JPH0584643A - Fine groove machining device - Google Patents
Fine groove machining deviceInfo
- Publication number
- JPH0584643A JPH0584643A JP24888491A JP24888491A JPH0584643A JP H0584643 A JPH0584643 A JP H0584643A JP 24888491 A JP24888491 A JP 24888491A JP 24888491 A JP24888491 A JP 24888491A JP H0584643 A JPH0584643 A JP H0584643A
- Authority
- JP
- Japan
- Prior art keywords
- tool
- burnishing tool
- groove
- workpiece
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Automatic Control Of Machine Tools (AREA)
- Turning (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、分光光度計に使用され
る回折格子及び光ディスクの成形用金型の溝加工におい
て、特に従来の熟練者による手動調整では得られなかっ
た高精度な微細溝を形成するのに好適な工具の自動調整
手段をもった微細溝加工装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a highly precise fine groove, which cannot be obtained by manual adjustment by a person skilled in the art, in the groove processing of a diffraction grating used in a spectrophotometer and a molding die for an optical disk. The present invention relates to a fine groove machining apparatus having a tool automatic adjusting means suitable for forming a groove.
【０００２】[0002]
【従来の技術】従来の溝加工用ダイヤモンド工具の角度
調整は、１９９０年度精密工学会秋季大会学術講演会論
文集「電子ビームを用いた光ディスク案内溝の形状寸法
計測」，Ｐ３３〜Ｐ３４，１９９０年９月５日発行に記
載されたように、予め溝加工を行いその溝形状を加工機
外の測定装置で測定し、作業者がＶ溝のバランスから目
視で工具の角度調整をする方式であった。この方式で
は、作業者の個人誤差による溝形状のばらつきが発生す
る欠点があった。2. Description of the Related Art The conventional angle adjustment of a diamond tool for grooving is described in "Analysis of Shapes of Optical Disk Guide Grooves Using Electron Beam", 1990, Precision Engineering Society Autumn Meeting, Academic Lecture Meeting, P33-P34, 1990. As described in the issue on September 5, the method is to perform groove processing in advance, measure the groove shape with a measuring device outside the processing machine, and the operator visually adjusts the tool angle from the balance of the V groove. It was This method has a drawback that the groove shape varies due to individual error of the operator.
【０００３】[0003]
【発明が解決しようとする課題】本発明の目的は、溝加
工用ダイヤモンド工具の角度を高精度に測定し、角度調
整誤差が極めて小さくできるバニシング工具自動調整機
能をもつ微細溝加工装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a fine groove machining apparatus having a burnishing tool automatic adjustment function capable of measuring the angle of a diamond tool for groove machining with high accuracy and making the angle adjustment error extremely small. Especially.
【０００４】[0004]
【課題を解決するための手段】本発明の微細溝加工装置
は、工作物に工具を圧接して得られた圧痕と、この圧痕
と隣接し加工された連続溝を横切る様に平行光を照射
し、この圧痕と連続溝を横切る反射光を電気信号に変換
する光学系と、この平行光を設定量だけ移動する手段か
ら成る光学測定部と、この光学測定部と連動してバニシ
ング工具を設定量だけ回転，直線移動する手段から成る
加工ヘッド部とから構成される。The fine groove machining apparatus of the present invention radiates parallel light so as to cross an indentation obtained by press-contacting a workpiece with a tool and a continuous groove adjacent to the indentation and machined. Then, an optical system that converts the reflected light that crosses the indentation and the continuous groove into an electrical signal, an optical measuring unit that moves this parallel light by a set amount, and a burnishing tool is set in conjunction with this optical measuring unit. It is composed of a machining head unit that is configured to rotate and move linearly by a certain amount.
【０００５】[0005]
【作用】バニシング工具を加工ヘッド部に取り付けた
後、バニシング工具をダミーの工作物に圧接し、工作物
を一回転させて連続溝を形成する。その後、この連続溝
に隣接した位置に工具を移動させ、工作物に圧接し工具
の圧痕をつける。After the burnishing tool is attached to the machining head, the burnishing tool is pressed against the dummy workpiece and the workpiece is rotated once to form a continuous groove. After that, the tool is moved to a position adjacent to this continuous groove, and is pressed against the workpiece to make an impression of the tool.
【０００６】この圧痕の長手方向に平行光を間欠的に設
定量だけ相対変位させ、ある停止位置での反射光の強度
分布を測定し、その信号から圧痕と連続溝の間隔を長さ
に変換し、次の停止位置でも同様に圧痕と連続溝の間隔
を長さに変換する反射光幅検出手段を備え、前記二個所
の反射光の幅変化から工具の傾きを検知すると共に、こ
の傾きを検出精度内でゼロに補正すべく工具の傾きを修
正する駆動手段により、工具の自動調整をする。工具の
自動調整終了後、正規の工作物を主軸に取付け微細溝加
工する。The parallel light is intermittently displaced relative to the longitudinal direction of the indentation by a set amount, the intensity distribution of the reflected light at a certain stop position is measured, and the distance between the indentation and the continuous groove is converted to the length from the signal. However, at the next stop position as well, a reflected light width detection means for converting the distance between the indentation and the continuous groove into a length is similarly provided, and the inclination of the tool is detected from the change in the width of the reflected light at the two points, and this inclination is also detected. The tool is automatically adjusted by the driving means for correcting the inclination of the tool so as to correct it to zero within the detection accuracy. After the automatic adjustment of the tool is completed, a regular work piece is attached to the spindle and fine groove machining is performed.
【０００７】[0007]
【実施例】本発明の実施例を図１ないし図９に示す。図
１は加工機の斜視図である。全体構成は、除振装置６で
支持された定盤５上には、主軸４と工具テーブル１、光
学測定装置３が固定されている。主軸４には、工作物２
が吸着保持されており、この主軸４の回転軸心と直交方
向に直線移動可能な工具テーブル１が配置されており、
工具テーブル１の先端部には、刃先が工作物２に向くよ
うにバニシング工具７が固定されている。さらに、加工
表面を測定できるように光学系が工作物２に向くように
光学測定装置３が配置されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention is shown in FIGS. FIG. 1 is a perspective view of a processing machine. The overall configuration is such that a spindle 4, a tool table 1, and an optical measuring device 3 are fixed on a surface plate 5 supported by a vibration isolation device 6. The work piece 2 is attached to the spindle 4.
Is adsorbed and held, and a tool table 1 which is linearly movable in a direction orthogonal to the rotational axis of the main shaft 4 is arranged,
A burnishing tool 7 is fixed to the tip of the tool table 1 so that the cutting edge faces the workpiece 2. Furthermore, an optical measuring device 3 is arranged so that the optical system faces the workpiece 2 so that the machining surface can be measured.
【０００８】次に、図１のバニシング工具７により工作
物２を加工する状態を図２に示す。頂角α，曲率半径Ｒ
をもつ舟底形状のバニシング工具７を工作物２に一定荷
重で圧接し、バニシング工具７と工作物２に相対速度を
与え、バニシング工具７の切れ刃稜線方向に加工する。Next, FIG. 2 shows a state in which the workpiece 2 is machined by the burnishing tool 7 shown in FIG. Vertical angle α, radius of curvature R
The burnishing tool 7 in the shape of a boat having a bottom is pressed against the work piece 2 with a constant load to give a relative speed to the burnishing tool 7 and the work piece 2, and the burnishing tool 7 is machined in the cutting edge ridge direction.
【０００９】図１の加工方式におけるバニシング工具の
角度調整を図３で説明する。図３は溝加工状態を工具側
から見た図であり、工具移動方向とバニシング工具の切
れ刃稜線が傾きθをもつと、溝断面Ａ−Ａに示す様に、
溝肩部のばり高さが不均一になり、高精度な溝形状が得
られないと言う問題点がある。The angle adjustment of the burnishing tool in the machining system of FIG. 1 will be described with reference to FIG. FIG. 3 is a view of the groove processing state viewed from the tool side. When the tool moving direction and the cutting edge ridge of the burnishing tool have an inclination θ, as shown in the groove cross section AA,
There is a problem that the flash height of the groove shoulder portion becomes non-uniform and a highly accurate groove shape cannot be obtained.
【００１０】そこで、この問題点を解決するために考案
したバニシング工具の角度調整法を図４，図５に示す。
図４はバニシング工具を工作物に圧接して得られる圧痕
と、この工具を用いて５〜１０μｍ離れた位置に加工さ
れた連続溝の顕微鏡写真である。図５は、図４から角度
測定する説明図であり、工具の圧痕と溝との距離Δ1と
Δ2の差と測定個所の距離ｌから、角度誤差θはtan~
1（（Δ1−Δ2）／Ｌ）で求めることができる。The angle adjusting method of the burnishing tool devised to solve this problem is shown in FIGS.
FIG. 4 is a photomicrograph of an indentation obtained by press-contacting a workpiece with a burnishing tool and a continuous groove processed at a position separated by 5 to 10 μm using this tool. FIG. 5 is an explanatory view for measuring the angle from FIG. 4, and the angle error θ is tan ~ from the difference between the distance Δ 1 and Δ 2 between the indentation of the tool and the groove and the distance l at the measurement point.
It can be obtained by 1 ((Δ 1 −Δ 2 ) / L).
【００１１】図６は、図５の測定法のΔ1及びΔ2を光学
的に検出する図１の光学測定装置３の光学系を示す。光
源１０から入射された光は、コリメータレンズ１１，シ
リンドリカルレンズＡ，Ｂ１２，１３及びスリット板１
４を介して平行光になり、集光レンズ１５を介して工作
物２の表面に入射される。このとき入射光は、工作物表
面の圧痕と連続溝を横切るように光軸調整されている。
この反射光をコリメータレンズ１６，偏光板１７，凸レ
ンズ１８を介してフォトダイオードアレイ１９に結像さ
せ、この反射光をアンプ２０を介して電気信号に変換す
る。FIG. 6 shows the optical system of the optical measuring device 3 of FIG. 1 for optically detecting Δ 1 and Δ 2 of the measuring method of FIG. Light incident from the light source 10 is collimator lens 11, cylindrical lenses A, B 12, 13 and slit plate 1.
It becomes parallel light via 4 and enters the surface of the workpiece 2 via the condenser lens 15. At this time, the incident light has its optical axis adjusted so as to traverse the indentation on the workpiece surface and the continuous groove.
This reflected light is imaged on the photodiode array 19 via the collimator lens 16, the polarizing plate 17, and the convex lens 18, and this reflected light is converted into an electric signal via the amplifier 20.
【００１２】図６の光学系で反射光を電気信号に変換し
た出力信号を図７に示す。フォトダイオードアレイ１９
はｎ1〜ｎiまでの番号に対応した出力電圧を得ることが
でき、出力電圧のしきい値Ｖsでスレスホールドすると
圧痕の溝位置に対応したフォトダイオードアレイの位
置、ｎa,ｎbが検出され、連続溝の位置に対応した位置
ｎc，ｎdが求まる。FIG. 7 shows an output signal obtained by converting the reflected light into an electric signal by the optical system shown in FIG. Photodiode array 19
Can obtain the output voltage corresponding to the numbers from n1 to ni, and when the threshold voltage Vs of the output voltage is thresholded, the positions of the photodiode array corresponding to the groove position of the indentation, na and nb, are detected. The positions nc and nd corresponding to the positions of the continuous grooves are obtained.
【００１３】例えば、フォトダイオードアレイの全個数
ｎi=４０９６、画素のピッチ８μｍの場合、光学系の総
合倍率を二千倍とすると、画素の一ピッチで測定できる
分解能は０．００４μｍ、測定距離は１６．３８４μｍ
となる。図７の出力信号をもとに圧痕と連続溝の間隔Δ
1は、［（ｎｄ−ｎｃ）／２−（ｎｂ−ｎａ）／２］×
０．００４μｍで求まる。同様にΔ2を求めることによ
り、角度誤差θはtan~1（Δ1−Δ2／１６．３８４）か
ら算出できる。For example, if the total number of photodiode arrays is ni = 4096 and the pixel pitch is 8 μm, and the total magnification of the optical system is 2000 times, the resolution that can be measured at one pixel pitch is 0.004 μm and the measurement distance is 16.384 μm
Becomes Based on the output signal in Fig. 7, the gap Δ between the indentation and the continuous groove
1 is [(nd-nc) / 2- (nb-na) / 2] ×
It can be obtained by 0.004 μm. Similarly, by determining the delta 2, the angle error θ can be calculated from tan ~ 1 (Δ 1 -Δ 2 /16.384).
【００１４】図８は、図７で算出された角度誤差θを自
動調整する装置の斜視図を示す。主軸４の回転軸心に直
交するように配置されたＸテーブル２１のスライダに積
載されるＹテーブル２７と、Ｙテーブル２７のスライダ
上に設置された回転テーブル２３と、回転テーブル２３
上に固定されたＺテーブルから構成されている。FIG. 8 is a perspective view of an apparatus for automatically adjusting the angle error θ calculated in FIG. The Y table 27 mounted on the slider of the X table 21 arranged so as to be orthogonal to the rotational axis of the main shaft 4, the rotary table 23 installed on the slider of the Y table 27, and the rotary table 23.
It consists of a Z table fixed on top.
【００１５】図９に図８の装置の動作を示す。光学測定
装置３からの補正信号を回転テーブル用モータ２４に入
力し、回転テーブル用駆動ギア２８を介して回転テーブ
ル２３をθだけ回転させる。その後、芯ずれ量δ＝Ｌsi
nθを修正するためＹテーブル用モータ２２に入力し、
芯ずれ量δを補正する。FIG. 9 shows the operation of the apparatus shown in FIG. The correction signal from the optical measuring device 3 is input to the rotary table motor 24, and the rotary table 23 is rotated by θ via the rotary table drive gear 28. After that, misalignment amount δ = Lsi
Input to the Y table motor 22 to correct nθ,
Correct the misalignment amount δ.
【００１６】以上のバニシング工具７の切れ刃稜線を加
工方向に対して、高精度に自動角度調整した後、バニシ
ング工具７を工作物２に圧接し、工作物２を回転させる
と同時にバニシング工具７を支持するＸテーブル２１を
移動させ、工作物２の円周方向に微細溝を加工する。After automatically adjusting the cutting edge ridge of the burnishing tool 7 with respect to the machining direction with high precision, the burnishing tool 7 is pressed against the workpiece 2 to rotate the workpiece 2 and at the same time burnishing tool 7 is rotated. The X table 21 that supports the workpiece is moved to form a fine groove in the circumferential direction of the workpiece 2.
【００１７】[0017]
【発明の効果】本発明によれば、舟底形状のバニシング
工具の切れ刃稜線と加工方向を±０．００６°の高精度
な角度調整ができ、分光光度計に用いられる回折格子
や、光ディスクの成形用金型の微細溝を加工する時、溝
肩部のばり高さの低減、溝形状の高精度化ができる。こ
れにより、回折効率の向上や光ディスクの高密度化が図
れる。According to the present invention, the cutting edge ridge of a boat-bottomed burnishing tool and the machining direction can be adjusted with a high accuracy of ± 0.006 °, and a diffraction grating used in a spectrophotometer or an optical disk. When processing the fine groove of the molding die, it is possible to reduce the flash height of the groove shoulder and improve the accuracy of the groove shape. As a result, the diffraction efficiency can be improved and the density of the optical disc can be increased.
【図１】微細溝加工装置の斜視図、FIG. 1 is a perspective view of a fine groove processing apparatus,
【図２】バニシング工具により加工している状態の説明
図、FIG. 2 is an explanatory view of a state of processing by a burnishing tool,
【図３】バニシング工具による溝加工例の説明図、FIG. 3 is an explanatory view of an example of groove processing by a burnishing tool,
【図４】バニシング工具の圧痕と溝加工した面の説明
図、FIG. 4 is an explanatory view of an indentation and a grooved surface of the burnishing tool,
【図５】バニシング工具の圧痕と円周溝による角度測定
の説明図、FIG. 5 is an explanatory diagram of angle measurement by an indentation and a circumferential groove of a burnishing tool,
【図６】角度測定するための光学系の説明図、FIG. 6 is an explanatory view of an optical system for measuring an angle,
【図７】光学系の出力信号の例の説明図、FIG. 7 is an explanatory diagram of an example of an output signal of the optical system,
【図８】バニシング工具の角度調整部の斜視図、FIG. 8 is a perspective view of an angle adjusting unit of the burnishing tool,
【図９】角度調整部の動作の説明図。FIG. 9 is an explanatory diagram of the operation of the angle adjusting unit.
１…工具テーブル、２…工作物、３…光学測定装置、４
…主軸、５…定盤、６…除振装置、７…バニシング工
具。1 ... Tool table, 2 ... Workpiece, 3 ... Optical measuring device, 4
... spindle, 5 ... surface plate, 6 ... anti-vibration device, 7 ... burnishing tool.
Claims (1)
軸の回転軸心に直交するように直線移動するテーブル
と、前記テーブルの先端には工具の刃先が工作物に向く
ように配置された加工装置において、前記工具と加工方
向とのなす角度を反射光の強度分布から測定する光学測
定手段と、この角度測定をもとに角度誤差を自動補正す
る手段とからなることを特徴とする微細溝加工装置。1. A main shaft for supporting a workpiece in a rotary bearing, a table that linearly moves so as to be orthogonal to the axis of rotation of the main shaft, and a tip of the table is arranged so that a cutting edge of a tool faces the workpiece. In the processing apparatus, it is characterized by comprising an optical measuring means for measuring the angle formed by the tool and the processing direction from the intensity distribution of reflected light, and means for automatically correcting an angle error based on this angle measurement. Fine groove processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24888491A JPH0584643A (en) | 1991-09-27 | 1991-09-27 | Fine groove machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24888491A JPH0584643A (en) | 1991-09-27 | 1991-09-27 | Fine groove machining device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0584643A true JPH0584643A (en) | 1993-04-06 |
Family
ID=17184876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24888491A Pending JPH0584643A (en) | 1991-09-27 | 1991-09-27 | Fine groove machining device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0584643A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003195057A (en) * | 2001-12-25 | 2003-07-09 | Towa Corp | Light guide plate forming method and light guide plate |
-
1991
- 1991-09-27 JP JP24888491A patent/JPH0584643A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003195057A (en) * | 2001-12-25 | 2003-07-09 | Towa Corp | Light guide plate forming method and light guide plate |
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