JPH05232302A - Optical member and its production - Google Patents

Optical member and its production

Info

Publication number
JPH05232302A
JPH05232302A JP3063692A JP3063692A JPH05232302A JP H05232302 A JPH05232302 A JP H05232302A JP 3063692 A JP3063692 A JP 3063692A JP 3063692 A JP3063692 A JP 3063692A JP H05232302 A JPH05232302 A JP H05232302A
Authority
JP
Japan
Prior art keywords
information recording
lens
optical member
mold
resistant coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3063692A
Other languages
Japanese (ja)
Inventor
Takanori Oboshi
隆則 大星
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP3063692A priority Critical patent/JPH05232302A/en
Publication of JPH05232302A publication Critical patent/JPH05232302A/en
Pending legal-status Critical Current

Links

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  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

PURPOSE:To obtain an optical member in which a lens and an information recording part are formed integrally. CONSTITUTION:An original information recording plate is manufactured by forming a corrosion-resistant coating layer on a metal base body, then laminating an information recording layer and a photoresist film, forming a pattern of specified information in the photoresist film on the information recording layer, and etching to form an information recording part according to the resist pattern. A nest provided with this original plate and a nest for formation of lens are mounted in a die, which is used for injection molding. Thus, an optical member 1 having the lens part 2 and the information recording part 3 molded in one body is obtd. Thereby, accuracy of position of the lens and information recording part 3 is improved and the quality of the product can be stabilized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、高分子材料からなるレ
ンズと、回折格子、ホログラム等の情報記録部を有する
光学部材およびその製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical member having a lens made of a polymer material and an information recording portion such as a diffraction grating and a hologram, and a manufacturing method thereof.

【0002】[0002]

【従来の技術】光学的に各種の情報の読み出しあるいは
書き込みを行う回折格子、ホログラム等には情報記録部
とともに読み出しあるいは書き込み時の光学系を形成す
るレンズを設けた光学部材で形成されたものが知られて
いる。
2. Description of the Related Art Diffraction gratings, holograms, etc. for optically reading or writing various kinds of information are formed by an optical member provided with an information recording section and a lens forming an optical system at the time of reading or writing. Are known.

【0003】これらの光学部材の製造は、レンズと情報
記録部とを個別に成形し、それぞれの部材を接着または
融着等の方法を用いて張り合わせることによって製造さ
れている。
These optical members are manufactured by individually molding the lens and the information recording portion and adhering the respective members by a method such as adhesion or fusion.

【0004】合成樹脂製のレンズの製造は球面、非球面
等の使用に適したレンズと同形状の凹部または凸部を金
型表面に作製し、圧縮成形、射出成形、射出圧縮成形法
等による成形法、合成樹脂の熱溶融によってレンズ形状
を形成する方法等によって製造が行われている。
A synthetic resin lens is manufactured by forming a concave portion or a convex portion having the same shape as a lens suitable for use on a spherical surface, an aspherical surface or the like on the surface of a mold and performing compression molding, injection molding, injection compression molding method, or the like. Manufacturing is performed by a molding method, a method of forming a lens shape by heat melting of a synthetic resin, or the like.

【0005】一方、光学的に読み出しが可能な情報記録
部へ情報を記録する方法には、平滑なプラスチック材
料をエンボス加工して表面に凹凸を転写する大量に安価
に製造するのに適した方法。フォトポリマー法と呼ば
れる感光材料を用いる方法。ニッケル電鋳により情報
記録部を複製したスタンパーを金型内に装着して合成樹
脂を射出成形することによって情報を記録する方法等が
知られている。そして、、はホログラム、,は
光ディスクの製造に主として用いられており、とくに、
CD、LDとしてして知られている光ディスクは大量生
産が可能な射出成形によるの方法が多用されており、
スタンパーに形成されたグルーブやピットが転写される
ようになっている。
On the other hand, as a method for recording information in an optically readable information recording portion, a method suitable for mass production at low cost by embossing a smooth plastic material and transferring unevenness on the surface .. A method using a photosensitive material called a photopolymer method. There is known a method of recording information by mounting a stamper having a duplicated information recording portion by nickel electroforming in a mold and injection molding synthetic resin. And, and are mainly used in the manufacture of holograms, and, in particular,
Optical discs known as CDs and LDs are often used by injection molding, which enables mass production.
Grooves and pits formed on the stamper are transferred.

【0006】[0006]

【発明が解決しようとする課題】従来行われていたレン
ズと情報記録部とを有する光学部材を、レンズ部、情報
記録部のそれぞれの部材を個別に製造し後工程において
張り合わせる方法では、製造工程、検査工程が増え、張
り合わせの工程における位置合わせ精度の問題、再現性
の問題、接着工程での気泡の抱き込み、ゴミ等の不純物
の混入等の品質が低下するといった問題点があり、製造
コスト上でも問題点があった。
According to the conventional method of manufacturing an optical member having a lens and an information recording unit, the respective members of the lens unit and the information recording unit are individually manufactured and bonded in a post process. There is a problem that the number of processes and inspection processes increases, there is a problem of alignment accuracy in the bonding process, reproducibility problem, entrapment of bubbles in the bonding process, deterioration of quality such as inclusion of impurities such as dust, etc. There was also a problem in terms of cost.

【0007】また、情報記録部を基材の表面にエンボス
法によって凹凸を転写する方法は、基材の表面の凹凸に
よって左右され、微細な凹凸パターンを再現性良く均一
にエンボス加工するうえでは問題があり、またフォトポ
リマーを用いる方法は、フォトポリマーが硬化する時間
を長時間を要し、生産性が悪く、またフォトポリマーは
高価でありコストが上昇するといった問題点がある。さ
らに、製造の際に気泡が混入し歩留まりの低下を起こす
といった問題点もある。また、ニッケルの電鋳によって
製造したスタンパーを射出成形装置等の金型に装着して
製造する方法は、スタンパーが多数の工程を経て製造さ
れており、製造に長時間を要するという問題点があっ
た。
Further, the method of transferring the irregularities on the surface of the substrate by the embossing method to the information recording portion depends on the irregularities on the surface of the substrate, and is problematic in uniformly embossing a fine irregular pattern with good reproducibility. In addition, the method using a photopolymer has a problem that it takes a long time to cure the photopolymer, productivity is poor, and the photopolymer is expensive and the cost is increased. Further, there is a problem that air bubbles are mixed in during manufacturing, which causes a decrease in yield. In addition, the method of mounting a stamper manufactured by electroforming of nickel on a mold such as an injection molding apparatus has a problem that the stamper is manufactured through many steps, which requires a long time for manufacturing. It was

【0008】また上記のように製造されたスタンパーを
金型の内部に挿入し、射出成形を繰り返すと、基材がニ
ッケル材であるために約10万ショットでスタンパーが
使用できなくなるという問題も生じる。更に金型中にス
タンパーを挿入する際に、金型に接触し、スタンパーの
信号面を損傷したりすることもある。また金型内でのス
タンパーは中央部に固定されており、外周部は自由端と
なっているために射出成形時での樹脂充填工程において
剥離面に空気が残ったり、樹脂の流入に際してスタンパ
ー自体が振動したりして賦形性や転写性が劣ることがあ
り、金型へのスタンパーの装着は金型全面にわたるの
で、厚みの薄いスタンパーの同一面上に信号記録部と大
きな凹凸を必要とするレンズ部を形成することは不可能
である。
Further, when the stamper manufactured as described above is inserted into a mold and injection molding is repeated, there is a problem that the stamper cannot be used after about 100,000 shots because the base material is a nickel material. .. Further, when the stamper is inserted into the mold, it may come into contact with the mold and damage the signal surface of the stamper. In addition, the stamper in the mold is fixed to the central part, and the outer peripheral part is a free end, so air remains on the peeling surface during the resin filling process during injection molding, and the stamper itself when the resin flows in. Since the moldability and transferability may be poor due to vibrations, the mounting of the stamper on the mold covers the entire surface of the mold, so a signal recording part and large unevenness are required on the same surface of the thin stamper. It is impossible to form a lens portion that does.

【0009】更に、金型の温度管理の面からも、金型の
可動板側に固定されるスタンパーはスタンパーの中央部
のみに固定されるために、スタンパーと金型表面には微
小空間が存在し、金型温度が直接スタンパーに伝達され
ないという問題があり、また逆に高温の樹脂が金型内に
流入してきた時に、樹脂の温度がスタンパーを介して金
型へ直接伝達されず、固定板側の冷却速度より可動板側
の冷却速度の方が遅くなり、樹脂基板のそりの原因とな
ることが問題となっている。
Further, from the viewpoint of controlling the temperature of the mold, the stamper fixed to the movable plate side of the mold is fixed only to the central part of the stamper, so that a small space exists between the stamper and the mold surface. However, there is a problem that the mold temperature is not directly transmitted to the stamper, and conversely, when high temperature resin flows into the mold, the temperature of the resin is not directly transmitted to the mold via the stamper and the fixing plate There is a problem that the cooling rate on the movable plate side becomes slower than the cooling rate on the side, which causes warpage of the resin substrate.

【0010】[0010]

【課題を解決するための手段】本発明の光学部材は、レ
ンズと情報記録部を同一成形品中に有するもので、従来
のようにレンズと情報記録部とを個別に製造した後に張
り合わせるのてはなく、一体成形されているものであ
る。
The optical member of the present invention has a lens and an information recording section in the same molded product, and is manufactured by separately manufacturing the lens and the information recording section as in the prior art. However, they are integrally molded.

【0011】本発明の光学部材は、圧縮成形、トランス
ファー成形、射出成形、射出圧縮成形等の各種の成形方
法によって製造することができる。また、成形用の金型
は、レンズ部と情報記録部を同一の金型中に有してお
り、レンズ部は金型表面に直接にレンズ形状を作成した
ものでも、金型の内部に入れ子式にレンズ成形用の部材
を取り付けてもよい。また、情報記録部は金型内部に入
れ子式の情報記録原版を設けており、情報記録原版は、
金属母体表面に耐食性被覆層、情報記録層が順次積層さ
れており、耐食性被覆層には、窒化チタン、炭化チタ
ン、炭窒化チタン、酸化チタン、炭化タングステン、ア
ルミナ、炭化ケイ素等の耐食性と硬度の大きな物質が好
ましい。情報記録層は、耐食性被覆層を侵さないエッチ
ング液あるいはドライエッチング法によって選択的に情
報記録層のみのエッチングが可能な各種の材料を用いる
ことができるが、クロム、ニッケル、およびそれらの合
金が好ましく、タングステン、モリブデン、タンタル等
の高融点金属、酸化チタン、窒化チタン、炭化チタン、
炭窒化チタン、炭化タングステン、アルミナ、炭化ケイ
素等の金属、合金、セラミックス等を挙げることができ
る。
The optical member of the present invention can be manufactured by various molding methods such as compression molding, transfer molding, injection molding and injection compression molding. In addition, the molding die has a lens part and an information recording part in the same mold, and even if the lens part has a lens shape directly formed on the surface of the mold, it can be nested inside the mold. A lens molding member may be attached to the formula. In addition, the information recording unit has a nested information recording original plate inside the mold, and the information recording original plate is
A corrosion resistant coating layer and an information recording layer are sequentially laminated on the surface of the metal base, and the corrosion resistant coating layer has a corrosion resistance and hardness of titanium nitride, titanium carbide, titanium carbonitride, titanium oxide, tungsten carbide, alumina, silicon carbide, etc. Larger materials are preferred. For the information recording layer, various materials capable of selectively etching only the information recording layer by an etching solution that does not attack the corrosion-resistant coating layer or a dry etching method can be used, but chromium, nickel, and alloys thereof are preferable. Refractory metals such as tungsten, molybdenum and tantalum, titanium oxide, titanium nitride, titanium carbide,
Examples include metals such as titanium carbonitride, tungsten carbide, alumina, and silicon carbide, alloys, and ceramics.

【0012】情報記録原版の製造は、析出硬化鋼、ステ
ンレス鋼、超鋼合金等からなる金属母体表面に、耐食性
被覆層、情報記録層を順次積層した後にレジストを塗布
し、記録すべき情報のパターンが形成されたフォトマス
クを介して露光するか、またはフォトマスクを使用しな
いでレーザー光線を照射して直接に情報記録部を作成し
た後現像、エッチング処理することによって形成する。
In the production of an information recording original plate, a corrosion-resistant coating layer and an information recording layer are sequentially laminated on a surface of a metal base made of precipitation hardened steel, stainless steel, super steel alloy, etc., and then a resist is applied to record information to be recorded. It is formed by exposing through a photomask on which a pattern is formed, or by directly irradiating a laser beam without using a photomask to create an information recording portion, and then developing and etching the information recording portion.

【0013】[0013]

【作用】本発明の光学部材は、レンズと情報記録部を同
一成形品中に有し、個別に製造したレンズと情報記録部
を張り合わせたものではなく、一体成形されているの
で、張り合わせ工程の位置合わせの問題が無く、精度・
再現性が向上し、張り合わせ時の気泡の抱き込み、ゴミ
等の不純物の混入が無くなり品質の向上が図られ、併せ
て製造工程を簡素化することができる。
The optical member of the present invention has a lens and an information recording section in the same molded product, and is integrally molded instead of bonding the individually manufactured lens and the information recording section. There are no alignment problems and accuracy
The reproducibility is improved, the inclusion of air bubbles at the time of bonding and the inclusion of impurities such as dust are eliminated, and the quality is improved. At the same time, the manufacturing process can be simplified.

【0014】また、本発明の情報記録原版は、ニッケル
電鋳により作製されたスタンパーを用いた場合と比較し
て、情報記録原版の製造工程の簡略化が図れる。また、
情報記録部を除去した後に再度情報記録層を形成するこ
とによって、情報記録原版の再利用が可能となる。
Further, in the information recording original plate of the present invention, the manufacturing process of the information recording original plate can be simplified as compared with the case where a stamper produced by nickel electroforming is used. Also,
The information recording original plate can be reused by forming the information recording layer again after removing the information recording portion.

【0015】更に従来のスタンパーと異なり取り扱いに
さほどの注意を要しない。すなわち、本発明の情報記録
原版は、金型母体表面に信号が記録されており、厚さも
スタンパーの300μmと比較して充分に厚いために、
取扱いの際に記録面を損傷する心配がない。また、成形
時において異質素材を成形用キャビティー内に設ける必
要がなく、原版に直接温度調節回路を設けることができ
熱分布が均一となるので、従来法におけるそりの原因を
なくすとともに、製造サイクルを短縮することも可能と
なる。
Further, unlike conventional stampers, it does not require much attention in handling. That is, in the information recording original plate of the present invention, the signal is recorded on the surface of the mold base, and the thickness is sufficiently thick as compared with 300 μm of the stamper.
There is no risk of damaging the recording surface during handling. In addition, since it is not necessary to provide a foreign material in the molding cavity during molding, a temperature control circuit can be directly installed in the original plate, and the heat distribution becomes uniform, eliminating the cause of warpage in the conventional method and improving the manufacturing cycle. It is also possible to shorten.

【0016】また、金属基体表面上には窒化チタン等の
耐食性被覆層を形成したので、情報記録層のエッチング
の際に使用するエッチング液は、金属基体の材料とは無
関係に、情報記録層のエッチング特性に応じて選ぶこと
ができ、耐食性被覆層として窒化チタンのように硬度が
大きな物質の被覆層を形成したので、情報記録原版の耐
久性が向上する。
Further, since the corrosion-resistant coating layer such as titanium nitride is formed on the surface of the metal substrate, the etching solution used for etching the information recording layer is irrespective of the material of the metal substrate. It can be selected according to the etching characteristics, and since the coating layer made of a material having a high hardness such as titanium nitride is formed as the corrosion resistant coating layer, the durability of the information recording original plate is improved.

【0017】成形方法としては、圧縮成形、トランスフ
ァー成形、射出成形、射出圧縮成形が用いられる。いず
れの方法を用いてもエンボス加工法や、フォトポリマー
法よりも情報の転写性は優れているが、射出成形あるい
は射出圧縮成形が好ましい。本発明は、ピックアップレ
ンズ、マイクロレンズ、ホログラムレンズ等の光学素
子、従来の方式とは異なる光ディスク、光カード、ディ
スプレイ用ホログラム等に使用でき、応用範囲は広い。
以下に、具体的な原版作製方法および成形方法を以下に
示す。
As the molding method, compression molding, transfer molding, injection molding, and injection compression molding are used. Although either method is superior in information transferability to the embossing method or the photopolymer method, injection molding or injection compression molding is preferable. INDUSTRIAL APPLICABILITY The present invention can be applied to optical elements such as a pickup lens, a microlens, a hologram lens, an optical disk different from the conventional method, an optical card, a hologram for a display, and the like, and has a wide range of applications.
The specific method for producing the original plate and the method for forming will be described below.

【0018】[0018]

【実施例】図1は、本発明の光学部材の1実施例を示
し、(a)は平面図、(b)は側面図を示す。光学部材
1にはレンズ部2と情報記録部3を有しており、レンズ
部と情報記録部は一体に成形されている。図2は、本発
明の光学部材の製造用の金型4の1実施例を示している
が、金型の内部にはレンズ形成用の入れ子5、情報記録
原版である情報記録部成形用の入れ子6から構成されて
おり、金型内に樹脂を充填して成形し光学部材を製造す
る。
FIG. 1 shows an embodiment of the optical member of the present invention, (a) is a plan view and (b) is a side view. The optical member 1 has a lens portion 2 and an information recording portion 3, and the lens portion and the information recording portion are integrally formed. FIG. 2 shows one embodiment of a mold 4 for manufacturing an optical member of the present invention. Inside the mold, a lens forming nest 5 and an information recording original plate for forming an information recording portion are formed. It is composed of the nest 6, and the optical member is manufactured by filling the mold with resin and molding.

【0019】情報記録原版の作製方法について、図面を
参照して説明する。図3(A)は、情報記録原版の断面
図である。析出硬化鋼、ステンレス鋼、超鋼合金などの
金属で形成された金属基体7上には、窒化チタン、炭化
チタン、炭窒化チタン等の耐食性被覆層8が形成されて
おり、更に耐食性被覆層上にはクロム、ニッケル等の金
属またはその合金等の情報記録層9が形成されており、
エッチング等によって情報記録部10が設けられてい
る。
A method for producing the information recording original plate will be described with reference to the drawings. FIG. 3A is a sectional view of the information recording original plate. A corrosion resistant coating layer 8 of titanium nitride, titanium carbide, titanium carbonitride or the like is formed on a metal substrate 7 formed of a metal such as precipitation hardened steel, stainless steel, or super steel alloy, and further on the corrosion resistant coating layer. An information recording layer 9 made of a metal such as chromium or nickel or an alloy thereof is formed on the
The information recording unit 10 is provided by etching or the like.

【0020】図4は、情報記録原版の製造方法を順に示
したものである。まず、図4(A)に示すように、所定
の形状に機械加工し、表面を鏡面研磨した金属基体7上
に窒化チタンからなる耐食性被覆層8を形成する。金属
基体の鏡面度は最大表面粗さ0.1μm以下とし、特に
0.02μm以下が好ましい。
FIG. 4 shows a method of manufacturing the information recording original plate in order. First, as shown in FIG. 4 (A), a corrosion-resistant coating layer 8 made of titanium nitride is formed on a metal substrate 7 whose surface is mirror-polished by machining into a predetermined shape. The mirror surface of the metal substrate has a maximum surface roughness of 0.1 μm or less, preferably 0.02 μm or less.

【0021】耐食性被覆層の形成は、CVD法、または
蒸着、スパッタリングのようなPVD法等によって形成
することができるが、耐食性被覆層の膜厚は膜厚は5μ
m以下、特に2〜3μmが好ましい。また、耐食性被覆
層の膜厚が均一でないか、あるいは表面が滑らかでない
場合には、耐食性被覆層上を鏡面研磨しても良い。
The corrosion-resistant coating layer can be formed by a CVD method or a PVD method such as vapor deposition or sputtering. The thickness of the corrosion-resistant coating layer is 5 μm.
m or less, particularly preferably 2 to 3 μm. When the thickness of the corrosion-resistant coating layer is not uniform or the surface is not smooth, the corrosion-resistant coating layer may be mirror-polished.

【0022】次いで、耐食性被覆層上にニッケル、クロ
ム等の金属等からなる情報記録層9を形成する。情報記
録層の膜厚は成形品の情報記録部のグルーブ深さと等し
くなるように形成する。また、情報記録層の密着性が低
い場合には、耐食性被覆層をサンドブラスト等で粗面化
しても良い。
Next, the information recording layer 9 made of a metal such as nickel or chromium is formed on the corrosion-resistant coating layer. The film thickness of the information recording layer is formed to be equal to the groove depth of the information recording portion of the molded product. Further, when the adhesion of the information recording layer is low, the corrosion resistant coating layer may be roughened by sandblasting or the like.

【0023】情報記録層の形成は、スパッタリング、蒸
着、めっき等の各種の膜形成方法を用いることができる
が、特にスパッタリングが好ましい。また、情報記録層
の膜厚が均一でないかあるいは表面が滑らかでない場合
には情報記録層を鏡面研磨してもよい。
The information recording layer can be formed by various film forming methods such as sputtering, vapor deposition and plating, but sputtering is particularly preferable. If the thickness of the information recording layer is not uniform or the surface is not smooth, the information recording layer may be mirror-polished.

【0024】次いで図4(B)に示すように、情報記録
層上にフォトレジスト膜11をスピンナー等によって被
覆した後にプリベークした後に、所定の記録すべき情報
を描いたフォトマスク12を介して紫外線によってフォ
トレジストを露光した。フォトレジストは、ネガ型、ポ
ジ型等の任意のものを使用することができる。
Next, as shown in FIG. 4B, after the photoresist film 11 is coated on the information recording layer with a spinner or the like and prebaked, ultraviolet rays are passed through a photomask 12 in which predetermined information to be recorded is drawn. The photoresist was exposed by. As the photoresist, any type such as negative type and positive type can be used.

【0025】図4(C)に示すように、フォトレジスト
を現像処理を行い、ポストベークしてフォトレジストの
パターンを形成した。
As shown in FIG. 4C, the photoresist was developed and post-baked to form a photoresist pattern.

【0026】図4(D)に示すように、得られたパター
ンに基づいて情報記録層9をエッチングし情報記録部1
0を形成した後に、フォトレジストを除去し情報記録原
版を形成した。エッチングは、情報記録層の材質に応じ
て適宜選択することが可能であり、湿式、乾式いずれの
方法を用いることもできるが、本発明の方法では耐食性
被覆層を金属基体上に形成しているので、エッチングに
よる金属基体の損傷を防止することができる。エッチン
グの終了後には、フォトレジストを除去して情報記録原
版を製造する。得られた情報記録原版とレンズ用の入れ
子を金型に装着して、ポリカーボネート樹脂、メタクリ
ル樹脂等を射出成形することによってレンズ部と情報記
録部とを一体に成形した光学部材を製造することができ
る。
As shown in FIG. 4D, the information recording layer 9 is etched based on the obtained pattern, and the information recording portion 1 is formed.
After forming 0, the photoresist was removed to form an information recording original plate. The etching can be appropriately selected according to the material of the information recording layer, and either a wet method or a dry method can be used, but in the method of the present invention, the corrosion resistant coating layer is formed on the metal substrate. Therefore, it is possible to prevent damage to the metal substrate due to etching. After the etching is completed, the photoresist is removed to manufacture the information recording original plate. It is possible to manufacture an optical member in which the lens portion and the information recording portion are integrally formed by mounting the obtained information recording original plate and the lens insert in a mold and injection-molding a polycarbonate resin, a methacrylic resin or the like. it can.

【0027】実施例1 直径30mm、厚み30mmの析出硬化鋼からなる金属
基体の表面をダイヤモンドペーストによって、鏡面処理
をした後に、PVD法によって、金属基体の表面に厚み
3μmの窒化チタンからなる耐食性被膜を形成した。次
いで、耐食性被膜上に金属クロム層をスパッタリングに
よって形成し、金属クロム層上にフォトレジストとし
て、ポジ型レジストを塗布し、フォトマスクを介して5
Wの水銀灯によって露光し、現像した後にポストベーク
しレジストのパターンを形成した。次いで、硝酸セリウ
ムの溶液によってクロム層をエッチングした。エッチン
グの終了後メチルエチルケトンによってフォトレジスト
を除去して情報記録部を形成した。得られた情報記録原
版とレンズ成形用型とを射出成形機用の金型に装着して
メタクリル樹脂を充填してレンズと情報記録部を有する
光学部材が得られた。
Example 1 A surface of a metal substrate made of precipitation hardened steel having a diameter of 30 mm and a thickness of 30 mm was mirror-finished with diamond paste, and then a PVD method was used to form a corrosion-resistant coating of titanium nitride having a thickness of 3 μm on the surface of the metal substrate. Formed. Then, a metal chromium layer is formed on the corrosion-resistant coating by sputtering, a positive resist is applied as a photoresist on the metal chromium layer, and a positive resist is applied through a photomask.
It was exposed by a W mercury lamp, developed, and post-baked to form a resist pattern. The chromium layer was then etched with a solution of cerium nitrate. After the etching was completed, the photoresist was removed with methyl ethyl ketone to form an information recording portion. The obtained information recording original plate and the lens molding die were mounted on a mold for an injection molding machine and filled with a methacrylic resin to obtain an optical member having a lens and an information recording portion.

【0028】[0028]

【発明の効果】本発明の光学部材は、レンズ部と情報記
録部とを一体に成形したものであり、製造工程の簡略
化、品質の向上、レンズと情報記録部との位置関係精度
の向上、品質の安定化などを図ることができ、同時に本
発明の光学部材の製造に適用した情報記録原版には、情
報記録層にエッチング等によって直接に情報記録部を形
成したので、原版作製工程の簡略化が図れる。
The optical member of the present invention is formed by integrally molding the lens portion and the information recording portion, and simplifies the manufacturing process, improves the quality, and improves the positional relationship accuracy between the lens and the information recording portion. In addition, since it is possible to stabilize the quality and at the same time, in the information recording original plate applied to the production of the optical member of the present invention, the information recording portion is directly formed in the information recording layer by etching or the like. It can be simplified.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の光学部材の1実施例を示す図。FIG. 1 is a diagram showing an embodiment of an optical member of the present invention.

【図2】本発明の光学部材の成形用金型の断面を示す図
である。
FIG. 2 is a view showing a cross section of a molding die for an optical member of the present invention.

【図3】本発明中の情報記録原版の断面図。FIG. 3 is a sectional view of an information recording original plate according to the present invention.

【図4】情報記録原版の製造工程を示す図。FIG. 4 is a diagram showing a manufacturing process of an information recording original plate.

【符号の説明】[Explanation of symbols]

1…光学部材、2…レンズ部、3…情報記録部、4…金
型、5…レンズ形成用の入れ子、6…情報記録部成形用
の入れ子、7…金属基体、8…耐食性被覆層、9…情報
記録層、10…情報記録部、11…フォトレジスト膜、
12…フォトマスク
DESCRIPTION OF SYMBOLS 1 ... Optical member, 2 ... Lens part, 3 ... Information recording part, 4 ... Metal mold | die, 5 ... Nest for lens formation, 6 ... Nest for molding information recording part, 7 ... Metal base | substrate, 8 ... Corrosion resistant coating layer, 9 ... Information recording layer, 10 ... Information recording portion, 11 ... Photoresist film,
12 ... Photomask

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 レンズと情報記録部を有する光学部材に
おいて、レンズと情報記録部が一体に成形した成形品中
に設けられていることを特徴とする光学部材。
1. An optical member having a lens and an information recording section, wherein the lens and the information recording section are provided in a molded product integrally molded.
【請求項2】 金属基体上の耐食性被覆層上の情報記録
層にエッチングによって情報記録部を形成した情報記録
原版とレンズ形成用型とを設けた金型によってレンズと
情報記録部とを一体に形成したことを特徴とする光学部
材。
2. A lens and an information recording section are integrally formed by a mold provided with an information recording original plate having an information recording section formed by etching on an information recording layer on a corrosion resistant coating layer on a metal substrate and a lens forming die. An optical member characterized by being formed.
【請求項3】 金属基体上に形成した耐食性被覆層上の
情報記録層に形成した情報記録部を有する情報記録原版
とレンズ形成用型とを金型内部に装着して充填した合成
樹脂を一体に成形することを特徴とする光学部材の製造
方法。
3. An information recording original plate having an information recording portion formed on an information recording layer on a corrosion-resistant coating layer formed on a metal substrate, and a lens forming die mounted inside a mold and a synthetic resin filled therein. A method for producing an optical member, which comprises:
JP3063692A 1992-02-18 1992-02-18 Optical member and its production Pending JPH05232302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3063692A JPH05232302A (en) 1992-02-18 1992-02-18 Optical member and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3063692A JPH05232302A (en) 1992-02-18 1992-02-18 Optical member and its production

Publications (1)

Publication Number Publication Date
JPH05232302A true JPH05232302A (en) 1993-09-10

Family

ID=12309327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3063692A Pending JPH05232302A (en) 1992-02-18 1992-02-18 Optical member and its production

Country Status (1)

Country Link
JP (1) JPH05232302A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002029450A1 (en) * 2000-10-04 2002-04-11 Sony Corporation Optical element, metal mold for producing optical element and production method for optical element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002029450A1 (en) * 2000-10-04 2002-04-11 Sony Corporation Optical element, metal mold for producing optical element and production method for optical element
US6717738B2 (en) 2000-10-04 2004-04-06 Sony Corporation Optical element, metal mold for producing optical element and production method for optical element

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