell,
Although a photodiode, CCD element, etc. are used, a detection element independent of each optical axis position may be used, but a sufficiently large CCD two-dimensional sensor is used, and it is configured to sequentially read by a program for each range corresponding to each optical axis. You may.
【００１９】以上の光源部、フィルタ部、偏光・検光
部、試料部及び検出部を含む複数光束測光部は、試料面
に対して同一側に存在するので、１個の測定ヘッドユニ
ットとして集約することができ、測光部が非常にコンパ
クト化できるとともに、２次元分布の測定等に際し、ヘ
ッドの走査機構をも簡単な構成で実現でき、複屈折特性
の２次元分布の測定等に極めて有効である。Since the plural light flux photometry units including the light source unit, the filter unit, the polarization / analysis unit, the sample unit and the detection unit are present on the same side with respect to the sample surface, they are integrated as one measuring head unit. In addition, the photometry unit can be made very compact, and the scanning mechanism of the head can be realized with a simple configuration when measuring the two-dimensional distribution, which is extremely effective for measuring the two-dimensional distribution of birefringence characteristics. is there.
【００２０】以下の部分はデータ処理部であり、主体部
分を測光部分とは別に現場環境から離れた場所に設置す
ることもでき、この場合には測光部との間の測定デー
タ、制御指令等の伝送は、有線または無線の電気信号の
ほか、光ファイバーによる光通信等の手段を用いること
もできる。（７）は、検出部（６）の各検出出力の増
幅、Ａ／Ｄ変換等を行い、これをデータ処理部に導入す
る入力信号処理部である。これらの要素及び送信部は、
測定装置全体のシステム構成に応じて適宜検出端と同じ
場所に設けてもよい。The following part is a data processing part, and the main part can be installed in a place apart from the site environment separately from the photometry part. In this case, measurement data with the photometry part, control commands, etc. In addition to wired or wireless electric signals, optical transmission using optical fibers can also be used for the transmission. Reference numeral (7) is an input signal processing unit that performs amplification, A / D conversion, etc. of each detection output of the detection unit (6) and introduces it into the data processing unit. These elements and the transmitter are
It may be provided at the same place as the detection end, depending on the system configuration of the entire measuring apparatus.
【００２１】（Ｂ）はデータ処理・制御部のデータバス
ライン、（８）はＣＰＵである。（９）はＲＯＭ、ＥＰ
−ＲＯＭ等の固定または半固定メモリで構成され、各種
の制御・演算プログラムを内蔵するプログラム格納部で
あり、（９１）は装置全体の動作を制御する制御プログ
ラムの格納領域であり、全体的な制御を行うプログラム
のほか、保守作業用のプログラム等を備えておいてもよ
い。(B) is a data bus line of the data processing / control section, and (8) is a CPU. (9) is ROM, EP
-A program storage unit which is composed of a fixed or semi-fixed memory such as a ROM and which stores various control / arithmetic programs. (91) is a storage area of a control program for controlling the operation of the entire apparatus, and In addition to the control program, a maintenance work program or the like may be provided.
【００２２】（９２）は検出出力からのデータのサンプ
リングを指示するサンプリングプログラムの格納領域、
（９３）は後述のメモリ（１０）中に格納された測定デ
ータから上記のような、各種の所要の演算を行うための
演算プログラム格納領域、（９４）は処理されたデータ
をＣＲＴ（１１），プリンタ（１２）等に出力するため
の出力プログラムの格納領域である。(92) is a storage area of a sampling program for instructing sampling of data from the detected output,
(93) is an operation program storage area for performing various required operations as described above from measurement data stored in a memory (10) described later, and (94) is the CRT (11) for processing the processed data. , A storage area of an output program for outputting to a printer (12) or the like.
【００２３】上記サンプリングプログラムは、生産ライ
ンから出てくる連続シート状の試料の所定距離移動また
は所定時間毎にデータをサンプリングする方式等を適宜
選択でき、選択されたサンプリングプログラムに従っ
て、各検出素子の検出出力が入力処理部（７）でサンプ
リングされ、受光部素子の番号（従って偏光方向）の情
報とともにメモリ（１０）に格納される。The above sampling program can appropriately select a method of sampling a continuous sheet-shaped sample coming out of the production line for a predetermined distance or sampling data at every predetermined time, and the like. The detection output is sampled by the input processing unit (7) and stored in the memory (10) together with the information on the number of the light receiving element (hence the polarization direction).
【００２４】上記演算プログラムは、メモリ（１０）に
格納されている基礎データ及び測定データからレターデ
ーション算出演算を含む必要な各種の演算を行うもので
ある。上記出力プログラムは、測定結果のＣＲＴ表示、
作表印字出力、その他の出力制御全般を処理するが、検
出部出力がサンプリングされ、メモリ（１０）に格納さ
れる毎に、偏光透過強度の角度分布図を表示し、被測定
シートの流れ方向の複屈折特性の変化をオンラインで連
続表示させることもできる。The above-mentioned calculation program executes various necessary calculations including the retardation calculation calculation from the basic data and the measurement data stored in the memory (10). The output program is a CRT display of measurement results,
The table print output and other output control are processed, but the angle distribution chart of the polarization transmission intensity is displayed every time the detector output is sampled and stored in the memory (10), and the flow direction of the measured sheet is displayed. The change in the birefringence characteristic of can be continuously displayed online.
【００２５】メモリ（１０）は、例えばＲＡＭで形成さ
れた記憶内容可変のメモリであり、入力処理部（７）か
ら導入された上記の測定データを一時記憶するための入
力バッファメモリ（１０１）、処理済みデータ等の記憶
用の演算処理データ格納領域（１０２），データ処理に
必要な基本データ、数式等を記憶した基礎データ格納領
域（１０３），ＣＲＴ表示、印字出力のためのデータを
記憶する出力バッファメモリ（１０４）等の領域を有す
る。The memory (10) is a memory having variable storage contents, which is formed of, for example, a RAM, and an input buffer memory (101) for temporarily storing the measurement data introduced from the input processing unit (7), An arithmetic processing data storage area (102) for storing processed data, a basic data necessary for data processing, a basic data storage area (103) storing mathematical expressions, a CRT display, and data for print output are stored. It has an area such as an output buffer memory (104).
【００２６】（１１）は表示装置、例えばＣＲＴ、液晶
表示装置等で構成され、モニター用、測定結果の総合的
表示用、特定の測定結果のオンライン表示用等の目的に
数個の表示面を設けておいてもよい。（１２）はプリン
タ、（１３）はキーボード入力装置である。(11) is composed of a display device, such as a CRT, a liquid crystal display device, etc., and has several display surfaces for the purposes of monitoring, comprehensive display of measurement results, online display of specific measurement results, etc. It may be provided. (12) is a printer, and (13) is a keyboard input device.
【００２７】本発明装置の動作の概略を図１に基づいて
説明すると、光源（２）からの平行光束は光はフィルタ
（３）を経て単色光とされ、ハーフミラー（４）により
その一部（約半分）が反射されて偏光・検光部（５）の
各偏光素子を通ってそれぞれの偏光方向の偏光光束とし
て試料部（１）に入り、対応する試料位置の透明フィル
ムを透過し、裏面の反射面（１２，１３，またはＭ）で
反射して再度透明フィルムを通って試料から出射し、再
度偏光・検光部の同じ偏光素子を通過してその一部（約
半分）がハーフミラー（４）を透過して、検出部（６）
の対応する検出素子により受光検出される。The outline of the operation of the device of the present invention will be described with reference to FIG. 1. The parallel light flux from the light source (2) is converted into monochromatic light through the filter (3), and a part thereof is converted by the half mirror (4). (Approximately half) is reflected, passes through each polarization element of the polarization / analysis unit (5) and enters the sample unit (1) as a polarized light beam of each polarization direction, and passes through the transparent film at the corresponding sample position, The light is reflected by the reflection surface (12, 13, or M) on the back surface, passes through the transparent film again, and exits from the sample. After passing through the mirror (4), the detection unit (6)
The received light is detected by the corresponding detection element of.
【００２８】各検出素子の検出出力は、サンプリングプ
ログラム（９２）に従って読み出され、Ａ／Ｄ変換され
て、入力バッファメモリ（１０１）に格納され、演算プ
ログラム（９３）により主屈折率方向およびレターデー
ションが算出される。このレターデーション値は、試料
フィルムを測定光束が往復通過しているので、従来の測
定光束を試料の一方の面から他方の面に透過させる方式
に比して２倍の値となる。The detection output of each detection element is read out according to the sampling program (92), A / D converted, and stored in the input buffer memory (101). The foundation is calculated. This retardation value is twice as large as that in the conventional method in which the measurement light flux is transmitted from one surface of the sample to the other surface since the measurement light flux passes back and forth through the sample film.
【００２９】得られたレターデーション値及び主屈折率
方向の情報は、測定試料番号、測定位置等のデータとと
もに演算処理データのメモリ（１０２）に格納される。
これらの演算結果は、出力プログラム（９４）により、
随時表示装置（１１）に表示され、またプリンタにより
作表印字され、一方特定の種類の測定結果が測定と同時
にオンライン表示される。The obtained retardation value and information on the main refractive index direction are stored in the memory (102) of the arithmetic processing data together with the data such as the measurement sample number and the measurement position.
These calculation results are output by the output program (94).
It is displayed on the display device (11) at any time, and is also tabulated and printed by the printer, while the measurement result of a specific type is displayed online simultaneously with the measurement.
【００３０】本発明によれば、上記の測定を透明フィル
ム、金属等の反射性面上に高分子フィルム等を被覆した
複合フィルムのいずれに対しても行うことができるとと
もに、装置構成の簡易化、調整作業等の効率化その他種
々の効果を得ることができる。According to the present invention, the above-mentioned measurement can be performed on either a transparent film or a composite film having a reflective surface such as a metal coated with a polymer film or the like, and simplification of the apparatus structure. It is possible to obtain various effects such as the efficiency of adjustment work and the like.
【００３１】[0031]
１）偏光子、検光子を１個の偏光板で共用できるため、
調整時の偏光方向のズレが完全に無くなり、測定精度の
向上が図る。 ２）金属面等に貼り合わせたフィルムのレターデーショ
ン及び主屈折率測定が可能である。 ３）装置本体のコンパクト化が可能なため、設置スペー
スの確保が容易になる。1) Since one polarizer can share the polarizer and analyzer,
The deviation of the polarization direction at the time of adjustment is completely eliminated, and the measurement accuracy is improved. 2) It is possible to measure the retardation and the main refractive index of a film attached to a metal surface or the like. 3) Since the apparatus body can be made compact, it is easy to secure an installation space.
【図１】図１は、本発明の１実施例の複屈折測定装置の
概略構成図である。FIG. 1 is a schematic configuration diagram of a birefringence measuring apparatus according to one embodiment of the present invention.
【図２】図２は、本発明装置の試料部の構成例図であ
る。FIG. 2 is a diagram showing a configuration example of a sample unit of the device of the present invention.
【図３】図３は、本発明装置に好適な試料例の説明図で
ある。FIG. 3 is an explanatory diagram of a sample example suitable for the apparatus of the present invention.
１ 試料部 １ａ 試料台 １ｂ ミラー（反射層） １ｃ ミラー（反射板） ２ 光源部 ３ フィルタ ４ 光分割部 ５ 偏光・検光部 ６ 検出部 ７ 入力処理部 ８ ＣＰＵ ９ プログラム格納部 １０ データ格納部 １１ 表示装置（ＣＲＴ） １２ プリンタ １３ キーボード ５０，６０ 保持板 ５１〜５６ 偏光子兼検光子 ６１〜６６ 検出素子 ９１ 制御プログラム格納部 ９２ サンプリングプログラム格納部 ９３ 演算プログラム格納部 ９４ 出力プログラム格納部 １０１ 入力バッファメモリ １０２ 演算処理データ格納領域 １０３ 基礎データ格納領域 １０４ 出力バッファメモリ Ｂ データバスライン Ｆ フィルム Ｍ 金属板 Ｓ，Ｓ１，Ｓ２，Ｓ３ 測定試料 1 sample section 1a sample stage 1b mirror (reflection layer) 1c mirror (reflection plate) 2 light source section 3 filter 4 light splitting section 5 polarization / light detecting section 6 detecting section 7 input processing section 8 CPU 9 program storage section 10 data storage section 11 Display Device (CRT) 12 Printer 13 Keyboard 50, 60 Holding Plate 51-56 Polarizer / Analyzer 61-66 Detection Element 91 Control Program Storage 92 Sampling Program Storage 93 Calculation Program Storage 94 Output Program Storage 101 Input Buffer memory 102 Calculation processing data storage area 103 Basic data storage area 104 Output buffer memory B Data bus line F Film M Metal plate S, S1, S2, S3 Measurement sample
Claims (10)
て入射側の面より出射する光を検出して複屈折特性を求
めることを特徴とする複屈折測定方法。1. A birefringence measuring method, characterized in that a measurement light beam irradiated on a sample travels back and forth through the sample to detect light emitted from a surface on an incident side to obtain a birefringence characteristic.
ルムを被覆した複合材料であることを特徴とする請求項
１記載の複屈折測定方法。2. The birefringence measuring method according to claim 1, wherein the sample is a composite material in which a polymer film is coated on a reflective surface such as a metal.
して光反射手段を配置して測定を行うことを特徴とする
請求項１記載の複屈折測定方法。3. The birefringence measuring method according to claim 1, wherein the light reflecting means is disposed in proximity to the surface of the sample opposite to the surface on which the measurement light beam is incident, and the measurement is performed.
料面の同じ側に設けられていることを特徴とする複屈折
測定装置。4. A birefringence measuring apparatus characterized in that a light projecting portion and a light receiving portion for measuring a luminous flux on the sample are provided on the same side of the sample surface.
料面の同じ側に設けられ、偏光素子を通過した光が試料
に投射され、試料から投光部側に出てくる光を前記偏光
素子を再通過して受光検出するように構成したことを特
徴とする請求項４記載の複屈折測定装置。5. A light projecting portion and a light receiving portion for measuring a luminous flux to the sample are provided on the same side of the sample surface, and light passing through the polarizing element is projected on the sample and emerges from the sample to the light projecting portion side. 5. The birefringence measuring device according to claim 4, wherein the birefringence measuring device is configured so that light passes through the polarizing element again and is received and detected.
トとして構成されていることを特徴とする請求項４また
は５記載の複屈折測定装置。6. The birefringence measuring apparatus according to claim 4, wherein the light projecting section and the light receiving section for the sample are configured as one unit.
部に入る光束とを分離する光路分割部が設けられている
ことを特徴とする請求項４，５または６記載の複屈折測
定装置。7. The birefringence measurement according to claim 4, further comprising an optical path splitting unit for separating a light beam entering the sample from the light projecting unit and a light beam entering the light receiving unit from the sample. apparatus.
近接して光反射性面が設けられていることを特徴とする
請求項４、５，６または７記載の複屈折測定装置。8. The birefringence measuring apparatus according to claim 4, wherein a light-reflecting surface is provided on a side surface of the sample opposite to the measurement light beam projecting portion in close proximity to the sample. .
れ、透過光強度の角度分布を求める手段が備えられてい
ることを特徴とする請求項４、５、６，７または８記載
の複屈折測定装置。9. The polarization element is rotated relative to the sample, and means for determining an angular distribution of transmitted light intensity is provided. Birefringence measuring device.
する透過率をそれぞれ測定する複数の測光手段が設けら
れていることを特徴とする請求項４，５、６，７または
８記載の複屈折測定装置。10. Birefringence according to claim 4, wherein a plurality of photometric means for respectively measuring the transmittances of three or more kinds of polarized light having different polarization directions are provided. measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1296193A JPH06229911A (en) | 1993-01-28 | 1993-01-28 | Method and apparatus for measuring double refraction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1296193A JPH06229911A (en) | 1993-01-28 | 1993-01-28 | Method and apparatus for measuring double refraction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06229911A true JPH06229911A (en) | 1994-08-19 |
Family
ID=11819858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1296193A Pending JPH06229911A (en) | 1993-01-28 | 1993-01-28 | Method and apparatus for measuring double refraction |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06229911A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085739A (en) * | 2005-09-20 | 2007-04-05 | Yokogawa Electric Corp | Orientation meter |
| JP2011133428A (en) * | 2009-12-25 | 2011-07-07 | Yokogawa Electric Corp | Retardation measuring device |
-
1993
- 1993-01-28 JP JP1296193A patent/JPH06229911A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085739A (en) * | 2005-09-20 | 2007-04-05 | Yokogawa Electric Corp | Orientation meter |
| JP4600763B2 (en) * | 2005-09-20 | 2010-12-15 | 横河電機株式会社 | Orientation meter |
| JP2011133428A (en) * | 2009-12-25 | 2011-07-07 | Yokogawa Electric Corp | Retardation measuring device |
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