JPH0564873B2 - - Google Patents
Info
- Publication number
- JPH0564873B2 JPH0564873B2 JP60022860A JP2286085A JPH0564873B2 JP H0564873 B2 JPH0564873 B2 JP H0564873B2 JP 60022860 A JP60022860 A JP 60022860A JP 2286085 A JP2286085 A JP 2286085A JP H0564873 B2 JPH0564873 B2 JP H0564873B2
- Authority
- JP
- Japan
- Prior art keywords
- trapezoid
- internal electrodes
- exposed
- electrostrictive
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims abstract description 28
- 230000000694 effects Effects 0.000 claims description 17
- 239000011521 glass Substances 0.000 abstract description 20
- FKSZLDCMQZJMFN-UHFFFAOYSA-N [Mg].[Pb] Chemical compound [Mg].[Pb] FKSZLDCMQZJMFN-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011230 binding agent Substances 0.000 abstract description 2
- 238000005266 casting Methods 0.000 abstract description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 17
- 239000000843 powder Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000012212 insulator Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000001962 electrophoresis Methods 0.000 description 4
- 239000002390 adhesive tape Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- DHEIAYDROZXXGS-UHFFFAOYSA-N ethanol;iodine Chemical compound [I].CCO DHEIAYDROZXXGS-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明の素子は圧電又は電歪材料の電気・機械
エネルギー変換能力を利用した駆動素子や微小変
位素子等のエレクトロメカニカルデバイスに関す
るものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The element of the present invention relates to electromechanical devices such as drive elements and minute displacement elements that utilize the electric/mechanical energy conversion ability of piezoelectric or electrostrictive materials.
（従来技術）
縦効果を利用した電歪効果素子の構造において
素子断面積と同じ大きさの内部電極を有すること
が必要である。これは電圧印加時に電歪材料又は
圧電材料全体に均一な電界を発生させるためであ
る。内部電極面積が素子断面より小さいと電歪又
は、圧電材料内部の内部電極端部付近に必ず電界
の不均一な部分が生まれそれに伴つて強い応力集
中が起こる。(Prior Art) In the structure of an electrostrictive effect element utilizing a longitudinal effect, it is necessary to have an internal electrode having the same size as the cross-sectional area of the element. This is to generate a uniform electric field throughout the electrostrictive material or piezoelectric material when voltage is applied. If the area of the internal electrode is smaller than the cross section of the element, a non-uniform part of the electric field will always be created near the end of the internal electrode inside the electrostrictive or piezoelectric material, and strong stress concentration will occur accordingly.
また、低電圧で大きな電界を発生させ大きな歪
を得るためには内部電極相互の間隔を100ミクロ
ン程度にして多数の内部電極を電歪又は圧電材料
内部に形成することが必要である。 In addition, in order to generate a large electric field at a low voltage and obtain a large strain, it is necessary to form a large number of internal electrodes inside the electrostrictive or piezoelectric material with a distance between the internal electrodes of about 100 microns.
以上２つの理由で縦効果を利用した電歪効果素
子を電気的に接続するのは従来の方法では非常に
困難である。つまり前者の制約より積層セラミツ
クコンデンサで行なわれるように素子端面全体を
覆うような外部電極による接続方法は用いること
ができない。また後者の制約により厚膜プロセス
等で用いられている絶縁膜と導体とを印刷により
形成する方法は精度上から適用が困難である。 For the above two reasons, it is extremely difficult to electrically connect electrostrictive elements that utilize longitudinal effects using conventional methods. In other words, due to the former restriction, it is not possible to use a connection method using external electrodes that covers the entire end face of the element, as is done with multilayer ceramic capacitors. Further, due to the latter limitation, it is difficult to apply a method of forming an insulating film and a conductor by printing, which is used in a thick film process, etc., from the viewpoint of accuracy.
そこで本発明者等は先に電気泳動法により電歪
又は圧電材料積層体の端面に露出した内部電極層
とその近傍のセラミツク上に一層おきに帯状の無
機絶縁物を形成することを特徴とする電気的接続
方法を提案した。第９図はこの方法により電気的
接続を行なつた電歪効果素子の外観図である。電
歪材料１１，１２と内部電極１３，１４が積層さ
れて構成される素子の側面に露出した内部電極層
およびその周辺のセラミツク上に一層おきに無機
絶縁物１５が形成されている。反対側の側面には
一層ずらした内部電極上に同じく無機絶縁物１６
が形成されている。この絶縁物および露出したま
まの内部電極１４又は１３は横断して帯状の外部
電極１７と１８が形成されている。図中番号１３
と１４で示される多数の内部電極は一層おきにプ
ラス側外部接続端子１９およびマイナス側外部接
続端子２０にそれぞれ接続している。 Therefore, the present inventors first formed a band-shaped inorganic insulating material every other layer on the internal electrode layer exposed on the end face of the electrostrictive or piezoelectric material laminate and the ceramic in the vicinity thereof by electrophoresis. An electrical connection method was proposed. FIG. 9 is an external view of an electrostrictive effect element electrically connected by this method. An inorganic insulator 15 is formed every other layer on the internal electrode layer exposed on the side surface of the element formed by stacking electrostrictive materials 11, 12 and internal electrodes 13, 14, and on the ceramic around the internal electrode layer. On the opposite side, an inorganic insulator 16 is placed on the inner electrode that is further shifted.
is formed. Band-shaped external electrodes 17 and 18 are formed across this insulator and the exposed internal electrodes 14 or 13. Number 13 in the diagram
A large number of internal electrodes indicated by and 14 are connected to the positive external connection terminal 19 and the negative external connection terminal 20 at every other layer, respectively.
この方法を用いると内部電極の間隔が60μｍま
での電歪効果素子は電気的に接続することができ
る。一方、電歪材料積層体は層間20μｍ程度のも
のも容易に作製できる。 Using this method, electrostrictive elements with internal electrode spacing of up to 60 μm can be electrically connected. On the other hand, an electrostrictive material laminate with a layer spacing of about 20 μm can be easily produced.
（発明が解決しようとする問題点）
しかし、例えば層間距離30μｍの素子を接続す
ることはきわめて困難である。その理由は第一
に、電気泳動法を用いて30μｍの精度でガラス粉
末を付着させることはむつかしい。その原因とし
てはケンダク液中でガラス粉末が5μｍ程度の大
きさに凝集している等の理由がある。第二に、層
間距離が狭くなるに従つて形成できる帯状絶縁物
の厚みも比例して薄くなり充分な耐電圧が得られ
ないことがある。そのため駆動電圧を50V以下に
することは従来の構造の素子においては困難であ
る。(Problems to be Solved by the Invention) However, it is extremely difficult to connect elements with an interlayer distance of 30 μm, for example. The first reason is that it is difficult to deposit glass powder with an accuracy of 30 μm using electrophoresis. The reason for this is that the glass powder aggregates to a size of about 5 μm in the Kendaku solution. Second, as the interlayer distance becomes narrower, the thickness of the band-shaped insulator that can be formed becomes proportionally thinner, and a sufficient withstand voltage may not be obtained. Therefore, it is difficult to reduce the drive voltage to 50V or less in elements with conventional structures.
本発明は内部電極の間隔が30μｍ以下でも容易
に電気的接続ができ、従つて30V程度の極めて低
い電圧で駆動することができ電歪効果素子を提供
することを目的とする。 An object of the present invention is to provide an electrostrictive element that can be easily electrically connected even when the interval between internal electrodes is 30 μm or less, and can therefore be driven at an extremely low voltage of about 30V.
（問題を解決するための手段）
本発明は電歪材料層の膜または薄板と内部電極
とが交互に積層され、一体となつて焼結された電
歪効果素子であつて、該素子の側端面に前記内部
電極板の端面が露出しており、この側端面上の該
内部電極板の一層おきの露出部とその近傍の電歪
材料上のみに無機絶縁層が直接形成されており、
該無機絶縁層を横断して同一側端面上の各内部電
極露出部を接続する外部電極が形成され、かつ該
素子の２側面でそれぞれ異なる内部電極が一層お
きに外部電極で接続されている電歪効果素子であ
つて、前記外部電極が形成される２側面は上面又
は底面に対して垂直でないことを特徴とする。(Means for Solving the Problem) The present invention is an electrostrictive effect element in which films or thin plates of electrostrictive material layers and internal electrodes are alternately laminated and integrally sintered. The end face of the internal electrode plate is exposed on the end face, and an inorganic insulating layer is directly formed only on the exposed portion of every other layer of the internal electrode plate on this side end face and the electrostrictive material in the vicinity thereof,
An external electrode is formed across the inorganic insulating layer and connects each internal electrode exposed portion on the same side end face, and different internal electrodes are connected every other layer by an external electrode on two sides of the element. The strain effect element is characterized in that the two side surfaces on which the external electrodes are formed are not perpendicular to the top surface or the bottom surface.
（作用）
本発明の素子は電気的接続を施す側面を底面に
対し傾斜させることにより内部電極間の距離を広
げ電気的接続を容易にしようとするものである。(Function) The device of the present invention is intended to widen the distance between internal electrodes and facilitate electrical connection by making the side surface on which electrical connection is made inclined with respect to the bottom surface.
従来の内部電極型電歪効果素子は第９図に示す
ように直方体である。この構造では駆動電圧を下
げるために内部電極間隔を狭めていくと電気的接
続を行なうためには微細な絶縁物のパターンを形
成することが必要になる。ところが第２図に示す
ように側面を底面に対して傾斜させると、この面
においては実質的に内部電極間の間隔が広がるこ
とになる。傾斜の程度を調整すれば、例えば、内
部電極の間隔が30μｍの素子でも、傾斜面の露出
部において60μｍの間隔にすることができ第３図
に示すように絶縁物パターンの形成が容易にな
る。 A conventional internal electrode type electrostrictive effect element has a rectangular parallelepiped shape as shown in FIG. In this structure, when the interval between internal electrodes is narrowed in order to lower the driving voltage, it becomes necessary to form a fine pattern of insulating material in order to establish electrical connection. However, if the side surface is inclined with respect to the bottom surface as shown in FIG. 2, the distance between the internal electrodes will substantially increase on this surface. By adjusting the degree of inclination, for example, even in a device where the internal electrode spacing is 30 μm, it can be made to have a spacing of 60 μm in the exposed portion of the slope, making it easier to form an insulator pattern as shown in Figure 3. .
このような形状の積層体は通常の方法で焼結体
を作製し、それを単に従来とは異なる位置で切断
することが得られる。また電気泳動法によりガラ
ス粉末を付着させる工程においては対象となる側
面の構造のみが問題となる。よつて製造工程の面
からはこのような傾斜面を有する素子構造の問題
点は特にない。 A laminate having such a shape can be obtained by producing a sintered body using a conventional method and simply cutting the sintered body at a position different from the conventional method. Further, in the process of attaching glass powder by electrophoresis, only the structure of the target side surface is a problem. Therefore, from the viewpoint of the manufacturing process, there are no particular problems with the element structure having such an inclined surface.
ここで図中番号１１，１２は電歪材料、１３，
１４は内部電極１５，１６は絶縁物を１７，１８
は外部電極を１９，２０は外部接続端子をそれぞ
れ示す。また図中番号２１，２２は電歪材料、２
３，２４は内部電極、２５，２６は絶縁物を示
す。 Here, numbers 11 and 12 in the figure are electrostrictive materials, 13,
14 is an internal electrode 15, 16 is an insulator 17, 18
19 and 20 indicate external electrodes and external connection terminals, respectively. In addition, numbers 21 and 22 in the figure are electrostrictive materials, 2
3 and 24 are internal electrodes, and 25 and 26 are insulators.
（実施例）
以下本発明の実施例について図面を参照して詳
細に説明する。マグネシウムニオブ酸鉛およびチ
タン酸鉛を主成分とする電歪材料子焼粉末に微量
の有機バインダーを添加しこれを有機溶媒中に分
散させたスラリーを準備した。通常の積層セラミ
ツクコンデンサの製造に使用されるキヤステイン
グ製膜装置にによりこのスラリーをポリエステル
性樹脂（厚さ50〜100μｍ）のキヤリアシート上
に約45ミクロンの厚さに塗布し乾燥させたこれを
フイルムから剥離し電歪材料グリーンシートを得
た。一部のグリーンシートにはさらに内部電極と
して白金ペーストをスクリーン印刷した。これら
のグリーンシートを数百枚重ね、熱プレスにより
圧着一体化した後1240℃で焼成し電歪材料積層体
を得た。これを内部電極が一層おきに表面に露出
するような位置２ケ所で切断し、あらわれた面に
仮設外部電極を塗布焼き付けし、さらに前記仮設
外部電極形成面とは異なる側面２ケ所を底面に対
し傾斜を持つように切断し内部電極を露出させ
る。第４図は以上のようにして作製した仮設外部
電極付電歪材料積層体の斜視図である。図中番号
２１および２２は電歪材料、２３および２４は内
部電極で一層おきにそれぞれ仮設外部電極３４お
よび３５に接続している。(Example) Examples of the present invention will be described in detail below with reference to the drawings. A slurry was prepared by adding a small amount of an organic binder to an electrostrictive material powder containing magnesium lead niobate and lead titanate as main components, and dispersing this in an organic solvent. This slurry was coated on a carrier sheet of polyester resin (50 to 100 μm thick) to a thickness of about 45 microns using a casting film-forming device used in the production of ordinary multilayer ceramic capacitors, and then dried. An electrostrictive material green sheet was obtained by peeling from the film. Some of the green sheets were further screen-printed with platinum paste as internal electrodes. Several hundred of these green sheets were stacked, pressed together using a hot press, and then fired at 1240°C to obtain an electrostrictive material laminate. This is cut at two locations where the internal electrodes are exposed on the surface every other layer, temporary external electrodes are applied and baked on the exposed surfaces, and two side surfaces different from the surface on which the temporary external electrodes are formed are attached to the bottom surface. Cut at an angle to expose the internal electrodes. FIG. 4 is a perspective view of the electrostrictive material laminate with temporary external electrodes produced as described above. In the figure, numbers 21 and 22 are electrostrictive materials, and numbers 23 and 24 are internal electrodes, which are connected to temporary external electrodes 34 and 35, respectively, every other layer.
次に、底面に対し傾斜している２つの側面の内
部電極露出部とその周辺セラミツク上に、帯電し
たガラス粉末を含むケンダク液を用いた電気泳動
法により帯状にガラス粉末を析出させる。これを
焼成固着させてガラス被膜を形成し、これを用い
て素子の電気的接続を行なう。 Next, glass powder is deposited in a band shape on the internal electrode exposed portions on the two side surfaces inclined with respect to the bottom surface and the surrounding ceramic by electrophoresis using Kendaku solution containing charged glass powder. This is baked and fixed to form a glass film, which is used to electrically connect the elements.
まず以下の方法で帯電したバラス粉末を含むケ
ンダク液を作製する。ホウケイ酸亜鉛系結晶化ガ
ラス粉末30ｇ、エタノール290ml、５％ヨウ素エ
タノール溶液10mlを高速ホモジナイザーで混合す
る。ヨウ素が電解質の役割をはたし、ガラス粉末
はプラスに帯電する。30分間超音波をかけた後、
30分間静置して沈殿物を除去し残りのケンダク液
を使用する。 First, Kendaku liquid containing charged Balasu powder is prepared by the following method. Mix 30 g of zinc borosilicate crystallized glass powder, 290 ml of ethanol, and 10 ml of 5% iodine ethanol solution using a high-speed homogenizer. Iodine acts as an electrolyte, and the glass powder becomes positively charged. After applying ultrasound for 30 minutes,
Leave it to stand for 30 minutes to remove the precipitate and use the remaining Kendaku liquid.
前記仮設外部電極付電歪材料積層体の底面に対
し傾斜している２つの側面のうち一方を粘着テー
プで被いケンダク液にぬれるのを防ぐ。これを前
記ケンダク液を満たした容器に沈め、粘着テープ
で被つていない傾斜側面の前方約１cm手前に側面
よりも大きめのステンレス製対向電極板を沈め
る。次に直流電源を準備しそのプラス端子に対向
電極板を接続しマイナス端子には図中番号３５で
示す仮設外部電極を接続する。また図中番号２３
で示す内部電極上へのガラス粉末の付着を防止す
るために仮設外部電極３４はステンレス製対向電
極板に接地し同電位とする。直流電圧10Vを600
秒間印加しガラス粉末を析出させた後、ケンダク
液から引き上げ乾燥させる。第５図はこのように
処理を行なつた電歪材料積層体を示す斜視図であ
る。図中番号２６は一層おきの内部電極露出部と
その周辺のセラミツク上に析出した帯状のガラス
粉末を示す。 One of the two side surfaces of the temporary external electrode-attached electrostrictive material laminate that is inclined with respect to the bottom surface is covered with adhesive tape to prevent it from getting wet with the Kendaku liquid. This is submerged in a container filled with the Kendaku solution, and a stainless steel counter electrode plate, which is larger than the side surface, is submerged approximately 1 cm in front of the inclined side surface that is not covered with adhesive tape. Next, a DC power source is prepared, a counter electrode plate is connected to its positive terminal, and a temporary external electrode indicated by number 35 in the figure is connected to its negative terminal. Also number 23 in the diagram
In order to prevent glass powder from adhering to the internal electrodes shown in , the temporary external electrode 34 is grounded to the stainless steel counter electrode plate to have the same potential. DC voltage 10V 600
After applying for a second to precipitate the glass powder, it is removed from the Kendaku solution and dried. FIG. 5 is a perspective view showing an electrostrictive material laminate treated in this manner. In the figure, number 26 indicates a band-shaped glass powder deposited on the exposed portions of the internal electrodes in every other layer and the ceramic around them.
裏面の前記粘着テープを取り除いた後、705℃
で10分間焼成し帯状のガラス被膜を焼きつける。
次に全く同様な方法で裏側の傾斜面の内部電極露
出部の一層おきにガラス被膜を形成する。ただし
その位置は最初にガラス被膜を形成した内部電極
とは一層だけずらせておく。 After removing the adhesive tape on the back side, 705℃
Bake for 10 minutes to create a band-shaped glass coating.
Next, in exactly the same manner, a glass coating is formed on every other layer of the exposed internal electrodes on the sloped surface on the back side. However, its position is shifted by one layer from the internal electrode on which the glass coating was first formed.
このようにして得られた２つの傾斜側面に帯状
のガラス被膜を持つ積層体は第５図の被膜で示す
位置で切断し最終素子形状にする。第６図はこの
ようにして得られた電歪効果素子を示す外観図で
ある。図中番号２３，２４は内部電極を、２７，
２８はガラス被膜を示す。次にガラス被膜と内部
電極露出部を横断する形で、一対の外部電極を焼
き付ける。第１図はこのようにして電気的接続を
行なつた電歪効果素子を示す外観図である。図中
番号２９は外部電極を、３０，３１はそれぞれ底
面と上面を３２，３３はそれぞれプラス側および
マイナス側の外部接続端子を示す。外部接続端子
間に直流電圧30Vを印加すると素子は底面および
上面に垂直な方向に7μｍの変位を生じる。 The thus obtained laminate having band-shaped glass coatings on the two inclined sides is cut into the final element shape at the positions indicated by the coatings in FIG. FIG. 6 is an external view showing the electrostrictive effect element thus obtained. In the figure, numbers 23 and 24 indicate internal electrodes, 27,
28 indicates a glass coating. Next, a pair of external electrodes is baked across the glass coating and the exposed internal electrodes. FIG. 1 is an external view showing an electrostrictive effect element electrically connected in this manner. In the figure, numeral 29 indicates an external electrode, 30 and 31 indicate the bottom and top surfaces, respectively, and 32 and 33 indicate positive and negative external connection terminals, respectively. When a DC voltage of 30 V is applied between the external connection terminals, the element is displaced by 7 μm in the direction perpendicular to the bottom and top surfaces.
また本構造の採用により角錐台形状の素子を作
製することもできる。第７図はガラス被覆を形成
した電歪材料積層体を示す外観図である。図中破
線で示すような位置で切断し最終の素子形状とす
る。第８図はこのようにして切断し外部電極を形
成した電歪効果素子の外観図である。底面を装置
に取付けて固定し上面方向の変位を利用すれば座
りの良い安定な電歪効果素子となる。図中番号２
９は外部電極を、３０，３１は底面および上面を
それぞれ示す。３２，３３はそれぞれプラス側お
よびマイナス側の外部接続端子を示す。 Further, by employing this structure, a truncated pyramid-shaped element can also be manufactured. FIG. 7 is an external view showing an electrostrictive material laminate with a glass coating formed thereon. The final element shape is obtained by cutting at the position shown by the broken line in the figure. FIG. 8 is an external view of an electrostrictive effect element with external electrodes formed by cutting in this manner. If the bottom surface is attached and fixed to the device and the displacement in the direction of the top surface is utilized, a stable electrostrictive effect element with good seating can be obtained. Number 2 in the diagram
Reference numeral 9 indicates an external electrode, and 30 and 31 indicate a bottom surface and a top surface, respectively. Reference numerals 32 and 33 indicate positive and negative external connection terminals, respectively.
（発明の効果）
本発明の構造を採用することにより従来電気的
接続が困難であつた内部電極間隔が30μｍ程度の
電歪材料積層体を容易に電気的に接続し30V程度
の極めて低い電圧で駆動できる電歪効果素子が得
られる。また電歪効果素子としての形状の自由度
が広がり、変位拡大機構に素子を組み込んで使用
する場合に変位拡大機構の形状の自由度が増し設
計上都合が良い。(Effects of the Invention) By adopting the structure of the present invention, it is possible to easily electrically connect an electrostrictive material laminate with an internal electrode spacing of about 30 μm, which was difficult to electrically connect in the past, with an extremely low voltage of about 30 V. An electrostrictive element that can be driven is obtained. Further, the degree of freedom in the shape of the electrostrictive effect element is increased, and when the element is incorporated into a displacement magnification mechanism for use, the degree of freedom in the shape of the displacement magnification mechanism is increased, which is convenient in terms of design.
第１図は本発明の電歪効果素子の一例を示す外
観図、第２図〜第６図は本発明の電歪効果素子の
製造工程を示す外観図、第７図、第８図は本発明
の他の例を示す外観図、第９図は従来の電歪効果
素子の外観図である。
各図において、１１，１２，２１，２２は電歪
材料、１３，１４，２３，２４は内部電極、１
５，１６，２８，２７はガラス被膜、１７，１
８，２９は外部電極、１９，２０，３２，３３は
外部接続端子である。
Fig. 1 is an external view showing an example of the electrostrictive effect element of the present invention, Figs. 2 to 6 are external views showing the manufacturing process of the electrostrictive effect element of the present invention, and Figs. An external view showing another example of the invention, FIG. 9 is an external view of a conventional electrostrictive effect element. In each figure, 11, 12, 21, 22 are electrostrictive materials, 13, 14, 23, 24 are internal electrodes, 1
5, 16, 28, 27 are glass coatings, 17, 1
8 and 29 are external electrodes, and 19, 20, 32, and 33 are external connection terminals.
Claims (1)
一体となつて焼結された電歪効果素子であつて、
該素子の側端面に前記内部電極板の端面が露出し
ており、この側端面上の該内部電極板の一層おき
の露出部とその近傍の電歪材料上のみに一層おき
に無機絶縁層が形成されており、該無機絶縁層を
横断して同一側端面上の各内部電極露出部を接続
する外部電極が形成され、かつ該素子の２側面で
それぞれ異なる内部電極が一層おきに外部電極で
接続されている電歪効果素子であつて、前記外部
電極が形成される２側面は上面又は底面に対して
垂直でないことを特徴とする電歪効果素子。1 Electrostrictive material layers and internal electrodes are alternately laminated,
An electrostrictive element that is integrally sintered,
The end face of the internal electrode plate is exposed on the side end face of the element, and an inorganic insulating layer is formed every other layer only on the exposed portion of the internal electrode plate on the side end face and on the electrostrictive material in the vicinity thereof. An external electrode is formed across the inorganic insulating layer to connect each exposed internal electrode on the same side end face, and different internal electrodes are connected to the external electrode every other layer on the two sides of the element. An electrostrictive effect element connected to each other, wherein the two side surfaces on which the external electrodes are formed are not perpendicular to the top surface or the bottom surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60022860A JPS61182284A (en) | 1985-02-08 | 1985-02-08 | Electrostrictive effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60022860A JPS61182284A (en) | 1985-02-08 | 1985-02-08 | Electrostrictive effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61182284A JPS61182284A (en) | 1986-08-14 |
| JPH0564873B2 true JPH0564873B2 (en) | 1993-09-16 |
Family
ID=12094466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60022860A Granted JPS61182284A (en) | 1985-02-08 | 1985-02-08 | Electrostrictive effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61182284A (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4803763A (en) * | 1986-08-28 | 1989-02-14 | Nippon Soken, Inc. | Method of making a laminated piezoelectric transducer |
| JP2598301Y2 (en) * | 1992-06-19 | 1999-08-09 | 株式会社村田製作所 | Chip piezoelectric vibrator |
| DE4332966A1 (en) * | 1993-09-28 | 1995-03-30 | Philips Patentverwaltung | Torsion actuator and a method for its production |
| US20030020377A1 (en) | 2001-07-30 | 2003-01-30 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element and piezoelectric/electrostrictive device and production method thereof |
| JP2003046154A (en) * | 2001-07-30 | 2003-02-14 | Ngk Insulators Ltd | Piezoelectric/electrostrictive element, piezoelectric/ electrostrictive device, and method of manufacturing them |
| CN100563039C (en) | 2004-03-09 | 2009-11-25 | 京瓷株式会社 | Laminate type piezoelectric element and manufacture method thereof |
| JP5123491B2 (en) | 2005-06-10 | 2013-01-23 | 日本碍子株式会社 | Multilayer piezoelectric / electrostrictive element |
| JP2007142209A (en) * | 2005-11-18 | 2007-06-07 | Fujitsu Ltd | Piezoelectric element and its manufacturing method |
| DE102005061752A1 (en) * | 2005-12-21 | 2007-07-05 | Eads Deutschland Gmbh | Three-dimensional Stapelpiezoelement and piezoelectric actuator with such a Stapelpiezoelement |
| JP2010199272A (en) * | 2009-02-25 | 2010-09-09 | Kyocera Corp | Laminated piezoelectric element, method of manufacturing the same, and vibrating body |
| JP6141598B2 (en) * | 2012-01-17 | 2017-06-07 | セイコーエプソン株式会社 | pressure sensor |
-
1985
- 1985-02-08 JP JP60022860A patent/JPS61182284A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61182284A (en) | 1986-08-14 |
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