JPH06210857A - Manufacture of ink jet recording head - Google Patents
Manufacture of ink jet recording headInfo
- Publication number
- JPH06210857A JPH06210857A JP861393A JP861393A JPH06210857A JP H06210857 A JPH06210857 A JP H06210857A JP 861393 A JP861393 A JP 861393A JP 861393 A JP861393 A JP 861393A JP H06210857 A JPH06210857 A JP H06210857A
- Authority
- JP
- Japan
- Prior art keywords
- fluorine
- fine particle
- nozzle plate
- coupling agent
- oxide fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、インクジェット記録装
置に用いるインクジェット記録ヘッドに関わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head used in an ink jet recording apparatus.
【０００２】[0002]
【従来の技術】インクジェット記録ヘッドにはガラス、
金属、樹脂等の材質が用いられている。しかしインクジ
ェット記録ヘッドにおいて、ノズル表面の撥水撥油性が
不十分だとインクの液滴が付着するため、吐出するイン
ク滴の直進性が損なわれ、印字乱れ等のトラブルによっ
て記録不能となることがあった。2. Description of the Related Art Inkjet recording heads are made of glass,
Materials such as metal and resin are used. However, in the ink jet recording head, if the water and oil repellency of the nozzle surface is insufficient, ink droplets will adhere, impairing the straightness of the ejected ink droplets and making recording impossible due to problems such as print disturbance. there were.
【０００３】そこでインクが吐出するノズルプレート表
面を、インクの付着をなくすために撥水撥油化処理する
ことが示され、静電粉体塗装（特開昭５７−１５７７６
５）、共析メッキ、プラズマ重合（特開昭６０−１８３
１６１）等によりノズル表面に含フッ素樹脂粒子を付着
させて撥水撥油化するという方法が提供されている。ま
た、含フッ素シリコンカップリング処理する方法（特開
昭５６−８９５６９）や、溶媒可溶性含フッ素樹脂を塗
布して薄膜を形成する方法（特開平３−１３２７３）も
提供されている。Therefore, it has been shown that the surface of a nozzle plate from which ink is ejected is treated to be water and oil repellent in order to eliminate the adhesion of ink.
5), eutectoid plating, plasma polymerization (JP-A-60-183)
161) and the like, there is provided a method in which fluorine-containing resin particles are attached to the nozzle surface to make it water and oil repellent. Further, a method of fluorine-containing silicon coupling treatment (JP-A-56-89569) and a method of applying a solvent-soluble fluorine-containing resin to form a thin film (JP-A-3-13273) are also provided.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、印字品
質の高精細化、高コントラスト化、多色化等の要求から
インクの改良がなされ、インクの長期安定性を確保する
ための添加剤も必要となった。前述の従来技術による撥
水撥油化処理では初期特性が不十分なうえ、インク中に
長期浸漬しておくと、処理層の剥離やインクの吸着が発
生し、特性の著しい劣化がおこった。However, the ink has been improved in response to the demands for high definition of printing quality, high contrast, and multicolor, and an additive for ensuring long-term stability of the ink is also required. became. The water-repellent and oil-repellent treatment according to the above-mentioned conventional technique has insufficient initial characteristics, and when it is immersed in ink for a long time, the treated layer is peeled off or ink is adsorbed, resulting in remarkable deterioration of characteristics.
【０００５】本発明は前記課題を解決するためのもので
あり、インクジェット記録ヘッドのノズルプレート表面
に優れた特性の撥水撥油処理を行い、しかもその効果の
持続性に優れ、長期間にわたって印字品質の高いインク
ジェット記録ヘッドの製造方法の提供を目的としてい
る。The present invention has been made to solve the above-mentioned problems, and the water-repellent and oil-repellent treatment with excellent characteristics is performed on the surface of the nozzle plate of the ink jet recording head, and further, the effect is excellent in durability and printing is performed for a long period of time. It is an object of the present invention to provide a method for manufacturing a high quality inkjet recording head.
【０００６】[0006]
【課題を解決するための手段】上記目的は、インクが吐
出するノズルプレート表面に酸化物微粒子層が形成さ
れ、更にその上に含フッ素シリコンカップリング層が形
成されているインクジェット記録ヘッドの製造におい
て、酸化物微粒子層上に含フッ素シリコンカップリング
剤溶液を塗布してから溶媒の沸点以上まで加熱し、更に
ノズルプレートを溶媒ですすぎ、未反応の含フッ素シリ
コンカップリング剤を除去することにより達成される。The above-mentioned object is to manufacture an ink jet recording head in which an oxide fine particle layer is formed on the surface of a nozzle plate from which ink is ejected, and a fluorine-containing silicon coupling layer is further formed thereon. Achieved by applying the fluorine-containing silicon coupling agent solution on the oxide fine particle layer, then heating it up to the boiling point of the solvent or higher, rinsing the nozzle plate with the solvent, and removing the unreacted fluorine-containing silicon coupling agent. To be done.
【０００７】[0007]
【作用】高浸透性、高保存安定性を備えたインクに対し
て、ノズルプレート表面に含フッ素樹脂粒子を付着させ
る方法や、含フッ素樹脂薄膜を形成する方法は、含フッ
素樹脂の表面エネルギーが著しく小さいため密着力が不
十分であり、界面にインクが浸透し剥離が発生する。ま
た、含フッ素シリコンカップリング処理する方法は、基
材の反応基とは化学結合で強固に結合しているものの、
反応基密度が小さいため結合密度が小さく、含フッ素シ
リコンカップリング処理されていない部分にインクが吸
着し、劣化してしまう。初期の高撥水撥油性は、化学結
合していない付着しているだけの含フッ素シリコンカッ
プリング剤でもたらされているもので、耐久性はない。[Function] The surface energy of the fluorine-containing resin is reduced by the method of attaching the fluorine-containing resin particles to the nozzle plate surface or the method of forming the fluorine-containing resin thin film with respect to the ink having high permeability and high storage stability. Since it is extremely small, the adhesion is insufficient and the ink penetrates into the interface to cause peeling. In addition, in the method of fluorine-containing silicon coupling treatment, although it is strongly bonded to the reactive group of the base material by a chemical bond,
Since the reactive group density is low, the bond density is low, and the ink is adsorbed to the portion that has not been subjected to the fluorine-containing silicon coupling treatment and deteriorates. The initial high water / oil repellency is brought about by the fluorine-containing silicon coupling agent which is not chemically bonded and is only attached, and is not durable.
【０００８】ノズルプレート表面に酸化物微粒子分散ゾ
ルを塗布し加熱すると、酸化物微粒子層が強固に定着す
る。含フッ素樹脂粒子と異なり、酸化物微粒子の表面エ
ネルギーは著しく大きいため、特に金属や無機材料との
密着力に優れている。シリカ微粒子はインクに侵食さ
れ、溶出してしまうため、耐インク性の強いアルミナや
ジルコニア微粒子が、汎用的で好ましい。酸化物微粒子
層の表面は活性で、多くの水酸基を有している。そのた
め含フッ素シリコンカップリング剤の化学結合を、高密
度で行なうことができる。溶媒の沸点以上まで加熱して
反応を完結させた後、未反応で付着しているだけの含フ
ッ素シリコンカップリング剤を溶媒ですすぐことで除去
すると、撥水撥油性はより顕著になる。これはシリコン
カップリング剤の結合基が親水、親油性を持っており、
その撥水撥油性の劣化要因を排除したからである。When the oxide particle dispersed sol is applied to the surface of the nozzle plate and heated, the oxide particle layer is firmly fixed. Unlike the fluorine-containing resin particles, the oxide fine particles have a remarkably large surface energy, and thus are particularly excellent in adhesiveness with metals and inorganic materials. Since the silica fine particles are eroded by the ink and are eluted, the alumina and zirconia fine particles having high ink resistance are general-purpose and preferable. The surface of the oxide fine particle layer is active and has many hydroxyl groups. Therefore, the fluorine-containing silicon coupling agent can be chemically bonded at a high density. The water and oil repellency becomes more remarkable when the reaction is completed by heating to the boiling point of the solvent or higher and then the unreacted and only fluorine-containing silicon coupling agent is rinsed with the solvent. This is because the bonding group of the silicone coupling agent is hydrophilic and lipophilic,
This is because the cause of deterioration of the water / oil repellency is eliminated.
【０００９】その結果、ノズルプレート基板上から自由
に運動できるフルオロオルキル鎖が高密度で多数配置さ
れた分子集合体層構造を取る。染料や界面活性剤等の分
子の吸着が起こりにくく、剥離も発生しないため、初期
特性がそのまま持続される。As a result, a molecular assembly layer structure is formed in which a large number of fluoroalkyl chains that can move freely from the nozzle plate substrate are arranged in high density. Adsorption of molecules such as dyes and surfactants does not occur easily, and peeling does not occur, so that the initial characteristics are maintained.
【００１０】[0010]
（実施例１）図１はインクジェット記録ヘッドの一例を
模式的に示した断面図である。１は圧力室であり、ＰＺ
Ｔ素子または発熱体等によってインク吐出のための圧力
を得る部分である。３はインク吐出ノズルである。４は
第一基板でありインク流路用のパターン溝が形成されて
いる。５は第二基板であり、両者の張り合わせによって
インク流路は形成される。２がノズルプレートである。
ノズルプレートには孔径数十μｍのノズルが、多数配置
されている。(Embodiment 1) FIG. 1 is a sectional view schematically showing an example of an ink jet recording head. 1 is a pressure chamber, PZ
This is a portion for obtaining a pressure for ejecting ink by the T element or the heating element. Reference numeral 3 is an ink ejection nozzle. Reference numeral 4 is a first substrate on which a pattern groove for an ink flow path is formed. Reference numeral 5 is a second substrate, and an ink flow path is formed by bonding the two. 2 is a nozzle plate.
A large number of nozzles having a hole diameter of several tens of μm are arranged on the nozzle plate.
【００１１】ノズルプレート表面に塗布する酸化物微粒
子が分散したゾルには、アルミナ微粒子がエタノールを
主成分とする溶媒に分散したアルミナゾルを用いた。ア
ルミナ微粒子の大きさや濃度は、適当な値を選択できる
が、ここではアルミナの平均粒径０．０５μｍ、濃度１
ｗｔ％のアルミナゾルを用いた。アルミナ微粒子は、ア
ルミニウムアルコキシドを加水分解することによって得
ることができる。またアルミナゾル５２０（日産化学社
製）のように、球形でない微粉末も用いることができ
る。ニッケル製のノズルプレートの裏面、またはノズル
内部をマスクテープやフォトレジストで保護し、アルミ
ナゾルをノズルプレートの表面に、ディッピングで塗布
した。アルミナ微粒子層を、約０．２μｍの厚みで形成
できた。保護層を除去した後、３００℃で１時間加熱処
理した。水との接触角は約１０度と高い親水性を示し、
水酸基を高密度に有していることがわかる。An alumina sol in which alumina fine particles were dispersed in a solvent containing ethanol as a main component was used as the sol in which oxide fine particles were dispersed on the surface of the nozzle plate. An appropriate value can be selected for the size and concentration of the alumina fine particles, but here, the average particle diameter of the alumina is 0.05 μm and the concentration is 1
A wt% alumina sol was used. Alumina fine particles can be obtained by hydrolyzing an aluminum alkoxide. Further, a fine powder that is not spherical, such as Alumina sol 520 (manufactured by Nissan Kagaku Co., Ltd.) can be used. The back surface of the nozzle plate made of nickel or the inside of the nozzle was protected with a mask tape or photoresist, and alumina sol was applied to the surface of the nozzle plate by dipping. The alumina fine particle layer could be formed with a thickness of about 0.2 μm. After removing the protective layer, heat treatment was performed at 300 ° C. for 1 hour. The contact angle with water is about 10 degrees, showing high hydrophilicity.
It can be seen that it has a high density of hydroxyl groups.
【００１２】次にフロリナートＦＣ−４０（住友スリー
エム社製）に、含フッ素シリコンカップリング剤である
1H,1H,2H,2H-PERFLUORODECYLTRICHLOROSILANEを１０％
溶解させ、ノズルプレート表面に塗布した。溶媒の沸点
は１５５℃である。１８０℃で１時間加熱処理したノズ
ルプレートを、フロリナートＦＣ−４０で三槽に分けて
すすいだ。水との接触角は溶媒ですすぐことで、１０５
度から１３０度に変化した。図２にノズルプレートの表
面処理の模式的な断面図を示す。最表面に自由に運動で
きるフルオロオルキル鎖２４が、高密度で多数配置され
た分子集合体層構造を取っていると予想される。Next, Fluorinert FC-40 (manufactured by Sumitomo 3M Limited) was used as a fluorine-containing silicon coupling agent.
1H, 1H, 2H, 2H-PERFLUORODECYLTRICHLOROSILANE 10%
It was dissolved and applied on the surface of the nozzle plate. The boiling point of the solvent is 155 ° C. The nozzle plate that had been heat-treated at 180 ° C. for 1 hour was rinsed with Fluorinert FC-40 in three tanks. Contact angle with water is 105 by rinsing with solvent
It changed from degrees to 130 degrees. FIG. 2 shows a schematic sectional view of the surface treatment of the nozzle plate. It is expected that the freely movable fluoroalkyl chains 24 have a molecular assembly layer structure in which a large number of them are densely arranged.
【００１３】浸透性の高い染料インクに浸漬し、７０℃
で５日間保持した後もインクとの接触角は８０度以上あ
り、十分な撥水撥油効果が得られていることがわかっ
た。このように作製したノズルプレートを用いて製造し
たインクジェット記録ヘッドを、記録装置に装着して印
字試験を行なったところ、印字乱れ等のトラブルは発生
せず、高精細でコントラストの高い印字が可能となっ
た。インクを注入しながらシリコンゴムによる擦り試験
をしたところ、１００００回擦った後にもインクとの接
触角は８０度以上あり、撥水撥油効果がほとんど劣化せ
ず長期間にわたって印字品質の高いインクジェット記録
ヘッドを達成できた。Immerse in highly penetrative dye ink and leave at 70 ° C
It was found that the contact angle with ink was 80 degrees or more even after holding for 5 days, and a sufficient water / oil repellency effect was obtained. When an ink jet recording head manufactured using the nozzle plate manufactured in this way was mounted on a recording device and a printing test was performed, troubles such as print disturbance did not occur, and high-definition and high-contrast printing was possible. became. A rubbing test using silicone rubber while injecting ink showed that the contact angle with the ink was 80 degrees or more even after rubbing 10,000 times, and the water and oil repellency effect was hardly deteriorated, and inkjet recording with high print quality for a long time I was able to achieve the head.
【００１４】（実施例２）ステンレス（SUS316-L）製の
ノズルプレート表面に、ジルコニア微粒子が分散したゾ
ルを塗布した。ジルコニア微粒子の大きさや濃度は、適
当な値を選択できるが、ここでは平均粒径０．０２μｍ
の球形のジルコニア粒子をアルコキシドを加水分解する
ことによって作製し、メタノール中に濃度０．５ｗｔ％
で分散させた。ノズルプレートの裏面、またはノズル内
部をマスクテープやフォトレジストで保護し、ジルコニ
アゾルをノズルプレートの表面に、スピンコートで塗布
した。ジルコニア微粒子層を、約０．１μｍの厚みで形
成できた。保護層を除去した後、２００℃で１時間加熱
処理した。水との接触角は約１０度と高い親水性を示
し、水酸基を高密度に有していることがわかる。Example 2 A sol in which fine zirconia particles were dispersed was applied to the surface of a nozzle plate made of stainless steel (SUS316-L). An appropriate value can be selected for the size and concentration of the zirconia fine particles, but here, the average particle diameter is 0.02 μm.
Of spherical zirconia particles were prepared by hydrolyzing alkoxide, and the concentration was 0.5 wt% in methanol.
Dispersed. The back surface of the nozzle plate or the inside of the nozzle was protected with a mask tape or a photoresist, and the zirconia sol was applied to the surface of the nozzle plate by spin coating. The zirconia fine particle layer could be formed with a thickness of about 0.1 μm. After removing the protective layer, heat treatment was performed at 200 ° C. for 1 hour. It can be seen that the contact angle with water is as high as about 10 degrees and shows a high hydrophilicity and has a high density of hydroxyl groups.
【００１５】パーフルオロオクタンに含フッ素シリコン
カップリング剤であるＫＰ−８０１Ｍ（信越化学社製）
を１０％溶解させ、ノズルプレート表面に塗布し、１２
０℃で１時間加熱処理した。溶媒の沸点は１００℃であ
る。加熱処理したノズルプレートを、パーフルオロオク
タンで充分にすすいだ。水との接触角は溶媒ですすぐこ
とで、１１０度から１３０度に変化した。KP-801M (manufactured by Shin-Etsu Chemical Co., Ltd.), which is a fluorine-containing silicon coupling agent for perfluorooctane
10% is dissolved and applied to the surface of the nozzle plate.
It heat-processed at 0 degreeC for 1 hour. The boiling point of the solvent is 100 ° C. The heat treated nozzle plate was thoroughly rinsed with perfluorooctane. The contact angle with water changed from 110 to 130 by rinsing with solvent.
【００１６】フッ素系界面活性剤及び安定化剤を含んだ
顔料インクに浸漬し、７０℃で５日間保持した後もイン
クとの接触角は６０度以上あり、十分な撥水撥油効果が
得られていることがわかった。このように作製したノズ
ルプレートを用いて製造したインクジェット記録ヘッド
を、記録装置に装着して印字試験を行なったところ、印
字乱れ等のトラブルは発生せず、高コントラストで耐候
性の高い印字が可能となった。インクを注入しながらシ
リコンゴムによる擦り試験をしたところ、１００００回
擦った後にもインクとの接触角は６０度以上あり、撥水
撥油効果がほとんど劣化せず長期間にわたって印字品質
の高いインクジェット記録ヘッドを達成できた。Even after being immersed in a pigment ink containing a fluorine-containing surfactant and a stabilizer and kept at 70 ° C. for 5 days, the contact angle with the ink was 60 ° or more, and a sufficient water / oil repellency effect was obtained. I found out that When an ink jet recording head manufactured using the nozzle plate manufactured in this way was attached to a recording device and a printing test was performed, problems such as print disturbance did not occur, and high contrast and weatherproof printing was possible. Became. A rubbing test using silicone rubber while injecting ink showed that the contact angle with the ink was 60 degrees or more even after rubbing 10,000 times, and the water and oil repellency effect was hardly deteriorated, and inkjet recording with high print quality for a long time I was able to achieve the head.
【００１７】（実施例３）ステンレス（SUS316-L）製の
ノズルプレート表面に、ジルコニア微粒子が分散したゾ
ルを塗布した。ジルコニア微粒子の大きさや濃度は、適
当な値を選択できるが、ここでは平均粒径０．０６μｍ
のジルコニアゾルNZS-30A（日産化学社製）を用い、メ
タノール中に濃度２ｗｔ％で分散させた。ノズルプレー
トの裏面、またはノズル内部をマスクテープやフォトレ
ジストで保護し、ジルコニアゾルをノズルプレートの表
面に、スピンコートで塗布した。ジルコニア微粒子層
を、約０．３μｍの厚みで形成できた。保護層を除去し
た後、２００℃で１時間加熱処理した。水との接触角は
約１５度と高い親水性を示し、水酸基を高密度に有して
いることがわかる。Example 3 A sol in which fine zirconia particles were dispersed was applied to the surface of a nozzle plate made of stainless steel (SUS316-L). An appropriate value can be selected for the size and concentration of the zirconia fine particles, but here, the average particle diameter is 0.06 μm.
Zirconia sol NZS-30A (manufactured by Nissan Kagaku) was used to disperse the zirconia sol in methanol at a concentration of 2 wt%. The back surface of the nozzle plate or the inside of the nozzle was protected with a mask tape or a photoresist, and the zirconia sol was applied to the surface of the nozzle plate by spin coating. The zirconia fine particle layer could be formed with a thickness of about 0.3 μm. After removing the protective layer, heat treatment was performed at 200 ° C. for 1 hour. The contact angle with water is about 15 degrees, which shows high hydrophilicity, and it is understood that the polymer has a high density of hydroxyl groups.
【００１８】次にフロリナートＦＣ−７０（住友スリー
エム社製）に、含フッ素シリコンカップリング剤である
1H,1H,2H,2H-PERFLUOROOCTYLTRIETHOXYSILANEを３％溶
解させ、ノズルプレート表面に塗布し、２５０℃で１時
間加熱処理した。溶媒の沸点は２１５℃である。加熱処
理したノズルプレートを、フロリナートＦＣ−７０で三
槽に分けてすすいだ。水との接触角は溶媒ですすぐこと
で、１０５度から１２０度に変化した。カラー染料を含
んだ浸透性の高いインクに浸漬し、７０℃で５日間保持
したところ、インクと７０度以上の接触角が得られ、十
分な撥水撥油効果及び密着強度が得られていることがわ
かった。Next, Fluorinert FC-70 (manufactured by Sumitomo 3M Limited) is a fluorine-containing silicon coupling agent.
3% of 1H, 1H, 2H, 2H-PERFLUOROOCTYLTRIETHOXYSILANE was dissolved, applied on the surface of the nozzle plate, and heat-treated at 250 ° C. for 1 hour. The boiling point of the solvent is 215 ° C. The heat-treated nozzle plate was rinsed in three tanks with Fluorinert FC-70. The contact angle with water changed from 105 to 120 by rinsing with a solvent. When immersed in a highly penetrative ink containing a color dye and kept at 70 ° C. for 5 days, a contact angle with the ink of 70 ° or more was obtained, and sufficient water / oil repellency and adhesion strength were obtained. I understood it.
【００１９】このノズルプレートを用いて製造したイン
クジェット記録ヘッドを、記録装置に装着して印字試験
を行なったところ、印字乱れ等のトラブルは発生せず、
鮮明なカラー印字が可能となった。インクを注入しなが
らシリコンゴムによる擦り試験をしたところ、１０００
０回擦った後にもインクとの接触角は７０度以上あり、
撥水撥油効果がほとんど劣化せず長期間にわたって印字
品質の高いインクジェット記録ヘッドを達成できた。When an ink jet recording head manufactured by using this nozzle plate was mounted on a recording device and a printing test was conducted, no trouble such as print disturbance was found.
Vivid color printing is now possible. When a rubbing test with silicone rubber was performed while injecting ink, 1000
The contact angle with ink is 70 degrees or more even after rubbing 0 times,
An ink jet recording head with high printing quality could be achieved for a long period of time with almost no deterioration in water and oil repellency.
【００２０】（比較例１）実施例１と同様の方法でノズ
ルプレート上にアルミナ微粒子層を、約０．２μｍの厚
みで形成した。次にフロリナートＦＣ−４０（住友スリ
ーエム社製）に、含フッ素シリコンカップリング剤であ
る1H,1H,2H,2H-PERFLUORODECYLTRICHLOROSILANEを１０
％溶解させ、ノズルプレート表面に塗布した。溶媒の沸
点は１５５℃である。１００℃で１時間加熱処理したノ
ズルプレートを、フロリナートＦＣ−４０で三槽に分け
てすすいだ。水との接触角は溶媒ですすぐことで、１０
５度から２５度に変化し、含フッ素シリコンカップリン
グ剤のほとんどが除去されたことを示唆した。Comparative Example 1 In the same manner as in Example 1, an alumina fine particle layer having a thickness of about 0.2 μm was formed on the nozzle plate. Next, Fluorinert FC-40 (manufactured by Sumitomo 3M Co., Ltd.) was coated with 1H, 1H, 2H, 2H-PERFLUORODECYLTRICHLOROSILANE, which is a fluorine-containing silicon coupling agent.
% Dissolved and applied to the surface of the nozzle plate. The boiling point of the solvent is 155 ° C. The nozzle plate that had been heat-treated at 100 ° C. for 1 hour was rinsed with Fluorinert FC-40 in three tanks. Contact angle with water is 10 by rinsing with solvent
The temperature changed from 5 degrees to 25 degrees, suggesting that most of the fluorine-containing silicon coupling agent was removed.
【００２１】（比較例２）実施例２と同様の方法でノズ
ルプレート上にジルコニア微粒子層を、約０．１μｍの
厚みで形成した。次にパーフルオロオクタンに含フッ素
シリコンカップリング剤であるＫＰ−８０１Ｍ（信越化
学社製）を１０％溶解させ、ノズルプレート表面に塗布
し、８０℃で１時間加熱処理した。溶媒の沸点は１００
℃である。加熱処理したノズルプレートを、パーフルオ
ロオクタンで充分にすすいだ。水との接触角は溶媒です
すぐことで、１１０度から２０度に変化し、撥水効果が
消失していた。Comparative Example 2 A zirconia fine particle layer having a thickness of about 0.1 μm was formed on a nozzle plate in the same manner as in Example 2. Next, 10% of KP-801M (manufactured by Shin-Etsu Chemical Co., Ltd.), which is a fluorine-containing silicon coupling agent, was dissolved in perfluorooctane, applied on the surface of the nozzle plate, and heat-treated at 80 ° C. for 1 hour. The boiling point of the solvent is 100
℃. The heat treated nozzle plate was thoroughly rinsed with perfluorooctane. The contact angle with water changed from 110 degrees to 20 degrees by rinsing with a solvent, and the water repellent effect disappeared.
【００２２】[0022]
【発明の効果】以上述べたように本発明によれば、イン
クジェット記録ヘッドにおいてノズルプレート表面に優
れた特性の撥水撥油処理を施し、高い印字品質のインク
ジェット記録ヘッドを提供できた。また本発明による表
面処理は、その持続性に非常に優れているために、記録
ヘッドの長寿命化が可能となる。As described above, according to the present invention, it is possible to provide an ink jet recording head having high printing quality by subjecting the nozzle plate surface to the water and oil repellent treatment having excellent characteristics in the ink jet recording head. Further, since the surface treatment according to the present invention is extremely excellent in its durability, the life of the recording head can be extended.
【００２３】さらに本発明のインクジェット記録ヘッド
の製造方法は、極めて簡単な装置及び工程で撥水撥油化
処理ができるため、製造上安全であり、コストも大幅に
下げられるものであり、その効果は大きい。Further, according to the method of manufacturing the ink jet recording head of the present invention, since the water and oil repellent treatment can be performed by an extremely simple apparatus and process, it is safe in manufacturing and the cost can be drastically reduced. Is big.
【図１】 実施例１におけるインクジェット記録ヘッド
の概略を、模式的に示した断面図である。FIG. 1 is a schematic cross-sectional view of an inkjet recording head according to a first exemplary embodiment.
【図２】 実施例１におけるノズルプレート表面の撥水
撥油化処理を、模式的に示した断面図である。FIG. 2 is a cross-sectional view that schematically shows the water and oil repellent treatment of the nozzle plate surface in the first embodiment.
１ 圧力室 ２ ノズルプレート ３ インク吐出ノズル ４ 第一基板 ５ 第二基板 ２１ 酸化物微粒子層 ２２ 含フッ素シリコンカップリング層 ２３ 結合基（シリル基） ２４ フルオロアルキル鎖 1 Pressure Chamber 2 Nozzle Plate 3 Ink Discharging Nozzle 4 First Substrate 5 Second Substrate 21 Oxide Fine Particle Layer 22 Fluorine-Containing Silicon Coupling Layer 23 Bonding Group (Silyl Group) 24 Fluoroalkyl Chain
Claims (1)
酸化物微粒子層が形成され、更にその上に含フッ素シリ
コンカップリング層が形成されているインクジェット記
録ヘッドの製造において、酸化物微粒子層上に含フッ素
シリコンカップリング剤溶液を塗布してから溶媒の沸点
以上まで加熱し、更にノズルプレートを溶媒ですすぎ、
未反応の含フッ素シリコンカップリング剤を除去するこ
とを特徴とするインクジェット記録ヘッドの製造方法。1. In the manufacture of an ink jet recording head in which an oxide fine particle layer is formed on the surface of a nozzle plate from which ink is ejected, and a fluorine-containing silicon coupling layer is further formed on the oxide fine particle layer, the oxide fine particle layer is contained on the oxide fine particle layer. After applying the fluorosilicone coupling agent solution, heat it up to the boiling point of the solvent or higher, and rinse the nozzle plate with the solvent,
A method for manufacturing an ink jet recording head, which comprises removing unreacted fluorine-containing silicon coupling agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP861393A JPH06210857A (en) | 1993-01-21 | 1993-01-21 | Manufacture of ink jet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP861393A JPH06210857A (en) | 1993-01-21 | 1993-01-21 | Manufacture of ink jet recording head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06210857A true JPH06210857A (en) | 1994-08-02 |
Family
ID=11697808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP861393A Pending JPH06210857A (en) | 1993-01-21 | 1993-01-21 | Manufacture of ink jet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06210857A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7344235B2 (en) * | 2002-01-15 | 2008-03-18 | Matsushita Electric Industrial Co., Ltd. | Ink composition for ink jet recording, ink cartridge, nozzle plate for ink jet recording, ink jet head, and recording apparatus |
| EP2163389A1 (en) | 2003-07-22 | 2010-03-17 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
| CN104245325A (en) * | 2012-04-18 | 2014-12-24 | 佳能株式会社 | Ink jet recording head and manufacturing method therefor |
| EP3184307A1 (en) | 2015-12-25 | 2017-06-28 | Ricoh Company, Ltd. | Printing device and printing method |
| EP3686254A1 (en) | 2019-01-25 | 2020-07-29 | Ricoh Company, Ltd. | Ink, method of manufacturing ink, printing method, and printing device |
| EP3988624A1 (en) | 2020-10-21 | 2022-04-27 | Ricoh Company, Ltd. | Ink set, inkjet printing apparatus, and inkjet printing method |
-
1993
- 1993-01-21 JP JP861393A patent/JPH06210857A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7344235B2 (en) * | 2002-01-15 | 2008-03-18 | Matsushita Electric Industrial Co., Ltd. | Ink composition for ink jet recording, ink cartridge, nozzle plate for ink jet recording, ink jet head, and recording apparatus |
| EP2163389A1 (en) | 2003-07-22 | 2010-03-17 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
| US7758158B2 (en) | 2003-07-22 | 2010-07-20 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
| US8251491B2 (en) | 2003-07-22 | 2012-08-28 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
| CN104245325A (en) * | 2012-04-18 | 2014-12-24 | 佳能株式会社 | Ink jet recording head and manufacturing method therefor |
| US9150697B2 (en) | 2012-04-18 | 2015-10-06 | Canon Kabushiki Kaisha | Ink jet recording head and manufacturing method therefor |
| US9273187B2 (en) | 2012-04-18 | 2016-03-01 | Canon Kabushiki Kaisha | Ink jet recording head and manufacturing method therefor |
| US9394409B2 (en) | 2012-04-18 | 2016-07-19 | Canon Kabushiki Kaisha | Ink jet recording head |
| CN104245325B (en) * | 2012-04-18 | 2016-09-07 | 佳能株式会社 | Ink jet print head and manufacture method thereof |
| EP3184307A1 (en) | 2015-12-25 | 2017-06-28 | Ricoh Company, Ltd. | Printing device and printing method |
| EP3686254A1 (en) | 2019-01-25 | 2020-07-29 | Ricoh Company, Ltd. | Ink, method of manufacturing ink, printing method, and printing device |
| EP3988624A1 (en) | 2020-10-21 | 2022-04-27 | Ricoh Company, Ltd. | Ink set, inkjet printing apparatus, and inkjet printing method |
| US11851571B2 (en) | 2020-10-21 | 2023-12-26 | Ricoh Company, Ltd. | Ink set, inkjet printing apparatus, and inkjet printing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6016601A (en) | Method of preparing the nozzle plate | |
| JP2929066B2 (en) | Method for forming coating layer of ink jet print head | |
| JP3161106B2 (en) | Ink jet recording head and method of manufacturing the same | |
| JP3379119B2 (en) | Ink jet recording head and method of manufacturing the same | |
| WO1994005502A1 (en) | Improved liquid jet printing head, and liquid jet printing apparatus provided with liquid jet printing head | |
| JPH06210857A (en) | Manufacture of ink jet recording head | |
| JP2007253485A (en) | Liquid-repellent film-coated member, component member of liquid jet apparatus, nozzle plate of liquid jet head, liquid jet head, and liquid jet apparatus | |
| JPH07329303A (en) | Surface treatment method for ink jet head | |
| JPS62202743A (en) | Water-repelling treatment method of ink jet nozzle for ink jet recorder | |
| JPH05338180A (en) | Surface treatment of ink jet recording head | |
| JPH06328688A (en) | Ink jet recording head and production thereof | |
| JPH07125219A (en) | Water-repelling treatment of ink jet recording head | |
| JPH05229118A (en) | Ink jet recording head and production thereof | |
| US6000783A (en) | Nozzle plate for ink jet recording apparatus and method of preparing said nozzle plate | |
| JP2004122684A (en) | Inkjet head and manufacturing method therefor | |
| JP7231039B2 (en) | NOZZLE PLATE, NOZZLE PLATE MANUFACTURING METHOD, AND INKJET HEAD | |
| JPH05116324A (en) | Ink jet discharge nozzle plate and its manufacture | |
| JPH07138763A (en) | Surface treatment of ink jet recording head | |
| JP3700911B2 (en) | Method for manufacturing ink jet recording head | |
| JPH106494A (en) | Ink jet head | |
| JP3399052B2 (en) | Ink jet head and method of manufacturing the same | |
| JP4193118B2 (en) | Method for forming metal alkoxide film | |
| JP3785854B2 (en) | Inkjet head | |
| JP2887816B2 (en) | Inkjet recording head | |
| JPH05330060A (en) | Ink jet recording head and production thereof |