JPH0572227A - Acceleration detector - Google Patents
Acceleration detectorInfo
- Publication number
- JPH0572227A JPH0572227A JP3233177A JP23317791A JPH0572227A JP H0572227 A JPH0572227 A JP H0572227A JP 3233177 A JP3233177 A JP 3233177A JP 23317791 A JP23317791 A JP 23317791A JP H0572227 A JPH0572227 A JP H0572227A
- Authority
- JP
- Japan
- Prior art keywords
- acceleration
- circuit board
- connector
- detector
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、自動車等の移動体の
加速度を多軸方向に測定し得る加速度検出器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration detector capable of measuring the acceleration of a moving body such as an automobile in multiaxial directions.
【０００２】[0002]
【従来の技術】近年セラミックやシリコン半導体等の微
小構造物を用いたマイクロマシーニング技術の進歩によ
り超小型の加速度検出器が開発され注目されている。か
かる加速度検出器の検出素子は、小型・軽量で、その出
力信号の処理回路を含む回路基板上に設けることができ
るなどスペース効率や耐ノイズ性の観点からも優れてい
る。2. Description of the Related Art In recent years, a microminiaturized acceleration detector has been developed and attracted attention due to the progress of micromachining technology using microstructures such as ceramics and silicon semiconductors. The detection element of such an acceleration detector is small and lightweight, and is excellent in terms of space efficiency and noise resistance because it can be provided on a circuit board including a processing circuit for its output signal.
【０００３】上記加速度検出器の一例として、例えば特
開昭６３−８１２７４号公報に開示されたものがある。
この検出器は、回路基板の一部に切込みを設けて片持状
のウエート部を設け、このウエート部の基部及びその隣
接位置付近にエッチング加工により金属抵抗を形成し、
これによりひずみゲージを形成している。又、回路基板
上にはひずみゲージにより検出された加速度に応じた電
気信号を増幅し、波形整形等の処理をする処理回路等が
設けられている。An example of the above acceleration detector is disclosed in Japanese Patent Laid-Open No. 63-81274.
This detector is provided with a cutout in a part of a circuit board to provide a cantilevered weight portion, and a metal resistance is formed by etching processing in the vicinity of the base portion of the weight portion and its adjacent portion,
This forms a strain gauge. Further, a processing circuit or the like for amplifying an electric signal corresponding to the acceleration detected by the strain gauge and performing processing such as waveform shaping is provided on the circuit board.
【０００４】一方、自動車等の移動体では進行方向だけ
でなく横方向又は上下方向、即ち３軸又は２軸方向の加
速度の検出を必要とすることが多く、このような要求に
対処する手段として、シリコンウエハーから成る薄いダ
イアフラムの一部に不純物を拡散して形成したピエゾ抵
抗素子でブリッジ回路を組んでひずみゲージとすると共
にダイアフラム中央に応動ボス部を形成し、ボス部に加
えられる３軸方向への加速度によって生ずるひずみを検
知してこれを電気信号に変換するように構成した加速度
検出素子が知られている。この場合も検出した電気信号
を加速度信号に変換処理する処理回路を含む回路基板上
に加速度検出素子が搭載されている。On the other hand, a moving body such as an automobile often needs to detect not only the traveling direction but also the lateral or vertical direction, that is, the acceleration in the three-axis or two-axis direction. , A thin diaphragm made of silicon wafer is used to form a strain gauge by forming a bridge circuit with a piezoresistive element formed by diffusing impurities, and a reaction boss is formed in the center of the diaphragm. There is known an acceleration detecting element configured to detect the strain caused by the acceleration to and convert the strain into an electric signal. Also in this case, the acceleration detection element is mounted on the circuit board including the processing circuit for converting the detected electric signal into the acceleration signal.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上述し
た第一の従来の加速度検出器は一般に１軸方向の加速度
を検出する形式のものであり、実装面に対して垂直な方
向の加速度を検出することは容易であるが、実装面に対
して平行な方向の加速度を検出することは機能的にも構
造的にも困難である。又、第二の従来例のものは、１つ
の加速度検出器で３軸方向の加速度を検出できる等の点
で優れている。しかし、加速度検出器はこれを搭載する
移動体の種類や適用されるシステムによって要求される
仕様が異なるため、汎用性に欠け、検出器を共通化する
ことが困難で、コスト的に問題がある。However, the above-mentioned first conventional acceleration detector is generally of the type that detects acceleration in the direction of one axis, and detects acceleration in the direction perpendicular to the mounting surface. This is easy, but it is functionally and structurally difficult to detect the acceleration in the direction parallel to the mounting surface. Further, the second conventional example is excellent in that one acceleration detector can detect accelerations in three axial directions. However, since the acceleration detector has different specifications required depending on the type of moving body on which it is mounted and the system to which it is applied, it lacks general versatility, making it difficult to use a common detector, which poses a cost problem. ..
【０００６】この発明は、上述した従来の超小型検出素
子を用いた加速度検出器の問題点に留意して、単軸方向
の加速度を検出できマイクロマシーニング技術を用いて
回路基板上に搭載し得る微小構造の加速度検出素子を多
軸方向に共通構造化して形成し、これを多軸方向用の取
付面を有するコネクタを介して回路基板に取付けて共通
な構造で量産化を可能としコスト低減し得る加速度検出
器を提供することを課題とする。The present invention is capable of detecting acceleration in a single axis direction and mounted on a circuit board by using a micromachining technique, while paying attention to the problem of the acceleration detector using the conventional microminiature detecting element described above. The micro-structured acceleration detection element to be obtained is formed in a common structure in the multi-axis direction, and this is attached to the circuit board via a connector having a mounting surface for the multi-axis direction, enabling mass production with a common structure and reducing costs. An object of the present invention is to provide a possible acceleration detector.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決するため
この発明は、加速度に応じて電気信号を発生する２つ又
は３つの加速度検出素子をコネクタを介して回路基板上
に搭載し、コネクタは各検出素子が進行方向とこれに直
角な上下又は左右方向のいずれかの加速度を検出するよ
う互いに直交する取付面にこれらを取付けると共に各検
出素子を回路基板に電気的に接続する接続端子を有し、
回路基板上には各検出素子から電気信号を加速度信号に
変換処理する処理回路部を備えて成る加速度検出器の構
成としたのである。In order to solve the above-mentioned problems, the present invention mounts two or three acceleration detecting elements, which generate an electric signal according to acceleration, on a circuit board through a connector, and Each detection element is mounted on a mutually orthogonal mounting surface so as to detect acceleration in either the vertical direction or the horizontal direction that is perpendicular to the traveling direction, and there is a connection terminal that electrically connects each detection element to the circuit board. Then
The acceleration detector is configured to include a processing circuit unit for converting an electric signal from each detection element into an acceleration signal on the circuit board.
【０００８】上記手段において、前記加速度検出素子は
外側を樹脂でモールドされ、このモールド部から実装可
能な端子を取出し、この端子をコネクタの各取付面に設
けた端子に半田接続することにより検出素子をコネクタ
に結合するようにしてもよい。In the above means, the acceleration detecting element is molded on the outside with resin, a mountable terminal is taken out from the molded portion, and the terminal is soldered to a terminal provided on each mounting surface of the connector to detect the element. May be coupled to the connector.
【０００９】[0009]
【作用】この発明の加速度検出器は上記のように構成し
たから、コネクタを介して回路基板に搭載した各軸方向
の加速度検出素子により進行方向とこれに直角な上下方
向又は左右方向のいずれかの加速度を検出できる。加速
度検出素子は、マイクロマシーニング技術を応用してダ
イヤフラム上等に半導体抵抗素子を形成しこれを組合わ
せてひずみゲージとし、あるいは基板薄膜上にエッチン
グ加工により金属抵抗を形成したひずみゲージを内部に
有する微小構造の素子とすることにより、これらを多軸
方向に取付面を有するコネクタに取付け、これを回路基
板に挿入し固定するだけでよい。Since the acceleration detector according to the present invention is constructed as described above, the acceleration detecting element in each axial direction mounted on the circuit board through the connector can be used to select the traveling direction and the vertical or horizontal direction perpendicular to the traveling direction. The acceleration of can be detected. For the acceleration detection element, a semiconductor resistance element is formed on a diaphragm by applying micromachining technology and combined with it to form a strain gauge, or a strain gauge in which a metal resistance is formed by etching on the substrate thin film is embedded inside. By using the microstructured elements that it has, it suffices to attach them to a connector having attachment surfaces in the multiaxial direction, insert this into a circuit board and fix it.
【００１０】従って、加速度検出素子は各軸方向毎に全
て共通構造とすることができ、移動体やシステムによっ
て異なる多様な仕様であっても共通構造のものとするこ
とができる。これによって検出素子の大量生産が可能と
なりコスト低減を図ることができる。加速度検出素子は
コネクタを介して回路基板に設置されるから、検出する
加速度の方向と回路基板の方向を任意に設定でき、取付
方向が制限されず自由なレイアウトが可能となる。加速
度検出素子は樹脂によりモールドされ、このモールド部
から実装用の端子を取り出すようにすると、素子の取扱
性、作業性が良くなり信頼性も向上する。Therefore, the acceleration detecting elements can be made to have a common structure in each axial direction, and can have a common structure even if various specifications differ depending on the moving body or system. As a result, mass production of the detection elements becomes possible and cost can be reduced. Since the acceleration detecting element is installed on the circuit board via the connector, the direction of the acceleration to be detected and the direction of the circuit board can be set arbitrarily, and the mounting direction is not restricted and a free layout is possible. The acceleration detecting element is molded with resin, and if the mounting terminals are taken out from the molded part, the handling and workability of the element are improved and the reliability is also improved.
【００１１】[0011]
【実施例】以下この発明の実施例について図面を参照し
て説明する。図１に実施例の加速度検出器の概略構成を
示す。加速度検出器１は、加速度を電気信号に変換する
３つの加速度検出素子２を有し、これらはコネクタ３を
介して回路基板４に搭載されている。回路基板４には、
加速度検出素子２のそれぞれの検出信号を加速度信号に
変換し、増幅する等の必要な処理をする処理回路５が設
けられている。この処理回路５で処理された信号はケー
ス６の端に設けられたハーネスコネクタ６ａのターミナ
ル７を経由して外部に取り出される。回路基板４はケー
ス６内に収納され、シリコン系のポッティング材８によ
りモールド固定され、ケース６の上部は蓋９により封止
されている。ケース６はねじ孔１０へのねじにより固定
される。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic configuration of the acceleration detector of the embodiment. The acceleration detector 1 has three acceleration detection elements 2 that convert acceleration into an electric signal, and these are mounted on a circuit board 4 via a connector 3. On the circuit board 4,
A processing circuit 5 is provided for converting each detection signal of the acceleration detection element 2 into an acceleration signal and performing necessary processing such as amplification. The signal processed by the processing circuit 5 is taken out to the outside via the terminal 7 of the harness connector 6a provided at the end of the case 6. The circuit board 4 is housed in a case 6, fixed by molding with a silicon-based potting material 8, and the top of the case 6 is sealed with a lid 9. The case 6 is fixed by screws into the screw holes 10.
【００１２】加速度検出素子２は、図２に示すように全
体がエポキシ系の樹脂によりモールドされたケース２ａ
から成り底面に４つの端子２ｂが露出されるように設け
られ、これを通じて電源の供給と信号の取り出しを行っ
ている。ケース２ａ内には、例えば図３に示すようにそ
の空洞部内にシリコンウエハーから成るダイアフラム２
１の中央に重り部２２を設け、かつダイヤフラム２１の
一部に不純物を拡散してピエゾ抵抗素子２３を４つ形成
し、これらを組合わせてひずみゲージを形成する。３つ
の加速度検出素子２は、例えば自動車用に使用するとき
は搭載する車輌に実際に発生する加速度レベルから上下
方向に±１０Ｇ、進行方向に±２Ｇ、左右方向に±１Ｇ
まで測定できるようにそれぞれの検出素子に対して抵抗
素子の抵抗値等を設定する。As shown in FIG. 2, the acceleration detecting element 2 is entirely case 2a molded with epoxy resin.
Is provided so that the four terminals 2b are exposed on the bottom surface, through which power is supplied and signals are taken out. In the case 2a, for example, as shown in FIG. 3, a diaphragm 2 made of a silicon wafer is provided in its cavity.
A weight portion 22 is provided at the center of 1, and impurities are diffused in a part of the diaphragm 21 to form four piezoresistive elements 23, which are combined to form a strain gauge. When used for an automobile, for example, the three acceleration detection elements 2 are ± 10 G in the vertical direction, ± 2 G in the traveling direction, and ± 1 G in the horizontal direction from the acceleration level actually generated in the mounted vehicle.
The resistance value of the resistance element is set for each detection element so that the measurement can be performed up to.
【００１３】コネクタ３は、図２に示すように、断面が
コの字状の３つの側面と上面の４面を有し、ナイロン系
の樹脂で射出成形により作られたコネクタ本体３ａから
成り、上面と２つの側面（向って右側及び向こう側の
面）の互いに直角な３軸方向の面にそれぞれ加速度検出
素子２が接合される。コネクタ本体３ａの内面には端子
３ｂとして見える導体が面に沿って設けられており、上
面と２つの側面にインサート成形して設けられた錫メッ
キを施した真鍮性の４つの端子３ｃに接続されている。
導体はフラットケーブルタイプを図示しているが、プリ
ント回路導体としてもよいことは勿論である。なお、検
出素子２は半田付により各面に接合されている。又、図
２に示すコネクタ３は実際に回路基板に搭載する際は上
下逆にして端子３ｂを回路基板４に挿入して固定する。As shown in FIG. 2, the connector 3 has three side surfaces having a U-shaped cross section and four upper surfaces, and is composed of a connector body 3a made of nylon resin by injection molding. The acceleration detecting element 2 is joined to the upper surface and the two side surfaces (the surface on the right side and the side on the other side) which are orthogonal to each other in the three axial directions. On the inner surface of the connector body 3a, conductors that can be seen as terminals 3b are provided along the surface, and are connected to four tin-plated brass terminals 3c provided by insert molding on the upper surface and two side surfaces. ing.
Although the conductor is shown as a flat cable type, it goes without saying that it may be a printed circuit conductor. The detection element 2 is joined to each surface by soldering. When the connector 3 shown in FIG. 2 is actually mounted on the circuit board, the connector 3 is turned upside down and the terminal 3b is inserted into the circuit board 4 and fixed.
【００１４】図４に上記３つの加速度検出素子２（Ｘ、
Ｙ、Ｚの３軸方向）をコネクタ３を介して回路基板４に
接続し、回路基板上に設けられた処理回路５に接続する
回路全体のブロック図を示す。５１は増幅器、５２は波
形整形のためのシュミット回路やスイッチング回路ある
いはＡ／Ｄ変換回路等を含む変換処理回路である。FIG. 4 shows the three acceleration detecting elements 2 (X,
A block diagram of the entire circuit in which (Y, Z triaxial directions) is connected to a circuit board 4 via a connector 3 and is connected to a processing circuit 5 provided on the circuit board is shown. Reference numeral 51 is an amplifier, and 52 is a conversion processing circuit including a Schmitt circuit for waveform shaping, a switching circuit, an A / D conversion circuit, and the like.
【００１５】以上のように構成した実施例の加速度検出
器は、コネクタ３を介して３軸方向と垂直な３つの面に
取り付けられた３つの加速度検出素子２によって、移動
体の進行方向に垂直な方向の加速度だけでなくこれと直
交する上下、左右方向の加速度も容易に検出できる。The acceleration detector of the embodiment constructed as described above is perpendicular to the traveling direction of the moving body by the three acceleration detecting elements 2 mounted on the three surfaces perpendicular to the three axis directions via the connector 3. It is possible to easily detect not only the acceleration in any direction but also the acceleration in the vertical and horizontal directions orthogonal to this.
【００１６】直交する２軸又は３軸方向を、例えば進行
方向と上下方向又は左右方向とすると、自動車等では前
述したように進行方向に±２Ｇ、上下方向に±１０Ｇ、
左右方向に±１Ｇの加速度を設定しておけば実情にも応
じた加速度を検出できる。この場合、それぞれの最大加
速度値の設定は、加速度検出素子２のピエゾ抵抗素子を
適合する抵抗値に設定するだけで、全体の構成は加速度
値の設定如何に拘らず共通な微小構造の検出素子とする
ことができる。加速度検出素子２は、３軸方向のそれぞ
れに対応するコネクタ３の各取付面に半田で簡単に取付
けでき、このコネクタ３を回路基板４に挿入固定するだ
けであるから組立作業は極めて簡単である。Assuming that the two-axis or three-axis directions orthogonal to each other are, for example, the traveling direction and the up-down direction or the left-right direction, in an automobile or the like, as described above, the traveling direction is ± 2 G and the up-down direction is ± 10 G
If the acceleration of ± 1 G is set in the left-right direction, the acceleration according to the actual situation can be detected. In this case, each maximum acceleration value is set only by setting the piezoresistive element of the acceleration detecting element 2 to a suitable resistance value, and the entire configuration has a common microstructure detecting element regardless of the setting of the acceleration value. Can be The acceleration detection element 2 can be easily attached to each attachment surface of the connector 3 corresponding to each of the three axial directions by soldering, and the connector 3 is simply inserted and fixed to the circuit board 4, so that the assembling work is extremely simple. ..
【００１７】図５は他の実施例の所要断面図である。基
本的な構造は第一実施例と同じであるが、加速度検出器
１を取付ける移動体の取付面が傾いているため、コネク
タ３も回路基板４に対して傾けてある点のみが異なる。
加速度検出素子２を回路基板４に直接取付けるのではな
くコネクタ３を介して取付けるようにしているため、検
出器自体の取付け角度に対する制限が無く自由な取付け
レイアウトが可能である。この実施例では、各軸方向の
加速度が余り大きく異ならないという前提で加速度検出
素子２はいずれの軸方向に対しても±１Ｇの検出範囲の
ものとしている。FIG. 5 is a required sectional view of another embodiment. The basic structure is the same as that of the first embodiment, except that the mounting surface of the moving body on which the acceleration detector 1 is mounted is inclined, so that the connector 3 is also inclined with respect to the circuit board 4.
Since the acceleration detection element 2 is not directly attached to the circuit board 4 but is attached via the connector 3, there is no limitation on the attachment angle of the detector itself, and a free attachment layout is possible. In this embodiment, the acceleration detection element 2 has a detection range of ± 1 G in any axial direction on the assumption that the accelerations in the axial directions do not differ greatly.
【００１８】このように、対象とする移動体の種類やシ
ステムに応じて自由に検出素子の使用を組合わせること
ができ、少ない種類の部品で多種の使用を持つ検出器を
得ることができる。As described above, the use of the detection elements can be freely combined depending on the type of moving object and the system, and a detector having various uses can be obtained with a small number of parts.
【００１９】[0019]
【効果】以上詳細に説明したように、この発明の加速度
検出器は、２つ又は３つの加速度検出素子を互に直交す
る２軸又は３軸方向の取付面を有するコネクタを介して
回路基板に電気的に接続して回路基板上に設けた処理回
路部で加速度信号を得るように構成したから、１軸方向
の加速度を検出する加速度検出素子を、異なる軸方向に
異なる加速度レベルを設定した共通構造のものとして予
め数種類用意しておき、それぞれの軸方向に対応するコ
ネクタの各取付面に取付けることにより各移動体やシス
テムによって異なる多様な仕様の要求に対応した多軸方
向の加速度の検出ができ、しかも最も量産効果が期待で
きる検出素子の大量生産が可能となりコスト低減を図る
ことができる。又、検出する加速度の方向と回路基板の
方向を任意に設定することができるので、回路基板の取
付け方向が制限されず自由なレイアウトが可能である。As described in detail above, the acceleration detector according to the present invention is mounted on a circuit board through a connector having two or three acceleration detection elements that are biaxially or triaxially attached to each other. Since the processing circuit portion electrically connected to the circuit board is configured to obtain the acceleration signal, the acceleration detection element for detecting acceleration in one axis direction is commonly used by setting different acceleration levels in different axis directions. By preparing several types of structures in advance and mounting them on each mounting surface of the connector corresponding to each axial direction, it is possible to detect acceleration in multiple axes corresponding to various specifications required by each moving body and system. In addition, it is possible to mass-produce the detection elements which can be most expected to be mass-produced, and it is possible to reduce the cost. Further, since the direction of acceleration to be detected and the direction of the circuit board can be set arbitrarily, the mounting direction of the circuit board is not restricted and a free layout is possible.
【図１】実施例の加速度検出器の主要断面図FIG. 1 is a main sectional view of an acceleration detector according to an embodiment.
【図２】コネクタ及び加速度検出素子の分解斜視図FIG. 2 is an exploded perspective view of a connector and an acceleration detection element.
【図３】加速度検出素子の断面図FIG. 3 is a sectional view of an acceleration detection element.
【図４】加速度検出回路の全体ブロック図FIG. 4 is an overall block diagram of an acceleration detection circuit.
【図５】他の実施例の加速度検出器の主要断面図FIG. 5 is a main sectional view of an acceleration detector according to another embodiment.
１ 加速度検出器 ２ 加速度検出素子 ３ コネクタ ４ 回路基板 ５ 処理回路 ６ ケース 1 Acceleration Detector 2 Acceleration Detection Element 3 Connector 4 Circuit Board 5 Processing Circuit 6 Case
Claims (2)
又は３つの加速度検出素子をコネクタを介して回路基板
上に搭載し、コネクタは各検出素子が進行方向とこれに
直角な上下又は左右方向のいずれかの加速度を検出する
よう互いに直交する取付面にこれらを取付けると共に各
検出素子を回路基板に電気的に接続する接続端子を有
し、回路基板上には各検出素子から電気信号を加速度信
号に変換処理する処理回路部を備えて成る加速度検出
器。1. Two or three acceleration detection elements that generate an electric signal according to acceleration are mounted on a circuit board through a connector, and the detection element is provided in the connector in the vertical and horizontal directions in which it is perpendicular to the traveling direction. These are mounted on mounting surfaces that are orthogonal to each other so as to detect acceleration in either direction, and there is a connection terminal that electrically connects each detection element to the circuit board.On the circuit board, an electrical signal is sent from each detection element. An acceleration detector comprising a processing circuit unit for converting into an acceleration signal.
ルドされ、このモールド部から実装可能な端子を取出
し、この端子をコネクタの各取付面に設けた端子に半田
接続することにより検出素子をコネクタに結合すること
を特徴とする請求項１に記載の加速度検出器。2. The acceleration detecting element is molded on the outside with a resin, a mountable terminal is taken out from the molded portion, and the terminal is soldered to a terminal provided on each mounting surface of the connector to connect the detecting element to the connector. The acceleration detector according to claim 1, further comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3233177A JPH0572227A (en) | 1991-09-12 | 1991-09-12 | Acceleration detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3233177A JPH0572227A (en) | 1991-09-12 | 1991-09-12 | Acceleration detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0572227A true JPH0572227A (en) | 1993-03-23 |
Family
ID=16950939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3233177A Pending JPH0572227A (en) | 1991-09-12 | 1991-09-12 | Acceleration detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0572227A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003050248A (en) * | 2001-08-08 | 2003-02-21 | Akashi Corp | Detector |
| US6550810B1 (en) | 1998-03-19 | 2003-04-22 | Trw Vehicle Safety Systems Inc. | Seat belt retractor |
| JP2006337194A (en) * | 2005-06-02 | 2006-12-14 | Kayaba Ind Co Ltd | Acceleration detector |
| JP2006337196A (en) * | 2005-06-02 | 2006-12-14 | Kayaba Ind Co Ltd | Multiaxial acceleration detector |
| US7152473B1 (en) * | 2000-03-17 | 2006-12-26 | Input/Output, Inc. | Integrated and multi-axis sensor assembly and packaging |
| JP2017049122A (en) * | 2015-09-02 | 2017-03-09 | セイコーエプソン株式会社 | Sensor unit, electronic apparatus, and mobile entity |
| CN109211400A (en) * | 2018-11-07 | 2019-01-15 | 福州鑫奥特纳科技有限公司 | A kind of vibration of elevator data acquisition circuit that analog and digital signal is isolated entirely |
| CN109238453A (en) * | 2018-11-07 | 2019-01-18 | 福州鑫奥特纳科技有限公司 | A kind of vibration of elevator data acquisition circuit with 3-axis acceleration sensor |
| CN109342766A (en) * | 2018-11-07 | 2019-02-15 | 福州鑫奥特纳科技有限公司 | A kind of acceleration sensor structure |
| US11219122B2 (en) | 2018-04-12 | 2022-01-04 | Seiko Epson Corporation | Sensor unit and structural health monitoring |
-
1991
- 1991-09-12 JP JP3233177A patent/JPH0572227A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6550810B1 (en) | 1998-03-19 | 2003-04-22 | Trw Vehicle Safety Systems Inc. | Seat belt retractor |
| US7152473B1 (en) * | 2000-03-17 | 2006-12-26 | Input/Output, Inc. | Integrated and multi-axis sensor assembly and packaging |
| JP2003050248A (en) * | 2001-08-08 | 2003-02-21 | Akashi Corp | Detector |
| JP2006337194A (en) * | 2005-06-02 | 2006-12-14 | Kayaba Ind Co Ltd | Acceleration detector |
| JP2006337196A (en) * | 2005-06-02 | 2006-12-14 | Kayaba Ind Co Ltd | Multiaxial acceleration detector |
| JP2017049122A (en) * | 2015-09-02 | 2017-03-09 | セイコーエプソン株式会社 | Sensor unit, electronic apparatus, and mobile entity |
| US11219122B2 (en) | 2018-04-12 | 2022-01-04 | Seiko Epson Corporation | Sensor unit and structural health monitoring |
| CN109211400A (en) * | 2018-11-07 | 2019-01-15 | 福州鑫奥特纳科技有限公司 | A kind of vibration of elevator data acquisition circuit that analog and digital signal is isolated entirely |
| CN109238453A (en) * | 2018-11-07 | 2019-01-18 | 福州鑫奥特纳科技有限公司 | A kind of vibration of elevator data acquisition circuit with 3-axis acceleration sensor |
| CN109342766A (en) * | 2018-11-07 | 2019-02-15 | 福州鑫奥特纳科技有限公司 | A kind of acceleration sensor structure |
| CN109211400B (en) * | 2018-11-07 | 2024-02-09 | 福建省特种设备检验研究院 | Elevator vibration data acquisition circuit with fully isolated analog and digital signals |
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