JPH0584906A - Ink jet head and its manufacture - Google Patents
Ink jet head and its manufactureInfo
- Publication number
- JPH0584906A JPH0584906A JP24730691A JP24730691A JPH0584906A JP H0584906 A JPH0584906 A JP H0584906A JP 24730691 A JP24730691 A JP 24730691A JP 24730691 A JP24730691 A JP 24730691A JP H0584906 A JPH0584906 A JP H0584906A
- Authority
- JP
- Japan
- Prior art keywords
- substance
- piezoelectric transducer
- polymer
- piezoelectric
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、インク滴を飛翔させ、
記録紙等の記録媒体上にインク像を形成するプリンタ等
インクジェット方式の記録装置に関し、更に詳細にはイ
ンクジェットヘッド、およびその製造方法に関する。BACKGROUND OF THE INVENTION The present invention is directed to ejecting ink droplets,
The present invention relates to an inkjet-type recording apparatus such as a printer that forms an ink image on a recording medium such as recording paper, and more specifically, to an inkjet head and a manufacturing method thereof.
【０００２】[0002]
【従来の技術】特公昭６０−８９５３号公報等に開示さ
れている従来のインクジェットヘッドの構成は、ノズル
開口を有するノズル形成部材と、その背後に配置され、
インクと直接接触する圧電変換器とを有するものであ
る。2. Description of the Related Art The structure of a conventional ink jet head disclosed in Japanese Examined Patent Publication No. Sho 60-8953 is such that a nozzle forming member having a nozzle opening and a nozzle forming member disposed behind the member are provided.
A piezoelectric transducer that is in direct contact with the ink.
【０００３】このような構造のインクジェットヘッドで
は、圧電変換器がノズル形成部材と概ね直交する方向に
変位するごとく振動し、また各ノズル間の流路が、短い
距離で通じていることにより、飛翔したインク滴の安定
性が良く、インク中に気泡、塵埃等の異物が混入した場
合でも、これらの影響を受けることなく正常に動作を維
持できるという特徴を有する。In the ink jet head having such a structure, the piezoelectric transducer vibrates as it is displaced in a direction substantially orthogonal to the nozzle forming member, and the flow paths between the nozzles are connected to each other at a short distance, which results in a flight. The stability of the formed ink droplets is good, and even if foreign matter such as bubbles or dust is mixed in the ink, it is possible to maintain normal operation without being affected by these.
【０００４】しかしながら、前記構造のインクジェット
ヘッドでは、圧電変換器の単位長さ当りの伸縮量や単位
電圧当りの伸縮量が極めて小さく、インク滴の発生力も
小さい。従って、印字に要求されるインク滴の飛翔力を
得るためには、圧電変換器の梁を長くしたり、高い電圧
の印加が必要となり、駆動回路や電気絶縁対策が複雑化
するという問題があった。However, in the ink jet head having the above structure, the expansion / contraction amount per unit length of the piezoelectric transducer and the expansion / contraction amount per unit voltage are extremely small, and the ink droplet generation force is also small. Therefore, in order to obtain the ink droplet flying force required for printing, it is necessary to lengthen the beam of the piezoelectric transducer and apply a high voltage, which complicates the drive circuit and electrical insulation measures. It was
【０００５】この様な問題を解決するため、特公昭６３
−１２５３４３号公報等に開示されている様に、内部電
極と圧電体とが交互に積み重なり、一体化した積層型の
圧電変換器を用いたインクジェットヘッドが提案されて
いる。積層型の圧電変換器は、積層数を調整すること
で、圧電変換器の機械的強度を落とさず、内部電極と内
部電極との層間距離を可及的に小さくできる。圧電体の
薄層化は、電界強度を上げる効果があるため、駆動電圧
の低電圧化が可能である。In order to solve such a problem, Japanese Examined Patent Publication Sho 63
As disclosed in Japanese Laid-Open Patent Publication No. 125343, there is proposed an inkjet head using a laminated piezoelectric transducer in which internal electrodes and piezoelectric bodies are alternately stacked and integrated. By adjusting the number of laminated layers, the laminated piezoelectric transducer can reduce the interlayer distance between the internal electrodes as much as possible without lowering the mechanical strength of the piezoelectric transducer. Since thinning the piezoelectric body has the effect of increasing the electric field strength, it is possible to reduce the driving voltage.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、前述し
た従来のインクジェットヘッドは、何れも圧電変化器自
身が、インクに直接接していたり、インクの遮断が不充
分であるために、使用することができるインクは電気絶
縁性のあるインクに限定されてしまう。従って、電気絶
縁性を優先するために、記録媒体との親和性、インクの
乾燥性などの印字品質や、印字に適応する記録媒体の種
類などを犠牲にしなければならないという課題を有して
いた。However, any of the above-mentioned conventional ink jet heads can be used because the piezoelectric transformer itself is in direct contact with the ink or the ink is not sufficiently blocked. The ink is limited to an electrically insulating ink. Therefore, in order to prioritize the electric insulation, there is a problem that the affinity with the recording medium, the print quality such as the drying property of the ink, and the type of the recording medium adapted to the printing must be sacrificed. ..
【０００７】特に、積層型の圧電変換器の内部電極材料
には、銀や銀−パラジウムを主成分とする金属が使用さ
れており、エレクトロマイグレーション現象による沿面
放電、貫層放電などの故障が発生しやすかった。前記現
象は、圧電変換器がインクに接する、接しないに係わら
ず、電極付近での湿度の存在や温度、内部電極間距離の
高密度化に伴って、助長されるという課題を有してい
た。In particular, a metal containing silver or silver-palladium as a main component is used for the internal electrode material of the laminated piezoelectric transducer, and failures such as creeping discharge and inter-layer discharge due to electromigration phenomenon occur. It was easy. The above-mentioned phenomenon has a problem that it is promoted with the presence of humidity near the electrodes, the temperature, and the increase in the distance between the internal electrodes, regardless of whether the piezoelectric transducer is in contact with the ink or not. ..
【０００８】積層型の圧電変換器は、有機成分を多量に
含んだセラミックス粉末と金属ペーストとを焼結して製
造されるが、焼結後、有機成分が抜けるため、微細な貫
通孔を含む有孔質（この孔を空孔という）となる。その
ため、前記現象は圧電変換器の表面のみならず、内部に
おいても発生する可能性を有している。The laminated piezoelectric transducer is manufactured by sintering a ceramic powder containing a large amount of an organic component and a metal paste. However, since the organic component escapes after the sintering, it contains fine through holes. It becomes porous (this hole is called a hole). Therefore, the phenomenon may occur not only on the surface of the piezoelectric transducer but also inside.
【０００９】そこで、本発明の目的とするところは、こ
れらの課題を解決し、種種のインクを使用することがで
き、しかも信頼性の高いインクジェットヘッドを提案す
ることにある。Therefore, an object of the present invention is to solve these problems and to propose an ink jet head which can use various kinds of inks and which is highly reliable.
【００１０】[0010]
【課題を解決するための手段】本発明のインクジェット
ヘッドは、圧電変換器の表面と空孔とへ、主鎖に炭素鎖
を持ち、側鎖にフッ素の結合を持つポリマーを含有する
電気絶縁性物質を形成したことを特徴とする。The ink jet head of the present invention has an electrical insulating property containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain, to the surface of the piezoelectric transducer and the pores. Characterized by the formation of a substance.
【００１１】又、本発明のインクジェットヘッドの製造
方法は、圧電変換器を、前記ポリマーを含有し、粘度が
少なくとも５００[m/Pa/s]以下の第１の物質へ浸漬、固
化して、前記ポリマーを含有する電気絶縁性物質を形成
した後に、前記ポリマーを含有し、第１の物質の固形分
濃度よりも高い固形分濃度を有する第２の物質を塗布、
固化して、前記ポリマーを含有する電気絶縁性物質を形
成することを特徴とする。Further, in the method for manufacturing an ink jet head of the present invention, the piezoelectric transducer is dipped into a first substance containing the above polymer and having a viscosity of at least 500 [m / Pa / s] or less, and solidified, Forming an electrically insulating substance containing the polymer, and then applying a second substance containing the polymer and having a solid content concentration higher than that of the first substance;
It is characterized by solidifying to form an electrically insulating substance containing the polymer.
【００１２】[0012]
【作用】本発明のインクジェットヘッドによれば、圧電
変換器の表面と空孔とに、主鎖に炭素鎖をもち、側鎖に
フッ素の結合をもつポリマーを含有する電気絶縁性物質
を形成したため、圧電変換器の高い気密封止性が得ら
れ、電気絶縁破壊が抑制される。従って、振動特性の長
期安定性も向上する。According to the ink jet head of the present invention, an electrically insulating substance containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain is formed on the surface and the pores of the piezoelectric transducer. A high airtight sealing property of the piezoelectric converter is obtained, and electrical insulation breakdown is suppressed. Therefore, the long-term stability of vibration characteristics is also improved.
【００１３】また、本発明のインクジェットヘッドの製
造方法によれば、圧電変換器を第１の物質に浸漬、固化
して電気絶縁性物質を形成した後、さらに第２の物質を
塗布、固化するので、第１の物質により形成された電気
絶縁性物質に、ピンホールなどの未形成部分があって
も、これが第２の物質によって補完され、更に気密封止
性の向上した電気絶縁性物質からなる保護層が、圧電変
換器に形成される。According to the method of manufacturing an ink jet head of the present invention, the piezoelectric transducer is dipped in the first substance and solidified to form the electrically insulating substance, and then the second substance is further applied and solidified. Therefore, even if there is an unformed portion such as a pinhole in the electrically insulating substance formed by the first substance, this is complemented by the second substance, and the electrically insulating substance further improved the hermetic sealing property. Is formed on the piezoelectric transducer.
【００１４】[0014]
【実施例】図１は、本発明の一実施例であるインクジェ
ットヘッドの要部の斜視図である。圧電変換器１０は、
圧電性セラミックスなどの圧電体１１と導電材１２ａ、
１２ｂ（以下、内部電極１２ａ、１２ｂと称す）とを、
それぞれ交互に積み重ねた多層構造である。更に、圧電
変換器１０には、導電材１３ａ、１３ｂ（以下、外部電
極１３ａ、１３ｂと称す）が形成されており、外部電極
１３ａは内部電極１２ａと、外部電極１３ｂは内部電極
１２ｂと、それぞれが電気的に導通している。又、圧電
変換器１０は、ベース部材１４上に接合されている。FIG. 1 is a perspective view of a main portion of an ink jet head which is an embodiment of the present invention. The piezoelectric transducer 10 is
A piezoelectric body 11 such as piezoelectric ceramics and a conductive material 12a,
12b (hereinafter referred to as internal electrodes 12a and 12b),
Each has a multi-layer structure that is stacked alternately. Further, the piezoelectric transducer 10 is formed with conductive materials 13a and 13b (hereinafter referred to as external electrodes 13a and 13b). The external electrode 13a is an internal electrode 12a, and the external electrode 13b is an internal electrode 12b. Is electrically connected. Further, the piezoelectric converter 10 is bonded onto the base member 14.
【００１５】図１中には示されてはいないが、この圧電
変換器１０の表面と空孔とへ、主鎖に炭素鎖を持ち、側
鎖にフッ素の結合を持つポリマーを含有する電気絶縁性
物質を形成する。Although not shown in FIG. 1, electrical insulation containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain is provided to the surface and holes of the piezoelectric transducer 10. Form a sexual substance.
【００１６】図２は、上記圧電変換器１０を用いたイン
クジェットヘッドの構造を示す断面図である。インク２
０は、ノズル開口２２を形成した板状のノズル形成部材
２１（以下、ノズルプレート２１と称す）、並びにフレ
ーム２３ａ、２３ｂ、ベース部材１４、突起２５の形成
された弾性板２４の五部材より囲まれたインク室内に充
されており、インク２０の毛細管力により突起２５とノ
ズルプレート２１との間へ供給される。FIG. 2 is a sectional view showing the structure of an ink jet head using the piezoelectric converter 10. Ink 2
0 is surrounded by five members including a plate-shaped nozzle forming member 21 (hereinafter, referred to as a nozzle plate 21) having a nozzle opening 22 and frames 23a and 23b, a base member 14, and an elastic plate 24 having a protrusion 25 formed thereon. It is filled in the filled ink chamber and is supplied between the protrusion 25 and the nozzle plate 21 by the capillary force of the ink 20.
【００１７】かかる構成において、動作電気信号は、フ
レキシブル基板２７を通じて圧電変換器１０に入力され
る。電界が印加された圧電変換器１０は、ノズルプレー
ト２１と直交する方向に収縮する。この電界を解除する
と、圧電変換器１０の弾性的な復元力により、突起２５
とノズルプレート２１との間のインク２０に圧力が加え
られ、ノズル開口２２からインク滴が吐出する。In such a structure, the operation electric signal is input to the piezoelectric converter 10 through the flexible substrate 27. The piezoelectric transducer 10 to which the electric field is applied contracts in the direction orthogonal to the nozzle plate 21. When this electric field is released, the elastic restoring force of the piezoelectric transducer 10 causes the protrusion 25
A pressure is applied to the ink 20 between the nozzle plate 21 and the nozzle plate 21, and an ink droplet is ejected from the nozzle opening 22.
【００１８】図３（ａ）〜（ｆ）に本発明のインクジェ
ットヘッドの製造方法の実施例を示す。尚、本実施例で
は、主鎖に炭素鎖を持ち、側鎖にフッ素も結合を持つポ
リマーを含有した物質として、アセトン、メチルエチル
ケトン、ジメチルフォルムアミド、ジメチルアセトアミ
ドなどに溶解させた、フッ化ビニリデン（以下、ＰＶＤ
Ｆと称す）溶液を用いた。3 (a) to 3 (f) show an embodiment of the method for manufacturing an ink jet head of the present invention. In this example, as a substance containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain, vinylidene fluoride (dissolved in acetone, methyl ethyl ketone, dimethylformamide, dimethylacetamide, etc.) Below, PVD
A solution (referred to as F) was used.
【００１９】先ず、圧電変換板３０とベース部材１４の
両方、或いは何れか片方に接着剤３１を塗布する。その
後、圧電変換板３０とベース部材１４とを貼合わせ、位
置決めを行う。所定の温度、時間、荷重条件で圧締し、
接着剤３１を硬化させ、一枚の板材３２に構成する（図
３（ａ））。First, the adhesive 31 is applied to both or one of the piezoelectric conversion plate 30 and the base member 14. Then, the piezoelectric conversion plate 30 and the base member 14 are attached to each other and positioned. Tighten at the specified temperature, time and load conditions,
The adhesive 31 is cured to form a single plate 32 (FIG. 3A).
【００２０】尚、接着剤３１を塗布した後に、接着剤３
１を減圧処理すると、接着剤３１中の気泡が除去される
ため、接合強度の安定化に極めて効果的である。After applying the adhesive 31, the adhesive 3
Since the bubbles in the adhesive 31 are removed when the pressure reduction treatment of 1 is performed, it is extremely effective in stabilizing the bonding strength.
【００２１】図３中には示していないが、圧電変換板３
０とベース部材１４との接合に於いて、接着剤３１の中
に導電性粒子が混練してあり、機械的接合と電気的接合
とを同時に得ている。Although not shown in FIG. 3, the piezoelectric conversion plate 3
At the time of joining 0 and the base member 14, conductive particles are kneaded in the adhesive 31, so that mechanical joining and electrical joining are obtained at the same time.
【００２２】この様に一体的に構成された板材３２を、
高速で回転する回転砥石刃３４や高速で走行する金属ワ
イヤーなどを用いて溝入れ加工をし、圧電変換器モジュ
ール３３にする。ベース部材１４の表面まで到達するス
リットを、所定の間隔で入れると、一端がベース部材１
４に固定され、他端が自由端となる片持ち梁状の圧電変
換器１０が複数形成される（図３（ｂ））。The plate member 32 thus integrally formed is
Grooving is performed using a rotary grindstone blade 34 that rotates at a high speed, a metal wire that travels at a high speed, or the like to obtain the piezoelectric transducer module 33. If slits reaching the surface of the base member 14 are inserted at predetermined intervals, one end of the base member 1
A plurality of cantilever-shaped piezoelectric transducers 10 fixed to No. 4 and the other end of which is a free end are formed (FIG. 3B).
【００２３】次に、圧電変換器１０の表面と空孔とに、
第１の物質として、ＰＶＤＦ含有溶液３５ａを被覆、充
填する。先ず、圧力容器３６内に圧電変換器モジュール
３３とＰＶＤＦ含有溶液３５ａとを別々に設置する。徐
徐に圧力容器３６内を減圧して行き、平衡圧状態で、圧
電変換器１０をＰＶＤＦ含有溶液３５ａに浸漬する。そ
して、圧力容器３６内に空気を入れ、大気圧を利用して
圧電変換器１０の表面と、空孔を封孔し、被覆と充填を
する（図３（ｃ））。Next, on the surface of the piezoelectric transducer 10 and the holes,
As the first substance, the PVDF-containing solution 35a is coated and filled. First, the piezoelectric transducer module 33 and the PVDF-containing solution 35a are separately installed in the pressure vessel 36. The pressure vessel 36 is gradually depressurized, and the piezoelectric transducer 10 is immersed in the PVDF-containing solution 35a in an equilibrium pressure state. Then, air is introduced into the pressure container 36, the surface of the piezoelectric transducer 10 and the holes are sealed by using atmospheric pressure, and the coating and the filling are performed (FIG. 3C).
【００２４】尚、ＰＶＤＦ含有溶液３５ａは、微細な空
孔へも浸透させる必要があるため、その粘度は少なくと
も５００[m・Pa・s]以下とし、好ましくは１００[m・Pa・s]
以下とする。更に好ましくは２０[m・Pa・s]以下とする。
低粘度であるほど好ましい。浸漬方法は、圧電変換器１
０をＰＶＤＦ含有溶液３５ａに浸漬した後に減圧処理す
る方法でもよい。更に好ましくは、この減圧状態から一
転して、加圧状態にする。すると圧電変換器１０が濡れ
にくい状態であっても、微細な欠陥孔にまで確実に封孔
がなされる。但し、圧力操作をせずに大気圧のみで浸漬
する方法では、ＰＶＤＦ含有溶液３５ａの自然浸透に頼
るため、微細な欠陥孔を有する様な圧電変換器の空孔
は、容易に封孔しにくい。従って、この方法は、圧電変
換器の密度が低い場合か、ＰＶＤＦ含有溶液３５ａの濡
れ性がよく、極めて低粘度な液体である場合に限定され
る。Since the PVDF-containing solution 35a needs to permeate fine pores, its viscosity is at least 500 [m · Pa · s] or less, preferably 100 [m · Pa · s].
Below. It is more preferably 20 [m · Pa · s] or less.
The lower the viscosity, the better. Piezoelectric transducer 1
Alternatively, a method in which 0 is immersed in the PVDF-containing solution 35a and then subjected to a reduced pressure treatment may be used. More preferably, the pressure-reduced state is turned over to the pressurized state. As a result, even if the piezoelectric transducer 10 is difficult to wet, even fine defect holes can be reliably sealed. However, in the method of immersing only the atmospheric pressure without performing pressure operation, since the PVDF-containing solution 35a is naturally permeated, it is difficult to easily seal the pores of the piezoelectric transducer having fine defect holes. .. Therefore, this method is limited to the case where the density of the piezoelectric transducer is low, or where the PVDF-containing solution 35a has a good wettability and is an extremely low-viscosity liquid.
【００２５】次に、ＰＶＤＦ含有溶液３５ａの脱溶剤処
理をする。圧電変換器モジュール３３を徐徐に加熱し、
充填したＰＶＤＦ含有溶液３５ａの溶剤３７を揮発させ
る。これによって、圧電変換器１０の表面には、ＰＶＤ
Ｆ樹脂１６の膜が形成される（図３（ｄ））。Next, the PVDF-containing solution 35a is subjected to solvent removal treatment. The piezoelectric transducer module 33 is gradually heated,
The solvent 37 of the filled PVDF-containing solution 35a is volatilized. As a result, the surface of the piezoelectric transducer 10 has PVD
A film of F resin 16 is formed (FIG. 3D).
【００２６】次に、第２の物質として、脱気処理をした
ＰＶＤＦ含有溶液３５ｂに、圧電変換器モジュール３３
を浸漬し、再度加熱乾燥してＰＶＤＦ樹脂１６膜を形成
する（図３（ｅ）、（ｆ））。Next, as the second substance, the degassed PVDF-containing solution 35b was added to the piezoelectric transducer module 33.
Is soaked and dried again by heating to form a PVDF resin 16 film (FIGS. 3E and 3F).
【００２７】ＰＶＤＦ含有溶液３５ｂの浸漬操作と加熱
乾燥操作とを交互に繰返すと、溶剤３７の揮発によるピ
ンホールなどの塗膜欠陥がなくなり、圧電変換器１０の
ガス遮断性が更に向上する。By alternately repeating the dipping operation of the PVDF-containing solution 35b and the heating and drying operation, coating defects such as pinholes due to volatilization of the solvent 37 are eliminated, and the gas barrier property of the piezoelectric converter 10 is further improved.
【００２８】但し、ＰＶＤＦ含有溶液３５ｂは、ＰＶＤ
Ｆ含有溶液３５ａの被覆で生じた、ピンホールなどの圧
電変換器１０の表面上の塗膜欠陥を補完する目的のもの
であるため、ＰＶＤＦ含有溶液３５ａの固形分濃度より
も高い固形分濃度を有していることが必要である。However, the PVDF-containing solution 35b is PVD
Since the purpose is to complement coating film defects such as pinholes on the surface of the piezoelectric transducer 10 caused by the coating of the F-containing solution 35a, a solid content concentration higher than that of the PVDF-containing solution 35a is set. It is necessary to have.
【００２９】圧電変換器１０の外部との遮断は、圧電変
換器１０の電気絶縁抵抗劣化の防止や振動特性の安定性
などの信頼性向上に重要であり、且つ従来の方法では得
ることが困難であった。これに対し、本実施例によれ
ば、主鎖に炭素鎖を持ち、側鎖にフッ素の結合を持つポ
リマーを含有する電気絶縁性物質１６を、圧電変換器１
０の表面と空孔とに形成することによって、圧電変換器
１０の信頼性を向上させることができた。Isolation of the piezoelectric transducer 10 from the outside is important for preventing deterioration of the electrical insulation resistance of the piezoelectric transducer 10 and improving reliability such as stability of vibration characteristics, and is difficult to obtain by a conventional method. Met. On the other hand, according to the present embodiment, the electrically insulating substance 16 containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain is attached to the piezoelectric transducer 1.
The reliability of the piezoelectric transducer 10 was able to be improved by forming on the surface of 0 and a hole.
【００３０】さらに、前記ポリマーを含有する溶液３５
ａを、先ず充填、固化させた後に、前記ポリマーを含有
する溶液３５ｂに浸漬、固化することにより、前記ポリ
マーを含有する電気絶縁性物質１６のピンホールなどの
塗膜欠陥部分を補完被覆することができるため、吸水
性、ガス遮断性に極めて優れた圧電変換器１０の保護層
が形成できる。Further, a solution 35 containing the polymer
a is first filled and solidified, and then is immersed and solidified in a solution 35b containing the polymer, thereby complementarily covering a coating film defect portion such as a pinhole of the electrically insulating substance 16 containing the polymer. Therefore, it is possible to form a protective layer of the piezoelectric transducer 10 having extremely excellent water absorption and gas barrier properties.
【００３１】本実施例では、ＰＶＤＦを含有する物質を
溶液にして用いたが、溶液に限らず、ディスパージョ
ン、粉体、オルガノゾル、或いは熱溶解によっても可能
である。又、アクリル系、エポキシ系、シリコーン系、
ウレタン系、フェノール系樹脂などと変性しても可能で
ある。In the present embodiment, the substance containing PVDF was used as a solution, but it is not limited to the solution, and it is also possible to use dispersion, powder, organosol, or thermal dissolution. In addition, acrylic, epoxy, silicone,
It is also possible to modify with urethane-based or phenol-based resin.
【００３２】又、本実施例では、主鎖に炭素鎖を持ち、
側鎖にフッ素の結合を持ったポリマーとして、フッ化ビ
ニリデン重合体を用いて説明したが、これに限定される
ものではなく、他にも四フッ化エチレン重合体（ＰＴＦ
Ｅ）系やフルオロエチレンビニルエーテル共重合体（Ｆ
ＥＶＥ）系、三フッ化塩化エチレン共重合体（ＰＣＴＦ
Ｅ）系、フッ化ビニル重合体（ＰＶＦ）系、四フッ化エ
チレン・エチレン共重合体（ＥＴＦＥ）系、四フッ化エ
チレン・六フッ化プロピレン共重合体（ＦＥＰ）系、四
フッ化エチレン・パーフルオロアルキルビニルエーテル
共重合体（ＰＦＡ）系、三フッ化塩化エチレン・エチレ
ン共重合体（ＥＣＴＦＥ）系などによっても可能であ
る。特に、ヤング率が１０7[N/m]以下のゴム状弾性を有
する物質は、圧電変換器１０の振動特性への影響が低
く、塗膜の厚さや厚さ精度の自由度を大きくすることが
できるため、製造も容易となる。Further, in this embodiment, the main chain has a carbon chain,
Although the vinylidene fluoride polymer was used as the polymer having a fluorine bond in the side chain, the polymer is not limited to this, and other tetrafluoroethylene polymer (PTF) is also used.
E) type and fluoroethylene vinyl ether copolymer (F
EVE) type, trifluorochloroethylene copolymer (PCTF
E) type, vinyl fluoride polymer (PVF) type, tetrafluoroethylene / ethylene copolymer (ETFE) type, tetrafluoroethylene / hexafluoropropylene copolymer (FEP) type, tetrafluoroethylene / It is also possible to use a perfluoroalkyl vinyl ether copolymer (PFA) system, a trifluorochloroethylene / ethylene copolymer (ECTFE) system, or the like. In particular, a substance having a rubber-like elasticity having a Young's modulus of 10 7 [N / m] or less has a small influence on the vibration characteristics of the piezoelectric transducer 10, and can increase the degree of freedom in the thickness of the coating film and the thickness accuracy. As a result, manufacturing becomes easy.
【００３３】このゴム状弾性を有する物質には、フッ化
ビニリデンと三フッ化塩化エチレンとの共重合体、フッ
化ビニリデンと六フッ化プロピレンとの共重合体、四フ
ッ化エチレンとプロピレンとの共重合体、フッ化ビニリ
デンと四フッ化エチレンとの共重合体などがある。The substance having rubber-like elasticity includes a copolymer of vinylidene fluoride and ethylene trifluoride chloride, a copolymer of vinylidene fluoride and propylene hexafluoride, and a copolymer of ethylene tetrafluoride and propylene. Examples thereof include a copolymer and a copolymer of vinylidene fluoride and ethylene tetrafluoride.
【００３４】主鎖に炭素鎖を持ち、側鎖にフッ素の結合
を持つポリマーを含有する物質は、耐熱性、耐薬品性、
電気絶縁性、耐電圧性に優れている。中でも吸水性やガ
ス透過性は、極めて低いという特出した特徴を有してい
る。そのため、圧電変換器１０の表面と空孔とへ形成す
ることで、外乱を完璧に遮断することが可能である。本
発明は、前述のような積層型の圧電変換器に限らず、バ
イモルフ型、ユニモルフ型による構造の場合においても
同等の効果を有する。また片持ち梁状の圧電変換器に限
らず、両端を固定する両持ち梁状の圧電変換器の場合で
も有効であることは明かである。A substance containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain is a substance having heat resistance, chemical resistance,
Excellent electrical insulation and voltage resistance. Above all, it has a special feature that the water absorption and the gas permeability are extremely low. Therefore, it is possible to completely block the disturbance by forming the surface of the piezoelectric converter 10 and the holes. The present invention is not limited to the above-described laminated piezoelectric transducer, and has the same effect even in the case of a bimorph type or unimorph type structure. Further, it is apparent that the present invention is effective not only in the cantilever-shaped piezoelectric transducer but also in the case of a cantilever-shaped piezoelectric transducer having both ends fixed.
【００３５】[0035]
【発明の効果】本発明のインクジェットヘッドおよび、
その製造方法によれば、圧電変換器を水分やゴミ等の異
物の混入や汚染、外乱などから完璧に遮断できるという
特有の効果が得られる。従って、圧電変換器の電気絶縁
抵抗劣化がなく、種種のインクを使用することができ、
長期に渡り安定して振動する、信頼性の高いインクジェ
ットヘッドを提供できる。The ink jet head of the present invention, and
According to the manufacturing method, a peculiar effect that the piezoelectric transducer can be completely shielded from contamination, contamination, disturbance, etc. of foreign matter such as water and dust is obtained. Therefore, there is no deterioration of the electrical insulation resistance of the piezoelectric transducer, and various kinds of ink can be used,
It is possible to provide a highly reliable inkjet head that vibrates stably over a long period of time.
【図１】本発明によるインクジェットヘッドの要部の断
面斜視図である。FIG. 1 is a cross-sectional perspective view of a main part of an inkjet head according to the present invention.
【図２】本発明によるインクジェットヘッドの構造を示
す断面図である。FIG. 2 is a sectional view showing a structure of an inkjet head according to the present invention.
【図３】（ａ）〜（ｆ）は、本発明の製造方法の一実施
例を示す製造工程図である。3 (a) to 3 (f) are manufacturing process diagrams showing one embodiment of the manufacturing method of the present invention.
１０ 圧電変換器 １１ 圧電体 １２ａ、ｂ 内部電極 １３ａ、ｂ 外部電極 １４ ベース部材 １５ ベース電極 １６ ＰＶＤＦを含有する電気絶縁性物質 ２０ インク ２１ ノズルプレート、 ２２ ノズル開口 ２３ａ、ｂ フレームａ、ｂ ２４ 弾性板 ２５ 突起 ２６ フレームｂ ２７ フレキシブル基板 ３０ 圧電変換板 ３１ 接着剤 ３２ 圧電変換板とベース部材とを一体化した板材 ３３ 圧電変換器モジュール ３４ 回転砥石刃 ３５ａ ＰＶＤＦを含有した低粘度溶液 ３５ｂ ＰＶＤＦを含有した固形分濃度の高い溶液 ３６ 圧力容器 ３７ 溶剤 ３８ 保護テープ 10 piezoelectric transducer 11 piezoelectric body 12a, b internal electrode 13a, b external electrode 14 base member 15 base electrode 16 electrical insulating material containing PVDF 20 ink 21 nozzle plate, 22 nozzle opening 23a, b frame a, b 24 elasticity Plate 25 Protrusion 26 Frame b 27 Flexible substrate 30 Piezoelectric conversion plate 31 Adhesive 32 Plate material that integrates the piezoelectric conversion plate and the base member 33 Piezoelectric converter module 34 Rotating whetstone blade 35a Low viscosity solution containing PVDF 35b Contains PVDF Solution with high solid content concentration 36 Pressure vessel 37 Solvent 38 Protection tape
Claims (2)
ズル開口を有するノズル形成部材と、このノズル形成部
材の背後に配置された圧電変換器とを有し、ノズル形成
部材と圧電変換器との間にインクが充たされる如く構成
されたインクジェットヘッドにおいて、圧電変換器の表
面と空孔とへ、主鎖に炭素鎖を持ち、側鎖にフッ素の結
合を持つポリマーを含有する電気絶縁性物質を形成した
ことを特徴とするインクジェットヘッド。1. A nozzle forming member and a piezoelectric converter, comprising: a nozzle forming member having a nozzle opening arranged to face a recording medium; and a piezoelectric converter arranged behind the nozzle forming member. In an ink jet head configured to be filled with ink between the surface of the piezoelectric transducer and the pores, an electrically insulating property containing a polymer having a carbon chain in the main chain and a fluorine bond in the side chain. An inkjet head characterized in that a substance is formed.
製造方法であって、圧電変換器を、前記ポリマーを含有
し、粘度が少なくとも５００[m・Pa・s]以下である第１の
物質へ浸漬、固化して、前記ポリマーを含有する電気絶
縁性物質を形成した後に、前記ポリマーを含有し、第１
の物質の固形分濃度よりもの高い固形分濃度を有する第
２の物質を塗布、固化して、前記ポリマーを含有する電
気絶縁性物質を形成することを特徴とするインクジェッ
トヘッドの製造方法。2. The method for manufacturing an ink jet head according to claim 1, wherein the piezoelectric transducer is immersed in a first substance containing the polymer and having a viscosity of at least 500 [m · Pa · s] or less. First solidifying to form an electrically insulative material containing the polymer,
A method of manufacturing an inkjet head, comprising applying a second substance having a solid content concentration higher than the solid content concentration of the substance to solidify to form an electrically insulating substance containing the polymer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24730691A JP3097707B2 (en) | 1991-09-26 | 1991-09-26 | Ink jet head and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24730691A JP3097707B2 (en) | 1991-09-26 | 1991-09-26 | Ink jet head and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0584906A true JPH0584906A (en) | 1993-04-06 |
| JP3097707B2 JP3097707B2 (en) | 2000-10-10 |
Family
ID=17161453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24730691A Expired - Fee Related JP3097707B2 (en) | 1991-09-26 | 1991-09-26 | Ink jet head and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3097707B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6415507B1 (en) * | 1999-02-09 | 2002-07-09 | Toshiba Tec Kabushiki Kaisha | Method for fabricating ink jet printer head |
| US6450627B1 (en) * | 1994-03-21 | 2002-09-17 | Spectra, Inc. | Simplified ink jet head |
| US6682181B1 (en) * | 1994-03-21 | 2004-01-27 | Spectra, Inc. | Ink jet head containing a carbon member |
| EP2489083A1 (en) * | 2009-10-12 | 2012-08-22 | Hewlett-Packard Development Company, L.P. | Repairing defects in a piezoelectric member |
-
1991
- 1991-09-26 JP JP24730691A patent/JP3097707B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6450627B1 (en) * | 1994-03-21 | 2002-09-17 | Spectra, Inc. | Simplified ink jet head |
| US6682181B1 (en) * | 1994-03-21 | 2004-01-27 | Spectra, Inc. | Ink jet head containing a carbon member |
| US6415507B1 (en) * | 1999-02-09 | 2002-07-09 | Toshiba Tec Kabushiki Kaisha | Method for fabricating ink jet printer head |
| EP2489083A1 (en) * | 2009-10-12 | 2012-08-22 | Hewlett-Packard Development Company, L.P. | Repairing defects in a piezoelectric member |
| EP2489083A4 (en) * | 2009-10-12 | 2013-04-03 | Hewlett Packard Development Co | Repairing defects in a piezoelectric member |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3097707B2 (en) | 2000-10-10 |
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