JPH0573827A - Magnetic head and manufacture thereof - Google Patents

Abstract

PURPOSE:To provide a magnetic head which is superior in a high density recording, an over-writing characteristic, etc., and excellent in a reproducing capability in a high frequency range and which is also low-cost and suitable for mass production. CONSTITUTION:This magnetic head is provided with a first magnetic core 2, a second magnetic core 5, a coil winding groove 3 that is formed on the faces opposite to the first magnetic core 2 and the second magnetic core 5, and a gap material 6. The magnetic head is constituted in such a manner that at least a magnetic film 1 formed on either one of the bevels 4 of the coil winding grooves is exposed on the travelling face 8 of a recording medium.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明はビデオテープレコーダー
やコンピュータ等に用いられる磁気ヘッド及びその製造
方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in video tape recorders, computers and the like, and a method of manufacturing the same.

【０００２】[0002]

【従来の技術】コンピュータの補助記憶装置である磁気
ディスク装置は、小型化、高容量化の技術開発が積極的
に行なわれている。磁気ディスク装置の主要部品のひと
つである磁気記録媒体においては、高保磁力（Ｈｃ）化
や薄膜化の技術が進み短波長域での信号の記録、再生を
可能にしている。一方磁気ヘッドにおいては、高保磁力
（Ｈｃ）を有する磁気記録媒体に飽和記録するために高
い飽和磁束密度（Ｂｓ）を有するＦｅ−Ａｌ−Ｓｉ合金
やアモルファス合金等の金属磁性材料で磁気ギャップ近
傍を形成する所謂メタル−イン−ギャップ磁気ヘッド
（以下、ＭＩＧ磁気ヘッドと略す）が主流になりつつあ
る。2. Description of the Related Art A magnetic disk device, which is an auxiliary storage device for a computer, is actively being developed for miniaturization and high capacity. In the magnetic recording medium, which is one of the main components of the magnetic disk device, the technology of high coercive force (Hc) and thinning has been advanced to enable recording and reproduction of signals in a short wavelength region. On the other hand, in the magnetic head, in order to perform saturation recording on a magnetic recording medium having a high coercive force (Hc), a metal magnetic material having a high saturation magnetic flux density (Bs), such as an Fe—Al—Si alloy or an amorphous alloy, is formed in the vicinity of the magnetic gap. So-called metal-in-gap magnetic heads (hereinafter abbreviated as MIG magnetic heads) to be formed are becoming mainstream.

【０００３】以下に従来のＭＩＧ磁気ヘッドについて説
明する。図６、図７、図８は従来用いられている各種Ｍ
ＩＧ磁気ヘッドの要部側面図である。１１は第１磁性コ
ア、１２は巻線溝、１３は巻線溝斜面、１４は第２磁性
コア、１５は磁性膜、１６はフロントギャップ、１７は
ガラス材、１８はリアギャップである。A conventional MIG magnetic head will be described below. 6, FIG. 7, and FIG. 8 are various types of M that have been conventionally used.
It is a principal part side view of an IG magnetic head. Reference numeral 11 is a first magnetic core, 12 is a winding groove, 13 is a winding groove slope, 14 is a second magnetic core, 15 is a magnetic film, 16 is a front gap, 17 is a glass material, and 18 is a rear gap.

【０００４】以上のように構成された従来のＭＩＧ磁気
ヘッドについて、以下その製造方法について説明する。The manufacturing method of the conventional MIG magnetic head having the above structure will be described below.

【０００５】図６のＭＩＧ磁気ヘッドは、第１磁性コア
１１にダイヤモンド砥石等により巻線溝１２を設けた
後、巻線溝斜面１３を鏡面に仕上げる。次に第１磁性コ
ア１１及び第２磁性コア１４のギャップ形成面を鏡面に
加工した後、スパッタリング等の真空薄膜形成技術によ
りＦｅ−Ａｌ−Ｓｉ合金等の磁性膜１５を少なくともフ
ロントギャップ１６部に１〜１０μｍ程度成膜する。次
に作動ギャップとなるＳｉＯ₂等の非磁性材を介して第
１磁性コア１１と第２磁性コア１４を対向させ巻線溝先
端部にてガラス材１７で溶融・接合して磁気ヘッドを得
る。In the MIG magnetic head shown in FIG. 6, the winding groove 12 is formed on the first magnetic core 11 with a diamond grindstone or the like, and then the winding groove slope 13 is mirror-finished. Next, after the gap forming surfaces of the first magnetic core 11 and the second magnetic core 14 are mirror-finished, a magnetic film 15 of Fe—Al—Si alloy or the like is formed on at least the front gap 16 by a vacuum thin film forming technique such as sputtering. The film is formed to a thickness of about 1 to 10 μm. Next, the first magnetic core 11 and the second magnetic core 14 are opposed to each other through a non-magnetic material such as SiO ₂ which becomes an operating gap, and the glass material 17 is melted and bonded at the tip of the winding groove to obtain a magnetic head. ..

【０００６】次に、図７のＭＩＧ磁気ヘッドの製造方法
について説明する。図６に示すＭＩＧ磁気ヘッドとほぼ
同様に製作するが、記録能力を向上させるために磁性膜
１５を第１磁性コア１１、第２磁性コア１４の両方に成
膜している。しかし前述した２種類の磁気ヘッドはリア
ギャップ１８部にも磁性膜１５が存在するため第１磁性
コア１１と第２磁性コア１４の接着強度が弱く製品歩留
りが低いという欠点がある。又電気抵抗の低い磁性膜１
５がリアギャップ１８部全体に形成されているため高い
周波数では透磁率の劣化により再生能力の劣る磁気ヘッ
ドとなる。更に、他の従来例として図８に示す特開昭５
６−４１５２０号公報で提案されているＭＩＧ磁気ヘッ
ドの製造方法は、磁性膜１５を形成した後、ギャップ形
成面をラッピング等の機械加工によりリアギャップ１８
部の磁性膜１５を除去する工程が必要である。この時フ
ロントギャップ１６の磁性膜１５も、１０〜１５μｍ程
度除去されるため磁性膜１５は、当初１５〜２０μｍ程
度厚みに成膜する必要がある。図６及び図７に示す磁気
ヘッドでは、磁性膜１５の成膜厚さは、ＭＩＧ磁気ヘッ
ドとしての必要厚さのみでよいので５μｍ以下で製作で
きるのに対し、図８の磁気ヘッドは量産性に欠け、ま
た、厚膜に成膜することによる磁性膜１５の応力の作用
で剥離等により低い製品歩留りとなっていた。Next, a method of manufacturing the MIG magnetic head shown in FIG. 7 will be described. Although manufactured in substantially the same manner as the MIG magnetic head shown in FIG. 6, a magnetic film 15 is formed on both the first magnetic core 11 and the second magnetic core 14 in order to improve the recording ability. However, the above-mentioned two types of magnetic heads have the drawback that the magnetic film 15 is present in the rear gap 18 as well, so that the adhesive strength between the first magnetic core 11 and the second magnetic core 14 is weak and the product yield is low. Magnetic film with low electric resistance 1
Since 5 is formed in the entire rear gap 18 part, the magnetic head has a poor reproducing ability at a high frequency due to deterioration of magnetic permeability. Further, as another conventional example, Japanese Patent Application Laid-Open No. Sho 5-5 shown in FIG.
In the method of manufacturing a MIG magnetic head proposed in Japanese Patent Laid-Open No. 6-41520, after forming the magnetic film 15, the gap forming surface is machined by lapping or the like to form the rear gap 18.
A step of removing the magnetic film 15 in some parts is required. At this time, the magnetic film 15 in the front gap 16 is also removed by about 10 to 15 μm, so that the magnetic film 15 must be initially formed to a thickness of about 15 to 20 μm. In the magnetic head shown in FIGS. 6 and 7, the film thickness of the magnetic film 15 need only be the thickness required for the MIG magnetic head, so that the magnetic film 15 can be manufactured with a thickness of 5 μm or less. Moreover, due to the action of the stress of the magnetic film 15 due to the formation of a thick film, the product yield was low due to peeling or the like.

【０００７】次に、ＭＩＧ磁気ヘッドの性能を決定する
最も重要なポイントであるフロントギャップ１６近傍で
の第１磁性コア１１と高飽和磁束密度（Ｂｓ）を有する
磁性膜１５との接合構造について説明する。図９乃至図
１１は図６乃至図８に示す従来のＭＩＧ磁気ヘッドの各
々のフロントギャップ部の要部拡大図である。いずれも
第１磁性コア１１と磁性膜１５との接合面ａ−ａ′とギ
ャップ突き合わせ面ｇ−ｇ′と平行に構成されている。
このため記録時にフロントギャップ１６近傍を通る磁束
は、巻線溝１２のフロントギャップ１６近傍のテーパー
形状により二磁路の断面積が減少しているので、フロン
トギャップ１６部で最も磁束が集中し磁束密度が高くな
る。しかし、磁性膜厚１５が薄い場合には、磁束の流れ
る方向に沿った磁性膜１５の断面積がギャップ突合わせ
面ｇ−ｇ′での断面積（ＳＧ）と第１磁性コア１１と磁
性膜１５との接合面ａ−ａ′での断面積（Ｓａ）とがＳ
Ｇ≒Ｓａとなるため磁性膜厚さ内での磁束の濃縮効果が
得られず起磁力を増大したとき第１磁性コア１１と磁性
膜１５の接合面ａ−ａ′付近の第１磁性コア１１側で磁
気飽和が始まることになる。Next, the junction structure between the first magnetic core 11 and the magnetic film 15 having a high saturation magnetic flux density (Bs) in the vicinity of the front gap 16, which is the most important point for determining the performance of the MIG magnetic head, will be described. To do. 9 to 11 are enlarged views of a main part of each front gap portion of the conventional MIG magnetic head shown in FIGS. 6 to 8. Both are configured in parallel with the joint surface aa ′ between the first magnetic core 11 and the magnetic film 15 and the gap abutting surface gg ′.
Therefore, the magnetic flux passing near the front gap 16 at the time of recording has a reduced cross-sectional area of the two magnetic paths due to the taper shape of the winding groove 12 near the front gap 16, so that the magnetic flux is most concentrated in the front gap 16 portion. Higher density. However, when the magnetic film thickness 15 is thin, the cross-sectional area of the magnetic film 15 along the magnetic flux flowing direction is the cross-sectional area (SG) at the gap abutting surface gg ′, the first magnetic core 11 and the magnetic film. The cross-sectional area (Sa) at the joint surface aa ′ with 15 is S
Since G≈Sa, the effect of concentrating the magnetic flux within the magnetic film thickness cannot be obtained, and when the magnetomotive force is increased, the first magnetic core 11 near the joint surface aa ′ between the first magnetic core 11 and the magnetic film 15 is increased. Side will start magnetic saturation.

【０００８】[0008]

【発明が解決しようとする課題】しかしながら上記従来
の構成では、ＭＩＧ磁気ヘッドの磁性膜と第１磁性コア
との接合面ａ−ａ′がギャップ突合わせ面ｇ−ｇ′と平
行であるために磁性膜中を通る磁束の濃縮効果が少な
く、その結果ＭＩＧ磁気ヘッドの種々の性能を発揮でき
ないという問題点を有していた。However, in the above-mentioned conventional structure, the joint surface aa 'between the magnetic film of the MIG magnetic head and the first magnetic core is parallel to the gap abutting surface g-g'. There is a problem that the effect of concentrating the magnetic flux passing through the magnetic film is small, and as a result, various performances of the MIG magnetic head cannot be exhibited.

【０００９】本発明は上記問題点を解決することを目的
とし、高密度記録、オーバライト特性等に優れ、かつ高
周波数域における再生能力に優れたＭＩＧ磁気ヘッドの
提供を目的とするものであり、また、その製造方法は、
ギャップデプス及び記録媒体走行面への磁性膜の露出幅
を簡単な操作で高精度で調整することができ低原価で高
い製品歩留りで製造することができる磁気ヘッドの製造
方法を提供することを目的とする。An object of the present invention is to solve the above problems, and an object of the present invention is to provide a MIG magnetic head which is excellent in high density recording, overwrite characteristics, and the like and has excellent reproducing ability in a high frequency range. Also, the manufacturing method is
An object of the present invention is to provide a method of manufacturing a magnetic head capable of adjusting the gap depth and the exposed width of the magnetic film on the running surface of the recording medium with high precision by a simple operation and at a low cost and with a high product yield. And

【００１０】[0010]

【課題を解決するための手段】この目的を達成するため
に本発明の磁気ヘッドは、巻線溝のフロントギャップ近
傍の傾斜面、またはギャップ面を介して両側に成膜形成
された磁性膜のギャップ側に延在した端面の少なくとも
一方の面の端部が、磁気記録媒体対向面に露出するよう
に形成された構成を有し、また、その製造方法は巻線溝
を形成した磁性コアの少なくとも巻線溝斜面に磁性膜を
成膜した磁性コアをギャップ材を介して突合わせ一体化
したのち、いわゆるギャップデプス加工を行い、記録媒
体対向面に巻線溝斜面に形成した磁性膜層の一部を媒体
対向面に露出させる工程を備えた構成を有している。In order to achieve this object, a magnetic head according to the present invention comprises a magnetic film formed on both sides of an inclined surface near a front gap of a winding groove or a gap surface. An end portion of at least one of the end surfaces extending to the gap side is formed so as to be exposed at the magnetic recording medium facing surface, and the manufacturing method is the same as that of a magnetic core having a winding groove. At least the magnetic core with the magnetic film formed on the slope of the winding groove is butt-integrated via the gap material, and then so-called gap depth processing is performed to form the magnetic film layer formed on the slope of the winding groove on the recording medium facing surface. It has a configuration including a step of exposing a part thereof to the medium facing surface.

【００１１】[0011]

【作用】この構成によって本発明の磁気ヘッドは、磁性
膜内での磁束の濃縮（磁束密度の上昇）効果を高めるこ
とができ、ギャップ突合わせ面で、高磁界を形成し高記
録密度特性を得ることができる。また本発明による磁気
ヘッドの製造方法は媒体対向面のラップ等による簡単な
仕上げだけで高信頼性の磁気ヘッドを高い製品歩留りで
製造できる。With this structure, the magnetic head of the present invention can enhance the effect of concentrating the magnetic flux in the magnetic film (increasing the magnetic flux density), and forming a high magnetic field at the gap abutting surface to achieve high recording density characteristics. Obtainable. Further, the method of manufacturing a magnetic head according to the present invention can manufacture a highly reliable magnetic head with a high product yield only by simple finishing such as lapping of the medium facing surface.

【００１２】[0012]

【実施例】【Example】

（実施例１）以下本発明の第一実施例について、図面を
参照しながら説明する。(Embodiment 1) A first embodiment of the present invention will be described below with reference to the drawings.

【００１３】図１は本発明の磁気ヘッドの要部側面図で
ある。１は磁性膜、２は第１磁性コア、３は巻線溝、４
は巻線溝斜面、５は第２磁性コア、６はギャップ材、７
はガラス材、８は記録媒体走行面である。FIG. 1 is a side view of a main part of a magnetic head of the present invention. 1 is a magnetic film, 2 is a first magnetic core, 3 is a winding groove, 4
Is a winding groove slope, 5 is a second magnetic core, 6 is a gap material, 7
Is a glass material, and 8 is a recording medium running surface.

【００１４】以上のように構成された磁気ヘッドについ
て、以下その製造方法を図３の工程図を用いて説明す
る。The manufacturing method of the magnetic head having the above structure will be described below with reference to the process chart of FIG.

【００１５】（ａ）において、Ｍｎ−Ｚｎフェライト等
の磁性コア２にダイヤモンド砥石等により巻線溝３を形
成した後、巻線溝斜面４を砥粒径の小さいダイヤモンド
砥石等により鏡面に仕上げる。巻線溝斜面４の角度θ１
は、３０°〜６０°程度が望ましい。次に（ｂ）におい
て、スパッタリング等の真空薄膜形成技術によりＦｅ−
Ａｌ−Ｓｉ合金、Ｆｅ−Ｎｉ合金等の高飽和磁束密度
（Ｂｓ）を有する磁性膜１を巻線溝斜面４と略直角方向
から５〜１０μｍ程度成膜した後磁性膜１の透磁率
（μ）が向上する温度条件で熱処理を行う。（ｃ）にお
いて、第１磁性コア２及び第２磁性コア５のギャップ形
成面をダイヤモンド砥粒を用いたラッピング加工等によ
り鏡面に加工する。このラッピング加工によりギャップ
形成面に成膜された磁性膜１は除去され、磁性膜１は巻
線溝斜面４部にのみ残る。次に、（ｄ）において、ギャ
ップ形成面にＳｉＯ2やガラス等を真空薄膜形成法によ
りギャップ長（Ｇ．Ｌ）と同等寸法のギャップ材６を成
膜し第１磁性コア２と第２磁性コア５のギャップ形成面
を対向し加圧する。その後巻線溝３にガラス材７を挿入
し７００℃前後で第１磁性コア２と第２磁性コア５を接
着する。次に（ｅ）において、記録媒体走行面８をダイ
ヤモンド砥粒等を用いた研削加工やラッピング加工によ
り磁性膜１の一部が露出するまで加工する。（ｇ）はそ
の底面端面図である。更に（ｆ）において、磁気ヘッド
の用途等に合わせ研削し磁性膜１を露出させる。（ｈ）
はその記録媒体走行面を形成する低面端面図である。記
録媒体走行面の磁性膜１の幅は巻線溝斜面４の角度θ１
と磁性膜１の成膜した厚みにより決定される。例えばギ
ャップ深さ（Ｇ．Ｄ）が１５μｍの場合には、巻線溝斜
面４の角度θ１を３０°に設定し磁性膜１を巻線溝斜面
４と略直角方向から１０μｍ成膜し、記録媒体走行面８
に２．５μｍ幅の磁性膜１が露出する様に加工する。こ
の時記録媒体走行面８に露出する磁性膜１の幅によりギ
ャップデプス（Ｇ．Ｄ）寸法が計算できるため、コンポ
ジットタイプ浮動型磁気ヘッド等のギャップデプス
（Ｇ．Ｄ）寸法が直読できない磁気ヘッドはこの方法に
より生産性の向上及び歩留りの向上を図ることも可能で
ある。又、近年は磁気ヘッドの狭トラック化が進んでい
るが、狭トラックの磁気ヘッドで従来の磁気ヘッドに近
い高出力を得るためギャップ深さ（Ｇ．Ｄ）は１０μｍ
以下にする場合が増えている。そのため磁性膜１は、５
〜６μｍ程度の成膜で良く図８に示す従来の磁気ヘッド
に比べてさらに量産性を図ることが可能である。In (a), the winding groove 3 is formed on the magnetic core 2 of Mn-Zn ferrite or the like with a diamond grindstone or the like, and then the winding groove slope 4 is mirror-finished with a diamond grindstone or the like having a small abrasive grain size. Angle θ1 of winding groove slope 4
Is preferably about 30 ° to 60 °. Next, in (b), Fe- is formed by a vacuum thin film forming technique such as sputtering.
After the magnetic film 1 having a high saturation magnetic flux density (Bs) such as an Al-Si alloy or an Fe-Ni alloy is formed to a thickness of about 5 to 10 μm from a direction substantially perpendicular to the winding groove slope 4, the magnetic permeability of the magnetic film 1 (μ ) Is improved under the temperature condition. In (c), the gap forming surfaces of the first magnetic core 2 and the second magnetic core 5 are mirror-finished by lapping or the like using diamond abrasive grains. The magnetic film 1 formed on the gap forming surface by this lapping process is removed, and the magnetic film 1 remains only on the slope 4 of the winding groove. Next, in (d), a gap material 6 having the same size as the gap length (GL) is formed on the gap formation surface by vacuum thin film forming method to form a first magnetic core 2 and a second magnetic core. The gap forming surface of 5 is opposed and pressed. After that, the glass material 7 is inserted into the winding groove 3 and the first magnetic core 2 and the second magnetic core 5 are bonded at around 700 ° C. Next, in (e), the recording medium running surface 8 is processed by grinding or lapping using diamond abrasive grains or the like until a part of the magnetic film 1 is exposed. (G) is an end view of the bottom surface. Further, in (f), the magnetic film 1 is exposed by grinding according to the application of the magnetic head. (H)
FIG. 3 is an end view of the lower surface forming the running surface of the recording medium. The width of the magnetic film 1 on the recording medium running surface is the angle θ1 of the slope 4 of the winding groove.
And the thickness of the magnetic film 1 deposited. For example, when the gap depth (G.D.) is 15 μm, the angle θ1 of the winding groove slope 4 is set to 30 °, the magnetic film 1 is formed in a thickness of 10 μm from the direction substantially perpendicular to the winding groove slope 4, and recording is performed. Medium running surface 8
Is processed so that the magnetic film 1 having a width of 2.5 μm is exposed. At this time, since the gap depth (GD) dimension can be calculated from the width of the magnetic film 1 exposed on the recording medium running surface 8, the gap depth (GD) dimension of the composite type floating magnetic head or the like cannot be directly read. It is also possible to improve productivity and yield by this method. Further, in recent years, the track width of the magnetic head has been narrowed, but the gap depth (GD) is 10 μm in order to obtain a high output close to that of the conventional magnetic head with the narrow track magnetic head.
The number of cases below is increasing. Therefore, the magnetic film 1 has 5
It is sufficient to form a film having a thickness of about 6 μm, and it is possible to achieve further mass productivity as compared with the conventional magnetic head shown in FIG.

【００１６】（実施例２）以下本発明の第２の実施例に
ついて図面を参照しながら説明する。(Second Embodiment) A second embodiment of the present invention will be described below with reference to the drawings.

【００１７】図２は本発明の第２実施例の磁気ヘッドの
要部側面図である。２は第１磁性コア、５は第２磁性コ
ア、８は記録媒体走行面で、以上は図１の構成と同様な
ものである。図１と構成の異なるのは、第１磁性コア２
の磁性膜１ａ、第２磁性コア５の磁性膜１ｂ、θ１の傾
斜角を有する第１磁性コア２の巻線溝斜面４ａ、θ２の
傾斜角を有する第２磁性コアの巻線溝斜面４ｂである。FIG. 2 is a side view of the essential parts of a magnetic head according to the second embodiment of the present invention. Reference numeral 2 is a first magnetic core, 5 is a second magnetic core, 8 is a recording medium running surface, and the above is the same as the configuration of FIG. The configuration differs from that of FIG. 1 in that the first magnetic core 2 is used.
Of the magnetic film 1a, the magnetic film 1b of the second magnetic core 5, the winding groove slope 4a of the first magnetic core 2 having an inclination angle of θ1, and the winding groove slope 4b of the second magnetic core having an inclination angle of θ2. is there.

【００１８】以上のように構成された第２実施例の磁気
ヘッドについて、以下その製造方法を説明する。第１磁
性コア２及び第２磁性コア５の両磁性コアに磁性膜１を
形成するいわゆる両面ＭＩＧ磁気ヘッドの場合は、図１
に示す一対の第１磁性コア２のギャップ形成面を対向し
７００℃前後で接着する方法がある。しかしこの方法で
は、ギャップデプス（Ｇ．Ｄ）方向に２つの磁性コア間
でズレが発生する可能性があり、記録媒体走行面を加工
しギャップデプス（Ｇ．Ｄ）寸法をコントロールする時
に片方の磁性コアの磁性膜１が記録媒体走行面８に露出
しないことが考えられる。それを防止し第１磁性コア２
でギャップデプス（Ｇ．Ｄ）寸法が決まる様に、第２磁
性コア５の巻線溝斜面４ｂの角度θ２を１０〜２０°程
度に小さくし、磁性膜１ｂをギャップ形成面に幅広く露
出するよう製作する。例えば第２磁性コア５の巻線溝斜
面４ｂの角度θ２を１０°で加工し磁性膜１ｂを巻線溝
斜面４ｂと略直角方向から８μｍ成膜しギャップ形成面
を鏡面に加工した場合、ギャップ形成面に露出する磁性
膜の幅は４６μｍ程度である。一方第１磁性コア２の巻
線溝斜面４ａの角度θ１を４５°で加工し磁性膜１ａを
巻線溝斜面４ａと略直角方向から８μｍ成膜した場合、
ギャップ形成面に露出する磁性膜１の幅は１１μｍ程度
となる。第２磁性コア５の磁性膜１ｂと第１磁性コア２
の磁性膜１ａを対向してギャップ形成するためには、双
方の磁性膜の膜厚の差つまり３５μｍ程度までのギャッ
プデプス（Ｇ．Ｄ）方向の磁性コア間のズレが許され
る。以上のように磁性膜１を両磁性コアに成膜する磁気
ヘッドにおいても本発明が適用できる。A method of manufacturing the magnetic head of the second embodiment having the above structure will be described below. In the case of a so-called double-sided MIG magnetic head in which the magnetic film 1 is formed on both the first magnetic core 2 and the second magnetic core 5, FIG.
There is a method in which the gap forming surfaces of the pair of first magnetic cores 2 shown in FIG. However, in this method, a gap may occur between the two magnetic cores in the gap depth (G.D.) direction, and when the recording medium running surface is processed and the gap depth (G.D.) dimension is controlled, It is considered that the magnetic film 1 of the magnetic core is not exposed on the recording medium running surface 8. To prevent this, the first magnetic core 2
So that the gap depth (G.D.) dimension is determined by the angle .theta.2 of the winding groove slope 4b of the second magnetic core 5 to about 10 to 20.degree. So that the magnetic film 1b is widely exposed on the gap forming surface. To manufacture. For example, when the angle θ2 of the winding groove slope 4b of the second magnetic core 5 is processed to be 10 ° and the magnetic film 1b is formed in a thickness of 8 μm from a direction substantially perpendicular to the winding groove slope 4b and the gap forming surface is processed into a mirror surface, The width of the magnetic film exposed on the formation surface is about 46 μm. On the other hand, when the angle θ1 of the winding groove slope 4a of the first magnetic core 2 is processed to 45 ° and the magnetic film 1a is formed in a thickness of 8 μm from the direction substantially perpendicular to the winding groove slope 4a,
The width of the magnetic film 1 exposed on the gap forming surface is about 11 μm. The magnetic film 1b of the second magnetic core 5 and the first magnetic core 2
In order to form the gaps of the magnetic films 1a facing each other, a gap between the magnetic cores in the gap depth (GD) direction of up to about 35 μm, that is, a difference in film thickness between the magnetic films is allowed. The present invention can be applied to a magnetic head in which the magnetic film 1 is formed on both magnetic cores as described above.

【００１９】次に、その他の実施例も含めギャップ近傍
の要部拡大図を図４に示す。図４ａは図１に示す磁気ヘ
ッドのギャップ近傍の拡大図である。図４ｂは図４ａと
同方法で製造し、記録媒体走行面８に磁性膜１が露出し
た瞬間に記録媒体走行面８の加工をやめて製作した実施
例であるが電磁変換特性は、図４ａとほぼ同等である。
又図４ｃ，ｄ，ｅ，ｆは、第１磁性コア２、第２磁性コ
ア５の両磁性コアに磁性膜１を形成した実施例であり、
本発明の製造方法で製作した第１磁性コア１と従来のメ
タル−イン−ギャップタイプ磁気ヘッドの製造方法で製
作した第２磁性コア５の組合わせで磁気ヘッドを製作す
ることができる。これらの磁気ヘッドの電磁変換特性は
図２に示す磁気ヘッドと同等の電磁変換特性である。Next, FIG. 4 shows an enlarged view of a main part in the vicinity of the gap including the other embodiments. FIG. 4a is an enlarged view near the gap of the magnetic head shown in FIG. FIG. 4b is an embodiment manufactured by the same method as FIG. 4a, in which the processing of the recording medium running surface 8 is stopped at the moment when the magnetic film 1 is exposed on the recording medium running surface 8. It is almost the same.
4c, d, e, and f are examples in which the magnetic film 1 is formed on both the first magnetic core 2 and the second magnetic core 5.
A magnetic head can be manufactured by combining the first magnetic core 1 manufactured by the manufacturing method of the present invention and the second magnetic core 5 manufactured by the conventional metal-in-gap type magnetic head manufacturing method. The electromagnetic conversion characteristics of these magnetic heads are the same as those of the magnetic head shown in FIG.

【００２０】（実施例３〜５）以下本発明の第３乃至第
５の実施例について図面を参照しながら説明する。(Embodiments 3 to 5) Hereinafter, third to fifth embodiments of the present invention will be described with reference to the drawings.

【００２１】図５は第３乃至第５実施例の磁気ヘッドの
要部側面図である。（ａ）は第３実施例を示し、リアギ
ャップ９に磁性膜１を残した構成からなる。（ｂ）は第
４実施例を示し、巻線溝３全体に磁性膜１を設けた構成
からなる。（ｃ）は第５実施例を示し、巻線溝３のうち
巻線溝斜面４のみに磁性膜１を形成した構成からなる。
いずれの磁気ヘッドも本発明を応用したものである。な
おこの様な実施例を図４の実施例に組合わせて使用でき
ることはいうまでもない。FIG. 5 is a side view of essential parts of the magnetic heads of the third to fifth embodiments. (A) shows a third embodiment, which has a structure in which the magnetic film 1 is left in the rear gap 9. (B) shows a fourth embodiment, which has a structure in which the magnetic film 1 is provided on the entire winding groove 3. (C) shows a fifth embodiment, which has a structure in which the magnetic film 1 is formed only on the winding groove slope 4 of the winding groove 3.
Any of the magnetic heads applies the present invention. It goes without saying that such an embodiment can be used in combination with the embodiment of FIG.

【００２２】次に、本発明の磁気ヘッドについて、以下
そのギャップ近傍部における磁束の流れを説明する。Next, regarding the magnetic head of the present invention, the flow of magnetic flux in the vicinity of the gap will be described below.

【００２３】図１２はギャップ近傍部における磁束の流
れを示す模式図である。（ａ）は本発明の磁気ヘッドの
ギャップ近傍の磁束の流れを示した模式図であり、
（ｂ）は従来の磁気ヘッドの磁束の流れを示した模式図
である。（ｂ）に示す従来の磁気ヘッドでは記録時にフ
ロントギャップ近傍の第１磁性コア２が飽和し飽和磁束
密度の高い磁性膜１に磁束が多く流れる。磁性膜１を流
れる磁束はフロントギャップ１６を通過するときほとん
どが第２磁性コア５へ流れるため記録媒体２０を記録す
るための磁界へは貢献しない。これに対し（ａ）に示す
本発明の磁気ヘッドは、第１磁性コア２の断面積が小さ
くなるに従って飽和磁束密度の高い磁性膜１の比率が高
くなるため磁気ヘッドの飽和は発生しないし、ギャップ
デプス（Ｇ．Ｄ）方向のどの部分も磁束量は一定となる
ため、記録媒体２０を記録する記録磁界は大きくなる。
又磁束が第１磁性コア２から徐々に磁性膜１に移るため
第１磁性コア２と磁性膜１との境界での漏れ磁束が従来
構造に比べて著しく小さく境界での疑似出力の発生が問
題にならない等の特徴がある。FIG. 12 is a schematic diagram showing the flow of magnetic flux in the vicinity of the gap. (A) is a schematic diagram showing the flow of magnetic flux near the gap of the magnetic head of the present invention,
(B) is a schematic diagram showing a flow of magnetic flux of a conventional magnetic head. In the conventional magnetic head shown in (b), a large amount of magnetic flux flows through the magnetic film 1 having a high saturation magnetic flux density because the first magnetic core 2 near the front gap is saturated during recording. Most of the magnetic flux flowing through the magnetic film 1 flows to the second magnetic core 5 when passing through the front gap 16, and therefore does not contribute to the magnetic field for recording on the recording medium 20. On the other hand, in the magnetic head of the present invention shown in (a), as the cross-sectional area of the first magnetic core 2 becomes smaller, the ratio of the magnetic film 1 having a higher saturation magnetic flux density becomes higher, so that the saturation of the magnetic head does not occur. Since the amount of magnetic flux is constant at any portion in the gap depth (GD) direction, the recording magnetic field for recording on the recording medium 20 becomes large.
Further, since the magnetic flux gradually moves from the first magnetic core 2 to the magnetic film 1, the leakage magnetic flux at the boundary between the first magnetic core 2 and the magnetic film 1 is significantly smaller than that of the conventional structure, and a pseudo output is generated at the boundary. There are features such as not becoming.

【００２４】[0024]

【発明の効果】以上のように本発明の磁気ヘッドは、巻
線溝斜面上の磁性膜が記録媒体走行面に一部露出してい
るので、高密度記録、オーバーライト特性が向上し更
に、高周波数域においても高い再生能力を有する優れた
磁気ヘッドを実現できるものであり、更に、本発明の磁
気ヘッドの製造方法は、巻線溝斜面上に磁性膜を成膜
し、記録媒体走行面に磁性膜の一端部を露出させる簡単
な工程で、高品質、高信頼性の磁気ヘッドを高い歩留り
で量産性よく製造できる優れたものであり、また、ギャ
ップデプス（Ｇ．Ｄ）寸法の変化と共に磁性膜の記録媒
体走行面に露出する幅を自由に変えることができるため
ギャップデプス寸法のコントロールモニタとなりギャッ
プデプス寸法精度の高い磁気ヘッドを提供できる優れた
磁気ヘッドの製造方法を実現できるものである。As described above, in the magnetic head of the present invention, since the magnetic film on the slope of the winding groove is partially exposed on the recording medium running surface, high density recording and overwrite characteristics are improved, and further, It is possible to realize an excellent magnetic head having a high reproducing ability even in a high frequency range. Further, in the method of manufacturing a magnetic head of the present invention, a magnetic film is formed on the slope of the winding groove, and a recording medium running surface is formed. It is an excellent product that can produce high quality and high reliability magnetic heads with high yield and high mass productivity by a simple process of exposing one end of the magnetic film. Also, it is possible to change the gap depth (GD) dimension. At the same time, since the width of the magnetic film exposed on the recording medium running surface can be freely changed, it serves as a control monitor of the gap depth dimension and can provide a magnetic head with high gap depth dimension accuracy. It is those that can be achieved.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の第１実施例の磁気ヘッドの要部側面図FIG. 1 is a side view of a main part of a magnetic head according to a first embodiment of the invention.

【図２】本発明の第２実施例の磁気ヘッドの要部側面図FIG. 2 is a side view of a main part of a magnetic head according to a second embodiment of the invention.

【図３】（ａ）本発明の第１実施例の磁気ヘッドの製造
工程図 （ｂ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｃ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｄ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｅ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｆ）本発明の第１実施例の磁気ヘッドの製造工程図3A is a manufacturing process diagram of a magnetic head of a first embodiment of the invention. FIG. 3B is a manufacturing process diagram of a magnetic head of a first embodiment of the invention. FIG. 3C is a magnetic process of a first embodiment of the invention. Manufacturing process drawing of the head (d) Manufacturing process drawing of the magnetic head of the first embodiment of the present invention (e) Manufacturing process drawing of the magnetic head of the first embodiment of the present invention (f) of the first embodiment of the present invention Magnetic head manufacturing process diagram

【図４】（ａ）本発明の第１実施例の磁気ヘッドのギャ
ップ部の要部拡大図 （ｂ）（ａ）の応用例を示すギャップ部の要部拡大図 （ｃ）本発明の第２実施例のギャップ部の要部拡大図 （ｄ）（ｃ）の応用例を示すギャップ部の要部拡大図 （ｅ）本発明の第２実施例の他の応用例のギャップ部の
要部拡大図 （ｆ）（ｅ）の応用例を示すギャッブ部の要部拡大図FIG. 4A is an enlarged view of a main part of a gap portion of the magnetic head of the first embodiment of the present invention. FIG. 4B is an enlarged view of a main part of the gap portion showing an application example of FIG. 4A. 2 is an enlarged view of a main part of a gap part according to the second embodiment (d) An enlarged view of a main part of a gap part showing an application example of (c) (e) A main part of a gap part of another application example of the second embodiment of the present invention Enlarged view Enlarged view of the main part of the gab part showing an application example of (f) and (e)

【図５】（ａ）本発明の第３実施例の磁気ヘッドの要部
側面図 （ｂ）本発明の第４実施例の磁気ヘッドの要部側面図 （ｃ）本発明の第５実施例の磁気ヘッドの要部側面図5A is a side view of a main portion of a magnetic head according to a third embodiment of the present invention. FIG. 5B is a side view of a main portion of a magnetic head according to a fourth embodiment of the present invention. Side view of the main part of the magnetic head

【図６】従来の磁気ヘッドの要部側面図FIG. 6 is a side view of a main part of a conventional magnetic head.

【図７】従来の磁気ヘッドの要部側面図FIG. 7 is a side view of a main part of a conventional magnetic head.

【図８】従来の磁気ヘッドの要部側面図FIG. 8 is a side view of a main part of a conventional magnetic head.

【図９】（ａ）図６に示す従来の磁気ヘッドのギャップ
部の要部拡大図 （ｂ）図６に示す従来の磁気ヘッドの応用例のギャップ
部の要部拡大図9A is an enlarged view of a main part of a gap portion of the conventional magnetic head shown in FIG. 6B. FIG. 9B is an enlarged view of a main part of a gap portion of an application example of the conventional magnetic head shown in FIG.

【図１０】（ａ）図７に示す従来の磁気ヘッドのギャッ
プ部の要部拡大図 （ｂ）図７に示す従来の磁気ヘッドの応用例のギャップ
部の要部拡大図10A is an enlarged view of a main portion of a gap portion of the conventional magnetic head shown in FIG. 7B. FIG. 10B is an enlarged view of a main portion of a gap portion of an application example of the conventional magnetic head shown in FIG.

【図１１】（ａ）図８に示す従来の磁気ヘッドのギャッ
プ部の要部拡大図 （ｂ）図８に示す従来の磁気ヘッドの応用例のギャップ
部の要部拡大図11A is an enlarged view of a main part of a gap portion of the conventional magnetic head shown in FIG. 8B. FIG. 11B is an enlarged view of a main part of a gap portion of an application example of the conventional magnetic head shown in FIG.

【図１２】（ａ）本発明の磁気ヘッドのギャップ近傍の
磁束の流れを示す模式図 （ｂ）従来例のギャップ近傍の磁束の流れを示す模式図FIG. 12A is a schematic diagram showing the flow of magnetic flux in the vicinity of the gap of the magnetic head of the present invention. FIG. 12B is a schematic diagram showing the flow of magnetic flux in the vicinity of the gap in the conventional example.

【符号の説明】[Explanation of symbols]

１，１５ 磁性膜 ２，１１ 第１磁性コア ３，１２ 巻線溝 ４，１３ 巻線溝斜面 ５，１４ 第２磁性コア ６，ギャップ材 ７，１７ ガラス材 ８，記録媒体走行面 １６ フロントギャップ ９，１８ リアギャップ ２０ 記録媒体 1,15 Magnetic film 2,11 First magnetic core 3,12 Winding groove 4,13 Winding groove slope 5,14 Second magnetic core 6, Gap material 7,17 Glass material 8, Recording medium running surface 16 Front gap 9,18 Rear gap 20 Recording medium

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成４年１０月１５日[Submission date] October 15, 1992

【手続補正１】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief explanation of the drawing

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の第１実施例の磁気ヘッドの要部側面図FIG. 1 is a side view of a main part of a magnetic head according to a first embodiment of the invention.

【図２】本発明の第２実施例の磁気ヘッドの要部側面図FIG. 2 is a side view of a main part of a magnetic head according to a second embodiment of the invention.

【図３】（ａ）本発明の第１実施例の磁気ヘッドの製造
工程図 （ｂ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｃ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｄ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｅ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｆ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｇ）本発明の第１実施例の磁気ヘッドの製造工程図 （ｈ）本発明の第１実施例の磁気ヘッドの製造工程図3A is a manufacturing process diagram of a magnetic head of a first embodiment of the invention. FIG. 3B is a manufacturing process diagram of a magnetic head of a first embodiment of the invention. FIG. 3C is a magnetic process of a first embodiment of the invention. Manufacturing process drawing of the head (d) Manufacturing process drawing of the magnetic head of the first embodiment of the present invention (e) Manufacturing process drawing of the magnetic head of the first embodiment of the present invention (f) of the first embodiment of the present invention Manufacturing process diagram of magnetic head (g) Manufacturing process diagram of magnetic head of first embodiment of the present invention (h) Manufacturing process diagram of magnetic head of first embodiment of the present invention

【図４】（ａ）本発明の第１実施例の磁気ヘッドのギャ
ップ部の要部拡大図 （ｂ）（ａ）の応用例を示すギャップ部の要部拡大図 （ｃ）本発明の第２実施例のギャップ部の要部拡大図 （ｄ）（ｃ）の応用例を示すギャップ部の要部拡大図 （ｅ）本発明の第２実施例の他の応用例のギャップ部の
要部拡大図 （ｆ）（ｅ）の応用例を示すギャップ部の要部拡大図FIG. 4A is an enlarged view of a main part of a gap portion of the magnetic head of the first embodiment of the present invention. FIG. 4B is an enlarged view of a main part of the gap portion showing an application example of FIG. 4A. 2 is an enlarged view of a main part of a gap part according to the second embodiment (d) An enlarged view of a main part of a gap part showing an application example of (c) (e) A main part of a gap part of another application example of the second embodiment of the present invention Enlarged view Enlarged view of the main part of the gap part showing an application example of (f) and (e)

【図５】（ａ）本発明の第３実施例の磁気ヘッドの要部
側面図 （ｂ）本発明の第４実施例の磁気ヘッドの要部側面図 （ｃ）本発明の第５実施例の磁気ヘッドの要部側面図5A is a side view of a main portion of a magnetic head according to a third embodiment of the present invention. FIG. 5B is a side view of a main portion of a magnetic head according to a fourth embodiment of the present invention. Side view of the main part of the magnetic head

【図６】従来の磁気ヘッドの要部側面図FIG. 6 is a side view of a main part of a conventional magnetic head.

【図７】従来の磁気ヘッドの要部側面図FIG. 7 is a side view of a main part of a conventional magnetic head.

【図８】従来の磁気ヘッドの要部側面図FIG. 8 is a side view of a main part of a conventional magnetic head.

【図９】（ａ）図６に示す従来の磁気ヘッドのギャップ
部の要部拡大図 （ｂ）図６に示す従来の磁気ヘッドの応用例のギャップ
部の要部拡大図9A is an enlarged view of a main part of a gap portion of the conventional magnetic head shown in FIG. 6B. FIG. 9B is an enlarged view of a main part of a gap portion of an application example of the conventional magnetic head shown in FIG.

【図１０】（ａ）図７に示す従来の磁気ヘッドのギャッ
プ部の要部拡大図 （ｂ）図７に示す従来の磁気ヘッドの応用例のギャップ
部の要部拡大図10A is an enlarged view of a main portion of a gap portion of the conventional magnetic head shown in FIG. 7B. FIG. 10B is an enlarged view of a main portion of a gap portion of an application example of the conventional magnetic head shown in FIG.

【図１１】（ａ）図８に示す従来の磁気ヘッドのギャッ
プ部の要部拡大図 （ｂ）図８に示す従来の磁気ヘッドの応用例のギャップ
部の要部拡大図11A is an enlarged view of a main part of a gap portion of the conventional magnetic head shown in FIG. 8B. FIG. 11B is an enlarged view of a main part of a gap portion of an application example of the conventional magnetic head shown in FIG.

【図１２】（ａ）本発明の磁気ヘッドのギャップ近傍の
磁束の流れを示す模式図 （ｂ）従来例のギャップ近傍の磁束の流れを示す模式図FIG. 12A is a schematic diagram showing the flow of magnetic flux in the vicinity of the gap of the magnetic head of the present invention. FIG. 12B is a schematic diagram showing the flow of magnetic flux in the vicinity of the gap in the conventional example.

【符号の説明】 １，１５ 磁性膜 ２，１１ 第１磁性コア ３，１２ 巻線溝 ４，１３ 巻線溝斜面 ５，１４ 第２磁性コア ６ ギャップ材 ７，１７ ガラス材 ８ 記録媒体走行面 １６ フロントギャップ ９，１８ リアギャップ ２０ 記録媒体[Explanation of reference numerals] 1,15 magnetic film 2,11 first magnetic core 3,12 winding groove 4,13 winding groove slope 5,14 second magnetic core 6 gap material 7,17 glass material 8 recording medium running surface 16 front gap 9,18 rear gap 20 recording medium

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】第１磁性コアと、第２磁性コアと、前記第
１磁性コアと前記第２磁性コアの対向面に形成された巻
線溝及びギャップ部とを有する磁気ヘッドであって、少
なくともいずれかの巻線溝斜面に形成された磁性膜が、
記録媒体走行面に露出して形成されていることを特徴と
する磁気ヘッド。1. A magnetic head having a first magnetic core, a second magnetic core, and a winding groove and a gap formed on the facing surfaces of the first magnetic core and the second magnetic core. The magnetic film formed on at least one of the winding groove slopes,
A magnetic head formed so as to be exposed on a recording medium running surface. 【請求項２】磁性膜がバックコア側のギャップ突合わせ
面に形成されていないことを特徴とする請求項１記載の
磁気ヘッド。2. The magnetic head according to claim 1, wherein the magnetic film is not formed on the gap abutting surface on the back core side. 【請求項３】少なくともいずれか一方の磁性コアにフロ
ントギャップ近傍で傾斜面を有する巻線溝を形成する工
程と、少なくとも前記巻線溝の傾斜面に磁性膜を形成す
る工程と、前記磁性コアのギャップ対向面を鏡面加工す
る工程と、少なくとも１対の磁性コアの一方に前記磁性
膜が形成された前記磁性コアを用いてギャップ対向面を
突合わせ接合一体化する工程と、ギャップ部の記録媒体
対向面を前記磁性膜が露出するまで研磨加工する工程
と、を有することを特徴とする磁気ヘッドの製造方法。3. A step of forming a winding groove having an inclined surface in the vicinity of the front gap on at least one of the magnetic cores, a step of forming a magnetic film on at least the inclined surface of the winding groove, and the magnetic core. The step of mirror-finishing the gap-opposing surface, the step of butt-joining and integrating the gap-opposing surface using the magnetic core having the magnetic film formed on at least one of the pair of magnetic cores, and recording of the gap portion. And a step of polishing the medium facing surface until the magnetic film is exposed.