JPH06127951A - Device for producing porous glass preform - Google Patents
Device for producing porous glass preformInfo
- Publication number
- JPH06127951A JPH06127951A JP30753492A JP30753492A JPH06127951A JP H06127951 A JPH06127951 A JP H06127951A JP 30753492 A JP30753492 A JP 30753492A JP 30753492 A JP30753492 A JP 30753492A JP H06127951 A JPH06127951 A JP H06127951A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- burner
- porous glass
- glass
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は多孔質ガラス母材の製造
方法、特には外付けＣＶＤ法で大型の光ファイバ用母材
を製造するための多孔質ガラス母材を長期間、安定して
製造する方法およびその製造装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a porous glass preform, particularly a porous glass preform for producing a large-sized optical fiber preform by an external CVD method, for a long period of time. The present invention relates to a manufacturing method and a manufacturing apparatus thereof.
【０００２】[0002]
【従来の技術】光ファイバ母材を製造するための多孔質
ガラス母材の製造方法としては、外付けＣＶＤ法が知ら
れている。この外付けＣＶＤ法は例えば図２、図３に示
したように、気体状ガラス原料を酸水素火炎バーナー12
に導入し、その火炎加水分解反応で生成したガラス微粒
子を回転しているコア用ガラスロッド11に吹き付け、該
バーナーを軸方向に平行に往復運動させることによって
シリカ微粒子を一層ずつ堆積させて多孔質ガラス母材13
を作製するものである。2. Description of the Related Art An external CVD method is known as a method for producing a porous glass preform for producing an optical fiber preform. In this external CVD method, for example, as shown in FIGS. 2 and 3, a gaseous glass raw material is used as an oxyhydrogen flame burner 12
Introduced into, and spraying the glass fine particles produced by the flame hydrolysis reaction to the rotating glass rod 11 for the core, by reciprocating the burner in parallel to the axial direction, silica fine particles are deposited one by one to form a porous film. Glass base material 13
Is to be manufactured.
【０００３】そして、この反応の際生じた排気ガスの排
出方法としては、排気を効率良く行うため、該バーナー
に対向する位置に該バーナーと同期して左右に往復運動
する排気口14を設けるのが一般的であり、除害塔へ排ガ
スを導く排気固定管16との連結には耐熱製フレキシブル
ホース15が用いられており、この排気口はサポーター17
で支持されている。（特開平3-54124 号公報参照）As a method of discharging the exhaust gas generated during this reaction, an exhaust port 14 that reciprocates left and right in synchronization with the burner is provided at a position facing the burner in order to efficiently perform the exhaust. A heat resistant flexible hose 15 is used to connect with an exhaust fixed pipe 16 that guides the exhaust gas to the abatement tower, and this exhaust port is supported by a supporter 17
Supported by. (See Japanese Patent Laid-Open No. 3-54124)
【０００４】[0004]
【発明が解決しようとする課題】しかし、この耐熱製フ
レキシブルホースはその柔軟性により全体的になめらか
に運動を行なうとしても長距離の移動には不適である
し、排気口および固定排気管との接続部周辺では局所的
に大きな応力を受け、この応用は固定排気管16が中央に
あり、排気管14が両末端にある時に最大となり、この排
気管14が中央にあるときに最小になるけれども、この排
気管の往復ごとに過大な変形を受けるためにフレキシブ
ルホースの劣化が著しく、事実、該ホースの破損箇所は
排気口または排気固定管付近に集中している。このた
め、該耐熱製フレキシブルホースについては、これに無
理な屈曲を与えないように、該ホースを長くしたり、排
気固定管の位置を変更したりする方法も行われている
が、これには装置が大型になってしまうという不利が生
じる。However, this heat-resistant flexible hose is unsuitable for long-distance movement, even if it moves smoothly as a whole due to its flexibility, and it is not suitable for exhaust ports and fixed exhaust pipes. Large local stresses around the connection, this application is maximum when the fixed exhaust pipe 16 is in the center and the exhaust pipe 14 is at both ends, and is minimum when this exhaust pipe 14 is in the center. The flexible hose is significantly deteriorated due to the excessive deformation during each reciprocation of the exhaust pipe. In fact, the damaged parts of the hose are concentrated near the exhaust port or the exhaust fixed pipe. For this reason, with respect to the heat-resistant flexible hose, a method of lengthening the hose or changing the position of the exhaust fixed pipe is also performed so as not to give excessive bending to the hose. The disadvantage is that the device becomes large.
【０００５】[0005]
【課題を解決するための手段】本発明はこのような不
利、欠点を解決した多孔質ガラス母材の製造方法および
製造装置に関するものであり、この製造方法は気体状ガ
ラス原料をバーナーに導入し、火炎加水分解で生成した
ガラス微粒子を回転している担体上に吹き付け、該バー
ナーを担体軸方向に平行に往復移動させるとともに、該
バーナーと対向する位置に排気口を設け、該バーナーの
移動と同期して左右に往復運動させながら、該ガラス微
粒子を該担体上に一層ずつ堆積させて多孔質ガラス母材
を製造する装置において、該排気口と排気固定管との間
を無接触シールにより連絡してなることを特徴とするも
のである。The present invention relates to a method and an apparatus for producing a porous glass preform which solves the above disadvantages and drawbacks. This production method introduces a gaseous glass raw material into a burner. The fine glass particles produced by flame hydrolysis are sprayed onto a rotating carrier, the burner is reciprocated in parallel to the carrier axis direction, and an exhaust port is provided at a position facing the burner to move the burner. In a device for producing a porous glass preform by depositing the glass fine particles one by one on the carrier while reciprocally moving to the left and right in synchronization, the exhaust port and the exhaust fixed pipe are connected by a non-contact seal. It is characterized by what is done.
【０００６】すなわち、本発明者らは外付けＣＶＤ法で
大型の多孔質ガラス母材を長期間、安定して製造する方
法について種々検討した結果、従来法では排気口と排気
固定管との間を単純に耐熱性フレキシブルホースで連結
していたが、これをサイズの異なる２つの金属製の排気
管を組み合わせたものとし、この片方を固定管とし、他
方の管をこの固定管の中でスライドさせるようにしたと
ころ、この耐久性が半永久的となり、またこれらが無接
触シールとなるために反応室内にガラス微粒子を含む排
ガスが飛散することがないし、排気効率も良好となるの
で、目的とする多孔質ガラス母材を高品質かつ低価格で
安定して長期間製造することができることを見出して本
発明を完成させた。以下にこれをさらに詳述する。That is, the present inventors have conducted various studies on a method for stably manufacturing a large-sized porous glass base material for a long period of time by the external CVD method, and as a result, in the conventional method, the space between the exhaust port and the exhaust fixed tube is Was simply connected with a heat-resistant flexible hose, but this was made by combining two metal exhaust pipes of different sizes, one of which was used as a fixed pipe, and the other pipe was slid in this fixed pipe. By doing so, the durability becomes semi-permanent, and since these become non-contact seals, exhaust gas containing glass fine particles does not scatter in the reaction chamber, and the exhaust efficiency becomes good, so the purpose is The present invention has been completed by finding that it is possible to stably manufacture a porous glass preform with high quality and low price for a long period of time. This will be described in more detail below.
【０００７】[0007]
【作用】本発明による多孔質ガラス母材の製造装置は外
付けＣＶＤ法において、排気口をバーナーと対向する位
置にバーナーと同期して左右に往復運動できるように設
けたものであるが、これは排気口と排気固定管との間を
無接触シールにより連結してなることを特徴とするもの
であり、これによればこの排気管の耐久性が半永久的と
なり、排気効率もよくなるので、目的とする多孔質ガラ
ス母材を安価に、かつ安定して効率よく製造することが
できるという有利性が与えられる。In the external CVD method, the porous glass preform manufacturing apparatus according to the present invention is provided with the exhaust port at a position facing the burner so as to reciprocate left and right in synchronization with the burner. Is characterized in that the exhaust port and the exhaust fixed pipe are connected by a non-contact seal, which makes the exhaust pipe semi-permanent and improves exhaust efficiency. The advantage that the porous glass base material can be manufactured inexpensively, stably and efficiently is provided.
【０００８】本発明による多孔質ガラス母材の製造装置
は外付けＣＶＤ法によるものであり、これは図１に示し
たようにゲルマニウムをドープしたコア用石英ガラスロ
ッド１の下に酸水素火炎バーナー２を設け、これに四塩
化けい素などのシラン化合物を供給し、これらの火炎加
水分解で発生したシリカ微粒子をコア用石英ガラスロッ
ドに付着、堆積させ、酸水素火炎バーナー２をコア用石
英ガラスロッドの軸方向に平行に往復運動させることに
よってこのシリカ微粒子の堆積で得られる多孔質ガラス
母材を石英ガラスロッドの軸方向に平均に一層づつ堆積
して多孔質ガラス母材３を作るようにされている。The apparatus for producing a porous glass preform according to the present invention is an external CVD method, which is an oxyhydrogen flame burner under a germanium-doped quartz glass rod 1 for a core as shown in FIG. 2 is provided, and a silane compound such as silicon tetrachloride is supplied thereto, and silica fine particles generated by flame hydrolysis of these are attached to and deposited on the quartz glass rod for the core, and the oxyhydrogen flame burner 2 is used for the quartz glass for the core. By making reciprocating motion parallel to the axial direction of the rod, the porous glass base materials obtained by the deposition of the silica fine particles are deposited one by one in the axial direction of the quartz glass rod to form the porous glass base material 3. Has been done.
【０００９】この場合、酸水素火炎バーナーから生ずる
未反応ガスなどからなる排気ガスはこの酸水素火炎バー
ナー２の直上に設けられ、酸水素火炎バーナーと同様に
平行移動する排気口４から排気されるが、この排気口４
からの排気は排気口４に連結されている金属製の管８を
経て金属製の排気固定管９から外部に排出される。ま
た、この金属製の排気管８と金属製の排気固定管９はサ
イズの異なるものとされており、排気管８は排気固定管
９の中をスライスするようにされており、これらは無接
触シールで連絡されるようになるが、これによれば金属
製排気管の前後動が速やかに何の抵抗も行われるので、
ガラス微粒子を含む未反応ガスなどからなる排気ガスが
反応室内に飛散せず、この排気を連続的に容易に、かつ
スムースに行なうことができるし、この排気機構は耐久
性が半永久的になり、したがって目的とする多孔質ガラ
ス母材を容易に、かつ安価に、安定して長期間製造する
ことができるという有利性が与えられる。In this case, the exhaust gas composed of unreacted gas generated from the oxyhydrogen flame burner is provided immediately above the oxyhydrogen flame burner 2 and is exhausted from the exhaust port 4 which moves in parallel like the oxyhydrogen flame burner. But this exhaust port 4
The exhaust gas from the exhaust gas passes through a metal pipe 8 connected to the exhaust port 4 and is exhausted to the outside from a metal exhaust fixed pipe 9. Further, the exhaust pipe 8 made of metal and the exhaust fixed pipe 9 made of metal are different in size, and the exhaust pipe 8 is configured to slice the inside of the exhaust fixed pipe 9 so that they are not in contact with each other. It comes to be contacted by a seal, but according to this, the back-and-forth movement of the metal exhaust pipe will quickly make no resistance, so
Exhaust gas consisting of unreacted gas containing glass particles does not scatter in the reaction chamber, and this exhaust can be continuously and easily performed smoothly, and the exhaust mechanism has semi-permanent durability. Therefore, there is an advantage that the desired porous glass preform can be easily and inexpensively and stably manufactured for a long period of time.
【００１０】なお、この排気管８の外径と金属製の排気
固定管９とのクリアランス７は１〜７mm程度とすればよ
く、これによればクリアランスから吸い込まれる空気量
は従来の５％増以内に納めることができるので、この効
率的な排気が妨げられるおそれはない。また、この排気
管８、排気固定量９はいずれも耐熱性フレキシブルホー
スで覆ってもよく、これによればそのクリアランスから
吸い込まれる空気量を最低限に抑えることができる。The clearance 7 between the outer diameter of the exhaust pipe 8 and the fixed exhaust pipe 9 made of metal may be about 1 to 7 mm, which increases the amount of air sucked from the clearance by 5% compared to the conventional case. This efficient exhaust is not impeded because it can be placed within. Further, both the exhaust pipe 8 and the exhaust fixed amount 9 may be covered with a heat resistant flexible hose, which can minimize the amount of air sucked from the clearance.
【００１１】[0011]
【実施例】つぎに本発明の実施例、比較例をあげる。 実施例 図１に示した外付けＣＶＤ装置に直径が17.7mmφで長さ
が620mmLのゲルマニウムをドープしたコア用石英ガラス
ロッド１を取りつけ、このガラスロッド１の下側に酸水
素火炎バーナー２を配置すると共に、その上方に酸水素
火炎バーナー２と対向して金属製排気口４を配置してこ
れを酸水素火炎バーナー２と同期して移動するように
し、これにサポーター（図３のサポーター17参照）を取
付けた。EXAMPLES Next, examples and comparative examples of the present invention will be described. Example A quartz glass rod 1 for a core doped with germanium having a diameter of 17.7 mm and a length of 620 mmL is attached to the external CVD apparatus shown in FIG. 1, and an oxyhydrogen flame burner 2 is arranged below the glass rod 1. At the same time, a metal exhaust port 4 is disposed above it so as to face the oxyhydrogen flame burner 2 so as to move in synchronization with the oxyhydrogen flame burner 2, and a supporter (see supporter 17 in FIG. 3). ) Was installed.
【００１２】また、この排気口４には第１図に示したよ
うに外径 139.8mm、内径 134.2mmで全長が 1,770mmであ
る図示のような形状のステンレス製の排気管をフランジ
で接続し、これを外径 155.4mm、内径 149.8mmで全長が
1,770mmであるステンレス製の排気固定管９の中に挿入
したが、この排気管８と排気固定管９は排気管８の往復
運動中は互いに接続しないように無接触シールするよう
にした。As shown in FIG. 1, a stainless steel exhaust pipe having an outer diameter of 139.8 mm, an inner diameter of 134.2 mm and a total length of 1,770 mm is connected to the exhaust port 4 with a flange. The outer diameter is 155.4 mm, the inner diameter is 149.8 mm, and the total length is
The exhaust pipe 8 was inserted into a stainless steel exhaust fixed pipe 9 of 1,770 mm, and the exhaust pipe 8 and the exhaust fixed pipe 9 were sealed without contact so as not to be connected to each other during the reciprocating motion of the exhaust pipe 8.
【００１３】ついで、このコア用石英ガラスロッド１を
40rpm で回転させ、酸水素火炎バーナー２に四塩化けい
素20ｇ／分、酸素ガス25リットル／分、水素ガス50リッ
トル／分を供給して点火してこれを往復運動させ、酸水
素火炎中での火炎加水分解で発生したシリカ微粒子をコ
ア用石英ガラスロッド上に堆積させると共に、未反応ガ
スなどの排気ガスを酸水素火炎バーナー２と共に同一速
度で往復運動している排気口４から排気管８、排気固定
管９を経て排気させ、この反応を20時間行なったとこ
ろ、直径 100mmφ、長さ800mmLで重量が4,000gの多孔質
ガラス母材が得られた。Next, the quartz glass rod 1 for core is attached.
Rotate at 40 rpm, supply 20 g / min of silicon tetrachloride, 25 liters / min of oxygen gas and 50 liters / min of hydrogen gas to the oxyhydrogen flame burner 2 and ignite them to make reciprocating motion. Silica fine particles generated by flame hydrolysis of the above are deposited on the quartz glass rod for the core, and exhaust gas such as unreacted gas is reciprocally moved at the same speed with the oxyhydrogen flame burner 2 from the exhaust port 4 to the exhaust pipe 8 Then, the gas was exhausted through the exhaust fixed tube 9, and this reaction was carried out for 20 hours. As a result, a porous glass preform having a diameter of 100 mmφ, a length of 800 mmL and a weight of 4,000 g was obtained.
【００１４】つぎにこの多孔質ガラス母材を電気炉中に
おいて 1,500℃に加熱し、透明ガラス化したところ、直
径58.1mmφの光ファイバ用プリフォームが得られたが、
このプリフォーム中に気泡は全く認められなかったし、
この方法を50回くり返して行なったところ、上記した排
気管８、固定排気管９には何の異常も発生しなかった。Next, when the porous glass preform was heated to 1,500 ° C. in an electric furnace and made into a transparent glass, a preform for an optical fiber having a diameter of 58.1 mmφ was obtained.
No air bubbles were found in this preform,
When this method was repeated 50 times, no abnormality occurred in the exhaust pipe 8 and the fixed exhaust pipe 9 described above.
【００１５】比較例 平行移動する排気口14と中央部にある排気固定管16とを
図２に示したように耐熱性フレキシブルホース15で接続
したほかは実施例と同じ方法で多孔質ガラス母材の製造
を行なったところ、実施例と同じ多孔質ガラス母材を得
ることができたけれども、これを50回くり返して行なっ
たとき、この場合には耐熱性フレキシブルホースが直線
運動だけでなく複雑な動きをするために屈曲疲労がたま
り、50回中４回は途中で損傷してしまい中断するという
ことになった。Comparative Example A porous glass preform was prepared in the same manner as in the example except that the exhaust port 14 that moved in parallel and the exhaust fixed tube 16 in the center were connected by a heat resistant flexible hose 15 as shown in FIG. Although it was possible to obtain the same porous glass preform as in the example, the heat-resistant flexible hose in this case was not only linearly moved but also complicated when it was repeated 50 times. Because of the movements, flexion fatigue accumulated, and it was decided that 4 out of 50 times would be damaged and interrupted halfway.
【００１６】[0016]
【発明の効果】本発明は多孔質ガラス母材の製造装置に
関するものであり、これは前記したように外付けＣＶＤ
法による多孔質ガラス母材の製造方法において、排気口
と排気固定管との間を無接触シールで連結してなること
を特徴とするものであるが、これによれば排気口に接続
されている排気管が排気固定管内をスライド移動するよ
うにされているので、この排気を連続的に容易に、かつ
スムースに行なうことができ、この排気機構は耐久性が
半永久的になるので、目的とする多孔質ガラス母材を容
易に、かつ安価に、安定して長期間製造することができ
るという有利性が与えられる。Industrial Applicability The present invention relates to an apparatus for producing a porous glass base material, which has an external CVD as described above.
The method for producing a porous glass preform by the method is characterized in that the exhaust port and the exhaust fixed pipe are connected by a non-contact seal. According to this method, the exhaust port is connected to the exhaust port. The exhaust pipe that slides in the exhaust fixed pipe can continuously and easily and smoothly perform this exhaust, and the exhaust mechanism has semi-permanent durability. Advantageously, the porous glass base material can be easily and inexpensively and stably manufactured for a long period of time.
【図１】 本発明の多孔質ガラス母材製造装置の縦断面
図を示したものである。FIG. 1 is a vertical sectional view of a porous glass preform manufacturing apparatus of the present invention.
【図２】 従来公知の多孔質ガラス母材製造装置の縦断
面図を示したものである。FIG. 2 is a vertical cross-sectional view of a conventionally known porous glass preform manufacturing apparatus.
【図３】 従来公知の多孔質ガラス母材製造装置の横断
面図を示したものである。FIG. 3 is a cross-sectional view of a conventionally known porous glass preform manufacturing apparatus.
１，11…コア用石英ガラスロッド、２，12…酸水素火炎
バーナー、３，13…多孔質ガラス母材、 ４，14…
排気口、５…排気管、 ６，16…排
気固定管、15…耐熱フレキシブルホース、 17…サポ
ーター。1, 11 ... Quartz glass rod for core, 2, 12 ... Oxyhydrogen flame burner, 3, 13 ... Porous glass base material, 4, 14 ...
Exhaust port, 5 ... Exhaust pipe, 6,16 ... Exhaust fixed pipe, 15 ... Heat resistant flexible hose, 17 ... Supporter.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 平沢 秀夫 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hideo Hirasawa 2-13-1, Isobe, Annaka-shi, Gunma Shin-Etsu Chemical Co., Ltd. Precision Materials Research Laboratory
Claims (1)
炎加水分解で生成したガラス微粒子を回転している担体
上に吹き付け、該バーナーを担体軸方向に平行に往復移
動させるとともに、該バーナーと対向する位置に排気口
を設け、該バーナーの移動と同期して左右に往復運動さ
せながら、該ガラス微粒子を該担体上に一層ずつ堆積さ
せて多孔質ガラス母材を製造する装置において、該排気
口と排気固定管との間を無接触シールにより連結してな
ることを特徴とする多孔質ガラス母材の製造装置。1. A gaseous glass raw material is introduced into a burner, glass fine particles produced by flame hydrolysis are sprayed onto a rotating carrier, and the burner is reciprocally moved in parallel to the carrier axial direction and at the same time as the burner. In an apparatus for manufacturing a porous glass preform by depositing the glass particles one by one on the carrier while reciprocating right and left in synchronism with the movement of the burner by providing exhaust ports at opposite positions, An apparatus for producing a porous glass base material, characterized in that a mouth and an exhaust fixed tube are connected by a non-contact seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30753492A JP3157628B2 (en) | 1992-10-21 | 1992-10-21 | Equipment for manufacturing porous glass base material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30753492A JP3157628B2 (en) | 1992-10-21 | 1992-10-21 | Equipment for manufacturing porous glass base material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06127951A true JPH06127951A (en) | 1994-05-10 |
| JP3157628B2 JP3157628B2 (en) | 2001-04-16 |
Family
ID=17970254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30753492A Expired - Lifetime JP3157628B2 (en) | 1992-10-21 | 1992-10-21 | Equipment for manufacturing porous glass base material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3157628B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003000609A1 (en) * | 2001-06-25 | 2003-01-03 | Pirelli & C. S.P.A. | Device and method for manufacturing a preform for optical fibres by chemical vapour deposition |
| JP2003107208A (en) * | 2001-09-28 | 2003-04-09 | Fujikura Ltd | Manufacturing method for rod lens and the rod lens |
| US7461524B2 (en) | 2001-06-25 | 2008-12-09 | Prysmian Cavi E Sistemi Energia S.R.L. | Device and method for manufacturing a preform for optical fibres by chemical vapour deposition |
-
1992
- 1992-10-21 JP JP30753492A patent/JP3157628B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003000609A1 (en) * | 2001-06-25 | 2003-01-03 | Pirelli & C. S.P.A. | Device and method for manufacturing a preform for optical fibres by chemical vapour deposition |
| US7461524B2 (en) | 2001-06-25 | 2008-12-09 | Prysmian Cavi E Sistemi Energia S.R.L. | Device and method for manufacturing a preform for optical fibres by chemical vapour deposition |
| US8387416B2 (en) | 2001-06-25 | 2013-03-05 | Prysmian Cavi E Sistemi Energia S.R.L. | Device and method for manufacturing a preform for optical fibres by chemical vapour deposition |
| JP2003107208A (en) * | 2001-09-28 | 2003-04-09 | Fujikura Ltd | Manufacturing method for rod lens and the rod lens |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3157628B2 (en) | 2001-04-16 |
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