JPH0567327A - Magnetic disk and magnetic disk device using its disk - Google Patents
Magnetic disk and magnetic disk device using its diskInfo
- Publication number
- JPH0567327A JPH0567327A JP22759791A JP22759791A JPH0567327A JP H0567327 A JPH0567327 A JP H0567327A JP 22759791 A JP22759791 A JP 22759791A JP 22759791 A JP22759791 A JP 22759791A JP H0567327 A JPH0567327 A JP H0567327A
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- Prior art keywords
- magnetic
- magnetic disk
- disk
- film
- horizontal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ディスクとそれを用
いた磁気ディスク装置に係り、特に高密度記録化に好適
な磁気ディスクとそれを用いた磁気ディスク装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk and a magnetic disk device using the same, and more particularly to a magnetic disk suitable for high density recording and a magnetic disk device using the same.
【０００２】近年、コンピュータシステムにおける情報
処理量の増大により、そのシステムの外部記憶装置とし
て用いられている磁気ディスク装置への記録情報も増加
し、該装置の小型化と大容量化が進められ、高密度記録
化が要求されている。In recent years, with the increase in the amount of information processing in a computer system, the amount of information recorded on a magnetic disk device used as an external storage device of the system has also increased, and the miniaturization and large capacity of the device have been promoted. High-density recording is required.
【０００３】それに伴って磁気ディスクにおけるトラッ
ク密度や線記録密度を高めることが盛んに行われている
が、これらトラック密度の向上をより効果的に実現でき
る磁気ディスクと磁気ヘッドとを組み合わせた構成の磁
気ディスク装置が必要とされている。Along with this, the track density and the linear recording density of the magnetic disk have been actively increased. However, the combination of the magnetic disk and the magnetic head which can more effectively realize the improvement of the track density is adopted. A magnetic disk drive is needed.
【０００４】[0004]
【従来の技術】従来の磁気ディスク装置では、非磁性な
ディスク基板上にバインダと混錬したγ-Fe2O3からなる
磁性粉材を塗布・焼成することにより磁性記録膜を形成
した塗布型磁気ディスクが広く用いられていたが、その
後、図９に示すようにNiＰめっき処理等を表面に施した
アルミニウム円板等からなる非磁性のディスク基板11上
にスパッタリング法等により0.2 μｍの膜厚のCr下地層
12と、0.07μｍの膜厚のCo-Cr-Taからなる水平記録用の
磁性膜13を連続的に積層形成した高密度記録が可能な水
平磁気ディスクが実用化されている。2. Description of the Related Art In a conventional magnetic disk device, a coating type in which a magnetic recording film is formed by coating and baking a magnetic powder material made of γ-Fe 2 O 3 mixed with a binder on a non-magnetic disk substrate. Although magnetic disks were widely used, as shown in FIG. 9, a 0.2 μm-thick film was then formed on the non-magnetic disk substrate 11 made of an aluminum disk or the like with NiP plating on the surface by sputtering or the like. Cr underlayer
A horizontal magnetic disk capable of high density recording has been put to practical use, in which 12 and a magnetic film 13 for horizontal recording made of Co—Cr—Ta having a film thickness of 0.07 μm are continuously laminated.
【０００５】しかし、そのような水平磁気ディスクでは
磁性記録薄膜内の水平方向に情報を磁化記録する水平記
録方式であるため、その記録密度が高くなると記録磁化
の自己減磁の影響が強くなって再生出力が低下する問題
がある。However, since such a horizontal magnetic disk is a horizontal recording system in which information is magnetically recorded in the horizontal direction in the magnetic recording thin film, the effect of self-demagnetization of the recording magnetization becomes stronger as the recording density becomes higher. There is a problem that the reproduction output decreases.
【０００６】そこでそのような問題を解決し高密度記録
化を可能にするために、図10に示すようにNiＰめっき処
理等を表面に施したアルミニウム円板等からなる非磁性
のディスク基板11上にスパッタリング法等により１μｍ
の膜厚の Ni-Feからなる高透磁率な軟磁性膜22と、0.15
μｍの膜厚の Co-Crからなる垂直記録用の磁性膜23を連
続的に積層形成した垂直記録方式の磁気ディスクが提案
され、実用化されつつある。Therefore, in order to solve such a problem and enable high density recording, as shown in FIG. 10, on a non-magnetic disk substrate 11 made of an aluminum disc or the like whose surface is plated with NiP. 1 μm by sputtering method
With a high permeability soft magnetic film 22 of Ni-Fe with a thickness of 0.15
A perpendicular recording type magnetic disk in which a perpendicular recording magnetic film 23 made of Co—Cr having a thickness of μm is continuously formed has been proposed and put into practical use.
【０００７】かかる垂直磁気ディスクは、高記録密度に
おいても自己減磁がなく垂直記録用の磁性膜23内の垂直
方向に情報を磁化記録することにより、前記水平磁気デ
ィスクよりも極めて高密度な記録を可能にしている。Such a perpendicular magnetic disk does not undergo self-demagnetization even at a high recording density, and magnetically records information in the perpendicular direction within the magnetic film 23 for perpendicular recording, so that the recording density is much higher than that of the horizontal magnetic disk. Is possible.
【０００８】[0008]
【発明が解決しようとする課題】ところで、上記した垂
直磁気ディスクを用いた磁気ディスク装置においては優
れた垂直記録特性を得るために、該垂直磁気ディスクに
対して浮上する磁気ヘッドの間隔を狭めることが要求さ
れている。By the way, in the magnetic disk device using the above-mentioned perpendicular magnetic disk, in order to obtain excellent perpendicular recording characteristics, the interval between the magnetic heads flying above the perpendicular magnetic disk is narrowed. Is required.
【０００９】しかし、回転中の前記磁気ディスクの半径
方向の各位置における周速度が内周部より外周部に向か
って必然的に高くなり、この周速度の変化に比例して該
磁気ディスク上に浮上する磁気ヘッドの浮上間隔も磁気
ディスクの内周部より外周部に向かって大きくなること
から、ディスク全面にわたって均一な高密度記録と高い
再生出力が得られ難い傾向にある。However, the peripheral velocity at each position in the radial direction of the rotating magnetic disk inevitably becomes higher from the inner peripheral portion toward the outer peripheral portion, and on the magnetic disk in proportion to the change of the peripheral velocity. Since the flying distance of the flying magnetic head also increases from the inner peripheral portion to the outer peripheral portion of the magnetic disk, it tends to be difficult to obtain uniform high-density recording and high reproduction output over the entire disk surface.
【００１０】従って、優れた記録再生特性が得られない
という問題があり、磁気ディスク装置の小型、大容量化
を困難にしている。本発明は上記した従来の問題点に鑑
み、磁気ヘッドの浮上間隔が磁気ディスクの内周部と外
周部で異なることに起因する記録再生特性の変化を最小
限に抑え、ディスク全面にわたって優れた高密度記録と
高い再生出力が得られる新規な磁気ディスクとそれを用
いた磁気ディスク装置を提供することを目的とするもの
である。Therefore, there is a problem that excellent recording / reproducing characteristics cannot be obtained, which makes it difficult to reduce the size and capacity of the magnetic disk device. In view of the above-mentioned conventional problems, the present invention minimizes the change in the recording / reproducing characteristics due to the difference in the flying height of the magnetic head between the inner peripheral portion and the outer peripheral portion of the magnetic disk, and provides an excellent high performance over the entire surface of the disk. It is an object of the present invention to provide a novel magnetic disk capable of obtaining high density recording and high reproduction output, and a magnetic disk device using the same.
【００１１】[0011]
【課題を解決するための手段】本発明は上記した目的を
達成するため、請求項１の発明による磁気ディスクは、
ディスク基板上の内周領域に垂直磁気記録面、外周領域
に水平磁気記録面を設けた構成とする。In order to achieve the above object, the present invention provides a magnetic disk according to the first aspect of the invention.
A perpendicular magnetic recording surface is provided in the inner peripheral area and a horizontal magnetic recording surface is provided in the outer peripheral area on the disk substrate.
【００１２】また、請求項１の発明による磁気ディスク
において、前記内周領域に設けた垂直磁気記録面が軟磁
性膜と Co-Cr系の金属膜とをこの順に積層した二層膜か
ら形成され、前記外周領域に設けた水平磁気記録面が非
磁性膜とCrの下地層とCo合金系の金属膜とをこの順に積
層した三層膜から形成され、最上層の Co-Cr系の金属膜
及びCo合金系の金属膜の表面を同一平面となるように構
成する。Further, in the magnetic disk according to the present invention, the perpendicular magnetic recording surface provided in the inner peripheral region is formed of a two-layer film in which a soft magnetic film and a Co--Cr based metal film are laminated in this order. The horizontal magnetic recording surface provided in the outer peripheral region is formed of a three-layer film in which a nonmagnetic film, a Cr underlayer, and a Co alloy-based metal film are laminated in this order, and the uppermost Co-Cr-based metal film is formed. And the surface of the Co alloy-based metal film is formed to be coplanar.
【００１３】更に、請求項３の発明による磁気ディスク
は、ディスク基板上の内周領域に垂直磁気記録面、外周
領域に水平磁気記録面を設けてなる磁気ディスクと、該
磁気ディスクの内周領域上を移動して記録再生する垂直
磁気ヘッドスライダと、前記磁気ディスクの外周領域上
を移動して記録再生する水平磁気ヘッドスライダとを設
けた構成とする。The magnetic disk according to the third aspect of the present invention is a magnetic disk having a perpendicular magnetic recording surface in the inner peripheral area and a horizontal magnetic recording surface in the outer peripheral area on the disk substrate, and an inner peripheral area of the magnetic disk. A vertical magnetic head slider for moving and recording and reproducing on the upper side and a horizontal magnetic head slider for moving and recording and reproducing on the outer peripheral area of the magnetic disk are provided.
【００１４】更に、請求項３の発明による磁気ディスク
装置において、前記垂直磁気ヘッドスライダと水平磁気
ヘッドスライダとが、一つの浮上スライダ上に垂直磁気
ヘッド素子と水平磁気ヘッド素子とを一体的に組み込ん
だ複合型のヘッドスライダからなる構成とする。Further, in the magnetic disk device according to the present invention, the vertical magnetic head slider and the horizontal magnetic head slider integrally incorporate the vertical magnetic head element and the horizontal magnetic head element on one flying slider. The head slider is a composite head slider.
【００１５】更に、請求項３、または請求項４の発明に
よる磁気ディスク装置において、前記磁気ディスクの隣
接する垂直・水平磁気記録面の境界位置を示す位置情報
をあらかじめヘッド位置決め情報を記録するディスクサ
ーボ面に記録しておき、この境界位置情報の読出しに基
づいて前記垂直磁気ヘッドスライダと水平磁気ヘッドス
ライダ、または複合型のヘッドスライダの垂直・水平磁
気ヘッド素子を選択切替え制御するように構成する。Further, in the magnetic disk device according to the invention of claim 3 or 4, a disk servo for recording head position information in advance as position information indicating a boundary position between adjacent vertical and horizontal magnetic recording surfaces of the magnetic disk. The data is recorded on the surface, and the vertical / horizontal magnetic head elements of the vertical magnetic head slider and the horizontal magnetic head slider or the composite type head slider are selectively switched based on the reading of the boundary position information.
【００１６】[0016]
【作用】本発明の磁気ディスクは、非磁性なディスク基
板上の周速度及びヘッド浮上量の小さい内周領域に高透
磁率な軟磁性膜と Co-Cr系の金属膜からなる垂直記録膜
を積層した垂直磁気記録用の二層膜と、周速度及びヘッ
ド浮上量の大きい外周領域に非磁性膜と下地層及びCo合
金系の金属膜からなる水平記録膜を積層した水平磁気記
録用の三層膜が形成され、それらの最上層である Co-Cr
系の金属膜からなる垂直記録膜及びCo合金系の金属膜か
らなる水平記録膜の表面を同一平面となるように構成し
て、ヘッド浮上動作に支障が生じないようにしている。According to the magnetic disk of the present invention, a perpendicular recording film consisting of a soft magnetic film having a high magnetic permeability and a Co-Cr-based metal film is formed in the inner peripheral region of the non-magnetic disk substrate where the peripheral velocity and head flying height are small. Three layers for horizontal magnetic recording in which a two-layer film for perpendicular magnetic recording is laminated and a non-magnetic film, an underlayer, and a horizontal recording film composed of a Co alloy metal film are laminated in the outer peripheral region where the peripheral velocity and head flying height are large. Layer films are formed and their uppermost layer is Co-Cr
The surfaces of the vertical recording film made of a metal film of a group and the horizontal recording film made of a metal film of a Co alloy are made to be flush with each other so that the head flying operation is not hindered.
【００１７】また、かかる磁気ディスクを用いた磁気デ
ィスク装置では、ヘッド位置決め機構に連結されたヘッ
ドアームに、該磁気ディスクの内周領域上を移動して記
録再生を行う垂直磁気ヘッドスライダと、前記磁気ディ
スクの外周領域上を移動して記録再生を行う水平磁気ヘ
ッドスライダをそれぞれ支持した装置構成とする。Further, in a magnetic disk drive using such a magnetic disk, a head arm connected to a head positioning mechanism is moved to an inner peripheral area of the magnetic disk to perform recording / reproduction, and a vertical magnetic head slider, The apparatus is configured so as to respectively support horizontal magnetic head sliders that move on the outer peripheral area of the magnetic disk to perform recording and reproduction.
【００１８】そして回転する前記磁気ディスクの内周領
域と外周領域に対して、それぞれ対応する垂直磁気ヘッ
ドスライダと水平磁気ヘッドスライダを浮上させ、情報
の記録・再生を行う。Then, information recording / reproduction is performed by causing the corresponding vertical magnetic head slider and horizontal magnetic head slider to float above and below the rotating inner and outer peripheral areas of the magnetic disk.
【００１９】或いは、上記した垂直磁気ヘッドスライダ
と水平磁気ヘッドスライダの代わりに、一つの浮上スラ
イダに、前記磁気ディスクの内周領域に情報の記録再生
を行う垂直磁気ヘッド素子と該磁気ディスクの外周領域
に情報の記録再生を行う水平磁気ヘッド素子とを一体的
に組み込んだ複合ヘッドスライダを用い、該磁気ディス
クの内周領域には複合ヘッドスライダにおける垂直磁気
ヘッド素子により、また外周領域には水平磁気ヘッド素
子により情報の記録・再生を行うように切替え制御する
ことによって、前記磁気ディスク面の各半径方向位置で
のヘッド浮上量の変化に起因する記録再生特性の変化が
最小限に制御され、ディスク全面にわたって優れた高密
度記録と高い再生出力が得られる。Alternatively, instead of the above-mentioned vertical magnetic head slider and horizontal magnetic head slider, a vertical magnetic head element for recording / reproducing information on the inner peripheral area of the magnetic disk and the outer periphery of the magnetic disk are provided on one flying slider. A composite head slider integrally incorporated with a horizontal magnetic head element for recording / reproducing information in the area is used. A vertical magnetic head element in the composite head slider is used in the inner peripheral area of the magnetic disk, and a horizontal magnetic field is used in the outer peripheral area. By controlling the switching so that information is recorded / reproduced by the magnetic head element, the change in the recording / reproducing characteristics due to the change in the head flying height at each radial position on the magnetic disk surface is controlled to a minimum. Excellent high-density recording and high playback output can be obtained over the entire surface of the disc.
【００２０】更に、上記磁気ディスクの内周領域と外周
領域への情報の記録再生を行う垂直磁気ヘッドスライ
ダ、水平磁気ヘッドスライダ、或いは複合型のヘッドス
ライダの垂直・水平磁気ヘッド素子を切換え制御するに
は、前磁気ディスクの内周領域と外周領域とが隣接する
垂直・水平磁気記録面の境界位置を示す位置情報をあら
かじめヘッド位置決め情報を記録するディスクサーボ面
に記録しておき、この境界位置情報の読出しに基づいて
前記垂直・水平磁気ヘッド素子を選択的に切替えること
で容易に制御することができる。Further, the vertical / horizontal magnetic head elements of the vertical magnetic head slider, the horizontal magnetic head slider, or the composite type head slider for recording / reproducing information on / from the inner peripheral area and the outer peripheral area of the magnetic disk are switched and controlled. The position information indicating the boundary position of the vertical and horizontal magnetic recording surfaces where the inner peripheral area and the outer peripheral area of the front magnetic disk are adjacent to each other is recorded in advance on the disk servo surface for recording the head positioning information. This can be easily controlled by selectively switching the vertical / horizontal magnetic head elements based on the reading of information.
【００２１】[0021]
【実施例】以下図面を用いて本発明の実施例について詳
細に説明する。図１(a) 及び(b) は本発明に係る磁気デ
ィスクの一実施例を示す図であり、図(a) は一部を切除
した概略斜視図、図(b) は図(a) に示す切除部分Ｓの要
部断面図である。Embodiments of the present invention will be described in detail below with reference to the drawings. 1 (a) and 1 (b) are views showing an embodiment of a magnetic disk according to the present invention, FIG. 1 (a) is a schematic perspective view with a part cut away, and FIG. 1 (b) is shown in FIG. 1 (a). It is a principal part sectional view of the excision part S shown.
【００２２】これら両図において、11はNiＰめっき処理
等を表面に施したアルミニウム円板等からなる非磁性の
ディスク基板であり、該ディスク基板11上の回転周速度
及びヘッド浮上量が比較的小さい内周領域11a に１μｍ
の膜厚の Ni-Feからなる高透磁率な軟磁性膜32と、0.15
μｍの膜厚の Co-Cr等からなる垂直記録膜33が積層状に
設けられ、またその回転周速度及びヘッド浮上量が比較
的大きい外周領域11bには0.2 μｍの膜厚のCr下地層35
と、0.07μｍの膜厚のCo-Cr-Ta等からなる水平記録膜36
が積層状に設けられている。In both of these figures, 11 is a non-magnetic disk substrate made of an aluminum disk or the like having a surface subjected to NiP plating or the like, and the rotational peripheral speed and head flying height on the disk substrate 11 are relatively small. 1 μm in inner area 11a
With a high permeability soft magnetic film 32 of Ni-Fe with a thickness of 0.15
A perpendicular recording film 33 of Co-Cr or the like having a thickness of .mu.m is provided in a laminated form, and a Cr underlayer 35 having a thickness of 0.2 .mu.m is formed in the outer peripheral region 11b having a relatively large rotational peripheral speed and head flying height.
And a horizontal recording film 36 made of Co-Cr-Ta or the like with a thickness of 0.07 μm.
Are provided in a laminated form.
【００２３】このようなディスク構造では、前記ディス
ク基板11上の内周領域11a に設けた全積層膜の膜厚に対
して外周領域11b に設けた全積層膜の膜厚は当然小さく
差が生じるため、該ディスク基板11上の外周領域11b に
Cr下地層35を設ける前に、前記内周領域11a に設けた全
積層膜の膜厚に対する外周領域11b に設けた全積層膜の
膜厚の差に相当する膜厚の、例えばTi膜34等からなる非
磁性膜をあらかじめ成膜しておくことにより、当該磁気
ディスクの内・外周領域11a, 11bに設けた各記録膜33,
36の表面が段差のない同一平面となり、ヘッド浮上動作
に支障が生じることはない。In such a disc structure, the film thickness of all the laminated films provided in the outer peripheral region 11b is naturally smaller than the film thickness of all the laminated films provided in the inner peripheral region 11a on the disc substrate 11. Therefore, in the outer peripheral area 11b on the disk substrate 11,
Before providing the Cr underlayer 35, for example, a Ti film 34 or the like having a film thickness corresponding to the difference in film thickness of all the laminated films provided in the outer peripheral region 11b with respect to the film thickness of all the laminated films provided in the inner peripheral region 11a. By previously forming a non-magnetic film consisting of, each recording film 33, provided in the inner and outer peripheral regions 11a, 11b of the magnetic disk,
The surface of 36 has the same plane with no step, and the head flying operation is not hindered.
【００２４】また、前記磁気ディスクの内周領域11a と
外周領域11b との境界の設定としては、水平磁気ディス
ク及び垂直磁気ディスクの再生出力のヘッド浮上量依存
性を示す図２においてヘッド浮上量が小さい領域で大き
い再生出力が得られる垂直磁気ディスクの特性曲線Ｂ
と、ヘッド浮上量が大きい領域で垂直磁気ディスクより
大きい再生出力が得られる水平磁気ディスクの特性曲線
Ｃとが交差するクロスポイントとなるヘッド浮上量に相
当するディスク半径間の位置ｐが境目となるように定め
る。The boundary between the inner peripheral area 11a and the outer peripheral area 11b of the magnetic disk is set by setting the head flying height in FIG. 2 which shows the head flying height dependence of the reproduction output of the horizontal magnetic disk and the vertical magnetic disk. Characteristic curve B of a perpendicular magnetic disk capable of obtaining a large reproduction output in a small area
And a position p between the disk radii corresponding to the head flying height, which is a cross point at which the characteristic curve C of the horizontal magnetic disk that produces a reproduction output larger than that of the vertical magnetic disk in the area where the head flying height is large intersects. To determine.
【００２５】更に、このような構成の磁気ディスクを形
成する方法としては、例えば前記NiＰめっき処理等を表
面に施したアルミニウム円板等からなる非磁性のディス
ク基板11表面の前記境界ｐより外側の外周領域11b をフ
ォトレジスト膜等によりマスクした後、かかるディスク
基板11上にスパッタリング法によって１μｍの膜厚のNi
-Feからなる高透磁率な軟磁性膜32と、0.15μｍの膜厚
の Co-Cr等からなる垂直記録膜33を連続的に積層形成す
る。Further, as a method for forming a magnetic disk having such a structure, for example, a portion outside the boundary p on the surface of the non-magnetic disk substrate 11 made of, for example, an aluminum disk having the surface thereof subjected to the NiP plating treatment or the like is used. After masking the outer peripheral region 11b with a photoresist film or the like, a Ni film having a thickness of 1 μm is formed on the disk substrate 11 by a sputtering method.
A high-permeability soft magnetic film 32 made of -Fe and a perpendicular recording film 33 made of Co-Cr or the like having a film thickness of 0.15 μm are continuously laminated.
【００２６】次に、前記レジストマスクを溶解除去する
ことにより、前記境界ｐより内側の内周領域11a 上に前
記高透磁率な軟磁性膜32と垂直記録膜33の積層膜を残置
させると共に、該レジストマスク上に積層した前記軟磁
性膜32部分及び垂直記録膜33部分を同時に除去してディ
スク基板11の外周領域11b を露出させた後、前記内周領
域11a 上に設けた垂直記録膜33の表面をフォトレジスト
膜等によりマスクした後、かかるディスク基板11上にス
パッタリング法によって0.88μｍの膜厚のTi膜34等から
なる非磁性膜と、0.2 μｍの膜厚のCr下地層35及び0.07
μｍの膜厚のCo-Cr-Ta等からなる水平記録膜36とを連続
的に積層形成する。Next, by removing the resist mask by dissolution, the laminated film of the high magnetic permeability soft magnetic film 32 and the perpendicular recording film 33 is left on the inner peripheral region 11a inside the boundary p, and The soft magnetic film 32 portion and the perpendicular recording film 33 portion laminated on the resist mask are simultaneously removed to expose the outer peripheral area 11b of the disk substrate 11, and then the perpendicular recording film 33 provided on the inner peripheral area 11a. After masking the surface of the substrate with a photoresist film or the like, a nonmagnetic film made of a Ti film 34 having a thickness of 0.88 μm and a Cr underlayer 35 and 0.07 having a thickness of 0.2 μm are formed on the disk substrate 11 by a sputtering method.
A horizontal recording film 36 made of Co—Cr—Ta or the like having a film thickness of μm is continuously laminated.
【００２７】その後、前記レジストマスクを溶解除去す
ることにより、内周領域11a 及び外周領域11b に前記各
記録膜33, 36の表面が段差のない同一平面に形成された
目的とする所望の磁気ディスク37を得ることができる。After that, the resist mask is dissolved and removed, so that the surfaces of the recording films 33 and 36 are formed in the inner peripheral area 11a and the outer peripheral area 11b on the same plane without any step. You can get 37.
【００２８】また、このように構成した複合媒体型の磁
気ディスク37を図３の概略構成図に示すように磁気ディ
スク装置の回転機構41に装着すると共に、揺動型のヘッ
ド位置決め機構42に連結されたヘッドアーム43に前記磁
気ディスク37の内周領域11a（図１参照）上に対応する
ように、例えば図４の概略構成図に示すように Mn-Znフ
ェライト等からなる浮上スライダ51の気流流出端面に層
間絶縁膜により被包されたコイル53を介して主磁極54を
備えた垂直磁気記録用の単磁極型の薄膜磁気ヘッド素子
（以下、垂直磁気ヘッド素子）52を付設したヘッドスラ
イダ (以下、垂直磁気ヘッドスライダ) 44と、外周領域
11b （図１参照）上に対応するように、例えば図５の概
略構成図に示すようにセラミック等からなる浮上スライ
ダ61の気流流出端面に下部磁極63と、該下部磁極63上に
ギャップ層と層間絶縁膜により被包されたコイル64を介
して上部磁極65を備えた水平磁気記録用の薄膜磁気ヘッ
ド素子（以下、水平磁気ヘッド素子）62を付設したヘッ
ドスライダ (以下、水平磁気ヘッドスライダ) 45とをそ
れぞれ支持した装置構成とする。The composite medium type magnetic disk 37 thus constructed is mounted on the rotating mechanism 41 of the magnetic disk apparatus as shown in the schematic diagram of FIG. 3 and is connected to the swing type head positioning mechanism 42. The air flow of the flying slider 51 made of Mn-Zn ferrite or the like as shown in the schematic diagram of FIG. 4 so as to correspond to the formed head arm 43 on the inner peripheral area 11a of the magnetic disk 37 (see FIG. 1). A head slider provided with a single magnetic pole type thin film magnetic head element (hereinafter referred to as a perpendicular magnetic head element) 52 for perpendicular magnetic recording having a main magnetic pole 54 via a coil 53 covered with an interlayer insulating film on the outflow end surface ( Below, perpendicular magnetic head slider) 44, and the outer peripheral area
11b (see FIG. 1), the lower magnetic pole 63 is provided on the airflow outflow end surface of the flying slider 61 made of ceramic or the like, and the gap layer is provided on the lower magnetic pole 63, as shown in the schematic diagram of FIG. A head slider (hereinafter referred to as horizontal magnetic head slider) provided with a thin film magnetic head element (hereinafter referred to as horizontal magnetic head element) 62 for horizontal magnetic recording having an upper magnetic pole 65 via a coil 64 surrounded by an interlayer insulating film. The device configuration will support 45 and 45 respectively.
【００２９】更に、前記磁気ディスク37における内周領
域(11a) と外周領域(11b) の隣接する垂直記録膜33と水
平記録膜36の各面の境界位置を示す位置情報を、あらか
じめヘッド位置決め情報を記録する磁気ディスク37の所
定サーボ面に記録しておき、この境界位置情報の読出し
信号に基づいて前記垂直・水平磁気ヘッド素子52, 62に
よる記録・再生を選択的に切換え制御するように構成す
る。Further, the position information indicating the boundary position of each surface of the adjacent vertical recording film 33 and horizontal recording film 36 in the inner peripheral area (11a) and the outer peripheral area (11b) of the magnetic disk 37 is previously recorded as head positioning information. Is recorded on a predetermined servo surface of the magnetic disk 37 for recording the data, and the recording / reproducing by the vertical / horizontal magnetic head elements 52 and 62 is selectively switched based on the read signal of the boundary position information. To do.
【００３０】しかして、前記磁気ディスク37を回転させ
てその内周領域11a と外周領域11bに対してそれぞれ対
応する垂直磁気ヘッドスライダ44と水平磁気ヘッドスラ
イダ45を浮上させ、該磁気ディスク37の内周領域11a に
は前記垂直磁気ヘッド素子52により、また外周領域には
水平磁気ヘッド素子62により切替え制御してそれぞれ情
報の記録・再生を行うことによって、前記磁気ディスク
面の各半径方向位置でのヘッド浮上量の変化に対しても
記録再生特性の変化が最小限に制御され、かつディスク
全面にわたって優れた高密度記録と図２の特性曲線Ａで
示すように高い再生出力が得られる。Then, the magnetic disk 37 is rotated to levitate the vertical magnetic head slider 44 and the horizontal magnetic head slider 45 corresponding to the inner peripheral area 11a and the outer peripheral area 11b, respectively. The perpendicular magnetic head element 52 is used for the peripheral area 11a, and the horizontal magnetic head element 62 is used for the outer peripheral area to control the recording and reproduction of information, respectively. Even if the head flying height changes, the change in the recording / reproducing characteristics is controlled to a minimum, and excellent high-density recording over the entire disk surface and high reproducing output as shown by the characteristic curve A in FIG. 2 are obtained.
【００３１】更に、図６は本発明の磁気ディスクを用い
た磁気ディスク装置の他の実施例を示す概略構成図であ
り、図３と同等部分には同一符号を付している。この図
で示す実施例が図３の実施例と異なる点は、揺動型のヘ
ッド位置決め機構42に連結されたヘッドアーム43に、例
えば図７の概略構成図に示すように Mn-Znフェライト等
からなる浮上スライダ72の気流流出端面に層間絶縁膜に
より被包されたコイル73を介して主磁極74を備えた垂直
磁気記録用の単磁極型の薄膜磁気ヘッド素子（以下、垂
直磁気ヘッド素子）75と、下部磁極76上にギャップ層と
層間絶縁膜により被包されたコイル77を介して上部磁極
78を備えた水平磁気記録用の薄膜磁気ヘッド素子（以
下、水平磁気ヘッド素子）79を付設した複合型のヘッド
スライダ71を支持した装置構成としている。Further, FIG. 6 is a schematic configuration diagram showing another embodiment of the magnetic disk device using the magnetic disk of the present invention, and the same parts as those in FIG. 3 are designated by the same reference numerals. The embodiment shown in this figure is different from the embodiment shown in FIG. 3 in that the head arm 43 connected to the swing type head positioning mechanism 42 is provided with, for example, Mn-Zn ferrite or the like as shown in the schematic diagram of FIG. Single pole thin film magnetic head element for perpendicular magnetic recording (hereinafter referred to as perpendicular magnetic head element) having a main pole 74 via a coil 73 covered with an interlayer insulating film on the airflow outflow end surface of a flying slider 72 made of 75 and the upper magnetic pole through the coil 77 surrounded by the gap layer and the interlayer insulating film on the lower magnetic pole 76.
The apparatus is configured to support a composite type head slider 71 provided with a thin-film magnetic head element for horizontal magnetic recording (hereinafter referred to as horizontal magnetic head element) 79 provided with 78.
【００３２】そして、前記内周領域11a 及び外周領域11
b に前記垂直記録膜33と水平記録膜36が同一平面に形成
された複合媒体型の磁気ディスク37（図１参照）を回転
し、その磁気ディスク37上に前記複合型のヘッドスライ
ダ71を浮上させ、該磁気ディスク37の内周領域11a には
前記ヘッドスライダ71における垂直磁気ヘッド素子75に
より、また外周領域11b には水平磁気ヘッド素子79によ
り前記実施例と同様な選択的な切替え制御方法によって
それぞれ情報の記録・再生を行うようにしたことであ
る。Then, the inner peripheral region 11a and the outer peripheral region 11
A composite medium type magnetic disk 37 (see FIG. 1) in which the vertical recording film 33 and the horizontal recording film 36 are formed on the same plane is rotated on b, and the composite type head slider 71 is floated on the magnetic disk 37. The vertical magnetic head element 75 in the head slider 71 is used for the inner peripheral area 11a of the magnetic disk 37, and the horizontal magnetic head element 79 is used for the outer peripheral area 11b by the same selective switching control method as in the above embodiment. This is to record and reproduce information respectively.
【００３３】このような実施例の構成によっても前記図
３の実施例と同様な効果が得られ、然も、ヘッド移動距
離の比較的少ない小型の磁気ディスク装置に好適であ
る。なお、上記した磁気ディスク装置では回転する前記
磁気ディスク37における内周領域11a に比べて外周領域
11b の周速度が必然的に早くなるため、再生出力も高く
なることから該外周領域11b における水平記録膜36での
トラック幅を狭くすることができるので、例えば図６の
実施例で用いた図７に示す複合型のヘッドスライダ71に
おける水平磁気ヘッド素子79の下部磁極76及び上部磁極
78の先端幅Waを、図８のディスク側から見た磁極露出面
の平面図に示すように垂直磁気ヘッド素子75の主磁極74
の先端幅Wbよりも狭めることにより、前記磁気ディスク
37の内周領域11a における垂直記録膜33でのトラック密
度に比べて外周領域11b における水平記録膜36でのトラ
ック密度が高められ大容量化が可能となる。With the structure of this embodiment, the same effect as that of the embodiment of FIG. 3 can be obtained, and it is suitable for a small-sized magnetic disk device having a relatively small head moving distance. In the magnetic disk device described above, the outer peripheral area is larger than the inner peripheral area 11a of the rotating magnetic disk 37.
Since the peripheral speed of 11b is inevitably high, the reproduction output also becomes high, so that the track width in the horizontal recording film 36 in the outer peripheral region 11b can be narrowed. For example, as shown in the embodiment of FIG. The lower magnetic pole 76 and the upper magnetic pole of the horizontal magnetic head element 79 in the composite type head slider 71 shown in FIG.
The tip width Wa of the main magnetic pole 74 of the perpendicular magnetic head element 75 is shown in the plan view of the magnetic pole exposed surface as seen from the disk side in FIG.
By narrowing the tip width Wb of the magnetic disk
The track density in the horizontal recording film 36 in the outer peripheral area 11b is increased as compared with the track density in the vertical recording film 33 in the inner peripheral area 11a of 37, and the capacity can be increased.
【００３４】従って、上記した磁極幅の構成は、前記図
３の実施例で用いた水平磁気ヘッドスライダ45における
水平磁気ヘッド素子62の下部磁極63と上部磁極65にも適
用可能なことは勿論であり、同様な効果が得られる。Therefore, it goes without saying that the above-mentioned configuration of the magnetic pole width can be applied to the lower magnetic pole 63 and the upper magnetic pole 65 of the horizontal magnetic head element 62 in the horizontal magnetic head slider 45 used in the embodiment of FIG. Yes, the same effect can be obtained.
【００３５】更に、以上の実施例では薄膜製の垂直・水
平磁気ヘッド素子を用いた場合の例について説明した
が、従来より用いられているフェライトヘッド、或いは
ＭＩＧ（メタルインギャップ）ヘッドなどを適用できる
ことはいうまでもなく、また磁気ディスクにおける記録
用の磁性膜も、Co-Cr-Ta膜、 Co-Cr膜に限定されるもの
ではなく、例えばCo-Cr-Pt膜、Co-Ni-Cr膜なども用いる
ことができる。Further, in the above embodiment, an example in which the thin film vertical / horizontal magnetic head element is used has been described, but a conventionally used ferrite head, MIG (metal in gap) head or the like is applied. Needless to say, the magnetic film for recording in the magnetic disk is not limited to the Co-Cr-Ta film and the Co-Cr film, and for example, the Co-Cr-Pt film and the Co-Ni-Cr film can be used. A film or the like can also be used.
【００３６】[0036]
【発明の効果】以上の説明から明らかなように、本発明
に係る磁気ディスクとそれを用いた磁気ディスク装置に
よれば、ディスク基板上の内周領域に垂直記録用の磁性
膜と外周領域に水平記録用の磁性膜とをこれらの表面を
同一平面状に設けた複合磁気ディスクに対して、その内
周領域には垂直磁気ヘッド素子、外周領域には水平磁気
ヘッド素子を用いて情報の記録・再生を行う構成とする
ことにより、前記磁気ディスク面の各半径方向位置での
ヘッド浮上量の変化に対しても該磁気ディスク全面にわ
たって優れた高密度記録と高い再生出力が得られる。As is apparent from the above description, according to the magnetic disk and the magnetic disk apparatus using the same of the present invention, the magnetic film for perpendicular recording is formed in the inner peripheral area and the outer peripheral area is formed on the disk substrate. Recording of information by using a perpendicular magnetic head element in the inner peripheral area and a horizontal magnetic head element in the outer peripheral area of a composite magnetic disk having a magnetic film for horizontal recording and the surfaces of which are provided in the same plane. By adopting a structure for reproducing, excellent high density recording and high reproduction output can be obtained over the entire surface of the magnetic disk even when the head flying height changes at each radial position on the surface of the magnetic disk.
【００３７】従って、より高密度記録で小型、大容量の
磁気ディスク装置を実現することが可能となる優れた利
点を有する。Therefore, there is an excellent advantage that it is possible to realize a small-sized and large-capacity magnetic disk device with higher density recording.
【図１】 本発明に係る磁気ディスクの一実施例を示す
図である。FIG. 1 is a diagram showing an embodiment of a magnetic disk according to the present invention.
【図２】 本発明に係る磁気ディスクと従来の水平、垂
直磁気ディスクの再生出力のヘッド浮上量依存性を示す
図である。FIG. 2 is a diagram showing the head flying height dependency of the reproduction output of the magnetic disk according to the present invention and the conventional horizontal and vertical magnetic disks.
【図３】 本発明に係る磁気ディスク装置の一実施例を
示す概略構成図である。FIG. 3 is a schematic configuration diagram showing an embodiment of a magnetic disk device according to the present invention.
【図４】 本発明に係る磁気ディスク装置に適用する垂
直磁気ヘッドスライダの一実施例を示す概略構成図であ
る。FIG. 4 is a schematic configuration diagram showing an embodiment of a vertical magnetic head slider applied to a magnetic disk device according to the present invention.
【図５】 本発明に係る磁気ディスク装置に適用する水
平磁気ヘッドスライダの一実施例を示す概略構成図であ
る。FIG. 5 is a schematic configuration diagram showing an embodiment of a horizontal magnetic head slider applied to a magnetic disk device according to the present invention.
【図６】 本発明に係る磁気ディスク装置の他の実施例
を示す概略構成図である。FIG. 6 is a schematic configuration diagram showing another embodiment of the magnetic disk device according to the present invention.
【図７】 本発明に係る磁気ディスク装置の他の実施例
に適用する複合型のヘッドスライダの一実施例を示す概
略構成図である。FIG. 7 is a schematic configuration diagram showing one embodiment of a composite type head slider applied to another embodiment of the magnetic disk device according to the present invention.
【図８】 本発明に係る複合型のヘッドスライダの他の
実施例を説明するためのディスク側から見た磁極露出面
を示す平面図である。FIG. 8 is a plan view showing a magnetic pole exposed surface seen from the disk side for explaining another embodiment of the composite type head slider according to the present invention.
【図９】 従来の水平磁気ディスクを説明するための要
部断面図である。FIG. 9 is a cross-sectional view of essential parts for explaining a conventional horizontal magnetic disk.
【図10】 従来の垂直磁気ディスクを説明するための要
部断面図である。FIG. 10 is a main-portion cross-sectional view for explaining a conventional perpendicular magnetic disk.
１１ ディスク基板 １１ａ 内周領域 １１ｂ 外周領域 ３２ 軟磁性膜 ３３ 垂直記録膜 ３４ Ｔｉ膜 ３５ Ｃｒ下地層 ３６ 水平記録膜 ３７ 磁気ディスク ４１ 回転機構 ４２ ヘッド位置決め機構 ４３ ヘッドアーム ４４ 垂直磁気ヘッドスライダ ４５ 水平磁気ヘッドスライダ ５１，６１，７２ 浮上スライダ ５２，７５ 垂直磁気ヘッド素子 ５３，６４，７３，７７ コイル ５４，７４ 主磁極 ６２，７９ 水平磁気ヘッド素子 ６３，７６ 下部磁極 ６５，７８ 上部磁極 ７１ 複合型のヘッドスライダ ７４ａ 主磁極先端 ７６ａ 下部磁極先端 ７８ａ 上部磁極先端 11 disk substrate 11a inner peripheral area 11b outer peripheral area 32 soft magnetic film 33 perpendicular recording film 34 Ti film 35 Cr underlayer 36 horizontal recording film 37 magnetic disk 41 rotating mechanism 42 head positioning mechanism 43 head arm 44 vertical magnetic head slider 45 horizontal magnetic film Head slider 51, 61, 72 Flying slider 52, 75 Vertical magnetic head element 53, 64, 73, 77 Coil 54, 74 Main magnetic pole 62, 79 Horizontal magnetic head element 63, 76 Lower magnetic pole 65, 78 Upper magnetic pole 71 Composite type Head slider 74a Main magnetic pole tip 76a Lower magnetic pole tip 78a Upper magnetic pole tip
───────────────────────────────────────────────────── フロントページの続き (72)発明者 相良 泰之 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasuyuki Sagara 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited
Claims (5)
垂直磁気記録面、外周領域(11b) に水平磁気記録面を設
けてなることを特徴とする磁気ディスク。1. A magnetic disk comprising a disk substrate (11) having a perpendicular magnetic recording surface in an inner peripheral area (11a) and a horizontal magnetic recording surface in an outer peripheral area (11b).
録面が軟磁性膜(32)と Co-Cr系の金属膜(33)とをこの順
に積層した二層膜から形成され、前記外周領域(11b) に
設けた水平磁気記録面が非磁性膜(34)とCrの下地層(35)
とCo合金系の金属膜(36)とをこの順に積層した三層膜か
ら形成され、最上層の Co-Cr系の金属膜(33)及びCo合金
系の金属膜(36)の表面を同一平面としたことを特徴とす
る請求項１の磁気ディスク。2. The perpendicular magnetic recording surface provided in the inner peripheral region (11a) is formed of a two-layer film in which a soft magnetic film (32) and a Co—Cr metal film (33) are laminated in this order, The horizontal magnetic recording surface provided in the outer peripheral area (11b) has a non-magnetic film (34) and a Cr underlayer (35).
And a Co alloy-based metal film (36) are laminated in this order to form a three-layer film, and the top surface of the Co-Cr-based metal film (33) and the Co alloy-based metal film (36) are the same. The magnetic disk according to claim 1, wherein the magnetic disk is a flat surface.
垂直磁気記録面、外周領域(11b) に水平磁気記録面を設
けてなる磁気ディスク(37)と、該磁気ディスク(37)の内
周領域(11a) 上を移動して記録再生する垂直磁気ヘッド
スライダ(44)と、前記磁気ディスク(37)の外周領域(11
b) 上を移動して記録再生する水平磁気ヘッドスライダ
(45)とを設けてなることを特徴とする磁気ディスク装
置。3. A magnetic disk (37) comprising a perpendicular magnetic recording surface in the inner peripheral area (11a) and a horizontal magnetic recording surface in the outer peripheral area (11b) on the disk substrate (11), and the magnetic disk (37). ), The vertical magnetic head slider (44) for moving and recording on the inner peripheral area (11a) and the outer peripheral area (11) of the magnetic disk (37).
b) Horizontal magnetic head slider that moves up and records and plays back
(45) is provided, and the magnetic disk drive characterized by the above-mentioned.
磁気ヘッドスライダ(45)とが、一つの浮上スライダ(72)
上に垂直磁気ヘッド素子(75)と水平磁気ヘッド素子(79)
とを一体的に組み込んだ複合型のヘッドスライダ(71)か
らなることを特徴とする請求項３の磁気ディスク装置。4. The vertical magnetic head slider (44) and the horizontal magnetic head slider (45) are one flying slider (72).
Vertical magnetic head element (75) and horizontal magnetic head element (79) on top
4. The magnetic disk drive according to claim 3, wherein the magnetic disk drive comprises a composite type head slider (71) in which the above are integrally incorporated.
水平磁気記録面の境界位置を示す位置情報をあらかじめ
ヘッド位置決め情報を記録するディスクサーボ面に記録
しておき、この境界位置情報の読出しに基づいて前記垂
直磁気ヘッドスライダ(44)と水平磁気ヘッドスライダ(4
5)、または複合型のヘッドスライダ(71)の垂直・水平磁
気ヘッド素子(52, 62)、(75, 79)を選択切替え制御する
ようにしたことを特徴とする請求項３、または４の磁気
ディスク装置。5. The magnetic disk (37) adjacent to the vertical
Position information indicating the boundary position of the horizontal magnetic recording surface is recorded in advance on the disk servo surface for recording the head positioning information, and the perpendicular magnetic head slider (44) and the horizontal magnetic head slider are read based on the reading of the boundary position information. (Four
5) or the vertical / horizontal magnetic head elements (52, 62), (75, 79) of the composite type head slider (71) are selectively switched and controlled. Magnetic disk device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22759791A JPH0567327A (en) | 1991-09-09 | 1991-09-09 | Magnetic disk and magnetic disk device using its disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22759791A JPH0567327A (en) | 1991-09-09 | 1991-09-09 | Magnetic disk and magnetic disk device using its disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0567327A true JPH0567327A (en) | 1993-03-19 |
Family
ID=16863426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22759791A Withdrawn JPH0567327A (en) | 1991-09-09 | 1991-09-09 | Magnetic disk and magnetic disk device using its disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0567327A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5667828A (en) * | 1994-10-13 | 1997-09-16 | Florida Dept. Of Citrus | System and method for pasteurizing citrus juice using microwave energy |
| US5697291A (en) * | 1995-05-15 | 1997-12-16 | Questron Inc. | Method and apparatus for microwave enhanced pasteurization and enzyme inactivation of continuously flowing product |
| US5976592A (en) * | 1995-05-26 | 1999-11-02 | Officine Di Cartigliano S.P.A. | Method and apparatus for sterilizing biological liquids, particularly milk and its by-products |
-
1991
- 1991-09-09 JP JP22759791A patent/JPH0567327A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5667828A (en) * | 1994-10-13 | 1997-09-16 | Florida Dept. Of Citrus | System and method for pasteurizing citrus juice using microwave energy |
| US5697291A (en) * | 1995-05-15 | 1997-12-16 | Questron Inc. | Method and apparatus for microwave enhanced pasteurization and enzyme inactivation of continuously flowing product |
| US5976592A (en) * | 1995-05-26 | 1999-11-02 | Officine Di Cartigliano S.P.A. | Method and apparatus for sterilizing biological liquids, particularly milk and its by-products |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19981203 |