JPH0542591B2 - - Google Patents
Info
- Publication number
- JPH0542591B2 JPH0542591B2 JP62172163A JP17216387A JPH0542591B2 JP H0542591 B2 JPH0542591 B2 JP H0542591B2 JP 62172163 A JP62172163 A JP 62172163A JP 17216387 A JP17216387 A JP 17216387A JP H0542591 B2 JPH0542591 B2 JP H0542591B2
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- temperature
- sensor
- thermal valve
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005856 abnormality Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
Landscapes
- Indication Of The Valve Opening Or Closing Status (AREA)
- Temperature-Responsive Valves (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はマスフローコントローラーに関し、特
に質量流量（マスフロー）センサーで取得する信
号をフイードバツクしてサーマルバルブの開閉を
制御し、配管中を流れるガス等のマスフローをコ
ントロールするマスフローコントローラーに関す
る。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a mass flow controller, and in particular, controls the opening and closing of a thermal valve by feedbacking a signal acquired by a mass flow sensor, and controls the flow of gas, etc. in piping. Related to mass flow controllers that control the mass flow of.
従来、この種のマスフローコントローラーは、
膨張軸の軸温度をモニターできる様にはなつてい
なかつた。
Conventionally, this type of mass flow controller
It was not possible to monitor the temperature of the expansion shaft.
上述した従来のマスフローコントローラーは、
サーマルバルブの膨張軸の温度変化をモニターで
きる様ににはなつておらず、従つて、膨張軸の温
度変化を介してサーマルバルブの開度を知ること
もできず、またマスフローの圧力の変動もしくは
質量流量センサー等の詰り等の異常を知ることも
できないという欠点がある。
The conventional mass flow controller mentioned above is
It is not possible to monitor the temperature change of the expansion shaft of the thermal valve, and therefore it is not possible to know the opening degree of the thermal valve through the temperature change of the expansion shaft. The disadvantage is that it is not possible to detect abnormalities such as clogging of mass flow sensors, etc.
本発明の目的は上述した欠点を除去し、膨張軸
の温度変化をモニターできるマスフローコントロ
ーラーを提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide a mass flow controller capable of monitoring temperature changes on an expansion shaft.
本発明のマスフローコントローラーは、質量流
量センサーで取得する信号をフイードバツクして
サーマルバルブの開閉を制御し、配管中を流れる
ガス等のマスフローをコントロールするマスフロ
ーコントローラにおいて、前記サーマルバルブの
膨張軸に温度測定可能な温度センサーを装着し、
前記温度センサーによる測定値をモニターして前
記マスフローの圧力の変動および前記質量流量セ
ンサーの詰まりを含む異常発生を把握することを
可能とした構成を有する。
The mass flow controller of the present invention feeds back signals acquired by a mass flow sensor to control the opening and closing of a thermal valve, thereby controlling the mass flow of gas, etc. flowing through piping. Attach a possible temperature sensor,
It has a configuration that makes it possible to monitor the measured value by the temperature sensor and grasp the occurrence of abnormalities including fluctuations in the pressure of the mass flow and clogging of the mass flow rate sensor.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例の構成図である。流
量をコントロールしようとするガスは、ガス配管
１中を矢印の方向に流れる。ガスの質量流量すな
わちマスフローは、質量流量センサー２によつて
計測される。この場合、流量のコントロールは、
サーマルバルブ３の上下により成される。このサ
ーマルバルブ３の駆動は、質量流量センサー２か
ら質量流量データを得つつ、このデータにもとづ
くヒータ駆動電源４の出力によりヒーター５が加
熱され、これにより膨張軸６が膨張することによ
つて行なわれる。この膨張軸６には、温度センサ
ー７が取付けられ膨張軸６の温度をモニター装置
８で監視する事が出来る。 FIG. 1 is a block diagram of an embodiment of the present invention. The gas whose flow rate is to be controlled flows through the gas pipe 1 in the direction of the arrow. A mass flow rate sensor 2 measures the mass flow rate of the gas. In this case, the flow rate control is
This is accomplished by the upper and lower parts of the thermal valve 3. The thermal valve 3 is driven by obtaining mass flow rate data from the mass flow rate sensor 2, heating the heater 5 by the output of the heater drive power source 4 based on this data, and thereby expanding the expansion shaft 6. It will be done. A temperature sensor 7 is attached to the expansion shaft 6, and the temperature of the expansion shaft 6 can be monitored by a monitor device 8.
モニター装置８は、流量設定器９により設定流
量と、流量センサー２による計測値と、膨張軸６
から温度データの３つとを取り込むようになつて
おり、設定値および測定値が安定して変化が認め
られない場合でかつ温度が安定しない場合、ある
いは徐徐に温度がシフトする場合などは異常警報
を出力するようになつている。 The monitor device 8 monitors the flow rate set by the flow rate setting device 9, the measured value by the flow rate sensor 2, and the expansion axis 6.
It is designed to import three types of temperature data from the system, and if the set value and measured value are stable and no change is observed, and the temperature is not stable, or if the temperature gradually shifts, an abnormality alarm will be issued. It is now output.
以上説明したように本発明は、サーマルバルブ
を有するマスフローコントローラーにおいて、サ
ーマルバルブの膨張軸の温度をモニター出来る機
能を付与することにより、一定の流量が流通して
いる場合の温度の変化を監視しつつ、サーマルバ
ルブの開度を知るとともにその温度変化状態によ
り、マスフローの圧力の変化もしくは質量流量セ
ンサー等の詰り等の異常を知り警報を出す事がで
きるという効果がある。
As explained above, the present invention provides a mass flow controller with a thermal valve with a function that can monitor the temperature of the expansion axis of the thermal valve, thereby monitoring changes in temperature when a constant flow rate is flowing. In addition to knowing the opening degree of the thermal valve, it also has the effect of being able to detect abnormalities such as changes in mass flow pressure or clogging of the mass flow sensor, etc., and issue an alarm based on the state of temperature change.
第１図は本発明のマストコントローラーの一実
施例を示す構成図である。
１……ガス配管、２……質量流量センサー、３
……サーマルバルブ、４……ヒータ駆動電源、５
……ヒーター、６……膨張軸、７……温度センサ
ー、８……温度モニター、９……流量設定器。
FIG. 1 is a configuration diagram showing an embodiment of the mast controller of the present invention. 1... Gas piping, 2... Mass flow sensor, 3
...Thermal valve, 4...Heater drive power supply, 5
... Heater, 6 ... Expansion shaft, 7 ... Temperature sensor, 8 ... Temperature monitor, 9 ... Flow rate setting device.
Claims (1)
バツクしてサーマルバルブの開閉を制御し、配管
中を流れるガス等のマスフローをコントロールを
するマスフローコントローラにおいて、前記サー
マルバルブの膨張軸に温度測定可能な温度センサ
ーを装着し、前記温度センサーによる測定値をモ
ニターして前記マスフローの圧力の変動および前
記質量流量センサーの詰まりを含む異常発生の把
握を可能としたことを特徴とするマスフローコン
トローラ。1. In a mass flow controller that feeds back signals acquired by a mass flow sensor to control the opening and closing of a thermal valve and controls the mass flow of gas, etc. flowing through piping, a temperature sensor capable of measuring temperature is installed on the expansion axis of the thermal valve. A mass flow controller, wherein the mass flow controller is installed and monitors the measured value by the temperature sensor, thereby making it possible to grasp fluctuations in the pressure of the mass flow and the occurrence of abnormalities including clogging of the mass flow sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17216387A JPS6415588A (en) | 1987-07-09 | 1987-07-09 | Mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17216387A JPS6415588A (en) | 1987-07-09 | 1987-07-09 | Mass flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6415588A JPS6415588A (en) | 1989-01-19 |
| JPH0542591B2 true JPH0542591B2 (en) | 1993-06-29 |
Family
ID=15936743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17216387A Granted JPS6415588A (en) | 1987-07-09 | 1987-07-09 | Mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6415588A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262072A (en) * | 1985-09-09 | 1987-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Method of controlling temperature of poppet valve |
| JPS6262071A (en) * | 1985-09-06 | 1987-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Device for controlling temperature of poppet valve |
| JPS6262073A (en) * | 1985-09-11 | 1987-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Device for controlling temperature of poppet valve |
-
1987
- 1987-07-09 JP JP17216387A patent/JPS6415588A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262071A (en) * | 1985-09-06 | 1987-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Device for controlling temperature of poppet valve |
| JPS6262072A (en) * | 1985-09-09 | 1987-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Method of controlling temperature of poppet valve |
| JPS6262073A (en) * | 1985-09-11 | 1987-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Device for controlling temperature of poppet valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6415588A (en) | 1989-01-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |