JPH05281074A - Piezoelectric pressure sensor - Google Patents
Piezoelectric pressure sensorInfo
- Publication number
- JPH05281074A JPH05281074A JP8357492A JP8357492A JPH05281074A JP H05281074 A JPH05281074 A JP H05281074A JP 8357492 A JP8357492 A JP 8357492A JP 8357492 A JP8357492 A JP 8357492A JP H05281074 A JPH05281074 A JP H05281074A
- Authority
- JP
- Japan
- Prior art keywords
- spring
- piezoelectric element
- fixing screw
- upper fixing
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は内燃機関のシリンダ内燃
焼圧力等の圧力検出に適した圧電型圧力センサに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric pressure sensor suitable for detecting pressure such as combustion pressure in a cylinder of an internal combustion engine.
【０００２】[0002]
【従来の技術】応力を加えて電荷を発生する圧電効果を
利用した圧電型圧力センサは、従来よりよく用いられて
いる。特に最近では内燃機関のシリンダ内燃焼圧力等の
検出に適した圧力センサの開発が盛んである。図１は従
来から内燃機関に用いられている圧電型圧力センサの基
本構成を示す。同図はセンサの縦断面図であり、センサ
筐体１０内部に設置された圧電素子１４は上部固定ネジ
Ａ（図中番号１１）によって圧力伝達部材１５を介して
ダイアフラム状に加工された受圧面１６の裏面に押しつ
けられて固定され、予備応力が与えられている。この予
備応力は特に内燃機関のシリンダ内燃焼圧力を計測する
場合には負圧を計測するためにも必要である。2. Description of the Related Art Piezoelectric pressure sensors that utilize the piezoelectric effect of applying stress to generate electric charge have been used more frequently than before. In particular, recently, a pressure sensor suitable for detecting the combustion pressure in the cylinder of an internal combustion engine has been actively developed. FIG. 1 shows the basic structure of a piezoelectric pressure sensor that has been conventionally used in an internal combustion engine. The figure is a vertical cross-sectional view of the sensor. The piezoelectric element 14 installed inside the sensor housing 10 is a pressure-receiving surface processed into a diaphragm shape by the upper fixing screw A (number 11 in the figure) through the pressure transmission member 15. The back surface of 16 is pressed and fixed, and prestressed. This prestress is also necessary to measure the negative pressure, especially when measuring the combustion pressure in the cylinder of the internal combustion engine.
【０００３】次に、その動作を説明する。センサ筐体１
０の外部から受圧面１６に印加された圧力は、圧力伝達
部材１５を介して圧電素子１４の内周部分を押し上げる
ように伝達される。ここで圧電素子１４の上端外周部は
上部固定ネジＡ１１により下方へ加圧されているため、
圧電素子１４に剪断力が加えられる。この応力に応じて
発生した電荷を電気信号として検出する構成となってい
る。Next, the operation will be described. Sensor housing 1
The pressure applied to the pressure receiving surface 16 from the outside of 0 is transmitted via the pressure transmitting member 15 so as to push up the inner peripheral portion of the piezoelectric element 14. Since the outer peripheral portion of the upper end of the piezoelectric element 14 is pressed downward by the upper fixing screw A11,
A shearing force is applied to the piezoelectric element 14. The electric charge generated in response to this stress is detected as an electric signal.
【０００４】ここで、発生した電荷を検出するための構
成を説明する。円筒形の圧電素子１４の内側面と外側面
には圧電素子内で発生し電荷を収集するための電極が設
けられ、応力に応じて発生した電荷はこの電極上に集め
られる。外側電極の電荷を検出するために、上部固定ネ
ジＡ１１に信号取出バネＢ１３を設け、この信号取出バ
ネＢ１３で圧電素子１４の外側面を挟むことによりコン
タクトをとり、外側電極をセンサ筺体にアースする。ま
た、内側電極の電荷を検出するために信号取出バネＡ１
２を圧電素子１４の円筒内部で広げて圧着することによ
り内側電極とコンタクトをとる。そして信号取出バネＡ
１２に半田付けしたリード線（図示せず）で信号を取り
出していた。Now, a structure for detecting the generated charges will be described. Electrodes for collecting electric charges generated in the piezoelectric element are provided on the inner side surface and the outer side surface of the cylindrical piezoelectric element 14, and the electric charges generated according to the stress are collected on the electrodes. In order to detect the electric charge of the outer electrode, a signal extraction spring B13 is provided on the upper fixing screw A11, and the outer surface of the piezoelectric element 14 is sandwiched by the signal extraction spring B13 to make contact, and the outer electrode is grounded to the sensor housing. .. Further, in order to detect the electric charge of the inner electrode, the signal extraction spring A1
2 is spread inside the cylinder of the piezoelectric element 14 and pressed to make contact with the inner electrode. And the signal extraction spring A
The signal was taken out by the lead wire (not shown) soldered to 12.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記の
ように上部固定ネジＡ１１と信号取出バネＢ１３を一体
整形品として製作すると、上部固定ネジＡ１１自体をバ
ネ材で作製しなければならず加工が困難であり、また信
号取出バネＢ１３に所要のバネ特性を与えることも難し
かった。加えて信号取出バネＢ１３が削り出しとなるた
め、バネを切削で作製すると圧延に因る金属組織の流れ
目を断ち切ることになり、バネのへたりも大きくなり易
い。これらの理由から、圧電素子１４の外側面と信号取
出バネＢ１３のコンタクトを高温下で長期間確保するに
は信頼性に問題があった。However, if the upper fixing screw A11 and the signal take-out spring B13 are manufactured as an integrally molded product as described above, the upper fixing screw A11 itself must be made of a spring material, which makes processing difficult. It was also difficult to give the signal extraction spring B13 a required spring characteristic. In addition, since the signal take-out spring B13 is cut out, if the spring is manufactured by cutting, the flow line of the metal structure due to rolling is cut off, and the spring is liable to become large. For these reasons, there is a problem in reliability to secure the contact between the outer surface of the piezoelectric element 14 and the signal take-out spring B13 for a long time at high temperature.
【０００６】本発明は、高温下で耐久性，信頼性に優れ
た圧電型圧力センサを提供することを目的とする。An object of the present invention is to provide a piezoelectric pressure sensor which is excellent in durability and reliability under high temperature.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するた
め、本願第１の発明では信号取出バネを上部固定ネジか
ら分離し、上部固定ネジによって素子と同時に締め付け
固定する事で圧電素子の外側面電極とコンタクトを取
る。In order to achieve the above object, in the first invention of the present application, the signal output spring is separated from the upper fixing screw, and the outer fixing surface of the piezoelectric element is fixed by fastening the upper fixing screw together with the element. Make contact with electrodes.
【０００８】第２の発明では圧電素子を固定している上
部固定ネジの上から信号取出バネを取り付け、バネ固定
ネジによってバネを固定する事で圧電素子の外側面電極
とコンタクトを取る。In the second aspect of the invention, a signal extraction spring is attached on the upper fixing screw fixing the piezoelectric element, and the spring is fixed by the spring fixing screw to make contact with the outer surface electrode of the piezoelectric element.
【０００９】[0009]
【作用】第１の発明における信号取出バネは上部固定ネ
ジから分離することにより、圧延材に曲げ加工を施すこ
とによりバネを形成できる。従って高温下で長期間使用
してもへたることがなく、耐久性，信頼性の高いコンタ
クトを実現できる。In the signal extracting spring according to the first aspect of the present invention, the spring can be formed by bending the rolled material by separating it from the upper fixing screw. Therefore, even if it is used for a long time at a high temperature, it does not sag, and a highly durable and reliable contact can be realized.
【００１０】また第２の発明により、第１の発明による
効果に加えて、まず上部固定ネジで完全に圧電素子を固
定した後に、信号取出バネを取り付けることができる。
従って、信号取出バネのコンタクト力調節により、コン
タクト力が圧力測定に与える影響を大きく低減できる。
また、組立精度も更に高めることができる。Further, according to the second invention, in addition to the effect of the first invention, the piezoelectric element can be completely fixed by the upper fixing screw first, and then the signal take-out spring can be attached.
Therefore, the influence of the contact force on the pressure measurement can be greatly reduced by adjusting the contact force of the signal extraction spring.
Moreover, the assembling accuracy can be further improved.
【００１１】[0011]
【実施例】まず、図面を参照して第１の発明の圧電型圧
力センサの一実施例について説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an embodiment of the piezoelectric pressure sensor of the first invention will be described with reference to the drawings.
【００１２】図２は第１の発明の実施例における圧電型
圧力センサの断面を示す。同図中１０は金属からなるセ
ンサ筺体であり、このセンサ筐体１０の一面にダイアフ
ラム状に加工された受圧面１６を設けている。この受圧
面１６は被測定領域、例えば内燃機関のシリンダ内等に
設置されている。センサ筐体１０の内部には絶縁材（例
えばセラミック）で形成された圧力伝達部材１５がその
一端を受圧面１６の裏面に接するように設けられ、他端
を円筒形の圧電素子１４に接するように設けられてい
る。また、この円筒形の圧電素子１４の下方内周部分は
圧力伝達部材１５により保持されている。さらに圧電素
子１４の上端外周部分はワッシャ２４を介し、上部固定
ネジＢ２１によって押さえ付けられている。この上部固
定ネジＢ２１の締め付け力によって圧電素子１４，圧力
伝達部材１５を受圧面１６に押し付け、各部材の固定及
び圧電素子１４への予備応力を印加している。また、ワ
ッシャ２４と上部固定ネジＢ２１の間には信号取出バネ
Ｃ２３が加圧固定され、その両端は圧電素子１４の外側
面電極とコンタクトしている。圧電素子１４の内側面電
極には信号取出バネＡ１２がコンタクトし、信号取出バ
ネＡ１２と信号取出バネＣ２３とは電気的に絶縁されて
いる。FIG. 2 shows a cross section of the piezoelectric type pressure sensor in the embodiment of the first invention. In the figure, 10 is a sensor housing made of metal, and a pressure receiving surface 16 processed into a diaphragm shape is provided on one surface of the sensor housing 10. The pressure receiving surface 16 is installed in the measured region, for example, in the cylinder of the internal combustion engine. A pressure transmission member 15 formed of an insulating material (eg, ceramic) is provided inside the sensor housing 10 so that one end thereof contacts the back surface of the pressure receiving surface 16 and the other end contacts the cylindrical piezoelectric element 14. It is provided in. The lower inner peripheral portion of the cylindrical piezoelectric element 14 is held by the pressure transmission member 15. Further, the outer peripheral portion of the upper end of the piezoelectric element 14 is pressed by the upper fixing screw B21 via the washer 24. By the tightening force of the upper fixing screw B21, the piezoelectric element 14 and the pressure transmitting member 15 are pressed against the pressure receiving surface 16, and each member is fixed and pre-stress is applied to the piezoelectric element 14. A signal output spring C23 is pressure-fixed between the washer 24 and the upper fixing screw B21, and both ends of the signal output spring C23 are in contact with the outer surface electrodes of the piezoelectric element 14. The signal take-out spring A12 is in contact with the inner side surface electrode of the piezoelectric element 14, and the signal take-out spring A12 and the signal take-out spring C23 are electrically insulated.
【００１３】図４に圧電素子の外側面電極からの信号取
出機構構成図を示す。次に、第１の発明の実施例の圧電
型圧力センサの動作について説明する。被測定領域の圧
力が受圧面１６に加わると、その力は圧力伝達部材１５
を介して圧電素子１４の下方内周部分に伝えられる。一
方、圧電素子１４の上方外周部分はワッシャ２４を介し
て上部固定ネジＢ２１によって押さえられているので、
圧電素子１４に剪断力が加えられ、この加えられた力に
応じた電荷が圧電素子１４に発生し、圧電素子１４の内
外周に設けられた電極上に集められる。内周電極上に集
められた電荷は内周電極にコンタクトしている信号取出
バネＡ１２によって取り出され、増幅回路に導かれる。
一方、外周電極上に集められた電荷は信号取出バネＣ２
３により上部固定ネジＢ２１を通してセンサ筺体１０に
アースされる。また、図４に示すように、信号取出バネ
Ｃ２３は波座金に腕を設けたような構造をしており、組
立に際しては１４圧電素子，ワッシャ２４と共に上部固
定ネジＢ２１下面でガイドされるので中心がずれる事は
ない。まず信号取出バネＣ２３はワッシャ２４と上部固
定ネジＢ２１の間に挟まれ、波座金状の部分の軽い変形
による反力で圧力伝達部材１５，圧電素子１４が固定さ
れ、更に上部固定ネジＢ２１を締めることで、信号取出
バネＣ２３の波座金状の部分が伸ばされ、その分腕の先
端が内側へ押し付けられ、圧電素子１４の外側面電極と
確実にコンタクトする。ここで用いられている信号取出
バネＣ２３は圧延された高温用バネ材に曲げ加工を施し
て作製されるため、長期間高温下で使用してもへたりが
小さい。一般に高温用バネ材は切削が困難であるが、上
記のように上部固定ネジＢ２１と信号取出用バネを分離
することで上部固定ネジＢ２１をバネ材で製作する必要
がなく、加工も容易になり、又高温耐久性，信頼性もア
ップするとこができる。FIG. 4 shows the structure of a signal extraction mechanism from the outer surface electrode of the piezoelectric element. Next, the operation of the piezoelectric pressure sensor of the first embodiment of the invention will be described. When the pressure in the measured region is applied to the pressure receiving surface 16, the force is applied to the pressure transmitting member 15
Is transmitted to the lower inner peripheral portion of the piezoelectric element 14 via. On the other hand, since the upper outer peripheral portion of the piezoelectric element 14 is pressed by the upper fixing screw B21 via the washer 24,
A shearing force is applied to the piezoelectric element 14, and electric charges corresponding to the applied force are generated in the piezoelectric element 14 and are collected on the electrodes provided on the inner and outer circumferences of the piezoelectric element 14. The electric charge collected on the inner peripheral electrode is taken out by the signal take-out spring A12 which is in contact with the inner peripheral electrode, and is guided to the amplifier circuit.
On the other hand, the charges collected on the outer peripheral electrode are the signal extraction spring C2.
3 is grounded to the sensor housing 10 through the upper fixing screw B21. Further, as shown in FIG. 4, the signal take-out spring C23 has a structure in which a wave washer is provided with an arm. At the time of assembly, the signal take-out spring C23 is guided by the lower surface of the upper fixing screw B21 together with the 14 piezoelectric elements and the washer 24. There is no deviation. First, the signal extraction spring C23 is sandwiched between the washer 24 and the upper fixing screw B21, the pressure transmitting member 15 and the piezoelectric element 14 are fixed by the reaction force due to the light deformation of the wave washer-shaped portion, and the upper fixing screw B21 is further tightened. As a result, the wave washer-shaped portion of the signal take-out spring C23 is extended, the tip of the arm is pressed inward by that amount, and the outer surface electrode of the piezoelectric element 14 is reliably contacted. Since the signal take-out spring C23 used here is manufactured by bending a rolled high temperature spring material, the fatigue is small even when used at high temperature for a long period of time. Generally, it is difficult to cut the high temperature spring material, but by separating the upper fixing screw B21 and the signal extracting spring as described above, it is not necessary to manufacture the upper fixing screw B21 with the spring material, and the machining becomes easy. In addition, high temperature durability and reliability can be improved.
【００１４】次に、第２の発明の圧電型圧力センサの一
実施例について説明する。図３は第２の発明の実施例に
おける圧電型圧力センサの断面を示す。図３に示した実
施例における圧電型圧力センサの構造が、図２に示した
第１の発明における実施例の圧電型圧力センサのものと
異なる点は、圧電素子１４の外側面電極とコンタクトし
ている信号取出バネの取付保持構造である。図３ではま
ず上部固定ネジＣ３１によって圧電素子１４，圧力伝達
部材１５を完全に加圧固定する。次に、上部から信号取
出バネＤ３３を挿入して、バネ固定ネジ３４で締め付け
固定する。図５に信号取出バネ付近の詳細図と示す。圧
電素子１４，圧力伝達部材１５の固定を上部固定ネジＣ
３１により直接行うことで、信号取出バネＤ３３取り付
けの際、圧電素子１４に加わっている予備荷重と独立に
バネのコンタクト力を調節でき、コンタクト力が圧電素
子１４に加わることによる圧力測定への影響を更に軽減
でき、また信号取出バネＤ３３を取り付ける際の圧電素
子１４のわずかな位置のズレも回避できるので、更に高
精度、信頼性の高い圧電型圧力センサを実現できる。Next, an embodiment of the piezoelectric type pressure sensor of the second invention will be described. FIG. 3 shows a cross section of a piezoelectric pressure sensor according to an embodiment of the second invention. The structure of the piezoelectric type pressure sensor in the embodiment shown in FIG. 3 is different from that of the piezoelectric type pressure sensor of the embodiment in the first invention shown in FIG. 2 in that it contacts the outer surface electrode of the piezoelectric element 14. It is a structure for attaching and holding the signal extraction spring. In FIG. 3, first, the piezoelectric element 14 and the pressure transmitting member 15 are completely pressed and fixed by the upper fixing screw C31. Next, the signal take-out spring D33 is inserted from the upper part and tightened and fixed by the spring fixing screw 34. FIG. 5 shows a detailed view around the signal extraction spring. The piezoelectric element 14 and the pressure transmitting member 15 are fixed to the upper fixing screw C.
By directly using 31, the contact force of the spring can be adjusted independently of the preload applied to the piezoelectric element 14 when the signal extraction spring D33 is attached, and the influence of the contact force on the piezoelectric element 14 on the pressure measurement. Can be further reduced, and a slight displacement of the piezoelectric element 14 at the time of mounting the signal extraction spring D33 can be avoided, so that a highly accurate and highly reliable piezoelectric pressure sensor can be realized.
【００１５】[0015]
【発明の効果】以上のように、信号取出バネを上部固定
ネジから分離し、バネ性圧延材で構成し、上部固定ネジ
で締め付け、圧電素子の外側面電極にコンタクトさせる
ことにより、高温耐久性，信頼性に優れた圧電型圧力セ
ンサを実現できる。As described above, the signal extraction spring is separated from the upper fixing screw, is made of a springy rolled material, is tightened with the upper fixing screw, and is brought into contact with the outer surface electrode of the piezoelectric element, thereby providing high temperature durability. It is possible to realize a piezoelectric pressure sensor with excellent reliability.
【００１６】また、上部固定ネジにより圧電素子，圧力
伝達部材を固定した後に、信号取出バネをバネ固定ネジ
により締め付け固定することで、バネのコンタクト力を
コントロールでき、更に高精度で信頼性の高い圧電型圧
力センサを実現できる。Further, the contact force of the spring can be controlled by fixing the piezoelectric element and the pressure transmitting member with the upper fixing screw and then tightening and fixing the signal take-out spring with the spring fixing screw, which is highly accurate and highly reliable. A piezoelectric pressure sensor can be realized.
【図１】従来例に置ける圧電型圧力センサの断面図FIG. 1 is a cross-sectional view of a piezoelectric pressure sensor in a conventional example.
【図２】第１の発明の一実施例における圧電型圧力セン
サの断面図FIG. 2 is a sectional view of a piezoelectric pressure sensor according to an embodiment of the first invention.
【図３】第２の発明の一実施例における圧電型圧力セン
サの断面図FIG. 3 is a sectional view of a piezoelectric pressure sensor according to an embodiment of the second invention.
【図４】第１の発明の実施例における圧電素子近傍の詳
細図FIG. 4 is a detailed view of the vicinity of the piezoelectric element in the embodiment of the first invention.
【図５】第２の発明の実施例における圧電素子近傍の詳
細図FIG. 5 is a detailed view of the vicinity of the piezoelectric element in the embodiment of the second invention.
１０ センサ筺体 １１ 上部固定ネジＡ １２ 信号取出バネＡ １３ 信号取出バネＢ １４ 圧電素子 １５ 圧力伝達部材 １６ 受圧面 ２１ 上部固定ネジＢ ２３ 信号取出バネＣ ２４ ワッシャ ３１ 上部固定ネジＣ ３３ 信号取出バネＤ 10 Sensor Housing 11 Upper Fixing Screw A 12 Signal Extraction Spring A 13 Signal Extraction Spring B 14 Piezoelectric Element 15 Pressure Transmission Member 16 Pressure Receiving Surface 21 Upper Fixing Screw B 23 Signal Extraction Spring C 24 Washer 31 Upper Fixing Screw C 33 Signal Extraction Spring D
Claims (2)
設けられかつ一端が前記受圧面の裏側の面に接する圧力
伝達部材と、前記筺体の内部に設けられかつ前記圧力伝
達部材の他端に設けられた圧電素子と、前記筺体の内部
に設けられかつ前記圧電素子の他端に設けられかつ前記
圧電素子の電極とコンタクトを取る腕を有した信号取出
バネと、前記筺体の内部に設けられかつ前記信号取出バ
ネの他端に設けられた上部固定ネジから構成され、前記
圧電素子の外側面電極に前記上部固定ネジの締め付け力
により前記信号取出バネの有する腕を前記圧電素子外側
面電極に圧接しコンタクトを取ることを特徴とする圧電
型圧力センサ。1. A housing having a pressure receiving surface, a pressure transmitting member provided inside the housing and having one end in contact with a surface on the back side of the pressure receiving surface, and a pressure transmitting member provided inside the housing and other than the pressure transmitting member. A piezoelectric element provided at an end, a signal extraction spring provided inside the housing and provided at the other end of the piezoelectric element and having an arm for contacting an electrode of the piezoelectric element, and inside the housing. The piezoelectric element is provided with an upper fixing screw provided on the other end of the signal extracting spring, and the arm of the signal extracting spring is attached to the outer surface electrode of the piezoelectric element by the tightening force of the upper fixing screw. A piezoelectric pressure sensor characterized by making pressure contact with an electrode to make a contact.
設けられかつ一端が前記受圧面の裏側の面に接する圧力
伝達部材と、前記筺体の内部に設けられかつ前記圧力伝
達部材の他端に設けられた圧電素子と、前記筺体の内部
に設けられかつ前記圧電素子の他端に設けられた上部固
定ネジと、前記筺体の内部に設けられかつ前記上部固定
ネジの他端に設けられかつ前記圧電素子の電極とコンタ
クトを取る腕を有した信号取出バネと、前記筺体の内部
に設けられかつ前記信号取出バネの他端に設けられたバ
ネ固定ネジとから構成され、前記圧電素子，前記圧力伝
達部材を固定している前記上部固定ネジの上方から前記
信号取出バネを挿入し前記バネ固定ネジで締め付け固定
し、この締め付け力により前記信号取出バネの腕を前記
圧電素子外側面電極に圧接してコンタクトを取ることを
特徴とする圧電型圧力センサ。2. A housing having a pressure receiving surface, a pressure transmitting member provided inside the housing and having one end in contact with a surface on the back side of the pressure receiving surface, and a pressure transmitting member provided inside the housing and other than the pressure transmitting member. A piezoelectric element provided at an end, an upper fixing screw provided inside the housing and provided at the other end of the piezoelectric element, and an upper fixing screw provided inside the housing and provided at the other end of the upper fixing screw. And a signal extraction spring having an arm for contacting the electrode of the piezoelectric element, and a spring fixing screw provided inside the housing and provided at the other end of the signal extraction spring, the piezoelectric element, The signal take-out spring is inserted from above the upper fixing screw fixing the pressure transmitting member and tightened and fixed by the spring fixing screw, and the tightening force causes the arm of the signal take-out spring to move to the outer surface of the piezoelectric element. I pressed against the piezoelectric pressure sensor, characterized in that to contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8357492A JPH05281074A (en) | 1992-04-06 | 1992-04-06 | Piezoelectric pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8357492A JPH05281074A (en) | 1992-04-06 | 1992-04-06 | Piezoelectric pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05281074A true JPH05281074A (en) | 1993-10-29 |
Family
ID=13806282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8357492A Pending JPH05281074A (en) | 1992-04-06 | 1992-04-06 | Piezoelectric pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05281074A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107152338A (en) * | 2016-03-03 | 2017-09-12 | 丰田自动车株式会社 | Internal combustion engine |
-
1992
- 1992-04-06 JP JP8357492A patent/JPH05281074A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107152338A (en) * | 2016-03-03 | 2017-09-12 | 丰田自动车株式会社 | Internal combustion engine |
| CN107152338B (en) * | 2016-03-03 | 2019-08-23 | 丰田自动车株式会社 | Internal combustion engine |
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