JPH0540318Y2

JPH0540318Y2 -

Info

Publication number: JPH0540318Y2
Application number: JP1417087U
Authority: JP
Priority date: 1987-02-04
Filing date: 1987-02-04
Publication date: 1993-10-13
Anticipated expiration: 2002-02-04
Also published as: JPS63123794U

Description

【考案の詳細な説明】（産業上の利用分野）本考案は、回転体側の動翼段とハウジング側の
静翼段とを交互に配設したターボ分子ポンプに関
するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a turbomolecular pump in which rotor blade stages on the rotating body side and stator vane stages on the housing side are alternately arranged.

（従来の技術）従来のターボ分子ポンプは、第３図に示すよう
に各翼段（回転側の動翼段とハウジング側の静翼
段）が翼弦長寸法の同じ複数の翼により構成され
ている。(Prior Art) As shown in Fig. 3, in a conventional turbo-molecular pump, each blade stage (the rotor stage on the rotating side and the stator vane stage on the housing side) is composed of a plurality of blades with the same chord length dimension. ing.

（考案が解決しようとする課題）前記第３図に示す従来のターボ分子ポンプは前
記のように各翼段（回転側の動翼段（動翼３，５
参照）とハウジング側の静翼段（静翼４参照））
が翼弦長寸法の同じ複数の翼により構成されてい
るので、低い圧力に対しては、ポンプ作用が効率
的に行われているが、高い圧力に対しては、ポン
プ作用が効率的に行われていない。(Problem to be solved by the invention) As described above, the conventional turbo molecular pump shown in FIG.
) and the stator vane stage on the housing side (see stator vane 4))
is made up of multiple blades with the same chord length, so the pumping action is efficient for low pressures, but not for high pressures. Not known.

本考案は前記の問題点に鑑み提案するものであ
り、その目的とする処は、高い圧力領域において
も分子ポンプ作用を効率的に行うことができるタ
ーボ分子ポンプを提供しようとする点にある。 The present invention has been proposed in view of the above-mentioned problems, and its purpose is to provide a turbo-molecular pump that can efficiently perform a molecular pumping action even in a high pressure region.

（課題を解決するための手段）上記の目的を達成するために、本考案は、回転
体側の動翼段とハウジング側の静翼段とを交互に
配設したターボ分子ポンプにおいて、前記各翼段
のうち、少なくとも１つの翼段を、翼弦長寸法の
長い各長翼弦長翼と翼弦長寸法の短い各短翼弦長
翼とにより構成して、同各長翼弦長翼の翼間隔を
他の翼段の翼間隔よりも広くし、同各長翼弦長翼
の間の高圧側に上記各短翼弦長翼を配設してい
る。(Means for Solving the Problems) In order to achieve the above object, the present invention provides a turbo-molecular pump in which rotor blade stages on the rotating body side and stator vane stages on the housing side are arranged alternately. At least one of the stages is constituted by each long chord length wing having a long chord length and each short chord length wing having a short wing chord length, and each of the long chord length wings has a long chord length. The spacing between the blades is made wider than the spacing between the blades of the other stages, and the short chord length blades are arranged on the high pressure side between the long chord length blades.

（作用）本考案のターボ分子ポンプは前記のように構成
したので、当該翼段の各長翼弦長翼の低圧側の翼
間隔が他の翼段（従来の翼段）の翼間隔よりも広
く、同各長翼弦長翼の高圧側の翼間隔が他の翼段
（従来の翼段）の翼間隔よりも狭い。そのため、
低圧側から入射する分子数が従来のターボ分子ポ
ンプよりも増加するとともに、高圧側から低圧側
に向かう分子数が減少して、ポンプ効率が向上す
る。特に分子流域から中間流域に遷移する圧力流
域において、分子の平均自由行程が翼間隔よりも
短くなると、他の翼段の翼間隔が広い場合、翼間
飛来分子が別の分子と衝突するため、ポンプ効率
が低下するが、本考案のターボ分子ポンプは、各
長翼弦長翼の間の高圧側に配設した各短翼弦長翼
が高圧側から流入する分子を再度高圧側翼段の方
向に向かわせるので、ポンプ作用が効率的に行わ
れる。(Function) Since the turbomolecular pump of the present invention is configured as described above, the blade spacing on the low pressure side of each long chord length blade of the relevant blade stage is larger than the blade spacing of the other blade stage (conventional blade stage). The blade spacing on the high pressure side of each long chord length blade is narrower than the blade spacing of other blade stages (conventional blade stages). Therefore,
The number of molecules entering from the low-pressure side increases compared to conventional turbomolecular pumps, and the number of molecules entering from the high-pressure side toward the low-pressure side decreases, improving pump efficiency. Especially in the pressure region that transitions from the molecular region to the intermediate region, when the mean free path of molecules becomes shorter than the blade spacing, if the blade spacing of other blade stages is wide, the molecules flying between the blades will collide with other molecules. Although the pump efficiency decreases, in the turbomolecular pump of the present invention, each short chord long blade arranged on the high pressure side between each long chord long blade redirects molecules flowing from the high pressure side toward the high pressure side stage. The pumping action is performed efficiently.

（実施例）次に本考案のターボ分子ポンプを第１，２図に
示す一実施例により説明すると、第１図の１がタ
ーボ分子ポンプのハウジング、２が同ハウジング
１内に回転可能に支持されたロータ（回転体）、
３，５，７，９が同ロータ２に取付けた複数の動
翼段、４，６，８が上記ハウジング１の内壁面に
取付けた複数の静翼段で、同動翼段３，５，７，
９及び同静翼段４，６，８が交互に配設され、同
各翼段のそれぞれが複数の翼により構成されてい
る。(Embodiment) Next, the turbo-molecular pump of the present invention will be explained with reference to an embodiment shown in FIGS. 1 and 2. In FIG. rotor (rotating body),
3, 5, 7, and 9 are a plurality of rotor blade stages attached to the rotor 2, and 4, 6, and 8 are a plurality of stator vane stages attached to the inner wall surface of the housing 1. 7,
9 and stator vane stages 4, 6, and 8 are arranged alternately, and each of the stator vane stages is constituted by a plurality of blades.

また同各翼段の１つ、例えば静翼段４の各翼が
第２図に示すように翼弦長寸法の長い複数の長翼
弦長翼４Ａと、翼弦長寸法の短い複数の短翼弦長
翼４Ｂとにより構成され、同各長翼弦長翼４Ａの
翼間隔が他の翼段（従来の翼段）の翼間隔よりも
1.5倍程度広くされ、同各長翼弦長翼４Ａの間の
高圧側に上記各短翼弦長翼４Ｂが配設されて、長
翼弦長翼４Ａと短翼弦長翼４Ｂとの翼間隔が他の
翼段（従来の翼段）の翼間隔の３分の２程度に狭
くされている。 In addition, one of the blade stages, for example, each blade of the stator blade stage 4, as shown in FIG. The blade spacing of each long chord blade 4A is larger than the blade spacing of other blade stages (conventional blade stages).
The width is increased by about 1.5 times, and each of the short chord length blades 4B is arranged on the high pressure side between the long chord length blades 4A, so that the long chord length blades 4A and the short chord length blades 4B are combined. The spacing is narrowed to about two-thirds of the spacing between the blades of other blade stages (conventional blade stages).

Ｃが長翼弦長翼４Ａの翼弦長、ｌが短翼弦長翼
４Ｂの翼弦長である。なお翼の種類は、２種類に
限定されず、２種類以上でもよい。また翼の位置
も図示の例に限定されない。 C is the chord length of the long chord length wing 4A, and l is the chord length of the short chord length wing 4B. Note that the types of blades are not limited to two types, and may be two or more types. Furthermore, the positions of the wings are not limited to the illustrated example.

次に前記第１，２図に示すターボ分子ポンプの
作用を具体的に説明する。動翼段３から出た分子
流は、静翼段４に入るが、静翼段４の各長翼弦長
翼４Ａの低圧側の翼間隔が他の翼段（従来の翼
段）の翼間隔よりも広く、同各長翼弦長翼４Ａの
高圧側の翼間隔が他の翼段（従来の翼段）の翼間
隔よりも狭い。そのため、低圧側から入射する分
子数が従来のターボ分子ポンプよりも増加すると
ともに、高圧側から低圧側に向かう分子数が減少
して、ポンプ効率が向上する。 Next, the operation of the turbo molecular pump shown in FIGS. 1 and 2 will be explained in detail. The molecular flow coming out of the rotor blade stage 3 enters the stator blade stage 4, but the blade spacing on the low pressure side of each long chord length blade 4A of the stator blade stage 4 is similar to that of the other blade stage (conventional blade stage). The interval between the blades on the high pressure side of each long chord blade 4A is narrower than the interval between the blades of the other blade stages (conventional blade stages). Therefore, the number of molecules entering from the low-pressure side increases compared to the conventional turbo-molecular pump, and the number of molecules entering from the high-pressure side toward the low-pressure side decreases, improving pump efficiency.

特に分子流域から中間流域に遷移する圧力流域
において、分子の平均自由行程が翼間隔よりも短
くなると、他の翼段の翼間隔が広い場合、翼間飛
来分子が別の分子と衝突するため、ポンプ効率が
低下するが、本考案のターボ分子ポンプは、各長
翼弦長翼４Ａの間の高圧側に配設した各短翼弦長
翼４Ｂが高圧側から流入する分子を再度高圧側翼
段の方向に向かわせるので、ポンプ作用が効率的
に行われる。 Especially in the pressure region transitioning from the molecular region to the intermediate region, when the mean free path of molecules becomes shorter than the blade spacing, if the blade spacing of other blade stages is wide, the molecules flying between the blades will collide with other molecules. Although the pump efficiency decreases, in the turbo-molecular pump of the present invention, each of the short chord blades 4B arranged on the high pressure side between the long chord blades 4A redirects the molecules flowing from the high pressure side to the high pressure side blade stage. Since the pump is directed in the direction of , the pumping action is performed efficiently.

（考案の効果）本考案のターボ分子ポンプは前記のように当該
翼段の各長翼弦長翼の低圧側の翼間隔が他の翼段
（従来の翼段）の翼間隔よりも広く、同各長翼弦
長翼の高圧側の翼間隔が他の翼段（従来の翼段）
の翼間隔よりも狭い。そのため、低圧側から入射
する分子数を従来のターボ分子ポンプよりも増加
できるとともに、高圧側から低圧側に向かう分子
数を減少できて、ポンプ効率を向上できる。特に
分子流域から中間流域に遷移する圧力流域におい
て、分子の平均自由行程が翼間隔よりも短くなる
と、他の翼段の翼間隔が広い場合、翼間飛来分子
が別の分子と衝突するため、ポンプ効率が低下す
るが、本考案のターボ分子ポンプは、各長翼弦長
翼の間の高圧側に配設した各短翼弦長翼が高圧側
から流入する分子を再度高圧側翼段の方向に向か
わせるので、ポンプ作用を効率的に行うことがで
きる効果がある。(Effect of the invention) As described above, in the turbomolecular pump of the present invention, the blade spacing on the low pressure side of each long chord blade of the relevant blade stage is wider than the blade spacing of other blade stages (conventional blade stages). The blade spacing on the high pressure side of each long chord length blade is different from that of other blade stages (conventional blade stage).
narrower than the blade spacing. Therefore, the number of molecules entering from the low pressure side can be increased compared to conventional turbomolecular pumps, and the number of molecules entering from the high pressure side to the low pressure side can be decreased, and pump efficiency can be improved. Especially in the pressure region that transitions from the molecular region to the intermediate region, when the mean free path of molecules becomes shorter than the blade spacing, if the blade spacing of other blade stages is wide, the molecules flying between the blades will collide with other molecules. Although the pump efficiency decreases, in the turbomolecular pump of the present invention, each short chord long blade arranged on the high pressure side between each long chord long blade redirects molecules flowing from the high pressure side toward the high pressure side stage. This has the effect of making the pumping action more efficient.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案のターボ分子ポンプの一実施例
を示す縦断側面図、第２図はその翼配列を示す説
明図、第３図は従来のターボ分子ポンプの翼配列
を示す説明図である。１……ハウジング、２……回転体、３，５，
７，９……動翼段。４，６，８……静翼段、４Ａ
……静翼段４の長翼弦長翼、４Ｂ……静翼段４の
短翼弦長翼、Ｃ……長翼弦長翼４Ａの翼弦長、ｌ
……短翼弦長翼４Ｂの翼弦長。 FIG. 1 is a longitudinal side view showing an embodiment of the turbo-molecular pump of the present invention, FIG. 2 is an explanatory view showing its blade arrangement, and FIG. 3 is an explanatory view showing the blade arrangement of a conventional turbo-molecular pump. . 1...Housing, 2...Rotating body, 3, 5,
7, 9... rotor blade stage. 4, 6, 8... Stator vane stage, 4A
...Long chord length wing of stator vane stage 4, 4B...Short chord length wing of stator vane stage 4, C...Chord length of long chord length wing 4A, l
...The chord length of the short chord length wing 4B.

Claims

【実用新案登録請求の範囲】[Scope of utility model registration request]

回転体側の動翼段とハウジング側の静翼段とを
交互に配設したターボ分子ポンプにおいて、前記
各翼段のうち、少なくとも１つの翼段を、翼弦長
寸法の長い各長翼弦長翼と翼弦長寸法の短い各短
翼弦長翼とにより構成して、同各長翼弦長翼の翼
間隔を他の翼段の翼間隔よりも広くし、同各長翼
弦長翼の間の高圧側に上記各短翼弦長翼を配設し
たことを特徴とするターボ分子ポンプ。 In a turbo-molecular pump in which rotor blade stages on the rotating body side and stationary blade stages on the housing side are arranged alternately, at least one blade stage among the blade stages is arranged to have a long chord length. It consists of a wing and each short chord length wing with a short wing chord length dimension, and the blade spacing of each long chord length wing is made wider than the blade spacing of the other blade stages, and each of the same long chord length wings A turbo-molecular pump characterized in that each of the above-mentioned short chord length blades is arranged on a high pressure side between.