JPH0557223A - Liquid chemicals discharging device - Google Patents
Liquid chemicals discharging deviceInfo
- Publication number
- JPH0557223A JPH0557223A JP3221999A JP22199991A JPH0557223A JP H0557223 A JPH0557223 A JP H0557223A JP 3221999 A JP3221999 A JP 3221999A JP 22199991 A JP22199991 A JP 22199991A JP H0557223 A JPH0557223 A JP H0557223A
- Authority
- JP
- Japan
- Prior art keywords
- atmosphere
- container
- liquid chemicals
- nitrogen gas
- chemical liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、コンピュータ等の電子
機器に使用する回路基板や液晶表示板やプリンタヘッド
を製造するとき、液状材料の塗布装置や現像装置や洗浄
装置において、薬液を吐出させるために用いる薬液吐出
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention discharges a chemical liquid in a liquid material coating device, a developing device or a cleaning device when manufacturing a circuit board, a liquid crystal display panel or a printer head used in electronic equipment such as a computer. The present invention relates to a chemical liquid ejection device used for that purpose.
【０００２】[0002]
【従来の技術】図２は従来の薬液吐出装置の一例を示す
断面図である。2. Description of the Related Art FIG. 2 is a sectional view showing an example of a conventional chemical liquid discharging device.
【０００３】コンピュータ等の電子機器に使用する回路
基板や液晶表示板やプリンタヘッドを製造するとき、被
加工物にフォトレジストを塗布するための塗布装置や、
現像液を吹付けるための現像装置や、界面活性剤を吹付
けて洗浄するための洗浄装置において、塗布剤や現像剤
や界面活性剤等の薬液を吐出させるために用いる従来の
薬液吐出装置は、図２に示すように、加圧タンク１１内
に薬液１２を入れて密封状態とし、薬液１２の中にノズ
ル１４を挿入し、薬液１２の上部の空間に加圧管１３を
挿入し、加圧管１３から窒素ガス等の不活性ガスを注入
して薬液１２を加圧することにより、ノズル１４の先端
から薬液１２を吐出させる構成となっている。When manufacturing a circuit board, a liquid crystal display panel, or a printer head used in electronic equipment such as a computer, a coating device for coating a photoresist on a workpiece,
In a developing device for spraying a developing solution or a cleaning device for spraying and cleaning a surfactant, a conventional chemical liquid discharging device used for discharging a chemical liquid such as a coating agent, a developer or a surfactant is As shown in FIG. 2, the liquid medicine 12 is put in a pressure tank 11 to be in a sealed state, a nozzle 14 is inserted into the liquid medicine 12, and a pressure pipe 13 is inserted in the space above the liquid medicine 12, By injecting an inert gas such as nitrogen gas from 13 to pressurize the chemical liquid 12, the chemical liquid 12 is discharged from the tip of the nozzle 14.
【０００４】[0004]
【発明が解決しようとする課題】上述したような従来の
薬液吐出装置は、薬液が吸湿性であると、加圧タンク内
の薬液の上部の空間内の空気から水分を吸収（矢印Ａ）
し、また薬液が酸化されやすいものであると、加圧タン
ク内の空気（矢印Ｂ）によって酸化されるため、いずれ
の場合も薬液の性能が劣化するという欠点を有してい
る。In the conventional chemical liquid discharging device as described above, when the chemical liquid is hygroscopic, it absorbs water from the air in the space above the chemical liquid in the pressure tank (arrow A).
However, if the chemical solution is easily oxidized, it is oxidized by the air (arrow B) in the pressure tank, and in any case, the performance of the chemical solution deteriorates.
【０００５】[0005]
【課題を解決するための手段】本発明の薬液吐出装置
は、薬液を入れて密封状態とする容器と、前記容器内の
前記薬液の中に挿入した吐出ノズルと、前記容器内の前
記薬液の上部の空間に挿入した加圧管と、前記容器内の
前記薬液の上部の空間に挿入した雰囲気置換管とを備
え、前記容器に前記薬液を入れた後、前記雰囲気置換管
を介して前記薬液の上部の空間の雰囲気を空気から不活
性ガスに置換したものである。SUMMARY OF THE INVENTION A chemical liquid ejecting apparatus of the present invention includes a container for containing a chemical liquid to be in a sealed state, a discharge nozzle inserted into the chemical liquid in the container, and a chemical liquid in the container. A pressurizing tube inserted into the upper space, and an atmosphere replacement tube inserted into the upper space of the drug solution in the container, after the drug solution is put in the container, the chemical solution of the drug solution through the atmosphere replacement pipe. The atmosphere in the upper space is replaced with air by an inert gas.
【０００６】[0006]
【実施例】次に、本発明の実施例について図面を参照し
て説明する。Embodiments of the present invention will now be described with reference to the drawings.
【０００７】図１は本発明の一実施例を示す断面図で、
（ａ）は加圧タンク内の薬液の上部の雰囲気を置換する
前の状態を示す図、（ｂ）は雰囲気を置換した後の状態
を示す図ある。FIG. 1 is a sectional view showing an embodiment of the present invention.
(A) is a figure which shows the state before replacing the atmosphere in the upper part of the chemical liquid in the pressurized tank, and (b) is a figure which shows the state after replacing the atmosphere.
【０００８】図１の実施例は、薬液を入れて密封状態と
するための容器である加圧タンク１と、加圧タンク１の
中に入れたポリイミド前駆体等の薬液２と、加圧タンク
１内の薬液２の中に挿入した吐出ノズル４と、加圧タン
ク１内の薬液２の上部の空間に挿入した加圧管３と、加
圧タンク１内の薬液２の上部の空間に挿入した雰囲気置
換管６とを備えており、雰囲気置換管６には、バルブ７
が設けてある。In the embodiment shown in FIG. 1, a pressure tank 1 which is a container for containing a chemical solution to make a sealed state, a chemical solution 2 such as a polyimide precursor contained in the pressure tank 1, and a pressure tank The discharge nozzle 4 inserted into the chemical liquid 2 inside the pressure tank 1, the pressurizing pipe 3 inserted into the space above the chemical liquid 2 inside the pressure tank 1, and the space above the chemical liquid 2 inside the pressure tank 1 The atmosphere replacement pipe 6 is provided with a valve 7
Is provided.
【０００９】このように構成した薬液吐出装置によって
薬液の吐出を行うときは、まず加圧タンク１内に薬液２
を入れて密封状態とする。このときの加圧タンク１内の
薬液２の上部の空間の雰囲気は、図１（ａ）に示すよう
に、空気５となっている。次に、雰囲気置換管６のバル
ブ７を開けて加圧管３から乾燥した窒素ガスを注入す
る。これによって空気５は窒素ガスに置換され、加圧タ
ンク１内の薬液２の上部の空間の雰囲気は、図１（ｂ）
に示すように、窒素ガス８となる。この状態にしてから
バルブ７を閉じ、再び加圧管３から乾燥し窒素ガスを注
入すると、薬液２は窒素ガスによって押圧されて、ノズ
ル４から吐出する。When discharging the chemical liquid by the chemical liquid discharging device constructed as described above, first, the chemical liquid 2 is placed in the pressure tank 1.
And put in a sealed state. At this time, the atmosphere in the space above the chemical liquid 2 in the pressure tank 1 is the air 5, as shown in FIG. Next, the valve 7 of the atmosphere replacement pipe 6 is opened and the dry nitrogen gas is injected from the pressurizing pipe 3. As a result, the air 5 is replaced with nitrogen gas, and the atmosphere in the space above the chemical solution 2 in the pressure tank 1 is as shown in FIG.
As shown in FIG. In this state, the valve 7 is closed, dried again from the pressurizing pipe 3, and nitrogen gas is injected, and the chemical liquid 2 is pressed by the nitrogen gas and discharged from the nozzle 4.
【００１０】このように、加圧タンク１内の薬液２の上
部の空間の雰囲気を乾燥した不活性ガスに置換しておく
ことにより、薬液２が空気中の水分や酸素を吸収して性
能が低下するのを防止できる。As described above, by replacing the atmosphere in the space above the chemical liquid 2 in the pressure tank 1 with the dry inert gas, the chemical liquid 2 absorbs moisture and oxygen in the air to improve the performance. It can be prevented from falling.
【００１１】[0011]
【発明の効果】以上説明したように、本発明の薬液吐出
装置は、薬液を入れて密封状態とする容器に吐出ノズル
と加圧管の他に雰囲気置換管を挿入し、それを用いて容
器に薬液を入れた後その薬液の上部の空間の雰囲気を空
気から乾燥した不活性ガスに置換することにより、薬液
が空気中の水分や酸素を吸収して性能が低下するのを防
止できるという効果がある。As described above, in the chemical liquid discharging device of the present invention, the atmosphere replacement pipe is inserted in addition to the discharge nozzle and the pressurizing pipe into the container which is filled with the chemical liquid and is in a sealed state. By replacing the atmosphere of the space above the chemical solution with air after the chemical solution is filled with dry inert gas, it is possible to prevent the chemical solution from absorbing the moisture and oxygen in the air and lowering the performance. is there.
【図１】本発明の一実施例を示す断面図で、（ａ）は加
圧タンク内の薬液の上部の雰囲気を置換する前の状態を
示す図、（ｂ）は雰囲気を置換した後の状態を示す図で
ある。FIG. 1 is a cross-sectional view showing an embodiment of the present invention, (a) showing a state before the atmosphere in the upper part of the chemical liquid in the pressurized tank is replaced, and (b) showing a state after the atmosphere is replaced. It is a figure which shows a state.
【図２】従来の薬液吐出装置の一例を示す断面図であ
る。FIG. 2 is a cross-sectional view showing an example of a conventional chemical liquid ejection device.
【符号の説明】 １ 加圧タンク ２ 薬液 ３ 加圧管 ４ ノズル ５ 空気 ６ 雰囲気置換管 ７ バルブ ８ 窒素ガス １１ 加圧タンク １２ 薬液 １３ 加圧管 １４ ノズル[Explanation of symbols] 1 pressurized tank 2 chemical solution 3 pressurized tube 4 nozzle 5 air 6 atmosphere replacement tube 7 valve 8 nitrogen gas 11 pressurized tank 12 chemical solution 13 pressurized tube 14 nozzle
Claims (2)
記容器内の前記薬液の中に挿入した吐出ノズルと、前記
容器内の前記薬液の上部の空間に挿入した加圧管と、前
記容器内の前記薬液の上部の空間に挿入した雰囲気置換
管とを備えることを特徴とする薬液吐出装置。1. A container for containing a liquid medicine in a sealed state, a discharge nozzle inserted in the liquid medicine in the container, a pressurizing pipe inserted in a space above the liquid medicine in the container, and the container. An atmosphere replacement tube inserted into a space above the chemical solution in the chemical solution discharge device.
記容器内の前記薬液の中に挿入した吐出ノズルと、前記
容器内の前記薬液の上部の空間に挿入した加圧管と、前
記容器内の前記薬液の上部の空間に挿入した雰囲気置換
管とを備え、前記容器に前記薬液を入れた後、前記雰囲
気置換管を介して前記薬液の上部の空間の雰囲気を空気
から不活性ガスに置換したことを特徴とする薬液吐出装
置。2. A container for containing a liquid medicine in a hermetically sealed state, a discharge nozzle inserted in the liquid medicine in the container, a pressure pipe inserted in a space above the liquid medicine in the container, and the container. An atmosphere substitution tube inserted into the space above the chemical solution inside, and after the chemical solution is put into the container, the atmosphere of the space above the chemical solution is changed from air to an inert gas through the atmosphere substitution tube. A chemical liquid ejecting device characterized by being replaced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3221999A JPH0557223A (en) | 1991-09-03 | 1991-09-03 | Liquid chemicals discharging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3221999A JPH0557223A (en) | 1991-09-03 | 1991-09-03 | Liquid chemicals discharging device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0557223A true JPH0557223A (en) | 1993-03-09 |
Family
ID=16775510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3221999A Pending JPH0557223A (en) | 1991-09-03 | 1991-09-03 | Liquid chemicals discharging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0557223A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010065911A (en) * | 2008-09-10 | 2010-03-25 | Mitsubishi Electric Building Techno Service Co Ltd | Ester oil filling device |
| WO2015060411A1 (en) * | 2013-10-24 | 2015-04-30 | 大日本印刷株式会社 | Chemical solution accommodating container and dry air replacement method for same |
| CN104968581A (en) * | 2013-03-07 | 2015-10-07 | 大日本印刷株式会社 | Chemical solution storage container |
-
1991
- 1991-09-03 JP JP3221999A patent/JPH0557223A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010065911A (en) * | 2008-09-10 | 2010-03-25 | Mitsubishi Electric Building Techno Service Co Ltd | Ester oil filling device |
| CN104968581A (en) * | 2013-03-07 | 2015-10-07 | 大日本印刷株式会社 | Chemical solution storage container |
| WO2015060411A1 (en) * | 2013-10-24 | 2015-04-30 | 大日本印刷株式会社 | Chemical solution accommodating container and dry air replacement method for same |
| CN105121298A (en) * | 2013-10-24 | 2015-12-02 | 大日本印刷株式会社 | Chemical solution accommodating container and dry air replacement method for same |
| JPWO2015060411A1 (en) * | 2013-10-24 | 2017-03-09 | 大日本印刷株式会社 | Chemical container and its dry air replacement method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20051020 |