JPH0587139A - Magnetic bearing device for rotating machine - Google Patents
Magnetic bearing device for rotating machineInfo
- Publication number
- JPH0587139A JPH0587139A JP3000150A JP15091A JPH0587139A JP H0587139 A JPH0587139 A JP H0587139A JP 3000150 A JP3000150 A JP 3000150A JP 15091 A JP15091 A JP 15091A JP H0587139 A JPH0587139 A JP H0587139A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- center
- shaft
- rotating
- impeller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【０００１】[0001]
【産業用の利用分野】本発明は、ロータ、軸及びモータ
からなる回転部と、該ロータ及び軸の間に位置する固定
部とから成り、前記回転部の軸方向を受動安定形磁気軸
受で支持し、半径方向の位置制御を半径方向制御用電磁
石で行う、所謂２軸制御形の回転機械用磁気軸受装置に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention comprises a rotor, a shaft and a motor, and a fixed part located between the rotor and the shaft. The present invention relates to a so-called biaxial control type magnetic bearing device for a rotary machine, which is supported and whose radial position is controlled by a radial control electromagnet.
【０００２】[0002]
【従来の技術】この様な２軸制御形の回転機械用磁気軸
受装置では、永久磁石から構成された受動安定形磁気軸
受により前記回転部の軸方向位置を一定に保持しつつ、
半径方向の位置、換言すれば所定の平面におけるＸ−Ｙ
方向の位置を、電磁石から構成された能動形磁気軸受で
制御している。2. Description of the Related Art In such a two-axis control type magnetic bearing device for a rotary machine, a passive stable type magnetic bearing composed of a permanent magnet is used to maintain a constant axial position of the rotating part.
Radial position, in other words XY in a given plane
The directional position is controlled by an active magnetic bearing composed of electromagnets.
【０００３】すなわち、受動安定形磁気軸受の永久磁石
の磁気的な作用により前記回転部を所定の軸方向位置に
保持して、且つ半径方向の不安定力を電磁石に供給する
電流を制御することにより抑制して、回転体を非接触浮
上状態で支持している。That is, the rotating portion is held at a predetermined axial position by the magnetic action of the permanent magnet of the passive stable magnetic bearing, and the current for supplying the radial unstable force to the electromagnet is controlled. The rotating body is supported in a non-contact floating state.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来の技術で
は、長物の回転体特有の振れ回り現象を抑制することが
できないと考えられていたため、長物の高速回転体用支
持装置として用いられていなかった。However, in the prior art, it was thought that the whirling phenomenon peculiar to the rotating body of the long object could not be suppressed, so that it was not used as a supporting device for the high speed rotating body of the long object. It was
【０００５】本発明は、上述の従来技術の問題点に鑑み
て提案されたものであり、且つ、分解及び組み立てが極
めて容易で、しかも回転体の振れ回り現象を抑制するこ
とが出来る所謂２軸制御形の回転機械用磁気軸受装置の
提供を目的としている。The present invention has been proposed in view of the above-mentioned problems of the prior art, is extremely easy to disassemble and assemble, and is capable of suppressing the whirling phenomenon of the rotating body. An object of the present invention is to provide a controlled magnetic bearing device for a rotating machine.
【０００６】[0006]
【課題を解決するための手段】本発明の回転機械用磁気
軸受装置は、ロータ、軸及びモータからなる回転部と、
該ロータ及び軸の間に位置する固定部とから成り、前記
回転部の軸方向を受動安定形磁気軸受で支持し、半径方
向の位置制御を半径方向制御用電磁石で行う回転機械用
磁気軸受装置において、前記回転部はその縁部が下方に
延在するフランジ状部分を形成している円盤状の部材と
回転軸とを一体的に固定して構成されており、前記固定
部は概略円筒形状をした部材を含んでいる。A magnetic bearing device for a rotary machine according to the present invention comprises a rotor, a rotor, a shaft, and a motor.
A magnetic bearing device for a rotary machine, which comprises a fixed portion positioned between the rotor and a shaft, supports the rotating portion in the axial direction by a passive stable magnetic bearing, and performs radial position control by a radial control electromagnet. In the above, the rotating portion is configured by integrally fixing a disk-shaped member that forms a flange-shaped portion whose edge extends downward, and the rotating shaft, and the fixed portion has a substantially cylindrical shape. Includes components that have
【０００７】本発明の実施に際して、前記回転部の重心
を前記受動形磁気軸受の軸方向磁気中心に対し軸方向に
偏倚させるのが好ましい。In carrying out the present invention, it is preferable that the center of gravity of the rotating portion is axially offset with respect to the axial magnetic center of the passive magnetic bearing.
【０００８】[0008]
【作用】上記のように構成された本発明の回転機械用磁
気軸受装置によれば、固定部の概略円筒形状をした部材
に、円盤状の部材と回転軸とを一体的に固定して構成さ
れた回転部を被せる様に構成してある。そのため、回転
部を上方に引き上げれば固定部から極めて容易に外すこ
とが出来る。その状態において、必要な保守作業を行え
ば良い。According to the magnetic bearing device for a rotary machine of the present invention constructed as described above, the disk-shaped member and the rotary shaft are integrally fixed to the substantially cylindrical member of the fixed portion. It is constructed so as to cover the rotating part. Therefore, if the rotating part is pulled up, it can be removed from the fixed part very easily. In that state, necessary maintenance work may be performed.
【０００９】保守作業が終了すれば、再び回転部を固定
部に被せることにより、組立作業が容易に行われる。When the maintenance work is completed, the assembly work is easily performed by covering the fixed portion with the rotating portion again.
【００１０】本発明において前記回転部の重心を前記受
動形磁気軸受の軸方向磁気中心に対し軸方向に偏倚させ
れば、半径方向以外に回転軸の傾きに対しても力を発生
させることができる。すなわち、回転体が歳差運動をす
ると回転軸はより倒れる方向に不安定な状態になるが、
受動安定形磁気軸受は吸引形であり且つ回転体軸から離
れている。そのため、回転軸の傾きを中立位置に引き戻
す力を発生し、これを抑制、減衰せしめるのである。In the present invention, if the center of gravity of the rotating portion is axially offset with respect to the axial magnetic center of the passive magnetic bearing, a force can be generated not only in the radial direction but also in the inclination of the rotating shaft. it can. That is, when the rotating body precesses, the rotation axis becomes unstable in the direction in which it falls further,
Passive stable magnetic bearings are attraction and remote from the rotor axis. Therefore, a force for returning the inclination of the rotary shaft to the neutral position is generated, and this force is suppressed and damped.
【００１１】[0011]
【実施例】以下図面を参照して本発明をターボ分子ポン
プに応用した実施例について説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a turbo molecular pump will be described below with reference to the drawings.
【００１２】図１において、ロータすなわち羽根車２２
は周縁部が下方へ垂下したフランジを有する円盤の形状
をしている。該羽根車２２の軸部２３は、固定部２５の
筒部２６に同心に収められ、該筒部２６は円筒形状とな
っている。そして筒部２６の外周面２６ｓと羽根車２２
の内周面２２ｓとの間に受動安定形磁気軸受２０が設け
られている。In FIG. 1, the rotor or impeller 22 is shown.
Has the shape of a disk having a flange whose peripheral portion hangs downward. The shaft portion 23 of the impeller 22 is concentrically housed in the tubular portion 26 of the fixed portion 25, and the tubular portion 26 has a cylindrical shape. The outer peripheral surface 26s of the tubular portion 26 and the impeller 22
The passive stable magnetic bearing 20 is provided between the inner peripheral surface 22s and the inner peripheral surface 22s.
【００１３】図１で図示はされていないが、筒部２６と
軸部２３との間にはモータが設けられている。また、筒
部２６と軸部２３との間には、半径方向制御用電磁石２
１が設けられている。Although not shown in FIG. 1, a motor is provided between the cylinder portion 26 and the shaft portion 23. The radial control electromagnet 2 is provided between the tubular portion 26 and the shaft portion 23.
1 is provided.
【００１４】図１において、受動安定形磁気軸受２０は
リング状の永久磁石３０の上下面をリング状の磁性体３
２、３２で挟持したユニットを、筒部２６の外周面２６
ｓと羽根車２２の内周面２２ｓとにそれぞれ取り付ける
ことで構成されている。ただし、その他のタイプのもの
であっても、受動安定形磁気軸受であれば全て適用可能
である。同様に、半径方向制御用電磁石２１についても
図示のものに限定する趣旨ではない。In FIG. 1, a passive stable magnetic bearing 20 includes a ring-shaped permanent magnet 30 and upper and lower surfaces of the ring-shaped permanent magnet 30.
The unit sandwiched by 2, 32 is attached to the outer peripheral surface 26 of the tubular portion 26.
s and the inner peripheral surface 22s of the impeller 22 respectively. However, all other types of passive stable magnetic bearings are applicable, even if they are of other types. Similarly, the radial control electromagnet 21 is not limited to the illustrated one.
【００１５】図１において、受動安定形磁気軸受２０は
羽根車２２を所定の軸方向位置に保持している。そし
て、半径方向制御用電磁石２１のコイル３４に供給する
電流を制御することにより、軸部２３の半径方向の変位
が抑制される。In FIG. 1, a passive stable magnetic bearing 20 holds an impeller 22 at a predetermined axial position. Then, by controlling the current supplied to the coil 34 of the radial direction control electromagnet 21, the radial displacement of the shaft portion 23 is suppressed.
【００１６】前述の通り、羽根車２２は、その縁部が下
方に延在するフランジ状部分を形成している円盤の様な
形状をしており、固定部２５は円筒状の筒部２６を有し
ている。従って、羽根車２２を上方（符号Ｕ方向）へ引
き上げれば、羽根車２２及び軸部２３は筒部２６から容
易に外れる。メンテナンスに際してはこの様に羽根車２
２及び軸部２３を外して行えば良いので、作業が非常に
容易となり労力を軽減することが出来る。As described above, the impeller 22 has a disk-like shape with its edge portion forming a flange-shaped portion extending downward, and the fixed portion 25 has a cylindrical tubular portion 26. Have Therefore, when the impeller 22 is pulled upward (in the direction of the symbol U), the impeller 22 and the shaft portion 23 can be easily removed from the tubular portion 26. This is the impeller 2 for maintenance
Since it suffices to remove the shaft 2 and the shaft portion 23, the work becomes very easy and the labor can be reduced.
【００１７】メンテナンスが完了すれば、羽根車２２及
び軸部２３を再び固定部２５の筒部２６に挿入すること
により、組立が容易に行われる。When the maintenance is completed, the impeller 22 and the shaft portion 23 are again inserted into the cylindrical portion 26 of the fixing portion 25, so that the assembly is easily performed.
【００１８】図２は本発明の第２実施例を示している。
なお、図１と同一の部材には同一の符号を付してある。FIG. 2 shows a second embodiment of the present invention.
The same members as those in FIG. 1 are designated by the same reference numerals.
【００１９】図２において、ロータすなわち羽根車２２
の軸部２３は、固定部２５の筒部２６に同心に収めら
れ、筒部２６の上部と下部とにはそれぞれ非常用軸受２
８ａ、２８ｂが常時は対向する側に非接触に設けられ、
筒部２６と軸部２３との間には、モータ２４が設けられ
ている。In FIG. 2, the rotor or impeller 22 is shown.
The shaft portion 23 is concentrically housed in the tubular portion 26 of the fixed portion 25, and the emergency bearing 2 is provided in the upper portion and the lower portion of the tubular portion 26, respectively.
8a and 28b are normally provided on the opposite sides in a non-contact manner,
A motor 24 is provided between the tubular portion 26 and the shaft portion 23.
【００２０】また、羽根車２２と筒部２６との間のモー
タ２４の上方には、受動安定形磁気軸受２０が設けら
れ、筒部２６と軸部２３との間のモータ２４の上方に
は、半径方向制御用電磁石２１が設けられている。そし
て、受動安定形磁気軸受２０の軸方向磁気中心すなわち
軸方向積層厚さの中心と、半径方向制御用電磁石２１の
軸方向磁気中心すなわち磁極の軸方向厚さの中心とは、
中心Ｃにおいて一致されていると共に、羽根車２２の重
心Ｇは、中心Ｃより軸方向上方に偏倚量Ｅだけ偏倚され
ている。A passive stable magnetic bearing 20 is provided above the motor 24 between the impeller 22 and the cylinder portion 26, and above the motor 24 between the cylinder portion 26 and the shaft portion 23. A radial control electromagnet 21 is provided. The axial magnetic center of the passive stable magnetic bearing 20, that is, the axial laminated thickness center, and the radial control electromagnet 21 axial magnetic center, that is, the magnetic pole axial thickness center,
The center of gravity G of the impeller 22 is aligned at the center C, and the center of gravity G of the impeller 22 is displaced axially upward from the center C by a displacement amount E.
【００２１】また、上部の非常用軸受２８ａの下方と、
下部の非常用軸受２８ｂの上方との筒部２６には、それ
ぞれ非接触センサで構成された半径方向及び傾き位置検
出器２７ａ、２７ｂが設けられ、それぞれ制御装置４０
に接続されている。そして、制御装置４０には半径方向
制御用電磁石２１に円周等配に配置された複数のコイル
２１ａが接続されている。Also, below the upper emergency bearing 28a,
Radial and tilt position detectors 27a and 27b, each of which is composed of a non-contact sensor, are provided on the cylindrical portion 26 above the lower emergency bearing 28b, and the control device 40 is provided.
It is connected to the. The control device 40 is connected to the radial control electromagnets 21 with a plurality of coils 21 a arranged at equal intervals around the circumference.
【００２２】したがって、前記のように羽根車２２に歳
差運動が発生すると、羽根車２２の重心は中心Ｃより軸
方向上方に偏倚量Ｅだけ偏倚しているので、軸部２３は
より倒れる方向に不安定な状態になる。Accordingly, when the precession motion of the impeller 22 occurs as described above, the center of gravity of the impeller 22 is displaced axially upward from the center C by the displacement amount E, so that the shaft portion 23 is further inclined. Becomes unstable.
【００２３】この際、受動安定形磁気軸受２０は、吸引
形である上に、軸部２３の中心から図示のように離れた
位置に配置されているので、軸部２３の傾きを中立位置
に引き戻そうとする力を発生する。At this time, since the passive stable magnetic bearing 20 is of the attraction type and is arranged at a position away from the center of the shaft portion 23 as shown in the drawing, the inclination of the shaft portion 23 is set to the neutral position. Generates the force to pull back.
【００２４】更に、位置検出器２７ａ、２７ｂが軸部２
３の傾きを検出すると、制御装置４０はこれら位置検出
器２７ａ、２７ｂからの信号に基づき、傾きに対向する
側のコイル２１ａの励磁電流を制御し、磁気吸引力を増
加して軸部２３を中立位置に戻すのである。Further, the position detectors 27a and 27b are attached to the shaft portion 2.
When the inclination of 3 is detected, the control device 40 controls the exciting current of the coil 21a on the side opposite to the inclination based on the signals from the position detectors 27a and 27b to increase the magnetic attraction force to increase the shaft 23. Return to the neutral position.
【００２５】なお図２において、羽根車２２の重心Ｇ
は、中心Ｃより軸方向上方に偏倚されているが、重心Ｇ
を中心Ｃよりも軸方向下方に偏倚して配置することか出
来る旨を付記する。In FIG. 2, the center of gravity G of the impeller 22 is
Is biased axially upward from the center C, but the center of gravity G
It should be noted that can be arranged so as to be offset downward from the center C in the axial direction.
【００２６】[0026]
【発明の効果】以上説明した様に本発明に係る２軸制御
形の回転機械用磁気軸受装置は、その分解及び組立が極
めて容易に行われる。そのため、メンテナンスその他に
費やされる労力を大幅に低減することができる。As described above, the two-axis control type magnetic bearing device for a rotary machine according to the present invention is extremely easy to disassemble and assemble. Therefore, the labor required for maintenance and the like can be significantly reduced.
【００２７】さらに本発明によれば、回転部の重心を前
記受動形磁気軸受の軸方向磁気中心に対し軸方向に偏倚
させることにより、回転軸の傾きを中立位置に引き戻す
力を発生し、該傾きを抑制、減衰せしめることが可能で
ある。Further, according to the present invention, by biasing the center of gravity of the rotating portion in the axial direction with respect to the axial magnetic center of the passive magnetic bearing, a force for returning the inclination of the rotating shaft to the neutral position is generated, and It is possible to suppress and reduce the inclination.
【図１】本発明の第１実施例の全体構成を示す側断面
図。FIG. 1 is a side sectional view showing the overall configuration of a first embodiment of the present invention.
【図２】本発明の第２実施例の全体構成を示す側断面
図。FIG. 2 is a side sectional view showing the overall configuration of a second embodiment of the present invention.
Ｃ・・・受動安定形磁気軸受及び半径方向制御用電磁石
の軸方向磁気中心 Ｅ・・・偏倚量 Ｇ・・・回転部の重心 １〜３・・・回転体側永久磁石 ４〜６・・・固定体側永久磁石 ７、８・・・回転体側磁極 ９、１０・・・固定側磁極 ２０、２０ａ・・・受動安定形軸方向磁気軸受 ２１・・・半径方向制御用電磁石 ２２・・・羽根車 ２２ｓ・・・羽根車内周面 ２３・・・軸部 ２４・・・モータ ２５・・・固定部 ２６・・・筒部 ２６ｓ・・・筒部外周面 ２７ａ、２７ｂ・・・半径方向及び傾き位置検出器 ２８・・・非常用軸受 ２９・・・リング状磁極 ３０・・・永久磁石 ３２・・・磁性体 ３４・・・コイル ４０・・・制御装置C ... Axial magnetic center of passive stable magnetic bearing and electromagnet for radial direction E ... Deflection amount G ... Center of gravity of rotating part 1-3 ... Rotor side permanent magnet 4-6 ... Fixed body side permanent magnet 7, 8 ... Rotating body side magnetic pole 9, 10 ... Fixed side magnetic pole 20, 20a ... Passive stable axial magnetic bearing 21 ... Radial direction control electromagnet 22 ... Impeller 22s ... Impeller inner peripheral surface 23 ... Shaft part 24 ... Motor 25 ... Fixed part 26 ... Cylindrical part 26s ... Cylindrical part outer peripheral surface 27a, 27b ... Radial direction and inclination position Detector 28 ... Emergency bearing 29 ... Ring-shaped magnetic pole 30 ... Permanent magnet 32 ... Magnetic material 34 ... Coil 40 ... Control device
───────────────────────────────────────────────────── フロントページの続き (72)発明者 村上 力 東京都八王子市泉町1444−８ (72)発明者 篠崎 弘行 神奈川県藤沢市本藤沢４丁目２番１号 株 式会社荏原総合研究所内 (72)発明者 白尾 祐司 神奈川県藤沢市本藤沢４丁目２番１号 株 式会社荏原総合研究所内 (72)発明者 金光 陽一 神奈川県藤沢市本藤沢４丁目２番１号 株 式会社荏原総合研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Riki Murakami 1444-8 Izumicho, Hachioji, Tokyo (72) Inventor Hiroyuki Shinozaki 4-2-1 Honfujisawa, Fujisawa-shi, Kanagawa Ebara Research Institute (72) ) Inventor Yuji Shirao 4-2-1 Motofujisawa, Fujisawa-shi, Kanagawa Incorporated EBARA Research Institute (72) Inventor Yoichi Kanemitsu 4-2-1 Motofujisawa, Kanagawa-ken In EBARA Research Institute, Inc.
Claims (2)
と、該ロータ及び軸の間に位置する固定部とから成り、
前記回転部の軸方向を受動安定形磁気軸受で支持し、半
径方向の位置制御を半径方向制御用電磁石で行う回転機
械用磁気軸受装置において、前記回転部はその縁部が下
方に延在するフランジ状部分を形成している円盤状の部
材と回転軸とを一体的に固定して構成されており、前記
固定部は概略円筒形状をした部材を含んでいることを特
徴とする回転機械用磁気軸受装置。1. A rotating part composed of a rotor, a shaft and a motor, and a fixed part positioned between the rotor and the shaft,
In a magnetic bearing device for a rotary machine, wherein an axial direction of the rotating part is supported by a passive stable magnetic bearing, and a radial position control is performed by a radial direction controlling electromagnet, the edge part of the rotating part extends downward. For a rotary machine, which is configured by integrally fixing a disk-shaped member forming a flange-shaped portion and a rotary shaft, and the fixed portion includes a member having a substantially cylindrical shape. Magnetic bearing device.
の軸方向磁気中心に対し軸方向に偏倚させた請求項１に
記載の回転機械用磁気軸受装置。2. The magnetic bearing device for a rotary machine according to claim 1, wherein the center of gravity of the rotating portion is axially biased with respect to an axial magnetic center of the passive magnetic bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3000150A JP2933287B2 (en) | 1991-01-07 | 1991-01-07 | Magnetic bearing device for rotating machinery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3000150A JP2933287B2 (en) | 1991-01-07 | 1991-01-07 | Magnetic bearing device for rotating machinery |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02168485 Division | 1990-06-28 | 1990-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0587139A true JPH0587139A (en) | 1993-04-06 |
| JP2933287B2 JP2933287B2 (en) | 1999-08-09 |
Family
ID=11466011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3000150A Expired - Lifetime JP2933287B2 (en) | 1991-01-07 | 1991-01-07 | Magnetic bearing device for rotating machinery |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2933287B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005121157A (en) * | 2003-10-17 | 2005-05-12 | Rikogaku Shinkokai | Magnetic bearing and motor device for artificial heart |
| JP2021038744A (en) * | 2019-09-05 | 2021-03-11 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump |
-
1991
- 1991-01-07 JP JP3000150A patent/JP2933287B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005121157A (en) * | 2003-10-17 | 2005-05-12 | Rikogaku Shinkokai | Magnetic bearing and motor device for artificial heart |
| JP4557245B2 (en) * | 2003-10-17 | 2010-10-06 | 国立大学法人東京工業大学 | Motor device for artificial heart |
| JP2021038744A (en) * | 2019-09-05 | 2021-03-11 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2933287B2 (en) | 1999-08-09 |
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