JPH06210569A - Flange of rotary grinding wheel for cutting and rotary grinding wheel for cutting - Google Patents
Flange of rotary grinding wheel for cutting and rotary grinding wheel for cuttingInfo
- Publication number
- JPH06210569A JPH06210569A JP606993A JP606993A JPH06210569A JP H06210569 A JPH06210569 A JP H06210569A JP 606993 A JP606993 A JP 606993A JP 606993 A JP606993 A JP 606993A JP H06210569 A JPH06210569 A JP H06210569A
- Authority
- JP
- Japan
- Prior art keywords
- flange
- grindstone
- cutting
- grinding
- grinding wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は切断加工用、特に切断・
溝入れ等の湿式研削加工用の回転型砥石フランジ及び回
転型砥石に係わる。FIELD OF THE INVENTION The present invention is for cutting and processing, especially for cutting and cutting.
The present invention relates to a rotary grindstone flange and a rotary grindstone for wet grinding such as grooving.
【0002】[0002]
【従来の技術】磁気ヘッドや半導体装置等の加工工程に
おいて、ヘッド材料や半導体ウェファ等の各種材料の切
断、溝入れ加工等を研削液に浸して研削するいわゆる湿
式研削加工を行う場合、効率の向上を目的とした加工装
置の高性能化が進み、砥石の回転が高速化されている。2. Description of the Related Art In the process of processing a magnetic head, a semiconductor device, etc., when performing so-called wet grinding in which cutting and grooving of various materials such as head materials and semiconductor wafers are soaked in a grinding liquid, so-called wet grinding The processing equipment for the purpose of improvement has advanced in performance, and the rotation of the grindstone has been accelerated.
【0003】この高速回転に伴って、砥石周辺部の空気
流れが極めて速くなり、加工点への研削液の供給が困難
になるという問題が生じてきている。例えば研削液の不
足により目詰まりが発生し、切断ラインが蛇行して直線
状に切断できなくなるとか、または砥石が非常に速く摩
耗してしまうという問題が生じている。このため、加工
装置及び砥石性能の向上に見合うように研削液を確実に
供給する工夫が必要となっている。Along with this high-speed rotation, the air flow around the grindstone becomes extremely fast, which makes it difficult to supply the grinding fluid to the working point. For example, there is a problem that clogging occurs due to lack of grinding liquid, the cutting line meanders and cannot be cut linearly, or the grindstone wears very quickly. For this reason, it is necessary to devise a reliable supply of the grinding fluid so as to meet the improvement of the processing device and the performance of the grindstone.
【0004】図6に示す例においては、単刃用砥石フラ
ンジによる湿式研削加工を行う場合を模式的に示す。円
板状の砥石1がその両側を(図6においては一側面を示
す)フランジ2によって固定され、砥石回転軸4を回転
軸として矢印cで示すように高速回転される。このとき
砥石1の周辺部から、砥石1及び被加工物いわゆるワー
クの冷却、更に加工屑の排除を目的として研削液が加工
点に供給される。5は研削液の流れを示す。In the example shown in FIG. 6, the case of performing wet grinding with a single-edged whetstone flange is schematically shown. A disk-shaped grindstone 1 is fixed on both sides thereof by flanges 2 (one side surface is shown in FIG. 6), and is rotated at a high speed as indicated by an arrow c with a grindstone rotating shaft 4 as a rotation axis. At this time, the grinding liquid is supplied from the peripheral portion of the grindstone 1 to the processing point for the purpose of cooling the grindstone 1 and the workpiece, that is, the so-called work, and further removing the processing scraps. Reference numeral 5 shows the flow of the grinding liquid.
【0005】このとき、線速にして25m/s以上10
0m/s以下、即ち例えば直径100mmφの砥石を用
いる場合5000rpm〜20000rpm程度の回転
速度で高速回転を行うと、矢印aで示すように砥石1の
周辺部に空気の流れが生じ、研削液の加工点への供給が
妨げられてしまう。研削液の不足は砥石1の摩耗を速
め、また加熱を招来し、研削抵抗の増大化を招いて加工
精度の低下を来す原因となる。At this time, the linear velocity is 25 m / s or more 10
0 m / s or less, that is, when a grindstone with a diameter of 100 mmφ is used, when high speed rotation is performed at a rotation speed of about 5000 rpm to 20000 rpm, a flow of air is generated in the peripheral portion of the grindstone 1 as indicated by an arrow a, and the grinding fluid is processed. The supply to the point is hindered. The shortage of the grinding fluid accelerates the wear of the grindstone 1 and causes heating, which causes an increase in grinding resistance and a reduction in processing accuracy.
【0006】一方において例えば磁気ヘッドの製造で
は、フェライトの切断、溝入れ加工等が行われており、
特にトラック幅規制溝を形成する工程においては、砥石
形状を長時間維持することが望まれている。またハード
ディスク用薄膜磁気ヘッドの製造においては、難削材で
あるセラミックAl2 O3 −TiCの切断工程におい
て、切断面の精度良い平面性が求められている。更に例
えば半導体装置の製造過程においては、ウェファの切断
工程において加工時間の短縮を目的として砥石回転速度
の高速化が求められている。On the other hand, for example, in the manufacture of magnetic heads, ferrite cutting, grooving, etc. are performed.
Particularly in the process of forming the track width regulation groove, it is desired to maintain the shape of the grindstone for a long time. Further, in the manufacture of a thin film magnetic head for a hard disk, it is required that the cut surface of the ceramic Al 2 O 3 —TiC, which is a difficult-to-cut material, be precisely flat. Further, for example, in the manufacturing process of semiconductor devices, it is required to increase the rotational speed of the grindstone in order to shorten the processing time in the wafer cutting process.
【0007】このような高速回転で精度良く加工形状を
制御し、又砥石の長寿命化を実現するために、例えば研
削液の供給圧力を高めることにより研削液の流速を速く
する方法が提案されている。しかしながらこの方法では
設備の拡張が必要となる。また不必要にワークに研削液
が高速で衝突してワークが外れたり、ワーク損傷が起こ
る等の問題が生じる場合がある。In order to accurately control the machining shape by such high-speed rotation and to extend the life of the grindstone, for example, a method of increasing the flow rate of the grinding fluid by increasing the supply pressure of the grinding fluid has been proposed. ing. However, this method requires expansion of equipment. Further, the grinding liquid may collide with the work unnecessarily at a high speed, and the work may come off, or the work may be damaged.
【0008】また、例えば特開昭59−88260号公
開公報等において、研削液を研削スピンドルの中を通し
てピンドルの外周部より研削液を供給する方法が提案さ
れているが、回転部のシールが必要であり、技術的に実
現が困難である。また、研削液を不必要にワークに付着
させ、汚損を生じる恐れがある。Further, for example, Japanese Patent Application Laid-Open No. 59-88260 discloses a method of supplying the grinding fluid from the outer peripheral portion of the pindle through the grinding spindle, but it is necessary to seal the rotating portion. Therefore, it is technically difficult to realize. In addition, the grinding liquid may be unnecessarily attached to the work and may be contaminated.
【0009】[0009]
【発明が解決しようとする課題】本発明は上述したよう
な高速の回転により砥石フランジを回転させる切断加工
用砥石フランジにおいて、研削液が効率良く砥石に流れ
るようにして、加工効率及び精度の向上をはかる。DISCLOSURE OF THE INVENTION The present invention provides a cutting wheel flange for rotating a grinding wheel flange by rotating at a high speed as described above so that a grinding liquid can efficiently flow to the grinding wheel to improve processing efficiency and accuracy. Measure
【0010】[0010]
【課題を解決するための手段】本発明は、その一例の側
面図及び正面図を図1A及びBに示すように、円板状の
砥石1とフランジ2とから成る切断加工用回転型砥石フ
ランジにおいて、このフランジ2の表面にフランジ2の
回転により負圧を発生する凹凸部3を形成して構成す
る。The present invention, as shown in a side view and a front view of an example thereof, as shown in FIGS. 1A and 1B, is a rotary grinding wheel flange for cutting which comprises a disk-shaped grindstone 1 and a flange 2. In the above, an uneven portion 3 is formed on the surface of the flange 2 to generate a negative pressure by the rotation of the flange 2.
【0011】また本発明は、上述の構成において、凹凸
部3を、フランジ2の側面に沿って外周から内周に向か
う渦巻き状の溝として構成する。Further, according to the present invention, in the above structure, the uneven portion 3 is formed as a spiral groove extending from the outer circumference to the inner circumference along the side surface of the flange 2.
【0012】更にまた本発明は、上述の構成において、
図2にその一例の説明図を示すように、凹凸部3を、ほ
ぼ円形又は楕円形の窪みより構成する。Still further, the present invention has the above-mentioned constitution.
As shown in the explanatory view of one example thereof in FIG. 2, the concave-convex portion 3 is formed of a substantially circular or elliptical recess.
【0013】また本発明は、その一例の説明図を図3に
示すように、円板状の砥石とフランジ2とから成る切断
加工用回転型砥石において、砥石1の表面に、回転によ
り負圧を発生する凹部13が砥石1の外周部まで達しな
い形状として設ける構成とする。Further, as shown in FIG. 3 which is an explanatory view of an example of the present invention, in a rotary grinding wheel for cutting which comprises a disk-shaped grindstone and a flange 2, a negative pressure is applied to the surface of the grindstone 1 by rotation. The recessed portion 13 for generating is formed so as not to reach the outer peripheral portion of the grindstone 1.
【0014】[0014]
【作用】上述したように本発明においては、フランジ2
の表面に凹凸部を形成して、その回転により負圧を発生
させることによって、効率良く研削液を加工点に供給す
ることができた。As described above, in the present invention, the flange 2
It was possible to efficiently supply the grinding fluid to the processing point by forming the uneven portion on the surface of and producing negative pressure by the rotation thereof.
【0015】即ち例えば凹凸部の形状を、図1Aに示す
ようにフランジ2の側面2Sに沿って外周から内周に向
かう渦巻き状の溝、或いは図2に示すようにほぼ円形又
は楕円形の窪みとすることによって、研削液を不必要に
ワークに衝突させることなく砥石及びワークに供給させ
て、確実にワークを冷却し且つ加工屑を排除することが
できる。That is, for example, as shown in FIG. 1A, the shape of the uneven portion is a spiral groove extending from the outer circumference to the inner circumference along the side surface 2S of the flange 2, or a substantially circular or elliptical depression as shown in FIG. By doing so, the grinding liquid can be supplied to the grindstone and the work without unnecessarily colliding with the work, and the work can be cooled reliably and the processing waste can be eliminated.
【0016】また、砥石2の表面に、その外周部に達し
ない形状の凹部13を設ける構成とすることによって、
同様にその回転によって負圧を生じさせることができ
て、研削液を効率良く加工点に供給することができた。Further, by providing the surface of the grindstone 2 with a concave portion 13 having a shape that does not reach the outer peripheral portion thereof,
Similarly, a negative pressure could be generated by the rotation, and the grinding fluid could be efficiently supplied to the processing point.
【0017】このように加工点への研削液の供給が促進
されることによって、研削液不足による砥石の目詰まり
に起因する砥石の摩耗、加工ラインの蛇行等不所望の加
工形状となることを回避でき、加工精度が向上する。ま
た研削液の供給量不足に起因する砥石回転数の上限を上
げることができて、加工性の向上をはかり、加工速度の
向上をはかることができる。By promoting the supply of the grinding fluid to the machining point in this way, it is possible to cause an undesired machining shape such as abrasion of the grinding stone due to clogging of the grinding stone due to insufficient grinding fluid, meandering of the machining line, etc. It can be avoided and processing accuracy is improved. Further, the upper limit of the number of rotations of the grindstone due to the insufficient supply of the grinding fluid can be increased, the workability can be improved, and the processing speed can be improved.
【0018】[0018]
【実施例】以下本発明実施例を図面を参照して詳細に説
明する。各例共に、単刃用砥石フランジによる湿式研削
加工を、線速25m/s以上の特に50m/s以上10
0m/s以下、即ち直径100mmφの砥石を用いる場
合5000rpm以上の特に10000rpm以上20
000rpm以下程度の高速回転を行う場合に適用した
もので、先ずフランジに凹凸部を設ける本発明の各例を
説明する。このようにフランジに加工を施す場合は、研
削等によって行うため、砥石自体に加工を施す場合に比
して、その製造が容易であるという利点を有する。Embodiments of the present invention will now be described in detail with reference to the drawings. In each of the examples, wet grinding with a single-edged grindstone flange is performed at a linear velocity of 25 m / s or more, particularly 50 m / s or more 10.
0 m / s or less, that is, when using a grindstone with a diameter of 100 mmφ, 5000 rpm or more, particularly 10000 rpm or more 20
It is applied when high-speed rotation of about 000 rpm or less is performed. First, each example of the present invention in which the flange is provided with the uneven portion will be described. When the flange is processed as described above, it is performed by grinding or the like, and therefore, there is an advantage that the manufacturing is easier than when the grindstone itself is processed.
【0019】図1A及びBにおいて1は円板状の砥石、
2はフランジ、4は砥石回転軸を示す。また11は加工
が施される磁気ヘッド材料や半導体ウェファ等のワー
ク、12は砥石1の切断加工(溝加工)により形成され
た溝を示す。In FIGS. 1A and 1B, 1 is a disk-shaped grindstone,
Reference numeral 2 is a flange, and 4 is a grindstone rotation axis. Reference numeral 11 denotes a work such as a magnetic head material to be processed or a semiconductor wafer, and 12 denotes a groove formed by cutting (grooving) the grindstone 1.
【0020】そしてこの場合、そのフランジ2の表面
に、回転による負圧を生じさせる凹凸部3をフランジの
外周から内周に向かう渦巻き状の溝として研削等により
形成する。そしてその溝形状は、例えばフランジ2の直
径が100mmφである場合、その側面2Sに幅例えば
1mm、深さ例えば1mmとして断面角形、半円型又は
V字状に例えば100mmRの曲率で10mm間隔で設
ける。Then, in this case, the surface of the flange 2 is provided with an uneven portion 3 for generating a negative pressure due to rotation, which is formed by grinding or the like as a spiral groove extending from the outer circumference to the inner circumference of the flange. For example, when the diameter of the flange 2 is 100 mmφ, the groove shape is provided on the side surface 2S with a width of, for example, 1 mm and a depth of, for example, 1 mm in a square, semicircular or V-shaped cross section with a curvature of, for example, 100 mmR at intervals of 10 mm. .
【0021】このような構成において、図4に示すよう
に、例えば10000rpmの回転数で砥石1を矢印c
で示すように回転させ、この砥石1に冷却、加工屑の排
除のための研削液を加工点へ供給する。このとき、上述
したようにフランジ2の表面に溝状の凹凸部3を設ける
ことによって、フランジ2の表面に負圧が生じることか
ら、このフランジ2及び砥石1の表面と被加工物即ちワ
ーク11の表面に研削液を効率良く供給することができ
た。In such a structure, as shown in FIG. 4, the grindstone 1 is moved to the arrow c at a rotation speed of 10000 rpm, for example.
Then, the grinding stone 1 is supplied with a grinding liquid for cooling and for removing machining chips to the machining point. At this time, since the negative pressure is generated on the surface of the flange 2 by providing the groove-shaped uneven portion 3 on the surface of the flange 2 as described above, the surfaces of the flange 2 and the grindstone 1 and the workpiece, that is, the work 11 are formed. The grinding fluid could be efficiently supplied to the surface of the.
【0022】このように加工点への研削液の供給が促進
されることによって、研削液不足による砥石の目詰まり
に起因する砥石の摩耗、加工ラインの蛇行等不所望の加
工形状となることを回避でき、加工精度が向上する。ま
た研削液の供給量不足に起因する砥石回転数の上限を上
げることができて、加工性の向上をはかり、加工速度の
向上をはかることができる。By promoting the supply of the grinding fluid to the machining point in this manner, it is possible to cause an undesired machining shape such as abrasion of the grinding stone due to clogging of the grinding stone due to insufficient grinding fluid, meandering of the machining line, etc. It can be avoided and processing accuracy is improved. Further, the upper limit of the number of rotations of the grindstone due to the insufficient supply of the grinding fluid can be increased, the workability can be improved, and the processing speed can be improved.
【0023】また、図2に示す例においては、凹凸部3
として、溝状ではなくほぼ円形又は楕円形の窪みを設け
た場合で、例えば直径5mmφ、深さ1mm程度のディ
ンプル状の窪みを研削等により形成した。図2におい
て、図1に対応する部分には同一符号を付して重複説明
を省略する。この場合においてもフランジ2の表面に負
圧を生じさせ、加工点に効率良く研削液を供給すること
ができた。In addition, in the example shown in FIG.
As an example, a dimple-shaped depression having a diameter of 5 mmφ and a depth of about 1 mm was formed by grinding or the like in the case of providing a substantially circular or elliptical depression instead of a groove. 2, parts corresponding to those in FIG. 1 are designated by the same reference numerals, and duplicate description will be omitted. Even in this case, a negative pressure was generated on the surface of the flange 2 and the grinding fluid could be efficiently supplied to the processing point.
【0024】次に、複数の円板状砥石が一体に回転軸に
取り付けられたいわゆるマルチカッターに本発明を適用
した場合を図5を参照して説明する。この場合、その線
速は25m/s程度以上、即ち直径100mmφ程度の
砥石を5000rpm程度以上の回転数で回転させた場
合に特に効果を有するものである。Next, a case where the present invention is applied to a so-called multi-cutter in which a plurality of disc-shaped grindstones are integrally attached to a rotary shaft will be described with reference to FIG. In this case, the linear velocity is particularly effective when the grindstone having a diameter of about 100 mφ is rotated at a rotation speed of about 5000 rpm or more.
【0025】図5に示すように、この例においては複数
の円板状砥石1が並置配列されてフランジ2に取り付け
られる。2aはスペーサ部を示す。そしてフランジ2の
表面の例えば回転軸部の周側面即ちスペーサ部2aも含
んでその周側面2Cに例えばディンプル状の窪みより成
る凹凸部3を研削等により形成する。4は砥石回転軸を
示す。As shown in FIG. 5, in this example, a plurality of disc-shaped grindstones 1 are arranged side by side and attached to the flange 2. 2a shows a spacer part. Then, an uneven portion 3 made of, for example, a dimple-shaped depression is formed on the peripheral side surface 2C of the surface of the flange 2 including the peripheral side surface of the rotary shaft portion, that is, the spacer portion 2a by grinding or the like. Reference numeral 4 indicates a grindstone rotation axis.
【0026】このような構成とすることによって、上述
の各例と同様に研削液の供給を促進することができる。
そして研削液不足による砥石の目詰まりに起因する砥石
の摩耗、加工ラインの蛇行等不所望の加工形状となるこ
とを回避でき、加工精度が向上する。With such a structure, the supply of the grinding fluid can be promoted as in the above-mentioned examples.
Further, it is possible to avoid wear of the grindstone caused by clogging of the grindstone due to lack of the grinding fluid, undesired machining shape such as meandering of the machining line, and the machining accuracy is improved.
【0027】また研削液の供給量不足に起因する砥石回
転数の上限を上げることができて、加工性の向上をはか
り、加工速度の向上をはかることができる。Further, it is possible to increase the upper limit of the number of rotations of the grindstone due to the insufficient supply of the grinding fluid, and it is possible to improve the workability and the processing speed.
【0028】尚、上述の各例においては凹凸部3として
窪みや溝を形成する場合を説明したが、凹凸部の形状は
これらに限定されることなく凸部とすることもでき、例
えば突起、フィン等を設けることによって同様の効果を
得ることができる。しかしながら加工性及び安全性の上
では凹部とすることが望ましい。In each of the above-mentioned examples, the case where the depressions and grooves are formed as the uneven portion 3 has been described, but the shape of the uneven portion is not limited to these and may be a convex portion. The same effect can be obtained by providing fins or the like. However, in terms of workability and safety, it is desirable to form the recess.
【0029】次に、図3を参照して砥石1自体に加工を
施す場合を説明する。円板状の砥石とフランジ2とから
成る切断加工用回転型砥石において、砥石1の表面に、
砥石1の外周部まで達しない例えばディンプル状の窪み
より成る凹部13を形成したもので、この凹部13の形
状は、例えば0.5mm厚さの比較的薄刃の砥石1に対
してはその砥石剛性を考慮して深さを0.05〜0.1
mm程度とすることが望ましい。また、このように凹部
13の深さが浅いと負圧の発生効率が低下することか
ら、窪み状凹部13の個数、又は溝を設ける場合はその
本数を、砥石フランジに凹凸部を形成する場合に比し大
とすることが望ましい。Next, a case where the grindstone 1 itself is processed will be described with reference to FIG. In a rotary grindstone for cutting processing comprising a disc-shaped grindstone and a flange 2, the surface of the grindstone 1 is
A concave portion 13 formed of, for example, a dimple-shaped recess that does not reach the outer peripheral portion of the grindstone 1 is formed. The shape of the concave portion 13 is the rigidity of the grindstone with respect to the grindstone 1 having a relatively thin blade with a thickness of 0.5 mm, for example. Taking into account the depth of 0.05-0.1
It is desirable to set it to about mm. In addition, since the efficiency of negative pressure is reduced when the depth of the recess 13 is small as described above, the number of recessed recesses 13 or the number of recesses when the recesses are provided is the same as when the uneven portion is formed on the grindstone flange. It is desirable to make it larger than.
【0030】このような砥石の加工は、例えばレジンボ
ンド砥石では砥石成型時の型によりディンプル状、溝状
等の凹部13を形成することができる。また、導電性の
あるメタルボンド砥石を用いる場合は、電解加工装置に
よりこのような凹部13を形成することができる。In the processing of such a grindstone, for example, in a resin bond grindstone, it is possible to form a dimple-shaped, groove-shaped, etc. recessed portion 13 by a mold used for molding the grindstone. When a conductive metal bond grindstone is used, such a recess 13 can be formed by an electrolytic processing apparatus.
【0031】そしてこの場合においても加工点への研削
液の供給が促進され、研削液不足による砥石の目詰まり
に起因する砥石の摩耗、加工ラインの蛇行等不所望の加
工形状となることを回避でき、加工精度の向上、更に加
工性及び加工速度の向上をはかることができる。Also in this case, the supply of the grinding fluid to the machining point is promoted, and the abrasion of the grinding stone caused by the clogging of the grinding stone due to the lack of the grinding fluid and the occurrence of an undesired machining shape such as meandering of the machining line are avoided. Therefore, it is possible to improve the processing accuracy and further improve the workability and the processing speed.
【0032】尚、本発明は、上述の各例に限定されるこ
となく、その他種々の変形変更が可能であることはいう
までもない。Needless to say, the present invention is not limited to the above-mentioned examples, and various other modifications and changes are possible.
【0033】[0033]
【発明の効果】上述したように本発明によれば、フラン
ジ2に凹凸部を設けるか又は砥石1に外周部に達しない
形状の凹部を設けることによって、その回転により負圧
を発生させ、特に湿式研削加工において効率良く研削液
を加工点に供給することができる。As described above, according to the present invention, the concave and convex portions are provided on the flange 2 or the concave portion having a shape that does not reach the outer peripheral portion is provided on the grindstone 1, so that negative pressure is generated by the rotation thereof. In the wet grinding process, the grinding liquid can be efficiently supplied to the processing point.
【0034】このため加工点への研削液の供給が促進さ
れ、研削液不足による砥石の目詰まりに起因する砥石の
摩耗、加工ラインの蛇行等不所望の加工形状となること
を回避でき、加工精度が向上する。For this reason, the supply of the grinding fluid to the machining point is promoted, and it is possible to avoid an undesired machining shape such as abrasion of the grinding stone due to clogging of the grinding stone due to lack of the grinding fluid, meandering of the machining line, and the like. Accuracy is improved.
【0035】また研削液の供給量不足に起因する砥石回
転数の上限を上げることができて、加工性の向上をはか
り、加工速度の向上をはかることができる。Further, it is possible to increase the upper limit of the number of rotations of the grindstone due to the insufficient supply of the grinding fluid, which can improve the workability and the processing speed.
【図1】本発明実施例の略線的側面図及び略線的正面図
である。FIG. 1 is a schematic side view and a schematic front view of an embodiment of the present invention.
【図2】本発明実施例の説明図である。FIG. 2 is an explanatory diagram of an example of the present invention.
【図3】本発明実施例の説明図である。FIG. 3 is an explanatory diagram of an example of the present invention.
【図4】本発明実施例の説明図である。FIG. 4 is an explanatory diagram of an example of the present invention.
【図5】本発明実施例の説明図である。FIG. 5 is an explanatory diagram of an example of the present invention.
【図6】従来の切断加工用回転型砥石フランジの一例の
説明図である。FIG. 6 is an explanatory view of an example of a conventional rotary grinding wheel flange for cutting.
1 砥石 2 フランジ 2a スペーサ部 3 凹凸部 4 砥石回転軸 11 ワーク 13 凹部 1 Grindstone 2 Flange 2a Spacer Part 3 Concavo-convex Part 4 Grindstone Rotating Axis 11 Workpiece 13 Recess
Claims (4)
加工用回転型砥石フランジにおいて、 上記フランジの表面に該フランジの回転により負圧を発
生する凹凸部が形成されて成ることを特徴とする切断加
工用回転型砥石フランジ。1. A rotary grinding wheel flange for cutting, comprising a disk-shaped grindstone and a flange, wherein a concavo-convex portion for generating a negative pressure due to rotation of the flange is formed on a surface of the flange. Rotary grinding wheel flange for cutting.
って外周から内周に向かう渦巻き状の溝とされることを
特徴とする上記請求項1に記載の切断加工用回転型砥石
フランジ。2. The rotary grindstone flange for cutting according to claim 1, wherein the uneven portion is a spiral groove extending from the outer circumference to the inner circumference along the side surface of the flange.
みより成ることを特徴とする上記請求項1に記載の切断
加工用回転型砥石フランジ。3. The rotary grindstone flange for cutting according to claim 1, wherein the concavo-convex portion comprises a substantially circular or elliptical recess.
加工用回転型砥石において、 上記砥石の表面に、該砥石の回転により負圧を発生する
凹部が上記砥石の外周部まで達しない形状として設けら
れて成ることを特徴とする切断加工用回転型砥石。4. A rotary grindstone for cutting, comprising a disc-shaped grindstone and a flange, in which a concave portion on the surface of the grindstone that generates negative pressure due to rotation of the grindstone does not reach the outer peripheral portion of the grindstone. A rotary grindstone for cutting processing, characterized in that it is provided as.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP606993A JPH06210569A (en) | 1993-01-18 | 1993-01-18 | Flange of rotary grinding wheel for cutting and rotary grinding wheel for cutting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP606993A JPH06210569A (en) | 1993-01-18 | 1993-01-18 | Flange of rotary grinding wheel for cutting and rotary grinding wheel for cutting |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06210569A true JPH06210569A (en) | 1994-08-02 |
Family
ID=11628294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP606993A Pending JPH06210569A (en) | 1993-01-18 | 1993-01-18 | Flange of rotary grinding wheel for cutting and rotary grinding wheel for cutting |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06210569A (en) |
-
1993
- 1993-01-18 JP JP606993A patent/JPH06210569A/en active Pending
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