JPH0547843U - Mixed gas generator - Google Patents
Mixed gas generatorInfo
- Publication number
- JPH0547843U JPH0547843U JP10434391U JP10434391U JPH0547843U JP H0547843 U JPH0547843 U JP H0547843U JP 10434391 U JP10434391 U JP 10434391U JP 10434391 U JP10434391 U JP 10434391U JP H0547843 U JPH0547843 U JP H0547843U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- mixed gas
- switching valve
- component
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Sampling And Sample Adjustment (AREA)
Abstract
(57)【要約】
【目的】 高純度成分ガスの消費量が少なく、また再現
性よく所望濃度の混合ガスを発生させることができるよ
うにする。
【構成】 成分ガスボンベ１と希釈ガスボンベ２を切換
弁１０を介して計量管１１に接続する。切換弁１０は、
成分ガスおよび希釈ガスの入口１２、１３と、成分ガス
の排出口１４と、計量管１１の入口１５および排出口１
６と、混合ガスの出口１７とを備えた６ポート弁からな
り、出口１７をタンク４に混合器１８を介して接続す
る。切換弁１０の切換周期の時間と、計量管１１の容積
を変えることで、幅広い濃度の混合ガスを発生させるこ
とができる。
(57) [Summary] [Objective] The consumption of high-purity component gas is small, and it is possible to reproducibly generate a mixed gas of a desired concentration. [Structure] A component gas cylinder 1 and a dilution gas cylinder 2 are connected to a measuring pipe 11 via a switching valve 10. The switching valve 10 is
Component gas and diluent gas inlets 12 and 13, component gas outlet 14, inlet 15 of measuring pipe 11 and outlet 1
6 and a mixed gas outlet 17 are provided, and the outlet 17 is connected to the tank 4 via a mixer 18. By changing the switching cycle time of the switching valve 10 and the volume of the measuring pipe 11, a mixed gas having a wide range of concentrations can be generated.
Description
【０００１】[0001]
本考案は、ガスクロマトグラフなどの分析計において、分析値の校正に用い る混合ガス発生装置に関するものである。 The present invention relates to a mixed gas generator used for calibrating an analytical value in an analyzer such as a gas chromatograph.
【０００２】[0002]
石油化学プロセスや鉄鋼プロセスなどのプロセスガスの成分分析に用いられる ガスクロマトグラフ等の分析計においては、予め化学分析によって正確な濃度が 分かっている標準ガスを用いて校正を行っている。校正は測定成分の濃度が異な る数種の標準ガスを分析計に通じ、濃度と目盛りの関係を求めるもので、通常測 定成分の１００％に近い純ガスを希釈用のガスで適当に希釈（数ｐｐｍ〜数％） して所望の濃度に調製した混合ガスを標準ガスとして使用している。混合ガスの 調製方法としては圧力比による方法と、流量比による方法がある。図２は圧 力比による調製方法を示すもので、１は成分ガスボンベ、２は希釈ガスボンベ、 ３は真空ポンプ、４は混合ガスを入れるタンク、５ａ〜５ｄは弁、６は圧力計で ある。例えば成分ガス（例：ＣＯ）と希釈ガス（例：Ｎ2 ）を圧力比１：１の割 合で混合して５０％の濃度の混合ガスを調製する場合、タンク４を一旦真空ポン プ３によって真空（−７６０ｍｍＨｇ）にし、０Ｋｇ／ｃｍ2 の圧力になるまで 成分ガスを入れ、次いで希釈ガスを０ｍｍＨｇから１Ｋｇ／ｃｍ2 の圧力になる まで加えればよい。図３は流量比による調製方法を示すもので、流量計７Ａ、７ Ｂによって成分ガスと希釈ガスの流量比を１：１に調整し、５０％の濃度の混合 ガスを得るものである。Gas chromatographs and other analyzers used for component analysis of process gases in petrochemical processes and steel processes are calibrated using standard gases whose accurate concentrations are known in advance by chemical analysis. Calibration involves passing several standard gases with different concentrations of measured components through an analyzer to find the relationship between concentration and scale. Normally, a pure gas close to 100% of the measured components is diluted appropriately with a diluting gas. (Several ppm to several%) and a mixed gas adjusted to a desired concentration is used as a standard gas. As a method for preparing the mixed gas, there are a method using a pressure ratio and a method using a flow rate ratio. FIG. 2 shows a preparation method based on a pressure ratio. 1 is a component gas cylinder, 2 is a dilution gas cylinder, 3 is a vacuum pump, 4 is a tank for containing a mixed gas, 5a to 5d are valves, and 6 is a pressure gauge. For example, when a component gas (eg CO) and a diluent gas (eg N 2 ) are mixed at a pressure ratio of 1: 1 to prepare a mixed gas having a concentration of 50%, the tank 4 is temporarily vacuum pumped 3 a vacuum (-760 mmHg) by putting component gas to a pressure of 0 Kg / cm 2, then may be added to the diluent gas from 0mmHg to a pressure of 1Kg / cm 2. FIG. 3 shows a preparation method based on the flow rate ratio, in which the flow rate ratio between the component gas and the dilution gas is adjusted to 1: 1 by the flow meters 7A and 7B to obtain a mixed gas with a concentration of 50%.
【０００３】[0003]
しかしながら、上記した圧力比による調製方法は、高圧ガスの取扱い上、法的 規制があるため一般的ではない。一方、流量比による調製方法は、成分ガスの流 量が数＋〜数百ｍｌ／ｍｉｎと云ったかなり多量の流量を必要とするため、高純 度成分ガスの消費量が多くなると云った問題があった。 However, the above-mentioned preparation method using the pressure ratio is not common because there are legal restrictions on the handling of high-pressure gas. On the other hand, the preparation method based on the flow rate ratio requires a fairly large flow rate of several + to several hundreds of ml / min of the component gas, so that the consumption of the high-purity component gas increases. was there.
【０００４】 したがって、本考案は上記したような従来の問題点に鑑みてなされたもので、 その目的とするところは、高純度成分ガスの消費量が少なく、また再現性よく所 望濃度の設定が簡単にできる混合ガス発生装置を提供することにある。Therefore, the present invention has been made in view of the above-mentioned conventional problems, and its purpose is to reduce the consumption of high-purity component gas and to set the desired concentration with good reproducibility. The object is to provide a mixed gas generation device which can be easily manufactured.
【０００５】[0005]
本考案は上記目的を達成するため、成分ガスと希釈ガスを混合し、一定濃度の 校正用混合ガスを発生させる混合ガス発生装置において、成分ガスおよび希釈ガ スの入口と、成分ガスの排出口と、計量管の入、排出口と、混合ガスの出口との ６ポートを有する切換弁と、この切換弁に連接した計量管とで構成したものであ る。 In order to achieve the above object, the present invention provides a mixed gas generator for mixing a component gas and a diluent gas to generate a calibration mixed gas having a constant concentration, and an inlet for the component gas and the diluent gas and an outlet for the component gas. And a metering tube inlet / outlet, a mixed gas outlet, and a switching valve having 6 ports, and a metering tube connected to the switching valve.
【０００６】[0006]
本考案において、切換弁は成分ガスと希釈ガスの流路を切り換え、計量管に接 続する。成分ガスと希釈ガスは切換弁の切換操作に伴い計量管に送られて計量さ れ、計量管の容積および切換弁の切換周期の時間を変えることによって所定の流 量比で混合される。 In the present invention, the switching valve switches the flow paths of the component gas and the diluting gas and is connected to the measuring pipe. The component gas and the diluent gas are sent to the metering pipe to be metered by the switching operation of the switching valve, and are mixed at a predetermined flow rate ratio by changing the volume of the metering pipe and the switching cycle time of the switching valve.
【０００７】[0007]
以下、本考案を図面に示す実施例に基づいて詳細に説明する。 図１は本考案に係る混合ガス発生装置の構成図である。なお、図中図２、図３ と同一構成部品のものに対しては同一符号を以て示す。本実施例は成分ガスボン ベ１と希釈ガスボンベ２を切換弁１０を介して計量管１１に接続し、切換弁１０ の切換操作により成分ガスと希釈ガスを混合し、所定濃度の混合ガスを調製する ようにしたものである。切換弁１０はガスクロマトグラフに使用されている従来 周知のサンプルバルブと同様な６ポート弁が使用されることにより、成分ガスお よび希釈ガスの入口１２、１３と、成分ガスの排出口１４と、計量管１１の入口 １５および排出口１６と、混合ガスの出口１７とを備え、出口１７とタンク４を 接続する配管途中に混合器１８が設けられている。計量管１１は、前記切換弁１ ０と同様、ガスクロマトグラフに使用されている従来周知の計量管が使用され、 小さいもので２〜２０マイクロリットル、大きいもので２０〜２０００マイクロ リットルのものが必要に応じて用いられる。１９Ａ、１９Ｂはそれぞれ減圧弁で ある。 Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the drawings. FIG. 1 is a block diagram of a mixed gas generator according to the present invention. In the figure, the same components as those in FIGS. 2 and 3 are designated by the same reference numerals. In this embodiment, a component gas cylinder 1 and a dilution gas cylinder 2 are connected to a measuring pipe 11 via a switching valve 10 and the switching operation of the switching valve 10 mixes the component gas and the diluent gas to prepare a mixed gas having a predetermined concentration. It was done like this. The switching valve 10 is a 6-port valve similar to a well-known sample valve used in a gas chromatograph, so that the component gas and dilution gas inlets 12 and 13 and the component gas outlet 14 are provided. An inlet 15 and an outlet 16 of the measuring pipe 11 and an outlet 17 for the mixed gas are provided, and a mixer 18 is provided in the middle of the pipe connecting the outlet 17 and the tank 4. As the measuring pipe 11, a well-known measuring pipe used in a gas chromatograph is used as in the switching valve 10 described above. Used according to. 19A and 19B are pressure reducing valves, respectively.
【０００８】 次に、このような構成において混合ガスの調製について説明する。まず、切換 弁１０の流路を実線の状態に保持して成分ガスボンベ１の成分ガスを弁５ａ、流 量計７Ａ、切換弁１０および計量管１１を経て排出口１４に流し、配管２２によ ってベントする。この状態で、希釈ガスボンベ２内の希釈ガスは、減圧弁１９Ｂ 、弁５ｂ、流量計７Ｂおよび切換弁１０を経由して混合器１８に送られている。 この状態から切換弁１０の流路を点線の状態に切り換えると、成分ガスボンベ１ と計量管１１の流路が不通になる一方、希釈ガスボンベ２と計量管１１が切換弁 １０を介して連通するため、計量管１１内に取り込まれた成分ガスは希釈ガスと 共に混合器１８に導かれて攪拌混合され、タンク４に貯蔵される。 この場合、切換弁１０の切換周期および計量管１１の容積を変えると、計量管 １によって取り込まれる成分ガスと希釈ガスの流量比が変化するため、数ｐｐｍ 〜数％オーダーの幅広い濃度の混合ガスを精度よく調製することが可能である。 また、切換弁１０と計量管１１を用いて成分ガスと希釈ガスの計量を行っている ので、上記した従来の流量計のみによる混合ガス調製方法に比べて高純度成分ガ スの消費量がきわめて少なくてすみ、経済的である。Next, the preparation of the mixed gas in such a configuration will be described. First, the flow path of the switching valve 10 is kept in the state of a solid line, and the component gas of the component gas cylinder 1 is flowed to the discharge port 14 via the valve 5a, the flow meter 7A, the switching valve 10 and the measuring pipe 11, and the pipe 22 is used. To vent. In this state, the dilution gas in the dilution gas cylinder 2 is sent to the mixer 18 via the pressure reducing valve 19B 1, the valve 5b, the flow meter 7B and the switching valve 10. When the flow path of the switching valve 10 is switched from this state to the state of the dotted line, the flow paths of the component gas cylinder 1 and the measuring pipe 11 are cut off, while the dilution gas cylinder 2 and the measuring pipe 11 are connected through the switching valve 10. The component gas taken into the measuring pipe 11 is introduced into the mixer 18 together with the diluent gas, stirred and mixed, and stored in the tank 4. In this case, when the switching cycle of the switching valve 10 and the volume of the measuring pipe 11 are changed, the flow rate ratio of the component gas and the diluent gas taken in by the measuring pipe 1 changes, so that a mixed gas with a wide concentration of several ppm to several percent order. Can be prepared with high precision. Further, since the component gas and the diluent gas are measured using the switching valve 10 and the measuring pipe 11, the consumption amount of the high-purity component gas is extremely high as compared with the conventional mixed gas preparation method using only the flow meter described above. It is economical and economical.
【０００９】[0009]
以上説明したように本考案に係る混合ガス発生装置は、６ポート切換弁と計量 管を用いて成分ガスと希釈ガスを混合するように構成したので、従来の流量比に よる方法に比べて高純度成分ガスの消費量が少なく、また微小流量のガスを精度 よく計量することができるため、高い再現性で幅広い濃度の混合ガスを発生させ ることができる。 As described above, the mixed gas generator according to the present invention is configured to mix the component gas and the diluting gas by using the 6-port switching valve and the metering pipe. Since the consumption of the purity component gas is small and the gas with a minute flow rate can be accurately measured, it is possible to generate a mixed gas with a wide range of concentrations with high reproducibility.
【図１】本考案に係る混合ガス発生装置の構成図であ
る。FIG. 1 is a configuration diagram of a mixed gas generation device according to the present invention.
【図２】圧力比による混合ガスの調製方法を示す構成図
である。FIG. 2 is a configuration diagram showing a method for preparing a mixed gas according to a pressure ratio.
【図３】流量比による混合ガスの調製方法を示す構成図
である。FIG. 3 is a configuration diagram showing a method of preparing a mixed gas according to a flow rate ratio.
１ 成分ガスボンベ ２ 希釈ガスボンベ ４ タンク １０ 切換弁 １１ 計量管 １２ 成分ガスの入口 １３ 希釈ガスの入口 １４ 成分ガスの排出口 １５ 計量管の入口 １６ 計量管の排出口 １７ 混合ガスの出口 1 Component Gas Cylinder 2 Dilution Gas Cylinder 4 Tank 10 Switching Valve 11 Metering Pipe 12 Component Gas Inlet 13 Component Gas Inlet 14 Component Gas Outlet 15 Measuring Pipe Inlet 16 Measuring Pipe Outlet 17 Mixed Gas Outlet
Claims (1)
の校正用混合ガスを発生させる混合ガス発生装置におい
て、成分ガスおよび希釈ガスの入口と、成分ガスの排出
口と、計量管の入、排出口と、混合ガスの出口との６ポ
ートを有する切換弁と、この切換弁に連接した計量管と
を備えたことを特徴とする混合ガス発生装置。1. A mixed gas generator for mixing a component gas and a diluent gas to generate a calibration mixed gas having a constant concentration, an inlet for the component gas and the diluent gas, an outlet for the component gas, and an inlet for a measuring pipe. A mixed gas generation device comprising: a switching valve having 6 ports of a discharge port and a mixed gas outlet; and a measuring pipe connected to the switching valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10434391U JPH0547843U (en) | 1991-11-25 | 1991-11-25 | Mixed gas generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10434391U JPH0547843U (en) | 1991-11-25 | 1991-11-25 | Mixed gas generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0547843U true JPH0547843U (en) | 1993-06-25 |
Family
ID=14378266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10434391U Pending JPH0547843U (en) | 1991-11-25 | 1991-11-25 | Mixed gas generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0547843U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109791134A (en) * | 2016-10-14 | 2019-05-21 | 国际壳牌研究有限公司 | Method and apparatus for quantitative analysis gaseous state process stream |
-
1991
- 1991-11-25 JP JP10434391U patent/JPH0547843U/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109791134A (en) * | 2016-10-14 | 2019-05-21 | 国际壳牌研究有限公司 | Method and apparatus for quantitative analysis gaseous state process stream |
| US11408869B2 (en) | 2016-10-14 | 2022-08-09 | Shell Usa, Inc. | Method and apparatus for quantitatively analyzing a gaseous process stream |
| US11774420B2 (en) | 2016-10-14 | 2023-10-03 | Shell Usa, Inc. | Method and apparatus for quantitatively analyzing a gaseous process stream |
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