JPH06124485A - Rotary coating method - Google Patents

Rotary coating method

Info

Publication number
JPH06124485A
JPH06124485A JP27023692A JP27023692A JPH06124485A JP H06124485 A JPH06124485 A JP H06124485A JP 27023692 A JP27023692 A JP 27023692A JP 27023692 A JP27023692 A JP 27023692A JP H06124485 A JPH06124485 A JP H06124485A
Authority
JP
Japan
Prior art keywords
coating
resin
coated
coating method
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27023692A
Other languages
Japanese (ja)
Inventor
Hideo Miyashita
英生 宮下
Shiro Miyata
志郎 宮田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIC Corp
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Dainippon Ink and Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd, Dainippon Ink and Chemicals Co Ltd filed Critical NKK Corp
Priority to JP27023692A priority Critical patent/JPH06124485A/en
Publication of JPH06124485A publication Critical patent/JPH06124485A/en
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To enhance the yield of a spin coating process by a method wherein, even when an excess resin is shaken off by a high-speed rotation after a resin in a definite quantity has been coated, the resin is shaken off uniformly to the outer circumferential direction, a stripe is not caused and the defect of an external appearance is eliminated. CONSTITUTION:In a rotary coating method, a disk-shaped substrate is coated with a paint such as a UV-curing resin or the like by a spin coating method. In the rotary coating method, when a coating operation is finished after a paint in a definite quantity has been coated by a low-speed rotation, a rotation speed is made fast stepwise or continuously and the coating operation is finished. Thereby, when the coating operation is finished after the paint in the definite quantity has been coated at the low-speed rotation, the paint which has been coated with the resin becomes tapered, and the shape of the inner circumferential part of the resin can be made a clean circle because the rotation speed is made fast stepwise or continuously and the coating operation is finished.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、円盤状基板に紫外線硬
化型樹脂等の塗料をスピンコート法により塗布する回転
塗布方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spin coating method for coating a disk-shaped substrate with a coating material such as an ultraviolet curable resin by a spin coating method.

【0002】[0002]

【従来の技術】従来知られている円盤状基板の樹脂被膜
方法は、例えば、光ディスクではグルーブと称される溝
が形成されたポリカーボネート樹脂、ポリメチルメタク
リルレート樹脂、エポキシ樹脂、アモルファスポリオレ
フィン樹脂等の円盤状のプラスチック基板に、グルーブ
が形成された側とは反対側の面にハードコート剤と称さ
れる紫外線硬化型樹脂をスピンコート法により回転塗布
してプラスチック基板全面に均一に行きわたらせた後、
紫外線を照射してハードコート膜を製膜する。
2. Description of the Related Art Conventionally known methods for coating resin on a disk-shaped substrate include, for example, polycarbonate resin having grooves called grooves in optical disks, polymethylmethacrylate resin, epoxy resin, amorphous polyolefin resin, etc. After spin coating a UV-curable resin called a hard coating agent on the disk-shaped plastic substrate on the side opposite to the side where the grooves are formed by spin coating, spread it evenly over the entire surface of the plastic substrate. ,
Ultraviolet rays are irradiated to form a hard coat film.

【0003】次に真空蒸着法やスパッタ法等によりグル
ーブが形成された側に記録膜を製膜して光ディスクを作
製する。この光ディスクの記録膜形成面側に保護コート
剤と称される紫外線硬化型樹脂をスピンコート法により
回転塗布して光ディスク全面に保護膜を製膜していた。
Next, a recording film is formed on the side where the groove is formed by a vacuum vapor deposition method, a sputtering method or the like to manufacture an optical disk. An ultraviolet curable resin called a protective coating agent was spin-coated on the recording film forming surface side of this optical disk by a spin coating method to form a protective film on the entire surface of the optical disk.

【0004】また、コンパクトディスクでは予め所定の
情報信号が刻印された円盤状のプラスチック基板に、情
報信号が刻印されている側の面に真空蒸着法やスパッタ
法により反射膜を製膜して、この反射膜形成面側に保護
コート剤と称される紫外線硬化型樹脂をスピンコート法
により回転塗布してコンパクトディスク全面に保護膜を
製膜していた。
Further, in the case of a compact disc, a reflective film is formed on a disk-shaped plastic substrate on which a predetermined information signal is preliminarily engraved by a vacuum deposition method or a sputtering method on the surface on which the information signal is engraved. An ultraviolet curable resin called a protective coating agent was spin-coated on the reflective film forming surface side by a spin coating method to form a protective film on the entire surface of the compact disc.

【0005】このようにハードコート剤や保護コート剤
等の紫外線硬化型樹脂を円盤状基板にスピンコート法に
より回転塗布する場合には、低速回転時に一定速度で樹
脂を一定位置から一定量円盤状基板に塗布し、塗布終了
後、高速回転させて余分な紫外線硬化型樹脂を振り切っ
て均一な被膜を形成していた。
In this way, when the ultraviolet-curable resin such as the hard coating agent or the protective coating agent is spin-coated on the disk-shaped substrate by the spin coating method, the resin is disk-shaped in a fixed amount from a fixed position at a constant speed during low speed rotation. After coating the substrate, after the coating was completed, it was rotated at a high speed to shake off the excess ultraviolet-curable resin to form a uniform film.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、この方
法では、低速回転時に一定速度で樹脂を一定位置から一
定量円盤状基板に塗布し、そのまま塗布を終了するので
樹脂の塗布終了部分にずれを生じてしまい、一定量塗布
終了後高速回転で余分な樹脂を振り切る時に、前記ずれ
部分の樹脂がその状態で外周方向へ振り切られるために
「すじ」が発生し、そのまま硬化せさると樹脂塗布面に
「すじ」が残こり、外観不良の原因となっていた。
However, according to this method, a certain amount of resin is applied to a disk-shaped substrate from a certain position at a constant speed when rotating at a low speed, and the application is terminated as it is, so that a deviation occurs at the resin application end portion. After a certain amount of coating is applied, when excess resin is shaken off at high speed, the resin in the misaligned part is shaken off toward the outer circumference in that state, causing "streaks", and if it is cured as it is, the resin applied surface "Streaks" were left behind, which was a cause of poor appearance.

【0007】また、「すじ」が発生しても硬化させる前
に十分な時間をとっていれば、この「すじ」は消滅する
が、これでは著しく生産能力が低下してしまう。
Further, even if "streaks" occur, if sufficient time is taken before curing, the "streaks" disappear, but this causes a marked decrease in production capacity.

【0008】本発明が解決しようとする課題は、円盤状
基板に紫外線硬化型樹脂等の塗料をスピンコート法によ
り塗布する回転塗布方法において、生産能力を低下させ
ることなく塗料塗布後の「すじ」の発生を無くし、外観
不良を皆無として、スピンコート工程における収率を向
上させることにある。
The problem to be solved by the present invention is to provide a "streak" after coating of a coating material in a spin coating method in which a coating material such as an ultraviolet curable resin is coated on a disk-shaped substrate by a spin coating method without lowering the production capacity. To improve the yield in the spin coating process by eliminating the occurrence of defects and eliminating appearance defects.

【0009】[0009]

【課題を解決するための手段】本発明は前記課題を解決
するため、円盤状基板にスピンコート法によって塗料を
塗布する回転塗布方法において、低速回転させて一定量
の塗料を塗布した後、塗布を終了する際に、段階的にあ
るいは連続的に回転速度を速くして塗布を終了すること
を特徴とする回転塗布方法を提供する。
In order to solve the above-mentioned problems, the present invention provides a spin coating method in which a disc-shaped substrate is coated with a coating material by a spin coating method. The present invention provides a spin coating method characterized by terminating the coating stepwise or continuously by increasing the rotation speed.

【0010】[0010]

【作用】本発明によれば、円盤状基板に紫外線硬化型樹
脂等の塗料をスピンコート法により塗布する回転塗布方
法において、低速回転させて一定量の塗料を塗布した後
塗布を終了する際に、段階的にあるいは連続的に回転速
度を速くして塗布を終了するので、樹脂の塗布終了部分
が先細りとなって樹脂の内周部分の形状をきれいな円形
とすることができ、従って、一定量塗布終了後高速回転
で余分な樹脂を振り切っても、樹脂が均一に外周方向へ
振り切られるために、「すじ」が発生することはなく、
外観不良は皆無となり、スピンコート工程における収率
が著しく向上する。
According to the present invention, in a spin coating method of coating a coating material such as an ultraviolet curable resin on a disk-shaped substrate by a spin coating method, when the coating is terminated after a certain amount of coating material is rotated at a low speed. Since the coating speed is increased stepwise or continuously to finish the coating, the portion where the resin coating ends is tapered and the shape of the inner peripheral portion of the resin can be made into a clean circular shape. Even if the excess resin is shaken off by high-speed rotation after coating, the resin is evenly shaken off in the outer peripheral direction, so no "streaking" occurs.
The appearance is completely eliminated, and the yield in the spin coating process is significantly improved.

【0011】[0011]

【実施例】以下、実施例を示しながら具体的説明を行な
う。
EXAMPLES Hereinafter, a concrete description will be given with reference to examples.

【0012】(実施例1)円盤状基板である光ディスク
を記録膜の形成面側を上にしてターンテーブルに設置
し、次に記録膜の形成面側を保護するために保護コート
剤「SD−301」(大日本インキ化学工業(株)製)を
塗布した。
(Example 1) An optical disk, which is a disk-shaped substrate, is placed on a turntable with the recording film forming surface side facing up, and then a protective coating agent "SD-" is formed to protect the recording film forming surface side. 301 "(manufactured by Dainippon Ink and Chemicals, Inc.) was applied.

【0013】この場合、ターンテーブルを60rpmの
低速回転で回転させると同時に、1.9kgf/cm2の圧力
でφ1.05mmの塗布用ノズルを光ディスクの中心より
半径23mmの位置であって、光ディスクの面上1mmの位
置に移動させて保護コート剤「SD−301」の塗布を
基板回転速度60rpmで2秒間行ない、0.4秒後に
回転を90rpmまで加速し、さらに0.2秒後に回転
を120rpmまで加速して、保護コート剤の塗布を行
なった。
In this case, the turntable is rotated at a low speed of 60 rpm, and at the same time, at a pressure of 1.9 kgf / cm 2 , a coating nozzle of φ1.05 mm is located at a position 23 mm in radius from the center of the optical disk. The protective coating agent "SD-301" is applied to the surface at a position of 1 mm for 2 seconds at a substrate rotation speed of 60 rpm, the rotation is accelerated to 90 rpm after 0.4 seconds, and the rotation is further rotated to 120 rpm after 0.2 seconds. Then, the protective coating agent was applied.

【0014】塗布終了後、6,000rpmの高速回転
で光ディスクを回転させて余分な樹脂を振り切り、直ち
に紫外線を照射して樹脂を硬化させて保護コート膜を形
成したが、保護コート膜に「すじ」は全く見られなかっ
た。
After the coating was completed, the optical disc was rotated at a high speed of 6,000 rpm to shake off the excess resin, and the resin was immediately irradiated with ultraviolet rays to cure the resin to form a protective coat film. Was not seen at all.

【0015】(実施例2)円盤状基板である光ディスク
を記録膜の形成面側を下にしてターンテーブルに設置
し、次に記録膜の形成面側とは反対側の面にハードコー
ト剤「EX−704」(大日本インキ化学工業(株)製)
を塗布した。
(Example 2) An optical disk, which is a disk-shaped substrate, is placed on a turntable with the side on which the recording film is formed facing down, and then a hard coating agent "" is formed on the surface opposite to the side on which the recording film is formed. EX-704 "(manufactured by Dainippon Ink and Chemicals, Inc.)
Was applied.

【0016】この場合、ターンテーブルを60rpmの
低速回転で回転させると同時に、0.4kgf/cm2の圧力
でφ0.92mmの塗布用ノズルを光ディスクの中心より
半径22.5mmの位置であって、光ディスクの面上1mm
の位置に移動させてハードコート剤「EX−704」の
塗布を基板回転速度60rpmで1秒間行ない、0.5
秒後に回転を90rpmまで加速し、さらに0.3秒後
に回転を120rpmまで加速して、ハードコート剤の
塗布を行なった。
In this case, the turntable is rotated at a low speed of 60 rpm, and at the same time, a coating nozzle having a diameter of 0.92 mm and a radius of 22.5 mm from the center of the optical disk is placed at a pressure of 0.4 kgf / cm 2 . 1mm above the optical disc surface
And the hard coat agent “EX-704” is applied at a substrate rotation speed of 60 rpm for 1 second, and the hard coat agent “EX-704” is applied for 0.5 seconds.
After 2 seconds, the rotation was accelerated to 90 rpm, and after 0.3 seconds, the rotation was accelerated to 120 rpm to apply the hard coat agent.

【0017】塗布終了後、6,000rpmの高速回転
で光ディスクを回転させて余分な樹脂を振り切り、直ち
に紫外線を照射して樹脂を硬化させてハードコート膜を
形成したが、ハードコート膜には「すじ」は全く見られ
なかった。
After the coating was completed, the optical disk was rotated at a high speed of 6,000 rpm to shake off the excess resin, and the resin was immediately irradiated with ultraviolet rays to cure the resin to form a hard coat film. No streak was seen.

【0018】(比較例1)円盤状基板である光ディスク
を記録膜の形成面側を上にしてターンテーブルに設置
し、次に記録膜の形成面側を保護するために保護コート
剤「SD−301」を塗布した。
(Comparative Example 1) An optical disk, which is a disk-shaped substrate, is placed on a turntable with the recording film forming surface side facing up, and then a protective coating agent "SD-" is applied to protect the recording film forming surface side. 301 "was applied.

【0019】この場合、ターンテーブルを60rpmの
低速回転で回転させると同時に、1.9kgf/cm2の圧力
でφ1.05mmの塗布用ノズルを光ディスクの中心より
半径23mmの位置であって、光ディスクの面上1mmの位
置に移動させて保護コート剤の塗布を開始し、2.6秒
間60rpmの一定速度のままで保護コート剤の塗布を
行なった。
In this case, the turntable is rotated at a low speed of 60 rpm, and at the same time, a coating nozzle of φ1.05 mm with a pressure of 1.9 kgf / cm 2 is located at a position 23 mm in radius from the center of the optical disk. The coating of the protective coating agent was started by moving it to a position of 1 mm on the surface, and the coating of the protective coating agent was performed at a constant speed of 60 rpm for 2.6 seconds.

【0020】塗布終了後、6,000rpmの高速回転
で光ディスクを回転させて余分な樹脂を振り切り、直ち
に紫外線を照射して樹脂を硬化させて保護コート膜を形
成したところ保護コート膜に「すじ」が見られた。
After coating, the optical disk was rotated at a high speed of 6,000 rpm to shake off the excess resin, and the resin was immediately irradiated with ultraviolet rays to cure the resin to form a protective coating film. It was observed.

【0021】また、塗布終了後、6,000rpmの高
速回転で光ディスクを回転させて余分な樹脂を振り切る
と「すじ」が発生するので、この「すじ」が消滅するま
で待ったところ60秒以上の時間がかかってしまった。
After the coating is completed, when the optical disk is rotated at a high speed of 6,000 rpm and the excess resin is shaken off, "streaks" are generated. When waiting until the "streaks" disappear, it takes 60 seconds or more. It took a lot of time.

【0022】(比較例2)円盤状基板である光ディスク
を記録膜の形成面側を下にしてターンテーブルに設置
し、次に記録膜の形成面側とは反対側の面にハードコー
ト剤「EX−704」を塗布した。
(Comparative Example 2) An optical disk, which is a disk-shaped substrate, is placed on a turntable with the side on which the recording film is formed facing down, and then a hard coat agent "" is formed on the surface opposite to the side on which the recording film is formed. EX-704 "was applied.

【0023】この場合、ターンテーブルを60rpmの
低速回転で回転させると同時に、0.4kgf/cm2の圧力
でφ0.92mmの塗布用ノズルを光ディスクの中心より
半径22.5mmの位置であって、光ディスクの面上1mm
の位置に移動させてハードコート剤の塗布を開始し、
1.8秒間60rpmの一定速度のままでハードコート
剤の塗布を行なった。
In this case, the turntable is rotated at a low speed of 60 rpm, and at the same time, a coating nozzle of φ0.92 mm is placed at a position of a radius of 22.5 mm from the center of the optical disc at a pressure of 0.4 kgf / cm 2 . 1mm above the optical disc surface
To the position to start applying the hard coat agent,
The hard coat agent was applied at a constant speed of 60 rpm for 1.8 seconds.

【0024】塗布終了後、6,000rpmの高速回転
で光ディスクを回転させて余分な樹脂を振り切り、直ち
に紫外線を照射して樹脂を硬化させてハードコート膜を
形成したところハードコート膜に「すじ」が見られた。
After coating, the optical disc was rotated at a high speed of 6,000 rpm to shake off excess resin, and the resin was immediately irradiated with ultraviolet rays to cure the resin to form a hard coat film. It was observed.

【0025】また塗布終了後、6,000rpmの高速
回転で光ディスクを回転させて余分な樹脂を振り切ると
「すじ」が発生するので、この「すじ」が消滅するまで
待ったところ60秒以上の時間がかかってしまった。
After the coating is completed, when the optical disc is rotated at a high speed of 6,000 rpm to shake off the excess resin, "streaks" are generated. Therefore, waiting for the "streaks" to disappear, it takes more than 60 seconds. It took it.

【0026】[0026]

【発明の効果】本発明の回転塗布方法では、低速回転さ
せて一定量の塗料を塗布した後塗布を終了する際に、段
階的にあるいは連続的に回転速度を速くして塗布を終了
するので、樹脂の塗布終了部分が先細りとなって樹脂の
内周部分の形状をきれいな円形とすることができ、従っ
て一定量塗布終了後高速回転で余分な樹脂を振り切って
も、樹脂が均一に外周方向へ振り切られるために「す
じ」が発生することはなく外観不良は皆無となり、スピ
ンコート工程における収率が著しく向上する。
According to the spin coating method of the present invention, when the coating is finished after being rotated at a low speed to apply a fixed amount of coating, the coating is finished by gradually or continuously increasing the rotation speed. As the end of resin application is tapered, the shape of the inner peripheral part of the resin can be made into a clean circle, so even if the excess resin is shaken off at high speed after application of a certain amount, the resin will be evenly distributed in the outer peripheral direction. Since it is shaken off, "streaks" are not generated, appearance defects are completely eliminated, and the yield in the spin coating process is significantly improved.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 円盤状基板にスピンコート法によって塗
料を塗布する回転塗布方法において、低速回転させて一
定量の塗料を塗布した後、塗布を終了する際に、段階的
にあるいは連続的に回転速度を速くして塗布を終了する
ことを特徴とする回転塗布方法。
1. A spin coating method for coating a disk-shaped substrate with a spin coating method to spin a low speed coating to coat a fixed amount of the coating material, and then to rotate the coating stepwise or continuously when the coating is completed. A spin coating method characterized by accelerating the speed to finish the coating.
JP27023692A 1992-10-08 1992-10-08 Rotary coating method Pending JPH06124485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27023692A JPH06124485A (en) 1992-10-08 1992-10-08 Rotary coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27023692A JPH06124485A (en) 1992-10-08 1992-10-08 Rotary coating method

Publications (1)

Publication Number Publication Date
JPH06124485A true JPH06124485A (en) 1994-05-06

Family

ID=17483456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27023692A Pending JPH06124485A (en) 1992-10-08 1992-10-08 Rotary coating method

Country Status (1)

Country Link
JP (1) JPH06124485A (en)

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