JPH0587937B2 - - Google Patents

Info

Publication number: JPH0587937B2
Authority: JP; Japan
Prior art keywords: tip; anode; arc; cathode; diameter
Prior art date: 1990-03-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP2072198A

Other languages

English (en)

Japanese (ja)

Other versions

JPH03274648A (ja

Inventor

Hirohisa Iwabayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ushio Denki KK

Original Assignee

Ushio Denki KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-03-23

Filing date

1990-03-23

Publication date

1993-12-20

1990-03-23 Application filed by Ushio Denki KK filed Critical Ushio Denki KK

1990-03-23 Priority to JP7219890A priority Critical patent/JPH03274648A/ja

1991-12-05 Publication of JPH03274648A publication Critical patent/JPH03274648A/ja

1993-12-20 Publication of JPH0587937B2 publication Critical patent/JPH0587937B2/ja

Status Granted legal-status Critical Current

Links

QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 14
229910052753 mercury Inorganic materials 0.000 claims description 5
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 17
229910052721 tungsten Inorganic materials 0.000 description 17
239000010937 tungsten Substances 0.000 description 17
230000008020 evaporation Effects 0.000 description 9
238000001704 evaporation Methods 0.000 description 9
238000000034 method Methods 0.000 description 7
239000004065 semiconductor Substances 0.000 description 6
235000012431 wafers Nutrition 0.000 description 5
239000011888 foil Substances 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
238000007789 sealing Methods 0.000 description 3
239000013078 crystal Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
230000003685 thermal hair damage Effects 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
239000012141 concentrate Substances 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
230000001678 irradiating effect Effects 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
238000013021 overheating Methods 0.000 description 1
238000004904 shortening Methods 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Landscapes

Discharge Lamp (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

JP7219890A 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯 Granted JPH03274648A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP7219890A JPH03274648A (ja)	1990-03-23	1990-03-23	ショートアーク型水銀蒸気放電灯

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP7219890A JPH03274648A (ja)	1990-03-23	1990-03-23	ショートアーク型水銀蒸気放電灯

Publications (2)

Publication Number	Publication Date
JPH03274648A JPH03274648A (ja)	1991-12-05
JPH0587937B2 true JPH0587937B2 (ko)	1993-12-20

Family

ID=13482295

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP7219890A Granted JPH03274648A (ja)	1990-03-23	1990-03-23	ショートアーク型水銀蒸気放電灯

Country Status (1)

Country	Link
JP (1)	JPH03274648A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3158972B2 (ja) *	1995-06-26	2001-04-23	ウシオ電機株式会社	ショートアーク型水銀ランプ及びその点灯方法
JP4897397B2 (ja) *	2005-12-27	2012-03-14	ハリソン東芝ライティング株式会社	紫外線照射装置
JP5278235B2 (ja) *	2009-08-03	2013-09-04	ウシオ電機株式会社	ショートアーク型放電ランプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS49119481A (ko) *	1973-03-16	1974-11-14
JPS6059733A (ja) *	1983-09-13	1985-04-06	Ushio Inc	半導体露光装置

1990
- 1990-03-23 JP JP7219890A patent/JPH03274648A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS49119481A (ko) *	1973-03-16	1974-11-14
JPS6059733A (ja) *	1983-09-13	1985-04-06	Ushio Inc	半導体露光装置

Also Published As

Publication number	Publication date
JPH03274648A (ja)	1991-12-05

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