JPH0561951U - X-ray tube - Google Patents
X-ray tubeInfo
- Publication number
- JPH0561951U JPH0561951U JP258092U JP258092U JPH0561951U JP H0561951 U JPH0561951 U JP H0561951U JP 258092 U JP258092 U JP 258092U JP 258092 U JP258092 U JP 258092U JP H0561951 U JPH0561951 U JP H0561951U
- Authority
- JP
- Japan
- Prior art keywords
- ray tube
- cathode
- ceramic
- ceramic envelope
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microwave Tubes (AREA)
Abstract
(57)【要約】
【目的】この考案は、セラミックス外囲器の内面に陰極
等からのスパッタ物質が付着するのを防止して、耐電圧
を向上したＸ線管を提供することを目的とする。
【構成】この考案のＸ線管は、セラミックス外囲器５内
に陰極構体１と陽極構体２とが対向して設けられ、更に
陰極構体を離隔して取巻くようにセラミックス絶縁円筒
２１が配置されてなり、上記の目的を達成することが出
来る。
(57) [Summary] [Object] The present invention aims to provide an X-ray tube having an improved withstand voltage by preventing a sputtered material from a cathode or the like from adhering to the inner surface of a ceramic envelope. To do. In the X-ray tube of the present invention, a cathode structure 1 and an anode structure 2 are provided inside a ceramic envelope 5 so as to face each other, and a ceramic insulating cylinder 21 is arranged so as to surround the cathode structure with a space. Therefore, the above purpose can be achieved.
Description
【０００１】[0001]
この考案は、セラミックス外囲器の内面に陰極等からのスパッタ物質が付着し ないようにしたＸ線管に関する。 The present invention relates to an X-ray tube in which a sputtering substance from a cathode or the like does not adhere to the inner surface of a ceramic envelope.
【０００２】[0002]
従来、Ｘ線管はセラミックス外囲器内に陰極構体と陽極構体とが対向して設け られている。そして製造に当たり、その排気工程において陰極構体と陽極構体の ガス出しのために、各電極構体を高周波誘導加温したり電子衝撃等により高温に 加熱する。更に、Ｘ線管自身のエ−ジング工程において、使用定格（ＤＣ３００ ＫＶ等）の高電圧差を各電極構体間に印加して仕上げる。 Conventionally, an X-ray tube is provided in a ceramic envelope with a cathode structure and an anode structure facing each other. In the manufacturing process, each electrode assembly is heated to a high temperature by high frequency induction heating or electron impact in order to outgas the cathode assembly and the anode assembly in the exhausting process. Further, in the aging process of the X-ray tube itself, a high voltage difference of a rated use (DC300 KV, etc.) is applied between the electrode structures to finish.
【０００３】[0003]
ところが、従来のＸ線管では、セラミックス外囲器の絶縁破壊が多く確認され ている。即ち、種々の調査によれば、陰極構体側から陽極構体の遮蔽筒までのセ ラミックス外囲器内面での沿面放電跡が確認された。更に、セラミックス外囲器 の内外面間での絶縁破壊に至り、Ｘ線管の寿命を縮めてしまう。これは、製造工 程中において電子衝撃等により加熱された各電極構体は、電界放射や熱励起によ り各電極構体自身からスパッタ物質を発生させ、セラミックス外囲器内面へ付着 する。スパッタ物質面は、陰極ろう接封止部からのコロナ放電の電子やエ−ジン グ時に受ける２次電子等により負に帯電する。このため、各電極構体間のセラミ ックス外囲器内面の沿面距離は、実質的に短くなる。更に、エ−ジング時に高電 圧を各電極構体間に印加するために、セラミックス外囲器内面に帯電した電子は エネルギを加えられ、スパッタ部より陽極構体へと電子雪崩れ現象が生じ、沿面 放電に至る。又、帯電部分から来る電界の乱れから、セラミックス外囲器内面の 負電位と外面の正電位に帯電した部分は、セラミックス外囲器帯電内外部が橋絡 し、絶縁破壊によりＸ線管内の真空が破られ、Ｘ線管が機能しなくなる。 この考案は、陰極等からのスパッタ物質がセラミックス外囲器の内面に付着す るのを防止して、耐電圧特性を向上したＸ線管を提供することを目的とする。 However, in the conventional X-ray tube, many dielectric breakdowns of the ceramic envelope have been confirmed. That is, according to various investigations, a creeping discharge trace was confirmed on the inner surface of the ceramic envelope from the cathode assembly side to the shield tube of the anode assembly. Furthermore, dielectric breakdown occurs between the inner and outer surfaces of the ceramic envelope, shortening the life of the X-ray tube. This is because each electrode structure heated by electron impact or the like during the manufacturing process generates a sputtered substance from each electrode structure itself due to field emission or thermal excitation, and adheres to the inner surface of the ceramic envelope. The surface of the sputtered material is negatively charged by electrons of corona discharge from the cathode brazing sealing portion and secondary electrons received at the time of aging. Therefore, the creepage distance on the inner surface of the ceramic envelope between the electrode structures is substantially shortened. Further, in order to apply a high voltage between each electrode structure during aging, energy is applied to the electrons charged on the inner surface of the ceramic envelope, causing an electron avalanche phenomenon from the sputter part to the anode structure, causing the creeping surface. Leading to discharge. Also, due to the disturbance of the electric field coming from the charged part, in the part charged to the negative potential on the inner surface of the ceramic envelope and the positive potential on the outer surface, the interior and exterior of the ceramic envelope are bridged, and the vacuum in the X-ray tube is caused by dielectric breakdown. Is broken and the X-ray tube fails. It is an object of the present invention to provide an X-ray tube with improved withstand voltage characteristics by preventing the sputtered material from the cathode or the like from adhering to the inner surface of the ceramic envelope.
【０００４】[0004]
この考案は、セラミックス外囲器内に陰極構体と陽極構体とが対向して設けら れ、更に陰極構体を離隔して取巻くようにセラミックス絶縁円筒が配置されてな るＸ線管である。 The present invention is an X-ray tube in which a cathode structure and an anode structure are provided in a ceramic envelope so as to face each other, and a ceramic insulating cylinder is arranged so as to surround and separate the cathode structure.
【０００５】[0005]
この考案によれば、陰極構体を取巻くようにセラミックス絶縁円筒が配置され ているので、製造工程における陰極構体からのスパッタ物質が、セラミックス絶 縁円筒内面に付着する。従って、セラミックス外囲器内面への付着を防止するこ とが出来る。この結果、高電圧印加時のセラミックス外囲器内面の帯電が軽減し 、橋絡による絶縁破壊が減り、Ｘ線管の長寿命化が図れる。 According to this invention, since the ceramic insulating cylinder is arranged so as to surround the cathode assembly, the sputtered material from the cathode assembly in the manufacturing process adheres to the inner surface of the ceramic insulating cylinder. Therefore, the adhesion to the inner surface of the ceramic envelope can be prevented. As a result, the inner surface of the ceramic envelope is less charged when a high voltage is applied, the dielectric breakdown due to bridging is reduced, and the life of the X-ray tube is extended.
【０００６】[0006]
以下、図面を参照して、この考案の一実施例を詳細に説明する。 この考案によるＸ線管は図１及び図２に示すように構成され、図１は全体を示 し、図２は要部を拡大して示したものである。 An embodiment of the present invention will be described in detail below with reference to the drawings. The X-ray tube according to the present invention is constructed as shown in FIGS. 1 and 2, FIG. 1 shows the whole, and FIG. 2 shows an enlarged main part.
【０００７】 即ち、セラミックス外囲器５内に陰極構体１と陽極構体２とが所定間隔で対向 して配設され、それぞれ封止金属リング３，４を介してセラミックス外囲器５に 固着されている。この場合、陰極構体１は陰極フィラメント６、陰極筒７、カバ −８等からなり、陽極構体２は陽極タ−ゲット９、タ−ゲット本体１０、陽極筒 １１、フランジ部１２、遮蔽筒１９等からなっている。又、封止金属リング３， ４はいずれも例えばコバ−ルからなり、断面が直線部３ａ，４ａと湾曲部３ｂ， ４ｂからなる略Ｕ字状に形成されている。そして、陰極構体１側の封止金属リン グ３は、いわゆるコロナ環を兼ねている。That is, the cathode assembly 1 and the anode assembly 2 are arranged in the ceramic envelope 5 so as to face each other at a predetermined interval, and are fixed to the ceramic envelope 5 via the sealing metal rings 3 and 4, respectively. ing. In this case, the cathode structure 1 is composed of the cathode filament 6, the cathode cylinder 7, the cover 8, etc., and the anode structure 2 is the anode target 9, the target body 10, the anode cylinder 11, the flange portion 12, the shielding cylinder 19, etc. It consists of Each of the sealing metal rings 3 and 4 is made of, for example, a kovar, and has a cross section formed in a substantially U shape having straight portions 3a and 4a and curved portions 3b and 4b. The sealing metal ring 3 on the cathode structure 1 side also serves as a so-called corona ring.
【０００８】 更に、この考案では、陰極構体１を離隔して取巻くようにセラミックス絶縁円 筒２１が配置され、このセラミックス絶縁円筒２１の一端は支持円筒２０にろう 接されて支持されている。Further, in the present invention, a ceramics insulating cylinder 21 is arranged so as to surround the cathode assembly 1 with a space therebetween, and one end of the ceramics insulating cylinder 21 is brazed to and supported by the supporting cylinder 20.
【０００９】 一方、セラミックス外囲器５は例えばＡｌ2 Ｏ3 からなり、筒状にして外周に は沿面距離を長くするため、陽極構体２側の一端付近を除いて複数のヒダ１３が 形成されている。そして、陽極構体２側の一端はヒダ１３のある部分よりも外径 が小さくなっていて、外周面には所定長さの環状メタライズ面１４が形成されて いる。更に、このメタライズ面１４から所定長さの環状凹部１５ａが形成されて いる。このメタライズ面１４に封止金属リング４の一方の直線部４ａがろう接さ れている。On the other hand, the ceramic envelope 5 is made of, for example, Al 2 O 3 and has a plurality of folds 13 except for one end on the side of the anode structure 2 in order to make the creeping distance longer in the outer periphery of the cylinder. ing. The outer diameter of one end on the side of the anode structure 2 is smaller than that of the portion having the folds 13, and an annular metallized surface 14 having a predetermined length is formed on the outer peripheral surface. Further, an annular recess 15a having a predetermined length is formed from the metallized surface 14. One straight portion 4a of the sealing metal ring 4 is brazed to the metallized surface 14.
【００１０】 図２に示すように、セラミックス外囲器５の陰極構体１側の端部に環状メタラ イズ面１６が形成され、このメタライズ面１６に封止金属リング３の一方の直線 部３ａがろう接されている。そして、この直線部３ａからセラミックス外囲器５ は段部１５ｂにより下方に離れる形状になっている。他方の直線部には、カバ− ８がビス１７により取付けられている。このカバ−８には、支持リング１８によ り支持円筒２０にろう接されたセラミックス絶縁円筒２１と陰極筒７が支持され ている。As shown in FIG. 2, an annular metallized surface 16 is formed at the end of the ceramic envelope 5 on the cathode assembly 1 side, and one linear portion 3 a of the sealing metal ring 3 is formed on the metallized surface 16. It is brazed. The ceramic envelope 5 is separated downward from the straight portion 3a by the step portion 15b. The cover 8 is attached to the other straight portion by a screw 17. A ceramic insulating cylinder 21 brazed to a supporting cylinder 20 by a supporting ring 18 and a cathode cylinder 7 are supported on the cover 8.
【００１１】[0011]
この考案によれば、陰極構体を離隔して取巻くようにセラミックス絶縁円筒が 配置されているので、製造工程における陰極構体からのスパッタ物質がセラミッ クス絶縁円筒内面に付着するのを防止することが出来る。この結果、高電圧印加 時のセラミックス外囲器内面の帯電が軽減し、橋絡による絶縁破壊が減り、Ｘ線 管の長寿命化を図れる。 According to this invention, since the ceramic insulating cylinder is arranged so as to surround the cathode assembly with a space, it is possible to prevent the sputtered material from the cathode assembly during the manufacturing process from adhering to the inner surface of the ceramic insulating cylinder. .. As a result, the inner surface of the ceramic envelope is less charged when a high voltage is applied, the dielectric breakdown due to bridging is reduced, and the life of the X-ray tube is extended.
【図１】この考案の一実施例に係るＸ線管を示す断面
図。FIG. 1 is a sectional view showing an X-ray tube according to an embodiment of the present invention.
【図２】図１の要部を拡大して示す断面図。FIG. 2 is an enlarged cross-sectional view showing a main part of FIG.
１…陰極構体、２…陽極構体、３，４…封止金属リン
グ、５…セラミックス外囲器、６…陰極フィラメント、
７…陰極筒、８…カバ−、９…陽極タ−ゲット、１０…
タ−ゲット本体、１１…陽極筒、１２…フランジ部、１
３…ヒダ、１４，１６…メタライズ面、１５…凹部、１
７…ビス、１８…支持リング、１９…遮蔽筒、２０…支
持円筒、２１…セラミックス絶縁円筒。DESCRIPTION OF SYMBOLS 1 ... Cathode structure, 2 ... Anode structure, 3, 4 ... Sealing metal ring, 5 ... Ceramic envelope, 6 ... Cathode filament,
7 ... Cathode cylinder, 8 ... Cover, 9 ... Anode target, 10 ...
Target body, 11 ... Anode cylinder, 12 ... Flange part, 1
3 ... Fold, 14, 16 ... Metallized surface, 15 ... Recess, 1
7 ... Screws, 18 ... Support ring, 19 ... Shielding cylinder, 20 ... Support cylinder, 21 ... Ceramics insulating cylinder.
Claims (1)
構体とが対向して設けられてなるＸ線管において、 上記陰極構体を離隔して取巻くようにセラミックス絶縁
円筒が配置されてなることを特徴とするＸ線管。1. An X-ray tube having a cathode structure and an anode structure facing each other in a ceramic envelope, wherein a ceramic insulating cylinder is arranged so as to surround and separate the cathode structure. Characteristic X-ray tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP258092U JPH0561951U (en) | 1992-01-28 | 1992-01-28 | X-ray tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP258092U JPH0561951U (en) | 1992-01-28 | 1992-01-28 | X-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0561951U true JPH0561951U (en) | 1993-08-13 |
Family
ID=11533317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP258092U Pending JPH0561951U (en) | 1992-01-28 | 1992-01-28 | X-ray tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0561951U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020202016A (en) * | 2019-06-06 | 2020-12-17 | キヤノン電子管デバイス株式会社 | X-ray tube |
-
1992
- 1992-01-28 JP JP258092U patent/JPH0561951U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020202016A (en) * | 2019-06-06 | 2020-12-17 | キヤノン電子管デバイス株式会社 | X-ray tube |
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