JPH06158993A - Method of open shield construction and open shielding machine - Google Patents
Method of open shield construction and open shielding machineInfo
- Publication number
- JPH06158993A JPH06158993A JP33564192A JP33564192A JPH06158993A JP H06158993 A JPH06158993 A JP H06158993A JP 33564192 A JP33564192 A JP 33564192A JP 33564192 A JP33564192 A JP 33564192A JP H06158993 A JPH06158993 A JP H06158993A
- Authority
- JP
- Japan
- Prior art keywords
- shield machine
- open
- open shield
- side wall
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Excavating Of Shafts Or Tunnels (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】オープンシールド工法は、開削工
法(オープンカット工法)とシールド工法の長所を生か
した合理性に富む工法である。図5にその概略を示す
と、図中1はオープンシールド機で、これは左右の側壁
板1aとこれら側壁板1aに連結する底板1bとからな
る前面、後面及び上面を開口したシールド機である。該
オープンシールド機1は前記側壁板1aと底板1bの先
端を刃口として形成し、また側壁板1aの中央に隔壁3
を設け、さらに、この隔壁3よりも後方に推進ジャッキ
2を後方に向け上下に並べて配設する。[Industrial field of application] The open shield method is a highly rational method that takes advantage of the open cutting method (open cut method) and the shield method. The outline is shown in FIG. 5. In FIG. 5, reference numeral 1 denotes an open shield machine, which is a shield machine having left and right side wall plates 1a and a bottom plate 1b connected to the side wall plates 1a and having front, rear and upper surfaces opened. . The open shield machine 1 is formed with the tip ends of the side wall plate 1a and the bottom plate 1b as blades, and a partition wall 3 is formed at the center of the side wall plate 1a.
Further, the propulsion jacks 2 are arranged rearward of the partition wall 3 and are arranged side by side in the vertical direction.
【0002】図示は省略するが、発進坑内にこのオープ
ンシールド機1を設置して、シールド機1の推進ジャッ
キ2を伸長して発進坑内の反力壁に反力をとってシール
ド機1を前進させ、地下構造物を形成する第1番目のコ
ンクリート函体4を上方から吊り降し、シールド機1の
テール部1c内で縮めた推進ジャッキ2の後方にセット
する。推進ジャッキ2と反力壁の間にはストラットを配
設して適宜間隔調整をする。また、発進坑は土留壁で構
成し、オープンシールド機1を発進させるにはこの土留
壁を一部鏡切りするが、必要に応じて薬液注入等で発進
坑の前方部分に地盤改良を施しておくこともある。Although not shown, the open shield machine 1 is installed in the starting pit, the propulsion jack 2 of the shield machine 1 is extended, and a reaction force is applied to the reaction wall in the starting pit to advance the shield machine 1. Then, the first concrete box 4 that forms the underground structure is suspended from above and set behind the propulsion jack 2 that is contracted in the tail portion 1c of the shield machine 1. Struts are arranged between the propulsion jack 2 and the reaction wall to adjust the distance as appropriate. In addition, the start pit is composed of a retaining wall, and in order to start the open shield machine 1, a part of this retaining wall is cut off with a mirror. However, if necessary, ground improvement is applied to the front part of the starting pit by injecting a chemical solution or the like. Sometimes I leave it.
【0003】ショベル等の掘削機9でオープンシールド
機1の前面又は上面から土砂を掘削しかつ排土する。こ
の排土工程と同時またはその後に推進ジャッキ2を伸長
してシールド機1を前進させる。この前進工程の場合、
コンクリート函体4の前にはボックス鋼材又は型鋼を用
いた枠体よりなる押角8を配設する。そして前記第1番
目のコンクリート函体4の前に第2番目のコンクリート
函体4をシールド機1のテール部1c内に吊り降す。以
下、同様の排土工程、前進工程、コンクリート函体4の
セット工程を適宜繰返して、順次コンクリート函体4を
オープンシールド機1の前進に伴い縦列に地中に残置
し、さらにこのコンクリート函体4の上面に埋戻し5を
施す。An excavator 9 such as a shovel excavates and discharges earth and sand from the front surface or the upper surface of the open shield machine 1. Simultaneously with or after this soil discharging step, the propulsion jack 2 is extended to advance the shield machine 1. For this forward step,
In front of the concrete box 4, a pushing angle 8 made of a frame body made of box steel or shaped steel is provided. Then, the second concrete box 4 is suspended in front of the first concrete box 4 in the tail portion 1c of the shield machine 1. Hereinafter, the same soil discharging process, advancing process, and setting process of the concrete box 4 are appropriately repeated to sequentially leave the concrete box 4 in the ground in parallel with the advancing of the open shield machine 1, and further to this concrete box. Backfilling 5 is applied to the upper surface of 4.
【0004】前記隔壁3はこれがあると、オープンシー
ルド機1の掘進時に土砂を圧密し、掘削機9での掘削・
排土を容易とすることができる。If the partition wall 3 is provided, it consolidates the earth and sand when the open shield machine 1 is excavated, and the excavator 9 excavates and
It is possible to easily remove soil.
【0005】なお、コンクリート函体4をシールド機1
のテール部1c内に吊り降す際には、コンクリートブロ
ック等による高さ調整材7をコンクリート函体4下に配
設し、このテール部1c内でコンクリート函体4の左右
および下部の空隙にグラウト材6を充填する。The concrete box 4 is shielded by the shield machine 1
When suspending in the tail portion 1c of, the height adjusting material 7 such as a concrete block is arranged below the concrete box 4, and in the tail portion 1c, in the voids on the left and right sides and the lower portion of the concrete box 4. The grout material 6 is filled.
【0006】このようにして、オープンシールド機1が
到達坑まで達したならばこれを撤去して工事を完了す
る。In this way, when the open shield machine 1 reaches the reaching pit, it is removed and the construction is completed.
【0007】[0007]
【発明が解決しようとする課題】ところでオープンシー
ルド工法で河川の改修工事を行うことがある。それまで
地上に出ていた水路を地下に配置変更するため、今まで
の水路を途中で堰き止め、その部分を取り込むようにこ
の堰き止めた水無し水路に沿って掘削し、新たな水路と
しての地中構造物を施工するものである。[Problems to be Solved by the Invention] By the way, there is a case where a river is repaired by the open shield method. In order to relocate the canal that had been on the ground up to that time, the existing canal was blocked halfway and excavated along this damned waterless canal to capture that part, creating a new canal. Underground structures are constructed.
【0008】このような河川の改修工事で工期中に集中
豪雨などがあると、堰き止めた水無し水路に流れ込んだ
水が流水となって、オープンシールド機1に流れ込み、
さらに隔壁3で阻止されてこれが、オープンシールド機
1の前部に溜まり、かつ、溢れ出して非常に危険な状態
を惹起するおそれがある。If there is a heavy rain during the construction period due to such river repair work, the water flowing into the waterless canal that has been blocked becomes running water and flows into the open shield machine 1.
Further, it is blocked by the partition wall 3, and this may be accumulated in the front portion of the open shield machine 1 and overflow to cause a very dangerous state.
【0009】本発明の目的は前記従来例の不都合を解消
し、集中豪雨時などにオープンシールド機に流れ込む水
を上手く後方に送り、適切な処理を行うことができるオ
ープンシールド工法およびオープンシールド機を提供す
ることにある。An object of the present invention is to solve the problems of the conventional example, and to provide an open shield construction method and an open shield machine capable of appropriately sending water flowing into the open shield machine to the rear during a heavy rainfall to perform an appropriate treatment. To provide.
【0010】[0010]
【課題を解決するための手段】本発明は前記目的を達成
するため、左右の側壁板とこれら側壁板に連結する底板
とからなる前面、後面及び上面を開口したシールド機
で、前記側壁板と底板の先端を刃口として形成し、また
側壁板の中央に隔壁を設け、さらに、この隔壁よりも後
方に推進ジャッキを後方に向け上下に並べて配設したオ
ープンシールド機の前面又は上面開口より前方の土砂を
掘削排土する工程と、推進ジャッキを伸長してコンクリ
ート函体を反力にしてシールド機を前進させる工程と、
シールド機のテール部内で縮めた推進ジャッキの後方に
新たなコンクリート函体を上方から吊り降してセットす
る工程とを適宜繰り返して順次コンクリート函体を縦列
に埋設するオープンシールド工法において、オープンシ
ールド機は隔壁を前方に傾倒自在なものとし、通常施工
時にはこの隔壁は起立させておき、前方からオープンシ
ールド機に流水がある場合は、隔壁を傾倒させて左右側
壁板と該隔壁で樋を構成し、流水をオープンシールド機
内を通し、後方に送ることを要旨とするものである。In order to achieve the above object, the present invention is a shield machine having left and right side wall plates and a bottom plate connected to these side wall plates, the front and rear surfaces of which are open. The tip of the bottom plate is formed as a blade opening, a partition wall is provided in the center of the side wall plate, and further, the propulsion jacks are arranged rearward of the partition wall and arranged vertically side by side. The step of excavating and discharging the earth and sand, and the step of extending the propulsion jack and making the concrete box a reaction force to advance the shield machine,
In the open shield construction method of sequentially burying concrete boxes in parallel in a row by appropriately repeating the process of suspending and setting a new concrete box from the top behind the propulsion jack that has been compressed in the tail part of the shield machine. Shall be able to tilt forward, and this partition should be erected during normal construction.If there is running water in the open shield machine from the front, the partition should be tilted to form a gutter with the left and right side wall plates and the partition. The main idea is to send running water backward through the inside of the open shield machine.
【0011】[0011]
【作用】本発明によれば、集中豪雨時などで前方からオ
ープンシールド機に流水がある場合は、隔壁を傾倒させ
て左右側壁板と該隔壁で樋を構成し、流水をオープンシ
ールド機内を通し、後方に送ることができるので、水が
オープンシールド機の前部に溜まり、かつ、溢れ出して
非常に危険な状態を惹起することを回避できる。According to the present invention, when there is running water from the front in the open shield machine due to heavy rainfall, the partition walls are tilted to form a gutter by the left and right side wall plates and the partition walls, and the running water is passed through the open shield machine. Since the water can be sent to the rear, it is possible to prevent water from collecting in the front part of the open shield machine and overflowing to cause a very dangerous state.
【0012】[0012]
【実施例】以下、図面について本発明の実施例を詳細に
説明する。図1は本発明のオープンシールド工法で使用
するオープンシールド機の1実施例を示す縦断側面図、
図2は同上平面図、図3は同上正面図で前記従来例を示
す図5と同一構成要素には同一参照符号を付したもので
ある。Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a vertical sectional side view showing an embodiment of an open shield machine used in the open shield construction method of the present invention,
2 is a plan view of the same as above, and FIG. 3 is a front view of the same as above, in which the same components as those in FIG.
【0013】本発明のオープンシールド機1も、左右の
側壁板1aとこれら側壁板1aに連結する底板1bとか
らなる前面、後面及び上面を開口したシールド機で、側
壁板1aと底板1bの先端を刃口として形成し、また側
壁板1aの中央に隔壁3を設け、さらに、この隔壁3よ
りも後方に推進ジャッキ2を後方に向け上下に並べて配
設する点で基本的には変わりはない。The open shield machine 1 of the present invention is also a shield machine having left and right side wall plates 1a and a bottom plate 1b connected to the side wall plates 1a and having front, rear and upper surfaces opened, and the tip ends of the side wall plates 1a and 1b. Is basically the same in that the partition wall 3 is formed in the center of the side wall plate 1a, and the propulsion jacks 2 are arranged rearward of the partition wall 3 in the vertical direction. .
【0014】本発明は前記隔壁3はその下端を底板1b
から立上げた基板10に蝶番11を介して結合し、前方に傾
倒自在なものとした。In the present invention, the lower end of the partition wall 3 is a bottom plate 1b.
It was connected to the board 10 which was launched from above via a hinge 11 so that it could be tilted forward.
【0015】図中12はオープンシールド機1内に設ける
枠体であるが、該枠体12に一端をピン結合した油圧シリ
ンダー13の他端を隔壁3にピン結合し、この油圧シリン
ダー13で隔壁3を吊支する。Reference numeral 12 in the drawing denotes a frame body provided in the open shield machine 1. The hydraulic cylinder 13 having one end pin-coupled to the frame body 12 has the other end pin-coupled to the partition wall 3, and the hydraulic cylinder 13 partitions the partition wall. Suspend 3.
【0016】なお、隔壁3はその左右に側壁3aを有す
る断面コ字形のものとしてもよく、該側壁3aが左右の
側壁板1aの内側に接合する。The partition wall 3 may have a U-shaped cross section having side walls 3a on its left and right sides, and the side walls 3a are joined to the inside of the left and right side wall plates 1a.
【0017】また、前記基板10はその前面を下方末広が
りの傾斜面14とし、この傾斜面14は底板1bの先端を刃
口部として一体になるものとする。The front surface of the substrate 10 is an inclined surface 14 which spreads downward and the inclined surface 14 is integrated with the tip of the bottom plate 1b as a blade portion.
【0018】次に、このようなオープンシールド機1を
用いた本発明のオープンシールド工法について説明す
る。Next, the open shield construction method of the present invention using such an open shield machine 1 will be described.
【0019】図示は省略するが、発進坑内にこのオープ
ンシールド機1を設置して、シールド機1の推進ジャッ
キ2を伸長して発進坑内の反力壁に反力をとってシール
ド機1を前進させ、地下構造物を形成する第1番目のコ
ンクリート函体4を上方から吊り降し、シールド機1の
テール部1c内で縮めた推進ジャッキ2の後方にセット
する。推進ジャッキ2と反力壁の間にはストラットを配
設して適宜間隔調整をする。また、発進坑は土留壁で構
成し、オープンシールド機1を発進させるにはこの土留
壁を一部鏡切りするが、必要に応じて薬液注入等で発進
坑の前方部分に地盤改良を施しておくこともある。Although not shown, the open shield machine 1 is installed in the starting pit, the propulsion jack 2 of the shield machine 1 is extended, and a reaction force is applied to the reaction wall in the starting pit to advance the shield machine 1. Then, the first concrete box 4 forming the underground structure is suspended from above and set behind the propulsion jack 2 which is contracted in the tail portion 1c of the shield machine 1. Struts are arranged between the propulsion jack 2 and the reaction wall to adjust the distance as appropriate. In addition, the start pit is composed of a retaining wall, and in order to start the open shield machine 1, a part of this retaining wall is cut off with a mirror. However, if necessary, ground improvement is applied to the front part of the starting pit by injecting a chemical solution or the like. Sometimes I leave it.
【0020】ショベル等の掘削機でオープンシールド機
1の前面又は上面から土砂を掘削しかつ排土する。この
場合、油圧シリンダー13は縮め、隔壁3は起立させた状
態を保つ。隔壁3はオープンシールド機1の前進時に土
砂を圧密し、掘削機での掘削・排土を容易とすることが
できる。An excavator such as a shovel excavates earth and sand from the front surface or the upper surface of the open shield machine 1 and discharges it. In this case, the hydraulic cylinder 13 is contracted and the partition wall 3 is kept in the upright state. The partition wall 3 can consolidate the earth and sand when the open shield machine 1 moves forward, and can facilitate excavation and earth removal by the excavator.
【0021】排土工程と同時またはその後に推進ジャッ
キ2を伸長してシールド機1を前進させる。この前進工
程の場合、コンクリート函体4の前にはボックス鋼材又
は型鋼を用いた枠体よりなる押角8を配設する。そして
前記第1番目のコンクリート函体4の前に第2番目のコ
ンクリート函体4をシールド機1のテール部1c内に吊
り降す。以下、同様の排土工程、前進工程、コンクリー
ト函体4のセット工程を適宜繰返して、順次コンクリー
ト函体4をオープンシールド機1の前進に伴い縦列に地
中に残置し、さらにこのコンクリート函体4の上面に埋
戻しを施す。Simultaneously with or after the earth discharging process, the propulsion jack 2 is extended to advance the shield machine 1. In the case of this advancing process, a pushing angle 8 made of a frame body made of box steel or shaped steel is arranged in front of the concrete box 4. Then, the second concrete box 4 is suspended in front of the first concrete box 4 in the tail portion 1c of the shield machine 1. Hereinafter, the same soil discharging step, advancing step, and setting step of the concrete box 4 are appropriately repeated to sequentially leave the concrete box 4 in the ground in a row along with the forward movement of the open shield machine 1, and further to this concrete box. Backfill is applied to the upper surface of No. 4.
【0022】以上が通常の使用法であるが、図4に示す
ように河川の改修工事として、それまで地上に出ていた
水路を地下に配置変更するため、今までの既設水路を途
中で堰き止め、その部分を取り込むようにこの堰き止め
た水無し水路15に沿ってオープンシールド機1を掘進さ
せることがある。Although the above is the usual use, as shown in FIG. 4, as the river improvement work, the existing water canal was shunted along the way to relocate the water canal that had been on the ground up to that time. In some cases, the open shield machine 1 may be dug along the waterless water channel 15 that has been stopped so as to take in that portion.
【0023】このような河川の改修工事で工期中に集中
豪雨などがあると、油圧シリンダー13を伸長させて隔壁
3を傾倒させる。このようにすれば、隔壁3と側壁板1
aとで樋を構成し、水無し水路15に流れ込んだ流水をオ
ープンシールド機1内を通し、かつ、コンクリート函体
4内を通して後方に送ることができる。If heavy rain or the like occurs during the construction work of the river repair work, the hydraulic cylinder 13 is extended to tilt the partition wall 3. In this way, the partition wall 3 and the side wall plate 1
It is possible to form a gutter with a and to flow the running water flowing into the waterless water channel 15 through the open shield machine 1 and the concrete box 4 to the rear.
【0024】[0024]
【発明の効果】以上述べたような本発明のオープンシー
ルド工法およびオープンシールド機は、集中豪雨時など
にオープンシールド機に流れ込む水を上手く後方に送
り、適切な処理を行うことができるものである。EFFECTS OF THE INVENTION The open shield construction method and open shield machine of the present invention as described above are capable of appropriately sending the water flowing into the open shield machine to the rear side in the case of heavy rainfall and performing an appropriate treatment. .
【図1】本発明のオープンシールド工法で使用するオー
プンシールド機の1実施例を示す縦断側面図である。FIG. 1 is a vertical sectional side view showing an embodiment of an open shield machine used in an open shield construction method of the present invention.
【図2】本発明のオープンシールド工法で使用するオー
プンシールド機の1実施例を示す平面図である。FIG. 2 is a plan view showing an embodiment of an open shield machine used in the open shield construction method of the present invention.
【図3】本発明のオープンシールド工法で使用するオー
プンシールド機の1実施例を示す正面図である。FIG. 3 is a front view showing an embodiment of an open shield machine used in the open shield construction method of the present invention.
【図4】本発明のオープンシールド工法を示す縦断側面
図である。FIG. 4 is a vertical sectional side view showing an open shield construction method of the present invention.
【図5】従来のオープンシールド工法の概要を示す縦断
側面図である。FIG. 5 is a vertical sectional side view showing an outline of a conventional open shield method.
1…オープンシールド機 1a…側壁板 1b…底板 1c…テール部 2…推進ジャッキ 3…隔壁 3a…側壁 4…コンクリート函体 4a…左側板 4b…右側板 4c…上床板 4d…下床板 5…埋戻し 6…グラウト材 7…高さ調整材 8…押角 9…掘削機 10…基板 11…蝶番 12…枠体 13…油圧シリンダー 14…傾斜面 15…水無し水路 1 ... Open shield machine 1a ... Side wall plate 1b ... Bottom plate 1c ... Tail part 2 ... Propulsion jack 3 ... Partition wall 3a ... Side wall 4 ... Concrete box 4a ... Left side plate 4b ... Right side plate 4c ... Upper floor plate 4d ... Lower floor plate 5 ... Buried Return 6 ... Grout material 7 ... Height adjustment material 8 ... Push angle 9 ... Excavator 10 ... Substrate 11 ... Hinge 12 ... Frame 13 ... Hydraulic cylinder 14 ... Slope 15 ... Waterless channel
Claims (3)
底板とからなる前面、後面及び上面を開口したシールド
機で、前記側壁板と底板の先端を刃口として形成し、ま
た側壁板の中央に隔壁を設け、さらに、この隔壁よりも
後方に推進ジャッキを後方に向け上下に並べて配設した
オープンシールド機の前面又は上面開口より前方の土砂
を掘削排土する工程と、推進ジャッキを伸長してコンク
リート函体を反力にしてシールド機を前進させる工程
と、シールド機のテール部内で縮めた推進ジャッキの後
方に新たなコンクリート函体を上方から吊り降してセッ
トする工程とを適宜繰り返して順次コンクリート函体を
縦列に埋設するオープンシールド工法において、オープ
ンシールド機は隔壁を前方に傾倒自在なものとし、通常
施工時にはこの隔壁は起立させておき、前方からオープ
ンシールド機に流水がある場合は、隔壁を傾倒させて左
右側壁板と該隔壁で樋を構成し、流水をオープンシール
ド機内を通し、後方に送ることを特徴とするオープンシ
ールド工法。1. A shield machine comprising left and right side wall plates and a bottom plate connected to the side wall plates, the front face, the rear face and the upper face of which are open, and the tip ends of the side wall plate and the bottom plate are formed as blades. A bulkhead is installed in the center, and the steps of excavating and discharging earth and sand in front of the front or top opening of the open shield machine, in which the propulsion jacks are arranged rearward of the bulkhead and arranged side by side, and the propulsion jack is extended. Repeat the process of moving the shield machine forward by using the concrete box as a reaction force and the step of suspending and setting a new concrete box from the top behind the propulsion jack contracted in the tail part of the shield machine. In the open shield construction method in which concrete boxes are sequentially buried in a vertical line, the open shield machine shall be able to tilt the bulkhead forward, and during normal construction this bulkhead is When the open shield machine is standing upright and there is running water from the front, the partition walls are tilted to form a gutter with the left and right side wall plates and the partition walls, and the running water is sent through the open shield machine and sent to the rear. Open shield construction method.
底板とからなる前面、後面及び上面を開口したシールド
機で、前記側壁板と底板の先端を刃口として形成し、ま
た側壁板の中央に隔壁を設け、さらに、この隔壁よりも
後方に推進ジャッキを後方に向け上下に並べて配設した
オープンシールド機において、隔壁は下部を蝶番結合と
して、前方に傾倒自在としたことを特徴とするオープン
シールド機。2. A shield machine comprising left and right side wall plates and a bottom plate connected to the side wall plates, the front face, the rear face and the top face of which are opened, and the tip ends of the side wall plate and the bottom plate are formed as blades. In an open shield machine in which a partition wall is provided in the center, and propulsion jacks are arranged rearward of this partition wall in a vertical direction, the partition wall is hinged at the bottom, and is tiltable forward. Open shield machine.
項2記載のオープンシールド機。3. The open shield machine according to claim 2, wherein the partition wall is suspended by a hydraulic cylinder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4335641A JPH0768865B2 (en) | 1992-11-20 | 1992-11-20 | Open shield method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4335641A JPH0768865B2 (en) | 1992-11-20 | 1992-11-20 | Open shield method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06158993A true JPH06158993A (en) | 1994-06-07 |
JPH0768865B2 JPH0768865B2 (en) | 1995-07-26 |
Family
ID=18290875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4335641A Expired - Lifetime JPH0768865B2 (en) | 1992-11-20 | 1992-11-20 | Open shield method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0768865B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007051450A (en) * | 2005-08-17 | 2007-03-01 | Tomec Corp | Structure of open shield machine |
JP2010248723A (en) * | 2009-04-13 | 2010-11-04 | Makoto Uemura | Open shield machine |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149475A (en) * | 1984-08-17 | 1986-03-11 | Matsushita Electronics Corp | Ultraviolet-ray irradiation type semiconductor device |
JPH0339521A (en) * | 1989-07-04 | 1991-02-20 | Koichi Uemura | Open shield method |
-
1992
- 1992-11-20 JP JP4335641A patent/JPH0768865B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149475A (en) * | 1984-08-17 | 1986-03-11 | Matsushita Electronics Corp | Ultraviolet-ray irradiation type semiconductor device |
JPH0339521A (en) * | 1989-07-04 | 1991-02-20 | Koichi Uemura | Open shield method |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007051450A (en) * | 2005-08-17 | 2007-03-01 | Tomec Corp | Structure of open shield machine |
JP4708119B2 (en) * | 2005-08-17 | 2011-06-22 | 株式会社トーメック | Structure of open shield machine |
JP2010248723A (en) * | 2009-04-13 | 2010-11-04 | Makoto Uemura | Open shield machine |
Also Published As
Publication number | Publication date |
---|---|
JPH0768865B2 (en) | 1995-07-26 |
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