JPH05345419A - Ink jet recording head - Google Patents
Ink jet recording headInfo
- Publication number
- JPH05345419A JPH05345419A JP15483992A JP15483992A JPH05345419A JP H05345419 A JPH05345419 A JP H05345419A JP 15483992 A JP15483992 A JP 15483992A JP 15483992 A JP15483992 A JP 15483992A JP H05345419 A JPH05345419 A JP H05345419A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- ink
- orifice
- recording head
- interior wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Nozzles (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はプリンタ、ファクシミリ
などインク滴を飛翔させるインクジェット記録方式によ
って、印字、印画を行うためのインク吐出を行うインク
ジェット記録ヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head for ejecting ink for printing and printing by an ink jet recording system for ejecting ink droplets such as printers and facsimiles.
【０００２】[0002]
【従来の技術】従来より、インクジェット記録ヘッドの
インク噴射口周辺のノズル先端面に付着したインク滴に
より、吐出インク滴の飛翔方向が次第に曲げられて記録
が正常に行えないという問題を解消するために、ノズル
先端面を撥水材料（例えば、弗素樹脂）で被覆してイン
ク滴が付着しないようにしている（特開昭６０−２４９
５６、特開昭６０−２５５４４１）。また、インク吐出
口を設けた本体部を撥水性材料（例えば、ポリテトラフ
ロロエチレン）で構成すると共に、前記インク吐出口の
内壁のインク塗れを良くしたインクジェットヘッドも知
られている（特開昭６０−４９９５１）。一方、インク
ジェットヘッドのノズルは、ステンレス鋼で作成されイ
ンク吐出口ドリル、放電加工などの手段で加工されてい
る。2. Description of the Related Art Conventionally, in order to solve the problem that ink droplets adhered to the nozzle tip surface around the ink ejection port of an ink jet recording head, the flight direction of the ejected ink droplet is gradually bent and recording cannot be performed normally. In addition, the tip surface of the nozzle is coated with a water repellent material (for example, fluororesin) to prevent ink droplets from adhering (Japanese Patent Laid-Open No. 60-249).
56, JP-A-60-255441). Further, there is also known an ink jet head in which a main body portion provided with an ink ejection port is made of a water repellent material (for example, polytetrafluoroethylene) and the inner wall of the ink ejection port is well coated with ink. 60-49951). On the other hand, the nozzle of the inkjet head is made of stainless steel and is processed by a means such as an ink discharge port drill or electric discharge machining.
【０００３】[0003]
【発明が解決しようとする課題】ところで、ノズルの内
壁面の粗さに起因して、インク滴連続吐出動作において
気泡が混入することがある。即ち、ノズル内壁面に凹凸
があると、特にノズルが親水的材料、例えばガラスで形
成されている場合ノズル内壁面の粗さが０．２μｍ以上
であれば、そこを高速でインク−空気界面が移動すると
き、微小気泡がインク中にとり込まれやすく（図４参
照）、インク滴連続吐出動作において吐出不良が発生す
るという問題がある。By the way, bubbles may be mixed in the ink droplet continuous ejection operation due to the roughness of the inner wall surface of the nozzle. That is, if the inner wall surface of the nozzle has irregularities, particularly when the nozzle is made of a hydrophilic material such as glass, and the roughness of the inner wall surface of the nozzle is 0.2 μm or more, the ink-air interface is formed at high speed there. When moving, fine bubbles are easily taken into the ink (see FIG. 4), and there is a problem that ejection failure occurs in the ink droplet continuous ejection operation.
【０００４】そこで、本発明では、親水的材料から形成
されているノズルを具備するインクジェット記録ヘッド
を使用する場合、インク滴連続吐出動作において気泡吸
入による吐出不良が発生せず、正常な記録の行われるイ
ンクジェット記録ヘッドを提供することを目的とする。Therefore, in the present invention, when an ink jet recording head having nozzles formed of a hydrophilic material is used, ejection failure due to bubble suction does not occur in continuous ink droplet ejection operation, and normal recording is performed. It is an object of the present invention to provide an inkjet recording head that is used.
【０００５】[0005]
【課題を解決する手段】上記目的は、インクジェット記
録ヘッドの、親水的材料から形成されているノズルのノ
ズルオリフィスの周辺部及び該ノズルの内壁面を化学蒸
着法により有機撥水材料で被覆することによって達成さ
れる。The above object is to coat the periphery of a nozzle orifice of a nozzle formed of a hydrophilic material and the inner wall surface of the nozzle of an ink jet recording head with an organic water repellent material by a chemical vapor deposition method. Achieved by
【０００６】具体的には、ジパラキシリレン固体ダイマ
ーを気化、熱分解してジラジカルパラキシリレンモノマ
ーを発生させ、このラジカルパラキシリレンモノマーを
ノズルオリフィスの周辺部及び該ノズルの内壁面へ吸
着、重合させて高分子量のポリパラキシリレンの薄膜を
形成させる。Specifically, the diparaxylylene solid dimer is vaporized and thermally decomposed to generate a diradical paraxylylene monomer, and the radical paraxylylene monomer is adsorbed and polymerized on the periphery of the nozzle orifice and the inner wall surface of the nozzle. To form a thin film of high molecular weight polyparaxylylene.
【０００７】[0007]
【作用】結果として、ノズルオリフィスの周辺部及び該
ノズルの内壁面にポリパラキシリレンの薄膜が形成され
る。化学蒸着なので、オリフィス孔深く均一に被覆さ
れ、ノズル内壁面の微小凹凸がなくなる。オリフィス材
料がガラスの場合、水性インクとの接触角（θ1 ）は約
１５度であるが、被覆された場合、約８０度（θ２）に
なり、撥水性が大きくなる。As a result, a thin film of polyparaxylylene is formed on the peripheral portion of the nozzle orifice and the inner wall surface of the nozzle. Since it is chemical vapor deposition, it is uniformly covered deep in the orifice hole, and fine irregularities on the inner wall surface of the nozzle are eliminated. When the orifice material is glass, the contact angle (θ 1 ) with the water-based ink is about 15 degrees, but when the orifice material is coated, it is about 80 degrees (θ 2 ) and the water repellency becomes large.
【０００８】[0008]
【実施例】図面を参照して本発明を説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings.
【０００９】図１及び図２は、本発明のインクジェット
記録ヘッドを概略的に示したものである。インクジェッ
ト記録ヘッドは、ステンレス鋼製のベースプレート１に
固着された感光性ガラス製（例 ＨＯＹＡ感光性ガラス
ＰＥＧ３）のノズル２から構成されており、このノズル
のノズルオリフィス３の周辺部及び内壁面４に化学蒸着
によってポリパラキシリレンの薄膜９を形成するもので
ある。ここでノズルオリフィス３の周辺部とは、外周辺
及び内周辺を意味する。1 and 2 schematically show an ink jet recording head of the present invention. The ink jet recording head is composed of a nozzle 2 made of photosensitive glass (eg, HOYA photosensitive glass PEG3) fixed to a stainless steel base plate 1. The nozzle 2 has a nozzle orifice 3 and a peripheral portion thereof and an inner wall surface 4. The thin film 9 of polyparaxylylene is formed by chemical vapor deposition. Here, the peripheral portion of the nozzle orifice 3 means the outer peripheral portion and the inner peripheral portion.
【００１０】次に、化学蒸着（ＣＶＤ）方法による有機
撥水材料での被覆工程を、図３を参照して説明する。Next, the coating process with the organic water repellent material by the chemical vapor deposition (CVD) method will be described with reference to FIG.
【００１１】まず、ヘッドのオリフィス周辺をプライマ
ー処理（ガラスと生成被覆の密着強度を上げるための表
面処理）し、電気接続端子部とベースプレートのインク
導入口をテープでカバーして、蒸着室へ入れる。気化器
に原料であるジパラキシリレン（ＤＰＸ）固体ダイマー
をいれ、〜１７５℃、１トールの条件下で気化させる。
気化した固体ダイマーを、次の熱分解室で、〜６８０
℃、〜０．５トールの条件下で熱分解して、ジラジカル
パラキシリレン（ＰＸ）モノマーを生成させる。このジ
ラジカルパラキシリレン（ＰＸ）モノマーは蒸着室へ送
られて、〜３５℃、〜０．１トールの条件下で前記ヘッ
ドへの吸着と重合が同時になされ、高分子量のポリパラ
キシリレン（ＰＰＸ）の薄膜が形成する。First, the periphery of the orifice of the head is subjected to a primer treatment (surface treatment for increasing the adhesion strength between the glass and the generated coating), the electrical connection terminal portion and the ink introduction port of the base plate are covered with tape, and the head is placed in the vapor deposition chamber. .. A raw material, diparaxylylene (DPX) solid dimer, is put into a vaporizer and vaporized under the conditions of ˜175 ° C. and 1 Torr.
The vaporized solid dimer was heated to ~ 680 in the next pyrolysis chamber.
Pyrolyzes under conditions of -0.5 torr and produces diradical paraxylylene (PX) monomer. The diradical para-xylylene (PX) monomer is sent to the deposition chamber and simultaneously adsorbed to the head and polymerized under the conditions of ~ 35 ° C and ~ 0.1 Torr to obtain a high molecular weight polyparaxylylene (PPX). ) Thin film is formed.
【００１２】本発明による化学蒸着膜が形成されたノズ
ル部分の模式図を図５に示す。FIG. 5 shows a schematic view of a nozzle portion on which a chemical vapor deposition film according to the present invention is formed.
【００１３】ポリパラキシリレン（ＰＰＸ）の薄膜形成
処理をしたノズルと、この薄膜形成処理をしないノズル
とを用いて、インク中にとり込まれる微小気泡のノズル
からのインク吐出への影響を、インクを吐出するノズル
の割合の経時変化のデータを取ることにより確認した。
その実験の結果を図６に示す。実験に使用した機器と条
件は下記の通りである。By using a nozzle on which a thin film of polyparaxylylene (PPX) has been formed and a nozzle on which this thin film has not been formed, the influence of minute bubbles taken into the ink on the ink ejection from the nozzle is determined. It was confirmed by taking data of the change with time of the ratio of the nozzles that ejected.
The result of the experiment is shown in FIG. The equipment and conditions used in the experiment are as follows.
【００１４】使用ヘッド：Ｊ１３−Ｎｏ．５（ガラス
製）（ノズル数 ４８） 駆動パルス：３５Ｖ−５０μｓｅｃ ６Ｋヘルツ 使用インク：水溶性染料インク（粘度 １．４ｃｐｓ） この実験結果から分かるように、本発明によるポリパラ
キシリレン（ＰＰＸ）の薄膜形成処理をしないノズルを
用いた場合には、駆動時間３分経過でインクを吐出する
ノズルの割合が６０％に減少するのに対して、本発明に
よる化学蒸着処理を施したノズルを用いた場合には、安
定なインク滴連続吐出動作を示すことが実証された。Head used: J13-No. 5 (made of glass) (nozzle number 48) Drive pulse: 35 V-50 μsec 6 K Hertz Ink used: Water-soluble dye ink (viscosity 1.4 cps) As can be seen from the results of this experiment, the polyparaxylylene (PPX) of the present invention When a nozzle that does not perform the thin film formation process is used, the ratio of the nozzles that eject ink is reduced to 60% after the driving time of 3 minutes, whereas the nozzle that has been subjected to the chemical vapor deposition process according to the present invention is used. In some cases, it was proved that a stable ink droplet continuous ejection operation was exhibited.
【００１５】[0015]
【発明の効果】有機撥水材料を化学蒸着することによ
り、ノズルオリフィス３のみならずノズルの内壁面４奥
深くまで均一に被覆され、内壁面４の微小凹凸がなくな
ると共に該内壁面が撥水的になり、インク滴吐出動作に
伴うメニスカスの動きによって、微小気泡９が液体にと
り込まれることがなくなり、インク滴連続吐出動作が安
定になる。By chemical vapor deposition of the organic water repellent material, not only the nozzle orifice 3 but also the inner wall surface 4 of the nozzle is uniformly covered deeply, and the inner wall surface 4 is free of fine irregularities and the inner wall surface is water repellent. Then, the movement of the meniscus accompanying the ink droplet ejection operation prevents the fine bubbles 9 from being taken into the liquid, and the ink droplet continuous ejection operation becomes stable.
【図１】本発明のインクジェット記録ヘッドの概略側面
図。FIG. 1 is a schematic side view of an inkjet recording head of the present invention.
【図２】本発明のインクジェット記録ヘッドの概略正面
図。FIG. 2 is a schematic front view of an inkjet recording head of the present invention.
【図３】本発明の化学蒸着法を実施する装置の全体図。FIG. 3 is an overall view of an apparatus for carrying out the chemical vapor deposition method of the present invention.
【図４】従来技術による撥水性材料でインク吐出口を被
覆したノズル部分の概略図。FIG. 4 is a schematic view of a nozzle portion in which an ink ejection port is covered with a water repellent material according to a conventional technique.
【図５】本発明による撥水性材料でインク吐出口を化学
蒸着被覆したノズル部分の概略図。FIG. 5 is a schematic view of a nozzle portion in which an ink ejection port is coated by chemical vapor deposition with a water repellent material according to the present invention.
【図６】インクを吐出するノズルの割合の経時変化を示
す図。FIG. 6 is a diagram showing changes over time in the ratio of nozzles that eject ink.
１．ベースプレート ２．ノズル ３．ノズルオリフィス ４．ノズル内壁面 ５．ピエゾ素子（積層型） ６．インク圧力室 ７．フィルタ ８．撥水被覆膜 ９．化学蒸着膜 １０．微小気泡 1. Base plate 2. Nozzle 3. Nozzle orifice 4. Nozzle inner wall surface 5. Piezo element (multilayer type) 6. Ink pressure chamber 7. Filter 8. Water repellent coating film 9. Chemical vapor deposition film 10. Micro bubbles
Claims (3)
ノズルオリフィスの周辺部及び該ノズルの内壁面を化学
蒸着法により有機撥水材料で被覆したことを特徴とする
インクジェット記録ヘッド。1. An ink jet recording head, characterized in that a peripheral portion of a nozzle orifice of a nozzle formed of a hydrophilic material and an inner wall surface of the nozzle are coated with an organic water repellent material by a chemical vapor deposition method.
とする請求項１記載のインクジェット記録ヘッド。2. The ink jet recording head according to claim 1, wherein the hydrophilic material is glass.
あることを特徴とする請求項１又は請求項２記載のイン
クジェット記録ヘッド。3. An ink jet recording head according to claim 1, wherein the organic water repellent material is polyparaxylylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15483992A JPH05345419A (en) | 1992-06-15 | 1992-06-15 | Ink jet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15483992A JPH05345419A (en) | 1992-06-15 | 1992-06-15 | Ink jet recording head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05345419A true JPH05345419A (en) | 1993-12-27 |
Family
ID=15593017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15483992A Pending JPH05345419A (en) | 1992-06-15 | 1992-06-15 | Ink jet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05345419A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0712726A3 (en) * | 1994-11-21 | 1997-03-26 | Lexmark Int Inc | Coated nozzle plate for ink jet printing |
| FR2756502A1 (en) * | 1996-12-03 | 1998-06-05 | Oreal | Atomiser for, e.g. perfumes and deodorants |
| EP0945272A2 (en) | 1998-03-27 | 1999-09-29 | Nec Corporation | Print head for an ink jet printer |
| US6243112B1 (en) | 1996-07-01 | 2001-06-05 | Xerox Corporation | High density remote plasma deposited fluoropolymer films |
| US6270212B1 (en) | 1998-03-27 | 2001-08-07 | Nec Corporation | Print head for an ink jet printer |
| KR100816573B1 (en) * | 2004-11-09 | 2008-03-24 | 캐논 가부시끼가이샤 | Ink jet recording head and producing method therefor |
| US7377620B2 (en) | 2005-05-26 | 2008-05-27 | Hewlett-Packard Development Company, L.P. | Hydrophobic nozzle exit with improved micro fluid ejection dynamics |
| US8191993B2 (en) | 2007-06-21 | 2012-06-05 | Ricoh Company, Ltd. | Nozzle plate for liquid ejector head, liquid ejector head, liquid ejector, liquid ejection method, inkjet recording apparatus, and inkjet recording method |
| US8202583B2 (en) * | 2007-03-27 | 2012-06-19 | Brother Kogyo Kabushiki Kaisha | Method of manufacturing nozzle plate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57107848A (en) * | 1980-12-26 | 1982-07-05 | Ricoh Co Ltd | Ink jet nozzle plate |
| JPS57128562A (en) * | 1981-02-02 | 1982-08-10 | Ricoh Co Ltd | Ink jet recorder |
| JPS6487358A (en) * | 1987-09-30 | 1989-03-31 | Canon Kk | Ink jet recording head |
-
1992
- 1992-06-15 JP JP15483992A patent/JPH05345419A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57107848A (en) * | 1980-12-26 | 1982-07-05 | Ricoh Co Ltd | Ink jet nozzle plate |
| JPS57128562A (en) * | 1981-02-02 | 1982-08-10 | Ricoh Co Ltd | Ink jet recorder |
| JPS6487358A (en) * | 1987-09-30 | 1989-03-31 | Canon Kk | Ink jet recording head |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0712726A3 (en) * | 1994-11-21 | 1997-03-26 | Lexmark Int Inc | Coated nozzle plate for ink jet printing |
| US6243112B1 (en) | 1996-07-01 | 2001-06-05 | Xerox Corporation | High density remote plasma deposited fluoropolymer films |
| US6444275B1 (en) | 1996-07-01 | 2002-09-03 | Xerox Corporation | Method for remote plasma deposition of fluoropolymer films |
| FR2756502A1 (en) * | 1996-12-03 | 1998-06-05 | Oreal | Atomiser for, e.g. perfumes and deodorants |
| EP0945272A2 (en) | 1998-03-27 | 1999-09-29 | Nec Corporation | Print head for an ink jet printer |
| US6270212B1 (en) | 1998-03-27 | 2001-08-07 | Nec Corporation | Print head for an ink jet printer |
| KR100816573B1 (en) * | 2004-11-09 | 2008-03-24 | 캐논 가부시끼가이샤 | Ink jet recording head and producing method therefor |
| US7377620B2 (en) | 2005-05-26 | 2008-05-27 | Hewlett-Packard Development Company, L.P. | Hydrophobic nozzle exit with improved micro fluid ejection dynamics |
| US8202583B2 (en) * | 2007-03-27 | 2012-06-19 | Brother Kogyo Kabushiki Kaisha | Method of manufacturing nozzle plate |
| US8191993B2 (en) | 2007-06-21 | 2012-06-05 | Ricoh Company, Ltd. | Nozzle plate for liquid ejector head, liquid ejector head, liquid ejector, liquid ejection method, inkjet recording apparatus, and inkjet recording method |
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