JPH05309431A - Joint device, its manufacture and tool for its manufacture and metallic gasket used for its device - Google Patents
Joint device, its manufacture and tool for its manufacture and metallic gasket used for its deviceInfo
- Publication number
- JPH05309431A JPH05309431A JP4143192A JP14319292A JPH05309431A JP H05309431 A JPH05309431 A JP H05309431A JP 4143192 A JP4143192 A JP 4143192A JP 14319292 A JP14319292 A JP 14319292A JP H05309431 A JPH05309431 A JP H05309431A
- Authority
- JP
- Japan
- Prior art keywords
- metal gasket
- joint
- joint device
- seal portion
- connecting members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Joints With Pressure Members (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、真空装置や真空排気管
等を連結する継手装置に係り、特に使用環境温度が変化
する超高真空の部位間を連結する継手装置に用いて好適
であり、詳しくは真空漏れを防ぐ接合断面の構造、その
製造方法、及びその製造に用いる工具、並びにその装置
に用いられる金属ガスケットに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joint device for connecting a vacuum device, a vacuum exhaust pipe, etc., and is particularly suitable for use in a joint device for connecting parts of ultra-high vacuum where the ambient temperature changes. More specifically, the present invention relates to a structure of a bonding cross section for preventing vacuum leakage, a manufacturing method thereof, a tool used for manufacturing the same, and a metal gasket used for the apparatus.
【０００２】[0002]
【関連する技術】関連する技術として、本出願人による
継手装置（特願平３−１８３２３８号；未公開）を図９
に示し説明する。図９(a) は２つの連結部材２、３を接
合した継手装置１の断面図、図９(b) は図９(a) におけ
るＢ部分の詳細図、図９(c) は金属ガスケット１０の断
面図である。[Related Technology] As a related technology, a joint device (Japanese Patent Application No. 3-183238; unpublished) by the present applicant is shown in FIG.
Will be described. 9 (a) is a sectional view of the joint device 1 in which two connecting members 2 and 3 are joined, FIG. 9 (b) is a detailed view of a portion B in FIG. 9 (a), and FIG. 9 (c) is a metal gasket 10. FIG.
【０００３】継手装置１は、中心部に連通孔２ａを有す
ると共に外周にフランジ部６を有する第１の連結部材２
と、中心部に連通孔３ａを有すると共に外周に雄ネジ部
５を有する第２の連結部材３と、金属ガスケット１０と
を備えている。第２の連結部材３は、その一側端面に円
筒状の凹部１６が形成されており、該凹部１６の底面が
接合面３ｂとなる。また、第１の連結部材２の一側端部
は、前記凹部１６に丁度嵌挿する径からなる円筒部１５
が形成されており、該円筒部１５の頂面が接合面２ｂと
なる。The joint device 1 has a first connecting member 2 having a communication hole 2a in the center and a flange 6 on the outer periphery.
And a second gasket 3 having a communication hole 3a in the center and a male screw portion 5 on the outer periphery, and a metal gasket 10. The second connecting member 3 has a cylindrical recess 16 formed on one end surface thereof, and the bottom surface of the recess 16 serves as the joint surface 3b. In addition, the one end of the first connecting member 2 has a cylindrical portion 15 having a diameter that fits exactly into the recess 16.
Is formed, and the top surface of the cylindrical portion 15 becomes the joint surface 2b.
【０００４】そして、第１及び第２の連結部材２，３の
接合面２ｂ，３ｂには、連通孔２ａ，３ａを囲むように
それぞれ環状の突条１７，１９が形成されており、これ
ら突条１７，１９は、図９(b) に詳示するように、断面
が半円形状からなる。更に、該突条１７，１９にはバニ
シ加工が施され、これにより本体部分よりも加工硬化し
ている。On the joint surfaces 2b and 3b of the first and second connecting members 2 and 3, annular projections 17 and 19 are formed so as to surround the communication holes 2a and 3a, respectively. As shown in detail in FIG. 9 (b), the sections 17, 19 have a semicircular cross section. Further, the ridges 17 and 19 are subjected to burnishing so that they are work hardened more than the main body.
【０００５】一方、第１の連結部材２及び第２の連結部
材３を連結・固定するための連結ナット部材１２は、第
１の連結部材のフランジ部６に当接し得る鍔部１２ｂ及
び第２の連結部材の雄ネジ部５に螺合し得る雌ネジ部１
２ａを有している。また、金属ガスケット１０は、図９
(c) に詳示するように、平板状の環状部材からなってい
る。On the other hand, a connecting nut member 12 for connecting and fixing the first connecting member 2 and the second connecting member 3 has a flange portion 12b and a second connecting portion 12b which can contact the flange portion 6 of the first connecting member. Female screw portion 1 that can be screwed into the male screw portion 5 of the connecting member of
2a. Further, the metal gasket 10 is shown in FIG.
As shown in detail in (c), it is composed of a flat plate-shaped annular member.
【０００６】そして、第２の連結部材３の凹部１６に、
金属ガスケット１０を挿入し、更に該凹部１６に、第１
の連結部材２の円筒部１５を嵌入する。この状態で、図
９(a) の上方から挿入した連結ナット部材１２を締付け
て、両連結部材の接合面２ｂ，３ｂをその間に金属ガス
ケット１０を挟んで圧接する。すると、接合面２ｂ，３
ｂに形成された突条が、金属ガスケット１０を変形しつ
つ該金属ガスケットに喰込んで、両接合面２ｂ，３ｂが
前記金属ガスケットに密接する。Then, in the recess 16 of the second connecting member 3,
Insert the metal gasket 10 into the concave portion 16
The cylindrical portion 15 of the connecting member 2 is inserted. In this state, the connecting nut member 12 inserted from above in FIG. 9 (a) is tightened, and the joint surfaces 2b and 3b of both connecting members are pressed against each other with the metal gasket 10 interposed therebetween. Then, the joint surfaces 2b, 3
The ridge formed on b digs into the metal gasket 10 while deforming the metal gasket 10, and the joint surfaces 2b and 3b come into close contact with the metal gasket.
【０００７】前記バニシ加工は上記圧接による突条１
７、１９の変形を抑え、何度でも使用することを可能に
すると共に、前記金属ガスケット１０に突条１７，１９
をより深く喰込ませて、強固な密接状態を達成すること
を目的としている。The burnishing is performed by the above-mentioned press contacting ridge 1.
The deformation of 7 and 19 can be suppressed, and the metal gasket 10 can be used any number of times.
The purpose of this is to deepen the depth of penetration and achieve a strong close contact.
【０００８】[0008]
【発明が解決しようとする課題】一般に超高真空装置
（到達真空度；１０-10 〜１０-12 ［Torr］）は、液体
窒素（−１９６℃）等の極低温領域で用いられることが
多く、この様な場合、単に室温から冷却したのでは、真
空装置内壁に吸着している水分等が凝固し、長時間に渡
ってガスの発生源となる。このため、真空曳きしながら
真空装置を空焼し、吸着物を気化させて除去した後に冷
却することが行われている。Generally, an ultra-high vacuum device (ultimate vacuum degree; 10 −10 to 10 −12 [Torr]) is often used in an extremely low temperature region such as liquid nitrogen (−196 ° C.). In such a case, simply cooling from room temperature solidifies the moisture or the like adsorbed on the inner wall of the vacuum device, and becomes a gas generation source for a long time. For this reason, the vacuum apparatus is air-baked while pulling the vacuum to vaporize and remove the adsorbed substance, and then cooled.
【０００９】ところが図９に示すような継手装置１で
は、室温で用いる限り不都合はないが低温領域で用いる
場合、連結部材２、３と金属ガスケット１０との熱膨張
係数が必ずしも一致しないので、室温で密接状態が達成
されても、前記空焼により連結部材２，３と金属ガスケ
ット１０の熱膨張の差分だけ、該金属ガスケット１０上
の突条跡が大きくなる（一般に金属ガスケットは連結部
材より柔らかい物が用いられる）。このような状態で極
低温に冷却すると、前記連結部材２，３と金属ガスケッ
ト１０の間に隙間が生じ、このため高真空状態が達成で
きなくなる。However, in the joint device 1 as shown in FIG. 9, there is no inconvenience as long as it is used at room temperature, but when it is used in a low temperature region, the thermal expansion coefficients of the connecting members 2 and 3 and the metal gasket 10 do not necessarily coincide with each other. Even if the close contact state is achieved by the above-mentioned air-conditioning, the ridge marks on the metal gasket 10 become large due to the difference in thermal expansion between the connecting members 2 and 3 and the metal gasket 10 (generally, the metal gasket is softer than the connecting member. Things are used). When cooled to an extremely low temperature in such a state, a gap is created between the connecting members 2 and 3 and the metal gasket 10, and thus a high vacuum state cannot be achieved.
【００１０】図１０は上記事情を模式的に現したもの
で、図１０(a) は室温で連結部材２，３を連結したとき
の接合部分の断面構造を示し、図１０（b)は低温に冷却
した場合の状態を示している。なお、図１０（b)は連結
部材２，３の熱膨張係数をＫF、金属ガスケット１０の
熱膨張係数をＫG としたとき、ＫF ＞ＫG が成り立つ場
合を示しているが、ＫF ＜ＫG の場合も以下同様のこと
が言えるので省略する。FIG. 10 schematically shows the above situation. FIG. 10 (a) shows a sectional structure of a joint portion when the connecting members 2 and 3 are connected at room temperature, and FIG. 10 (b) shows a low temperature. It shows the state when cooled to. Note that FIG. 10B shows a case where K F > K G holds, where K F is the thermal expansion coefficient of the connecting members 2 and 3 and K G is the thermal expansion coefficient of the metal gasket 10. The same applies to the case where F <K G , and therefore the description thereof is omitted.
【００１１】図１０(b) にあっては、冷却により連結部
材２，３が金属ガスケット１０に比べ大きく熱収縮し、
最小間隙Ｄ1 、最大間隙Ｄ2 の間隙を生る。このような
間隙の非一様性が生ずる原因は、熱収縮がＲd 方向（半
径方向）にも収縮するためである。In FIG. 10 (b), the connecting members 2 and 3 are largely shrunk by cooling as compared with the metal gasket 10,
A minimum gap D 1 and a maximum gap D 2 are produced. The cause of such non-uniformity of the gap is that the thermal contraction also contracts in the R d direction (radial direction).
【００１２】そこで室温時における密接状態をより強固
（強い力で締め付ける）にすることで、金属ガスケット
１０の変形（変形には、弾性変形している部分と塑性変
形している部分が存在する）量を増やし、弾性変形の絶
対量を増やすことで低温化した時の熱収縮量を補償する
ことが行われている。このことを示す模式図が図１１に
示されている。図１１(a) は室温時における接合部分の
断面構造を示し、図１１(b) は冷却した場合の断面構造
で、０＝Ｄ5 ＜Ｄ6 が成り立っている。Therefore, by making the close contact state at room temperature stronger (tightening with a strong force), the deformation of the metal gasket 10 (the deformation includes an elastically deformed portion and a plastically deformed portion). By increasing the amount and the absolute amount of elastic deformation, the amount of heat shrinkage when the temperature is lowered is compensated. A schematic diagram showing this is shown in FIG. FIG. 11 (a) shows the cross-sectional structure of the joint portion at room temperature, and FIG. 11 (b) shows the cross-sectional structure when cooled, where 0 = D 5 <D 6 .
【００１３】従って、室温での密接状態を強固にするな
らば、冷却しても金属ガスケット１０と連結部材２，３
の接触面の間隙を部分的になくすることが可能である。
しかし低温での接触は点接触となり、室温における密接
状態の不均一性や、連結部材２、３の接合面全体に渡っ
て温度分布等が存在すると、冷却後の圧接力にアンバラ
ンスが生じ、その部分で間隙が生じて気密性を保つこと
ができなくなる。Therefore, if the close contact at room temperature is strengthened, the metal gasket 10 and the connecting members 2 and 3 can be cooled even if cooled.
It is possible to partially eliminate the gap between the contact surfaces of the.
However, the contact at a low temperature becomes a point contact, and if there is non-uniformity in the close contact state at room temperature or if there is a temperature distribution over the entire joint surface of the connecting members 2 and 3, an imbalance occurs in the pressure contact force after cooling, A gap is generated at that portion, making it impossible to maintain airtightness.
【００１４】このような事情は連結部材２，３の一部が
真空装置などと熱接触を持つ場合（例えば溶接等により
真空装置と一体化している場合等）や、連結部材２，３
及び金属ガスケット１０の加工寸法精度のバラツキが存
在したり、あるは溶接等の外熱により部分的に連結部材
が焼鈍されて材質の不均一性が生じている場合等に著し
く現れる。さらに、室温で強力な力により締めつけて密
接状態を良くすると、雄ネジ５、雌ネジ１２ａのネジ山
が壊れたり、連結部材２，３と金属ガスケット１０が融
着する等の問題がある。Such a situation is caused when a part of the connecting members 2 and 3 has thermal contact with the vacuum device or the like (for example, when integrated with the vacuum device by welding or the like), or when the connecting members 2 and 3 are connected.
In addition, the machining dimensional accuracy of the metal gasket 10 may vary, or the connecting member may be partially annealed by external heat such as welding to cause nonuniformity of the material. Furthermore, if the tightness is improved by tightening with a strong force at room temperature, there are problems that the threads of the male screw 5 and the female screw 12a are broken, and the connecting members 2 and 3 and the metal gasket 10 are fused.
【００１５】そこで、本発明は利用環境に依存せず、か
つ強力な力で連結部材２，３と金属ガスケット１０とを
圧接させる必要がなく、さらに密接面が常に面密接とな
る、継手装置、その製造方法、及びその製造に用いる工
具、並びにその装置に用いる金属ガスケットを提供する
ことを目的とする。Therefore, the present invention does not depend on the environment of use, and it is not necessary to press the connecting members 2 and 3 and the metal gasket 10 into contact with each other with a strong force. An object of the present invention is to provide a manufacturing method thereof, a tool used for manufacturing the same, and a metal gasket used for the apparatus.
【００１６】[0016]
【課題を解決するための手段】本発明は、上述事情に鑑
みてなされたものであって、それぞれの接合面（２ｂ，
３ｂ）に連通孔（２ａ，３ａ）が設けられた複数の連結
部材（２，３）と、該連結部材（２，３）の接合面（２
ｂ，３ｂ）に前記連通孔（２ａ，３ａ）を連続して取り
囲む金属ガスケット（１１）と、を有し、前記接合面
（２ｂ，３ｂ）に前記金属ガスケット（１１）を挟んで
連結・固定してなる継手装置（１）において、前記接合
面（２ｂ，３ｂ）に、それぞれが平行でない２つ以上の
直線部（２３ａ1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2 ）を
持ち、これら直線部（２３ａ1 ，２３ａ2 ，２３ｂ1 ，
２３ｂ2 ）の少なくとも一部が鏡面である凹状の断面を
持つシール部（２１，２２）を設け、前記金属ガスケッ
ト（１１）が、前記シール部（２１，２２）の２つ以上
の直線部（２３ａ1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2）
で整合する凸状の断面を有すると共に、一方の前記連結
部材（３）のシール部（２２）に挿入され、他方の連結
部材（２）のシール部（２１）に圧接されて、２つ以上
の密接面により前記連結部材（２，３）を密封する。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and each of the joining surfaces (2b, 2b,
3b) a plurality of connecting members (2, 3) having communication holes (2a, 3a), and a joint surface (2) of the connecting members (2, 3).
b, 3b) and a metal gasket (11) continuously surrounding the communication holes (2a, 3a), and connecting and fixing the metal gasket (11) between the joint surfaces (2b, 3b). In the joint device (1) thus formed, the joint surface (2b, 3b) has two or more straight line portions (23a 1 , 23a 2 , 23b 1 , 23b 2 ) which are not parallel to each other, and these straight line portions ( 23a 1 , 23a 2 , 23b 1 ,
23b 2 ) is provided with a seal portion (21, 22) having a concave cross section in which at least a part of the seal portion (21, 22) is a mirror surface, and the metal gasket (11) has two or more straight line portions ( 23a 1 , 23a 2 , 23b 1 , 23b 2 )
Two or more by having a convex cross section aligned with each other, being inserted into the seal part (22) of the one connecting member (3) and being pressed into contact with the seal part (21) of the other connecting member (2). The connecting member (2, 3) is sealed by the close contact surface of the.
【００１７】また、本継ぎ手装置（１）の製造方法は、
前記連結部材（２，３）の接合面（２ｂ，３ｂ）に切削
加工により前記シール部（２１，２２）を作製し、その
後バニシ加工具（３０）の作用面（３８）を前記シール
部（２１，２２）の直線部（２３ａ1 ，２３ａ2 ，２３
ｂ1 ，２３ｂ2 ）に圧接しつつ、前記バニシ加工具（３
０）又は前記連結部材（２，３）の少なくとも一方を移
動し、前記作用面（３８）が前記直線部（２３ａ1 ，２
３ａ2 ，２３ｂ1 ，２３ｂ2 ）上を滑ることなく移動す
ることにより、該直線部（２３ａ1 ，２３ａ2 ，２３ｂ
1 ，２３ｂ2 ）にバニシ加工を施して、加工硬化させる
と共に、前記鏡面状態にする。The method of manufacturing the joint device (1) is as follows.
The seal portions (21, 22) are produced by cutting the joint surfaces (2b, 3b) of the connecting members (2, 3), and then the working surface (38) of the burnishing tool (30) is changed to the seal portion ( 21 and 22) straight portions (23a 1 , 23a 2 , 23)
b 1 and 23 b 2 ) while being in pressure contact with the burnishing tool (3
0) or at least one of the connecting members (2, 3) is moved so that the working surface (38) causes the linear portions (23a 1 , 2) to move.
3a 2 , 23b 1 , 23b 2 ) by moving on the straight portions (23a 1 , 23a 2 , 23b) without sliding.
1 and 23b 2 ) are subjected to burnishing to work-harden them and bring them into the mirror surface state.
【００１８】また、上記製造方法に用いるか工具は、頂
角が鋭角な円錐形状を有し、該円錐面が前記作用面（３
８）となる尖頭部材（３４）と、該尖塔部材（３４）を
脱着可能に取り付けた回転体（３１）と、該回転体（３
１）を回転のみ自在に支持するベアリング（３２，３
３）と、該ベアリング（３２，３３）を支持するバニシ
加工基台（３６）と、を備える。The tool used in the above manufacturing method has a conical shape with an acute apex angle, and the conical surface has the working surface (3).
8) a pointed member (34), a rotating body (31) to which the steeple member (34) is detachably attached, and the rotating body (3)
1) Bearings (32, 3) that rotatably support only
3) and a burnishing base (36) for supporting the bearings (32, 33).
【００１９】また、本継ぎ手装置に用いる金属ガスケッ
トは、前記凸状の断面を有する前記金属ガスケット（１
１）の凸状頂部（２８ａ）に前記シール部（２１，２
２）に沿って掘り溝（２８）を設けた。The metal gasket used in the present joint device is the metal gasket (1) having the convex cross section.
The seal top (21, 2) is attached to the convex top (28a) of 1).
A trench (28) was provided along 2).
【００２０】さらに、前記掘り溝（２８）に、弾性圧縮
された弾性体（２９）若しくは負の熱膨張係数を持つ部
材を挿入する。Further, an elastically compressed elastic body (29) or a member having a negative coefficient of thermal expansion is inserted into the digging groove (28).
【００２１】[0021]
【作用】以上の構成に基づき、連結部材（２，３）の接
合面（２ｂ，３ｂ）に、それぞれが平行でない２つ以上
の直線部（２３ａ1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2 ）
を持つ凹状の断面を有するシール部（２１，２２）を設
け、該シール部（２１，２２）の２つ以上の直線部（２
３ａ1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2 ）で整合する凸
状の断面を持った金属ガスケット（１１）を、シール部
（２１，２２）に挿入し、圧接することで連結部材
（２，３）と金属ガスケット（１１）との接合が面状で
密接するようにする。Based on the above construction, two or more straight portions (23a 1 , 23a 2 , 23b 1 , 23b 2 ) which are not parallel to each other are formed on the joint surfaces (2b, 3b) of the connecting members (2, 3).
And a seal portion (21, 22) having a concave cross section is provided, and two or more straight portions (2) of the seal portion (21, 22) are provided.
3a 1 , 23a 2 , 23b 1 , 23b 2 ), a metal gasket (11) having a convex cross section that is aligned with the connecting members (2, 3) ) And the metal gasket (11) are joined together in a planar manner.
【００２２】なお、上述したカッコ内の符号は、図面と
対照するためのものであるが、なんら本発明の構造を限
定するものではない。The reference numerals in parentheses described above are for the purpose of contrasting with the drawings, but do not limit the structure of the present invention.
【００２３】[0023]
【実施例】本発明の実施例を、以下図面に沿って説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【００２４】図１(a) は２つの連結部材２，３の接合面
に金属ガスケット１１を挟んで前記連結部材２，３を接
合した継手装置１の断面図を示したもので、該継手装置
１は、中心部に連通孔２ａを有すると共に外周にフラン
ジ部６を有する第１の連結部材２と、中心部に連通孔３
ａを有すると共に外周に雄ネジ部５を有する第２の連結
部材３と、金属ガスケット１１とを備えている。第２の
連結部材３は、その一側端面に円筒状の凹部１６が形成
されており、該凹部１６の底面が接合面３ｂとなる。ま
た、第１の連結部材２の一側端部は、前記凹部１６に丁
度嵌挿する径からなる円筒部１５が形成されており、該
円筒部１５の頂面が接合面２ｂとなる。そして、第１及
び第２の連結部材２，３の接合面２ｂ，３ｂには、連通
孔２ａ，３ａを囲むようにシール部２１，２２が形成さ
れている。FIG. 1 (a) is a cross-sectional view of a joint device 1 in which the connecting members 2 and 3 are joined with a metal gasket 11 sandwiched between the joint surfaces of the two connecting members 2 and 3. Reference numeral 1 denotes a first connecting member 2 having a communication hole 2a in the center and a flange 6 on the outer periphery, and a communication hole 3 in the center.
A second connecting member 3 having a and an external thread portion 5 on the outer periphery and a metal gasket 11 are provided. The second connecting member 3 has a cylindrical recess 16 formed on one end surface thereof, and the bottom surface of the recess 16 serves as the joint surface 3b. In addition, a cylindrical portion 15 having a diameter just fitted into the recess 16 is formed at one end of the first connecting member 2, and the top surface of the cylindrical portion 15 serves as the joint surface 2b. Sealing portions 21 and 22 are formed on the joint surfaces 2b and 3b of the first and second connecting members 2 and 3 so as to surround the communication holes 2a and 3a.
【００２５】一方、第１の連結部材２及び第２の連結部
材３を連結・固定するための連結ナット部材１２は、第
１の連結部材のフランジ部６に当接し得る鍔部１２ｂ及
び第２の連結部材の雄ネジ部５に螺合し得る雌ネジ部１
２ａを有している。On the other hand, the connecting nut member 12 for connecting / fixing the first connecting member 2 and the second connecting member 3 has a flange portion 12b and a second connecting portion 12b which can come into contact with the flange portion 6 of the first connecting member. Female screw portion 1 that can be screwed into the male screw portion 5 of the connecting member of
2a.
【００２６】そして、第２の連結部材３の凹部１６に、
金属ガスケット１１を挿入し、更に該凹部１６に、第１
の連結部材２の円筒部１５を嵌入する。この状態で、図
１(a) の上方から挿入した連結ナット部材１２を締付け
て、両連結部材の接合面２ｂ，３ｂをその間に金属ガス
ケット１１を挟んで圧接する。すると、接合面２ｂ，３
ｂに形成されたシール部２１、２２の形状にそって、金
属ガスケット１１が変形し連結部材２、３と密接する。Then, in the recess 16 of the second connecting member 3,
Insert the metal gasket 11 into the recess 16
The cylindrical portion 15 of the connecting member 2 is inserted. In this state, the connecting nut member 12 inserted from above in FIG. 1 (a) is tightened, and the joint surfaces 2b and 3b of both connecting members are pressed against each other with the metal gasket 11 interposed therebetween. Then, the joint surfaces 2b, 3
The metal gasket 11 is deformed according to the shape of the seal portions 21 and 22 formed in b and comes into close contact with the connecting members 2 and 3.
【００２７】図１(b) は図１(a) のＡ部分に対応するシ
ール部２１，２２の詳細断面図である。連通孔２ａ，３
ａを連続して取り囲むようにして設けられたシール部２
１，２２は接合面２ｂ，３ｂに旋盤等により、それぞれ
が平行でない２つ以上の直線部２３ａ1 ，２３ａ2 ，２
３ｂ1 ，２３ｂ2 を持った逆等脚台形の凹状断面を持つ
ように切削され、またこの直線部２３ａ1 ，２３ａ2 ，
２３ｂ1 ，２３ｂ2 の少なくとも一部には、バニシ加工
若しくは研磨等により鏡面加工が施されいる。FIG. 1B is a detailed sectional view of the seal portions 21 and 22 corresponding to the portion A in FIG. 1A. Communication holes 2a, 3
a seal portion 2 provided so as to continuously surround a
1, 22 are two or more straight line portions 23a 1 , 23a 2 , 2 which are not parallel to each other on the joining surfaces 2b, 3b by a lathe or the like.
It is cut so as to have an inverted isosceles trapezoidal concave section with 3b 1 and 23b 2, and the straight portions 23a 1 and 23a 2
At least a part of 23b 1 and 23b 2 is mirror-finished by burnishing or polishing.
【００２８】一方金属ガスケット１１は、シール部２
１，２２の２つ以上の直線部２３ａ1，２３ａ2 ，２３
ｂ1 ，２３ｂ2 と整合する凸状の断面を持ち、前記圧接
により４つ以上の密接面を構成して連結部材２，３を連
結する。On the other hand, the metal gasket 11 has a seal portion 2.
Two or more straight line portions 23a 1 , 23a 2 , 23 of 1 , 22
It has a convex cross section that matches with b 1 and 23b 2, and connects the connecting members 2 and 3 by forming four or more contact surfaces by the pressure contact.
【００２９】上記構造の継手装置１を冷却した場合の接
合状態の模試図を図２に示す。図２(a) は金属ガスケッ
ト１１の部分断面図であり、図２(b) は室温で圧接した
場合の接合部分の断面構造図で、密接面Ｓａ1 ，Ｓａ
2 ，Ｓｂ1 ，Ｓｂ2 は４面接触をしている。図２(c) は
冷却したときの模試図を示し、連結部材２、３の半径方
向Ｒd の熱収縮が金属ガスケット１１の半径方向Ｒd の
熱収縮に比べ（本実施例では連結部材の熱膨張係数が金
属ガスケットの熱膨張係数より大きいとしているが、逆
の場合も同様の議論が成り立つので省略する）のでＳａ
1 ，Ｓｂ1 の密接面は開く様になり、Ｓａ2 ，Ｓｂ2 は
逆により強固に密接する様になる。FIG. 2 shows a schematic diagram of a jointed state when the joint device 1 having the above structure is cooled. FIG. 2 (a) is a partial cross-sectional view of the metal gasket 11, and FIG. 2 (b) is a cross-sectional structural view of the joint portion when pressure-welded at room temperature, showing the contact surfaces Sa 1 and Sa.
2 , Sb 1 and Sb 2 are in contact with each other on four sides. FIG. 2 (c) shows a schematic diagram when cooled, in which the thermal contraction of the connecting members 2 and 3 in the radial direction R d is larger than the thermal contraction of the metal gasket 11 in the radial direction R d (in this embodiment, Although the coefficient of thermal expansion is said to be larger than that of the metal gasket, the same argument can be applied in the opposite case.
The close contact surface of 1 and Sb 1 becomes open, and Sa 2 and Sb 2 become close to each other more firmly.
【００３０】図３は第２の実施例を説明する図で、先の
実施例で冷却により密接面Ｓａ1 ，Ｓｂ1 の密接性が悪
くなることを述べた。本実施例はこれを改善するため
に、金属ガスケット１１の頂部２８ａに前記シール部２
１、２２に沿って掘り溝２８を設けたものである。図３
(a) は金属ガスケット１１の断面図、図３(b) は室温で
連結部材２、３を接合したときの断面模試図であり、図
３(c) はこれを冷却した場合を示している。FIG. 3 is a diagram for explaining the second embodiment, and it has been described that the closeness of the contact surfaces Sa 1 and Sb 1 deteriorates due to cooling in the previous embodiment. In this embodiment, in order to improve this, the seal portion 2 is provided on the top portion 28a of the metal gasket 11.
A trench 28 is provided along the grooves 1 and 22. Figure 3
(a) is a cross-sectional view of the metal gasket 11, FIG. 3 (b) is a schematic cross-sectional view when the connecting members 2 and 3 are joined at room temperature, and FIG. 3 (c) shows a case where it is cooled. ..
【００３１】室温での接合により掘り溝２８が変形し、
この変形により圧接エネルギ−の一部を弾性変形による
歪みエネルギ−として蓄え、熱収縮により密接面が開こ
うとすると、前記歪みエネルギ−を解放して密接面の密
接性を保持する。従って冷却しても常に４面の密接面Ｓ
ａ1 ，Ｓａ2 ，Ｓｂ1 ，Ｓｂ2 が確保され、また強固に
圧接する必要がなくなる利点がある。The groove 28 is deformed by joining at room temperature,
By this deformation, a part of the pressure contact energy is stored as strain energy due to elastic deformation, and when the contact surface tries to open due to thermal contraction, the strain energy is released to maintain the contact surface closeness. Therefore, even if it is cooled, there are always four close surfaces S
There is an advantage that a 1 , Sa 2 , Sb 1 and Sb 2 are secured and there is no need to press firmly.
【００３２】図４は第３の実施例を説明する図で、第２
の実施例で設けた掘り溝２８にバネ２９を挿入したとき
の断面構造を示している。図４（a)はバネ２９を挿入し
た金属ガスケットの部分断面図を示し、図４(b) は室温
で連結部材２，３を接合したときの断面模式図であり、
図４(c) はこれを冷却した場合を示している。FIG. 4 is a diagram for explaining the third embodiment.
The sectional structure when the spring 29 is inserted into the trench 28 provided in the embodiment is shown. FIG. 4 (a) is a partial cross-sectional view of the metal gasket with the spring 29 inserted, and FIG. 4 (b) is a schematic cross-sectional view when the connecting members 2 and 3 are joined at room temperature.
FIG. 4 (c) shows the case where this is cooled.
【００３３】図４（a)に示すように、接合する前の金属
ガスケット１１はバネ２９の力により、掘り溝２８が開
いており、接合時には掘り溝２８が縮まっている。この
ことは、先述した歪みエネルギーにバネ２８の変形エネ
ルギーが加えられることを示しており、熱収縮により密
接面が開こうとすると、このバネ２９の変形エネルギー
も解放されて密接面の密接性を強固に保持することが可
能となる。As shown in FIG. 4 (a), the metal gasket 11 before joining has the trench 28 opened by the force of the spring 29, and the trench 28 is contracted at the time of joining. This indicates that the deformation energy of the spring 28 is added to the above-described strain energy, and when the contact surface tries to open due to thermal contraction, the deformation energy of the spring 29 is also released and the contact surface closeness is improved. It becomes possible to hold it firmly.
【００３４】なお、バネ２９はステンレス製の板バネを
Ｕ字状にしたものを用いているが、炭素等の負の熱膨張
係数を持つ物質を切り込み溝２８に挿入してもよい。Although the spring 29 is a U-shaped plate spring made of stainless steel, a substance having a negative coefficient of thermal expansion such as carbon may be inserted into the cut groove 28.
【００３５】図５は前記連結部材２，３の直線部２３ａ
1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2にバニシ加工を施す
ためのバニシ加工具３０の斜視図を図(a) に、またその
断面図を図(b) に示している。FIG. 5 shows the linear portion 23a of the connecting members 2 and 3.
A perspective view of a burnishing tool 30 for burnishing 1 , 23a 2 , 23b 1 and 23b 2 is shown in FIG. (A), and a sectional view thereof is shown in FIG.
【００３６】バニシ加工具３０はバニシ加工具基台３６
に、テーパーベアリング３２、及びスラストベアリング
３３が嵌合されており、これに回転体３１を挿入して該
回転体３１の軸振れを防ぐと共に、回転体の軸の回りに
回転自在となっている。またこの回転体３１の軸部には
頂角が鋭角な円錐形状の作用面体３８を有する尖頭部材
３４を嵌合し、ネジ３５等により脱着可能に取りつけら
れている。The burnishing tool 30 has a burnishing tool base 36.
Further, a tapered bearing 32 and a thrust bearing 33 are fitted in the rotary body 31. The rotary body 31 is inserted into the tapered bearing 32 and the thrust bearing 33 to prevent shaft runout of the rotary body 31 and to be rotatable around the axis of the rotary body. .. Further, a point member 34 having a conical action surface member 38 having an acute apex angle is fitted to the shaft portion of the rotary member 31, and is detachably attached by a screw 35 or the like.
【００３７】図６は前記バニシ加工具３０を用いて、直
線部２３ａ1 ，２３ａ2 ，２３ｂ1，２３ｂ2 にバニシ
加工を施す方法を示す略図で、連結部材２，３を旋盤
（付図示）に固定し、回転させた状態で、前記バニシ加
工具３０に取り付けられている尖塔部材３４の作用面３
８を、前記シール部２１，２２の直線部２３ａ1 ，２３
ａ2 ，２３ｂ1 ，２３ｂ2 に圧接することにより、該直
線部２３ａ1 ，２３ａ2，２３ｂ1 ，２３ｂ2 が加工効
果を起し、かつ鏡面状態になる。FIG. 6 is a schematic diagram showing a method of burnishing the linear portions 23a 1 , 23a 2 , 23b 1 and 23b 2 using the burnishing tool 30 described above. The working surface 3 of the steeple member 34 attached to the burnishing tool 30 in a state of being fixed and rotated on
8 to the straight portions 23a 1 and 23 of the seal portions 21 and 22.
By press-contacting the a 2 , 23b 1 and 23b 2 , the linear portions 23a 1 , 23a 2 , 23b 1 and 23b 2 have a processing effect and become a mirror surface state.
【００３８】この加工効果によりシール部２１，２２の
圧接による変形を抑えることができ、繰り返し用いるこ
とが可能となり、また鏡面であるため密接状態を容易に
達成することができる。Due to this processing effect, the deformation of the seal portions 21 and 22 due to the pressure contact can be suppressed, the seal portions 21 and 22 can be repeatedly used, and the mirror surface allows the close contact state to be easily achieved.
【００３９】上記方法の説明では円運動のみをする旋盤
について述べたが、図７に示す様にＸＹステ−ジ３７に
固定された連結部材２、３に前記バニシ加工具３０の作
用面３８を圧接して、該バニシ加工具３０かＸＹステ−
ジ３７か少なくとも一方を操作することによりバニシ加
工を施してもよい。この方法によるとシール部２１、２
２の形状が円形に制限されない。In the explanation of the above method, the lathe which only makes a circular motion has been described, but as shown in FIG. 7, the working surface 38 of the burnishing tool 30 is attached to the connecting members 2 and 3 fixed to the XY stage 37. Press and press the burnishing tool 30 or XY station.
The burnishing process may be performed by operating at least one of the holes 37. According to this method, the seal portions 21, 2
The shape of 2 is not limited to a circle.
【００４０】図８は凹状の断面を有する前記シール部の
直線部２３ａ1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2 に前記
バニシ加工具３０を用いてバニシ加工を行う際に、前記
尖塔部材３４の頂点部３４ａの干渉を防止することを目
的として、頂点部逃げ用溝２５ａを前記凹状の底部に設
けたものである。FIG. 8 shows the apex of the steeple member 34 when the burnishing process is performed on the straight portions 23a 1 , 23a 2 , 23b 1 and 23b 2 of the seal portion having a concave cross section using the burnishing tool 30. The apex escape groove 25a is provided in the concave bottom for the purpose of preventing the interference of the portion 34a.
【００４１】バニシ加工時は頂点部をこの頂点部逃げ用
溝に入れて加工を行うので、変形や干渉のしやすい頂点
部を実質的に作用面から除くことができ、直線部２３ａ
1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2 を均一にバニシ加工
することが可能となる。During burnishing, since the apex portion is inserted into this apex relief groove, the apex portion which is easily deformed or interfered with can be substantially removed from the working surface, and the straight line portion 23a is formed.
It becomes possible to uniformly burnish 1 , 1 , 23a 2 , 23b 1 , and 23b 2 .
【００４２】なお、図８では四角形の頂点部逃げ用溝２
５ａを図示しているが、頂点部が接しない限りにおいて
四角形である必要はない。It should be noted that in FIG. 8, a rectangular top relief groove 2 is formed.
Although 5a is shown, it need not be rectangular unless the vertices are in contact.
【００４３】[0043]
【発明の効果】以上述べた様に本発明によると、直線部
を有するシール部に金属ガスケットを挿入・圧接するこ
とで４つの密接面が形成され、例え極低温に冷却されて
一方の密接面が緩んでも、他方の密接面がより強固に密
接するようになるので、高い気密性が得られ、超高真空
を達成することが可能となる。As described above, according to the present invention, four contact surfaces are formed by inserting and pressing a metal gasket into a seal portion having a straight portion, and one contact surface is cooled even at an extremely low temperature. Since the other contact surface comes into close contact with the other, even if it is loosened, high airtightness can be obtained and an ultrahigh vacuum can be achieved.
【図１】本発明の第１の実施例に適用される金属ガスケ
ットを挟んだ継手装置を示す図で、(a) は断面図、(b)
は接合部分の詳細断面図。FIG. 1 is a view showing a joint device sandwiching a metal gasket applied to a first embodiment of the present invention, in which (a) is a sectional view and (b) is a sectional view.
Is a detailed sectional view of a joint portion.
【図２】本発明の第１の実施例に適用される金属ガスケ
ットを挟んだ継手装置を示す図で、(a) は金属ガスケッ
トの部分断面図、(b) は室温での接合部分の詳細断面
図、(c) 冷却時の接合部分の詳細断面図。2A and 2B are views showing a joint device sandwiching a metal gasket applied to the first embodiment of the present invention, in which FIG. 2A is a partial sectional view of the metal gasket, and FIG. 2B is a detail of a joint portion at room temperature. Sectional view, (c) Detailed sectional view of the joint part during cooling.
【図３】本発明の第２の実施例に適用される掘り溝が設
けられた金属ガスケットを挟んだ継手装置を示す図で、
(a) は金属ガスケットの部分断面図、(b) は室温での接
合部分の詳細断面図、(c) 冷却時の接合部分の詳細断面
図。FIG. 3 is a view showing a joint device sandwiching a metal gasket provided with a trench, which is applied to a second embodiment of the present invention,
(a) is a partial sectional view of the metal gasket, (b) is a detailed sectional view of the joint portion at room temperature, and (c) is a detailed sectional view of the joint portion at the time of cooling.
【図４】本発明の第３の実施例に適用される掘り溝にバ
ネが挿入された金属ガスケットを挟んだ継手装置を示す
図で、(a) は金属ガスケットの断面図、(b) は室温での
接合部分の詳細断面図、(c) 冷却時の接合部分の詳細断
面図。4A and 4B are views showing a joint device sandwiching a metal gasket in which a spring is inserted in a digging groove, which is applied to a third embodiment of the present invention, in which FIG. 4A is a sectional view of the metal gasket, and FIG. Detailed cross-sectional view of the bonded part at room temperature, (c) Detailed cross-sectional view of the bonded part during cooling.
【図５】本発明のバニシ加工具を示す図で、(a) は斜視
図、(b) は断面図。5A and 5B are views showing a burnishing tool of the present invention, in which FIG. 5A is a perspective view and FIG.
【図６】旋盤を用いてバニシ加工方法を示す図で、(a)
は斜視図、(b) は加工面の詳細断面図。FIG. 6 is a diagram showing a burnishing method using a lathe, (a)
Is a perspective view, and (b) is a detailed cross-sectional view of the processed surface.
【図７】ＸＹステ−ジを用いてバニシ加工方法を示す斜
視図。FIG. 7 is a perspective view showing a burnishing method using an XY stage.
【図８】シール部の底部に頂点部逃げ用溝を設けた連結
部材の部分断面図。FIG. 8 is a partial cross-sectional view of a connecting member in which a top relief groove is provided on the bottom of the seal portion.
【図９】既提案例に適用される金属ガスケットを挟んだ
継手装置を示す図で、(a) は断面図、(b) は接合部分の
詳細断面図、(c) は金属ガスケット断面図。9A and 9B are views showing a joint device sandwiching a metal gasket applied to an already proposed example, in which FIG. 9A is a sectional view, FIG. 9B is a detailed sectional view of a joint portion, and FIG. 9C is a sectional view of a metal gasket.
【図１０】既提案例に適用される金属ガスケットを弱く
挟んだ継手装置を示す図で、(a)は室温での接合部分の
詳細断面図、(b) は冷却時の接合部分の詳細断面図。[Fig. 10] Fig. 10 is a diagram showing a joint device with a metal gasket weakly sandwiched, which is applied to the already proposed example, in which (a) is a detailed cross-sectional view of a joint portion at room temperature and (b) is a detailed cross-sectional view of the joint portion at the time of cooling. Fig.
【図１１】既提案例に適用される金属ガスケットを強く
挟んだ継手装置を示す図で、(a)は室温での接合部分の
詳細断面図、(b) は冷却時の接合部分の詳細断面図。[Fig. 11] Fig. 11 is a diagram showing a joint device in which a metal gasket is strongly sandwiched, which is applied to an already proposed example. Fig.
１ 継手装置 ２ （第一の）連結部材 ２ａ 連通孔 ２ｂ 接合面 ３ （第二の）連結部材 ３ａ 連通孔 ３ｂ 接合面 １１ 金属ガスケット ２１，２２ シール部 ２３ａ1 ，２３ａ2 ，２３ｂ1 ，２３ｂ2 直線部分 ２５ａ 頂点部逃げ用溝 ２８ 掘り溝 ２９ バネ（弾性体） ３０ バニシ加工具 ３１ 回転体 ３２，３３ ベアリング ３４ 尖塔部材 ３４ａ 頂点部 ３６ バニシ加工基台 ３８ 作用面1 joint device 2 (first) connecting member 2a communication hole 2b joint surface 3 (second) connecting member 3a communication hole 3b joining surface 11 the metal gasket 21 seal portion 23a 1, 23a 2, 23b 1 , 23b 2 Linear part 25a Apex relief groove 28 Dug groove 29 Spring (elastic body) 30 Burnishing tool 31 Rotating body 32, 33 Bearing 34 Spire member 34a Apex 36 Burnishing base 38 Working surface
Claims (5)
複数の連結部材と、該連結部材の接合面に前記連通孔を
連続して取り囲む金属ガスケットと、を有し、 前記接
合面に前記金属ガスケットを挟んで連結・固定してなる
継手装置において、 前記接合面に、それぞれが平行でない２つ以上の直線部
を持ち、これら直線部の少なくとも一部が鏡面である凹
状の断面を持つシール部を設け、 前記金属ガスケットが、前記シール部の２つ以上の直線
部で整合する凸状の断面を有すると共に、一方の前記連
結部材のシール部に挿入され、かつ他方の連結部材のシ
ール部に圧接されて、２以上の密接面により前記連結部
材を、密封する、 ことを特徴とする継手装置。1. A plurality of connecting members each having a communicating hole formed in each joint surface, and a metal gasket continuously surrounding the communicating hole on the joint surface of the connecting members, wherein the joint surface includes: A joint device which is connected and fixed with a metal gasket interposed therebetween, wherein the joint surface has two or more straight portions that are not parallel to each other, and at least a part of these straight portions has a concave cross section that is a mirror surface. And a metal gasket having a convex cross section that is aligned with two or more straight portions of the seal portion and inserted into the seal portion of one of the connecting members and the seal portion of the other connecting member. A joint device, wherein the joint member is pressure-contacted with and seals the connecting member by two or more contact surfaces.
前記シール部を作製し、その後バニシ加工具の作用面を
前記シール部の直線部に圧接しつつ、前記バニシ加工具
又は前記連結部材の少なくとも一方を移動し、前記作用
面が前記直線部上を滑ることなく移動することにより、
該直線部にバニシ加工を施して、加工硬化させると共
に、前記鏡面状態にする、 請求項１記載の継手装置の製造方法。2. The burnishing tool or the connecting member is pressed while the working surface of the burnishing tool is pressed against the straight part of the seal portion after the seal portion is formed on the joint surface of the connecting member by cutting. By moving at least one of the working surfaces without sliding on the straight portion,
The method for manufacturing a joint device according to claim 1, wherein the straight portion is subjected to burnishing to be work-hardened and brought into the mirror surface state.
が前記作用面となる尖頭部材と、 該尖塔部材を脱着可能に取り付けた回転体と、 該回転体を回転のみ自在に支持するベアリングと、 該ベアリングを支持するバニシ加工基台と、を備えた、 請求項２記載の継手装置の製造方法に用いる工具。3. A pointed member having a conical shape with an acute apex angle, the conical surface serving as the working surface, a rotating body to which the steeple member is detachably attached, and the rotating body being only rotatable. The tool used in the method for manufacturing a joint device according to claim 2, further comprising: a bearing that supports the bearing, and a burnishing base that supports the bearing.
ットの凸状頂部に、環状の掘り溝を設け、該金属ガスケ
ットの前記シール部に当接する密接面に弾性力を付与し
てなる、 請求項１記載の継手装置に用いる金属ガスケット。4. An annular groove is provided on a convex top of the metal gasket having the convex cross section, and an elastic force is applied to a close contact surface of the metal gasket that abuts the seal portion. A metal gasket used in the joint device according to Item 1.
しくは負の熱膨張係数を持つ部材を挿入した、 請求項４記載の継手装置に用いる金属ガスケット。5. The metal gasket used in the joint device according to claim 4, wherein an elastic body that is elastically compressed or a member having a negative coefficient of thermal expansion is inserted into the trench.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4143192A JPH05309431A (en) | 1992-05-09 | 1992-05-09 | Joint device, its manufacture and tool for its manufacture and metallic gasket used for its device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4143192A JPH05309431A (en) | 1992-05-09 | 1992-05-09 | Joint device, its manufacture and tool for its manufacture and metallic gasket used for its device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05309431A true JPH05309431A (en) | 1993-11-22 |
Family
ID=15333011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4143192A Pending JPH05309431A (en) | 1992-05-09 | 1992-05-09 | Joint device, its manufacture and tool for its manufacture and metallic gasket used for its device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05309431A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006033299A1 (en) * | 2004-09-22 | 2006-03-30 | Nippon Pillar Packing Co., Ltd. | Structure for connection between integrated panel and fluid device |
| KR20150062910A (en) | 2013-11-29 | 2015-06-08 | 롯데케미칼 주식회사 | Preparation method of acetophenone |
| JP2016183730A (en) * | 2015-03-26 | 2016-10-20 | 三菱電線工業株式会社 | Metal seal |
-
1992
- 1992-05-09 JP JP4143192A patent/JPH05309431A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006033299A1 (en) * | 2004-09-22 | 2006-03-30 | Nippon Pillar Packing Co., Ltd. | Structure for connection between integrated panel and fluid device |
| KR100897462B1 (en) * | 2004-09-22 | 2009-05-14 | 니혼삐라아코오교오카부시키가이샤 | Structure for connection between integrated panel and fluid device |
| KR20150062910A (en) | 2013-11-29 | 2015-06-08 | 롯데케미칼 주식회사 | Preparation method of acetophenone |
| JP2016183730A (en) * | 2015-03-26 | 2016-10-20 | 三菱電線工業株式会社 | Metal seal |
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