JPH0590878U - Electric field device for ion source - Google Patents
Electric field device for ion sourceInfo
- Publication number
- JPH0590878U JPH0590878U JP1328191U JP1328191U JPH0590878U JP H0590878 U JPH0590878 U JP H0590878U JP 1328191 U JP1328191 U JP 1328191U JP 1328191 U JP1328191 U JP 1328191U JP H0590878 U JPH0590878 U JP H0590878U
- Authority
- JP
- Japan
- Prior art keywords
- planar
- electric field
- ion source
- field device
- dielectric substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- Electrostatic Separation (AREA)
Abstract
(57)【要約】
【目的】 沿面放電に対する強度を得るために面状誘電
体基板をフアインセラミック誘電体で形成した場合、そ
の表面近くの層内に湿気が入ったり、或は表面に水分や
塵埃などが付着して、その性能を低下したりすることの
ないようにする。
【構成】 面状誘電体基板１の表面に線状電極２を配置
し、その内部に面状誘導電極３を配置したイオン源用電
界装置において、該面状誘電体基板をフアインセラミッ
クで形成し、前記面状誘導電極３をヒーターで形成す
る。
(57) [Abstract] [Purpose] When a planar dielectric substrate is made of fine ceramic dielectric in order to obtain strength against creeping discharge, moisture may enter into the layer near the surface or moisture on the surface. Do not let dust or dirt adhere to it and reduce its performance. In an electric field device for an ion source, in which a linear electrode 2 is arranged on a surface of a planar dielectric substrate 1 and a planar induction electrode 3 is arranged inside the planar electrode, the planar dielectric substrate is formed of fine ceramics. Then, the planar induction electrode 3 is formed by a heater.
Description
【０００１】[0001]
この考案は、オゾナイザや粉体荷電装置等のイオン源として使用する沿面放電 発生用電界装置に関する。 更にのべれば、誘電体で形成した基板の表面と内部に夫々電界形成用電極を設け 、それらの間に高周波高圧電源を接続して使用するイオン源用電界装置に関する ものである。 The present invention relates to an electric field device for generating a creeping discharge used as an ion source for an ozonizer, a powder charging device and the like. Further, it relates to an electric field device for an ion source in which electric field forming electrodes are provided on the surface and inside of a substrate formed of a dielectric material, and a high frequency and high voltage power source is connected between them.
【０００２】[0002]
この種の電界装置の誘電体基板を放電に対する強度上フアインセラミック誘電 体で形成すると、そのフアインセラミック誘電体の性質上、その表面付近の層内 に湿気が吸収され、又その表面に水分、塵埃などが付着し易く、それによって導 電性が生じ、その表面に沿面放電が発生しなくなり、イオンの生成が減少し、ま た放電による誘電体の劣化が発生し、絶縁破壊強度も低下するなどイオン源用電 界装置としての性能が低下するおそれがあった。 When the dielectric substrate of this type of electric field device is formed of a fine ceramic dielectric in terms of strength against discharge, due to the nature of the fine ceramic dielectric, moisture is absorbed in the layer near the surface and moisture is absorbed on the surface. , Dust, etc. tend to adhere, which causes electrical conductivity, which prevents the generation of creeping discharge on its surface, reduces the generation of ions, and causes the deterioration of the dielectric due to discharge, which also lowers the dielectric breakdown strength. As a result, the performance as the ion source electric field device may be deteriorated.
【０００３】 この考案の目的は、このおそれ即ち、沿面放電に対する強度を得るために面状 誘電体基板をフアインセラミック誘電体で形成した場合その表面近くの層内に湿 気が入ったり、或は表面に水分や塵埃などが付着して、その性能を低下したりす ることのないイオン源用電界装置を得ることである。The object of the present invention is to prevent this, that is, when the planar dielectric substrate is formed of a fine ceramic dielectric in order to obtain strength against creeping discharge, moisture may enter into a layer near the surface thereof, or Is to obtain an electric field device for an ion source, which does not deteriorate the performance of water or dust attached to the surface thereof.
【０００４】[0004]
この考案は、面状誘電体基板の表面に、線状電極を配置し、その内部に面状誘 導電極を配置したイオン源用電界装置において、該面状誘電体基板をフアインセ ラミックで形成し、前記面状誘導電極をヒーターで形成することを特徴とするイ オン源用電界装置である。 This invention is an electric field device for an ion source in which a linear electrode is arranged on the surface of a planar dielectric substrate and a planar induction conductive electrode is arranged inside the planar dielectric substrate, and the planar dielectric substrate is formed with a fine ceramic. An electric field device for an ion source, wherein the planar induction electrode is formed by a heater.
【０００５】[0005]
【実施例】 以下、この考案を図１に記載せる実施例に基づいて説明すると、フアインセ ラミックで形成した面状誘電体基板１の表面に、線状電極２を配置すると共に、 その面状誘電体基板１の内部に面状誘導電極３を配置し、該面状誘導電極３を、 例えば、波形、或はその他の形状のヒーターで形成するものである。EXAMPLE The present invention will be described below based on an example shown in FIG. 1. A linear electrode 2 is arranged on the surface of a planar dielectric substrate 1 formed of fine ceramics, and the planar dielectric The planar induction electrode 3 is arranged inside the body substrate 1, and the planar induction electrode 3 is formed by, for example, a corrugated heater or a heater having another shape.
【０００６】 又この実施例のイオン源用電界装置を製造する際には、先ずアルミナ粉末のよ うなフアインセラミック原料に、バインダー、例えば塩ビ、醋ビの共重合物を添 加し、混練後シート状に加熱圧延して上層グリーンシート１ａを形成する。 この上層グリーンシート１ａの表面に導電材を含むペーストをスクリーン印刷 して、図２に示すように端子２ａ付き線状電極２を形成すると共に、その上層グ リーンシート１ａの裏面に同様のスクリーン印刷を行って図３に示すようにヒー ター線を波形に折り曲げて全体の形状が面状をなす誘導電極３を形成し、その面 に上層グリーンシート１ａと同様にして得られる図４、図５の下層グリーンシー ト１ｂを重ね合わせ、前述の各上層グリーンシート１ａ及び下層グリーンシート １ｂを一体的に加熱圧着した後、それを焼成して前述の面状誘電体基板１、線状 電極２とヒータで形成した面状誘導電極３とからなるイオン源用電界装置を得る ものである。Further, in manufacturing the electric field device for an ion source of this example, first, a binder, for example, a copolymer of vinyl chloride and vinyl chloride was added to a fine ceramic raw material such as alumina powder, and after kneading. The sheet is heated and rolled to form the upper green sheet 1a. A paste containing a conductive material is screen-printed on the surface of the upper green sheet 1a to form the linear electrodes 2 with terminals 2a as shown in FIG. 2, and the same screen printing is performed on the back surface of the upper green sheet 1a. Then, as shown in FIG. 3, the heater wire is bent in a corrugated manner to form an induction electrode 3 having a planar shape as a whole, and the induction electrode 3 is obtained on the surface in the same manner as the upper green sheet 1a. The lower green sheets 1b are superposed on each other, and the upper green sheets 1a and the lower green sheets 1b are integrally thermocompression bonded, and then fired to form the planar dielectric substrate 1 and the linear electrodes 2 described above. An electric field device for an ion source comprising a planar induction electrode 3 formed by a heater is obtained.
【０００７】 本案のイオン源用電界装置を使用する際は図１に示す如く、この面状基板１の 表面に配置されている前記線状電極２と、前記面状誘導電極３との間に沿面放電 発生用電源５を接続する。さらにヒーター配線４の両端間にはヒーター用電源６ を接続する。When the electric field device for an ion source of the present invention is used, as shown in FIG. 1, a gap between the linear electrode 2 and the planar induction electrode 3 arranged on the surface of the planar substrate 1 is obtained. Connect the power supply 5 for generating creeping discharge. Further, a heater power source 6 is connected between both ends of the heater wiring 4.
【０００８】[0008]
この考案は上述の通りであるので線状電極と面状誘導電極の間及びヒーター材 で形成する面状誘導電極３の両端間に夫々前述の放電発生用電源５及びヒーター 用電源６を接続して電圧を印加し、面状誘電体基板の温度を５０°〜１００°Ｃ に保つときはその基板の表面に滲透した湿気及びそこに付着した水分は蒸発して 消滅し、更に該基板温度を３００°Ｃ〜５００°Ｃに保つときはその基板の表面 に付着した塵埃を焼却し、飛散させることができる。即ち、この考案は、従来の 装置のように面状誘電体基板の表面に水分が滲透したり、塵埃などが付着するお それがないので面状誘電体基板の表面に沿面放電が直ちに発生し、イオン源とし てイオンを十分に発生し、又放電による誘電体の劣化もなく、耐久性も伸び、絶 縁破壊強度を十分に保持し、イオン源用電界装置としての性能の低下を来すこと なく、その寿命を著しく延ばすことができる。 Since this invention is as described above, the above-mentioned discharge generating power source 5 and heater power source 6 are connected between the linear electrode and the planar induction electrode and between both ends of the planar induction electrode 3 formed of the heater material, respectively. When a voltage is applied to maintain the temperature of the planar dielectric substrate at 50 ° to 100 ° C, the moisture permeated to the surface of the substrate and the moisture adhering to the substrate evaporate and disappear. When the temperature is kept at 300 ° C to 500 ° C, the dust adhering to the surface of the substrate can be incinerated and scattered. That is, according to this invention, unlike the conventional device, water does not penetrate into the surface of the planar dielectric substrate and dust does not adhere to it, so that a creeping discharge is immediately generated on the surface of the planar dielectric substrate. The ion source generates sufficient ions, the dielectric does not deteriorate due to discharge, the durability is extended, the insulation breakdown strength is sufficiently maintained, and the performance as the electric field device for the ion source deteriorates. Without it, its life can be significantly extended.
【図１】本案の実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】図１のイオン源用電界装置の製造工程を示す斜
面図であり、その中の図２は上層グリーンシートの上面
の斜面図である。FIG. 2 is a perspective view showing a manufacturing process of the electric field device for an ion source of FIG. 1, and FIG. 2 therein is a perspective view of an upper surface of an upper layer green sheet.
【図３】上層グリーンシートの下面の斜面図である。FIG. 3 is a perspective view of the lower surface of the upper layer green sheet.
【図４】下層グリーンシートの上面の斜面図である。FIG. 4 is a perspective view of the upper surface of the lower layer green sheet.
【図５】下層グリーンシートの下面の斜面図である。FIG. 5 is a perspective view of the lower surface of the lower layer green sheet.
１ 面状誘電体基板 ２ 線状電極 ３ 誘導電極 ５ 沿面放電発生用電源 ６ ヒーター用電源 1 planar dielectric substrate 2 linear electrode 3 induction electrode 5 creeping discharge generation power supply 6 heater power supply
Claims (1)
置し、その内部に面状誘導電極を配置したイオン源用電
界装置において、該面状誘電体基板をフアインセラミッ
クで形成し、前記面状誘導電極をヒーターで形成するこ
とを特徴とするイオン源用電界装置。1. In an electric field device for an ion source, wherein a linear electrode is arranged on the surface of a planar dielectric substrate and a planar induction electrode is arranged inside the planar electrode, the planar dielectric substrate is formed of fine ceramics. An electric field device for an ion source, wherein the planar induction electrode is formed by a heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991013281U JP2511953Y2 (en) | 1991-02-16 | 1991-02-16 | Electric field device for ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991013281U JP2511953Y2 (en) | 1991-02-16 | 1991-02-16 | Electric field device for ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0590878U true JPH0590878U (en) | 1993-12-10 |
| JP2511953Y2 JP2511953Y2 (en) | 1996-09-25 |
Family
ID=11828819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991013281U Expired - Lifetime JP2511953Y2 (en) | 1991-02-16 | 1991-02-16 | Electric field device for ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2511953Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007077897A1 (en) * | 2005-12-28 | 2007-07-12 | Ngk Insulators, Ltd. | Dust catching electrode and dust catcher |
| KR20180066389A (en) * | 2016-12-08 | 2018-06-19 | 한국전자통신연구원 | Defogging apparatus and method for defogging using the same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1548906B1 (en) * | 2002-09-04 | 2011-02-23 | Sharp Kabushiki Kaisha | Ion generating device, ion generator having ion generating device and electric apparatus having ion generator |
| JP4828868B2 (en) * | 2005-06-07 | 2011-11-30 | シャープ株式会社 | Positive / negative ion generator and air purifier equipped with the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS601437U (en) * | 1983-06-17 | 1985-01-08 | 日本特殊陶業株式会社 | electric field device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS601437B2 (en) * | 1981-09-07 | 1985-01-14 | 惟臣 渡辺 | Stock sorting device |
-
1991
- 1991-02-16 JP JP1991013281U patent/JP2511953Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS601437U (en) * | 1983-06-17 | 1985-01-08 | 日本特殊陶業株式会社 | electric field device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007077897A1 (en) * | 2005-12-28 | 2007-07-12 | Ngk Insulators, Ltd. | Dust catching electrode and dust catcher |
| KR20180066389A (en) * | 2016-12-08 | 2018-06-19 | 한국전자통신연구원 | Defogging apparatus and method for defogging using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2511953Y2 (en) | 1996-09-25 |
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