JPH05267743A - Manufacture of laminated piezoelectric actuator - Google Patents
Manufacture of laminated piezoelectric actuatorInfo
- Publication number
- JPH05267743A JPH05267743A JP4064719A JP6471992A JPH05267743A JP H05267743 A JPH05267743 A JP H05267743A JP 4064719 A JP4064719 A JP 4064719A JP 6471992 A JP6471992 A JP 6471992A JP H05267743 A JPH05267743 A JP H05267743A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- piezoelectric actuator
- electrode
- internal
- laminated piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は積層型圧電アクチュエー
タの製造方法、より詳細にはＶＴＲにおけるトラッキン
グ調節あるいはカメラにおけるオ−トフォ−カスレンズ
駆動等の分野において使用される積層型圧電アクチュエ
ータの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a laminated piezoelectric actuator, and more particularly to a method of manufacturing a laminated piezoelectric actuator used in fields such as tracking adjustment in a VTR or driving an auto focus lens in a camera. ..
【０００２】[0002]
【従来の技術】電子製品の小型化、高機能化の要請に伴
い、積層型圧電アクチュエータをメカトロニクス分野に
利用するための研究開発が盛んに行なわれている。積層
型圧電アクチュエータは微小変位の制御性に優れ、高剛
性、低消費電力等の特徴を有し、現在では、カメラのオ
−トフォ−カスレンズ駆動、ＣＤ、ＶＴＲ等におけるデ
ィスクに対するトラッキング調節等に利用されている。2. Description of the Related Art In response to demands for miniaturization and high functionality of electronic products, research and development for utilizing a laminated piezoelectric actuator in the field of mechatronics are being actively conducted. The laminated piezoelectric actuator has excellent controllability for minute displacements, high rigidity, and low power consumption. Currently, it is used for driving the autofocus lens of cameras and tracking adjustment for discs in CDs, VTRs, etc. Has been done.
【０００３】従来の積層型圧電アクチュエータの構成
は、例えば特公昭６３ー１７３５４号公報に示されてお
り、圧電セラミック板の全面に内部電極が形成されて積
層された積層体の端面に、前記内部電極を一層おきに絶
縁する絶縁物質が、一対の積層端面で積層方向にずれた
非対称形で形成され、前記内部電極が一層おきに外部電
極と接続された構成が開示されている。The structure of a conventional laminated piezoelectric actuator is disclosed in, for example, Japanese Patent Publication No. Sho 63-17354, and the internal electrodes are formed on the entire surface of a piezoelectric ceramic plate to form an internal layer on the end surface of the laminated body. A structure is disclosed in which an insulating material that insulates electrodes every other layer is formed asymmetrically in a stacking direction by a pair of stacking end faces, and the internal electrodes are connected to external electrodes every other layer.
【０００４】また積層型圧電アクチュエータの製造方法
は特公平２ー３４４４９号公報あるいは特開昭６３ー６
５６８８号公報等において開示されている。この特開昭
６３ー６５６８８号公報において開示された工程を図２
（ａ）（ｂ）（ｃ）（ｄ）（ｅ）（ｆ）（ｇ）に示す。
まず原料粉末を板状にプレス成形して焼結し、圧電セラ
ミック板３１を形成し（図２（ａ））、圧電セラミック
板３１の両面に内部電極非被着部３２ａを残してメッキ
法等により内部電極３２を形成し（図２（ｂ））、この
内部電極３２が形成された圧電セラミック板３１を積層
させて接着し、積層体３３を形成する（図２（ｃ））。
次にこの積層体３３の対向位置にある一対の積層体３３
端面に仮設外部電極３４を形成し（図２（ｄ））、電気
泳動法により仮設外部電極３４が形成されていない積層
体３３端面の一層おきに内部電極３２部分とその近傍に
絶縁層３５を形成する（図２（ｅ））。露出した内部電
極３２を接続する外部電極３６を積層方向に形成し（図
２（ｆ））、この積層体３３を所要幅寸法に切断して積
層型圧電アクチュエータ３７を形成する（図２
（ｇ））。A method of manufacturing a laminated piezoelectric actuator is disclosed in Japanese Examined Patent Publication No. 2-34449 or Japanese Patent Laid-Open No. 63-6.
It is disclosed in Japanese Patent No. 5688. The process disclosed in Japanese Patent Laid-Open No. 63-65688 is shown in FIG.
(A) (b) (c) (d) (e) (f) (g).
First, the raw material powder is press-formed into a plate shape and sintered to form a piezoelectric ceramic plate 31 (FIG. 2A), and plating methods such as leaving internal electrode non-adhered portions 32a on both surfaces of the piezoelectric ceramic plate 31 Thus, the internal electrode 32 is formed (FIG. 2B), and the piezoelectric ceramic plates 31 on which the internal electrode 32 is formed are laminated and adhered to each other to form a laminated body 33 (FIG. 2C).
Next, a pair of laminated bodies 33 located at a position opposite to the laminated body 33.
Temporary external electrodes 34 are formed on the end faces (FIG. 2D), and an insulating layer 35 is formed in the inner electrode 32 portion and its vicinity at every other end face of the laminate 33 where the temporary external electrodes 34 are not formed by electrophoresis. Formed (FIG. 2E). External electrodes 36 that connect the exposed internal electrodes 32 are formed in the stacking direction (FIG. 2F), and the stacked body 33 is cut into a required width dimension to form a stacked piezoelectric actuator 37 (FIG. 2).
(G)).
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記し
た方法のように溶液中の電気泳動により絶縁物を付着さ
せて絶縁層３５を形成する場合、絶縁物によっては、厚
み方向より幅方向に多く付着する性質を持つものがあ
る。このような絶縁物を使用した場合、十分な絶縁層の
厚みを保てなくなり、耐電圧が低下するという課題があ
った。However, when the insulating layer 35 is formed by depositing an insulator by electrophoresis in a solution as in the method described above, depending on the insulator, a larger amount is deposited in the width direction than in the thickness direction. Some have the property to do. When such an insulator is used, there is a problem in that a sufficient thickness of the insulating layer cannot be maintained and the withstand voltage decreases.
【０００６】本発明はこのような課題に鑑み発明された
ものであって、絶縁層の厚みが実質的に十分確保され、
内部電極が両方の外部電極と接触してショートしたり、
耐電圧が低下するといったことのない積層型圧電アクチ
ュエータの製造方法を提供することを目的としている。The present invention has been invented in view of the above problems, in which the thickness of the insulating layer is substantially secured.
The internal electrode contacts both external electrodes, causing a short circuit,
It is an object of the present invention to provide a method for manufacturing a laminated piezoelectric actuator that does not lower the withstand voltage.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に本発明に係る積層型圧電アクチュエータの製造方法
は、表面の一部に内部電極が形成された板状の圧電セラ
ミックスを積層して積層体を形成し、該積層体の前記内
部電極を交互に電気的に接続する２つの仮設外部電極を
形成し、当該積層体の一方の側面における前記内部電極
の端部を一層おきにエッチングした後に、当該内部電極
の端部を絶縁するための絶縁物を付着させ、前記積層体
の他方の側面における内部電極の一方の端部が絶縁され
ていない前記内部電極の端部をエッチングした後に、当
該内部電極の端部を絶縁するための絶縁物を付着させ、
前記積層体の両側面に外部電極を形成して前記絶縁物に
より被覆されていない内部電極の端部を接続し、その後
仮設外部電極を切断除去することを特徴としている。In order to achieve the above-mentioned object, a method of manufacturing a laminated piezoelectric actuator according to the present invention comprises laminating and laminating plate-shaped piezoelectric ceramics having internal electrodes formed on a part of the surface thereof. After forming a body and forming two temporary external electrodes for electrically connecting the internal electrodes of the laminate alternately, and etching the end portions of the internal electrodes on one side surface of the laminate every other layer , After attaching an insulator for insulating the end of the internal electrode and etching the end of the internal electrode where one end of the internal electrode on the other side surface of the laminate is not insulated, Attach an insulator to insulate the ends of the internal electrodes,
It is characterized in that external electrodes are formed on both side surfaces of the laminate to connect ends of the internal electrodes not covered with the insulator, and then the temporary external electrodes are cut and removed.
【０００８】[0008]
【作用】前記積層体は内部電極の端部が端面に露出し、
かつ一層おきに仮設外部電極と接続されている。この積
層体の仮設外部電極が形成されていない一方の側面を絶
縁テープによりマスキングし、内部電極を弱くエッチン
グするような電解液中に入れる。この際、前記内部電極
を強く腐食するような電解物質を使用すると、前記内部
電極が全体的に損傷するため、電解物質としては適当な
ものを選択する必要があり、一般的には弱酸が好まし
い。In the laminated body, the end portions of the internal electrodes are exposed on the end faces,
And every other layer is connected to a temporary external electrode. One side surface of the laminated body on which the temporary external electrode is not formed is masked with an insulating tape, and the laminated structure is immersed in an electrolytic solution that weakly etches the internal electrode. At this time, if an electrolytic substance that strongly corrodes the internal electrode is used, the internal electrode is totally damaged. Therefore, it is necessary to select an appropriate electrolytic substance, and a weak acid is generally preferable. ..
【０００９】次に、仮設外部電極を陽極に、白金板等を
対極とし、これを陰極として通電する。これにより、上
記仮の外部電極に接続された側の内部電極は、表面に露
出した部分から電解液中にイオンとして溶出する。他
方、前記仮設外部電極に接続されていない側の内部電極
はほとんどエッチングされることはなく、このようにし
て側面に露出した内部電極が選択的にエッチングされ
る。Next, the temporary external electrode is used as an anode, and a platinum plate or the like is used as a counter electrode, and this is used as a cathode for energization. As a result, the internal electrode on the side connected to the temporary external electrode is eluted as ions into the electrolytic solution from the exposed portion on the surface. On the other hand, the internal electrodes on the side not connected to the temporary external electrodes are hardly etched, and thus the internal electrodes exposed on the side surfaces are selectively etched.
【００１０】この積層体を、絶縁物質を分散させた液中
で、エッチングで使用したのと同一の前記仮設外部電極
に通電し、絶縁物質を付着させると、この絶縁物質は内
部電極がエッチングされたために生じた空洞部分に充填
され、この部分だけ絶縁層の厚みが増し、耐電圧が高
い、信頼性の高い積層型圧電アクチュエータが得られ
る。When the laminated body is energized in the liquid in which the insulating material is dispersed to the same temporary external electrode as used in the etching to attach the insulating material, the internal electrode is etched by the insulating material. The resulting hollow portion is filled, and the thickness of the insulating layer is increased only in this portion, so that a highly reliable laminated piezoelectric actuator having a high withstand voltage can be obtained.
【００１１】さらに上記工程でマスキングを施した側面
の前記絶縁テープを取り去り、絶縁層が形成された側面
に新たに絶縁テープによるマスキングを施し、上記工程
で使用した側と異なる側の仮の外部電極を用い、上記工
程と同様にエッチングおよび電気泳動を行なう。これに
より、一層おきに内部電極と内部電極がエッチングされ
て表層部に絶縁物質が付着した層とが交互に繰り返され
た積層体が得られる。Further, the insulating tape on the side surface masked in the above step is removed, and the side surface on which the insulating layer is formed is newly masked by the insulating tape, and the temporary external electrode on the side different from the side used in the above step. Etching and electrophoresis are performed in the same manner as in the above steps. As a result, a laminated body is obtained in which the internal electrodes and the layers in which the internal electrodes are etched and the insulating material is attached to the surface layer portion are alternately repeated every other layer.
【００１２】すなわち上記した方法によれば、内部電極
の端部をエッチングし、この後電気泳動法により絶縁物
を付着させ、エッチングされた部分には絶縁物が充填さ
れるので、前記内部電極と外部電極との間の耐電圧が向
上し、通電時の絶縁破壊等が阻止される。That is, according to the above-mentioned method, the end portion of the internal electrode is etched, and then the insulator is attached by the electrophoretic method, and the etched portion is filled with the insulator. The withstand voltage between the external electrode and the external electrode is improved, and dielectric breakdown during energization is prevented.
【００１３】[0013]
【実施例】以下、本発明に係る積層型圧電アクチュエー
タの製造方法の実施例を図面に基づいて説明する。図１
（ａ）〜（ｆ）は積層型圧電アクチュエータの製造工程
を示す斜視図及び断面図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for manufacturing a laminated piezoelectric actuator according to the present invention will be described below with reference to the drawings. Figure 1
(A)-(f) is a perspective view and a sectional view showing a manufacturing process of a lamination type piezoelectric actuator.
【００１４】まずチタン酸ジルコン酸鉛を主成分とする
圧電セラミックを焼結させ、この焼結体を巾が５ｍｍ、
長さが６０ｍｍ、厚さが０．１ｍｍの薄板上に加工して
圧電セラミック板１１を形成した。この圧電セラミック
板１１の表裏両主面に、表裏対称に３ｍｍの内部電極非
被着部１２ａを残して無電解めっき法によりニッケルの
内部電極１２を形成し（図１（ａ））、内部電極非被着
部１２ａが一致するようにして接着剤を塗布しながら１
００枚（図では６枚）積層し、積層体１３を作成する。
次にこの積層体１３の巾方向の両側面に導電性ペースト
を塗布して仮設外部電極１４を形成し、内部電極１２が
一層おきに仮設外部電極１４と電気的に接続されるよう
にし、また仮設外部電極１４からは、引き出し電極とし
てリード線（図示せず）をそれぞれ接続する（図１
（ｂ））。First, a piezoelectric ceramic containing lead zirconate titanate as a main component is sintered, and this sintered body has a width of 5 mm.
The piezoelectric ceramic plate 11 was formed by processing on a thin plate having a length of 60 mm and a thickness of 0.1 mm. Internal electrodes 12 made of nickel are formed by electroless plating on both main surfaces of the piezoelectric ceramic plate 11 so that the internal electrode non-adhered portions 12a of 3 mm are left symmetrically on the front and back sides (FIG. 1A). While applying the adhesive so that the non-adhered portions 12a are aligned with each other, 1
00 sheets (6 sheets in the figure) are laminated to form a laminated body 13.
Next, a conductive paste is applied to both side surfaces of the laminate 13 in the width direction to form temporary external electrodes 14, so that the internal electrodes 12 are electrically connected to the temporary external electrodes 14 every other layer. Lead wires (not shown) are connected to the temporary external electrodes 14 as lead electrodes (see FIG. 1).
(B)).
【００１５】この積層体１３の外部電極１４が形成され
ていない側面の一方を絶縁性テープによりマスキング
し、対極として３ｃｍ平方の白金を互いに平行になるよ
うに０．０５規定の塩酸中に入れ、積層体１３に接続さ
れた引き出し電極のうち一本を正極とし、白金板を負極
として１０Ｖの電圧を１０分間印加した。その結果、マ
スキングが行なわれていない面では、引き出し電極と接
続された内部電極１２の露出面が２０μｍエッチングさ
れる（図１（ｃ）、（ｃ’））。One of the side surfaces of the laminated body 13 on which the external electrodes 14 are not formed is masked with an insulating tape, and platinum of 3 cm square is placed as a counter electrode in 0.05 N hydrochloric acid so as to be parallel to each other. A voltage of 10 V was applied for 10 minutes with one of the extraction electrodes connected to the laminate 13 as a positive electrode and the platinum plate as a negative electrode. As a result, the exposed surface of the internal electrode 12 connected to the extraction electrode is etched by 20 μm on the surface not masked (FIGS. 1C and 1C ′).
【００１６】ついで、この積層体１３を、マスキングを
施したまま、対極として３ｃｍ平方の白金板を互いに平
行になるように紫外線硬化型の電着塗料の水溶液中に入
れ、エッチングで使用した引き出し電極を正極とし、前
記白金板を負極として５Ｖの電圧を１０分間印加する。
これにより、内部電極１２がエッチングされて生成した
空隙部１８に電着塗料１５が充填されるとともに、表面
にも電着塗料１５が一部付着する。この電着塗料１５を
紫外線を照射して定着する（図１（ｄ））。Then, with this mask 13 being masked, a platinum plate of 3 cm square was placed as a counter electrode in an aqueous solution of an ultraviolet curing type electrodeposition paint so as to be parallel to each other, and an extraction electrode used for etching. Is used as a positive electrode, the platinum plate is used as a negative electrode, and a voltage of 5 V is applied for 10 minutes.
As a result, the electrodeposition coating material 15 is filled in the voids 18 formed by etching the internal electrodes 12, and the electrodeposition coating material 15 partially adheres to the surface. The electrodeposition paint 15 is irradiated with ultraviolet rays to be fixed (FIG. 1 (d)).
【００１７】次に、マスキングテープを剥離し、電着塗
料１５が付着した面をテープによりマスキングを行な
い、引き出し電極のもう一方を使用して同様にエッチン
グ、電着を行ない、紫外線照射により定着させた（図１
（ｅ））。Next, the masking tape is peeled off, the surface to which the electrodeposition coating material 15 is attached is masked with the tape, and the other side of the extraction electrode is also used to perform etching and electrodeposition in the same manner to fix it by ultraviolet irradiation. (Fig. 1
(E)).
【００１８】さらに仮設外部電極１４が形成されていな
い２つの側面の一面に銀ペーストを塗布し、外部電極１
６を形成する。外部電極１６からリード線を引き出し電
極（図示せず）として取り付けた後、仮設外部電極１４
を除去する。以上の工程により内部電極１２が交互に外
部電極１６と電気的に接続され、あるいは絶縁されてい
る積層型圧電アクチュエータ１７を形成する（図１
（ｆ））。Further, silver paste is applied to one surface of the two side surfaces on which the temporary external electrode 14 is not formed, and the external electrode 1
6 is formed. After attaching a lead wire as an extraction electrode (not shown) from the external electrode 16, the temporary external electrode 14 is attached.
To remove. Through the above steps, the laminated piezoelectric actuator 17 in which the internal electrodes 12 are alternately electrically connected to or insulated from the external electrodes 16 is formed (FIG. 1).
(F)).
【００１９】このようにして形成した積層型圧電アクチ
ュエータ１７と内部電極１２の露出部をエッチング処理
していない従来の積層型圧電アクチュエータとの耐電圧
の評価を表１に示した。なお、この評価は２つの外部電
極１６の間に、最大４００Ｖの電圧を印加し、ここに流
れる電流を測定することにより行なった。Table 1 shows the evaluation of withstand voltage between the thus-formed laminated piezoelectric actuator 17 and the conventional laminated piezoelectric actuator in which the exposed portion of the internal electrode 12 is not etched. This evaluation was performed by applying a voltage of 400 V at maximum between the two external electrodes 16 and measuring the current flowing there.
【００２０】[0020]
【表１】 [Table 1]
【００２１】表１より明らかなように、実施例のもので
は比較例のものに比べて耐電圧が大幅に向上しているこ
とが分かる。As is clear from Table 1, the withstanding voltage of the example is significantly higher than that of the comparative example.
【００２２】従って本実施例に係る方法を用いて積層型
圧電アクチュエータを形成した場合、電着塗料１５（絶
縁層）の厚みが実質的に十分確保され、耐電圧が向上
し、信頼性の高い積層型圧電アクチュエータを提供する
ことができる。Therefore, when the laminated piezoelectric actuator is formed by using the method according to this embodiment, the thickness of the electrodeposition paint 15 (insulating layer) is substantially secured, the withstand voltage is improved, and the reliability is high. A laminated piezoelectric actuator can be provided.
【００２３】[0023]
【発明の効果】以上詳述したように本発明に係る積層型
圧電アクチュエータの製造方法にあっては、絶縁物を付
着させる電気泳動の工程の前に、内部電極の端部にエッ
チングを施こす工程が導入されているので、前記絶縁物
の絶縁層の厚みが実質的に十分確保され、耐電圧が向上
した積層型圧電アクチュエータを提供することができ
る。従って、本発明に係る製造方法により製作された積
層型圧電アクチュエータをカメラのオ−トフォ−カスレ
ンズ機構等に用いれば機器の信頼性を向上させることが
できる。As described above in detail, in the method of manufacturing the laminated piezoelectric actuator according to the present invention, the end portions of the internal electrodes are etched before the electrophoretic step of attaching the insulator. Since the steps are introduced, it is possible to provide a laminated piezoelectric actuator in which the thickness of the insulating layer of the insulating material is substantially secured and the withstand voltage is improved. Therefore, if the laminated piezoelectric actuator manufactured by the manufacturing method according to the present invention is used for an auto focus lens mechanism of a camera or the like, the reliability of the device can be improved.
【図１】（ａ）〜（ｆ）は本発明に係る積層型圧電アク
チュエータの製造方法の実施例における製造工程を示す
斜視図及び断面図である。1A to 1F are a perspective view and a sectional view showing a manufacturing process in an embodiment of a method of manufacturing a laminated piezoelectric actuator according to the present invention.
【図２】（ａ）〜（ｇ）は従来の積層型圧電アクチュエ
ータの製造方法における工程を示す斜視図である。2A to 2G are perspective views showing steps in a conventional method for manufacturing a laminated piezoelectric actuator.
１１ 圧電セラミック板 １２ 内部電極 １３ 積層体 １４ 仮設外部電極 １５ 電着塗料（絶縁物） １６ 外部電極 １７ 積層型圧電アクチュエータ １８ 空隙部 11 Piezoelectric Ceramic Plate 12 Internal Electrode 13 Laminated Body 14 Temporary External Electrode 15 Electrodeposition Paint (Insulator) 16 External Electrode 17 Laminated Piezoelectric Actuator 18 Void
Claims (1)
の圧電セラミックスを積層して積層体を形成し、該積層
体の前記内部電極を交互に電気的に接続する２つの仮設
外部電極を形成し、当該積層体の一方の側面における前
記内部電極の端部を一層おきにエッチングした後に、当
該内部電極の端部を絶縁するための絶縁物を付着させ、
前記積層体の他方の側面における内部電極の一方の端部
が絶縁されていない前記内部電極の端部をエッチングし
た後に、当該内部電極の端部を絶縁するための絶縁物を
付着させ、前記積層体の両側面に外部電極を形成して前
記絶縁物により被覆されていない内部電極の端部を接続
し、その後仮設外部電極を切断除去することを特徴とす
る積層型圧電アクチュエータの製造方法。1. Two temporary external devices for forming a laminated body by laminating plate-shaped piezoelectric ceramics having internal electrodes formed on a part of the surface thereof and electrically connecting the internal electrodes of the laminated body alternately. An electrode is formed, and after the end portions of the internal electrodes on one side surface of the laminate are etched by one layer, an insulator for insulating the end portions of the internal electrodes is attached,
After one end of the internal electrode on the other side surface of the laminate is not insulated, the end of the internal electrode is etched, and then an insulator is attached to insulate the end of the internal electrode. A method of manufacturing a laminated piezoelectric actuator, comprising forming external electrodes on both side surfaces of a body, connecting ends of the internal electrodes not covered with the insulator, and then cutting and removing the temporary external electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4064719A JPH05267743A (en) | 1992-03-23 | 1992-03-23 | Manufacture of laminated piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4064719A JPH05267743A (en) | 1992-03-23 | 1992-03-23 | Manufacture of laminated piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05267743A true JPH05267743A (en) | 1993-10-15 |
Family
ID=13266243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4064719A Pending JPH05267743A (en) | 1992-03-23 | 1992-03-23 | Manufacture of laminated piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05267743A (en) |
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|---|---|---|---|---|
| DE19860001A1 (en) * | 1998-12-23 | 2000-07-06 | Siemens Ag | Piezoelectric component, especially for controlling an internal combustion engine injection valve, has electrically insulating material-containing interspaces between its piezoceramic layers |
| WO2008092740A2 (en) * | 2007-01-31 | 2008-08-07 | Siemens Aktiengesellschaft | Piezoceramic multilayer actuator and method for the production thereof |
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-
1992
- 1992-03-23 JP JP4064719A patent/JPH05267743A/en active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19860001A1 (en) * | 1998-12-23 | 2000-07-06 | Siemens Ag | Piezoelectric component, especially for controlling an internal combustion engine injection valve, has electrically insulating material-containing interspaces between its piezoceramic layers |
| US6232701B1 (en) | 1998-12-23 | 2001-05-15 | Siemens Aktiengesellschaft | Piezoelectric component and method for the manufacture thereof |
| DE19860001C2 (en) * | 1998-12-23 | 2001-10-04 | Epcos Ag | Piezoelectric component, method for its production and use of such a component |
| US7905000B2 (en) | 2007-01-31 | 2011-03-15 | Siemens Aktiengesellschaft | Piezoceramic multilayer actuator and method for the production thereof |
| WO2008092740A3 (en) * | 2007-01-31 | 2008-09-18 | Siemens Ag | Piezoceramic multilayer actuator and method for the production thereof |
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| WO2013124146A1 (en) * | 2012-02-20 | 2013-08-29 | Epcos Ag | Multilayer component and method for producing a multilayer component |
| JP2015513789A (en) * | 2012-02-20 | 2015-05-14 | エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ | Multilayer device and method for manufacturing multilayer device |
| US10608163B2 (en) | 2012-02-20 | 2020-03-31 | Epcos Ag | Multilayer component having internal electrodes alternatingly connected to external electrodes |
| JP2015528199A (en) * | 2012-06-18 | 2015-09-24 | エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ | Electronic device manufacturing method and electronic device |
| US10164167B2 (en) | 2012-06-18 | 2018-12-25 | Epcos Ag | Method for producing an electric component and electric component |
| JP2015531168A (en) * | 2012-08-09 | 2015-10-29 | エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ | A method for filling at least one cavity of a multilayer device with a filler and a multilayer device. |
| US9595390B2 (en) | 2012-08-09 | 2017-03-14 | Epcos Ag | Method for filling at least one cavity of a multi-layer component with a filling material, and multi-layer component |
| DE102013017350A1 (en) * | 2013-10-17 | 2015-04-23 | Epcos Ag | Multi-layer component and method for producing a multilayer component |
| US10505099B2 (en) | 2013-10-17 | 2019-12-10 | Epcos Ag | Multi-layer component and method for producing a multi-layer component |
| JP2016536786A (en) * | 2013-10-17 | 2016-11-24 | エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ | Multilayer device and method for manufacturing a multilayer device |
| DE102013017350B4 (en) * | 2013-10-17 | 2020-07-09 | Tdk Electronics Ag | Multi-layer component and method for producing a multi-layer component |
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