JPH0532956Y2 - - Google Patents
Info
- Publication number
- JPH0532956Y2 JPH0532956Y2 JP14620587U JP14620587U JPH0532956Y2 JP H0532956 Y2 JPH0532956 Y2 JP H0532956Y2 JP 14620587 U JP14620587 U JP 14620587U JP 14620587 U JP14620587 U JP 14620587U JP H0532956 Y2 JPH0532956 Y2 JP H0532956Y2
- Authority
- JP
- Japan
- Prior art keywords
- nut
- joint
- quartz
- diameter portion
- conductive wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 238000007789 sealing Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Weting (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、半導体装置製造時における半導体基
板のエツチング、洗浄工程などの処理装置に用い
られる石英ヒータの改良に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of a quartz heater used in processing equipment for etching and cleaning of semiconductor substrates during the manufacture of semiconductor devices.
従来のエツチング、洗浄装置の石英ヒータは、
第２図の斜視図に示す様に、石英管１内に、タン
グステンコイル２を挿入し、電源電圧を加える事
で薬液の温度を、ヒータと非接触状態で昇温させ
るしくみになつていた。封止部は、石英管端部を
収縮チユーブ１１にておおつて封止を行なつてい
た。
The quartz heater of conventional etching and cleaning equipment is
As shown in the perspective view of FIG. 2, a tungsten coil 2 was inserted into a quartz tube 1, and by applying a power supply voltage, the temperature of the chemical solution was raised without contacting the heater. The sealing section was performed by covering the end of the quartz tube with a shrink tube 11.
上述した従来の石英ヒータは、管内と外気とを
遮断するために、収縮チユーブ及びテープにて封
止を行つていたが、石英ヒータを昇温する事で高
温状態となるため、封止状態が悪くなり、石英管
内に湿気が入りタングステンコイルに付着し劣化
を促進させていたという欠点がある。
The conventional quartz heater mentioned above was sealed with a shrink tube and tape to isolate the inside of the tube from the outside air, but as the temperature of the quartz heater rises, it becomes high temperature, so the sealed state The drawback was that moisture entered the quartz tube and adhered to the tungsten coil, accelerating deterioration.
本考案は、この問題点を解決するために、封止
部をテフロン製の継手を使用し、Ｏリング及びフ
レアーによる封止をする事により、高温状態でも
リークのない信頼度の高い封止が行なわれる。
In order to solve this problem, the present invention uses a Teflon joint for the sealing part and seals with an O-ring and flare, thereby achieving a highly reliable seal that does not leak even under high temperature conditions. It is done.
つぎに本考案を実施例により説明する。 Next, the present invention will be explained with reference to examples.
第１図は本考案の一実施例の要部断面図であ
る。第１図において、石英管１の軸中心に設けら
れているタングステンのヒータコイル２と接合し
たニツケル線３が、石英管１の端部から外部へ引
き出されている。ニツケル線３を引き出した石英
管１の封止部は、石英管１の外側に大径継手には
まるテフロン製のナツト４を入れ、Ｏリング押さ
え７を入れてＯリング６を入れる。次に大径継手
ボデイ５を入れ、ナツト４をボデイ５にねじ込
み、Ｏリング６で封止する。またニツケル線３の
封止部は、大径継手ボデイ５の端面中心部に結合
した小径継手のボデイ９の中心軸穴にニツケル線
保護チユーブ１０を入れ、外側面をフレアー加工
した小径継手ボデイ９のニツケル線引出し端部の
外側に、テフロンで形成され内面をフレア加工さ
れた小径継手用のナツト８をねじ込み、テフロン
の小径継手のボデイ９を半径中心方向に圧縮して
ニツケル線の保護チユーブ１０を内側方向に締め
付け封止する。このような継手によつて封止する
ことで、高温、薬液による影響がなく完全な密閉
封止が行なわれる。 FIG. 1 is a sectional view of a main part of an embodiment of the present invention. In FIG. 1, a nickel wire 3 connected to a tungsten heater coil 2 provided at the axial center of a quartz tube 1 is drawn out from an end of the quartz tube 1. For the sealing part of the quartz tube 1 from which the nickel wire 3 has been pulled out, a Teflon nut 4 that fits into the large-diameter joint is inserted into the outside of the quartz tube 1, an O-ring retainer 7 is inserted, and an O-ring 6 is inserted. Next, the large-diameter joint body 5 is inserted, the nut 4 is screwed into the body 5, and the O-ring 6 is sealed. The sealing portion of the nickel wire 3 is formed by inserting a nickel wire protection tube 10 into the center shaft hole of the small-diameter joint body 9 connected to the center of the end face of the large-diameter joint body 5, and forming a small-diameter joint body 9 whose outer surface is flared. A small-diameter joint nut 8 made of Teflon and flared on the inside is screwed onto the outside of the nickel wire drawing end of the nickel wire, and the Teflon small-diameter joint body 9 is compressed in the radial center direction to form a protective tube 10 for the nickel wire. Tighten inward to seal. By sealing with such a joint, a complete hermetic seal is achieved without being affected by high temperatures or chemicals.
以上説明したように本考案は、封止部を継手化
することにより、石英管のヒータ引出し端部を完
全密閉できるため、管内への湿気、薬液などの侵
入が完全に阻止された長寿命の石英ヒータを得る
ことができる。
As explained above, the present invention allows the heater drawer end of the quartz tube to be completely sealed by making the sealing part a joint, thereby completely preventing moisture, chemicals, etc. from entering the tube, resulting in a long service life. You can get a quartz heater.
第１図は本考案の一実施例の要部断面図、第２
図は従来の石英ヒータの石英管内を透視して示し
た斜視図である。
１……石英管、２……ヒータコイル、３……ニ
ツケル線、４……大径継手用ナツト、５……大径
継手ボデイ、６……Ｏリング、７……Ｏリング押
さえ、８……小径継手用ナツト、９……小径継手
ボデイ、１０……保護チユーブ、１１……収縮チ
ユーブ。
Figure 1 is a sectional view of the main parts of an embodiment of the present invention, Figure 2
The figure is a perspective view showing the inside of a quartz tube of a conventional quartz heater. 1... Quartz tube, 2... Heater coil, 3... Nickel wire, 4... Nut for large diameter joint, 5... Large diameter joint body, 6... O ring, 7... O ring holder, 8... ... Nut for small diameter joint, 9 ... Small diameter joint body, 10 ... Protection tube, 11 ... Shrinkage tube.
Claims (1)
導体基板を処理する液剤の温度調節に用いられる
半導体基板処理装置用石英ヒータにおいて、第１
の内径で所定の肉厚に形成された管状の大径部及
び前記第１の内径よりも小さな第２の内径で前記
所定の肉厚よりも薄く形成された小径部を有しフ
ツ素系樹脂により形成された継手と、フツ素系樹
脂により形成され前記継手の大径部に結合される
第１のナツトと、前記継手の大径部の端部及び前
記第１のナツトとにより挟まれ前記石英管の端部
側面に密着するリング状シール部材と、フツ素系
樹脂により形成されて前記継手の小径部に結合さ
れ、内側面がフレア加工された第２のナツトと、
前記第２のナツトのフレア加工部により圧縮され
た前記継手の小径部により密着封止され、前記発
熱用導電線に接続された引き出し用導電線とを備
えたことを特徴とする半導体基板処理装置用石英
ヒータ。 In a quartz heater for a semiconductor substrate processing apparatus, which is equipped with a quartz tube having a heat-generating conductive wire therein and is used to adjust the temperature of a liquid agent for processing semiconductor substrates, the first
A fluorine-based resin having a tubular large diameter portion formed to have an inner diameter and a predetermined wall thickness, and a small diameter portion formed to have a second inner diameter smaller than the first inner diameter and thinner than the predetermined wall thickness. a first nut formed of fluororesin and coupled to the large diameter part of the joint, and a first nut sandwiched between the end of the large diameter part of the joint and the first nut. a ring-shaped sealing member that is in close contact with the side surface of the end of the quartz tube; a second nut that is made of fluorocarbon resin, is connected to the small diameter portion of the joint, and has a flared inner surface;
A semiconductor substrate processing apparatus comprising: a lead-out conductive wire that is tightly sealed by a small diameter portion of the joint compressed by the flared portion of the second nut and connected to the heat generating conductive wire. Quartz heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14620587U JPH0532956Y2 (en) | 1987-09-24 | 1987-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14620587U JPH0532956Y2 (en) | 1987-09-24 | 1987-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454294U JPS6454294U (en) | 1989-04-04 |
| JPH0532956Y2 true JPH0532956Y2 (en) | 1993-08-23 |
Family
ID=31415477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14620587U Expired - Lifetime JPH0532956Y2 (en) | 1987-09-24 | 1987-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0532956Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5465828B2 (en) * | 2007-10-01 | 2014-04-09 | 株式会社日立国際電気 | Substrate processing apparatus and semiconductor device manufacturing method |
-
1987
- 1987-09-24 JP JP14620587U patent/JPH0532956Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6454294U (en) | 1989-04-04 |
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