JPH0557507A - Coating tool and manufacture thereof - Google Patents
Coating tool and manufacture thereofInfo
- Publication number
- JPH0557507A JPH0557507A JP21838391A JP21838391A JPH0557507A JP H0557507 A JPH0557507 A JP H0557507A JP 21838391 A JP21838391 A JP 21838391A JP 21838391 A JP21838391 A JP 21838391A JP H0557507 A JPH0557507 A JP H0557507A
- Authority
- JP
- Japan
- Prior art keywords
- film
- cutting edge
- tool
- outermost layer
- tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の利用分野】本発明は、コーティング工具および
その製造方法に関し、詳細には、耐衝撃性を改良した切
削工具に関する。FIELD OF THE INVENTION The present invention relates to a coated tool and a method for manufacturing the same, and more particularly to a cutting tool having improved impact resistance.
【０００２】[0002]
【従来技術】従来、切削工具としてはＷＣを主成分とし
て、Ｃｏ等の金属を配合してなる超硬合金が主流であっ
たが、最近では、切削時の耐摩耗性を向上させることを
目的としてこの超硬合金やサーメットからなる母材の表
面にＴｉＣ，ＴｉＣＮ，ＴｉＮあるいはＡｌ2 Ｏ3 等の
硬質材料を化学気相成長法（ＣＶＤ法）等により被覆し
た、コーティング工具が多く用いられている。2. Description of the Related Art Conventionally, as a cutting tool, a cemented carbide containing WC as a main component and a metal such as Co is mainly used, but recently, an object thereof is to improve wear resistance during cutting. As a coating tool in which a hard material such as TiC, TiCN, TiN or Al 2 O 3 is coated on the surface of the base material made of cemented carbide or cermet by chemical vapor deposition (CVD method) There is.
【０００３】このコーティング工具の表面に形成される
被覆層は、工具の耐摩耗性を左右する大きな要因である
ことから各種の改善がなされているが、具体的には、母
材表面に高硬度のＴｉＣ層を形成して耐摩耗性を改善し
たもの、あるいはこのＴｉＣ膜の表面にさらにＡｌ2 Ｏ
3 からなる外層を形成し耐摩耗性および耐酸化性を改善
したもの等が主流であったが、最近ではこれらの被覆槽
の最外層としてＴｉＮやＴｉＣＮを被覆することも提案
されている。これは、ＴｉＮやＴｉＣＮが靱性に優れる
とともに摩擦係数が小さいことから切屑との摩擦抵抗が
低減されるために切削温度を低くできるという長所を有
する。The coating layer formed on the surface of the coated tool has been variously improved because it is a major factor affecting the wear resistance of the tool. Specifically, the base material surface has a high hardness. A TiC layer of which the wear resistance has been improved, or the surface of this TiC film is further treated with Al 2 O.
The mainstream of these is an outer layer composed of 3 to improve wear resistance and oxidation resistance, but recently, it has been proposed to coat TiN or TiCN as the outermost layer of these coating tanks. This has the advantage that the cutting temperature can be lowered because TiN and TiCN are excellent in toughness and have a small friction coefficient, so that the friction resistance with chips is reduced.
【０００４】[0004]
【発明が解決しようとする問題点】しかしながら、これ
までのように化学気相成長法（ＣＶＤ法）等によって、
Ａｌ2 Ｏ3 膜を形成すると、Ａｌ2 Ｏ3 膜の結晶粒径が
大きいことから膜表面の凹凸が大きい傾向にある。その
ために、このようなＡｌ2 Ｏ3 膜の表面にＴｉＮやＴｉ
ＣＮ膜を形成すると、Ａｌ2 Ｏ3 膜の凹凸が反映される
ために、ＴｉＮやＴｉＣＮ膜自体にも凹凸が存在するた
めに、工具刃先部における切削時の耐衝撃性が低下し刃
先の欠損を生じる等の問題があった。[Problems to be Solved by the Invention] However, the chemical vapor deposition method (CVD method) or the like has been used as in the past.
When the Al 2 O 3 film is formed, since the crystal grain size of the Al 2 O 3 film is large, the unevenness of the film surface tends to be large. Therefore, the surface of such an Al 2 O 3 film is not covered with TiN or Ti.
When the CN film is formed, the unevenness of the Al 2 O 3 film is reflected, and therefore the TiN or TiCN film itself also has unevenness, so the impact resistance at the time of cutting at the tool cutting edge is reduced and the cutting edge is broken. There was a problem such as causing.
【０００５】[0005]
【問題点を解決するための手段】本発明者等は、上記の
問題点に対して検討を加えた結果、Ａｌ2 Ｏ3 膜とＴｉ
ＮあるいはＴｉＣＮ膜を順次形成し、切削加工において
最も衝撃の加わる刃先表面において、機械的に刃先部の
みを研磨加工し、工具母材の刃先部にＡｌ2 Ｏ3 を露出
させることにより、上記目的が解決できることを知見し
た。[Means for Solving the Problems] As a result of studying the above problems, the present inventors have found that Al 2 O 3 film and Ti
By sequentially forming N or TiCN films and mechanically polishing only the cutting edge portion on the cutting edge surface to which the greatest impact is applied during cutting, and exposing Al 2 O 3 to the cutting edge portion of the tool base material, We found that can be solved.
【０００６】即ち、本発明のコーティング工具は、硬質
材料からなる工具母材の表面に周期律表第４ａ，５ａ，
６ａ族金属の炭化物、窒化物、炭窒化物およびＡｌ2 Ｏ
3 から選ばれる少なくとも１種の化合物を単層あるいは
複数層からなる硬質層を被覆してなるコーティング工具
において、工具の刃先部の最外層がＡｌ2 Ｏ3 から構成
され、刃先以外の部分の最外層がＴｉＮ，ＴｉＣＮのい
ずれかにより構成したことを特徴とするものであり、か
かる製造方法としては、硬質材料からなる工具母材の表
面に、化学気相成長法によって最外層としてＴｉＮ、Ｔ
ｉＣＮのいずれかの膜を、最外層に隣接する内層として
Ａｌ2 Ｏ3 膜を形成した後、工具刃先部を研磨処理し、
Ａｌ2 Ｏ3 膜を露出したことを特徴とするものである。That is, in the coated tool of the present invention, the periodic table 4a, 5a,
Carbides, nitrides, carbonitrides and Al 2 O of Group 6a metals
In a coating tool formed by coating a hard layer composed of a single layer or a plurality of layers with at least one compound selected from 3, the outermost layer of the cutting edge of the tool is composed of Al 2 O 3, and the outermost layer of the portion other than the cutting edge is The outer layer is composed of either TiN or TiCN. As such a manufacturing method, TiN, T as the outermost layer is formed on the surface of the tool base material made of a hard material by chemical vapor deposition.
After forming an Al 2 O 3 film as an inner layer adjacent to the outermost layer using any film of iCN, the tool edge portion is subjected to polishing treatment,
The feature is that the Al 2 O 3 film is exposed.
【０００７】以下、本発明を図１を参照し説明する。図
１によれば、１が工具母材、２が硬質層である。本発明
において硬質材料からなる工具母材１表面に被覆される
硬質層２は、周期律表第４ａ，５ａ，６ａ族金属の炭化
物、窒化物、炭窒化物およびＡｌ2 Ｏ3 から選ばれる少
なくとも１種から選ばれる化合物より構成される。The present invention will be described below with reference to FIG. According to FIG. 1, 1 is a tool base material and 2 is a hard layer. In the present invention, the hard layer 2 coated on the surface of the tool base material 1 made of a hard material is at least selected from carbides, nitrides, carbonitrides and Al 2 O 3 of metals of Groups 4a, 5a and 6a of the periodic table. It is composed of a compound selected from one kind.
【０００８】本発明のコーティング工具によれば、硬質
層２が、刃先部３の最外層４がＡｌ2 Ｏ3 膜より構成さ
れ、刃先部以外の表面３の最外層６がＴｉＮ膜あるいは
ＴｉＣＮ膜より構成される。なお、各部位の内層７は、
それ自体存在しなくてもよいが、形成する場合には、そ
の材質は特定されるものでなく、前記硬質材料より選択
されるいずれの物質により形成してもよい。この硬質膜
２は、母材１表面に５〜１５μｍの厚みで形成される
が、上記構成においてＴｉＮ膜あるいはＴｉＣＮ膜６は
１．０μｍ以下の厚み、Ａｌ2 Ｏ3 膜４は１〜４μｍの
厚みで形成されることが望ましい。According to the coating tool of the present invention, in the hard layer 2, the outermost layer 4 of the cutting edge portion 3 is composed of an Al 2 O 3 film, and the outermost layer 6 of the surface 3 other than the cutting edge portion is a TiN film or a TiCN film. It is composed of The inner layer 7 of each part is
Although it does not have to exist as such, when it is formed, its material is not specified, and it may be formed of any substance selected from the above hard materials. The hard film 2 is formed on the surface of the base material 1 with a thickness of 5 to 15 μm. In the above structure, the TiN film or the TiCN film 6 has a thickness of 1.0 μm or less, and the Al 2 O 3 film 4 has a thickness of 1 to 4 μm. It is desirable that it is formed with a thickness.
【０００９】また、本発明によれば、刃先部の最外層で
あるＡｌ2 Ｏ3 膜はその表面粗さ（Ｒａ）が０．４μｍ
以下であることが望ましい。これは、表面粗さが０．４
μｍより大きいと被削材との接触において膜に応力が生
じ膜の剥離を生じ、膜に発生する亀裂を増大するためで
ある。According to the present invention, the surface roughness (Ra) of the Al 2 O 3 film which is the outermost layer of the cutting edge portion is 0.4 μm.
The following is desirable. This has a surface roughness of 0.4.
This is because if the thickness is larger than μm, stress is applied to the film when it comes into contact with the work material, peeling of the film occurs, and cracks generated in the film increase.
【００１０】本発明のコーティング工具の製造方法によ
れば、まず、ＷＣ−Ｃｏ系超硬合金やサーメット等の硬
質材料を母材として準備する。母材を構成する成分とし
ては公知の超硬合金、あるいはＴｉＣ基、ＴｉＣＮ基サ
ーメットが使用できる。具体的には、超硬合金として
は、ＷＣ−Ｃｏを主成分とし、さらに周期律表第４ａ：
５ａ、６ａ族金属の炭化物、窒化物、炭窒化物を添加し
たもの、サーメットとしてはＴｉＣあるいはＴｉＮを主
成分とし、これに周期律表第４ａ、５ａ、６ａ族金属の
炭化物、窒化物、炭窒化物を添加したもの等が使用でき
る。これらの母材はいずれも相対密度９９％以上の高強
度、高靱性材料であることが望まれる。According to the method for manufacturing a coated tool of the present invention, first, a hard material such as a WC-Co type cemented carbide or cermet is prepared as a base material. A known cemented carbide, or a TiC-based or TiCN-based cermet can be used as a constituent of the base material. Specifically, as the cemented carbide, WC-Co is the main component, and further, Periodic Table 4a:
Carbide, nitride, or carbonitride of group 5a or 6a metal, cermet containing TiC or TiN as a main component, and carbide, nitride, or charcoal of group 4a, 5a, or 6a metal of the periodic table A material to which a nitride is added can be used. All of these base materials are desired to be high strength and high toughness materials having a relative density of 99% or more.
【００１１】本発明によれば、上記母材表面に化学気相
成長法（ＣＶＤ法）により硬質膜を形成する。ＣＶＤ法
によれば、例えばＴｉＮ膜を形成する場合には反応ガス
としてＴｉＣｌ4 、Ｎ2 およびキャリアガスとして水素
等の不活性ガス等を用いて反応炉に導入し、母材を６５
０〜１０５０℃に加熱することにより母材表面にＴｉＣ
膜が形成される。また、上記反応ガスの構成に加え、Ｃ
Ｈ4 等の炭素含有ガスを混入させることによりＴｉＣＮ
膜を形成することができる。さらに、反応ガスとしてＡ
ｌＣｌ3 、Ｈ2 、ＣＯ2 等を用いることによりＡｌ2 Ｏ
3膜を生成させることができる。According to the present invention, a hard film is formed on the surface of the base material by the chemical vapor deposition method (CVD method). According to the CVD method, for example, when forming a TiN film, TiCl 4 , N 2 as a reaction gas and an inert gas such as hydrogen as a carrier gas are introduced into the reaction furnace, and the base material is made into 65
TiC on the surface of the base material by heating to 0-1050 ° C
A film is formed. In addition to the composition of the above reaction gas, C
By mixing carbon-containing gas such as H 4, TiCN
A film can be formed. Furthermore, as a reaction gas, A
Al 2 O by using lCl 3 , H 2 , CO 2 etc.
3 membranes can be generated.
【００１２】本発明によれば、硬質膜を形成する際、図
１に示す通り、場合により内層７として各種の硬質膜を
形成した後、Ａｌ2 Ｏ3 膜４を形成し、その後ＴｉＮ膜
６を順次形成する。これらの膜はＡｌ2 Ｏ3 膜４が１〜
４μｍ、ＴｉＮ膜６が１μｍ以下の厚みで形成する。そ
の後、この硬質膜のうち、刃先部３のみをホーニング等
の手段により研磨加工し、刃先部３のみＡｌ2 Ｏ3 膜が
露出させる。この時の研磨量は、刃先部のＡｌ2 Ｏ3 膜
４の厚みが０．５μｍより薄くならないように制御す
る。また、研磨により刃先部３の表面粗さ（Ｒａ）が
０．４μｍ以下になるように研磨することが望ましい。According to the present invention, when forming a hard film, as shown in FIG. 1, optionally, various hard films are formed as the inner layer 7, then the Al 2 O 3 film 4 is formed, and then the TiN film 6 is formed. Are sequentially formed. These films are Al 2 O 3 films 1 to 1
The TiN film 6 having a thickness of 4 μm is formed with a thickness of 1 μm or less. After that, of this hard film, only the cutting edge portion 3 is polished by means such as honing to expose the Al 2 O 3 film only in the cutting edge portion 3. The polishing amount at this time is controlled so that the thickness of the Al 2 O 3 film 4 at the cutting edge portion does not become thinner than 0.5 μm. Further, it is desirable to polish the blade edge portion 3 so that the surface roughness (Ra) thereof is 0.4 μm or less.
【００１３】これにより、刃先部３の最外層はＡｌ2 Ｏ
3 膜より構成され、刃先部以外の表面５の最外層はＴｉ
Ｎ膜により構成することができる。As a result, the outermost layer of the cutting edge portion 3 is Al 2 O.
It is composed of 3 films and the outermost layer of the surface 5 other than the cutting edge is Ti
It can be composed of an N film.
【００１４】[0014]
【作用】本発明のコーティング工具によれば、刃先部３
の最外層はＡｌ2 Ｏ3 膜より構成され、刃先部以外の表
面５の最外層はＴｉＮ膜により構成することにより、刃
先部が耐酸化性の優れたＡｌ2 Ｏ3膜であることにより
耐溶着性を向上させることができ、また、刃先以外の表
面においては、靱性に優れ、摩擦係数の小さいＴｉＮ膜
であることにより切屑により受ける衝撃を減じることが
できる。According to the coating tool of the present invention, the cutting edge portion 3
The outermost layer of is composed of an Al 2 O 3 film, and the outermost layer of the surface 5 other than the cutting edge portion is formed of a TiN film, so that the cutting edge portion is an Al 2 O 3 film having excellent oxidation resistance. The weldability can be improved, and the TiN film having excellent toughness and a small friction coefficient on the surface other than the cutting edge can reduce the impact received by the chips.
【００１５】また、刃先部の表面粗さ（Ｒａ）を０．４
μｍ以下に制御することにより膜の耐剥離性と耐衝撃性
を向上することができる。The surface roughness (Ra) of the cutting edge is 0.4.
By controlling the thickness to be not more than μm, the peeling resistance and impact resistance of the film can be improved.
【００１６】[0016]
実施例１ 超硬合金母材をＣＶＤ反応炉内に設置し、反応ガスとし
てＴｉＣｌ4 、Ｎ2 、ＣＨ4 を導入しＴｉＣ膜とＴｉＮ
膜を総膜厚６μｍの厚みで形成した後、反応ガスとして
ＡｌＣｌ3 、Ｈ2 、ＣＯ2 を導入してＡｌ2 Ｏ3 膜を２
μｍの厚みで形成した。その後Ａｌ2 Ｏ3 膜の上にＴｉ
Ｃｌ4、Ｎ2 の反応ガスを導入しＴｉＮ膜を０．５μｍ
の厚みで形成した。Example 1 A cemented carbide base material was placed in a CVD reactor, and TiCl 4 , N 2 , and CH 4 were introduced as reaction gases to introduce a TiC film and TiN.
After forming the film to a total film thickness of 6 μm, AlCl 3 , H 2 and CO 2 are introduced as reaction gases to form an Al 2 O 3 film.
It was formed with a thickness of μm. After that, on the Al 2 O 3 film, Ti
The reaction gas of Cl 4 and N 2 was introduced to form a TiN film with a thickness of 0.5 μm.
It was formed with a thickness of.
【００１７】その後、ラバー砥石を用いて、刃先部を研
磨し、刃先部の最外層のＴｉＮ膜を除去しＡｌ2 Ｏ3 膜
を露出させた。この時の刃先部のＡｌ2 Ｏ3 膜の最大表
面粗さは０．２７μｍであった。After that, the blade tip portion was polished with a rubber grindstone to remove the outermost TiN film of the blade tip portion to expose the Al 2 O 3 film. At this time, the maximum surface roughness of the Al 2 O 3 film at the cutting edge was 0.27 μm.
【００１８】このようにして得られたコーティング工具
を用いて、被削材としてＳＣＭ４４０（５ｍｍ幅の溝４
本入り）を用いて周速６０ｍ／ｍｉｎ、切り込み２ｍ
ｍ、送り０．５１ｍｍ／ｒｅｖ、切削時間１０秒、乾式
切削で５コーナー加工し、耐欠損性について評価した。
比較のために研磨加工を施さなかった工具を用いて同様
に評価した。Using the coating tool thus obtained, SCM440 (5 mm wide groove 4
Perimeter speed 60m / min, 2m cut using
m, feed 0.51 mm / rev, cutting time 10 seconds, 5 corners were processed by dry cutting, and fracture resistance was evaluated.
For comparison, the same evaluation was performed using a tool that was not subjected to polishing.
【００１９】その結果、本発明品は、５コーナーすべて
について欠損が認められず、これに対して比較品は、５
コーナーの内、１コーナーに欠損が認められ、本発明品
に比較して劣るものであった。As a result, in the product of the present invention, no defects were observed in all of the 5 corners, whereas in the comparative product, 5 defects were observed.
One of the corners had a defect, which was inferior to the product of the present invention.
【００２０】実施例２ 超硬合金母材をＣＶＤ反応炉内に設置し、反応ガスとし
てＴｉＣｌ4 、Ｎ2 、ＣＨ4 を導入しＴｉＣ膜とＴｉＮ
膜を総膜厚６μｍの厚みで形成した後、反応ガスとして
ＡｌＣｌ3 、Ｈ2 、ＣＯ2 を導入してＡｌ2 Ｏ3 膜を２
μｍの厚みで形成した。その後Ａｌ2 Ｏ3 膜の上にＴｉ
Ｃｌ4、Ｎ2 、ＣＨ4 の反応ガスを導入しＴｉＣＮ膜を
０．５μｍの厚みで形成した。Example 2 A cemented carbide base material was placed in a CVD reaction furnace, and TiCl 4 , N 2 and CH 4 were introduced as reaction gases to introduce a TiC film and a TiN film.
After forming a film with a total film thickness of 6 μm, AlCl 3 , H 2 , and CO 2 are introduced as reaction gases to form an Al 2 O 3 film.
It was formed with a thickness of μm. After that, on the Al 2 O 3 film, Ti
A TiCN film having a thickness of 0.5 μm was formed by introducing a reaction gas of Cl 4 , N 2 and CH 4 .
【００２１】その後、ラバー砥石を用いて、刃先部を研
磨し、刃先部の最外層のＴｉＣＮ膜を除去しＡｌ2 Ｏ3
膜を露出させた。この時の刃先部のＡｌ2 Ｏ3 膜の最大
表面粗さは０．２８μｍであった。After that, the edge of the blade was polished with a rubber grindstone to remove the TiCN film, which is the outermost layer of the edge of the blade, to remove Al 2 O 3.
The membrane was exposed. At this time, the maximum surface roughness of the Al 2 O 3 film at the cutting edge was 0.28 μm.
【００２２】このようにして得られたコーティング工具
を用いて、実施例１と同様な条件で切削テストを行い、
耐欠損性を評価した。なお、比較のために研磨加工を施
さなかった工具を用いて同様に評価した。Using the coating tool thus obtained, a cutting test was conducted under the same conditions as in Example 1,
The fracture resistance was evaluated. For comparison, the same evaluation was performed using a tool that was not polished.
【００２３】その結果、本発明品は、５コーナーすべて
について欠損が認められず、比較品は、５コーナーの
内、２コーナーに欠損が認められ、本発明品に比較して
劣るものであった。As a result, the product of the present invention showed no defects at all five corners, and the comparative product had defects at two of the five corners, which was inferior to the product of the present invention. ..
【００２４】比較例 超硬合金母材をＣＶＤ反応炉内に設置し、反応ガスとし
てＴｉＣｌ4 、Ｎ2 、ＣＨ4 を導入しＴｉＣ膜とＴｉＮ
膜を総膜厚６μｍの厚みで形成した後、反応ガスとして
ＡｌＣｌ3 、Ｈ2 、ＣＯ2 を導入してＡｌ2 Ｏ3 膜を２
μｍの厚みで形成した。Comparative Example A cemented carbide base material is placed in a CVD reactor, and TiCl 4 , N 2 and CH 4 are introduced as reaction gases to introduce a TiC film and TiN.
After forming a film with a total film thickness of 6 μm, AlCl 3 , H 2 , and CO 2 are introduced as reaction gases to form an Al 2 O 3 film.
It was formed with a thickness of μm.
【００２５】その後、刃先部において研磨加工を行い表
面粗さ（Ｒａ）０．３μｍに研磨した。このコーティン
グ工具を用いて実施例１と同様な方法で切削テストを行
ったところ、５コーナーのうち３コーナーに欠損が認め
られた。Thereafter, the cutting edge portion was ground to a surface roughness (Ra) of 0.3 μm. When a cutting test was performed using this coated tool in the same manner as in Example 1, defects were found in 3 out of 5 corners.
【００２６】[0026]
【発明の効果】本発明のコーティング工具によれば、刃
先部の最外層をＡｌ2 Ｏ3 膜、刃先以外の表面の最外層
をＴｉＮあるいはＴｉＣＮ膜により構成することによ
り、切屑の耐溶着性と切削加工時の耐衝撃性を向上する
ことができ、工具の長寿命化を図ることができる。According to the coated tool of the present invention, by forming the outermost layer of the cutting edge portion with an Al 2 O 3 film and the outermost layer of the surface other than the cutting edge with a TiN or TiCN film, chip welding resistance and Impact resistance during cutting can be improved, and the tool life can be extended.
【図１】本発明のコーティング工具を説明するための要
部断面図である。FIG. 1 is a sectional view of relevant parts for explaining a coating tool of the present invention.
１ 工具母材 ２ 硬質層 ３ 刃先部 1 Tool base material 2 Hard layer 3 Cutting edge part
Claims (3)
表第４ａ，５ａ，６ａ族金属の炭化物、窒化物、炭窒化
物およびＡｌ2 Ｏ3 から選ばれる少なくとも１種の化合
物を単層あるいは複数層として被覆してなるコーティン
グ工具において、工具の刃先部の最外層がＡｌ2 Ｏ3 か
ら構成され、刃先以外の部分の最外層がＴｉＮ，ＴｉＣ
Ｎのいずれかにより構成されることを特徴とするコーテ
ィング工具。1. A surface of a tool base material made of a hard material is coated with at least one compound selected from carbides, nitrides, carbonitrides of groups 4a, 5a and 6a of the periodic table and Al 2 O 3. In a coating tool formed by coating as a layer or a plurality of layers, the outermost layer of the cutting edge of the tool is made of Al 2 O 3, and the outermost layer of the portion other than the cutting edge is made of TiN, TiC.
A coating tool characterized by comprising any of N.
下である請求項１記載のコーティング工具。2. The coating tool according to claim 1, wherein the surface roughness (Ra) of the cutting edge portion is 0.4 μm or less.
気相成長法によって最外層としてＴｉＮ、ＴｉＣＮのい
ずれかの膜を、最外層に隣接する内層としてＡｌ2 Ｏ3
膜を形成した後、工具刃先部のみを研磨処理し、Ａｌ2
Ｏ3 膜を露出したことを特徴とするコーティング工具の
製造方法。3. A tool base material made of a hard material, on the surface of which is formed by chemical vapor deposition, a film of TiN or TiCN as an outermost layer and Al 2 O 3 as an inner layer adjacent to the outermost layer.
After forming the film, only the cutting edge of the tool is polished to remove Al 2
A method for manufacturing a coating tool, which comprises exposing an O 3 film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21838391A JP2825693B2 (en) | 1991-08-29 | 1991-08-29 | Coating tool and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21838391A JP2825693B2 (en) | 1991-08-29 | 1991-08-29 | Coating tool and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0557507A true JPH0557507A (en) | 1993-03-09 |
| JP2825693B2 JP2825693B2 (en) | 1998-11-18 |
Family
ID=16719044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21838391A Expired - Lifetime JP2825693B2 (en) | 1991-08-29 | 1991-08-29 | Coating tool and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2825693B2 (en) |
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