JPH055332B2 - - Google Patents
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- Publication number
- JPH055332B2 JPH055332B2 JP59258170A JP25817084A JPH055332B2 JP H055332 B2 JPH055332 B2 JP H055332B2 JP 59258170 A JP59258170 A JP 59258170A JP 25817084 A JP25817084 A JP 25817084A JP H055332 B2 JPH055332 B2 JP H055332B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- reflecting mirror
- plate
- fixed
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 description 7
- 230000008602 contraction Effects 0.000 description 5
- 239000007769 metal material Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 210000000569 greater omentum Anatomy 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Landscapes
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
【発明の詳細な説明】
<産業上の利用分野>
本発明は、電気信号の発生に対応して反射鏡を
平面上におけるX軸又はY軸方向に傾斜し、光を
所望方向に偏向させるための光偏向装置に関す
る。Detailed Description of the Invention <Industrial Application Field> The present invention is directed to tilting a reflecting mirror in the X-axis or Y-axis direction on a plane in response to the generation of an electric signal to deflect light in a desired direction. The present invention relates to an optical deflection device.
詳しくは、例えばレーザー光を急瞬に他方向へ
偏向し、空中に像を描くような場合等に適用でき
る光偏向装置に関する。 Specifically, the present invention relates to an optical deflection device that can be applied to, for example, cases in which a laser beam is suddenly deflected in another direction to draw an image in the air.
<従来技術>
充分な位置精度をもつて、応答性よく偏向でき
る光偏向装置は、特願昭59−34786号で提案され
ている。<Prior Art> An optical deflection device capable of deflecting light with sufficient positional accuracy and responsiveness has been proposed in Japanese Patent Application No. 34786/1986.
このものは、上面に鏡面を備えた反射鏡を、下
方から点支持するとともに、前記反射鏡の下部
に、平面上にて該支点で直交するX軸及びY軸上
の位置で、夫々電圧の印加によりZ軸方向に伸縮
する圧電積層体を配置して、該積層体の変位端に
より前記反射鏡を下方から点支持してなるもので
ある。 In this device, a reflecting mirror with a mirror surface on the upper surface is point-supported from below, and voltages are applied to the lower part of the reflecting mirror at positions on the X-axis and Y-axis, which are orthogonal to each other at the fulcrum on a plane. A piezoelectric laminate that expands and contracts in the Z-axis direction when applied is arranged, and the reflecting mirror is point-supported from below by the displaced end of the laminate.
本発明は、前記光偏向装置を改良し、かかる構
成にあつて、光の変位を前記反射鏡の傾斜度に対
応する変位以上に増幅し得る構成を備えた光偏向
装置の提供を目的とするものである。 An object of the present invention is to improve the above-mentioned optical deflection device and provide an optical deflection device having such a configuration that can amplify the displacement of light beyond the displacement corresponding to the inclination of the reflecting mirror. It is something.
<問題点を解決するための手段>
本発明は、上述の光偏向装置において、前記反
射鏡と上方から対面するように間隔をおいて前記
筐体上に固定された固定鏡を具備したものであ
る。<Means for Solving the Problems> The present invention provides the above-mentioned optical deflection device, which includes a fixed mirror fixed on the casing at a distance so as to face the reflecting mirror from above. be.
<作用>
前記X軸及びY軸上の圧電積層体を夫々電気信
号の発生とともに、Z軸方向へ歪を与えると、そ
の変位端が移動して、反射鏡は支点を中心として
所定の方向へ三次元の傾斜移動を生じる。このと
き反射鏡に光が入射すると、前記反射鏡と固定鏡
間で反射を繰り返して後、光は前記固定鏡を外れ
て放射される。<Function> When the piezoelectric laminates on the X-axis and Y-axis are strained in the Z-axis direction along with the generation of electric signals, their displacement ends move, and the reflecting mirror moves in a predetermined direction around the fulcrum. Produces a three-dimensional tilt movement. At this time, when light enters the reflecting mirror, it is repeatedly reflected between the reflecting mirror and the fixed mirror, and then leaves the fixed mirror and is emitted.
この際、第1図のように反射鏡の傾斜角をφと
し、光偏向装置への光の入射角をθ(一定)とし、
かつ固定鏡への反射回数をnとすると、その放射
角は
θ±2φ(n+1)
で表わされ、偏向角度は、2φ(n+1)である。
ここで±は、反射鏡の傾斜方向により選定され、
第1図のように左傾斜の場合には+となる。 At this time, as shown in Figure 1, the inclination angle of the reflecting mirror is φ, the incident angle of the light to the optical deflection device is θ (constant),
If the number of reflections to the fixed mirror is n, then the radiation angle is expressed as θ±2φ(n+1), and the deflection angle is 2φ(n+1).
Here, ± is selected depending on the direction of inclination of the reflecting mirror,
If it is tilted to the left as shown in FIG. 1, it becomes +.
これを前記固定鏡のない場合と比較すると、固
定鏡のない場合の偏向角度は2φであるから、
2φ(n+1)/2φ=n+1
となり、(n+1)倍拡大されたこととなる。 Comparing this with the case without the fixed mirror, the deflection angle in the case without the fixed mirror is 2φ, so 2φ(n+1)/2φ=n+1, which means that it is magnified by (n+1) times.
このため、反射鏡の小さな角度変位によつて、
大きな角度の放射角を得ることができる。 Therefore, with a small angular displacement of the reflector,
A large radiation angle can be obtained.
<実施例>
本発明の一実施例を添付図面について説明す
る。<Example> An example of the present invention will be described with reference to the accompanying drawings.
第2〜4図について、1は筐体であつて、正方
状底板2と、中心部に円孔4が形成された同形の
上板3とを、その四偶部において四本の枠柱5に
よつて連結して組付けられる。前記枠柱5には、
第3,4図に示すように金属製の正方形状の可撓
性担持板6の四角から突出している足片6aの端
部が挾持されている。該可撓性担持板6の支持は
非緊張状になされ、上下に移動し得る。また前記
円孔4内には反射鏡8が緩く嵌装されて、その下
部の固定ボス9を前記担持板6の上面に乗載さ
れ、該反射鏡8の鏡面7を前記筐体1上面から露
出している。前記担持板6下面には当て板10が
当接し、該当て板10から螺合した螺子11によ
り前記当て板10、担持板6及び固定ボス9を連
結している。前記当て板10は耐摩耗性の硬質金
属材料により形成されている。 2 to 4, reference numeral 1 denotes a housing, which includes a square bottom plate 2, a top plate 3 of the same shape with a circular hole 4 formed in the center, and four frame pillars 5 at the four joints. It is connected and assembled by. The frame pillar 5 includes
As shown in FIGS. 3 and 4, the ends of the legs 6a protruding from the squares of the metal square flexible support plate 6 are clamped. The support of the flexible carrier plate 6 is tension-free and can be moved up and down. Further, a reflecting mirror 8 is loosely fitted in the circular hole 4, and a fixing boss 9 at the lower part thereof is placed on the upper surface of the supporting plate 6, so that the mirror surface 7 of the reflecting mirror 8 is moved from the upper surface of the housing 1. exposed. A backing plate 10 is in contact with the lower surface of the support plate 6, and the backing plate 10, the support plate 6, and the fixing boss 9 are connected by screws 11 screwed from the corresponding plate 10. The caul plate 10 is made of a wear-resistant hard metal material.
尚、前記当て板10は、後記する接触球14,
16と接触する箇所のみ、耐摩耗性の硬質金属材
料とした構成としてもよい。 Note that the contact plate 10 has contact balls 14, which will be described later.
It is also possible to use a wear-resistant hard metal material only at the portion that contacts the contact point 16.
前記底板2の中心には支柱13が上下方向に保
持され、該支柱13の上端に設けた耐摩耗性の硬
質金属材料からなる接触球14を前記当て板10
の中心部下面に当てて、前記反射鏡8を支持し、
その鏡面7を前記筐体1上面と略面一にしてい
る。このとき前記担持板6は幾分上方へ持上が
り、前記反射鏡8は浮き上がり状となる。 A support post 13 is held in the vertical direction at the center of the bottom plate 2, and a contact ball 14 made of a wear-resistant hard metal material provided at the upper end of the support post 13 is connected to the contact plate 10.
supports the reflecting mirror 8 by applying it to the lower surface of the center of the mirror,
The mirror surface 7 is substantially flush with the upper surface of the housing 1. At this time, the support plate 6 is lifted up somewhat, and the reflecting mirror 8 becomes raised.
反射鏡8の中心支持の手段は、前記支柱13以
外にも種々選択され得る。 The means for supporting the center of the reflecting mirror 8 may be selected from various methods other than the support 13.
前記底板2には、前記支柱13を中心として直
交する同一平面上のX軸,Y軸の線上に位置させ
て、二本の柱状圧電積層体15a,15bが上下
方向に保持されている。前記圧電積層15a,1
5bの上端には前記接触球14と同様の耐摩耗性
の硬質金属材料からなる接触球16(変位端)が
設けられ、前記当て板10下面の平面上における
X軸及びY軸と一致する位置に点接触させてい
る。 Two columnar piezoelectric laminates 15a and 15b are held on the bottom plate 2 in the vertical direction so as to be located on lines of the X-axis and the Y-axis on the same orthogonal plane with the support 13 as the center. The piezoelectric laminate 15a, 1
A contact ball 16 (displacement end) made of the same wear-resistant hard metal material as the contact ball 14 is provided at the upper end of 5b, and is located at a position that coincides with the X-axis and Y-axis on the plane of the lower surface of the backing plate 10. is in point contact with the
前記圧電積層体15a,15bは第3図に示す
ように、上下方向に分極した複数の圧電素子17
を、同極同志を夫々対向させて上下に積層してな
り、同極の各電極と接続した入力端子18,18
間に電圧を印加することにより各圧電素子17が
上下方向に歪んで、その歪量が重畳して上下方向
への伸縮を生ずるものである。 As shown in FIG. 3, the piezoelectric laminates 15a and 15b include a plurality of piezoelectric elements 17 polarized in the vertical direction.
are stacked one above the other with the same polarity facing each other, and input terminals 18, 18 are connected to the respective electrodes of the same polarity.
By applying a voltage between them, each piezoelectric element 17 is distorted in the vertical direction, and the amounts of the distortions are superimposed to cause expansion and contraction in the vertical direction.
次に本発明の要部について説明する。 Next, the main parts of the present invention will be explained.
前記上板3上には、所定間隔Sを置いて鏡保持
板20が、その四隅下に配置した小枠柱21によ
つて指示される。 On the upper plate 3, mirror holding plates 20 are supported at predetermined intervals S by small frame columns 21 arranged under the four corners thereof.
前記鏡保持板20には、大円孔22が形成さ
れ、その孔の中央に前記反射鏡8の中心と一致す
るように、支持桟23により支持されて円盤24
が配設される。前記円盤24の外径は、大円孔2
2の内径よりも小さくし、円盤24周囲に環状孔
25が形成されるようにしている。また前記円盤
24の下面には、固定鏡26が固着され、前記反
射鏡8と対向している。 A large circular hole 22 is formed in the mirror holding plate 20, and a disk 24 is supported by a support bar 23 so that the center of the hole coincides with the center of the reflecting mirror 8.
will be placed. The outer diameter of the disk 24 is the same as that of the large circular hole 2.
2, and an annular hole 25 is formed around the disk 24. Further, a fixed mirror 26 is fixed to the lower surface of the disk 24 and faces the reflecting mirror 8.
このため、該固定鏡26は筐体1に組み付けら
れ、一体化されて、その持ち運び及び取扱いが容
易となる。また、前記鏡保持板20を、上板3に
簡易手段により保持して、脱着可能とすることも
できる。 Therefore, the fixed mirror 26 is assembled and integrated with the housing 1, making it easy to carry and handle. Further, the mirror holding plate 20 can be held by a simple means on the upper plate 3 and made detachable.
前記実施例の作用を第3図について説明する。 The operation of the above embodiment will be explained with reference to FIG.
圧電積層体15a,15bに信号電圧が印加し
ていない状態では、前記反射鏡8は、その鏡面7
を上板3上面と面一または平行としている。 When no signal voltage is applied to the piezoelectric laminates 15a and 15b, the reflecting mirror 8 has its mirror surface 7
is flush with or parallel to the upper surface of the upper plate 3.
前記反射鏡8に入射する光を所定量偏位させる
には、圧電積層体15a,15bの入力端子1
8,18間に所定信号電圧を印加する。これによ
り圧電積層体15a,15bが伸張する。 In order to deflect the light incident on the reflecting mirror 8 by a predetermined amount, the input terminals 1 of the piezoelectric laminates 15a and 15b are
A predetermined signal voltage is applied between 8 and 18. This causes the piezoelectric laminates 15a, 15b to expand.
このとき反射鏡8は可撓性担持板6を介して、
その中心下面を支柱13の接触球14によつて点
支持されており、かつ前記可揆性担持板6は足片
6aの変形により傾斜可能である。このため反射
鏡8は該接触球14を支持として圧電積層体15
a,15bの伸張により前記信号電圧に比例した
角度だけ傾斜し、鏡面7は前記圧電積層体15
a,15bが位置するるX(Y)軸方向に所定角
度の傾斜を生じる。 At this time, the reflecting mirror 8 is moved through the flexible support plate 6,
Its central lower surface is point-supported by a contact ball 14 of a support 13, and the flexible support plate 6 can be tilted by deforming the leg piece 6a. Therefore, the reflecting mirror 8 supports the piezoelectric laminate 15 by using the contact ball 14 as a support.
Due to the expansion of a and 15b, the mirror surface 7 is tilted by an angle proportional to the signal voltage, and the mirror surface 7 is tilted by an angle proportional to the signal voltage.
A predetermined angle of inclination is produced in the X (Y) axis direction where a and 15b are located.
かかる反射鏡8の傾斜により、所定位置の光源
から発光した光は環状孔25を通過して、反射鏡
8に反射し、かつ前記固定鏡26と反射鏡8間を
所定回数往復して、環状孔25から放射する。 Due to the inclination of the reflecting mirror 8, the light emitted from the light source at a predetermined position passes through the annular hole 25, is reflected on the reflecting mirror 8, and travels back and forth between the fixed mirror 26 and the reflecting mirror 8 a predetermined number of times to form an annular shape. It radiates from the hole 25.
かかる放射した光は、所定スクリーン上に光点
を描く。 Such emitted light draws a light spot on a predetermined screen.
前記圧電積層体15a,15bの伸張を解除す
ると、前記足片6aは原位置に復帰するバネ作用
を生じ、反射鏡8は圧電積層体15a,15bの
収縮に追動し原位置に復帰する。 When the expansion of the piezoelectric laminates 15a, 15b is released, the leg 6a generates a spring action to return to its original position, and the reflecting mirror 8 follows the contraction of the piezoelectric laminates 15a, 15b and returns to its original position.
而して圧電積層体15aの所定量伸縮により鏡
面7のX軸方向への傾斜が制御され、圧電積層体
15bの伸縮により鏡面7のY軸方向への傾斜が
制御される。 By expanding and contracting the piezoelectric laminate 15a by a predetermined amount, the inclination of the mirror surface 7 in the X-axis direction is controlled, and by expanding and contracting the piezoelectric laminate 15b, the inclination of the mirror surface 7 in the Y-axis direction is controlled.
このため、圧電積層体15a,15bへの夫々
の印加信号電圧を変化させて、夫々別異な伸縮量
又は伸縮タイミングを与え、これを適宜に組合わ
せることにより、反射鏡8は前記信号電圧に対応
した種々の傾斜角を付与されて多元的揺動を生
じ、前記鏡面7を入射光に対して任意の方向に偏
向できることとなる。このため、高周波のパルス
光等に応答性良く自在に角度変位させることがで
き、スクリーン上に所要の像を描くことが可能と
なる。 Therefore, by changing the signal voltages applied to the piezoelectric laminates 15a and 15b to give different amounts of expansion and contraction, or timings of expansion and contraction, and by appropriately combining these, the reflecting mirror 8 can respond to the signal voltages. The mirror surface 7 is given various inclination angles to cause multi-dimensional oscillation, and the mirror surface 7 can be deflected in any direction with respect to the incident light. Therefore, the angle can be freely displaced with good response to high-frequency pulsed light, etc., and a desired image can be drawn on the screen.
<効果>
本発明は前記の説明によつて明らかにしたよう
に、反射鏡8上に固定鏡26を設けて、前記反射
鏡8の傾斜角度を拡倍し得るようにしたから、
イ) 従来構成で、放射角度を大とするために
は、前記圧電積層体による伸縮量を大きくする
必要があり、その最大伸張量には制限があるこ
とから、圧電素子の枚数を増加する必要を生じ
て、装置が大きくかつ高価となるが、本発明の
適用により、固定鏡26を設けるのみで対応で
きる。<Effects> As clarified by the above explanation, the present invention provides the fixed mirror 26 on the reflecting mirror 8 so that the inclination angle of the reflecting mirror 8 can be magnified. In order to increase the radiation angle in the configuration, it is necessary to increase the amount of expansion and contraction by the piezoelectric laminate, and since there is a limit to the maximum amount of expansion, it is necessary to increase the number of piezoelectric elements. However, by applying the present invention, it is possible to cope with this by simply providing the fixed mirror 26, although the device is large and expensive.
ロ) 前記スクリーン上に像を描く場合に、固定
鏡26を設けないものに比し、像を大きく描く
ことができる。(b) When drawing an image on the screen, the image can be drawn larger than that without the fixed mirror 26.
ハ) 固定鏡26を設けないものに比し、圧電積
層体への印加電圧を、さらに細かく制御するこ
とにより、同一スクリーン上に数倍の情報を描
くことが可能となる。c) By controlling the voltage applied to the piezoelectric laminate more precisely than in the case where the fixed mirror 26 is not provided, it is possible to draw several times more information on the same screen.
ニ) 固定鏡26は筐体1に組み付けられ、一体
化されて、その取扱いが容易となる。d) The fixed mirror 26 is assembled and integrated into the housing 1, making it easy to handle.
ホ) 前記固定鏡26がを脱着可能とすることに
より、固定鏡26を除去した場合には小さな像
を、取付けた場合にはその拡大した像を描くこ
とができ、その像の大きさを選択することが可
能となる。e) By making the fixed mirror 26 removable, it is possible to draw a small image when the fixed mirror 26 is removed, and an enlarged image when it is attached, and the size of the image can be selected. It becomes possible to do so.
等の優れた効果がある。It has excellent effects such as
第1図は本発明の原理を示す説明図、第2図は
平面図、第3図は第2図A−A線断面図、第4図
は第3図B−B線断面図である。
1;筐体、2;底板、3;上板、6;担持板、
7;鏡面、8;反射鏡、13;支柱、15a,1
5b;圧電積層体、20;鏡保持板、25;環状
孔、26;固定鏡。
FIG. 1 is an explanatory view showing the principle of the present invention, FIG. 2 is a plan view, FIG. 3 is a sectional view taken along the line A--A in FIG. 2, and FIG. 4 is a sectional view taken along the line B--B in FIG. 3. 1; Housing, 2; Bottom plate, 3; Top plate, 6; Support plate,
7; Mirror surface, 8; Reflector, 13; Support column, 15a, 1
5b; piezoelectric laminate; 20; mirror holding plate; 25; annular hole; 26; fixed mirror.
Claims (1)
柱により連結してなる筐体と、 前記上板の円孔内に配され、上面に反射鏡を備
えた支持板と、 上面に鏡面を備えた反射鏡を揺動可能に下方か
ら点支持する支持手段と、 前記筐体内に配されてその下端を底板に固定
し、その上端を前記支点を通つて平面上で直交す
るX軸とY軸上の該支点から離間した位置におい
て支持板と当接する一対の圧電積層体と、 これら圧電積層体に電圧を印加して上下方向に
伸縮させ、上端に生じる変位により反射鏡を支点
を中心にして傾動させる電圧印加手段とを備えて
なる光偏向装置において、 前記反射鏡と上方から対面するように間隔をお
いて前記筐体上に固定された固定鏡と を具備したことを特徴とする光偏向装置。[Scope of Claims] 1. A casing formed by connecting a bottom plate and an upper plate having a circular hole in the center with a plurality of supports, and a support disposed within the circular hole of the upper plate and having a reflecting mirror on the upper surface. a plate, a supporting means for pivotally supporting a reflecting mirror having a mirror surface on its upper surface from below; a supporting means disposed within the housing and having its lower end fixed to the bottom plate; A pair of piezoelectric laminates are in contact with the support plate at positions spaced apart from the supporting points on the X and Y axes, which are perpendicular to each other.A voltage is applied to these piezoelectric laminates to make them expand and contract in the vertical direction, and the displacement generated at the upper end causes and a voltage applying means for tilting a reflecting mirror around a fulcrum, the light deflecting device comprising: a fixed mirror fixed on the casing at a distance so as to face the reflecting mirror from above. A light deflection device characterized by:
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25817084A JPS61134726A (en) | 1984-12-06 | 1984-12-06 | Optical deflector |
DE19853542154 DE3542154A1 (en) | 1984-12-01 | 1985-11-28 | LIGHT DEFLECTOR |
US06/803,734 US4705365A (en) | 1984-12-01 | 1985-12-02 | Light deflecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25817084A JPS61134726A (en) | 1984-12-06 | 1984-12-06 | Optical deflector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61134726A JPS61134726A (en) | 1986-06-21 |
JPH055332B2 true JPH055332B2 (en) | 1993-01-22 |
Family
ID=17316498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25817084A Granted JPS61134726A (en) | 1984-12-01 | 1984-12-06 | Optical deflector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61134726A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2554279B2 (en) * | 1989-04-28 | 1996-11-13 | 株式会社小松製作所 | Laser scanner drive |
US5136415A (en) * | 1990-07-31 | 1992-08-04 | Xerox Corporation | Multi-reflection scanner |
JP4562058B2 (en) * | 2001-03-14 | 2010-10-13 | 株式会社リコー | Optical scanning apparatus and image forming apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5340544A (en) * | 1972-05-02 | 1978-04-13 | Zeiss Stiftung | Method of producing light compatible multiple focus spectacles lens |
JPS5423311A (en) * | 1977-07-22 | 1979-02-21 | Jujo Eng Co Ltd | Plane scanner for facsimile |
JPS58202424A (en) * | 1982-05-20 | 1983-11-25 | Ricoh Co Ltd | Optical beam deflecting device |
-
1984
- 1984-12-06 JP JP25817084A patent/JPS61134726A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5340544A (en) * | 1972-05-02 | 1978-04-13 | Zeiss Stiftung | Method of producing light compatible multiple focus spectacles lens |
JPS5423311A (en) * | 1977-07-22 | 1979-02-21 | Jujo Eng Co Ltd | Plane scanner for facsimile |
JPS58202424A (en) * | 1982-05-20 | 1983-11-25 | Ricoh Co Ltd | Optical beam deflecting device |
Also Published As
Publication number | Publication date |
---|---|
JPS61134726A (en) | 1986-06-21 |
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