JPH0597479A - Production of tempered glass - Google Patents
Production of tempered glassInfo
- Publication number
- JPH0597479A JPH0597479A JP3282192A JP28219291A JPH0597479A JP H0597479 A JPH0597479 A JP H0597479A JP 3282192 A JP3282192 A JP 3282192A JP 28219291 A JP28219291 A JP 28219291A JP H0597479 A JPH0597479 A JP H0597479A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- ion exchange
- package
- cap
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Treatment Of Glass (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、強化ガラスの製造方法
に関するものであり、より具体的には、紫外線を透過す
る薄型ＥＰＲＯＭパッケージのキャップとして用いられ
る薄板状ガラスとして好適な強化ガラスの製造方法に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a tempered glass, and more specifically, a method for manufacturing a tempered glass suitable as a thin glass used as a cap of a thin EPROM package which transmits ultraviolet rays. It is about.
【０００２】[0002]
【従来の技術】ＥＰＲＯＭは、紫外線によりパッケージ
内の半導体に蓄えられたメモリーを消去することができ
るため、ＯＡ機器を始めとして種々の用途に利用されて
いる。2. Description of the Related Art EPROMs are used for various purposes including OA equipment since they can erase the memory stored in a semiconductor in a package by ultraviolet rays.
【０００３】従来よりＥＰＲＯＭパッケージとしては、
アルミナセラミック製ベースの上にアルミナセラミック
製キャップが半田ガラスで封着されて取り付けられ、そ
のキャップの中央には、窓部が形成され、その窓部に紫
外線を透過する板状ガラスが直接封着されてなる形態の
ものが主に使用されてきた。Conventionally, as an EPROM package,
An alumina ceramic cap is sealed and attached with solder glass on an alumina ceramic base, a window is formed in the center of the cap, and a plate glass that transmits ultraviolet rays is directly sealed to the window. The form that has been used has been mainly used.
【０００４】ところで近年、パッケージを配線板に実装
する技術が高度化し、表面実装技術等を用いて高密度実
装されるに伴い、パッケージの小型化、薄型化が要求さ
れるようになってきている。このため、パッケージの一
部を構成するアルミナセラミック製キャップの代わり
に、イオン交換処理を行い、化学強化した薄板状ガラス
自体をキャップとして使用することによって、パッケー
ジ全体の肉厚を薄くする試みがなされている。By the way, in recent years, the technology for mounting a package on a wiring board has become more advanced, and high-density mounting has been made by using surface mounting technology or the like, so that the package is required to be smaller and thinner. .. For this reason, it has been attempted to reduce the thickness of the entire package by performing ion exchange treatment and using the chemically strengthened thin glass itself as a cap instead of the alumina ceramic cap that constitutes a part of the package. ing.
【０００５】[0005]
【発明が解決しようとする課題】上記したＥＰＲＯＭパ
ッケージのキャップとして使用される薄板状ガラスは、
１ｍｍ以下の肉厚を有しており、通常次のような方法で
作製される。すなわち適当な形状を有し、イオン交換に
よる化学強化が可能なガラス体を、所望の寸法にするた
めに切断加工や切削加工を施した後、鏡面ポリッシュを
行い、次いでイオン交換する方法が採られる。The thin glass plate used as the cap of the EPROM package described above is
It has a wall thickness of 1 mm or less, and is usually manufactured by the following method. That is, a glass body having an appropriate shape and capable of being chemically strengthened by ion exchange is subjected to a cutting process or a cutting process to obtain a desired size, followed by mirror-polishing, and then an ion exchange process. ..
【０００６】しかしながらこのような方法には、２つの
問題がある。However, such a method has two problems.
【０００７】ひとつは、ガラス体を薄板状に切断加工や
切削加工する際、ガラス表面に微細なクラックやキズ等
の表面欠陥が発生するが、後工程で鏡面ポリッシュして
も、それらが多少残存するため、イオン交換が均等に行
えず、強化処理を行ったにもかかわらず、必要にして十
分な強度が得られ難いことである。One is that when a glass body is cut or machined into a thin plate, surface defects such as fine cracks and scratches occur on the glass surface, but some of them remain even after mirror polishing in a later step. Therefore, the ion exchange cannot be performed uniformly, and it is difficult to obtain the necessary and sufficient strength even though the strengthening treatment is performed.
【０００８】もうひとつは、ガラス板を鏡面ポリッシュ
するため、製造コストが大きくなり、製品の価格が非常
に高価になることである。The other is that the glass plate is mirror-polished, so that the manufacturing cost becomes high and the price of the product becomes very expensive.
【０００９】本発明の目的は、イオン交換を均等に行わ
せることによって高い強度を有する強化ガラスを、従来
よりも安価に製造する方法を提供することである。An object of the present invention is to provide a method for producing a tempered glass having high strength at a lower cost than conventional ones by uniformly performing ion exchange.
【００１０】[0010]
【課題を解決するための手段】本発明者等は、上記目的
を達成すべく種々の研究重ねた結果、切断加工や切削加
工を施した薄板状ガラスを、鏡面ポリッシュを行わなく
とも、酸によって侵食処理することによって表面欠陥を
取り除くことができ、且つ、こうして侵食処理された薄
板状ガラスの場合、イオン交換を均等に行わせることが
できるため、ＥＰＲＯＭパッケージのキャップとしての
十分な強度を有していることを見いだし、本発明として
提案するものである。Means for Solving the Problems As a result of various researches to achieve the above object, the inventors of the present invention have found that a thin glass plate subjected to a cutting process or a cutting process can be treated with an acid even if it is not mirror-polished. The surface defects can be removed by the erosion treatment, and in the case of the thin glass plate thus erosion-treated, the ion exchange can be carried out uniformly, so that it has sufficient strength as a cap of the EPROM package. Therefore, it is proposed as the present invention.
【００１１】すなわち本発明の強化ガラスの製造方法
は、適当な形状を有し、イオン交換による化学強化が可
能なガラス体を、所望の寸法になるように加工した後、
その表面を酸によって侵食処理し、次いでイオン交換処
理することを特徴とする。That is, in the method for producing a tempered glass of the present invention, a glass body having an appropriate shape and capable of being chemically strengthened by ion exchange is processed into a desired size,
It is characterized in that its surface is eroded by an acid and then ion-exchanged.
【００１２】[0012]
【作用】本発明の方法によると、鏡面ポリッシュを施さ
ないため、製造コストが大幅に低減され、しかも特性的
に全く問題のないＥＰＲＯＭパッケージのキャップに用
いる薄板状ガラスを得ることが可能である。According to the method of the present invention, since mirror polishing is not performed, the manufacturing cost is greatly reduced, and it is possible to obtain the thin glass plate used for the cap of the EPROM package which has no problem in characteristics.
【００１３】すなわちＥＰＲＯＭパッケージの窓ガラス
には、紫外線を透過することが要求されるが、透過によ
る光線の散乱は、問題にならず、パッケージ内部の半導
体に照射される紫外線は、直線透過光でなくとも散乱透
過さえすれば、ＥＰＲＯＭの消去が可能である。本発明
の方法によって製造された薄板状ガラスは、鏡面ポリッ
シュが施されておらず、その表面は、梨地状であるが、
紫外線を散乱透過するため、ＥＰＲＯＭパッケージのキ
ャップとして使用しても何ら差し支えない。That is, the window glass of the EPROM package is required to transmit ultraviolet rays, but the scattering of light rays due to transmission does not pose a problem, and the ultraviolet rays applied to the semiconductor inside the package are linearly transmitted light. It is possible to erase the EPROM as long as it is scattered and transmitted. The thin glass plate produced by the method of the present invention is not mirror-polished, and its surface has a satin finish,
Since it transmits and transmits ultraviolet rays, it can be used as a cap of an EPROM package without any problem.
【００１４】また本発明におけるガラスの切断は、例え
ば高精度の切断が可能な内周刃切断機、ワイヤーソー切
断機、マルチブレード切断機等を用いて行われるが、こ
のような切断加工や切削加工を施した後のガラス表面に
は、非常に多くの微細クラックやキズ等の表面欠陥が発
生しており、鏡面ポリッシュを行っても、それらの表面
欠陥を全て除去することが困難である。しかしながら本
発明のようにガラスを加工した後、酸による侵食処理を
十分行えば、ガラスに発生した表面欠陥をほとんど全て
除去することが可能である。Further, the cutting of the glass in the present invention is carried out by using, for example, an inner peripheral blade cutting machine, a wire saw cutting machine, a multi-blade cutting machine or the like capable of highly accurate cutting. A large number of surface defects such as fine cracks and scratches are generated on the glass surface after processing, and it is difficult to remove all the surface defects even if mirror polishing is performed. However, after the glass is processed as in the present invention, it is possible to remove almost all surface defects generated in the glass by sufficiently performing an erosion treatment with an acid.
【００１５】尚、酸による侵食処理やイオン交換の条件
は、ガラスの組成、寸法等によって変化するが、例えば
酸処理の場合、弗酸、硫酸、硝酸、塩酸等の酸液を単独
あるいは混合して使用し、２０〜８０℃、０．１〜５．
０時間の条件で行い、またイオン交換の場合、硝酸カリ
ウム、硫酸ナトリウム等のアルカリイオンを含む塩の融
液を使用し、３００〜５００℃、２〜１６時間の条件で
行う。The conditions of acid erosion treatment and ion exchange vary depending on the composition and size of the glass. For example, in the case of acid treatment, an acid solution such as hydrofluoric acid, sulfuric acid, nitric acid or hydrochloric acid is used alone or mixed. Used at 20-80 ° C., 0.1-5.
It is carried out under conditions of 0 hours, and in the case of ion exchange, it is carried out under conditions of 300 to 500 ° C. and 2 to 16 hours using a melt of a salt containing alkali ions such as potassium nitrate and sodium sulfate.
【００１６】[0016]
【実施例】以下、本発明に係る強化ガラスの製造方法
を、実施例に基づいて詳細に説明する。EXAMPLES The method for producing tempered glass according to the present invention will be described in detail below with reference to examples.
【００１７】まずイオン交換による化学強化が可能なホ
ウ珪酸ガラスを溶融炉で溶融し、適当な寸法のガラスブ
ロックにした後、これをダイヤモンドホイールソーを使
用して細断することによって、１３０×２５×１５ｍｍ
の寸法の角柱状ガラスを得た。次いでこの角柱状ガラス
にジェネレーター加工を施すことによって、加工寸法や
平行度等を整えた後に、マルチブレードソーを利用し
て、２０．０×１０．０×０．４ｍｍの寸法の薄板状ガ
ラスを作製した。First, borosilicate glass which can be chemically strengthened by ion exchange is melted in a melting furnace to form a glass block having an appropriate size, which is then shredded with a diamond wheel saw to obtain 130 × 25. × 15 mm
A prismatic glass having the following dimensions was obtained. Then, this prismatic glass is subjected to generator processing to adjust the processing dimensions, parallelism, etc., and then, using a multi-blade saw, a thin plate glass with dimensions of 20.0 × 10.0 × 0.4 mm is obtained. It was made.
【００１８】この薄板状ガラスをテフロン製の酸処理用
トレーに移し、弗酸１％、硫酸１５％の混液中に３０分
間浸漬することによって、表面から５μ以上の深さまで
侵食させた後、水洗乾燥した。次いでこれをイオン交換
用ステンレス製トレーに移し、４５０℃に加熱保持した
硝酸カリウム溶液塩中に５時間浸漬することによって、
表面から５μ以上の深さまでイオン交換を行った。さら
にこのイオン交換の終了した薄板状ガラスを、約５０℃
に加熱した純水中に浸漬してガラス表面に固着する硝酸
カリウムを除去した後、水洗乾燥した。The thin glass plate was transferred to a Teflon acid treatment tray and immersed in a mixed solution of 1% hydrofluoric acid and 15% sulfuric acid for 30 minutes to corrode it to a depth of 5 μm or more from the surface and then washed with water. Dried. Then, this was transferred to a stainless steel tray for ion exchange, and immersed in a potassium nitrate solution salt heated and held at 450 ° C. for 5 hours,
Ion exchange was performed to a depth of 5 μm or more from the surface. Furthermore, the thin glass plate that has undergone this ion exchange is heated to approximately 50 ° C.
It was immersed in pure water heated to remove potassium nitrate adhering to the glass surface, washed with water and dried.
【００１９】こうして作製した薄板状ガラスを、図１に
示すようにＥＰＲＯＭパッケージのキャップとして使用
した。図中、１０は、薄板状ガラス、１１は、アルミナ
製のベース、１２は、半田ガラス、１３は、半導体、１
４は、リードフレームを各々示す。The thin glass plate thus produced was used as a cap for an EPROM package as shown in FIG. In the figure, 10 is a thin glass plate, 11 is an alumina base, 12 is solder glass, 13 is a semiconductor, 1
Reference numerals 4 respectively indicate lead frames.
【００２０】また比較のため、上記と同様に作製した薄
板状ガラスを、酸処理せずに鏡面ポリッシュした後、イ
オン交換処理し、それをパッケージのキャップとして使
用した試料と、酸処理も鏡面ポリッシュも行わず、イオ
ン交換処理だけ行った後、これをパッケージのキャップ
として使用した試料も作製した。For comparison, a thin glass plate produced in the same manner as above was mirror-polished without acid treatment, and then ion-exchanged, and a sample using it as a package cap and acid-treated mirror-polished glass were also used. After performing only the ion exchange treatment without performing the above, a sample using this as a cap of the package was also prepared.
【００２１】これらのパッケージのキャップとして使用
された薄板状ガラスの強度特性を調べるため、落下試験
と加圧試験を行い、薄板状ガラスに割れや欠け等が発生
する率を調べ、その結果を表１に示した。In order to investigate the strength characteristics of the thin glass sheets used as the caps of these packages, a drop test and a pressure test were conducted to examine the rate at which cracks, chips, etc. occurred in the thin glass sheets, and the results are shown in a table. Shown in 1.
【００２２】[0022]
【表１】 [Table 1]
【００２３】Ｎｏ．１の試料は、上記した本発明の方法
によって製造した薄板状ガラスをキャップとして使用し
たパッケージ、Ｎｏ．２の試料は、酸処理せずに鏡面ポ
リッシュした後、イオン交換処理した薄板状ガラスをキ
ャップとして使用したパッケージ、Ｎｏ３の試料は、酸
処理も鏡面ポリッシュも行わず、イオン交換処理だけ行
った薄板状ガラスをキャップとして使用したパッケージ
であり、各々８０個づつ作製して両試験に供した。No. The sample of No. 1 is a package using the thin glass sheet manufactured by the method of the present invention as a cap, No. 1 sample. The sample of No. 2 is a package using mirror-polished without acid treatment and then ion-exchanged thin plate glass is used as a cap, and the sample of No. 3 is a thin plate subjected to only ion-exchange treatment without acid treatment or mirror-polish. This is a package in which glass glass is used as a cap, and 80 of each of them is manufactured and subjected to both tests.
【００２４】表１から明らかなようにＮｏ．１の試料の
各薄板状ガラスは、落下試験、加圧試験共に割れや欠け
等が発生せず、比較例のＮｏ．２及び３の各薄板状ガラ
スに比べて、高い強度を有していた。As is clear from Table 1, No. The thin glass sheets of the sample of No. 1 did not show cracks or chips in the drop test and the pressure test, and thus, No. 1 of the comparative example. It had a higher strength than the thin glass sheets 2 and 3.
【００２５】尚、落下試験は、各試料を２０個づつ、７
５ｃｍ、８０ｃｍ、８５ｃｍの高さから樫の木の上に落
下させて、薄板状ガラスの割れや欠け等の発生率を調べ
たものであり、また加圧試験は、各試料を１０個づつ耐
圧容器中に入れ、５ｋｇｆ／ｃｍ2 の圧力で１時間、６
ｋｇｆ／ｃｍ2 の圧力で１時間のＨｅガスによって加圧
して、薄板状ガラスの割れや欠け等の発生率を調べたも
のである。In the drop test, 20 pieces of each sample were used.
It was dropped from 5 cm, 80 cm, and 85 cm on an oak tree, and the incidence of cracks, chips, etc. in the thin glass plate was examined. In the pressure test, 10 pieces of each sample were pressure-resistant. Place in a container, apply pressure of 5 kgf / cm 2 for 1 hour, 6
It is the pressure of kgf / cm 2 applied with He gas for 1 hour, and the incidence of cracks, chips, etc. of the thin glass plate was examined.
【００２６】[0026]
【発明の効果】以上のように本発明の方法によると、鏡
面ポリッシュを行う必要がないため、従来の方法に比べ
て製造コストが低く、しかも均等にイオン交換を行うこ
とができるため、高い機械的強度を有する薄板状ガラス
を得ることができ、こうして作製した薄板状ガラスは、
高信頼性の要求される薄型ＥＰＲＯＭパッケージのキャ
ップとして好適である。As described above, according to the method of the present invention, since it is not necessary to carry out mirror polishing, the manufacturing cost is lower than that of the conventional method, and moreover, the ion exchange can be carried out uniformly, so that the machine cost is high. It is possible to obtain a thin glass plate having a desired strength, and the thin glass plate thus produced is
It is suitable as a cap for a thin EPROM package that requires high reliability.
【図１】本発明の方法によって製造した薄板状ガラスを
キャップとして使用したＥＰＲＯＭパッケージの断面図
である。FIG. 1 is a cross-sectional view of an EPROM package using a thin glass plate manufactured by the method of the present invention as a cap.
１０ 薄板状ガラス １１ パッケージのベース １２ 半田ガラス １３ 半導体 １４ リードフレーム 10 Thin Glass 11 Base of Package 12 Solder Glass 13 Semiconductor 14 Lead Frame
Claims (1)
学強化が可能なガラス体を、所望の寸法になるように加
工した後、その表面を酸によって侵食処理し、次いでイ
オン交換処理することを特徴とする強化ガラスの製造方
法。1. A glass body having a suitable shape and capable of being chemically strengthened by ion exchange is processed into a desired size, and then the surface thereof is subjected to an erosion treatment with an acid and then an ion exchange treatment. A method for producing a tempered glass, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3282192A JPH0597479A (en) | 1991-10-01 | 1991-10-01 | Production of tempered glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3282192A JPH0597479A (en) | 1991-10-01 | 1991-10-01 | Production of tempered glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0597479A true JPH0597479A (en) | 1993-04-20 |
Family
ID=17649277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3282192A Pending JPH0597479A (en) | 1991-10-01 | 1991-10-01 | Production of tempered glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0597479A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2704852A1 (en) * | 1993-05-06 | 1994-11-10 | Saint Gobain Vitrage Int | Method of reinforcing glass objects |
| JP2008306149A (en) * | 2007-07-24 | 2008-12-18 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | Wafer support glass |
| KR101137206B1 (en) * | 2009-11-09 | 2012-04-20 | 정재은 | Method for manufacturing a non-reflective glass |
| JP2012148955A (en) * | 2010-09-30 | 2012-08-09 | Avanstrate Inc | Method for manufacturing cover glass, and cover glass |
| CN103328396A (en) * | 2011-01-18 | 2013-09-25 | 日本电气硝子株式会社 | Tempered glass, and tempered glass plate |
-
1991
- 1991-10-01 JP JP3282192A patent/JPH0597479A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2704852A1 (en) * | 1993-05-06 | 1994-11-10 | Saint Gobain Vitrage Int | Method of reinforcing glass objects |
| WO1994026675A1 (en) * | 1993-05-06 | 1994-11-24 | Saint-Gobain Vitrage International | Process for reinforcing glass objects |
| JP2008306149A (en) * | 2007-07-24 | 2008-12-18 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | Wafer support glass |
| KR101137206B1 (en) * | 2009-11-09 | 2012-04-20 | 정재은 | Method for manufacturing a non-reflective glass |
| JP2012148955A (en) * | 2010-09-30 | 2012-08-09 | Avanstrate Inc | Method for manufacturing cover glass, and cover glass |
| CN103328396A (en) * | 2011-01-18 | 2013-09-25 | 日本电气硝子株式会社 | Tempered glass, and tempered glass plate |
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