JPH05345272A - Electrolytic dressing grinding method and device - Google Patents
Electrolytic dressing grinding method and deviceInfo
- Publication number
- JPH05345272A JPH05345272A JP4179154A JP17915492A JPH05345272A JP H05345272 A JPH05345272 A JP H05345272A JP 4179154 A JP4179154 A JP 4179154A JP 17915492 A JP17915492 A JP 17915492A JP H05345272 A JPH05345272 A JP H05345272A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- dressing
- electrolytic
- work
- conductive grindstone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ガラスセラミックス等
の高脆材料を電解インプロセスドレッシング研削法によ
り研削加工する方法と装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for grinding a highly brittle material such as glass ceramics by electrolytic in-process dressing grinding.
【０００２】[0002]
【従来の技術】従来、電解インプロセスドレッシング研
削法を用いた光学素材の球面創成加工方法及び装置とし
ては、例えば特開平３−６０９７３号公報に開示されて
いる。図５は、上記研削装置の主要部を一部断面にして
示す平面図で、回転自在なチャック１に保持されたワー
ク２の回転軸心に対して、スイベル角αに配置したカッ
プ状の導電性砥石４が回転自在に設けられている。導電
性砥石４の外周部には、ブラシ５を介して直流電流装置
６の（＋）極が電気的に接続されている。直流電源装置
の（−）極は、ドレス電極７に接続されている。ドレス
電極７は、ワーク２の研削仕上げ曲率ＲA と近似形状に
形成され、導電性砥石４の研削面４ａに対して僅かな間
隙Ｌを有して対向配置されている。さらに、図示しない
クーラント供給装置に接続されたノズル８が配設され、
導電性砥石４の研削面４ａとドレス電極７との間隙Ｌに
弱電性クーラント９を供給し得るようになっている。2. Description of the Related Art Conventionally, a spherical surface generating method and apparatus for an optical material using an electrolytic in-process dressing grinding method has been disclosed in, for example, Japanese Patent Laid-Open No. 60973/1993. FIG. 5 is a plan view showing a partial cross section of the main part of the grinding device. A cup-shaped conductive member arranged at a swivel angle α with respect to the rotation axis of the workpiece 2 held by the rotatable chuck 1. A sex grindstone 4 is rotatably provided. The (+) pole of the direct current device 6 is electrically connected to the outer peripheral portion of the conductive grindstone 4 via a brush 5. The (−) pole of the DC power supply device is connected to the dress electrode 7. The dress electrode 7 is formed in a shape similar to the grinding finish curvature R A of the work 2, and is arranged to face the grinding surface 4 a of the conductive grindstone 4 with a slight gap L. Furthermore, a nozzle 8 connected to a coolant supply device (not shown) is provided,
The weakly conductive coolant 9 can be supplied to the gap L between the dressing electrode 7 and the ground surface 4a of the conductive grindstone 4.
【０００３】上記研削装置による研削方法は、チャック
１を回動してワーク２を回動しつつ、導電性砥石４を回
動し研削面４ａをワーク２に当接して研削加工を行な
う。この際、弱電クーラント９をノズル８から研削面４
ａとドレス電極７との間に供給しながら、ドレス電極７
とブラシ５に直流電源装置６によって電圧を印加し、研
削面４ａを常時電解ドレッシングしつつワーク２の研削
加工を行なう。In the grinding method using the above-mentioned grinding apparatus, the chuck 1 is rotated to rotate the work 2, and the conductive grindstone 4 is rotated to bring the grinding surface 4a into contact with the work 2 to perform the grinding process. At this time, the light electric coolant 9 is moved from the nozzle 8 to the grinding surface 4
a and the dressing electrode 7 while supplying the dressing electrode 7
A voltage is applied to the brush 5 by the DC power supply device 6, and the work 2 is ground while the ground surface 4a is always electrolytically dressed.
【０００４】次に、電解ドレッシングによる導電性砥石
４の研削面４ａのドレッシングの進行状態を図６を用い
て説明する。Ａで示すように、ワーク２の研削仕上げ面
の曲率ＲA に形成された研削面４ａを有する導電性砥石
４に対して電圧を印加して研削面４ａの電解ドレッシン
グを行なうと、Ｂで示すように、研削面４ａのボンド材
が電解溶出し、砥粒１０の目立てが進行すると同時に、
研削面４ａにボンド材の絶縁酸化膜１１が生成される。
そして、ボンド材の電解溶出が進行し、絶縁酸化膜１１
の厚さがある厚さに達すると、絶縁状態となってドレス
電極７と導電性砥石４との間に電流が通じなくなり、ボ
ンド材の溶出が停止し、その厚さ以上に絶縁酸化膜１１
は生成されなくなり、砥粒１０の目立てが完了する。生
成された絶縁酸化膜１１は、研削加工時の研削抵抗によ
って、Ｃに示すように、砥粒１０の磨耗と同時に除去さ
れてゆく。そして、この絶縁酸化膜１１の除去により、
ドレス電極７と導電性砥石４との導電性が回復し、研削
面４ａの電解ドレッシングが行なわれ、ボンド材の溶出
によって新たな絶縁酸化膜１１が研削面４ａに生成さ
れ、Ｄに示すように、導電性砥石４の目立て状態が維持
される。上記のように、絶縁酸化膜１１の生成と除去と
が繰り返され、研削面４ａのボンド材は、絶縁酸化膜１
１の生成と電解溶出によって除去されていく。研削加工
によって磨耗した砥粒１０は、絶縁酸化膜１１の除去と
共に除去される。これにより、研削面４ａは目立てら
れ、加工可能な状態を常に維持することができる。Next, the progress of dressing of the ground surface 4a of the conductive grindstone 4 by electrolytic dressing will be described with reference to FIG. As shown by A, when a voltage is applied to the conductive grindstone 4 having the grinding surface 4a formed in the curvature R A of the ground finished surface of the work 2 to perform electrolytic dressing of the grinding surface 4a, it is shown by B. As described above, the bond material on the ground surface 4a is electrolytically eluted, and the setting of the abrasive grains 10 proceeds at the same time.
An insulating oxide film 11 of a bond material is formed on the ground surface 4a.
Then, electrolytic elution of the bond material proceeds, and the insulating oxide film 11
When the thickness reaches a certain thickness, it becomes an insulating state, and the electric current does not pass between the dress electrode 7 and the conductive grindstone 4, and the elution of the bond material stops, and the insulating oxide film 11 is thicker than the thickness.
Are no longer generated, and the setting of the abrasive grains 10 is completed. The generated insulating oxide film 11 is removed at the same time as the abrasion of the abrasive grains 10 as shown by C due to the grinding resistance during the grinding process. Then, by removing the insulating oxide film 11,
The conductivity between the dressing electrode 7 and the conductive grindstone 4 is restored, the ground surface 4a is electrolytically dressed, and a new insulating oxide film 11 is formed on the ground surface 4a by elution of the bonding material. , The sharpening state of the conductive grindstone 4 is maintained. As described above, the generation and removal of the insulating oxide film 11 are repeated, and the bonding material on the ground surface 4a is the insulating oxide film 1
It is removed by the generation of 1 and electrolytic elution. The abrasive grains 10 worn by the grinding process are removed together with the removal of the insulating oxide film 11. As a result, the ground surface 4a is sharpened, and it is possible to always maintain a workable state.
【０００５】[0005]
【発明が解決しようとする課題】しかし、上記従来の電
解ドレッシング研削方法及び装置にあっては、常時、導
電性砥石４とドレス電極７との間に通電して電圧を印加
し、溶出したボンド材の絶縁酸化膜１１の生成によって
ボンド材の電解溶出を停止しているため、以下のような
問題が生じていた。すなわち、常に電圧を印加している
電解インプロセスドレッシング研削において、使用する
導電性砥石４の研削能力を十分に発揮させ、最大の研削
比を得るためには、砥粒１０が摩滅による目つぶれを起
こす直前に絶縁酸化膜１１の除去によって脱落するよう
に加工条件を設定することが必須である。このような加
工条件を得るには、砥粒１０の摩滅速度と絶縁酸化膜の
除去速度との関係が重要となる。しかしながら、従来の
電解インプロセスドレッシング研削方法によると、低メ
ッシュ砥粒（粗い砥粒）にて研削加工を行なう際、通
常、砥石４をワーク２に対して速度で切り込むため、研
削抵抗が大きくなり、絶縁酸化膜１１の除去速度は大き
くなる。絶縁酸化膜１１の除去速度が早いと、ボンド材
の溶出に伴って研削面４ａの砥粒１０の脱落する速度も
早くなり、研削加工による摩滅がごく僅かなので、依然
として使用可能な砥粒１０でさえ、研削面４ａより脱落
してしまい、砥石４を有効に使用することが困難であっ
た。また、ワーク２の研削加工を続けた場合、ワーク２
と当接するカップ状の導電性砥石４の内周及び外周での
加工抵抗が大きいため、当該部分における絶縁酸化膜１
１の除去速度が速くなる。さらに、一般に球面創成加工
は高速で行なわれるため、研削加工中に研削面４ａとワ
ーク２の接触によって、絶縁酸化膜１１が除去されやす
く、必要以上にボンド材の溶出が進行するため、導電性
砥石４の形状くずれが速くなり、ワーク２の研削仕上げ
面の形状精度が維持できないという欠点があった。However, in the above-described conventional electrolytic dressing grinding method and apparatus, the voltage is always applied between the conductive grindstone 4 and the dressing electrode 7 by applying a voltage to elute the bond. Since the electrolytic elution of the bond material is stopped by the formation of the insulating oxide film 11 of the material, the following problems have occurred. That is, in electrolytic in-process dressing grinding in which a voltage is always applied, in order to fully exhibit the grinding ability of the conductive grindstone 4 to be used and to obtain the maximum grinding ratio, the abrasive grains 10 are crushed due to abrasion. It is essential to set the processing conditions so that the insulating oxide film 11 is removed immediately before it is removed. In order to obtain such processing conditions, the relationship between the abrasion rate of the abrasive grains 10 and the removal rate of the insulating oxide film is important. However, according to the conventional electrolytic in-process dressing grinding method, when grinding is performed with low-mesh abrasive grains (coarse abrasive grains), the grindstone 4 is usually cut into the work 2 at a speed, so that the grinding resistance increases. The removal rate of the insulating oxide film 11 is increased. If the removal rate of the insulating oxide film 11 is fast, the rate at which the abrasive grains 10 on the ground surface 4a fall off is increased with the elution of the bond material, and the abrasion caused by the grinding process is very small. Even then, it fell off from the grinding surface 4a, and it was difficult to use the grindstone 4 effectively. If the grinding of the work 2 is continued, the work 2
Since the machining resistance at the inner and outer peripheries of the cup-shaped conductive grindstone 4 that comes into contact with
The removal rate of 1 becomes faster. Further, since the spherical surface forming process is generally performed at a high speed, the insulating oxide film 11 is easily removed by the contact between the grinding surface 4a and the workpiece 2 during the grinding process, and the elution of the bond material proceeds more than necessary. There is a drawback that the shape of the grindstone 4 is deformed quickly and the shape accuracy of the ground finished surface of the work 2 cannot be maintained.
【０００６】本発明は、上記従来技術の問題点に鑑みて
なされたもので、電解インプロセスドレッシング研削法
による光学素子等の球面創成加工において、導電性砥石
の形状くずれを少なく維持しながら、精度のよい光学素
子等を安定して連続的に加工し得る電解ドレッシング研
削方法及び装置を提供することを目的とする。The present invention has been made in view of the above-mentioned problems of the prior art, and in the spherical surface creation processing of an optical element or the like by the electrolytic in-process dressing grinding method, the shape of the conductive grindstone is kept small and the accuracy is improved. An object of the present invention is to provide an electrolytic dressing grinding method and apparatus capable of stably and continuously processing a good optical element or the like.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明の電解ドレッシング研削方法は、電解インプ
ロセスドレッシング研削と通常の研削とを交互に行なう
こととした。そして、電解ドレッシング研削装置は、図
１の概念図に示すように、ワーク２を保持する回転自在
なワークホルダ１と、ワーク２の被加工面に当接して回
転駆動する導電性砥石４と、導電性砥石４の研削面４ａ
に対して僅かな間隙Ｌを維持して配置したドレス電極７
と、ブラシ５を介して導電性砥石４に（＋）極を接続
し、ドレス電極７に（−）極を接続した電源装置６と、
研削面４ａとドレス電極７との間に弱電性クーラント９
を供給するノズル８を配置した研削装置において、導電
性砥石４とドレス電極７との通電をＯＮ，ＯＦＦする切
替手段１５を設けて構成した。また、本発明の電解ドレ
ッシング研削装置は、ドレス電極７を導電性砥石４の研
削面４ａから退避する移動手段を設けて構成してもよ
い。In order to achieve the above object, in the electrolytic dressing grinding method of the present invention, electrolytic in-process dressing grinding and normal grinding are alternately performed. As shown in the conceptual diagram of FIG. 1, the electrolytic dressing grinding apparatus includes a rotatable work holder 1 that holds a work 2, a conductive grindstone 4 that abuts on a surface to be processed of the work 2 and is driven to rotate. Grinding surface 4a of conductive grindstone 4
Dress electrode 7 arranged with a slight gap L maintained with respect to
And a power supply device 6 in which the (+) pole is connected to the conductive grindstone 4 via the brush 5 and the (-) pole is connected to the dress electrode 7.
Between the grinding surface 4a and the dressing electrode 7 is a weak electric coolant 9
In the grinding machine in which the nozzle 8 for supplying the electric field is arranged, the switching means 15 for turning ON / OFF the electric conduction between the conductive grindstone 4 and the dress electrode 7 is provided. Further, the electrolytic dressing grinding apparatus of the present invention may be configured by providing a moving means for retracting the dressing electrode 7 from the grinding surface 4a of the conductive grindstone 4.
【０００８】[0008]
【作用】上記構成の電解ドレッシング研削方法によれ
ば、図２のＡで示す状態の導電性砥石４を初期ドレッシ
ング工程によって、研削面４ａのドレッシングを行い、
ボンド材を電解溶出させて、Ｂで示すように絶縁酸化膜
の生成と砥粒１０の目立てを行なう。次に、電源装置か
らの通電を切り、通常の研削法で加工を行なうことによ
り、電解電流によるボンド材の溶出が押さえられ、Ｃに
示すように研削加工時の研削抵抗によって砥粒１０の磨
耗と絶縁酸化膜１１の除去のみが行なわれ、ボンド材の
溶出による末だ使用可能な砥粒１０の脱落が防止され
る。そして、砥粒１０の磨耗が進行したところで、電解
インプロセスドレッシング研削を所定量行なうことで、
Ｄに示すように砥粒１０を突出させて研削面４ａの目立
てが行なわれ、導電性砥石４の形状くずれを防止し、安
定した研削加工が持続できる。そして、本発明の電解ド
レッシング装置にあっては、切替手段１５の操作によ
り、電源装置６からの通電がＯＮ，ＯＦＦされ、電解イ
ンプロセス研削と通常の研削を交互に行なうことができ
る。また、ドレス電極７を研削面４ａから退避すること
により、電解インプロセス研削が停止される。According to the electrolytic dressing grinding method of the above construction, the grinding surface 4a is dressed by the initial dressing step of the conductive grindstone 4 in the state shown in A of FIG.
The bond material is electrolytically eluted to form an insulating oxide film and sharpen the abrasive grains 10 as indicated by B. Next, by turning off the power supply from the power supply device and performing the processing by the normal grinding method, the elution of the bond material due to the electrolytic current is suppressed, and as shown in C, the abrasion of the abrasive grains 10 is caused by the grinding resistance during the grinding processing. Only the insulating oxide film 11 is removed, and the useable abrasive grains 10 are prevented from falling off due to the elution of the bond material. Then, when the wear of the abrasive grains 10 progresses, electrolytic in-process dressing grinding is performed by a predetermined amount,
As shown in D, the abrasive grains 10 are projected to sharpen the grinding surface 4a, the shape of the conductive grindstone 4 is prevented from being deformed, and stable grinding can be continued. Further, in the electrolytic dressing device of the present invention, the energization from the power supply device 6 is turned on and off by operating the switching means 15, and electrolytic in-process grinding and normal grinding can be alternately performed. Further, the electrolytic in-process grinding is stopped by retracting the dress electrode 7 from the grinding surface 4a.
【０００９】[0009]
【実施例１】図３は、本発明に係る電解ドレッシング装
置の実施例１を一部切り欠いて示す平面図である。ワー
ク２はチャック１に保持され、図示しない駆動装置によ
って回転されるようになっている。ワーク２の被加工面
２ａと当接自在に設けられた導電性砥石４は、ワーク２
の回転軸心に対してスイベル角αを有するカップ状に形
成され、図示しない駆動装置によって軸心ｍを中心に回
転駆動されるようになっている。導電性砥石４の研削面
４ａは、ワーク２の研削仕上げ曲率ＲA と同一曲率ＲA
の形状に形成され、その研削部分４ｂは、ダイヤモンド
粉末等の砥粒（＃４００程度）とＣｕ，Ｓｎ，Ｆｅ等の
金属粉末を特殊配合して熱処理した焼結合金により形成
されている。[Embodiment 1] FIG. 3 is a partially cutaway plan view showing Embodiment 1 of the electrolytic dressing apparatus according to the present invention. The work 2 is held by the chuck 1 and is rotated by a driving device (not shown). The conductive grindstone 4 provided so as to come into contact with the work surface 2a of the work 2 is
It is formed in a cup shape having a swivel angle α with respect to the rotation axis of the above, and is rotationally driven about the axis m by a driving device (not shown). Grinding surface 4a of the conductive grinding wheel 4 is finished by grinding the curvature of the workpiece 2 R A the same curvature R A
The ground portion 4b is formed by a sintered alloy obtained by specially blending abrasive grains (about # 400) such as diamond powder and metal powder such as Cu, Sn, and Fe, and heat-treating.
【００１０】導電性砥石４は、その外周部において、電
源装置６の（＋）極とブラシ５を介して電気的に接続さ
れている。（＋）極とブラシ５との間には、電源装置６
からの電力の供給をＯＮ，ＯＦＦするための切替スイッ
チ２０が設けられている。一方、電源装置６の（−）極
は、ドレス電極７に接続されている。ドレス電極７は、
ワーク２の研削仕上げ曲率ＲA と近似形状に形成され、
導電性砥石４の研削面４ａに対して僅かな間隙Ｌを有し
て対向配置されている。さらに、図示しないクーラント
供給装置に接続したノズル８が配設され、研削面４ａと
ドレス電極７との間隙Ｌに弱電性クーラント９を供給し
得るようになっている。The conductive grindstone 4 is electrically connected to the (+) pole of the power supply device 6 via the brush 5 at the outer peripheral portion thereof. A power supply device 6 is provided between the (+) pole and the brush 5.
A changeover switch 20 is provided for turning on / off the power supply from the device. On the other hand, the (−) pole of the power supply device 6 is connected to the dress electrode 7. The dress electrode 7 is
Formed in a shape similar to the grinding finish curvature R A of the workpiece 2,
The conductive grindstone 4 is arranged to face the ground surface 4a with a slight gap L. Further, a nozzle 8 connected to a coolant supply device (not shown) is provided so that the weakly electrically conductive coolant 9 can be supplied to the gap L between the grinding surface 4a and the dress electrode 7.
【００１１】次に、上記構成の装置を用いた本発明の電
解ドレッシング研削方法の実施例を説明する。まず、初
期ドレッシング工程において、導電性砥石４を研削装置
に装着後、図示しない駆動装置により導電性砥石６を回
転し、弱電性クーラント９をノズル８から供給しなが
ら、ドレス電極７とブラシ５を介して導電性砥石４に電
源装置６から電圧を印加する。これにより、導電性砥石
４の研削面４ａが電解ドレッシングされ、砥粒が突出し
た状態となり球面創成加工が可能な状態となる。Next, an embodiment of the electrolytic dressing grinding method of the present invention using the apparatus having the above construction will be described. First, in the initial dressing step, after the conductive grindstone 4 is mounted on the grinding device, the conductive grindstone 6 is rotated by a driving device (not shown) to supply the weak electric coolant 9 from the nozzle 8 while the dress electrode 7 and the brush 5 are removed. A voltage is applied from the power supply device 6 to the conductive grindstone 4 via the power supply device 6. As a result, the ground surface 4a of the conductive grindstone 4 is electrolytically dressed, and the abrasive grains are in a protruding state, so that the spherical surface generating process is possible.
【００１２】初期ドレッシングが完了した時点で、切替
スイッチ２０をＯＦＦ状態とし、電源装置６からの電力
の供給を停止し、この状態で導電性砥石４をワーク２の
被加工面２ａに当接するとともに、導電性砥石４及びワ
ーク２を回転しつつ、ワーク２の球面創成加工を行な
う。＃４００の導電性砥石４を用いた場合、この通常の
研削工程では、数百個程度のワーク２の連続加工を安定
して行なうことができる。かかる通常の研削加工におい
ては、砥粒の摩擦とボンド材の絶縁酸化膜の除去が進行
する。When the initial dressing is completed, the changeover switch 20 is turned off to stop the power supply from the power supply device 6, and in this state, the conductive grindstone 4 is brought into contact with the work surface 2a of the work 2. While the conductive grindstone 4 and the work 2 are rotated, spherical surface creation processing of the work 2 is performed. When the # 400 conductive grindstone 4 is used, several hundreds of workpieces 2 can be continuously processed stably in this normal grinding process. In such a normal grinding process, the friction of the abrasive grains and the removal of the insulating oxide film of the bond material proceed.
【００１３】そして、この研削工程において、所定の数
量のワーク２の球面創成加工が終了、もしくは砥粒が摩
滅により目つぶれを起こす直前に、切替スイッチ２０を
ＯＮ状態にして、ブラシ５と電源装置６とを接続して電
力供給を再開し、電解インプロセスドレッシング研削に
よる球面創成加工を数個のワーク２に対して行なう。そ
して、この電解インプロセスドレッシング研削工程にお
いて、導電性砥石４の研削面４ａの砥粒の目立て状態が
回復する。その後、通常の研削と電解インプロセスドレ
ッシング研削を交互に行いつつワーク２の研削加工を行
なう。Then, in this grinding step, the changeover switch 20 is turned on immediately before the spherical surface forming process of the predetermined number of works 2 is completed or immediately before the abrasive grains are crushed, and the brush 5 and the power supply device are turned on. 6 is connected and power supply is restarted, and spherical surface generation processing by electrolytic in-process dressing grinding is performed on several workpieces 2. Then, in this electrolytic in-process dressing grinding step, the sharpened state of the abrasive grains on the ground surface 4a of the conductive grindstone 4 is recovered. After that, the work 2 is ground while alternately performing the normal grinding and the electrolytic in-process dressing grinding.
【００１４】本実施例においては、上記初期ドレッシン
グ工程後、通常研削工程→電解インプロセスドレッシン
グ研削工程→通常研削工程→電解インプロセスドレッシ
ング研削工程のサイクルを繰り返し、導電性砥石４の不
必要な溶出を防ぎながら安定した加工が持続できるの
で、導電性砥石４の形状くずれを防止できワーク２の研
削仕上げ面の形状精度も高精度に維持することができ
る。さらに、砥粒が摩滅により目つぶれを起こす前に、
通常研削から電解インプロセスドレッシング研削に切り
替えるため砥粒の能力を十分に利用することができると
ともに、通常研削によって導電性砥石４のボンド材の不
必要な溶出を防ぎ、まだ使用できる砥粒の落下を防止で
きるので、高い研削比を得ることができる。In the present embodiment, after the initial dressing step, the cycle of normal grinding step → electrolytic in-process dressing grinding step → normal grinding step → electrolytic in-process dressing grinding step is repeated to unnecessarily elute the conductive grindstone 4. Since stable machining can be continued while preventing the above, it is possible to prevent deformation of the shape of the conductive grindstone 4 and maintain the shape accuracy of the ground finished surface of the workpiece 2 with high accuracy. Furthermore, before the abrasive grains are worn out and cause blinding,
In order to switch from normal grinding to electrolytic in-process dressing grinding, the ability of the abrasive grains can be fully utilized, and the normal grinding prevents unnecessary elution of the bond material of the conductive grindstone 4, and drops of usable abrasive grains. Can be prevented, so that a high grinding ratio can be obtained.
【００１５】[0015]
【実施例２】図４は、本発明に係る電解ドレッシング研
削装置の実施例２を一部切り欠いて示す平面図である。
本実施例の研削装置は、上記実施例１と同様に形成した
ドレス電極２１をエアシリンダ２２に連結し、導電性砥
石４の研削面４ａと対向する配置及び研削面４ａから退
避できるように進退自在（図中、矢印Ｙ方向）に設けら
れている。すなわち、エアシリンダ２２は、研削加工時
にドレス電極２１を退避させ、非研削加工時にドレス電
極２１を研削面４ａに対向配置させ得るようになってい
る。その他の構成は、切替スイッチ２０を設けず構成し
た点を除いて、上記実施例１と同様である。[Embodiment 2] FIG. 4 is a plan view showing a second embodiment of the electrolytic dressing grinding apparatus according to the present invention with a part cut away.
In the grinding apparatus of this embodiment, the dressing electrode 21 formed in the same manner as in the first embodiment is connected to the air cylinder 22, and is arranged so as to face the grinding surface 4a of the conductive grindstone 4 and to move back and forth so that the grinding surface 4a can be retracted. It is provided freely (in the direction of the arrow Y in the figure). That is, the air cylinder 22 is configured to retract the dressing electrode 21 during the grinding process and allow the dressing electrode 21 to face the grinding surface 4a during the non-grinding process. The other configurations are the same as those in the first embodiment except that the changeover switch 20 is not provided.
【００１６】本実施例においては、ドレス電極２１と導
電性砥石４の研削面４ａとの距離を遠ざけることで、研
削面４ａとドレス電極２１との間に電流が流れなくな
り、研削面４ａが電解ドレスされなくなる。すなわち、
エアシリンダ２２を駆動してドレス電極２１を移動する
ことで、電圧の印加のＯＮ，ＯＦＦを行なっている。In the present embodiment, by increasing the distance between the dressing electrode 21 and the grinding surface 4a of the conductive grindstone 4, no current flows between the grinding surface 4a and the dressing electrode 21, and the grinding surface 4a is electrolyzed. You won't be dressed. That is,
By driving the air cylinder 22 and moving the dressing electrode 21, voltage application is turned on and off.
【００１７】次に、上記構成からなる研削装置を用いた
本発明の電解ドレッシング研削方法の実施例を説明す
る。なお、実施例にあっては、導電性砥石４とほぼ等し
い大きさのワーク２を研削加工した。まず、研削装置に
ワーク２を装着する前に、導電性砥石４を研削装置に接
着後、導電性砥石４を回転する。エアシリンダ２２によ
って、ドレス電極２１を研削面４ａに接近させ、このド
レス電極２１と研削面４ａとの間に弱電性クーラント９
を供給し、導電性砥石４を電解ドレスする。そして、研
削面４ａに対する初期ドレッシングが完了した時点で、
ドレス電極２１をエアシリンダ２２により後退する。こ
れにより、ドレス電極２１は研削面４ａから遠ざかり、
ドレス電極２１と導電性砥石４との通電が停止し、研削
面４ａの電解ドレッシングが停止する。Next, an embodiment of the electrolytic dressing grinding method of the present invention using the grinding apparatus having the above construction will be described. In addition, in the example, the work 2 having substantially the same size as the conductive grindstone 4 was ground. First, before the work 2 is attached to the grinding device, the conductive grindstone 4 is adhered to the grinding device, and then the conductive grindstone 4 is rotated. The air cylinder 22 brings the dressing electrode 21 close to the grinding surface 4a, and the weakly conductive coolant 9 is interposed between the dressing electrode 21 and the grinding surface 4a.
Is supplied and the conductive grindstone 4 is electrolytically dressed. Then, when the initial dressing for the grinding surface 4a is completed,
The dress electrode 21 is retracted by the air cylinder 22. As a result, the dress electrode 21 moves away from the grinding surface 4a,
The energization of the dressing electrode 21 and the conductive grindstone 4 is stopped, and the electrolytic dressing of the grinding surface 4a is stopped.
【００１８】ドレス電極２１の後退が終了した後、研削
装置にワーク２を装着し、導電性砥石４をワーク２に対
して当接させ、通常研削を行なう。以後、複数のワーク
２に対して研削加工を施し、所定の数量の球面創成加工
を終了したのち、もしくは砥粒が摩滅により目つぶれを
おこす直前にこの通常研削加工を終了する。通常研削加
工を終了後、ワーク２を研削装置より取り外し、エアシ
リンダ２２によってドレス電極２１を前進して、導電性
砥石４の研削面４ａに接近させ、前記初期ドレッシング
と同様に、導電性砥石４の研削面４ａを電解ドレッシン
グする。以後、上記電解ドレッシング研削と通常研削を
繰り返し、ワーク２を研削加工する。After the retraction of the dress electrode 21 is completed, the work 2 is attached to the grinding device, the conductive grindstone 4 is brought into contact with the work 2, and normal grinding is performed. After that, the plurality of workpieces 2 are ground, and after a predetermined number of spherical surface forming processes are completed, or immediately before the abrasive grains are crushed due to abrasion, the normal grinding process is completed. After the normal grinding process is completed, the work 2 is removed from the grinding device, the dressing electrode 21 is moved forward by the air cylinder 22 to approach the grinding surface 4a of the conductive grindstone 4, and the conductive grindstone 4 is moved in the same manner as the initial dressing. The ground surface 4a is electrolytically dressed. After that, the electrolytic dressing grinding and the normal grinding are repeated to grind the work 2.
【００１９】本実施例においては、上記初期ドレッシン
グ以降、通常研削と電解ドレッシング研削とを繰り返す
ことにより、導電性砥石４の砥粒の不必要な流出を防ぎ
ながら安定した加工が維持できるので、ワーク２の研削
仕上げ面の形状精度を高精度に維持することができる。In this embodiment, since the normal grinding and the electrolytic dressing grinding are repeated after the initial dressing, it is possible to prevent the abrasive grains of the conductive grindstone 4 from flowing out unnecessarily, so that the stable working can be maintained. The shape accuracy of the ground finished surface of No. 2 can be maintained with high accuracy.
【００２０】また、通常、本実施例のように導電性砥石
４の大きさとほぼ等しい大きさのワーク２を研削加工す
る場合、もしくは球面創成するワーク２の曲率が非常に
小さい場合、もしくは球面創成するワーク２の曲率が非
常に大きい場合、ワーク２の加工中にドレス電極２１を
導電性砥石４の研削面４ａに接近させることが不可能と
なる場合がある、そのような場合、ワーク２を加工しつ
つ導電性砥石４を電解ドレスすることができなくなる。
しかし、本実施例においては、比較的球面創成する曲率
が小さい場合、あるいは導電性砥石４と比較して、ワー
ク２の形状が大きい場合、初期電解ドレッシングが完了
した後、エアシリンダ２２を駆動させ、ドレス電極２１
をワーク２と干渉しない位置まで退避させることによ
り、ワーク２の形状に関係なく安定した球面創成加工を
行なうことができる。Further, normally, when a work 2 having a size substantially equal to the size of the conductive grindstone 4 is ground as in this embodiment, or when the curvature of the work 2 to be spherically formed is very small, or the spherically created. When the curvature of the work 2 to be processed is very large, it may be impossible to bring the dress electrode 21 close to the grinding surface 4a of the conductive grindstone 4 during processing of the work 2. In such a case, the work 2 is It becomes impossible to electrolytically dress the conductive grindstone 4 while processing.
However, in this embodiment, when the curvature that creates a relatively spherical surface is small, or when the shape of the workpiece 2 is larger than that of the conductive grindstone 4, the air cylinder 22 is driven after the initial electrolytic dressing is completed. , Dress electrode 21
By retracting to a position where it does not interfere with the work 2, stable spherical surface forming processing can be performed regardless of the shape of the work 2.
【００２１】[0021]
【発明の効果】以上のように、本発明の電解ドレッシン
グ研削方法と装置によれば、電解インプロセスドレッシ
ング研削と通常の研削を行なうので、必要以上のボンド
材の電解溶出を防止できる。これにより、導電性砥石の
研削面の形状精度とドレッシング状態を維持しながら、
研削加工を連続的に行なうことができるので、精度の高
い光学素子等を安定して加工することができる。As described above, according to the electrolytic dressing grinding method and apparatus of the present invention, since electrolytic in-process dressing grinding and normal grinding are performed, it is possible to prevent electrolytic elution of the bond material more than necessary. Thereby, while maintaining the shape accuracy and dressing state of the grinding surface of the conductive grindstone,
Since grinding can be performed continuously, highly accurate optical elements and the like can be stably processed.
【図１】本発明の電解ドレッシング装置を示す概念図で
ある。FIG. 1 is a conceptual diagram showing an electrolytic dressing device of the present invention.
【図２】導電性砥石の研削面の電解ドレッシング状態を
示す断面図である。FIG. 2 is a cross-sectional view showing a state of electrolytic dressing on a ground surface of a conductive grindstone.
【図３】本発明に係る電解ドレッシング装置の実施例１
を示す平面図である。FIG. 3 is a first embodiment of an electrolytic dressing device according to the present invention.
FIG.
【図４】本発明に係る電解ドレッシング装置の実施例２
を示す平面図である。FIG. 4 is a second embodiment of the electrolytic dressing device according to the present invention.
FIG.
【図５】従来の電解ドレッシング装置を示す平面図であ
る。FIG. 5 is a plan view showing a conventional electrolytic dressing device.
【図６】導電性砥石の研削面の電解ドレッシング状態を
示す断面図である。FIG. 6 is a cross-sectional view showing a state of electrolytic dressing on a ground surface of a conductive grindstone.
１ チャック ２ ワーク ４ 導電性砥石 ４ａ 研削面 ６ 電源装置 ７ ２１ ドレス電極 ９ クーラント １５ 切替手段 ２０ 切替スイッチ ２２ エアシリンダ 1 Chuck 2 Work 4 Conductive Grinding Stone 4a Grinding Surface 6 Power Supply 7 21 Dressing Electrode 9 Coolant 15 Switching Means 20 Changeover Switch 22 Air Cylinder
Claims (3)
常の研削とを交互に行なうことを特徴とする電解ドレッ
シング研削方法。1. An electrolytic dressing grinding method characterized in that electrolytic in-process dressing grinding and normal grinding are alternately performed.
ダと、前記ワーク表面に当接して回転駆動する導電性砥
石と、弱電性クーラントを介し前記導電性砥石の研削面
に対して一定距離を維持して配置した電極と、前記電極
に電圧を印加する電源装置からなる電解ドレッシング研
削装置において、前記電極への電圧の印加をＯＮ，ＯＦ
Ｆする切替手段を設けたことを特徴とする電解ドレッシ
ング研削装置。2. A rotatable work holder that holds a work, a conductive grindstone that abuts against the surface of the work and is driven to rotate, and a constant distance is maintained with respect to the ground surface of the conductive grindstone via a weak electric coolant. In an electrolytic dressing grinding device comprising electrodes arranged in parallel and a power supply device for applying a voltage to the electrodes, voltage application to the electrodes is turned on and off.
An electrolytic dressing grinding apparatus provided with a switching means for performing F.
ダと、前記ワーク表面に当接して回転駆動する導電性砥
石と、弱電性クーラントを介し前記導電性砥石の研削面
に対して一定距離を維持して配置した電極と、前記電極
に電圧を印加する電源装置からなる電解ドレッシング研
削装置において、前記電極を導電性砥石の研削面から退
避する移動手段を設けたことを特徴とする電解ドレッシ
ング研削装置。3. A rotatable work holder that holds a work, a conductive grindstone that abuts against the surface of the work and is driven to rotate, and a constant distance is maintained with respect to the ground surface of the conductive grindstone via a weakly electrically conductive coolant. In the electrolytic dressing grinding device including the electrodes arranged in parallel and a power supply device for applying a voltage to the electrode, a moving means for retracting the electrode from the grinding surface of the conductive grindstone is provided. ..
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17915492A JP3194624B2 (en) | 1992-06-12 | 1992-06-12 | Grinding method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17915492A JP3194624B2 (en) | 1992-06-12 | 1992-06-12 | Grinding method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05345272A true JPH05345272A (en) | 1993-12-27 |
| JP3194624B2 JP3194624B2 (en) | 2001-07-30 |
Family
ID=16060902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17915492A Expired - Fee Related JP3194624B2 (en) | 1992-06-12 | 1992-06-12 | Grinding method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3194624B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100443260C (en) * | 2006-11-08 | 2008-12-17 | 大连理工大学 | Scatheless grinding method for rigid, fragile crystal wafer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102485421A (en) * | 2010-12-01 | 2012-06-06 | 大连新氏传动科技有限公司 | Reticulated vertical lathe grinding device |
-
1992
- 1992-06-12 JP JP17915492A patent/JP3194624B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100443260C (en) * | 2006-11-08 | 2008-12-17 | 大连理工大学 | Scatheless grinding method for rigid, fragile crystal wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3194624B2 (en) | 2001-07-30 |
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