JPH0528970U - Chip product inspection device - Google Patents
Chip product inspection deviceInfo
- Publication number
- JPH0528970U JPH0528970U JP7837591U JP7837591U JPH0528970U JP H0528970 U JPH0528970 U JP H0528970U JP 7837591 U JP7837591 U JP 7837591U JP 7837591 U JP7837591 U JP 7837591U JP H0528970 U JPH0528970 U JP H0528970U
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- inspection
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Abstract
(57)【要約】
【目的】測定対象製品のピツチに合わせて、少なくとも
測定対象製品の連数分の検測端子を、支持部材等を用い
て支持し、極小測定対象製品であつても4端子で検測で
きるとともに、検測端子をバネ機構で測定対象製品の電
極部に圧接することにより、正確な検測が可能となると
ともに、複数の連数分の検測端子を用いて隣同士の導通
検査を行うことも可能とすることを目的とする。
【構成】 検測対象チツプ製品の電極の幅以下の幅に成
るように、測定装置に接続可能な2つの導電性材料で構
成された導電部材11,12又は21,22を絶縁材料
で構成された絶縁シート13又は23の両面に固着して
検測端子10または20を構成する。そして、電極接触
部位14又は24が検測対象チツプ製品50の両電極5
1a,51b方向にそれぞれ押圧されるように形成され
た和挟み型形状のバネ機構16〜18又は26〜28の
作用で、電極接触部位14又は24と検測対象チツプ製
品50の両電極51a,51bとが所定弾性力でそれぞ
れ接触し、良好な電気的接触状態を保ちながら正確な四
端子の抵抗値測定を可能とする。
(57) [Summary] [Purpose] In accordance with the pitch of the product to be measured, at least as many measuring terminals as the number of stations of the product to be measured are supported using support members, etc. Not only can the terminals be inspected, but the accurate contact can be made by pressing the inspection terminals to the electrode part of the product to be measured with a spring mechanism. The purpose of the present invention is to make it possible to conduct a continuity test. [Structure] A conductive member 11, 12 or 21, 22 made of two conductive materials that can be connected to a measuring device is made of an insulating material so that the width is equal to or less than the width of an electrode of a chip product to be inspected. The inspection terminal 10 or 20 is formed by fixing the insulating sheet 13 or 23 on both sides. Then, the electrode contact parts 14 or 24 are both electrodes 5 of the chip product 50 to be inspected.
By the action of the spring-and-sandwich type spring mechanism 16-18 or 26-28 formed so as to be respectively pressed in the directions 1a and 51b, both electrodes 51a of the electrode contact portion 14 or 24 and the chip product 50 to be inspected, 51b and 51b contact each other with a predetermined elastic force, which enables accurate resistance measurement of the four terminals while maintaining a good electrical contact state.
Description
【0001】[0001]
本発明はピツチ製品検測装置に関し、特に4端子測定法で極小ピツチ製品を検 測可能なピツチ製品検測装置に関するものである。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pitch product inspection apparatus, and more particularly to a pitch product inspection apparatus capable of detecting extremely small pitch products by a four-terminal measurement method.
【0002】[0002]
従来、極小ピツチのチツプ形抵抗器の抵抗値測定方法としては、以下の様な方 法が用いられていた。 即ち、図4に示すように、製品50の寸法(電極間ピツチ)に合わせて該製品 の電極51a,51bピツチ間隔に取り付けられた小型のコンタクトプローブ5 2a,52bの測定端子を製品50の両電極51a,51bに圧接させ、測定端 子に接続された抵抗値測定部60で製品の抵抗値を測定していた。 Conventionally, the following methods have been used to measure the resistance value of chip resistors with extremely small pitch. That is, as shown in FIG. 4, the measuring terminals of the small contact probes 52a and 52b, which are mounted at the pitch intervals of the electrodes 51a and 51b of the product 50 according to the size (pitch between electrodes) of the product 50, are connected to the product 50. The resistance value of the product was measured by the resistance value measuring unit 60 connected to the measuring terminals while being pressed against the electrodes 51a and 51b.
【0003】 又は、図5に示すように、ピンセツト等を改造し、導電体であるピンセツト先 端部55a,55bで製品50の両電極51a,51bを挟み、この先端部55 a,55bに接続された抵抗値測定部60で製品の抵抗値を測定していた。Alternatively, as shown in FIG. 5, the pinsets and the like are modified so that the electrodes 51a and 51b of the product 50 are sandwiched between the pinsets tip ends 55a and 55b which are conductors, and the ends are connected to the tips 55a and 55b. The resistance value of the product was measured by the resistance value measuring unit 60.
【0004】[0004]
しかしながら、上述した如くの従来の極小ピツチのチツプ形抵抗器の抵抗値測 定方法では、以下の問題点があつた。 即ち、図4の方法で使用する市販の小型コンタクトプローブには、完成寸法に バラツキがあつたり、小径のために使用されているスプリングが小さくてそのバ ネ圧も低く、十分な圧接圧力が得られず、低抵抗値の測定に限界があつた。 However, the above-described conventional method for measuring the resistance value of the chip resistor having the minimum pitch has the following problems. In other words, the commercially available small contact probe used in the method of FIG. 4 has variations in the finished size, and the spring used for its small diameter is small, and its vane pressure is low, so that sufficient pressure contact pressure can be obtained. However, there was a limit to the measurement of low resistance value.
【0005】 又、図5の方法では、ピンセツトを改造しなければならず、しかも作業者によ る手検出が避けられず、状況によつて測定結果にバラツキがある。さらに、4連 等の多連の製品を1つづついちいちピンセツトで挟むため手間がかかる。更に隣 同士の導通検査を行えない。Further, in the method of FIG. 5, the pinsets have to be modified, and the hand detection by the operator is unavoidable, and the measurement results vary depending on the situation. Furthermore, it takes a lot of work to pinch multiple products such as four, one by one, with pinsets. Furthermore, it is not possible to conduct a continuity test between the neighbors.
【0006】[0006]
本発明は、上述の課題を解決することを目的としてなされたもので、上述の課 題を解決する一手段として以下の構成を備える。 即ち、検測対象チツプ製品の電極への接触部位が少なくとも該電極の幅以下の 幅に成るように、測定装置に接続可能な2つの導電性材料で構成された導電部材 を絶縁材料で構成された絶縁シート両面に固着してなる検測端子を、検測対象チ ツプ製品の両電極にそれぞれ接触させ、四端子検測可能なチツプ製品検測装置で あつて、検測端子は、検測対象チツプ製品の電極に電極接触部位を圧接させた時 に、所定弾性力で電極接触部位が前記電極方向に押圧されるように形成されたバ ネ機構を備え、両電極毎の1対の測定端子を検測対象チツプ製品の両電極に接触 させて該電極間の特性を検測する。 The present invention has been made for the purpose of solving the above problems, and has the following configuration as one means for solving the above problems. That is, the conductive member made of two conductive materials that can be connected to the measuring device is made of an insulating material so that the contact area of the chip product to be inspected with the electrode is at least the width of the electrode or less. The inspection terminals that are fixed on both sides of the insulating sheet are brought into contact with both electrodes of the chip product to be inspected, and a chip product inspection device that can perform four-terminal inspection is used. When the electrode contact part is pressed against the electrode of the chip product to be measured, it is equipped with a bar mechanism that presses the electrode contact part toward the electrode with a predetermined elastic force. The measurement terminals are brought into contact with both electrodes of the chip product to be inspected to measure the characteristics between the electrodes.
【0007】 そして例えば、検測端子のバネ機構は、電極接触部位より延出した立設部端部 より横方向に形成された和挟み型形状とし、検測端子対を少なくともチツプ製品 の連数分チツプ製品の電極間隔位置となるように配設する検測端子支持部材を備 え、該検測端子支持部材に前記検測端子を少なくとも検測対象チツプ製品の連数 分支持させてなる。[0007] For example, the spring mechanism of the inspection terminal has a Japanese sandwich type shape formed laterally from the end of the standing portion extending from the electrode contact portion, and the inspection terminal pair is at least the number of consecutive chip products. It is provided with a measuring terminal supporting member arranged so as to be located at an electrode interval position of the divided chip product, and the measuring terminal supporting member supports at least the number of measuring terminals of the chip product to be inspected.
【0008】[0008]
以上の構成において、略測定対象製品のピツチに合わせて、少なくとも測定対 象製品の連数分の検測端子を、支持部材等を用いて支持し、極小測定対象製品で あつても4端子で検測できるとともに、検測端子をバネ機構で測定対象製品の電 極部に圧接することにより、正確な検測が可能となるとともに、複数の連数分の 検測端子を用いて隣同士の導通検査を行うことも可能とすることができる。 With the above configuration, at least the measuring terminals for the number of stations of the product to be measured are supported by using a supporting member, etc., in line with the pitch of the product to be measured, and even if it is the product to be measured minimally, there are 4 terminals. In addition to being able to perform inspection, accurate inspection can be performed by pressing the inspection terminal to the electrode part of the product to be measured with a spring mechanism, and using the inspection terminals for multiple stations It may also be possible to perform a continuity check.
【0009】[0009]
以下、図面を参照して本発明に係る一実施例を詳細に説明する。 Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.
【0010】[0010]
【第1実施例】 図1及び図2は、本発明に係る一実施例の検測端子を測定対象製品の連数分 備えた極小ピツチチツプ形抵抗器の抵抗値測定装置の検測端子及び端子ブロツク の構成を示す図である。 図1の(A)が検測端子位置で後述する端子ブロツクを切り欠いた平面図、図 1の(B)が側面図、図2が図1(A)のA−A′面断面図である。[First Embodiment] FIGS. 1 and 2 show a detection terminal and a terminal of a resistance value measuring device of a miniature Pitch-tip type resistor, which is provided with the detection terminals of an embodiment according to the present invention for the number of stations of a product to be measured. It is a figure which shows the structure of a block. 1A is a plan view in which a terminal block, which will be described later, is cut out at the inspection terminal position, FIG. 1B is a side view, and FIG. 2 is a cross-sectional view taken along the line AA ′ of FIG. 1A. is there.
【0011】 以下、図1及び図2を参照して本発明に係る一実施例を詳細に説明する。 図1及び図2において、1および2は絶縁性材料で形成された端子ブロツクで あり、それぞれ少なくとも測定対象製品の連数分の検測端子を固定支持する測定 対象製品の製品ピツチ(電極ピツチ)に略合わせた検測端子係止溝を備えている 。端子ブロツク1,2は、不図示の係止手段により互いに平行関係を保ちながら その間隔を任意に調整可能に構成されており、製品の電極間隔に応じて調整する ことができ、製品の電極間隔がどの様な間隔であつても、容易に対処できる。Hereinafter, an embodiment according to the present invention will be described in detail with reference to FIGS. 1 and 2. 1 and 2, 1 and 2 are terminal blocks made of an insulating material, each of which has at least as many measuring terminals as the number of stations of the measurement target product fixedly supported. A product pitch (electrode pitch) of the measurement target product. It is equipped with the inspection terminal locking groove that is roughly aligned with. The terminal blocks 1 and 2 are configured so that their intervals can be arbitrarily adjusted while maintaining a parallel relationship with each other by locking means (not shown), and can be adjusted according to the electrode intervals of the product. Can be easily dealt with at any interval.
【0012】 10は検測端子であり、2枚の導電性材料で構成された導電部材11,12が 絶縁性材料で構成された導電部材11,12と略同形の絶縁シート13の両側面 に固着されている。検測端子20も検測端子10と同様に、導電部材21,22 が絶縁シート23の両側面に固着された構成である。なお、検測端子10,20 の厚さは、少なくとも測定対象製品の電極部の幅以下となつている。Reference numeral 10 denotes a measuring terminal, and conductive members 11 and 12 made of two conductive materials are provided on both side surfaces of an insulating sheet 13 having substantially the same shape as the conductive members 11 and 12 made of an insulating material. It is fixed. Like the inspection terminal 10, the inspection terminal 20 is also configured such that the conductive members 21 and 22 are fixed to both side surfaces of the insulating sheet 23. The thickness of the inspection terminals 10 and 20 is at least less than or equal to the width of the electrode portion of the product to be measured.
【0013】 そして、検測端子10,20は、図1の(A)に示す様に、表面を平滑化した 品の電極部接触部位14,24、及び、該電極部接触部位14,24より延出す る所定長さの立設部15,25とを備え、更に、該立設部15,25端部より横 方向に形成された上部アーム16,26、該上部アーム16,26よりやや肉薄 の折り曲げ部17,27、及び端子ブロツク1,2の検測端子係止溝に嵌入され る下部アーム18,28、端子ブロツク1,2の検測端子係止溝に嵌入するとき の位置決め凸部19,29とにより構成さらた略和挟み型のバネ機構を備えてお り、端子ブロツク1,2又は測定対象製品50のいずれかを移動させて互いに押 しつけた時に、電極接触部位14,24が測定対象製品の電極51a,51bに バネ機構の弾性力で圧接され、良好な接触状態となるように構成されている。Then, as shown in FIG. 1A, the inspection terminals 10 and 20 have electrode surface contact portions 14 and 24 of a product whose surface is smoothed, and the electrode portion contact portions 14 and 24, respectively. And an upper arm 16 and 26 which are formed laterally from the ends of the standing portions 15 and 25, and are slightly thinner than the upper arms 16 and 26. Bent arms 17 and 27, lower arms 18 and 28 fitted into the detection terminal locking grooves of the terminal blocks 1 and 2, and positioning protrusions when fitted into the detection terminal locking grooves of the terminal blocks 1 and 2. It is equipped with a spring mechanism of a substantially Japanese type sandwiched by 19 and 29. When either the terminal blocks 1 and 2 or the product to be measured 50 are moved and pressed against each other, the electrode contact portions 14 and 24 On the electrodes 51a and 51b of the product to be measured. It is configured to be pressed into contact with the elastic force of the mechanism and to be in a good contact state.
【0014】 係る検測端子を、例えば製品の連数分、検測する製品のピツチに合わせて配設 されている端子ブロツク1,2の検測端子係止溝内に嵌入する。そして、測定対 象製品の電極間の特性、例えば電極間の抵抗値を測定する四端子抵抗値測定部の 測定端子と検測端子10及び20の各導電部材11,12,21,22とを接続 することにより、検測端子10および20間に位置した製品の抵抗値を四端子で 測定可能となつている。The inspection terminals are inserted into the inspection terminal locking grooves of the terminal blocks 1 and 2 arranged in accordance with the pitch of the product to be inspected, for example, by the number of the product stations. Then, the characteristics between the electrodes of the product to be measured, for example, the measurement terminal of the four-terminal resistance value measuring unit for measuring the resistance value between the electrodes and the conductive members 11, 12, 21, 22 of the detection terminals 10 and 20 are set. By connecting, the resistance value of the product located between the inspection terminals 10 and 20 can be measured with four terminals.
【0015】 そしてこの製品の抵抗値を測定する時には、不図示の製品保持機構で抵抗値を 測定すべき製品50を保持して、例えば検測端子10の導電部材11,12及び 検測端子20の導電部材21,22の電極部接触部位14,24と測定製品50 の両電極51a,51bを所定圧力で圧接させればよい。これにより、電極部接 触部位14,24はバネ機構16〜18又は26〜28の弾性力で所定の圧力で 互いに密着した状態となり、良好な電気的接触状態が得られる。この時、検測端 子は、導電部材11,12又は21,22が絶縁シート13又は23の両側面に 固着されている構成であるため、図1の(B)に示す様に、製品50の電極51 への接触状態は、所定間隔を保つて例えば2枚の導電部材11,12が接触する 状態である。以上の状態となるため、この導電部材11,12を四端子抵抗値測 定部に接続すれば、容易に4端子での抵抗値測定が可能となる。When measuring the resistance value of this product, the product 50 whose resistance value is to be measured is held by a product holding mechanism (not shown), and for example, the conductive members 11 and 12 of the measurement terminal 10 and the measurement terminal 20 are held. It suffices to bring the electrode parts contacting portions 14, 24 of the conductive members 21, 22 and both electrodes 51a, 51b of the measurement product 50 into pressure contact with each other at a predetermined pressure. As a result, the electrode portion contact portions 14, 24 are brought into close contact with each other at a predetermined pressure by the elastic force of the spring mechanisms 16-18 or 26-28, and a good electrical contact state is obtained. At this time, the inspection terminal has a structure in which the conductive members 11, 12 or 21, 22 are fixed to both side surfaces of the insulating sheet 13 or 23. Therefore, as shown in FIG. The contact state of the electrode 51 with the electrode 51 is a state in which, for example, the two conductive members 11 and 12 are in contact with each other while keeping a predetermined distance. Because of the above-mentioned state, if the conductive members 11 and 12 are connected to the four-terminal resistance value measuring section, the resistance value can be easily measured at the four terminals.
【0016】 以上の構成を備える本実施例装置の極小ピツチのチツプ型抵抗器の抵抗値検測 工程を図3の工程図を参照して以下に説明する。 本実施例における製品の抵抗値を検測しようとするときには、まず、工程1で 検測端子を測定すべき製品の連数分端子ブロツク1,2の検測端子係止溝内に嵌 入する。そして工程2で、端子ブロツク1,2の間隔(ワークピツチ)が、略測 定すべき製品の電極間隔となるように調整する。これで、測定すべき製品の大き さ、連数等に伴う抵抗値測定機構の調整を終了する。なお、かかる抵抗値測定機 構の調整が不要の場合、例えば、製品ピツチや製品の電極間間隔に変更がない場 合には以上の工程1、工程2は不要となる。The resistance value measuring step of the chip resistor of the minimum pitch of the apparatus of the present embodiment having the above-mentioned configuration will be described below with reference to the process chart of FIG. When the resistance value of the product in the present embodiment is to be measured, first, in step 1, the test terminals are fitted into the test terminal locking grooves of the terminal blocks 1 and 2 by the number of stations of the product to be measured. .. Then, in step 2, the distance between the terminal blocks 1 and 2 (work pitch) is adjusted to be approximately the electrode distance of the product to be measured. This completes the adjustment of the resistance value measurement mechanism according to the size of the product to be measured, the number of stations, and so on. When the adjustment of the resistance value measuring mechanism is not necessary, for example, when the product pitch or the space between the electrodes of the product is not changed, the above steps 1 and 2 are unnecessary.
【0017】 これで測定準備が完了したため、続いて製品抵抗値の測定工程に移行する。ま ず、工程3で不図示の抵抗係止機構が検測すべき所定連数の抵抗器を例えば挟持 し、各製品の電極部が丁度検測端子の電極部接触部位の当接位置となるように位 置決めし、抵抗器の電極部と検測端子とを所定圧力で圧接する。この時の抵抗器 50と検測端子との接触状態を示したのが図1である。Now that the measurement preparation is completed, the process proceeds to the product resistance value measuring step. First, in step 3, a resistance locking mechanism (not shown) sandwiches, for example, a predetermined number of resistors to be measured, and the electrode portion of each product is just the contact position of the electrode contact portion of the detection terminal. Position, and the electrode part of the resistor and the measurement terminal are pressed against each other with a predetermined pressure. FIG. 1 shows the contact state between the resistor 50 and the inspection terminal at this time.
【0018】 そして続く工程4で四端子抵抗値測定部による抵抗器の抵抗値測定処理を行う 。この場合において、測定すべき抵抗値が複数連数の場合には、四端子抵抗値測 定部の測定機構を順次切り替えてそれぞれの測定抵抗器の電極接触検測端子間の 抵抗値測定を行う。なお、四端子抵抗値測定部を測定抵抗器の連数分の抵抗値を 一度に測定可能に構成した場合には、検測端子の切替え等行わずに、一度に多数 の抵抗器の検測が可能となる。Then, in the subsequent step 4, the resistance value measuring process of the resistor is performed by the four-terminal resistance value measuring unit. In this case, when the resistance value to be measured is multiple stations, the measuring mechanism of the 4-terminal resistance value measuring unit is sequentially switched to measure the resistance value between the electrode contact detection terminals of each measuring resistor. .. If the four-terminal resistance value measurement unit is configured to be able to measure the resistance value for the number of stations of the measurement resistor at one time, it is possible to detect a large number of resistors at a time without switching the inspection terminals. Is possible.
【0019】 次の工程5で全ての製品の検測が終了したか否かを調べ、続いて次の抵抗器の 測定を続ける場合には工程4に戻り、次の抵抗器の抵抗値測定処理を行う。 この様にして全ての検測を必要とする抵抗器の抵抗値の検測が終了すると処理 を終了する。 なお、係る本実施例により抵抗値の測定された各抵抗器は、測定抵抗値に従い 、製品の両不良が判断されることとなる。In the next step 5, it is checked whether or not the inspection of all products is completed, and if the measurement of the next resistor is continued, the process returns to step 4, and the resistance value measurement process of the next resistor is performed. I do. In this way, when the measurement of the resistance value of the resistor requiring all the measurement is completed, the processing is terminated. It should be noted that each of the resistors whose resistance values are measured according to the present embodiment, both defects of the product are judged according to the measured resistance value.
【0020】 以上説明したように本実施例によれば、簡単な調整のみであらゆる製品仕様に 柔軟に適用可能な、自動的に多連数の抵抗器の抵抗値測定ができる抵抗値測定装 置が提供できる。 更に、本実施例によれば、四端子による抵抗値の測定が可能であるため、従来 の如くの接触抵抗等のバラツキによる測定抵抗値の信頼性の低下等の問題がなく なり、高精度での抵抗値測定が可能となる。As described above, according to the present embodiment, the resistance value measuring device capable of flexibly applying to all product specifications with only simple adjustment and capable of automatically measuring the resistance value of the resistor having a large number of stations. Can be provided. Further, according to the present embodiment, since the resistance value can be measured by the four terminals, there is no problem such as the decrease in reliability of the measured resistance value due to the variation of the contact resistance etc. as in the past, and the accuracy is high. It is possible to measure the resistance value of.
【0021】[0021]
なお、以上の説明は、1つの製品の電極間の抵抗値測定のみ説明したが、上述 の実施例の構成とすることにより、複数の連数の抵抗器の電極を一度に接触状態 とすることができ、相隣接する抵抗器の互いの電極間の抵抗値も合わせて測定可 能である。 In the above description, only the measurement of the resistance value between the electrodes of one product has been described. However, by adopting the configuration of the above-mentioned embodiment, the electrodes of the resistors of a plurality of stations are brought into contact with each other at once. It is possible to measure the resistance value between the electrodes of adjacent resistors.
【0022】 この様に相隣接する抵抗器の互いの電極間の抵抗値も合わせて測定することに より、相隣接する2つの電極間又は抵抗間の導通試験を行うことができる。これ により、更に製品の良否判定を確実なものとできる。 即ち、上述した実施例における図3の工程4における1つの製品の電極間の抵 抗値の測定に加え、相隣接する製品の電極間の抵抗値も合わせて測定するように 構成すればよい。By thus measuring the resistance value between the electrodes of the resistors adjacent to each other, the continuity test between the two electrodes adjacent to each other or between the resistors can be performed. As a result, the quality of the product can be determined more reliably. That is, in addition to the measurement of the resistance value between the electrodes of one product in step 4 of FIG. 3 in the above-described embodiment, the resistance value between the electrodes of adjacent products may be measured together.
【0023】 これにより隣接製品間の導通検査も合わせて行うことができ、後処理での製品 分離工程等での不良発生を未然に防止できる。 以上説明した様に本実施例によれば、極小測定対象製品を4端子で検測できる とともに、任意の形状の製品の検測が簡単な調整のみで可能な極小ピツチチツプ 型抵抗器の抵抗値測定が可能となる。Accordingly, the continuity test between adjacent products can be performed together, and the occurrence of defects in the product separation process or the like in the post-treatment can be prevented. As described above, according to the present embodiment, it is possible to measure the minimum measurement target product with four terminals, and to measure the resistance value of the minimum pitch chip type resistor that can perform the measurement of the product of any shape by simple adjustment. Is possible.
【0024】 尚、以上の説明は抵抗器の抵抗値の測定を例に説明したが、本実施例装置は抵 抗器にのみ適用可能なのではなく、任意の電子部品の電極間の特性測定装置に適 用出来る。例えば、コンデンサチツプのコンデンサ容量の検測、リアクタンス素 子チツプのリアクタンス量の検測、複合インピーダンスの検測等、任意の電子部 品の電極間特性を検測する装置にそのまま適用可能なことは勿論である。In the above description, the measurement of the resistance value of the resistor is taken as an example. However, the device of this embodiment is not applicable only to the resistor, but a device for measuring characteristics between electrodes of arbitrary electronic components. Can be applied to. For example, it can be applied as it is to a device for measuring the inter-electrode characteristics of any electronic component, such as measuring the capacitance of a capacitor chip, measuring the reactance amount of a reactance element chip, measuring the complex impedance, etc. Of course.
【0025】 更に、極小チツプの検測にも限定されず、任意の形状の製品の特性の測定に適 用できることは勿論である。Furthermore, it is needless to say that the present invention is not limited to the inspection of a very small chip and can be applied to the measurement of the characteristics of a product having an arbitrary shape.
【0026】[0026]
以上説明したように本発明によれば、極小測定対象製品等を4端子で検測でき る。 As described above, according to the present invention, it is possible to inspect a product to be measured with a minimum value with four terminals.
【図1】本発明に係る第1実施例の検測端子を示す図で
あり、(A)は平面図、(B)は側面図である。FIG. 1 is a diagram showing a measuring terminal of a first embodiment according to the present invention, (A) is a plan view and (B) is a side view.
【図2】図1の(A)に示すA−A′面断面図である。FIG. 2 is a sectional view taken along the line AA ′ shown in FIG.
【図3】本実施例の検測端子を用いた抵抗値測定工程を
示す図である。FIG. 3 is a diagram showing a resistance value measuring process using the inspection terminal of the present embodiment.
【図4】、[Fig. 4]
【図5】従来の極小ピツチ製品の抵抗値測定方法を説明
する図である。FIG. 5 is a diagram illustrating a conventional method for measuring a resistance value of an extremely small pitch product.
1,2 端子ブロツク 11,12,21,22 導電部材 13,23 絶縁シート 10 製品である極小ピ
ツチチツプ型抵抗器 51a,51b 製品の電極 52a,52b コンタクトプロー
ブ 55a,55b 改造ピンセツト 60 抵抗値測定部1,2 terminal block 11,12,21,22 Conductive member 13,23 Insulation sheet 10 Miniature Pitch-type resistor 51a, 51b Product electrode 52a, 52b Contact probe 55a, 55b Modified pin set 60 Resistance value measurement unit
Claims (3)
が少なくとも該電極の幅以下の幅に成るように、測定装
置に接続可能な2つの導電性材料で構成された導電部材
を絶縁材料で構成された絶縁シート両面に固着してなる
検測端子を、検測対象チツプ製品の両電極にそれぞれ接
触させ、四端子検測可能なチツプ製品検測装置であつ
て、 前記検測端子は、前記検測対象チツプ製品の電極に前記
電極接触部位を圧接させた時に、所定弾性力で電極接触
部位が前記電極方向に押圧されるように形成されたバネ
機構を備え、 両電極毎の1対の測定端子を前記検測対象チツプ製品の
両電極に接触させて該電極間の特性を検測することを特
徴とするチツプ製品検測装置。1. A conductive member made of two conductive materials that can be connected to a measuring device is used as an insulating material so that a contact portion of the chip product to be measured with the electrode has a width at least equal to or less than the width of the electrode. A chip product inspection device capable of four-terminal inspection by contacting both electrodes of the chip product to be inspected with the inspection terminals fixed on both sides of the insulating sheet composed of , A spring mechanism formed so that the electrode contact portion is pressed toward the electrode by a predetermined elastic force when the electrode contact portion is pressed against the electrode of the chip product to be inspected. A chip product inspection device, characterized in that a pair of measuring terminals is brought into contact with both electrodes of the chip product to be inspected to measure characteristics between the electrodes.
り延出した立設部端部より横方向に形成された和挟み型
形状とすることを特徴とする請求項1記載のチツプ製品
検測装置。2. The chip product according to claim 1, wherein the spring mechanism of the inspection terminal has a Japanese sandwich shape formed laterally from the end of the standing portion extending from the electrode contact portion. Inspection device.
数分チツプ製品の電極間隔位置となるように配設する検
測端子支持部材を備え、該検測端子支持部材に前記検測
端子を少なくとも検測対象チツプ製品の連数分支持させ
てなることを特徴とする請求項1記載のチツプ製品検測
装置。3. A sensing terminal supporting member is provided, wherein the sensing terminal pair is arranged at least at an electrode interval position of the chip product by the number of consecutive chip products, and the sensing terminal supporting member is provided with the sensing terminal. 2. The chip product inspection device according to claim 1, wherein at least the same number of chips as the inspection target chip products are supported.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1991078375U JP2531261Y2 (en) | 1991-09-27 | 1991-09-27 | Chip network electronic component inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1991078375U JP2531261Y2 (en) | 1991-09-27 | 1991-09-27 | Chip network electronic component inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0528970U true JPH0528970U (en) | 1993-04-16 |
JP2531261Y2 JP2531261Y2 (en) | 1997-04-02 |
Family
ID=13660272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1991078375U Expired - Lifetime JP2531261Y2 (en) | 1991-09-27 | 1991-09-27 | Chip network electronic component inspection equipment |
Country Status (1)
Country | Link |
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JP (1) | JP2531261Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014020819A (en) * | 2012-07-13 | 2014-02-03 | Hioki Ee Corp | Electrode holding unit and measurement fixture |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04215070A (en) * | 1990-12-11 | 1992-08-05 | Nitto Kogyo Co Ltd | Measuring terminal for chip electronic component |
-
1991
- 1991-09-27 JP JP1991078375U patent/JP2531261Y2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04215070A (en) * | 1990-12-11 | 1992-08-05 | Nitto Kogyo Co Ltd | Measuring terminal for chip electronic component |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014020819A (en) * | 2012-07-13 | 2014-02-03 | Hioki Ee Corp | Electrode holding unit and measurement fixture |
Also Published As
Publication number | Publication date |
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JP2531261Y2 (en) | 1997-04-02 |
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