JPH05314553A - Magneto-optical recording medium and its production - Google Patents

Abstract

PURPOSE:To provide the magneto-optical recording medium which enables the formation of the perpendicularly magnetized film of a crystalline magnetic film having a high magneto-optical effect on a plastic substrate and lessens the noise generation by the remaining of the erasing of recording domains in spite of a fluctuation in recording and erasing powers and the process for production of such recording medium. CONSTITUTION:This magneto-optical recording medium is constituted by subjecting only the parts 16 used as the recording tracks of the recording film 13 consisting of the crystalline magnetic film provided on the substrate 11 to a heat treatment. The recording is produced by the process of irradiating the magneto-optical recording medium having the recording film 13 consisting of the crystalline magnetic film with a laser beam and subjecting only the parts 16 to be used as the recording tracks of the recording film to the heat treatment. As a result, the heat treatment of the recording film 13 is executed without giving detrimental damages on the plastic substrate 11. The high magneto- optical effect and perpendicular magnetic anisotropy are imparted only to the recording track parts 16.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明はレーザ光による温度上昇
を利用して記録消去を行い、磁気光学効果を利用して再
生を行う光磁気記録媒体及びその作製方法に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium in which recording and erasing are performed by utilizing a temperature rise due to a laser beam, and reproduction is performed by utilizing a magneto-optical effect, and a manufacturing method thereof.

【０００２】[0002]

【従来の技術】光磁気記録媒体への記録は、レーザ光照
射により記録膜を局部的に補償温度以上の保磁力の小さ
い温度、もしくはキュリー温度以上に加熱し、照射部の
記録膜を外部磁界の向きに磁化させることによって行う
（熱磁気記録）。また、その記録信号の再生は、記録消
去時のレーザパワーより低いパワーのレーザ光照射によ
り記録膜の記録状態（磁化の向き）に応じて反射光ある
いは透過光の偏光面が回転する（磁気光学効果）状況を
検出することによって行う。また、高密度記録をするた
めに光磁気記録媒体の記録膜には垂直磁気異方性を有す
る磁性材料が用いられる。2. Description of the Related Art Recording on a magneto-optical recording medium is carried out by locally irradiating a recording film by irradiation with a laser beam to a temperature having a small coercive force above the compensation temperature or a Curie temperature and irradiating an external magnetic field to the recording film. It is performed by magnetizing in the direction (thermomagnetic recording). Further, in reproducing the recording signal, the plane of polarization of the reflected light or the transmitted light is rotated according to the recording state (magnetization direction) of the recording film by irradiation with laser light having a power lower than the laser power at the time of recording / erasing (magneto-optical). (Effect) Performed by detecting the situation. Further, a magnetic material having perpendicular magnetic anisotropy is used for the recording film of the magneto-optical recording medium for high density recording.

【０００３】従来の光磁気記録媒体の記録膜としては、
（１）ＴｂＦｅＣｏ等の希土類−遷移金属合金系磁性
膜，（２）ＭｎＢｉ等のＭｎ合金系磁性膜等がある。As a recording film of a conventional magneto-optical recording medium,
There are (1) rare earth-transition metal alloy magnetic films such as TbFeCo, and (2) Mn alloy magnetic films such as MnBi.

【０００４】[0004]

【発明が解決しようとする課題】しかしながら、上記の
ような光磁気記録媒体の記録膜うち（１）は非晶質膜で
あり、垂直磁化膜は比較的容易に得られるが、耐酸化
性，耐腐食性に劣り、磁気光学効果も充分大きいとは言
えないという課題を有していた。一方、（２）は結晶質
膜であり、磁気光学効果が比較的大きいものもあるが、
充分な磁気光学効果や垂直磁化膜を得るために成膜時の
高温での基板加熱あるいは成膜後の熱処理工程が必要で
ありプラスチック基板が使用できないという課題を有し
ていた。However, among the recording films (1) of the magneto-optical recording medium as described above, the (1) is an amorphous film, and the perpendicular magnetization film can be obtained relatively easily. It has a problem that it is inferior in corrosion resistance and the magneto-optical effect cannot be said to be sufficiently large. On the other hand, (2) is a crystalline film, which has a relatively large magneto-optical effect,
In order to obtain a sufficient magneto-optical effect and perpendicular magnetization film, there is a problem that the substrate cannot be used because heating of the substrate at a high temperature during film formation or a heat treatment process after film formation is required.

【０００５】さらに、熱磁気記録する際に記録レーザパ
ワーが高いほど記録ドメインが記録トラックの幅方向に
拡大するため、高いレーザパワーで記録して低いレーザ
パワーで消去した場合には記録トラックの端部分のある
いは記録トラックからはみだした記録ドメインの消去残
りが発生し、ノイズ発生の原因になるという課題を有し
ていた。Further, when thermomagnetic recording is performed, the higher the recording laser power is, the wider the recording domain is in the width direction of the recording track. Therefore, when recording with high laser power and erasing with low laser power, the end of the recording track is increased. There is a problem in that the unerased portion of the recording domain that protrudes from a portion or the recording track is generated, which causes noise.

【０００６】本発明は上記課題に鑑み、比較的大きな磁
気光学効果を有する結晶質磁性材料の垂直磁化膜をプラ
スチック基板にも成膜可能とし、かつ記録消去パワーの
変動に対しても記録ドメインの消去残りによるノイズ発
生が少ない高性能の光磁気記録媒体及びその作製方法を
提供するものである。In view of the above problems, the present invention makes it possible to form a perpendicularly magnetized film of a crystalline magnetic material having a relatively large magneto-optical effect even on a plastic substrate, and to improve the recording domain even when the recording / erasing power fluctuates. Provided is a high-performance magneto-optical recording medium in which generation of noise due to unerased residue and a method for manufacturing the same are provided.

【０００７】[0007]

【課題を解決するための手段】上記課題を解決するため
に本発明の光磁気記録媒体は、基板上に記録膜として結
晶質磁性膜を設けた構成であって、前記結晶質磁性膜の
記録トラックとして用いる部分のみが熱処理されている
構成を備えており、本発明の光磁気記録媒体の作製方法
は、基板上に記録膜として結晶質磁性膜を設けた構成の
光磁気記録媒体にレーザ光を照射し、結晶質磁性膜の記
録トラックとして用いる部分のみを熱処理する構成を備
えているものである。In order to solve the above problems, a magneto-optical recording medium of the present invention has a structure in which a crystalline magnetic film is provided as a recording film on a substrate, and the recording of the crystalline magnetic film is performed. The method for manufacturing a magneto-optical recording medium according to the present invention comprises a magneto-optical recording medium having a crystalline magnetic film as a recording film provided on a substrate with a laser beam. Of the crystalline magnetic film to heat-treat only the portion used as the recording track of the crystalline magnetic film.

【０００８】[0008]

【作用】本発明の光磁気記録媒体は上記構成によって、
以下のように上記課題を解決する。すなわち、基板上に
成膜したままの状態で結晶性が不充分であり、未だ磁気
光学効果が小さな結晶質磁性膜の記録トラックとして用
いる部分のみを熱処理することにより、その部分のみの
結晶性を向上させて結晶質磁性膜本来の大きな磁気光学
効果を得る一方、隣接する記録トラックを分離する部分
は成膜したままの未だ磁気光学効果が小さな状態に置
く。これによって、記録トラック部分に比較的大きな磁
気光学効果を有する結晶質磁性材料の垂直磁化膜が形成
される。さらに、記録レーザパワーが消去レーザパワー
に対して高い場合に、記録ドメインが記録トラックの幅
方向に拡大しても、前記熱処理によって磁性膜本来の大
きな磁気光学効果が得られるのは一定幅の記録トラック
部分だけなのでその幅からはみ出した記録ドメインの消
去残り部分からの信号は非常に小さく、ノイズ発生の原
因としてほとんど無視できるようになる。The magneto-optical recording medium of the present invention has the above structure.
The above problems are solved as follows. In other words, the crystallinity of only that portion of the crystalline magnetic film, which has insufficient crystallinity and has a small magneto-optical effect, is heat-treated because the crystallinity is insufficient in the as-deposited state on the substrate. While improving the crystalline magnetic film to obtain the original large magneto-optical effect, the portion separating the adjacent recording tracks is left in a state where the magneto-optical effect is still small as it is formed. As a result, a perpendicular magnetization film of a crystalline magnetic material having a relatively large magneto-optical effect is formed in the recording track portion. Further, when the recording laser power is higher than the erasing laser power, even if the recording domain expands in the width direction of the recording track, the large magneto-optical effect inherent to the magnetic film can be obtained by the heat treatment in the recording of the constant width. Since it is only the track portion, the signal from the erasure remaining portion of the recording domain protruding from the width is very small and can be almost ignored as a cause of noise generation.

【０００９】次に、本発明の光磁気記録媒体の作製方法
は上記構成によって、以下のように上記課題を解決す
る。すなわち、基板上に記録膜として結晶質磁性膜を成
膜するが、このままの状態では結晶性が不充分であり、
未だ磁気光学効果及び垂直磁気異方性が小さい。成膜後
に結晶質磁性膜の記録トラックとして用いる部分のみに
レーザ光を照射して熱処理を行うことにより、その部分
のみの結晶性を向上させて結晶質磁性膜本来の大きな磁
気光学効果と垂直磁気異方性を得る。ここで、レーザ光
照射は記録レーザパワーの数倍の強度で行われるが、基
板と記録膜との間に誘電体保護膜を有する光磁気記録媒
体の微小領域を極短時間で照射する方法であるため、記
録膜の温度が数百度上昇してもプラスチック基板に有害
な損傷を与えることなく記録膜の熱処理ができる。Next, the method of manufacturing a magneto-optical recording medium according to the present invention has the above-mentioned structure to solve the above-mentioned problems as follows. That is, a crystalline magnetic film is formed as a recording film on the substrate, but the crystallinity is insufficient in this state,
The magneto-optical effect and perpendicular magnetic anisotropy are still small. After film formation, heat treatment is performed by irradiating only the portion of the crystalline magnetic film used as the recording track with the laser beam to improve the crystallinity of only that portion, and to obtain the large magneto-optical effect and the perpendicular magnetic effect inherent to the crystalline magnetic film. Get anisotropy. Here, the laser light irradiation is performed with an intensity several times higher than the recording laser power, but by a method of irradiating a minute area of a magneto-optical recording medium having a dielectric protective film between the substrate and the recording film in an extremely short time. Therefore, even if the temperature of the recording film rises by several hundreds, the heat treatment of the recording film can be performed without damaging the plastic substrate.

【００１０】[0010]

【実施例】以下本発明の一実施例の光磁気記録媒体及び
その作製方法について、図面を参照しながら説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS A magneto-optical recording medium according to an embodiment of the present invention and a method for manufacturing the same will be described below with reference to the drawings.

【００１１】図１は本発明の一実施例における光磁気記
録媒体の構成を示すものである。図１において、１１は
ガラス，プラスチック等の基板、１２及び１４はＳｉＯ
Ｎ膜からなる保護膜、１３はＭｎＢｉＡｌ膜からなる記
録膜、１５はエポキシアクリレート系樹脂からなる保護
層、１６は記録膜の記録トラックとして用いられる熱処
理部分、１７は記録膜の記録トラック間を分離する非熱
処理部分である。ここで基板１１上の各膜はスパッタ法
あるいは真空蒸着法により基板温度３０〜１３０℃で形
成し、保護層１５は成膜完了後にスピンコート法により
形成した。各膜厚は保護膜１２を６０〜１２０ｎｍ、記
録膜１３を３０〜１００ｎｍ、保護膜１４を８０〜１０
０ｎｍ、保護層１５は３〜６μｍと設定した。FIG. 1 shows the structure of a magneto-optical recording medium according to an embodiment of the present invention. In FIG. 1, 11 is a substrate made of glass or plastic, and 12 and 14 are SiO 2.
A protective film made of an N film, 13 a recording film made of a MnBiAl film, 15 a protective layer made of an epoxy acrylate resin, 16 a heat treatment portion used as a recording track of the recording film, and 17 separating recording tracks of the recording film. This is the non-heat treated part. Here, each film on the substrate 11 was formed at a substrate temperature of 30 to 130 ° C. by a sputtering method or a vacuum deposition method, and the protective layer 15 was formed by a spin coating method after the film formation was completed. The protective film 12 has a thickness of 60 to 120 nm, the recording film 13 has a thickness of 30 to 100 nm, and the protective film 14 has a thickness of 80 to 10 nm.
0 nm, and the protective layer 15 was set to 3 to 6 μm.

【００１２】図２に上記構成の光磁気記録媒体の作製装
置の概略を示す。２１は基板上に上記の各膜を形成済み
の光磁気記録媒体（便宜上、記録膜以外の各膜の表示は
省略している。）、２２は基板、２３は記録膜の記録ト
ラックとして用いられる部分、２３ａは記録トラックの
熱処理済みの部分、２４は記録膜の記録トラック間を分
離する部分、２５は熱処理用レーザ光、２６は光学ヘッ
ド、２７はスピンドルモータである。FIG. 2 shows an outline of an apparatus for producing a magneto-optical recording medium having the above structure. Reference numeral 21 is used as a magneto-optical recording medium in which each of the above-mentioned films is formed on the substrate (for convenience, illustration of each film other than the recording film is omitted), 22 is used as a substrate, and 23 is used as a recording track of the recording film. Reference numeral 23a denotes a heat-treated portion of the recording track, 24 denotes a portion for separating the recording tracks of the recording film, 25 denotes a heat treatment laser beam, 26 denotes an optical head, and 27 denotes a spindle motor.

【００１３】光磁気記録媒体２１を２ｍ／ｓｅｃ以上の
速度で定速回転させ、通常の記録レーザパワーの２．５
倍以上の強度の熱処理用レーザ光２５を記録トラック部
２３にのみ照射するように光学ヘッド２６を制御しなが
ら熱処理を行ない、熱処理済み記録トラック部２３ａを
形成する。この時、プラスチック基板を用いても有害な
損傷を与えることなく記録膜の熱処理ができる。The magneto-optical recording medium 21 is rotated at a constant speed of 2 m / sec or more to obtain a normal recording laser power of 2.5.
The heat treatment is performed while controlling the optical head 26 so that the heat treatment laser beam 25 having a double intensity or more is applied only to the recording track portion 23 to form the heat treated recording track portion 23a. At this time, even if a plastic substrate is used, the recording film can be heat-treated without causing harmful damage.

【００１４】ここで、記録膜の熱処理済みの記録トラッ
ク部２３ａ及び記録トラック間の分離部２４における膜
面垂直方向のカーヒステリシスループを図３に示す。熱
処理されている記録トラック部２３ａではカー回転角が
１.２度前後と非常に大きいのに対して、熱処理されて
いない記録トラック間分離部２４では０.２度以下であ
る。また、カーヒステリシスループの角形比及び保磁力
については、熱処理済み記録トラック部２３ａでは角形
比がほぼ１で保磁力が約１キロエルステッドの良好な垂
直磁気特性が得られているのに対して、熱処理されてい
ない記録トラック間分離部２４では角形比及び保磁力が
小さく、垂直磁気異方性に乏しい。これは基板上に成膜
したままの状態では記録膜である結晶質磁性膜の結晶性
が不充分であるために、未だ磁性膜本来の磁気光学効果
及び垂直磁気異方性が発揮されないが、成膜後に結晶質
磁性膜の記録トラックとして用いる部分のみにレーザ光
を照射して熱処理を行うことにより、その部分のみは結
晶性が向上して結晶質磁性膜本来の大きな磁気光学効果
と垂直磁気異方性を有するようになるからである。FIG. 3 shows a Kerr hysteresis loop in the direction perpendicular to the film surface in the heat-treated recording track portion 23a of the recording film and the separation portion 24 between the recording tracks. The Kerr rotation angle is as large as around 1.2 degrees in the heat-treated recording track portion 23a, but is 0.2 degrees or less in the non-heat-treated recording track separation portion 24. Regarding the squareness ratio and the coercive force of the Kerr hysteresis loop, in the heat-treated recording track portion 23a, the squareness ratio is about 1 and the good coercive force is about 1 kilo-Oersted, while good perpendicular magnetic characteristics are obtained. In the recording track separation portion 24 which has not been heat-treated, the squareness ratio and the coercive force are small and the perpendicular magnetic anisotropy is poor. This is because the crystalline magnetic film as a recording film has insufficient crystallinity as it is formed on the substrate, so that the original magneto-optical effect and perpendicular magnetic anisotropy of the magnetic film are not yet exhibited. By irradiating only the portion of the crystalline magnetic film to be used as a recording track as a recording track with heat after the film formation, the crystallinity is improved only in that portion, and the large magneto-optical effect and the perpendicular magnetic field inherent to the crystalline magnetic film are obtained. This is because it becomes anisotropic.

【００１５】図４は、線速度６ｍ／ｓｅｃの条件で通常
の１.３倍の記録レーザパワーで記録した記録ドメイン
を消去した場合の消去率の消去レーザパワー依存性を、
図１の本発明の光磁気記録媒体の場合と従来の光磁気記
録媒体（ガラス基板上に記録膜としてＭｎＢｉＡｌ膜形
成し、熱処理装置内で全体を熱処理して作製したもの）
の場合について比較して示したものである。本発明の光
磁気記録媒体は、従来のものに比較して通常の消去レー
ザパワーにおいて１５ｄＢ以上消去率が向上しているこ
とが分かる。これは本発明の光磁気記録媒体おいては、
記録ドメインが記録トラックの幅方向に拡大しても、前
記熱処理によって結晶質磁性膜本来の大きな磁気光学効
果が得られるのは一定幅の記録トラック部分だけなので
その幅からはみ出した記録ドメインの消去残り部分から
の信号は非常に小さく、ノイズ発生の原因としてほとん
ど無視できるようになるからである。FIG. 4 shows the dependence of the erasing rate on the erasing laser power when erasing a recording domain recorded with a recording laser power of 1.3 times the normal under the condition of a linear velocity of 6 m / sec.
In the case of the magneto-optical recording medium of the present invention in FIG. 1 and a conventional magneto-optical recording medium (produced by forming a MnBiAl film as a recording film on a glass substrate and heat treating the whole in a heat treatment apparatus)
It is shown by comparing the case. It can be seen that the magneto-optical recording medium of the present invention has an erasing rate improved by 15 dB or more at the ordinary erasing laser power as compared with the conventional one. In the magneto-optical recording medium of the present invention,
Even if the recording domain expands in the width direction of the recording track, the large magneto-optical effect inherent to the crystalline magnetic film can be obtained by the heat treatment only in the recording track portion of a certain width, and the erasure residue of the recording domain protruding from the width This is because the signal from the part is very small and can be almost ignored as a cause of noise generation.

【００１６】図７に消去率５０ｄＢ以上が得られる熱処
理レーザパワー及び基板損傷が起こる熱処理レーザパワ
ーの媒体線速度依存性を示す。図７より２ｍ／ｓｅｃ以
上の線速度で通常の記録パワーの２．５倍以上のレーザ
パワーで熱処理することが望ましい。FIG. 7 shows the media linear velocity dependence of the heat treatment laser power that can obtain an erasing rate of 50 dB or more and the heat treatment laser power that causes substrate damage. From FIG. 7, it is desirable to perform heat treatment at a linear velocity of 2 m / sec or more and a laser power of 2.5 times or more the normal recording power.

【００１７】なお、本実施例の光磁気記録媒体では保護
膜１２及び１４としてＳｉＯＮ膜を、記録膜１３として
ＭｎＢｉＡｌ膜を、保護層１５としてエポキシアクリレ
ート系樹脂層を用いたが、保護膜１２及び１４としてＳ
ｉＯＮ膜の代わりにＺｎＳ膜等のカルコゲン化物の膜，
ＴａＯ₂膜等の酸化物の膜，ＳｉＮ膜等の窒化物の膜あ
るいはそれらの混合物の膜を、記録膜１３としてＭｎＢ
ｉＡｌ膜の代わりにＭｎＢｉ膜，ＭｎＳｂＢｉ膜，Ｍｎ
Ａｌ膜，ＭｎＡｌＧｅ膜，ＭｎＧａＧｅ膜，ＰｔＭｎＳ
ｂ膜あるいはこれらにＡｌ，Ｃｕ，Ｇｅ，Ｐｔ，Ｓｉ，
Ｓｎ，Ｔｉ，希土類金属元素の中から選択して少なくと
も一種類を添加した膜のうちいずれか等の結晶質磁性膜
を用いてもよく、保護層１５としてエポキシアクリレー
ト系樹脂層の代わりにアクリル系等の他の樹脂層を用い
るかあるいは基板上に保護膜１４まで形成したものを張
り合わせた構成とする場合は張り合わせ用接着剤で兼用
してもよい。但し、結晶の対称性が高いＰｔＭｎＳｂ膜
等の立方晶系の結晶質磁性膜を記録膜として用いた場合
は、その成膜時に高いＡｒガス圧力でスパッタするか、
ＡｒガスにＯ₂ガスあるいはＮ₂ガスを混入してスパッタ
するか、Ｏ₂ガスあるいはＮ₂ガスを導入しながら真空蒸
着することが垂直磁化膜を得る上で望ましい。In the magneto-optical recording medium of this embodiment, the SiON films are used as the protective films 12 and 14, the MnBiAl film is used as the recording film 13, and the epoxy acrylate resin layer is used as the protective layer 15. 14 as S
A chalcogenide film such as a ZnS film in place of the iON film,
An oxide film such as a TaO ₂ film, a nitride film such as a SiN film, or a mixture thereof is used as the recording film 13 with MnB.
MnBi film, MnSbBi film, Mn instead of iAl film
Al film, MnAlGe film, MnGaGe film, PtMnS
b film or Al, Cu, Ge, Pt, Si,
A crystalline magnetic film such as any one of Sn, Ti, and a film in which at least one kind is selected from the group consisting of rare earth metal elements may be used, and as the protective layer 15, an acrylic resin is used instead of the epoxy acrylate resin layer. When another resin layer such as the above is used, or when a structure in which the protective film 14 is formed on the substrate is laminated, the adhesive for laminating may also be used. However, when a cubic crystalline magnetic film such as a PtMnSb film having a high crystal symmetry is used as the recording film, sputtering is performed at a high Ar gas pressure during the film formation,
In order to obtain a perpendicular magnetization film, it is desirable to mix O ₂ gas or N ₂ gas with Ar gas and perform sputtering, or to perform vacuum deposition while introducing O ₂ gas or N ₂ gas.

【００１８】なお、図１の本実施例に用いた基板はトラ
ッキングガイドとして連続溝を設けた構成のものである
が、トラッキングガイドとして離散的なピットを設けた
構成の基板を用いても同様の効果を発揮する。Note that the substrate used in this embodiment of FIG. 1 has a structure in which continuous grooves are provided as a tracking guide, but the same applies when a substrate having discrete pits is used as a tracking guide. Exert an effect.

【００１９】また、図５、図６に示すように、図１の光
磁気記録媒体に金属反射膜３１を加えた構成の光磁気記
録媒体であってもよい。Further, as shown in FIGS. 5 and 6, a magneto-optical recording medium having a structure in which a metal reflection film 31 is added to the magneto-optical recording medium of FIG. 1 may be used.

【００２０】あるいは記録膜が多層からなる構成の光磁
気記録媒体に本発明の構成を適用しても同様の効果が得
られる。Alternatively, the same effect can be obtained by applying the structure of the present invention to a magneto-optical recording medium having a multilayer recording film.

【００２１】[0021]

【発明の効果】以上のように本発明の光磁気記録媒体
は、基板上に記録膜としてその記録トラックとして用い
る部分のみが熱処理されている結晶質磁性膜を設けた構
成を備えることによって、再生ＳＮ比に優れるのみなら
ず記録消去パワーの変動に伴う記録ドメインの消去残り
に起因するノイズ発生が大幅に低減できる。As described above, the magneto-optical recording medium of the present invention is provided with the structure in which the crystalline magnetic film in which only the portion used as the recording track is heat treated is provided on the substrate as a recording film. Not only is the SN ratio excellent, but the noise generated due to the unerased portion of the recording domain due to the fluctuation of the recording / erasing power can be greatly reduced.

【００２２】また、本発明の光磁気記録媒体の作製方法
は、基板上に記録膜として結晶質磁性膜を設けた構成の
光磁気記録媒体にレーザ光を照射し、結晶質磁性膜の記
録トラックとして用いる部分のみを熱処理する構成を備
えることによって、プラスチック基板にも有害な損傷を
与えることなく記録膜の熱処理を行い、本発明の光磁気
記録媒体の作製を可能とするものである。Further, in the method of manufacturing a magneto-optical recording medium according to the present invention, a magneto-optical recording medium having a structure in which a crystalline magnetic film is provided as a recording film on a substrate is irradiated with laser light to record tracks on the crystalline magnetic film. By providing a structure for heat-treating only the portion used as, the heat treatment of the recording film can be performed without damaging the plastic substrate, and the magneto-optical recording medium of the present invention can be manufactured.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例における光磁気記録媒体の構
成図FIG. 1 is a configuration diagram of a magneto-optical recording medium according to an embodiment of the present invention.

【図２】同実施例における光磁気記録媒体の作製装置の
概略図FIG. 2 is a schematic view of an apparatus for manufacturing a magneto-optical recording medium in the same example.

【図３】同実施例の光磁気記録媒体における記録トラッ
ク部及び記録トラック間の分離部での膜面垂直方向のカ
ーヒステリシスループFIG. 3 is a Kerr hysteresis loop in a direction perpendicular to a film surface at a recording track portion and a separation portion between recording tracks in the magneto-optical recording medium of the same example.

【図４】同実施例の光磁気記録媒体において記録ドメイ
ンを消去した場合の消去率の消去レーザパワー依存性を
示す特性図FIG. 4 is a characteristic diagram showing an erase laser power dependency of an erase rate when a recording domain is erased in the magneto-optical recording medium of the same example.

【図５】本発明の光磁気記録媒体の他の構成例を示す図FIG. 5 is a diagram showing another configuration example of the magneto-optical recording medium of the present invention.

【図６】本発明の光磁気記録媒体の他の構成例を示す図FIG. 6 is a diagram showing another configuration example of the magneto-optical recording medium of the present invention.

【図７】本発明の光磁気記録媒体において熱処理レーザ
パワーの媒体線速度依存性をしめす特性図FIG. 7 is a characteristic diagram showing medium linear velocity dependence of heat treatment laser power in the magneto-optical recording medium of the present invention.

【符号の説明】[Explanation of symbols]

１１ 基板 １２ 保護膜（ＳｉＯＮ膜） １３ 記録膜（ＭｎＢｉＡｌ膜） １４ 保護膜（ＳｉＯＮ膜） １５ 保護層（エポキシアクリレート樹脂層） １６ 記録膜の記録トラックとして用いられる部分 １７ 記録膜の記録トラック間を分離する部分 ２１ 光磁気記録媒体 ２２ 基板 ２３ 記録膜の記録トラックとして用いられる部分 ２３ａ 記録トラックの熱処理済みの部分 ２４ 記録膜の記録トラック間を分離する部分 ２５ 熱処理用レーザ光 ２６ 光学ヘッド ２７ スピンドルモータ ３１ 反射膜 11 substrate 12 protective film (SiON film) 13 recording film (MnBiAl film) 14 protective film (SiON film) 15 protective layer (epoxy acrylate resin layer) 16 portion used as recording track of recording film 17 between recording tracks of recording film Separation part 21 Magneto-optical recording medium 22 Substrate 23 Part used as recording track of recording film 23a Part of heat-treated recording track 24 Part separating recording track of recording film 25 Heat treatment laser light 26 Optical head 27 Spindle motor 31 Reflective film

Claims (4)

【特許請求の範囲】[Claims] 【請求項１】 基板上に記録膜として結晶質磁性膜を設
けた構成であって、前記結晶質磁性膜の記録トラックと
して用いる部分のみが熱処理されていることを特徴とす
る光磁気記録媒体。1. A magneto-optical recording medium having a structure in which a crystalline magnetic film is provided as a recording film on a substrate, and only a portion of the crystalline magnetic film used as a recording track is heat-treated. 【請求項２】 結晶質磁性膜がＭｎＢｉ膜，ＭｎＳｂＢ
ｉ膜，ＭｎＡｌ膜，ＭｎＡｌＧｅ膜，ＭｎＧａＧｅ膜，
ＰｔＭｎＳｂ膜あるいはこれらにＡｌ，Ｃｕ，Ｇｅ，Ｐ
ｔ，Ｓｉ，Ｓｎ，Ｔｉ，希土類金属元素の中から選択し
て少なくとも一種類を添加した膜のうちいずれかである
ことを特徴とする請求項１記載の光磁気記録媒体。2. The crystalline magnetic film is a MnBi film, MnSbB
i film, MnAl film, MnAlGe film, MnGaGe film,
PtMnSb film or Al, Cu, Ge, P
2. The magneto-optical recording medium according to claim 1, wherein the magneto-optical recording medium is any one of films selected from t, Si, Sn, Ti and rare earth metal elements and added with at least one kind. 【請求項３】 基板上に記録膜として結晶質磁性膜を設
けた構成の光磁気記録媒体にレーザ光を照射し、結晶質
磁性膜の記録トラックとして用いる部分のみを熱処理す
ることを特徴とする光磁気記録媒体の作製方法。3. A magneto-optical recording medium having a crystalline magnetic film as a recording film provided on a substrate is irradiated with laser light to heat-treat only a portion of the crystalline magnetic film used as a recording track. Manufacturing method of magneto-optical recording medium. 【請求項４】 結晶質磁性膜がＭｎＢｉ膜，ＭｎＳｂＢ
ｉ膜，ＭｎＡｌ膜，ＭｎＡｌＧｅ膜，ＭｎＧａＧｅ膜，
ＰｔＭｎＳｂ膜あるいはこれらにＡｌ，Ｃｕ，Ｇｅ，Ｐ
ｔ，Ｓｉ，Ｓｎ，Ｔｉ，希土類金属元素の中から選択し
て少なくとも一種類を添加した膜のうちいずれかである
ことを特徴とする請求項３記載の光磁気記録媒体の作製
方法。4. The crystalline magnetic film is a MnBi film, MnSbB
i film, MnAl film, MnAlGe film, MnGaGe film,
PtMnSb film or Al, Cu, Ge, P
4. The method for producing a magneto-optical recording medium according to claim 3, wherein the film is any one of t, Si, Sn, Ti, and a film in which at least one kind is selected from the rare earth metal elements.