JPH0552456B2 - - Google Patents
Info
- Publication number
- JPH0552456B2 JPH0552456B2 JP10698184A JP10698184A JPH0552456B2 JP H0552456 B2 JPH0552456 B2 JP H0552456B2 JP 10698184 A JP10698184 A JP 10698184A JP 10698184 A JP10698184 A JP 10698184A JP H0552456 B2 JPH0552456 B2 JP H0552456B2
- Authority
- JP
- Japan
- Prior art keywords
- cell
- value
- measurement
- ratio
- zero point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 43
- 238000011109 contamination Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 25
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59106981A JPS60250233A (ja) | 1984-05-26 | 1984-05-26 | 赤外線ガス分析計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59106981A JPS60250233A (ja) | 1984-05-26 | 1984-05-26 | 赤外線ガス分析計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60250233A JPS60250233A (ja) | 1985-12-10 |
JPH0552456B2 true JPH0552456B2 (pt) | 1993-08-05 |
Family
ID=14447444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59106981A Granted JPS60250233A (ja) | 1984-05-26 | 1984-05-26 | 赤外線ガス分析計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60250233A (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023063136A1 (ja) * | 2021-10-12 | 2023-04-20 | 株式会社堀場製作所 | ガス分析装置、ガス分析方法及びガス分析装置用プログラム |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS582640A (ja) * | 1981-06-29 | 1983-01-08 | Shimadzu Corp | 非分散型赤外分析計 |
JPS5956153A (ja) * | 1982-09-25 | 1984-03-31 | Horiba Ltd | クロスフロ−方式の赤外線ガス分析計における動作異常判定装置 |
-
1984
- 1984-05-26 JP JP59106981A patent/JPS60250233A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS582640A (ja) * | 1981-06-29 | 1983-01-08 | Shimadzu Corp | 非分散型赤外分析計 |
JPS5956153A (ja) * | 1982-09-25 | 1984-03-31 | Horiba Ltd | クロスフロ−方式の赤外線ガス分析計における動作異常判定装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023063136A1 (ja) * | 2021-10-12 | 2023-04-20 | 株式会社堀場製作所 | ガス分析装置、ガス分析方法及びガス分析装置用プログラム |
Also Published As
Publication number | Publication date |
---|---|
JPS60250233A (ja) | 1985-12-10 |
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