JPH06119894A - Ion source electrode cooling device - Google Patents
Ion source electrode cooling deviceInfo
- Publication number
- JPH06119894A JPH06119894A JP29368492A JP29368492A JPH06119894A JP H06119894 A JPH06119894 A JP H06119894A JP 29368492 A JP29368492 A JP 29368492A JP 29368492 A JP29368492 A JP 29368492A JP H06119894 A JPH06119894 A JP H06119894A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- pipes
- electrode
- main
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、イオン源装置における
電極を冷却水により冷却するようにしたイオン源電極冷
却装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion source electrode cooling device for cooling electrodes in an ion source device with cooling water.
【０００２】[0002]
【従来の技術】一般にイオン源装置は、図２に示す構成
になっており、同図において、１はアークチャンバー、
２はフィラメント、３はプラズマ、４は真空チャンバ
ー、５はイオンビーム、６はアークチャンバー１と真空
チャンバー４間に設けられたイオンビーム引出用の電極
であり、イオンビーム５の引出し方向に対し直角方向に
出し入れ自在になっている。2. Description of the Related Art Generally, an ion source device has a structure shown in FIG. 2, in which 1 is an arc chamber,
Reference numeral 2 is a filament, 3 is plasma, 4 is a vacuum chamber, 5 is an ion beam, 6 is an electrode for extracting an ion beam provided between the arc chamber 1 and the vacuum chamber 4, and is perpendicular to the extraction direction of the ion beam 5. It can be put in and taken out in any direction.
【０００３】そして、従来の電極６の冷却装置は、図３
に示すように、電極６の一面の両側に太い冷却用主パイ
プ７，８が平行に配設され、両主パイプ７，８間に細い
複数本の冷却用小パイプ９が，それぞれ両端が両主パイ
プ７，８に連通し，電極６に密着して配設され、両主パ
イプ７，８の先端が閉塞され、他方の主パイプ８の基部
端から冷却水が流入され、各小パイプ９に分流したの
ち、一方の主パイプ７の基部端から流出され、電極６か
ら熱を奪い、熱による電極６の反り，歪みを抑えてい
る。A conventional cooling device for the electrode 6 is shown in FIG.
As shown in FIG. 5, thick cooling main pipes 7 and 8 are arranged in parallel on both sides of one surface of the electrode 6, and a plurality of thin cooling small pipes 9 are provided between both main pipes 7 and 8 at both ends. It is connected to the main pipes 7 and 8 and is arranged in close contact with the electrode 6. The tips of both main pipes 7 and 8 are closed, and cooling water is introduced from the base end of the other main pipe 8 to each small pipe 9. Then, the heat is taken from the electrode 6 and is taken out from the base end of the one main pipe 7 to suppress the warp and distortion of the electrode 6 due to the heat.
【０００４】なお、電極６が出し入れ自在の引き出し方
式であるため、冷却水の流入端及び流出端が同一側部に
位置している。また、電極引き出し方式でなくても、イ
オン源装置の周辺の配置等の制約により、同一側部から
冷却水の流入，流出を行う場合も、図３の冷却装置が用
いられている。Since the electrode 6 is of a pull-out type in which it can be freely taken in and out, the inflow end and the outflow end of the cooling water are located on the same side. Even if the electrode drawing method is not used, the cooling device of FIG. 3 is also used when the cooling water flows in and out from the same side due to restrictions such as the arrangement around the ion source device.
【０００５】[0005]
【発明が解決しようとする課題】従来の図３に示す前記
冷却装置の場合、各小パイプ９を流れる冷却水の量は、
電極６の引き出し方向に近い方が最も多く、遠い方が最
も少なく、電極６の面に対し均一な冷却効果が得られ
ず、引き出したイオンビーム５の量及び分布に悪影響を
与えるという問題点がある。本発明は、前記の点に留意
し、電極を均一に冷却するイオン源電極冷却装置を提供
することを目的とする。In the case of the conventional cooling device shown in FIG. 3, the amount of cooling water flowing through each small pipe 9 is
There is a problem that the direction closer to the extraction direction of the electrode 6 is the largest, and the direction farther away is the smallest, and a uniform cooling effect cannot be obtained on the surface of the electrode 6, which adversely affects the amount and distribution of the extracted ion beam 5. is there. The present invention has been made in consideration of the above points, and an object thereof is to provide an ion source electrode cooling device that uniformly cools an electrode.
【０００６】[0006]
【課題を解決するための手段】前記課題を解決するため
に、本発明のイオン源電極冷却装置は、イオン源のイオ
ンビーム引出方向に対し垂直に配設された電極と、該電
極の一面の両側に平行に配設された冷却用主パイプと、
該両主パイプ間に配設されそれぞれ両端が前記両主パイ
プに連通し前記電極に密着した複数本の冷却用小パイプ
と、一方の前記主パイプの側部に配設され先端が前記一
方の主パイプの先端に連通した補助パイプとを備え、前
記一方の主パイプの基部端及び他方の前記主パイプの先
端を閉塞し、前記他方の主パイプの基部端と前記補助パ
イプの基部端とを冷却水の入出口としたものである。In order to solve the above-mentioned problems, an ion source electrode cooling device of the present invention is provided with an electrode arranged perpendicularly to the extraction direction of an ion beam of an ion source and one surface of the electrode. Main cooling pipes arranged in parallel on both sides,
A plurality of cooling small pipes arranged between the two main pipes, both ends of which are in communication with the two main pipes and are in close contact with the electrodes, and one of the main pipes is provided with a tip end of the one main pipe. An auxiliary pipe communicating with the tip of the main pipe, closing the base end of the one main pipe and the tip of the other main pipe, and connecting the base end of the other main pipe and the base end of the auxiliary pipe. It is used as an inlet / outlet for cooling water.
【０００７】[0007]
【作用】前記のように構成された本発明のイオン源電極
冷却装置は、一方の主パイプの先端に先端が連通した補
助パイプが併設され、一方の主パイプの基部端及び他方
の主パイプの先端が閉塞され、他方の主パイプの基部端
と補助パイプの基部端とが冷却水の入出口となっている
ため、各小パイプを流れる流路のコンダクタンスが同じ
になり、各小パイプを流れる冷却水の量が均一になり、
電極の面に対し均一な冷却効果が得られ、電極の反り，
歪みを抑え、かつ、引き出しイオンビームの量及び分布
に悪影響がない。In the ion source electrode cooling device of the present invention configured as described above, an auxiliary pipe whose tip communicates with the tip of one main pipe is provided side by side, and the base end of one main pipe and the other main pipe are connected. Since the tip is closed and the base end of the other main pipe and the base end of the auxiliary pipe are the inlet and outlet of the cooling water, the conductance of the flow path flowing through each small pipe becomes the same, and it flows through each small pipe. The amount of cooling water becomes uniform,
A uniform cooling effect can be obtained on the surface of the electrode,
The distortion is suppressed, and there is no adverse effect on the amount and distribution of the extracted ion beam.
【０００８】[0008]
【実施例】１実施例について図１を参照して説明する。
同図において図３と同一符号は同一もしくは相当するも
のを示し、異なる点は次の通りである。即ち、一方の主
パイプ７に補助パイプ１０が並設され、補助パイプ１０
の先端と一方の主パイプ７の先端とが連通し、一方の主
パイプ７の基部端が閉塞され、他方の主パイプ８の基部
端と補助パイプ１０の基部端とが冷却水の入出口になっ
ている点である。EXAMPLE One example will be described with reference to FIG.
In the figure, the same symbols as those in FIG. 3 indicate the same or corresponding ones, and the different points are as follows. That is, the auxiliary pipe 10 is arranged in parallel on one of the main pipes 7,
Communicates with the tip of one main pipe 7, the base end of one main pipe 7 is closed, and the base end of the other main pipe 8 and the base end of the auxiliary pipe 10 serve as inlets and outlets for cooling water. That is the point.
【０００９】従って、他方の主パイプ８の基部端と一方
の主パイプ７の先端間において、各小パイプ９の流路の
コンダクタンスが同一になり、各小パイプ９を流れる冷
却水の量が均一になる。Therefore, the conductance of the flow path of each small pipe 9 is the same between the base end of the other main pipe 8 and the tip of one main pipe 7, and the amount of cooling water flowing through each small pipe 9 is uniform. become.
【００１０】[0010]
【発明の効果】本発明は、以上説明したように構成され
ているので、以下に記載する効果を奏する。本発明のイ
オン源電極冷却装置は、一方の主パイプ７の先端に先端
が連通した補助パイプ１０が併設され、一方の主パイプ
７の基部端及び他方の主パイプ８の先端が閉塞され、他
方の主パイプ８の基部端と補助パイプ１０の基部端とが
冷却水の入出口となっているため、各小パイプ９を流れ
る流路のコンダクタンスが同じになり、各小パイプ９を
流れる冷却水の量が均一になり、電極６の面を均一に冷
却することができ、電極６の反り，歪みを抑えるのは勿
論、引き出しイオンビームの量及び分布に悪影響を与え
ることがない。Since the present invention is configured as described above, it has the following effects. In the ion source electrode cooling device of the present invention, an auxiliary pipe 10 whose tip communicates with the tip of one main pipe 7 is provided side by side, the base end of one main pipe 7 and the tip of the other main pipe 8 are closed, and the other Since the base end of the main pipe 8 and the base end of the auxiliary pipe 10 serve as inlets and outlets for the cooling water, the conductances of the flow paths flowing through the small pipes 9 are the same, and the cooling water flowing through the small pipes 9 is the same. Is uniform, the surface of the electrode 6 can be cooled uniformly, and the warp and distortion of the electrode 6 can be suppressed and the amount and distribution of the extracted ion beam are not adversely affected.
【図１】本発明の１実施例の平面図である。FIG. 1 is a plan view of an embodiment of the present invention.
【図２】イオン源装置の概略正面図である。FIG. 2 is a schematic front view of an ion source device.
【図３】従来例の平面図である。FIG. 3 is a plan view of a conventional example.
【符号の説明】 ６ 電極 ７ 主パイプ ８ 主パイプ ９ 小パイプ １０ 補助パイプ[Explanation of symbols] 6 electrode 7 main pipe 8 main pipe 9 small pipe 10 auxiliary pipe
Claims (1)
垂直に配設された電極と、 該電極の一面の両側に平行に配設された冷却用主パイプ
と、 該両主パイプ間に配設されそれぞれ両端が前記両主パイ
プに連通した前記電極に密着した複数本の冷却用小パイ
プと、 一方の前記主パイプの側部に配設され先端が前記一方の
主パイプの先端に連通した補助パイプとを備え、 前記一方の主パイプの基部端及び他方の前記主パイプの
先端を閉塞し、 前記他方の主パイプの基部端と前記補助パイプの基部端
とを冷却水の入出口としたイオン源電極冷却装置。1. An electrode arranged perpendicularly to the extraction direction of an ion beam of an ion source, cooling main pipes arranged in parallel on both sides of one surface of the electrode, and arranged between both main pipes. A plurality of cooling small pipes, both ends of which are in communication with the main pipes and which are in close contact with the electrodes, and an auxiliary member, which is disposed on the side of one of the main pipes and has its tip communicating with the tip of the one main pipe. A pipe, closing the base end of the one main pipe and the tip of the other main pipe, and using the base end of the other main pipe and the base end of the auxiliary pipe as cooling water inlet and outlet Source electrode cooling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29368492A JPH06119894A (en) | 1992-10-06 | 1992-10-06 | Ion source electrode cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29368492A JPH06119894A (en) | 1992-10-06 | 1992-10-06 | Ion source electrode cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06119894A true JPH06119894A (en) | 1994-04-28 |
Family
ID=17797898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29368492A Pending JPH06119894A (en) | 1992-10-06 | 1992-10-06 | Ion source electrode cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06119894A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013531364A (en) * | 2010-04-30 | 2013-08-01 | アプライド マテリアルズ インコーポレイテッド | Process chamber having common resources and method of use thereof |
| CN108194907A (en) * | 2018-02-28 | 2018-06-22 | 麦科勒（滁州）新材料科技有限公司 | A kind of radiator |
-
1992
- 1992-10-06 JP JP29368492A patent/JPH06119894A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013531364A (en) * | 2010-04-30 | 2013-08-01 | アプライド マテリアルズ インコーポレイテッド | Process chamber having common resources and method of use thereof |
| CN108194907A (en) * | 2018-02-28 | 2018-06-22 | 麦科勒（滁州）新材料科技有限公司 | A kind of radiator |
| CN108194907B (en) * | 2018-02-28 | 2024-05-24 | 麦科勒（滁州）新材料科技有限公司 | Radiator |
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