JPH05274953A - Electrostatically driven toggle switch - Google Patents

Electrostatically driven toggle switch

Info

Publication number
JPH05274953A
JPH05274953A JP9868492A JP9868492A JPH05274953A JP H05274953 A JPH05274953 A JP H05274953A JP 9868492 A JP9868492 A JP 9868492A JP 9868492 A JP9868492 A JP 9868492A JP H05274953 A JPH05274953 A JP H05274953A
Authority
JP
Japan
Prior art keywords
movable
electrode
fixed
contact
toggle switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9868492A
Other languages
Japanese (ja)
Inventor
Hiroshi Hosaka
寛 保坂
Hiroki Kuwano
博喜 桑野
Keiichi Yanagisawa
佳一 柳沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9868492A priority Critical patent/JPH05274953A/en
Publication of JPH05274953A publication Critical patent/JPH05274953A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Micromachines (AREA)

Abstract

PURPOSE:To eliminate the necessity of power consumption in holding contacts in a conducting or nonconducting state, electrically control switching of the contacts and make the structure of a toggle switch small by providing a fixed portion having a fixed contact and a fixed electrode, and a moving portion having a movable contact and a movable electrode. CONSTITUTION:A toggle switch, which holds a fixed contact 20 and a movable contact 50 in a conducting or nonconducting state by means of a spring, is provided with a fixed portion 10 having the contact 20 and a fixed electrode 30 and a movable portion having the contact 50 and a movable electrode 60. When a potential difference is applied between the electrodes 30, 60 from outside the toggle switch, electrostatic forces are generated between the electrodes 30, 60 and the movable portion 40 moves against the spring, switching the conducting state to the nonconducting state or vice versa. Thereby switching of the contacts can be controlled electrically, and application of the potential difference between the electrodes 30, 60 is required only at the switching of the contacts, so power consumption is not required in holding the contacts in the conducting or nonducting state, and the need for a coil for an electromagnet is eliminated, whereby the whole structure can be made smaller.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、各種電子機器に使用さ
れるトグルスイッチに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a toggle switch used in various electronic devices.

【０００２】[0002]

【従来技術】従来、電子機器のスイッチとしては、電磁
リレーと半導体リレーとが使用されている。電磁リレー
は、固定接点と可動接点と内蔵ばねと内蔵電磁石とで構
成され、通常は、両接点が内蔵ばねによって引き離さ
れ、両接点が切断されており、この状態から両接点を接
触させようとするには、内蔵電磁石を動作させることに
よって固定接点側に可動接点を引きつける。ここで、内
蔵電磁石の動作を継続することによって、可動接点と固
定接点との接触状態が保持され、つまり、内蔵電磁石の
動作を停止すれば、可動接点と固定接点との接触状態が
解除され、両接点が切断される。2. Description of the Related Art Conventionally, electromagnetic relays and semiconductor relays have been used as switches for electronic equipment. An electromagnetic relay consists of a fixed contact, a movable contact, a built-in spring, and a built-in electromagnet.Usually, both contacts are separated by the built-in spring and both contacts are cut. To do so, the movable contact is attracted to the fixed contact side by operating the built-in electromagnet. Here, by continuing the operation of the built-in electromagnet, the contact state between the movable contact and the fixed contact is maintained, that is, if the operation of the built-in electromagnet is stopped, the contact state between the movable contact and the fixed contact is released, Both contacts are disconnected.

【０００３】一方、半導体スイッチにおいては、半導体
上に設けられた２つの接点の間は通常は、非導通状態に
あり、これを導通状態にするには、これらの中間に電圧
を加えて、半導体中の正、または負の電荷密度を増加さ
せて半導体の抵抗を減少させる。On the other hand, in a semiconductor switch, normally, the two contacts provided on the semiconductor are in a non-conducting state, and in order to bring them into a conducting state, a voltage is applied to the middle of them and the semiconductor is turned on. Increasing the positive or negative charge density therein reduces the resistance of the semiconductor.

【０００４】[0004]

【発明が解決しようとする課題】上記従来のスイッチに
おいて、導通状態を保持するには、本来の信号の他に制
御用の電力が必要であり、その導通状態を保持している
間中、その電力が消費される。このために、交換機のよ
うに多数のスイッチを使用する場合、スイッチ操作を行
なうために大量の電力が消費され、発熱量が大きくな
り、冷却用のファンが必要になるという問題があり、ま
すます消費電力が大きくなるとともに、その装置の寸法
も大きくなるという問題がある。また、携帯形の電子機
器においては、これらスイッチを制御する電力を供給す
るために電源が大型化し、機器の携帯性が損なわれると
いう問題がある。In the above-mentioned conventional switch, in order to maintain the conductive state, power for control is required in addition to the original signal, and while the conductive state is maintained, Power is consumed. Therefore, when using a large number of switches like an exchange, there is a problem that a large amount of power is consumed to operate the switches, the amount of heat generated is large, and a cooling fan is required. There is a problem that power consumption increases and the size of the device also increases. Further, in the portable electronic device, there is a problem that the power source becomes large in order to supply the power for controlling these switches, and the portability of the device is impaired.

【０００５】ところで、接点の導通状態または非導通状
態を保持するために、外力も電力の消費をも必要としな
いスイッチとして、トグルスイッチが知られている。こ
のトグルスイッチの一例を図８に示してあり、このトグ
ルスイッチは、可動電極１が可動片１Ｌに設けられ、固
定電極２がケースＣに設けられ、可動片１Ｌは回転軸１
Ｓで軸支され、可動電極１は回転軸１Ｓを介して入出力
端子４に接続され、固定電極２は入出力端子５に接続さ
れている。また、圧縮ばね３が可動片１Ｌの下部を押し
上げ、可動片１Ｌをその左右２つの位置で安定に静止す
るように作用し、可動電極１が固定電極２に接触してい
るときがトグルスイッチの導通状態であり、可動電極１
が固定電極２と反対側に位置しているときがトグルスイ
ッチの非導通状態である。By the way, a toggle switch is known as a switch that requires neither external force nor power consumption in order to maintain the conductive state or the non-conductive state of the contacts. An example of this toggle switch is shown in FIG. 8. In this toggle switch, the movable electrode 1 is provided on the movable piece 1L, the fixed electrode 2 is provided on the case C, and the movable piece 1L is the rotating shaft 1L.
The movable electrode 1 is pivotally supported by S, the movable electrode 1 is connected to the input / output terminal 4 via the rotary shaft 1S, and the fixed electrode 2 is connected to the input / output terminal 5. Further, the compression spring 3 pushes up the lower part of the movable piece 1L, acts so as to stably stop the movable piece 1L at the two positions on the left and right, and when the movable electrode 1 is in contact with the fixed electrode 2, the toggle switch operates. Conductive state, movable electrode 1
When the switch is located on the opposite side of the fixed electrode 2, the toggle switch is in a non-conductive state.

【０００６】このように、上記従来のトグルスイッチに
おいて、導通状態を保持するためには、外部から電力を
供給する必要がないという利点があるものの、接点の切
換を人力に頼るために、電子機器の内部スイッチとして
使用することができないという問題がある。なお、従来
の電磁リレーと組合せることが考えられ、つまり、上記
従来のトグルスイッチに電磁石を内蔵させ、スイッチの
切換時のみ、電磁石を動作させるようにすることが考え
られるが、このようにすると、電磁石としてコイルを必
要とし、このコイルのために構造が大きくなり、電子機
器の部品としては実用的ではないという問題が残る。As described above, in the conventional toggle switch described above, although there is an advantage that it is not necessary to supply electric power from the outside in order to maintain the conduction state, the electronic device is required to switch the contact point manually. There is a problem that it cannot be used as an internal switch. It is possible to combine it with a conventional electromagnetic relay, that is, it is conceivable to incorporate an electromagnet into the conventional toggle switch and operate the electromagnet only when the switch is switched. However, a coil is required as an electromagnet, and the structure becomes large due to this coil, and there remains a problem that it is not practical as a component of electronic equipment.

【０００７】本発明は、接点の導通状態または非導通状
態を保持する場合に電力の消費を必要とせず、接点の切
換を電気的に制御でき、しかも構造が小さいトグルスイ
ッチを提供することを目的とするものである。It is an object of the present invention to provide a toggle switch which can electrically control switching of contacts without requiring power consumption when the contacts are held in a conducting state or a non-conducting state and has a small structure. It is what

【０００８】[0008]

【課題を解決するための手段】本発明は、固定接点と可
動接点との間の導通状態または非導通状態をばねによっ
て保持するトグルスイッチにおいて、固定部に固定接点
と固定電極とを有し、可動部に可動接点と可動電極とを
有し、トグルスイッチの外部から、固定電極と可動電極
との間に電位差が加えられたときに、固定電極と可動電
極との間に静電気力が発生し、ばねに抗して可動部が動
き、導通状態、非導通状態の切換を行なうものである。SUMMARY OF THE INVENTION The present invention is a toggle switch for holding a conducting state or a non-conducting state between a fixed contact and a movable contact by a spring, the fixed switch having a fixed contact and a fixed electrode, The movable part has a movable contact and a movable electrode, and when a potential difference is applied between the fixed electrode and the movable electrode from outside the toggle switch, electrostatic force is generated between the fixed electrode and the movable electrode. The movable part moves against the spring to switch between a conductive state and a non-conductive state.

【０００９】[0009]

【作用】本発明は、固定部に固定接点と固定電極とを有
し、可動部に可動接点と可動電極とを有し、トグルスイ
ッチの外部から、固定電極と可動電極との間に電位差が
加えられたときに、固定電極と可動電極との間に静電気
力が発生し、ばねに抗して可動部が動き、導通状態、非
導通状態の切換を行なうので、接点の切換を電気的に制
御できることは勿論のこと、接点の切換時にのみ固定電
極と可動電極との間に電位差を加えればよく、接点の導
通状態または非導通状態を保持する場合に電力の消費を
必要とせず、しかも電磁石用のコイルを必要としないの
でトグルスイッチ全体の構造が小さい。According to the present invention, the fixed portion has the fixed contact and the fixed electrode, the movable portion has the movable contact and the movable electrode, and a potential difference is generated between the fixed electrode and the movable electrode from the outside of the toggle switch. When applied, an electrostatic force is generated between the fixed electrode and the movable electrode, the movable part moves against the spring, and switches between the conducting state and the non-conducting state. It is of course possible to control, and it is sufficient to apply a potential difference between the fixed electrode and the movable electrode only at the time of switching the contact point, so that power consumption is not required when maintaining the contact state or non-conduction state of the contact point, and moreover, the electromagnet. The structure of the toggle switch as a whole is small because it does not require a coil.

【００１０】[0010]

【実施例】図１は、本発明の一実施例の説明図であり、
図２、図３、図４、図５は、上記実施例を分解した場合
の各部分の図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view of an embodiment of the present invention.
2, FIG. 3, FIG. 4 and FIG. 5 are views of respective parts when the above embodiment is disassembled.

【００１１】上記実施例は、大きく分けると、固定部１
０と可動部４０と鋸歯状ばね７０と板ばね７１とで構成
されている。固定部１０は、図２に示す基台１１と、図
３に示す枠体１２とで構成され、可動部４０には、図４
に示す可動接点５０と可動電極６０とが設けられてい
る。The above embodiment is roughly divided into the fixing portion 1
0, the movable portion 40, the saw-toothed spring 70, and the leaf spring 71. The fixed portion 10 includes a base 11 shown in FIG. 2 and a frame body 12 shown in FIG.
The movable contact 50 and the movable electrode 60 shown in are provided.

【００１２】基台１１は、シリコン製の板であり、この
上に、図２に示すように、櫛歯状の固定電極３０、線３
１、制御端子Ｔ３が設けられ、これらはアルミニウムで
作られ、スパッタリング等で基台１１に貼りつけられて
いる。枠体１２は、シリコン製の板であって、固定接点
２０、線２１、出力端子Ｔ２が設けられている。The base 11 is a silicon plate, on which a comb-shaped fixed electrode 30 and a wire 3 are provided, as shown in FIG.
1. A control terminal T3 is provided, which is made of aluminum and is attached to the base 11 by sputtering or the like. The frame 12 is a plate made of silicon, and is provided with a fixed contact 20, a wire 21, and an output terminal T2.

【００１３】可動部４０は、シリコンで構成され、その
表（おもて）面に可動接点５０が貼りつけられ、その裏
面に櫛歯状の可動電極６０が貼りつけられ、この可動電
極６０は、可動部４０の裏面に設けられたアルミニウム
線６１を介して、制御端子Ｔ４に接続されている。な
お、可動電極６０、線６１、制御端子Ｔ４は、アルミニ
ウムで作られ、スパッタリング等で可動部４０、鋸歯状
ばね７０、枠体１２の各裏面に貼りつけられている。The movable portion 40 is made of silicon, a movable contact 50 is attached to its front surface, and a comb-teeth-shaped movable electrode 60 is attached to its back surface. , Is connected to the control terminal T4 via an aluminum wire 61 provided on the back surface of the movable portion 40. The movable electrode 60, the wire 61, and the control terminal T4 are made of aluminum and are attached to the back surface of the movable portion 40, the sawtooth spring 70, and the frame 12 by sputtering or the like.

【００１４】鋸歯状ばね７０、板ばね７１は、シリコン
で構成され、板状のシリコンをエッチングして枠体１２
を作る過程で、中央のくり貫き部１２ａを設けるときに
可動部４０とともに作られるものであり、固定接点２０
と可動接点５０との間の導通状態または非導通状態を保
持するばねである。これ以外の製造方法として、鋸歯状
ばね７０、板ばね７１、可動部４０を除く枠体１２を作
り、鋸歯状ばね７０、板ばね７１、可動部４０の結合体
を枠体１２に固着するようにしてもよい。The sawtooth spring 70 and the leaf spring 71 are made of silicon, and the frame 12 is formed by etching the plate-shaped silicon.
In the process of making the hollow part 12a, it is made together with the movable part 40 when the central hollow part 12a is provided.
It is a spring that maintains a conductive state or a non-conductive state between the movable contact 50 and the movable contact 50. As another manufacturing method, the frame body 12 excluding the sawtooth spring 70, the leaf spring 71, and the movable portion 40 is made, and the combined body of the sawtooth spring 70, the leaf spring 71, and the movable portion 40 is fixed to the frame body 12. You can

【００１５】制御端子Ｔ３、Ｔ４は、上記実施例である
トグルスイッチの外部から固定電極３０と可動電極６０
との間に電位差を加えるための端子であり、この電位差
によって、固定電極３０と可動電極６０との間に静電気
力が発生し、ばね７０に抗して可動部４０が動き、導通
状態、非導通状態の切換が行なわれるようになってい
る。The control terminals T3 and T4 are connected to the fixed electrode 30 and the movable electrode 60 from the outside of the toggle switch of the above embodiment.
Is a terminal for applying a potential difference between the movable electrode 40 and the fixed electrode 30 and the movable electrode 60 due to this potential difference, the movable portion 40 moves against the spring 70, and the conductive portion is in a non-conductive state. The conduction state is switched.

【００１６】なお、固定電極３０と可動電極６０とは、
ピッチが互いに等しい櫛歯状を有し、その櫛歯のピッチ
は、可動部４０の移動量よりも長く、可動部４０がその
可動範囲の中央に存在するときに、固定電極３０の櫛歯
の中心位置と可動電極６０の櫛歯の中心位置とが一致す
るようになっている。The fixed electrode 30 and the movable electrode 60 are
The comb teeth have the same pitch, and the pitch of the comb teeth is longer than the moving amount of the movable portion 40. When the movable portion 40 is in the center of its movable range, the comb teeth of the fixed electrode 30 The center position and the center position of the comb teeth of the movable electrode 60 are made to coincide with each other.

【００１７】次に、上記実施例の構造の理解を容易にす
るために、上記実施例を製造する手順について説明す
る。Next, in order to facilitate understanding of the structure of the above-mentioned embodiment, a procedure for manufacturing the above-mentioned embodiment will be described.

【００１８】まず、図２に示すように、一枚のシリコン
からなる基台１１にアルミニウムのスパッタリングによ
って、固定電極３０、制御端子Ｔ３、固定電極３０と制
御端子Ｔ３とを接続する線３１を堆積させる。First, as shown in FIG. 2, a fixed electrode 30, a control terminal T3, and a wire 31 for connecting the fixed electrode 30 and the control terminal T3 are deposited on a base 11 made of silicon by sputtering aluminum. Let

【００１９】一方、図３に示すように、別の一枚のシリ
コン板をエッチングして、枠体１２と可動部４０と鋸歯
状ばね７０と板ばね７１とを残して他の部分をくり貫
く。そして、図４に示すように、枠体１２の表（おも
て）面の下部に、アルミニウムのスパッタリングによっ
て、固定接点２０と、出力端子Ｔ２と、固定接点２０と
出力端子Ｔ２とを接続する線２１とを堆積させ、可動部
４０の表（おもて）面の下部に、アルミニウムのスパッ
タリングによって可動接点５０を堆積させ、枠体１２の
左端に、アルミニウムのスパッタリングによって入力端
子Ｔ１を堆積させ、このとき同時に、線５１を板ばね７
１の上にスパッタリングによって堆積させ、可動接点５
０と入力端子Ｔ１とを接続する。また、可動部４０、鋸
歯状ばね７０のそれぞれの裏面に、アルミニウムのスパ
ッタリングによって可動電極６０、線６１を堆積させ、
この線６１は制御端子Ｔ４まで延びている。On the other hand, as shown in FIG. 3, another silicon plate is etched so that the frame 12, the movable portion 40, the serrated spring 70 and the leaf spring 71 are left and the other portions are hollowed out. .. Then, as shown in FIG. 4, the fixed contact 20, the output terminal T2, and the fixed contact 20 and the output terminal T2 are connected to the lower portion of the front (front) surface of the frame body 12 by sputtering aluminum. The wire 21 is deposited, the movable contact 50 is deposited on the lower part of the front surface of the movable part 40 by aluminum sputtering, and the input terminal T1 is deposited on the left end of the frame 12 by aluminum sputtering. , At the same time, connect the wire 51 to the leaf spring 7
The movable contact 5 is deposited on top of the movable contact 5 by sputtering.
0 and the input terminal T1 are connected. In addition, the movable electrode 60 and the wire 61 are deposited on the back surfaces of the movable portion 40 and the sawtooth spring 70 by aluminum sputtering,
This line 61 extends to the control terminal T4.

【００２０】そして、図４に示すものを図２に示すもの
の上に重ねる。この場合、固定電極３０と可動電極６０
との間には微小な隙間（たとえば数マイクロメータ）を
形成し、かつ、可動部４０がその可動範囲の中央に存在
するときには、固定電極３０の櫛歯の中心位置と可動電
極６０の櫛歯の中心位置とが一致するように固定する。
このように固定するには、たとえば、枠体１２と基台１
１との間に上記隙間と同じ厚さのシリコンフィルムを挟
み、枠体１２、基台１１、シリコンフィルムの３者を陽
極接合により接着すればよい。枠体１２は、図３に示す
もののうち、可動部４０、鋸歯状ばね７０、板ばね７１
を除いた枠部分であるので、枠体１２と基台１１との間
に上記シリコンフィルムを挟んだときに、固定電極３０
と可動電極６０との間に微小な隙間を形成することがで
きる。なお、図５では、理解を容易にするために、線６
１と制御端子Ｔ４とを省略してある。また、制御端子Ｔ
４はアースされている。Then, the one shown in FIG. 4 is overlaid on the one shown in FIG. In this case, the fixed electrode 30 and the movable electrode 60
When a small gap (for example, several micrometers) is formed between the movable electrode 40 and the movable portion 40 in the center of its movable range, the center position of the comb teeth of the fixed electrode 30 and the comb tooth of the movable electrode 60 are formed. Fix it so that its center position matches.
To fix in this way, for example, the frame 12 and the base 1
A silicon film having the same thickness as the above gap may be sandwiched between the three and the frame 12, the base 11, and the silicon film to be bonded by anodic bonding. The frame 12 includes the movable part 40, the sawtooth spring 70, and the leaf spring 71 among those shown in FIG.
Since it is a frame portion excluding the fixed electrode 30, when the silicon film is sandwiched between the frame body 12 and the base 11, the fixed electrode 30
A minute gap can be formed between the movable electrode 60 and the movable electrode 60. It should be noted that in FIG.
1 and the control terminal T4 are omitted. In addition, the control terminal T
4 is grounded.

【００２１】次に、上記実施例の動作について説明す
る。Next, the operation of the above embodiment will be described.

【００２２】図６は、上記実施例の動作説明図であり、
制御端子Ｔ３、Ｔ４の間に電圧を印加したときに、入力
端子Ｔ１と出力端子Ｔ２との間における導通状態の時間
変化を示してある。FIG. 6 is a diagram for explaining the operation of the above embodiment.
The figure shows the time change of the conduction state between the input terminal T1 and the output terminal T2 when a voltage is applied between the control terminals T3 and T4.

【００２３】まず、図６に示す時刻ｔ１において、制御
端子Ｔ３の電圧がアースレベルであり、固定電極３０と
可動電極６０とは同じ電位であり、可動電極６０には静
電気力が発生しない。このときに鋸歯状ばね７０は圧縮
された状態にあるから、これが伸びようとして、可動部
４０を上または下に押しつける。そして、可動部４０は
図１に示してあるように、上にもち上がっているものと
すると、固定接点２０と可動接点５０とが離れているか
ら、入力端子Ｔ１と出力端子Ｔ２とは非導通状態になっ
ている。First, at time t1 shown in FIG. 6, the voltage of the control terminal T3 is at the ground level, the fixed electrode 30 and the movable electrode 60 are at the same potential, and no electrostatic force is generated on the movable electrode 60. At this time, since the saw-tooth spring 70 is in a compressed state, the saw-tooth spring 70 tries to expand and presses the movable portion 40 upward or downward. As shown in FIG. 1, if the movable portion 40 is lifted up, the fixed contact 20 and the movable contact 50 are separated from each other, so that the input terminal T1 and the output terminal T2 are not electrically connected. It is in a state.

【００２４】そして、時刻ｔ２において、制御端子Ｔ３
に正の電圧を印加すると、可動電極６０には、アースを
通って逆符号の電荷が発生し、固定電極３０と可動電極
６０とが静電気力によって引き合い、可動片４０が下へ
の移動を開始する。時刻ｔ３において、可動部４０がそ
の移動範囲の中央付近に移動し、制御端子Ｔ３の電位が
アースに落とされるので、固定電極３０と可動電極６０
との間に静電気力が発生しなくなるが、慣性力によって
可動部４０が引き続き下に押され、可動接点５０が固定
接点２０に当たるまで、可動部４０が下への移動を続行
する。Then, at time t2, the control terminal T3
When a positive voltage is applied to the movable electrode 60, an electric charge of the opposite sign is generated in the movable electrode 60 through the ground, the fixed electrode 30 and the movable electrode 60 are attracted by the electrostatic force, and the movable piece 40 starts moving downward. To do. At time t3, the movable portion 40 moves to the vicinity of the center of its moving range, and the potential of the control terminal T3 is dropped to the ground, so that the fixed electrode 30 and the movable electrode 60.
Although no electrostatic force is generated between the movable part 40 and the movable part 40, the movable part 40 continues to move downward until the movable contact 50 contacts the fixed contact 20 by the inertial force of the movable part 40.

【００２５】時刻ｔ４において、可動接点５０が固定接
点２０に接触し、入力端子Ｔ１と出力端子Ｔ２との間は
導通状態になる。可動部４０は鋸歯状ばね７０によって
下方向に押しつけられているので、外部から力を加えな
くても、可動接点５０と固定接点２０とは安定して接触
し続け、導通状態が保持される。At time t4, the movable contact 50 comes into contact with the fixed contact 20 and the input terminal T1 and the output terminal T2 are brought into conduction. Since the movable portion 40 is pressed downward by the saw-toothed spring 70, the movable contact 50 and the fixed contact 20 continue to be in stable contact with each other even if no external force is applied, and the conductive state is maintained.

【００２６】時刻ｔ５において、制御端子Ｔ３に正の電
圧を印加すると、上記とは逆の経過を経て可動部４０が
上方に動き、入力端子Ｔ１と出力端子Ｔ２とは非導通状
態になり、可動部４０がその移動範囲の中央から上方に
移動すると、制御端子Ｔ３への電圧印加を中止しても、
ばね力によってこの状態が安定に保持される。以下、制
御端子Ｔ３に電圧を印加する度に、可動部４０が上下に
移動し、可動接点５０、固定接点２０間の導通、非導通
が入れ換わる。At time t5, when a positive voltage is applied to the control terminal T3, the movable portion 40 moves upward through a course opposite to the above, and the input terminal T1 and the output terminal T2 become non-conductive and movable. When the part 40 moves upward from the center of its moving range, even if the voltage application to the control terminal T3 is stopped,
This state is stably maintained by the spring force. Thereafter, each time a voltage is applied to the control terminal T3, the movable portion 40 moves up and down, and conduction and non-conduction between the movable contact 50 and the fixed contact 20 are switched.

【００２７】上記実施例において、制御端子Ｔ３には、
可動接点５０、固定接点２０間の導通、非導通を切り換
える瞬間にのみ、電圧を印加すればよく、その導通状
態、非導通状態を保持するためには電圧の印加を必要と
しないので、従来の電磁リレー、半導体スイッチに比べ
て、消費電力を著しく節約できる。また、上記実施例
は、接点の切換を電気的に制御でき、しかもコイルを必
要としないのでトグルスイッチ全体の構造を小さくする
ことができる。In the above embodiment, the control terminal T3 has
It is sufficient to apply the voltage only at the moment when the movable contact 50 and the fixed contact 20 are switched between conduction and non-conduction, and it is not necessary to apply the voltage to maintain the conduction state and the non-conduction state. Compared to electromagnetic relays and semiconductor switches, power consumption can be saved significantly. Further, in the above-mentioned embodiment, the switching of the contacts can be electrically controlled, and since the coil is not required, the structure of the toggle switch as a whole can be reduced.

【００２８】ところで、上記実施例は、接点の切り換え
に静電気力を利用しているが、電極構造として櫛歯形状
を採用していることによって、その静電気力を著しく増
加させることができる。つまり、図７に示すように、固
定電極３０と可動電極６０とがずれて対向するときに、
これらに電位差を与えると、両電極３０、６０のずれを
減少させる方向に静電気力が働く。電極に働く力Ｆは、 Ｆ＝εｂＶ2 ／２ｄ ……（１） で与えられる（ただし、周囲媒質の誘電率をε、電極幅
をｂ、電位差をＶ、電極間の隙間をｄ、電極の長さをＬ
１、Ｌ２、電極が重なる長さをａとする）。By the way, in the above-mentioned embodiment, the electrostatic force is used for switching the contacts, but by adopting the comb-teeth shape as the electrode structure, the electrostatic force can be remarkably increased. That is, as shown in FIG. 7, when the fixed electrode 30 and the movable electrode 60 are displaced and face each other,
When a potential difference is applied to these, an electrostatic force acts in a direction to reduce the displacement between the electrodes 30 and 60. The force F acting on the electrodes is given by F = εbV 2 / 2d (1) (where, the permittivity of the surrounding medium is ε, the electrode width is b, the potential difference is V, the gap between the electrodes is d, the electrode gap is Length is L
1, L2, and the length at which the electrodes overlap is a).

【００２９】この場合、（１）式から、電極の長さＬ
１、Ｌ２、電極が重なる長さａは電極に働く力Ｆには無
関係である。また、電極に働く力Ｆは１組の電極毎に発
生する力であり、電極の組数を増やせば、その組数に比
例して力Ｆが増加し、つまり、櫛歯の数に比例して力Ｆ
が増加する。したがって、電極が単純な長方形である場
合よりも、電極を櫛歯状に形成した場合の方が駆動力が
増加する。In this case, from the formula (1), the electrode length L
1, L2, the overlapping length a of the electrodes is independent of the force F acting on the electrodes. Further, the force F acting on the electrodes is a force generated for each set of electrodes, and when the number of sets of electrodes is increased, the force F is increased in proportion to the number of sets, that is, in proportion to the number of comb teeth. Power F
Will increase. Therefore, the driving force is more increased when the electrodes are formed in a comb shape than when the electrodes are simple rectangles.

【００３０】さらに、可動部４０を微小化すれば、静電
気力の効果をさらに高めることができる。すなわち、全
体の形状を相似形として寸法を微小化しても、（１）式
のように、力Ｆはｂ／ｄに比例するから、静電気力は変
化しない。一方、これに抗するばね力Ｐは、 Ｐ＝Ｇｅ4 δ／８ＮＤ3 ……（２） で与えられる（ただし、荷重をＰ、ばね材料の横弾性係
数をＧ、線径をｅ、たわみをδ、巻数をＮ、コイルの直
径をＤとする）。そして、形状を相似形に保って微小化
した場合、（２）式中、ばね材料の横弾性係数Ｇは寸法
に依存せず、線径ｅ、たわみδは寸法に比例し、コイル
の直径Ｄは（２）式から３乗に比例する。したがって、
（２）式において、その分子が寸法の５乗に比例し、そ
の分母が寸法の３乗に比例するので、結局、（２）式は
寸法の２乗に比例し、したがって、ばねの荷重Ｐは寸法
の２乗に比例して小さくなる。また、外部からの振動等
による外乱力は、可動部４０の慣性力で与えられるか
ら、可動部４０の重量、すなわち寸法の３乗に比例して
減少する。このために、寸法を小さくすれば、静電気力
の影響が他の力に比べて相対的に大きくなる。このため
に、接点の切り換えに要する電圧を著しく低減すること
ができる。なお、１ミリメートル以下の寸法で可動部４
０を製造し、これにばね７０、７１や接点２０、５０を
備えること等は、現在のフォトリソグラフィー技術によ
って容易に実現できる。Further, if the movable portion 40 is miniaturized, the effect of electrostatic force can be further enhanced. That is, even if the overall shape is made similar and the size is reduced, the electrostatic force does not change because the force F is proportional to b / d as in the equation (1). On the other hand, the spring force P that resists this is given by P = Ge 4 δ / 8ND 3 (2) (where P is the load, G is the lateral elastic modulus of the spring material, e is the wire diameter, and δ, the number of turns is N, and the diameter of the coil is D). When the shape is miniaturized while maintaining a similar shape, in the equation (2), the lateral elastic modulus G of the spring material does not depend on the dimension, the wire diameter e and the deflection δ are proportional to the dimension, and the coil diameter D Is proportional to the cube of the formula (2). Therefore,
In the equation (2), the numerator is proportional to the fifth power of the dimension, and the denominator thereof is proportional to the third power of the dimension. Therefore, the equation (2) is eventually proportional to the second power of the dimension, and therefore the spring load P Becomes smaller in proportion to the square of the dimension. Further, the disturbance force due to external vibration or the like is given by the inertial force of the movable portion 40, and therefore decreases in proportion to the weight of the movable portion 40, that is, the cube of the dimension thereof. For this reason, when the size is reduced, the influence of the electrostatic force becomes relatively large compared to other forces. Therefore, the voltage required for switching the contacts can be significantly reduced. It should be noted that the movable part 4 has a size of 1 mm or less.
Manufacturing 0 and providing springs 70, 71 and contacts 20, 50, etc. can be easily realized by the current photolithography technology.

【００３１】上記実施例においては、制御端子Ｔ３に正
の電圧を印加しているが、負の電圧を印加するようにし
てもよい。上記実施例においては、図中、可動部４０の
下方にのみ、固定接点３０と可動接点５０とを設けてい
るが、図中、可動部４０の上方にも、固定接点３０と可
動接点５０との組合せと同様のものを設けてもよく、こ
のようにすれば、１つの入力端子を２つの出力端子の間
で切り換えるスイッチを構成できる。また、上記実施例
においては、固定電極３０、可動電極６０の櫛歯はそれ
ぞれ３本であるが、３本以外の本数であってもよい。Although a positive voltage is applied to the control terminal T3 in the above embodiment, a negative voltage may be applied. In the above embodiment, the fixed contact 30 and the movable contact 50 are provided only below the movable portion 40 in the figure, but the fixed contact 30 and the movable contact 50 are also provided above the movable portion 40 in the figure. A combination similar to the above may be provided, and by doing so, a switch for switching one input terminal between two output terminals can be configured. Further, in the above embodiment, the fixed electrode 30 and the movable electrode 60 each have three comb teeth, but the number of comb teeth may be other than three.

【００３２】上記実施例において、固定部１０は、基台
１１と枠体１２との２つの部品を結合して構成している
が、これらを１枚のシリコン板上でスパッタリングとエ
ッチングとを行なうことによって製造するようにしても
よい。つまり、平坦な基台１１の上に、スパッタリング
によって、シリコンとアルミニウムとを交互に層状に堆
積させ、下部にある構成品から順に製作する。この場
合、くり貫き部１２ａと、固定電極３０と可動部４０と
の間の隙間と、基台１１と鋸歯状ばね７０、板ばね７１
との間の隙間とに犠牲層を堆積させ、この上に枠体１
２、可動部４０、鋸歯状ばね７０、可動電極６０等を堆
積させ、その後、エッチングによって犠牲層のみを除去
すれば、隙間が形成される。犠牲層材料としては、たと
えばSiO2を用いればよい。緩衝フッ酸溶液等によってエ
ッチングすれば、SiO2部分のみ選択的に溶解し、シリコ
ンとアルミニウムの部分は溶解せずに残すことができ
る。また、導体、接点、電極として、アルミニウムの代
わりに銅等の他の導体を使用してもよい。In the above-mentioned embodiment, the fixing portion 10 is constituted by connecting two parts, the base 11 and the frame 12, but these are sputtered and etched on one silicon plate. It may be manufactured by manufacturing. That is, silicon and aluminum are alternately deposited in layers on the flat base 11 by sputtering, and the components below are sequentially manufactured. In this case, the hollow portion 12a, the gap between the fixed electrode 30 and the movable portion 40, the base 11, the serrated spring 70, and the leaf spring 71.
A sacrificial layer is deposited in the space between the frame body 1 and
2, the movable portion 40, the saw-toothed spring 70, the movable electrode 60, and the like are deposited, and then only the sacrificial layer is removed by etching to form a gap. As the sacrificial layer material, for example, SiO 2 may be used. By etching with a buffered hydrofluoric acid solution or the like, only the SiO 2 portion can be selectively dissolved and the silicon and aluminum portions can be left without being dissolved. Further, instead of aluminum, other conductors such as copper may be used as the conductors, contacts and electrodes.

【００３３】[0033]

【発明の効果】本発明によれば、接点の切換を電気的に
制御できることは勿論のこと、接点の切換時にのみ固定
電極３０と可動電極６０との間に電位差を加えればよ
く、接点の導通状態または非導通状態を保持する場合に
電力の消費を必要とせず、しかも電磁石用のコイルを必
要としないのでトグルスイッチ全体の構造が小さいとい
う効果を奏する。According to the present invention, it is of course possible to electrically control the switching of the contacts, and it is sufficient to apply a potential difference between the fixed electrode 30 and the movable electrode 60 only at the time of switching the contacts, so that the contacts are electrically connected. When the state or the non-conducting state is maintained, no power consumption is required, and since no coil for electromagnet is required, the structure of the toggle switch as a whole is small.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例の説明図である。FIG. 1 is an explanatory diagram of an embodiment of the present invention.

【図２】上記実施例における基台１１と固定電極３０と
の説明図である。FIG. 2 is an explanatory diagram of a base 11 and a fixed electrode 30 in the above embodiment.

【図３】上記実施例における枠体１２と可動部４０とば
ね７０、７１との説明図である。FIG. 3 is an explanatory diagram of a frame body 12, a movable portion 40, and springs 70 and 71 in the above embodiment.

【図４】図３に導体を取り付けた場合の例を示す図であ
る。FIG. 4 is a diagram showing an example in which a conductor is attached to FIG.

【図５】上記実施例における固定電極３０と可動電極６
０との配置関係を示す図である。FIG. 5 shows the fixed electrode 30 and the movable electrode 6 in the above embodiment.
It is a figure which shows the arrangement relationship with 0.

【図６】上記実施例における動作を示す図である。FIG. 6 is a diagram showing an operation in the above embodiment.

【図７】上記実施例における動作を示す図である。FIG. 7 is a diagram showing an operation in the above embodiment.

【図８】従来例の説明図である。FIG. 8 is an explanatory diagram of a conventional example.

【符号の説明】[Explanation of symbols]

１０…固定部、 ２０…固定接点、 ３０…固定電極、 ４０…可動部、 ５０…可動接点、 ６０…可動電極、 ７０…鋸歯状ばね、 ７１…板ばね、 Ｔ１…入力端子、 Ｔ２…出力端子、 Ｔ３、Ｔ４制御端子。 10 ... Fixed part, 20 ... Fixed contact, 30 ... Fixed electrode, 40 ... Movable part, 50 ... Movable contact, 60 ... Movable electrode, 70 ... Serrated spring, 71 ... Leaf spring, T1 ... Input terminal, T2 ... Output terminal , T3, T4 control terminals.

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 固定接点と可動接点との間の導通状態ま
たは非導通状態をばねによって保持するトグルスイッチ
において、 上記固定接点と固定電極とを具備する固定部と；上記可
動接点と可動電極とを具備する可動部と；を有し、上記
トグルスイッチの外部から上記固定電極と上記可動電極
との間に電位差が加えられたときに、上記固定電極と上
記可動電極との間に静電気力が発生し、上記ばねに抗し
て上記可動部が動き、上記導通状態、上記非導通状態の
切換を行なうことを特徴とする静電駆動式トグルスイッ
チ。1. A toggle switch for holding a conducting state or a non-conducting state between a fixed contact and a movable contact by a spring, a fixed portion including the fixed contact and a fixed electrode; the movable contact and the movable electrode. When a potential difference is applied between the fixed electrode and the movable electrode from outside the toggle switch, an electrostatic force is generated between the fixed electrode and the movable electrode. An electrostatically actuated toggle switch, which is generated and moves the movable portion against the spring to switch between the conductive state and the non-conductive state. 【請求項２】 請求項１において、 上記固定電極と上記可動電極とは、ピッチが互いに等し
い櫛歯状を有し、上記櫛歯のピッチは、上記可動部の移
動量よりも長く、上記可動部がその可動範囲の中央に存
在するときに、上記固定電極の櫛歯の中心位置と上記可
動電極の櫛歯の中心位置とが一致することを特徴とする
静電駆動式トグルスイッチ。2. The fixed electrode and the movable electrode according to claim 1, wherein the fixed electrode and the movable electrode have a comb tooth shape with an equal pitch, and the pitch of the comb tooth is longer than the moving amount of the movable portion. An electrostatic drive type toggle switch, wherein the center position of the comb teeth of the fixed electrode and the center position of the comb teeth of the movable electrode coincide with each other when the portion exists in the center of its movable range.
JP9868492A 1992-03-25 1992-03-25 Electrostatically driven toggle switch Pending JPH05274953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9868492A JPH05274953A (en) 1992-03-25 1992-03-25 Electrostatically driven toggle switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9868492A JPH05274953A (en) 1992-03-25 1992-03-25 Electrostatically driven toggle switch

Publications (1)

Publication Number Publication Date
JPH05274953A true JPH05274953A (en) 1993-10-22

Family

ID=14226340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9868492A Pending JPH05274953A (en) 1992-03-25 1992-03-25 Electrostatically driven toggle switch

Country Status (1)

Country Link
JP (1) JPH05274953A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005117051A1 (en) * 2004-05-31 2005-12-08 Yokohama Tlo Company Ltd. Micromachine switch
US7745747B2 (en) 2006-04-26 2010-06-29 Seiko Epson Corporation Microswitch with a first actuated portion and a second contact portion

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005117051A1 (en) * 2004-05-31 2005-12-08 Yokohama Tlo Company Ltd. Micromachine switch
US7745747B2 (en) 2006-04-26 2010-06-29 Seiko Epson Corporation Microswitch with a first actuated portion and a second contact portion

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