JPH06196089A - Impregnated type cathode pellet and it manufacture - Google Patents

Impregnated type cathode pellet and it manufacture

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Publication number
JPH06196089A
JPH06196089A JP34305092A JP34305092A JPH06196089A JP H06196089 A JPH06196089 A JP H06196089A JP 34305092 A JP34305092 A JP 34305092A JP 34305092 A JP34305092 A JP 34305092A JP H06196089 A JPH06196089 A JP H06196089A
Authority
JP
Japan
Prior art keywords
impregnated
cathode pellet
type cathode
pellet
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34305092A
Other languages
Japanese (ja)
Inventor
Toshikazu Sugimura
俊和 杉村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP34305092A priority Critical patent/JPH06196089A/en
Publication of JPH06196089A publication Critical patent/JPH06196089A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide an impregnated type cathode with excellent heat efficiency of a heater and a favorable electron emitting characteristic. CONSTITUTION:A method for manufacturing an impregnated type cathode pellet comprises the process of press-molding a laminated body obtained by laminating a member 11 consisting of a mixture of W powder 5 and an electron emitting material 3NO of BaO.CaO.Al2O3 and a member 12 consisting of a metal powder selected from alloys including Mo, Ta, Mo and Ta; the process of sealing a molded body 13 obtained by the press molding into a glass vessel; and the process of housing the glass vessel in a hot hydrostatic pressure pressurizing furnace to sinter the molded body 13. In the thus-obtained impregnated type cathode pellet, only one end part of the pellet is covered with the metal selected from the alloys including Mo, Ta, Mo and Ta.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は含浸型陰極およびその製
造方法に関し、詳しくは大型TV,HDTV等のように
高放射電流密度が必要な受像管の電子銃に使用される含
浸型陰極およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an impregnated cathode and a method for manufacturing the same, and more particularly to an impregnated cathode used in an electron gun of a picture tube such as a large-sized TV, HDTV or the like which requires a high emission current density, and a method thereof. It relates to a manufacturing method.

【0002】[0002]

【従来の技術】大型TV,HDTV等のように高放出電
流密度が必要な受像管の電子銃には含浸型陰極が一般的
に使用されている。
2. Description of the Related Art An impregnated cathode is generally used for an electron gun of a picture tube which requires a high emission current density such as a large TV and an HDTV.

【0003】この種の含浸型陰極は、基体金属であるW
焼結体中に電子放射物質を含浸させた構造のものが主流
となっており、例えばUSP4,165,473号やU
SP3,358,178号等で詳しく紹介されている。
An impregnated cathode of this type is W which is a base metal.
The mainstream is a structure in which a sintered body is impregnated with an electron emitting material, for example, USP 4,165,473 and U.
It is introduced in detail in SP3,358,178 and so on.

【0004】そこで従来の含浸型陰極の構造の一例を図
7に示す。
An example of the structure of a conventional impregnated cathode is shown in FIG.

【0005】含浸型陰極は同図に示すようにヒーター1
を内挿したMoまたはTa製の円筒状スリーブ2の上面
にBaO・CaO・Al23 からなる電子放出物質3
を所定の比率で含浸させたWのペレット状焼結体4を被
着した構造を有する。この焼結体4には電子放出物質3
を組成する構成物質の比率の違いにより、4BaO・C
aO・Al 23 からなるSタイプと5BaO・3Ca
O・2Al 23 からなるBタイプとがある。なお、上
記係数はモル比を示す。
The impregnated cathode is a heater 1 as shown in FIG.
Consisting BaO · CaO · Al 2 O 3 on the upper surface of the cylindrical sleeve 2 of interpolated Mo or steel Ta electron emission material 3
The pellet-shaped sintered body 4 of W is impregnated in a predetermined ratio. This sintered body 4 has an electron emission material 3
4BaO ・ C due to the difference in the ratio of the constituent substances that make up
S type consisting of aO ・ Al 2 O 3 and 5BaO ・ 3Ca
There is a B type consisting of O · 2Al 2 O 3 . The above coefficient indicates the molar ratio.

【0006】上記含浸型陰極は以下のようにして製造さ
れる。すなわち、W粉5をプレス成形した上で水素気流
中で焼成することにより多孔質の焼結体4とする。
The impregnated cathode is manufactured as follows. That is, the W powder 5 is press-molded and then fired in a hydrogen stream to obtain a porous sintered body 4.

【0007】次にBaCO3 ・CaCO3 ・Al23
を上記タイプに応じて所定のモル比で混合した電子放出
物質3を水素気流中で焼結体4と共に1800℃程度に
加熱することにより、多孔質の焼結体に含浸させ、含浸
型陰極ペレット4を形成する。次に、含浸型陰極ペレッ
ト4表面に付着した余剰の電子放射物質を除去するため
に面磨きを行う。この後、組立工程で含浸型陰極ペレッ
ト4をMoまたはTa製のキャップ6に挿入した後ヒー
ター1を内挿した円筒状スリーブ2の上面に固着する。
[0007] Next, BaCO 3 · CaCO 3 · Al 2 O 3
The electron-emitting substance 3 mixed with a predetermined molar ratio according to the above type is heated together with the sintered body 4 in a hydrogen stream to about 1800 ° C. to impregnate the porous sintered body with the impregnated cathode pellets. 4 is formed. Next, surface polishing is performed in order to remove the surplus electron emitting material adhering to the surface of the impregnated cathode pellet 4. After that, the impregnated cathode pellets 4 are inserted into a cap 6 made of Mo or Ta in the assembly process, and then fixed on the upper surface of the cylindrical sleeve 2 into which the heater 1 is inserted.

【0008】この固着の際、含浸型陰極ペレット4とヒ
ーター1の間に介在物であるキャップ6なしで一体化す
ると、ヒーター1を加熱した際にヒーター側にエミッシ
ョンが発生し、ヒーター1が劣化してしまうという問題
を有しているため、一般には図7に示すように含浸型陰
極ペレット4と円筒状スリーブ2の間に、MoまたはT
a製のキャップ6を介在させる方法を用い、ヒーター部
1へのエミッションを防止している。
At the time of this fixing, if the impregnated cathode pellet 4 and the heater 1 are integrated without a cap 6 which is an inclusion, emission occurs on the heater side when the heater 1 is heated and the heater 1 deteriorates. In general, as shown in FIG. 7, between the impregnated cathode pellet 4 and the cylindrical sleeve 2, Mo or T
Emissions to the heater unit 1 are prevented by using a method of interposing a cap 6 made of a.

【0009】[0009]

【発明が解決しようとする課題】ところで上述したタイ
プの含浸型陰極では、以下のような問題があった。
The impregnated cathode of the type described above has the following problems.

【0010】まず、MoまたはTaのキャップを介在し
た含浸型陰極の場合、含浸型陰極ペレットとキャップ底
面の間に隙間が生じ、ヒーター部の熱効率が低下してし
まうという問題があった。
First, in the case of the impregnated type cathode having a Mo or Ta cap interposed, there is a problem that a gap is formed between the impregnated type cathode pellet and the bottom surface of the cap, which lowers the thermal efficiency of the heater part.

【0011】また、上記問題点を解決するために、含浸
型陰極ペレットとキャップの隙間の領域に、ろう剤を流
し込んで一体化させることが有効であるが、ろう剤で一
体化させる際、ろう剤が含浸型陰極ペレット内部に含浸
し、含浸型陰極の電子放射特性が低下するという問題が
あった。そこで、本発明は上記問題点に鑑みて提案され
たもので、本出願人により特開平3−55739号公報
に開示した熱間静水圧加圧処理により、含浸型陰極を製
造するという発明を利用し、ヒーターの熱効率が良好で
陰極の組立工程中に電子放射特性の低下を生じない含浸
型陰極およびその製造方法を提供することにある。
In order to solve the above problems, it is effective to pour a brazing agent into the region of the gap between the impregnated cathode pellet and the cap so as to be integrated. There is a problem that the agent impregnates inside the impregnated cathode pellet, and the electron emission characteristics of the impregnated cathode deteriorate. Therefore, the present invention has been proposed in view of the above problems, and utilizes the invention of manufacturing an impregnated cathode by the hot isostatic pressing process disclosed in Japanese Patent Application Laid-Open No. 3-55739 by the present applicant. In addition, it is an object of the present invention to provide an impregnated cathode having a good thermal efficiency of a heater and preventing deterioration of electron emission characteristics during the cathode assembling process, and a method for manufacturing the same.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するため
の技術的手段として、本発明に係る含浸型陰極ペレット
の製造方法は、W粉と電子放射物質である酸化物粉の混
合物からなる部材とMo,Ta、MoまたはTaを含む
合金から選択された金属粉からなる部材を積層してなる
積層体をプレス成形する工程と、プレス成形により得ら
れた成形体をカプセル封入する工程とカプセル封入され
た成形体を、熱間静水圧加圧処理して焼結する工程とを
含むことを特徴とする。
As a technical means for achieving the above object, in the method for producing an impregnated cathode pellet according to the present invention, a member made of a mixture of W powder and oxide powder which is an electron emitting substance. And a step of press-forming a laminated body formed by laminating members made of metal powder selected from Mo, Ta, an alloy containing Mo or Ta, a step of encapsulating the molded body obtained by the press forming, and an encapsulation. And a step of sintering the formed body by hot isostatic pressing.

【0013】また、本発明に係る含浸型陰極ペレット
は、W粉と電子放射物質である酸化物粉とを混在させた
焼結体の一端部にのみMo,Ta、MoまたはTaを含
む合金から選択された金属で覆うことを特徴とする。
The impregnated cathode pellet according to the present invention is made of an alloy containing Mo, Ta, Mo or Ta only at one end of a sintered body in which W powder and oxide powder as an electron emitting substance are mixed. It is characterized by covering with a selected metal.

【0014】[0014]

【作用】本発明ではW粉と電子放射物質である酸化物粉
の混合物からなる部材と、Mo,Ta、MoまたはTa
を含む合金から選択された金属粉からなる部材を積層し
てなる積層体をプレス成形した成形体に基づくため、組
立工程でのMo,Ta、MoまたはTaを含む合金から
選択された金属製のキャップによる介在が不要となる。
In the present invention, a member made of a mixture of W powder and oxide powder which is an electron emitting substance, and Mo, Ta, Mo or Ta.
Since it is based on a molded body obtained by press-molding a laminated body formed by laminating members made of metal powder selected from alloys containing Al, a metal selected from alloys containing Mo, Ta, Mo or Ta in the assembly process is used. No need for a cap.

【0015】これにより、従来のように含浸型陰極ペレ
ットとキャップ底面の間に隙間が生じるような問題もな
く、これによりろう剤による一体化も不要となる。
As a result, there is no problem that a gap is formed between the impregnated cathode pellet and the bottom surface of the cap as in the conventional case, and integration with a brazing agent is also unnecessary.

【0016】[0016]

【実施例】本発明の実施例を図1から図6を用いて説明
する。
Embodiments of the present invention will be described with reference to FIGS.

【0017】まず、図1,図2に示すように、W粉5と
電子放射物質である4BaO・CaO・Al2 O(モル
比)3の混合物からなる部材11とMo粉からなる部材
12を積層してなる積層体を、約2ton/cm2 の圧
力でプレス成形し、円柱状の形状に冷間成形して成形体
13を得る。
First, as shown in FIGS. 1 and 2, a member 11 made of a mixture of W powder 5 and 4BaO.CaO.Al 2 O (molar ratio) 3 which is an electron emitting substance, and a member 12 made of Mo powder are formed. The laminated body formed by laminating is press-molded at a pressure of about 2 ton / cm 2 and cold-molded into a cylindrical shape to obtain a molded body 13.

【0018】上述のように積層体をプレス成形して得ら
れた成形体13を図3に示すようにパイレックス(登録
商標)容器14に収容させた後、パイレックス(登録商
標)容器14内に窒化ボロン(BN)粉末15を充填さ
せ、かつ内部を真空にした後、カプセルの開口端を封止
する。このカプセル封入により得られたパイレックス
(登録商標)容器14を図4に示すように熱間静水圧加
圧処理炉16内に収容し、図5に示す昇温および昇圧ス
ケジュールでもってHIP処理する。まず770℃で1
5分間加熱させてパイレックス(登録商標)容器14を
溶融させた後、圧力を上昇させる。次に所定の温度と圧
力となるように加熱および加圧を行うことにより、上記
成形体13を焼成させて焼結体(以下、焼結体と称す)
とする。この時、最終的なHIP処理条件は、例えば1
300℃、1500気圧、120分でアルコンガス雰囲
気である。なお、カプセル封入に他の材質の容器を使用
した場合には、その容器に溶融温度に設定し、最終的な
HIP処理条件についても、1000℃〜1400℃、
1000〜2000気圧、1〜180分程度の範囲に設
定すればよい。
A molded body 13 obtained by press-molding the laminate as described above is housed in a Pyrex (registered trademark) container 14 as shown in FIG. 3, and then nitrided in the Pyrex (registered trademark) container 14. After filling boron (BN) powder 15 and applying a vacuum to the inside, the open end of the capsule is sealed. The Pyrex (registered trademark) container 14 obtained by this encapsulation is housed in the hot isostatic pressurization treatment furnace 16 as shown in FIG. 4, and subjected to HIP treatment according to the temperature raising and pressurizing schedule shown in FIG. First, 1 at 770 ℃
After heating for 5 minutes to melt the Pyrex (registered trademark) container 14, the pressure is increased. Next, by heating and pressurizing so as to have a predetermined temperature and pressure, the molded body 13 is fired to obtain a sintered body (hereinafter referred to as a sintered body).
And At this time, the final HIP processing condition is, for example, 1
An Alcon gas atmosphere is set at 300 ° C., 1500 atmospheres, and 120 minutes. When a container made of another material is used for encapsulation, the melting temperature is set in the container and the final HIP treatment condition is 1000 ° C to 1400 ° C.
The pressure may be set within a range of 1000 to 2000 atmospheric pressure and 1 to 180 minutes.

【0019】上記製造方法により得られた焼結体13か
らなる含浸型陰極ペレットは、Mo,Ta、Moまたは
Taから選択された金属粉からなる部材を積層体の一端
部としてプレス成形した成形体に基づくため、組立工程
でのMo,Ta、MoまたはTaを含む合金から選択さ
れた金属製のキャップによる介在およびろう剤による一
体化が不要となる。
The impregnated cathode pellet made of the sintered body 13 obtained by the above-mentioned manufacturing method is a molded body obtained by press-molding a member made of metal powder selected from Mo, Ta, Mo or Ta as one end of the laminated body. As a result, it is not necessary to interpose a metal cap selected from Mo, Ta, alloys containing Mo or Ta and integrate with a brazing agent in the assembly process.

【0020】最後に上記焼結体とTaスリーブ17とを
図6に示すように一体化する。この焼結体とTa製の円
筒スリーブ2との接合は抵抗溶接により行う。
Finally, the sintered body and the Ta sleeve 17 are integrated as shown in FIG. The sintered body and the cylindrical sleeve 2 made of Ta are joined by resistance welding.

【0021】なお、上記実施例では積層体の一端部を形
成する金属粉からなる部材としてTaについて説明した
が、本発明はこれに限定されることなく、Mo単体、T
aを含む合金、Moを含む合金、例えばMo−Sm2
3 ・Mo−La23 などから選択された物質であって
もよい。また、スリーブの材質および一体化の際の接合
方法はむろんこれに限られたものではない。
Although Ta has been described as a member made of metal powder for forming one end of the laminated body in the above-mentioned embodiment, the present invention is not limited to this.
an alloy containing a, an alloy containing Mo, for example, Mo-Sm 2 O
It may be a substance selected from 3 · Mo—La 2 O 3 and the like. Further, the material of the sleeve and the joining method at the time of integration are not limited to this.

【0022】[0022]

【発明の効果】本発明によれば、W粉と電子放射物質で
ある酸化物粉の混合物からなる部材と、Mo,Ta、M
oまたはTaを含む合金から選択された金属粉からなる
部材を積層してなる積層体をプレス成形した成形体に基
づくため、組立工程でのMo,Ta、MoまたはTaを
含む合金から選択された金属製のキャップによる介在が
不要となる。
According to the present invention, a member made of a mixture of W powder and oxide powder which is an electron emitting substance, and Mo, Ta, M
It is selected from alloys containing Mo, Ta, Mo or Ta in the assembly process because it is based on a molded body obtained by press-molding a laminate formed by stacking members made of metal powder selected from alloys containing o or Ta. No need for a metal cap.

【0023】また、含浸型陰極ペレットと高温・高融点
・耐熱金属粉とが一体化しているので、従来のように含
浸型陰極ペレットとキャップ底面の間に隙間が生じるよ
うな問題がなく、ヒーター部から含浸型陰極ペレットへ
の熱効率も良好である。これにより、ろう剤によう一体
化も不要となり、陰極の組立工程中に含浸型陰極の電子
放射特性の低下の問題もなく、良好な含浸型陰極を提供
することができる。
Further, since the impregnated cathode pellet and the high temperature / high melting point / heat resistant metal powder are integrated, there is no problem that a gap is formed between the impregnated cathode pellet and the bottom surface of the cap as in the conventional case, and the heater is used. The thermal efficiency from the part to the impregnated cathode pellet is also good. As a result, it is possible to provide a good impregnated cathode without the need for integration as with a brazing agent, and without the problem of deterioration of the electron emission characteristics of the impregnated cathode during the cathode assembly process.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の実施例を説明するためのフローチャ
ート。
FIG. 1 is a flowchart for explaining an embodiment of the present invention.

【図2】 本発明方法による成形体を示す断面図。FIG. 2 is a cross-sectional view showing a molded body according to the method of the present invention.

【図3】 図2の成形体をカプセル封入する状態を示す
断面図。
FIG. 3 is a cross-sectional view showing a state in which the molded body of FIG. 2 is encapsulated.

【図4】 図3のカプセル封入された成形体を熱間静水
圧加圧処理する状態を示す断面図。
FIG. 4 is a cross-sectional view showing a state where the encapsulated molded body of FIG. 3 is subjected to hot isostatic pressing.

【図5】 HIP処理における時間に対する温度・圧力
の関係を示す特性図。
FIG. 5 is a characteristic diagram showing a relationship between temperature and pressure with respect to time in HIP processing.

【図6】 本発明の含浸型陰極の構造の一例を示す断面
図。
FIG. 6 is a cross-sectional view showing an example of the structure of the impregnated cathode of the present invention.

【図7】 従来の含浸型陰極の構造の一例を示す断面
図。
FIG. 7 is a sectional view showing an example of the structure of a conventional impregnated cathode.

【符号の説明】[Explanation of symbols]

3 電子放出物資生である酸化物粉 5 W粉 11 混合物からなる部材 12 Mo,Ta、MoまたはTaを含む合金からなる
選択された金属粉 13 成形体 14 カプセル封入(パイレックス容器) 16 熱間静水圧加圧処理(熱間静水圧加圧処理炉)
3 Oxide powder which is an electron emission source 5 W powder 11 Member composed of mixture 12 Selected metal powder composed of Mo, Ta, Mo or alloy containing Ta 13 Molded body 14 Encapsulation (Pyrex container) 16 Hot static Hydraulic pressure treatment (hot isostatic pressure treatment furnace)

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】含浸型陰極ペレットの製造方法においてW
粉と電子放射性酸化物との混合物とMoまたはTaを含
む金属粉とを積層してプレスする工程と、プレス成形に
より得られた成形体をカプセル封入する工程と、カプセ
ル封入された成形体を熱間静水圧加圧処理して焼結する
工程とを含むことを特徴とする含浸型陰極ペレットの製
造方法。
1. A method for producing an impregnated cathode pellet, wherein W
A step of stacking and pressing a mixture of powder and an electron emissive oxide and a metal powder containing Mo or Ta, a step of encapsulating a molded body obtained by press molding, and a heat treatment of the encapsulated molded body. And a step of carrying out a hydrostatic pressure treatment and sintering, the method for producing an impregnated-type cathode pellet.
【請求項2】含浸型陰極ペレットにおいて、一端をW粉
と電子放射性酸化物粉とを混在させた焼結体、他の一端
をMoまたはTaを含む金属粉により構成されているこ
と特徴とする含浸型陰極ペレット。
2. The impregnated cathode pellet is characterized in that one end is made of a sintered body in which W powder and electron emitting oxide powder are mixed, and the other end is made of metal powder containing Mo or Ta. Impregnated cathode pellet.
【請求項3】請求項2記載の含浸型陰極ペレットを直接
ヒーターで加熱すことを特徴とする含浸型陰極構体。
3. An impregnated-type cathode assembly, wherein the impregnated-type cathode pellet according to claim 2 is directly heated by a heater.
【請求項4】請求項3記載の電子銃を用いた電子管。4. An electron tube using the electron gun according to claim 3.
JP34305092A 1992-12-24 1992-12-24 Impregnated type cathode pellet and it manufacture Pending JPH06196089A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34305092A JPH06196089A (en) 1992-12-24 1992-12-24 Impregnated type cathode pellet and it manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34305092A JPH06196089A (en) 1992-12-24 1992-12-24 Impregnated type cathode pellet and it manufacture

Publications (1)

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JPH06196089A true JPH06196089A (en) 1994-07-15

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JP34305092A Pending JPH06196089A (en) 1992-12-24 1992-12-24 Impregnated type cathode pellet and it manufacture

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2527938C1 (en) * 2013-10-11 2014-09-10 Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток"(ФГУП "НПП "Исток") Method of making dispenser cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2527938C1 (en) * 2013-10-11 2014-09-10 Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток"(ФГУП "НПП "Исток") Method of making dispenser cathode

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